A coating preparation process with a bipolar loop lower electrode

Abstract

The present invention discloses a coating-type preparation process for a lower electrode with a bipolar loop, which belongs to the technical field of lower electrode production. First, a lower insulating layer is formed on the surface of a substrate by an additive method; then a shielding fixture is laid on the lower insulating layer, and the shape of the shielding fixture corresponds to the shape of the electrode loop to be formed; then, a loop electrode material is coated on the shielding fixture by a uniform coating device, and the loop electrode material is in a paste form. By coating the material in a ring-shaped manner from the inside to the outside on the surface of the lower insulating layer, the unshielded area on the lower insulating layer is uniformly coated; after forming the electrode layer loop, an upper insulating layer is formed, and finally the upper insulating layer is ground to make the surface of the upper insulating layer flat. The process of the present invention not only saves the time of grinding processing, but also reduces the defective rate and saves the costs of materials, labor, equipment, etc. caused by rework by changing the production method of the electrode loop to paste coating.

Description

Technical Field

[0001] The invention belongs to the technical field of lower electrode manufacturing, and in particular relates to a coating-type preparation process of a lower electrode with a bipolar loop. Background Art

[0002] In the existing semiconductor or panel production OLED industry, the silicon crystal or glass panel is fixed and adsorbed by electrostatic adsorption to better etch it. In the circuit formation process of the lower electrode, the following process sequence is usually followed: 1) the upper and lower insulating layers are first sprayed on the surface of the substrate by plasma spraying, 2) the W (tungsten) or Mo (molybdenum) powder is sprayed on the coating surface of step 1) as the electrode layer by the same plasma spraying method; 3) the coating formed in step 2) is processed into two different cross circuits according to the required circuit shape by processing equipment, 4) the powder is melted by plasma spraying again and the insulating coating is covered on the processed electrode layer surface. The disadvantages of this process are:

[0003] a. Since the surface of the first insulating coating layer has a certain degree of roughness after formation, during the grinding process of the electrode layer, a small amount of electrode layer remains on the surface of the lower insulating layer in the area where there should be no electrode layer, which may cause electrical problems.

[0004] b. The width and spacing of the two electrode loops are only 1.2mm, and the required precision is high. During the processing, it is very easy to cause uneven grinding lines, deflection, burrs, etc. due to the wear of the grinding tool. Once these problems occur, they cannot be repaired. The sprayed electrode layer can only be ground and then sprayed again and processed again. This reciprocating process increases costs due to the high defect rate. The lower electrode of Bi-Polar needs to add a high voltage of 1.5Kv to 3Kv to the + and - electrode layers respectively. Therefore, the stability of the electrode layer is very important. The current grinding processing method has the same problems as a and b, which may lead to quality problems such as Arcing (conduction burst) between the two electrode layers. Summary of the invention

[0005] In view of this, the purpose of the present invention is to provide a coating preparation process for a lower electrode with a bipolar loop. By changing the production method of the electrode loop to paste coating, it not only saves the time of grinding processing, reduces the defective rate, but also saves the costs of materials, labor, equipment, etc. caused by rework.

[0006] In order to achieve the above object, the present invention provides the following technical solutions:

[0007] The present invention provides a coating-type preparation process for a lower electrode having a bipolar loop, comprising the following steps:

[0008] A. Forming a lower insulating layer: forming a lower insulating layer on the surface of the substrate by additive method;

[0009] B. Laying a shielding fixture; Laying a shielding fixture on the lower insulating layer, wherein the shape of the shielding fixture corresponds to the shape of the electrode loop to be formed;

[0010] C. coating, coating the return electrode material on the shielding fixture by a uniform coating device, wherein the return electrode material is in a paste form, and the unshielded area on the lower insulating layer is uniformly coated by coating in a ring-shaped manner from the inside to the outside on the surface of the lower insulating layer;

[0011] D. Forming electrode layer loops: Remove the shielding fixture, wait for the loop electrode material to solidify, and then form two electrode layer loops on the lower insulating layer;

[0012] E. forming an upper insulating layer: using an additive method to cover the surface of the lower insulating layer and the loop electrode layer with an insulating layer to form an upper insulating layer;

[0013] F. Grinding the upper insulating layer: Grind the upper insulating layer to make the surface of the upper insulating layer smooth. After grinding, the loop electrode layer must not be exposed to obtain the lower electrode.

