A method for detecting the airtightness of a multi-crystalline ingot casting furnace based on water seal

Abstract

The present invention relates to the technical field of polycrystalline ingot furnaces, and discloses a method for detecting the air tightness of a polycrystalline ingot furnace based on water seal. S1: Open the heating component of the polycrystalline ingot furnace to evaporate the moisture in the inner wall, outer wall and water circuit of the polycrystalline ingot furnace; S2: Empty the raw materials and impurities in the polycrystalline ingot furnace, close the valves in the polycrystalline ingot furnace, and reserve a single through pipe. Through the detection method, by detecting the water circuit and checking the air tightness of the polycrystalline ingot furnace, the preliminary position of the crack in the polycrystalline ingot furnace can be judged. By nesting the plastic sleeve bag corresponding to the polycrystalline ingot furnace, when helium enters the plastic sleeve bag through the crack of the polycrystalline ingot furnace, the plastic sleeve bag adsorbed on the outer wall of the polycrystalline ingot furnace shows a fluctuating state, and the crack position is judged, effectively indicating the crack orientation of the polycrystalline ingot furnace, greatly improving the maintenance efficiency, facilitating the detection of water circuit cracks, avoiding water leakage detection, and avoiding the time for workers to repeatedly search for cracks.

Description

Technical Field

[0001] The present invention relates to the technical field of polycrystalline ingot furnaces, and particularly to a method for detecting the airtightness of polycrystalline ingot furnace equipment based on water seal. Background Technique

[0002] The polycrystalline silicon ingot furnace is a process test instrument used in the fields of physics, metallurgical engineering technology, and energy science and technology.

[0003] The existing patent (publication number: CN103981571A) discloses a method for detecting the airtightness of polycrystalline ingot furnace equipment. This patent is beneficial for timely understanding the airtightness of the equipment during the current production cycle, facilitating the timely investigation of factors affecting airtightness, and ensuring the production quality of the current silicon ingot. Moreover, without adding extra production time to the polycrystalline ingot furnace, it increases the inspection of the airtightness of equipment components. When the test result of the second vacuum test in the previous production cycle does not meet the vacuum test standard, the polycrystalline ingot furnace equipment is first inspected to eliminate factors affecting airtightness and then the first vacuum test of the current production cycle is carried out; problems existing in the equipment can be found before the first vacuum test of the current production cycle and repaired in a timely manner; for example, if it is detected during this inspection that the airtightness of the equipment does not meet the requirements, then before the production of the current silicon ingot after the silicon ingot is taken out of the furnace, the reasons affecting the airtightness of the equipment can be found in advance. In this way, the airtightness situation between the connecting components of the furnace cavity can be understood before the first vacuum test in the next cycle, avoiding wasting the time for pumping vacuum in the current production cycle. However, it is difficult to determine the crack orientation, and there is no judgment on where the crack is located or whether there is water leakage, which cannot provide substantial reference for the repair of the polycrystalline ingot furnace, resulting in the need for maintenance personnel to reheat the furnace and pump the furnace body into a vacuum again, causing delays in the repair time and production progress.

[0004] Therefore, we provide a method for detecting the airtightness of polycrystalline ingot furnace equipment based on water seal, which effectively indicates the crack orientation of the polycrystalline ingot furnace, greatly improves the repair efficiency, facilitates the detection of water path cracks, avoids undetected water leakage, and saves the time for workers to repeatedly search for cracks. Summary of the Invention

[0005] The purpose of the present invention is to provide a method for detecting the airtightness of polycrystalline ingot furnace equipment based on water seal, which solves the problems raised in the background technique.

[0006] To achieve the above purpose, the present invention provides the following technical solution: A method for detecting the airtightness of polycrystalline ingot furnace equipment based on water seal,

[0007] S1: Open the heating components of the polycrystalline ingot furnace to evaporate the moisture in the inner wall, outer wall, and water path of the polycrystalline ingot furnace;

[0008] S2: Empty the raw materials and impurities in the polycrystalline ingot furnace, close the valves in the polycrystalline ingot furnace, and leave a single through-pipe.

[0009] S3: Connect the external air pump to the single through-pipe of the polycrystalline ingot furnace, completely enclose the polycrystalline ingot furnace, start the air pump to ventilate through the single through-pipe, and check the air pump pressure gauge.