[0014] Furthermore, in step C, the loop electrode material includes silver, and the coating thickness of the loop electrode material is 30 to 50 μm.

[0015] Furthermore, the material of the lower insulating layer and the upper insulating layer is one of Al2O3 and Y2O3, and the thickness of the lower insulating layer and the upper insulating layer is 400±40 μm.

[0016] Furthermore, the uniform coating device includes a coating tube and a lower device body for installing the coating tube, the lower device body is provided with an electrode material delivery channel and a sealing liquid delivery channel, the electrode material delivery channel is connected to the upper end of the coating tube, the sealing liquid delivery channel is connected to the upper side of the coating tube, an intermittent feeding device is arranged in the sealing liquid delivery channel, a sealing liquid injection port is provided in the sealing liquid delivery channel, an electrode material injection port is provided in the electrode material delivery channel, and electrode material and sealing liquid are arranged at staggered intervals in the coating tube.

[0017] Furthermore, an electrode material feeding channel is provided at the lower portion of the lower device body, and the electrode material feeding channel is connected to the middle portion of the coating tube. An observation window is provided at the upper portion of the lower device body, and a laser sensor is also arranged in the observation window.

[0018] Furthermore, the intermittent feeding device includes a piston, a first connecting rod, a second connecting rod and a first driving device. The piston is slidably arranged in the sealing liquid delivery channel up and down, and the sealing liquid injection port is located below the piston. One end of the first connecting rod is hinged to the piston, and the other end is hinged to one end of the second connecting rod. The other end of the second connecting rod is hinged to the output end of the first driving device.

[0019] Furthermore, a cylinder is provided in the sealing liquid delivery channel, a material delivery channel is formed in the cylinder, a core is provided in the material delivery channel, a leakage port is opened on the side of the core, and the core is connected to the bracket through a first spring, and the first spring provides a left pre-tightening force to the core so that the core can block the material delivery channel.

[0020] Furthermore, the lower end of the coating tube is also connected to a coating joint, and a coating ball is also provided at the lower end of the coating joint. The lower side of the coating ball is limited at the lower end of the coating joint by a baffle, and a plurality of grooves are opened on the surface of the coating ball. The upper side of the coating ball abuts against an arc plate, and the upper end of the arc plate is fixedly connected to a guide rod, and the upper end of the guide rod is slidably passed through a mounting frame, and the mounting frame is fixedly set on the inner wall of the coating joint. A second spring is sleeved on the guide rod, and a first limiting portion and a second limiting portion are provided on the guide rod at both sides of the mounting frame, and the upper and lower ends of the second spring abut against the second limiting portion and the arc plate respectively.

[0021] Furthermore, an upper device body is provided on the upper side of the lower device body, and a core rod is fixed on the upper end of the lower device body, the core rod is slidably inserted into the rotating mating piece, and the outer surface of the core rod is evenly distributed with arc-shaped vertical grooves for circumferential limiting, the rotating mating piece is rotatably matched with the upper device body, the upper end of the core rod passes through the rotating mating piece and a third limiting portion is provided at the end portion, a third spring is sleeved on the outer side of the core rod, and the two ends of the third spring are respectively abutted against the third limiting portion and the rotating mating piece, the upper device body is fixedly connected to the output end of a hydraulic cylinder, the hydraulic cylinder is fixed on the frame, and the outer side of the rotating mating piece is fixedly connected to a first pulley, the first pulley is connected to a second pulley via a belt, the second pulley is driven to rotate by a second driving device, and the second driving device is fixedly connected to the upper device body.

[0022] The beneficial effects of the present invention are:

[0023] The present invention discloses a coating-type preparation process for a lower electrode with a bipolar loop. By changing the manufacturing method of the electrode loop from grinding to paste coating, the problems of uneven grinding lines, deflection, burrs, etc., which are very likely to occur during the processing due to wear of the grinding tool, are avoided, thereby avoiding the generation of arcing, which not only saves the grinding processing time, reduces the defective rate, but also saves the costs of materials, labor, equipment, etc. caused by rework.

[0024] The process of the present invention uses a uniform coating device to coat the unshielded area on the lower insulating layer evenly, so that the upper electrode loop can be formed smoothly with higher precision. The sealing liquid can be inserted between the electrode materials at intervals by adjusting, so that each section of the electrode material can be evenly separated. At this time, each section of the electrode material corresponds to the coating of a product, so that the metal paste can be quantitatively coated on each product, ensuring the uniformity of the coating and the consistency of the product, which is convenient for subsequent unified processing and production.

[0025] Other advantages, objectives and features of the present invention will be described in the following description and will be apparent to those skilled in the art to some extent, or those skilled in the art may be taught from the practice of the present invention. The objectives and other advantages of the present invention may be realized and obtained through the following description. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to make the purpose, technical solution and beneficial effects of the present invention clearer, the present invention provides the following drawings for illustration:

[0027] Figure 1 is a process flow chart of the present invention;

[0028] Figure 2 It is a structural schematic diagram of the uniform coating device of the present invention;

[0029] Figure 3 for Figure 2 A magnified view at point A;

[0030] Figure 4 for Figure 2 Enlarged view at B;

[0031] Figure 5 This is a schematic diagram of the installation of the cylinder;

[0032] Figure 6 A schematic cross-sectional view of the core rod.

[0033] The markings in the accompanying drawings are as follows: coating tube 1, lower device body 2, electrode material conveying channel 3, electrode material conveying channel 4, intermittent feeding device 5, sealing liquid injection port 6, electrode material injection port 7, electrode material replenishing channel 8, observation window 9, laser sensor 10, piston 11, first connecting rod 12, second connecting rod 13, first driving device 14, cylinder 15, feeding channel 16, core body 17, leakage port 18, first spring 19, bracket 20, coating joint 21, coating ball 22, baffle 23, groove 24, arc plate 25, guide rod 26, mounting frame 27, second spring 28, first limiting part 29, second limiting part 30, upper device body 31, core rod 32, rotating mating part 33, arc vertical groove 34, third limiting part 35, third spring 36, hydraulic cylinder 37, frame 38, first pulley 39, belt 40, second pulley 41, second driving device 42. DETAILED DESCRIPTION

[0034] The following, such as Figure 1 As shown, the present invention provides a coating-type preparation process for a lower electrode having a bipolar loop, comprising the following steps:

[0035] A. Forming a lower insulating layer: forming a lower insulating layer on the surface of the substrate by additive method; before that, the substrate can be positioned by relevant positioning equipment, and the substrate can be positioned directly. The relevant positioning principle is in the existing technology and will not be repeated here.

[0036] B. Laying a shielding fixture; laying a shielding fixture on the lower insulating layer, the shape of the shielding fixture corresponds to the shape of the electrode loop to be formed; that is, the shape is opposite to the shape of the electrode loop to be formed, and the shielding fixture is made of a material that can withstand high temperatures.

[0037] C. coating, coating the return electrode material on the shielding fixture by a uniform coating device, the return electrode material being in a paste form, and coating the material in a circular manner from the inside to the outside on the surface of the lower insulating layer so that the unshielded area on the lower insulating layer is uniformly coated;

[0038] D. Forming an electrode layer loop: Remove the masking fixture and wait for the loop electrode material to solidify, so that two electrode layer loops can be formed on the lower insulating layer;

[0039] E. forming an upper insulating layer: using an additive method to cover the surface of the lower insulating layer and the loop electrode layer with an insulating layer to form an upper insulating layer;

[0040] F. Grinding the upper insulating layer: Grind the upper insulating layer to make the surface of the upper insulating layer smooth. The loop electrode layer must not be exposed after grinding to obtain the lower electrode.

[0041] In this embodiment, in step C, the loop electrode material includes silver, and a metal material with a low melting point such as copper may also be used. The coating thickness of the loop electrode material is 30-50 μm.