[0010] S4: Connect the water pump to the water circuit of the polycrystalline ingot furnace and maintain the water pump pressure for 5 - 10 minutes. After the time ends, check the inner and outer walls of the polycrystalline ingot furnace.

[0011] S5: Nest the plastic sleeve bag outside the polycrystalline ingot furnace, evacuate the inside of the polycrystalline ingot furnace to a vacuum. At the same time, wrap the polycrystalline ingot furnace with the plastic sleeve bag, evacuate the air inside the plastic sleeve bag, and maintain the evacuation pressure. Fill helium gas into the inside of the polycrystalline ingot furnace through a pipeline, and observe the outer wall of the plastic sleeve bag.

[0012] S6: Use sealing tape to fit the outer wall of the polycrystalline ingot furnace at the undulating part of the plastic sleeve.

[0013] S7: Nest the plastic sleeve bag outside the polycrystalline ingot furnace, evacuate the inside of the polycrystalline ingot furnace to a vacuum. At the same time, wrap the polycrystalline ingot furnace with the plastic sleeve bag, evacuate the air inside the plastic sleeve bag, and maintain the evacuation pressure. Fill helium gas into the inside of the polycrystalline ingot furnace through a pipeline, and observe the outer wall of the plastic sleeve bag until the pressure of the helium pump is constant.

[0014] As a preferred embodiment of the present invention, the heating time of the heating component in the polycrystalline ingot furnace is 10 - 20 minutes, cancel the water circuit connection, open the cooling water circuit, keep the polycrystalline ingot furnace dry, and let it cool.

[0015] As a preferred embodiment of the present invention, clean the inner wall of the polycrystalline ingot furnace, clean up the remaining raw materials and impurities, wipe the oxides inside the cylinder clean at the same time, and clean the dirt on the top plate of the heat insulation cage with a vacuum cleaner.

[0016] As a preferred embodiment of the present invention, check the pointer movement of the air pump pressure gauge to judge the airtightness inside the polycrystalline ingot furnace.

[0017] As a preferred embodiment of the present invention, the plastic sleeve bag is made of plastic material, wraps the outer wall of the polycrystalline ingot furnace, and the top of the plastic sleeve bag has a seal, and its outer wall is provided with a one-way air extraction valve.

[0018] As a preferred embodiment of the present invention, use sealing tape to fit the outer wall of the polycrystalline ingot furnace at the undulating part of the plastic sleeve to block the gaps of the polycrystalline ingot furnace.

[0019] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0020] The present invention can preliminarily determine the position of cracks in a multi-crystalline ingot furnace through a detection method by detecting the water circuit and checking the airtightness of the multi-crystalline ingot furnace. When the multi-crystalline ingot furnace is nested with a plastic sleeve bag, when helium gas enters the plastic sleeve bag through the cracks in the multi-crystalline ingot furnace, the plastic sleeve bag adsorbed on the outer wall of the multi-crystalline ingot furnace shows a fluctuating state, so as to judge the crack position, effectively indicate the crack orientation of the multi-crystalline ingot furnace, greatly improve the maintenance efficiency, facilitate the detection of water circuit cracks, avoid undetected water leakage, and avoid the time for workers to repeatedly search for cracks. Specific embodiments

[0021] In order to make the technical means, creative features, achieved purposes and effects of the present invention easy to understand, the present invention will be further described below in conjunction with specific embodiments.

[0022] In the description of the present invention, those of ordinary skill in the art can understand the specific meanings of the above terms in the present invention according to specific situations.

[0023] The present invention provides a technical solution: a method for detecting the airtightness of a multi-crystalline ingot furnace device based on water seal.

[0024] S1: Open the heating component of the multi-crystalline ingot furnace to evaporate the moisture in the inner wall, outer wall and water circuit of the multi-crystalline ingot furnace.

[0025] S2: Then empty the raw materials and impurities in the multi-crystalline ingot furnace, close the valves in the multi-crystalline ingot furnace, and leave a single communication pipe.

[0026] S3: Connect the external air pump to the single communication pipe of the multi-crystalline ingot furnace, completely seal the multi-crystalline ingot furnace, start the air pump to ventilate the single communication pipe, and check the air pump pressure gauge.

[0027] S4: Connect the water pump to the water circuit of the multi-crystalline ingot furnace and maintain the water pump pressure for 5 - 10 minutes. After the time ends, check the conditions of the inner wall and outer wall of the multi-crystalline ingot furnace.

[0028] S5: Nest the plastic sleeve bag outside the multi-crystalline ingot furnace, evacuate the inside of the multi-crystalline ingot furnace to a vacuum. At the same time, the plastic sleeve bag wraps the multi-crystalline ingot furnace, and the air in the plastic sleeve bag is pumped out and the pumping pressure is maintained. Helium gas is introduced into the multi-crystalline ingot furnace through a pipe, and the outer wall of the plastic sleeve bag is observed.

[0029] S6: Use a sealing tape to fit the outer wall of the multi-crystalline ingot furnace at the fluctuating part of the plastic sleeve.

[0030] S7: Nest the plastic sleeve bag outside the polycrystalline ingot casting furnace, evacuate the inside of the polycrystalline ingot casting furnace to a vacuum. At the same time, the plastic sleeve bag wraps the polycrystalline ingot casting furnace, and the air inside the plastic sleeve bag is pumped out and the pumping pressure is maintained. Then, helium gas is flushed into the polycrystalline ingot casting furnace through a pipeline, and the outer wall of the plastic sleeve bag is observed until the pressure of the helium gas pump is constant.

[0031] In this embodiment, the heating time of the heating component in the polycrystalline ingot casting furnace is 10 - 20 minutes. The water connection is cancelled, and the cooling water circuit is opened to keep the polycrystalline ingot casting furnace dry and then left to cool.

[0032] In this embodiment, clean the inner wall of the polycrystalline ingot casting furnace, clean up the remaining raw materials and impurities, wipe the oxides inside the cylinder clean, and clean the dirt on the top plate of the heat insulation cage with a vacuum cleaner.

[0033] In this embodiment, check the pointer movement of the air pump pressure gauge to judge the airtightness inside the polycrystalline ingot casting furnace.

[0034] In this embodiment, the plastic sleeve bag is made of plastic material and wraps the outer wall of the polycrystalline ingot casting furnace. The top of the plastic sleeve bag has a seal, and a one-way air extraction valve is provided on its outer wall.

[0035] In this embodiment, the sealing tape is attached to the outer wall of the polycrystalline ingot casting furnace at the undulating part of the plastic sleeve bag to block the gaps of the polycrystalline ingot casting furnace. Specific Embodiment 1

[0037] Turn on the heating component of the polycrystalline ingot casting furnace. The heating time of the heating component in the polycrystalline ingot casting furnace is 10 - 20 minutes. The water connection is cancelled, and the cooling water circuit is opened to keep the polycrystalline ingot casting furnace dry and then left to cool.

[0038] Clean the inner wall of the polycrystalline ingot casting furnace, clean up the remaining raw materials and impurities, wipe the oxides inside the cylinder clean, and clean the dirt on the top plate of the heat insulation cage with a vacuum cleaner.

[0039] Connect the external air pump to the single-pass pipe of the polycrystalline ingot casting furnace to completely enclose the polycrystalline ingot casting furnace. Start the air pump to ventilate through the single-pass pipe, check the pointer movement of the air pump pressure gauge to judge the airtightness inside the polycrystalline ingot casting furnace. When the pointer of the pressure gauge continuously rises to reach the threshold value and there is no shaking of the pointer, turn off the air pump to ensure the blocked state, observe for 10 - 15 minutes, and if the pointer of the pressure gauge does not drop, the airtightness of the polycrystalline ingot casting furnace is intact. Specific Embodiment 2

[0041] Turn on the heating component of the polycrystalline ingot casting furnace. The heating time of the heating component in the polycrystalline ingot casting furnace is 10 - 20 minutes. The water connection is cancelled, and the cooling water circuit is opened to keep the polycrystalline ingot casting furnace dry and then left to cool.