[0042] In this embodiment, the material of the lower insulating layer and the upper insulating layer is one of Al2O3 and Y2O3, and the thickness of the lower insulating layer and the upper insulating layer is 400±40 μm.

[0043] In this embodiment, Figure 2-5 As shown, the uniform coating device includes a coating tube 1 and a lower device body 2 for installing the coating tube 1. The coating tube 1 is a vertical straight tube. The coating tube 1 is also made of high temperature resistant material. A center hole for installing the coating tube 1 is arranged at the center of the lower device body 2. The lower device body 2 is provided with an electrode material delivery channel 3 and a sealing liquid delivery channel. The sealing liquid can be made of a high temperature resistant resin material, which can be heated and volatilized after the coating is completed. For example, silicone resin can be used. The upper end of the pre-coating tube 1 of the electrode material delivery channel 3 is connected, and the sealing liquid delivery channel is connected to the upper side of the coating tube 1. An intermittent feeding device 5 is arranged in the sealing liquid delivery channel. A sealing liquid injection port 6 is arranged on the sealing liquid delivery channel. An electrode material injection port 7 is arranged on the electrode material delivery channel 3. Electrode materials and sealing liquids are arranged in staggered intervals in the coating tube 1. Through the intermittent feeding of the intermittent feeding device 5, the electrode material and the sealing liquid can be arranged in a staggered manner in the coating tube 1, that is, they are arranged in sequence in the manner of electrode material-sealing liquid-electrode material-sealing liquid-electrode material...

[0044] If the coating is directly carried out in a continuous manner, the electrode material at the end of the coating tube 1 is affected by the tension, resulting in the inability to accurately control the coating amount. The present invention improves this coating method by adjusting the sealing liquid to be inserted between the electrode materials at intervals, so that each section of the electrode material can be evenly separated. At this time, each section of the electrode material corresponds to the coating of a product, which can ensure that the metal paste can be quantitatively coated on each product, ensuring the uniformity of the coating and the consistency of the product, and facilitating subsequent unified processing and production.

[0045] In this embodiment, even if there is a small error between each section of electrode material, the present application also provides an electrode material replenishing channel 8 at the lower part of the lower device body 2. Of course, it is necessary to set a relevant injection valve in the electrode material replenishing channel 8 to avoid the problem of electrode material backflow. The electrode material replenishing channel 8 is connected to the middle part of the coating tube 1. An observation window 9 is provided in the upper part of the lower device body 2, and the material transportation situation can be manually observed. A laser sensor 10 is also provided in the observation window 9, which can detect the interface between the electrode material and the sealing liquid to obtain the Z-axis coordinates of the two adjacent interfaces. The length of each section of electrode material can be obtained by connecting to a computer. The relevant detection and calculation principles belong to the prior art and are not within the protection scope of this application, so they will not be repeated here.

[0046] In this embodiment, the intermittent feeding device 5 includes a piston 11, a first connecting rod 12, a second connecting rod 13 and a first driving device 14. The piston 11 can be slidably arranged in the sealing liquid delivery channel up and down. The sealing liquid injection port 6 is located below the piston 11. One end of the first connecting rod 12 is hinged to the piston 11, and the other end is hinged to one end of the second connecting rod 13. The other end of the second connecting rod 13 is hinged to the output end of the first driving device 14. The first driving device 14 rotates through the second connecting rod 13, and the second connecting rod 13 drives the piston 11 through the first connecting rod 12, so that the piston 11 can push the sealing liquid back and forth up and down. Of course, the first driving device 14 includes a reducer, which can provide the injection speed of the sealing liquid as needed. The formation of the piston 11 can correspond to the injection length of the sealing liquid. The sealing liquid can be replenished from the sealing liquid injection port 6 and pushed into the coating tube 1 under the action of the piston 11 to achieve a uniform injection effect. Of course, when the sealing liquid injection port 6 is connected to the oil replenishing device, a valve should also be set at the sealing liquid injection port 6 to avoid the backflow of the sealing liquid.