[0042] Clean the inner wall of the polycrystalline ingot furnace, clean up the remaining raw materials and impurities, wipe the oxides in the cylinder clean, and clean the dirt on the top plate of the heat insulation cage with a vacuum cleaner;

[0043] Connect the external air pump to the single-pass pipe of the polycrystalline ingot furnace, completely enclose the polycrystalline ingot furnace, start the air pump to ventilate through the single-pass pipe, check the movement of the pointer on the air pump pressure gauge, judge the airtightness inside the polycrystalline ingot furnace. When the pointer of the pressure gauge continuously rises to the threshold value and there is no shaking of the pointer, turn off the air pump, ensure the blocked state, observe for 10 - 15 minutes. If the pointer of the pressure gauge drops, there is a crack in the polycrystalline ingot furnace;

[0044] Connect the water pump to the water circuit of the polycrystalline ingot furnace and maintain the water pump pressure for 5 - 10 minutes. After the time ends, check the conditions of the inner and outer walls of the polycrystalline ingot furnace;

[0045] Water stains appear on the inner and outer walls of the polycrystalline ingot furnace, and there is a crack in the water circuit; then check and repair the water circuit. After the water circuit repair is completed;

[0046] Put a plastic sleeve bag outside the polycrystalline ingot furnace in a nested manner, evacuate the inside of the polycrystalline ingot furnace to a vacuum. At the same time, the plastic sleeve bag wraps the polycrystalline ingot furnace, and the air inside the plastic sleeve bag is pumped out and the pumping pressure is maintained. Fill helium gas into the polycrystalline ingot furnace through a pipeline and observe the outer wall of the plastic sleeve bag. Among them, the plastic sleeve bag is made of plastic material, and the top of the plastic sleeve bag has a seal, and a one-way air extraction valve is provided on its outer wall;

[0047] When the plastic sleeve bag shows undulations, it means that there is a crack at the position of the polycrystalline ingot furnace corresponding to the undulations, and repair is required. Specific Embodiment 3

[0049] Turn on the heating component of the polycrystalline ingot furnace. The heating time of the heating component in the polycrystalline ingot furnace is 10 - 20 minutes. Cancel the water circuit connection and turn on the cooling water circuit to keep the polycrystalline ingot furnace dry and let it cool;

[0050] Clean the inner wall of the polycrystalline ingot furnace, clean up the remaining raw materials and impurities, wipe the oxides in the cylinder clean, and clean the dirt on the top plate of the heat insulation cage with a vacuum cleaner;

[0051] Connect the external air pump to the single-pass pipe of the polycrystalline ingot furnace, completely enclose the polycrystalline ingot furnace, start the air pump to ventilate through the single-pass pipe, check the movement of the pointer on the air pump pressure gauge, judge the airtightness inside the polycrystalline ingot furnace. When the pointer of the pressure gauge continuously rises to the threshold value and there is no shaking of the pointer, turn off the air pump, ensure the blocked state, observe for 10 - 15 minutes. If the pointer of the pressure gauge drops, there is a crack in the polycrystalline ingot furnace;

[0052] Connect the water circuit of the water pump to the multi-crystalline ingot furnace and maintain the water pump pressure for 5 - 10 minutes. After the time ends, check the conditions of the inner and outer walls of the multi-crystalline ingot furnace;

[0053] Water stains appear on the inner and outer walls of the multi-crystalline ingot furnace, and there are cracks in the water circuit; then check and repair the water circuit. After the water circuit repair is completed;

[0054] Nest a plastic sleeve bag outside the multi-crystalline ingot furnace, evacuate the inside of the multi-crystalline ingot furnace to a vacuum. At the same time, the plastic sleeve bag wraps the multi-crystalline ingot furnace, and the air inside the plastic sleeve bag is pumped out and the pumping pressure is maintained. Fill helium gas into the inside of the multi-crystalline ingot furnace through a pipeline, and observe the outer wall of the plastic sleeve bag. Among them, the plastic sleeve bag is made of plastic material, and the top of the plastic sleeve bag has a seal, and a one-way air extraction valve is provided on its outer wall;

[0055] When the plastic sleeve bag shows undulations, it indicates that there are cracks in the position of the multi-crystalline ingot furnace corresponding to the undulations, and repairs are needed;

[0056] Use sealing tape to fit the outer wall of the multi-crystalline ingot furnace at the undulations of the plastic sleeve to temporarily seal the cracks and search for other cracks;

[0057] Nest a plastic sleeve bag outside the multi-crystalline ingot furnace, evacuate the inside of the multi-crystalline ingot furnace to a vacuum. At the same time, the plastic sleeve bag wraps the multi-crystalline ingot furnace, and the air inside the plastic sleeve bag is pumped out and the pumping pressure is maintained. Fill helium gas into the inside of the multi-crystalline ingot furnace through a pipeline, and observe the outer wall of the plastic sleeve bag until the pressure of the helium pump is constant.

[0058] When using a method for detecting the airtightness of a multi-crystalline ingot furnace device based on water seal, it should be noted that the present invention is a method for detecting the airtightness of a multi-crystalline ingot furnace device based on water seal. Each component is a general standard component or a component known to those skilled in the art, and its structure and principle can be known by those skilled in the art through technical manuals or through conventional experimental methods.

[0059] The above shows and describes the basic principles, main features and advantages of the present invention. For those skilled in the art, it is obvious that the present invention is not limited to the details of the above exemplary embodiments, and can be implemented in other specific forms without departing from the spirit or basic features of the present invention. Therefore, from any point of view, the embodiments should be regarded as exemplary and non-limiting. The scope of the present invention is defined by the appended claims rather than the above description. Therefore, it is intended to include all changes falling within the meaning and scope of the equivalent elements of the claims in the present invention.

[0060] In addition, it should be understood that although this specification is described in terms of embodiments, not every embodiment contains only an independent technical solution. This narrative manner of the specification is only for clarity. Those skilled in the art should regard the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A method for detecting the airtightness of a polycrystalline ingot furnace based on water seal, characterized in that: S1: Open the heating component of the polycrystalline ingot furnace to evaporate the moisture in the inner wall, outer wall and water circuit of the polycrystalline ingot furnace; S2: Then empty the raw materials and impurities in the polycrystalline ingot furnace, close the valves in the polycrystalline ingot furnace, and leave a single through pipe; S3: Connect the external air pump to the single through pipe of the polycrystalline ingot furnace, completely enclose the polycrystalline ingot furnace, start the air pump to ventilate the single through pipe, and check the air pump pressure gauge; S4: Connect the water pump to the water circuit of the polycrystalline ingot furnace and maintain the water pump pressure for 5 - 10 minutes. After the time ends, check the conditions of the inner wall and outer wall of the polycrystalline ingot furnace; S5: Nest the plastic sleeve bag outside the polycrystalline ingot furnace, evacuate the inside of the polycrystalline ingot furnace to vacuum, at the same time wrap the polycrystalline ingot furnace with the plastic sleeve bag, and evacuate the air inside the plastic sleeve bag, and maintain the evacuation pressure. Fill helium into the inside of the polycrystalline ingot furnace through a pipeline, and observe the outer wall of the plastic sleeve bag; S6: Fit the sealing tape to the outer wall of the polycrystalline ingot furnace at the undulating part of the plastic sleeve; S7: Nest the plastic sleeve bag outside the polycrystalline ingot furnace, evacuate the inside of the polycrystalline ingot furnace to vacuum, at the same time wrap the polycrystalline ingot furnace with the plastic sleeve bag, and evacuate the air inside the plastic sleeve bag, and maintain the evacuation pressure. Fill helium into the inside of the polycrystalline ingot furnace through a pipeline, and observe the outer wall of the plastic sleeve bag until the pressure of the helium pump is constant.

2. The method for detecting the airtightness of a polycrystalline ingot furnace based on water seal according to claim 1, characterized in that: The heating time of the heating component in the polycrystalline ingot furnace is 10 - 20 minutes, and the water circuit connection is cancelled, and the cooling water circuit is opened to keep the polycrystalline ingot furnace dry and allow it to cool.

3. The method for detecting the airtightness of a polycrystalline ingot furnace based on water seal according to claim 1, characterized in that: Clean the inner wall of the polycrystalline ingot furnace, clean the remaining raw materials and impurities, and at the same time wipe the oxides in the cylinder clean. Clean the dirt on the top plate of the heat insulation cage with a vacuum cleaner.

4. The method for detecting the airtightness of a polycrystalline ingot furnace based on water seal according to claim 1, characterized in that: Check the pointer movement of the air pump pressure gauge to judge the airtightness inside the polycrystalline ingot furnace.

5. The method for detecting the airtightness of a polycrystalline ingot furnace based on water seal according to claim 1, characterized in that: The plastic sleeve bag is made of plastic material, wraps the outer wall of the polycrystalline ingot furnace, and the top of the plastic sleeve bag has a seal, and a one-way air extraction valve is provided on its outer wall.

6. The method for detecting the airtightness of a polycrystalline ingot furnace based on water seal according to claim 1, characterized in that: The sealing tape is fitted to the outer wall of the polycrystalline ingot furnace at the undulating part of the plastic sleeve to block the gaps of the polycrystalline ingot furnace.