[0047] In this embodiment, a cylinder 15 is also provided in the sealing liquid delivery channel. The cylinder 15 is sealed and fixed in the sealing liquid delivery channel, and can also be integrally formed in the sealing liquid delivery channel. A feed channel 16 is formed in the cylinder 15. A core 17 is provided in the feed channel 16. A leakage port 18 is provided on the side of the core 17. The core 17 is connected to the bracket 20 through a first spring 19. The first spring 19 provides a leftward pre-tightening force to the core 17, so that the core 17 can block the feed channel 16. When the piston 11 applies force, the sealing liquid acts on the core 17, and the core 17 is pushed to the right after breaking free from the restraint of the first spring 19. At this time, the core 17 is opened to connect the feed channel 16. The sealing liquid enters the center of the core 17 through the leakage port 18, and then enters the other side of the core 17, and is pushed into the coating tube 1 under the action of the piston 11. On the contrary, after the pushing is completed, the first spring 19 provides a left pre-tightening force to the core 17, so that the core 17 can block the feed channel 16 to prevent the electrode material from flowing back into the feed channel 16. At this point, a stroke of the sealing liquid pushing work is completed. This principle is also applicable to the electrode material delivery channel 3, which should be understandable to those skilled in the art.

[0048] In this embodiment, the lower end of the coating tube 1 is also connected to a coating joint 21, and a coating ball 22 is also provided at the lower end of the coating joint 21. The lower side of the coating ball 22 is limited at the lower end of the coating joint 21 by a baffle 23. A plurality of grooves 24 are provided on the surface of the coating ball 22, which can be used to receive the electrode material and sealing liquid above. An arc plate 25 is abutted against the upper side of the coating ball 22, and the upper end of the arc plate 25 is fixedly connected to a guide rod 26. The upper end of the guide rod 26 is slidably penetrated on a mounting frame 27, and the mounting frame 27 is fixedly set on the inner wall of the coating joint 21. A second spring 28 is sleeved on the guide rod 26. A first limiting portion 29 and a second limiting portion 30 are provided on the guide rod 26 on both sides of the mounting frame 27. The upper and lower ends of the second spring 28 are respectively abutted against the second limiting portion 30 and the arc plate 25, which are used to limit the stroke and prevent the electrode material and the sealing liquid from flowing out quickly.

[0049] In this embodiment, an upper device body 31 is further provided on the upper side of the lower device body 2, and a core rod 32 is further fixed to the upper end of the lower device body 2. The core rod 32 is slidably inserted into the rotating fitting 33. Figure 6As shown, the outer surface of the core rod 32 is evenly distributed with arc-shaped vertical grooves 34 for circumferential limiting, the rotating matching piece 33 is rotatably matched with the upper device body 31, the upper end of the core rod 32 passes through the rotating matching piece 33 and is provided with a third limiting portion 35 at the end, and the outer side of the core rod 32 is sleeved with a third spring 36, and the two ends of the third spring 36 are respectively abutted against the third limiting portion 35 and the rotating matching piece 33, the upper device body 31 is fixedly connected to the output end of a hydraulic cylinder 37, and the hydraulic cylinder 37 is fixed on the frame 38, and the outer side of the rotating matching piece 33 is fixedly connected to a first pulley 39, and the first pulley 39 is connected to a second pulley 41 through a belt 40, and the second pulley 41 is driven to rotate by a second driving device 42, and the second driving device 42 is fixedly connected to the upper device body 31.

[0050] Finally, it should be noted that the above preferred embodiments are only used to illustrate the technical solutions of the present invention rather than to limit it. Although the present invention has been described in detail through the above preferred embodiments, those skilled in the art should understand that various changes can be made in form and details without departing from the scope defined by the claims of the present invention.

Claims

1. A coating preparation process with a bipolar loop lower electrode, characterized in that: The following steps are involved: A. Forming a lower insulating layer: forming a lower insulating layer on the surface of the substrate by an additive method; B. Laying a shielding fixture; Laying a shielding fixture on the lower insulating layer, wherein the shape of the shielding fixture corresponds to the shape of the electrode loop to be formed; C. coating, coating the return electrode material on the shielding fixture by a uniform coating device, wherein the return electrode material is in a paste form, and the unshielded area on the lower insulating layer is uniformly coated by coating in a ring-shaped manner from the inside to the outside on the surface of the lower insulating layer; D. Forming electrode layer loops: Remove the shielding fixture, wait for the loop electrode material to solidify, and then form two electrode layer loops on the lower insulating layer; E. forming an upper insulating layer: using an additive method to cover the surface of the lower insulating layer and the loop electrode layer with an insulating layer to form an upper insulating layer; F. Grinding the upper insulating layer: Grind the upper insulating layer to make the surface of the upper insulating layer flat. After grinding, the loop electrode layer must not be exposed to obtain the lower electrode; The uniform coating device comprises a coating tube and a lower device body for installing the coating tube, the lower device body is provided with an electrode material delivery channel and a sealing liquid delivery channel, the electrode material delivery channel is communicated with the upper end of the coating tube, the sealing liquid delivery channel is communicated with the upper side of the coating tube, an intermittent feeding device is arranged in the sealing liquid delivery channel, a sealing liquid injection port is provided in the sealing liquid delivery channel, an electrode material injection port is provided in the electrode material delivery channel, and electrode materials and sealing liquids are arranged in staggered intervals in the coating tube; The lower part of the lower device body is also provided with an electrode material feeding channel, the electrode material feeding channel is connected with the middle part of the coating tube, and the upper part of the lower device body is provided with an observation window, and a laser sensor is also arranged in the observation window; The intermittent feeding device comprises a piston, a first connecting rod, a second connecting rod and a first driving device, wherein the piston is slidably arranged in the sealing liquid delivery channel, the sealing liquid injection port is located below the piston, one end of the first connecting rod is hinged to the piston, and the other end is hinged to one end of the second connecting rod, and the other end of the second connecting rod is hinged to the output end of the first driving device; The sealing liquid delivery channel is also provided with a cylinder, a material delivery channel is formed in the cylinder, a core is provided in the material delivery channel, a material leakage port is opened on the side of the core, and the core is connected to the bracket through a first spring, and the first spring provides a leftward pre-tightening force to the core, so that the core can block the material delivery channel; The lower end of the coating tube is also connected to a coating joint, and a coating ball is also provided at the lower end of the coating joint. The lower side of the coating ball is limited at the lower end of the coating joint by a baffle, and a plurality of grooves are provided on the surface of the coating ball. The upper side of the coating ball abuts against an arc plate, and the upper end of the arc plate is fixedly connected to a guide rod, and the upper end of the guide rod is slidably penetrated on a mounting frame, and the mounting frame is fixedly provided on the inner wall of the coating joint. A second spring is sleeved on the guide rod, and a first limiting portion and a second limiting portion are provided on both sides of the mounting frame on the guide rod, and the upper and lower ends of the second spring abut against the second limiting portion and the arc plate respectively; The upper device body is also provided on the upper side of the lower device body, and a core rod is also fixed on the upper end of the lower device body, and the core rod is slidably inserted in the rotating fitting, and the outer surface of the core rod is evenly distributed with arc-shaped vertical grooves for circumferential limiting. The rotating fitting is rotatably matched with the upper device body, and the upper end of the core rod passes through the rotating fitting and a third limiting portion is provided at the end. A third spring is sleeved on the outer side of the core rod, and the two ends of the third spring are respectively abutted against the third limiting portion and the rotating fitting. The upper device body is fixedly connected to the output end of a hydraulic cylinder, and the hydraulic cylinder is fixed on the frame, and a first pulley is fixedly connected to the outer side of the rotating fitting, and the first pulley is connected to the second pulley via a belt, and the second pulley is driven to rotate by a second driving device, and the second driving device is fixedly connected to the upper device body.

2. The coating preparation process of the lower electrode with a bipolar loop according to claim 1, characterized in that: In step C, the loop electrode material includes silver, and the coating thickness of the loop electrode material is 30-50 μm.

3. The coating preparation process of the lower electrode with a bipolar loop according to claim 2, characterized in that: The material of the lower insulating layer and the upper insulating layer is one of Al2O3 and Y2O3, and the thickness of the lower insulating layer and the upper insulating layer is 400±40 μm.

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