A detection device

Abstract

The present invention relates to the technical field of detection devices, and discloses a detection device. The detection device includes a base, a vibration damping mechanism, a vertical mechanism and a braking mechanism. The base is provided with a loading platform; the vibration damping mechanism is arranged at the bottom of the base; the vertical mechanism is connected to the base and located directly above the loading platform. The vertical mechanism includes a driving member, a guide rail and a connecting member. The connecting member is slidably connected to the vertically arranged guide rail. The driving member drives the connecting member to slide along the guide rail, and a detection instrument is connected to the connecting member; the braking mechanism includes a brake and a connecting guide rail. The brake is connected to the base, and the connecting guide rail is connected to the connecting member. The connecting guide rail is vertically arranged and penetrates through the brake, and the brake can brake the connecting guide rail. The present invention realizes improving the stiffness of the detection device in the vertical direction, improving the positioning accuracy and position stability of the upper connecting plate of the vertical mechanism, facilitating the relative rest of the connecting member, the loading platform and the base, facilitating the realization of higher position stability requirements, and ensuring the accuracy of the detection result.

Description

Technical Field

[0001] The present invention relates to the technical field of detection devices, and in particular to a detection device. Background Art

[0002] In the field of wafer or reticle defect detection, the positioning accuracy and position stability of the detection device directly affect the detection results. With the continuous development of semiconductor chip manufacturing processes, the detection devices for wafers or reticles are developing towards more precise, more accurate, and higher productivity.

[0003] The detection device in the prior art includes a base, a vibration damping mechanism, a vertical mechanism, a detection instrument, and a translation and rotation mechanism. The vibration damping mechanism, the vertical mechanism, and the translation and rotation mechanism are all installed on the base. A stage for carrying a wafer or a reticle is provided on the translation and rotation mechanism and can drive the stage to translate or rotate around a vertical axis. The vertical mechanism is arranged above the stage and includes a connecting plate capable of vertically lifting and lowering, and the connecting plate is connected to the detection instrument. A vibration damping mechanism is provided at the bottom of the base.

[0004] The traditional vertical mechanism generally drives a precision ball screw to rotate by a motor and cooperates with a guide rail to realize the lifting and lowering of the detection instrument. When the motor stops rotating, due to the vibration of the base caused by the vibration damping mechanism, residual acceleration is generated, and restricted by the axial stiffness of the ball screw itself, the connecting plate will move relative to the base, causing the detection instrument to move relative to the stage. Therefore, the positioning accuracy and position stability of the connecting plate on the vertical mechanism cannot meet the requirements of high position stability, thus reducing the accuracy of the detection results of the detection device for wafers and reticles.

[0005] Based on this, there is an urgent need for a detection device to solve the above-mentioned problems. Summary of the Invention

[0006] The purpose of the present invention is to provide a detection device to improve the stiffness of the detection device in the vertical direction, reduce the movement amplitude of the connecting member relative to the base, improve the positioning accuracy and position stability of the connecting plate on the vertical mechanism, facilitate the relative rest of the connecting member, the stage and the base, meet the requirements of high position stability, and thus ensure the accuracy of the detection results.

[0007] To achieve this purpose, the present invention adopts the following technical solutions:

[0008] A detection device, comprising:

[0009] A base, on which a stage is provided;

[0010] A vibration damping mechanism, provided at the bottom of the base;

[0011] A vertical mechanism, connected to the base and located directly above the stage. The vertical mechanism includes a driving member, a guide rail, and a connecting member. The connecting member is slidably connected to the vertically arranged guide rail. The driving member is used to drive the connecting member to slide along the guide rail, and a detection instrument is connected to the connecting member;

[0012] A braking mechanism, including a brake and a connecting guide rail. The brake is connected to the base, the connecting guide rail is connected to the connecting member, the connecting guide rail is vertically arranged, the connecting guide rail passes through the brake, and the brake can brake the connecting guide rail.

[0013] As an alternative technical solution of a detection device, the detection device further includes a first limiting member. An upper limiting member is connected to the connecting member, the upper limiting member is connected to the connecting member, the first limiting member is located directly above the upper limiting member, and the upper limiting member can abut against the first limiting member.

[0014] As an alternative technical solution of a detection device, the detection device further includes a second limiting member. A lower limiting member is connected to the connecting member, the second limiting member is located directly below the lower limiting member, and the lower limiting member can abut against the second limiting member.

[0015] As an alternative technical solution of a detection device, the lower limiting member is a micrometer head, and the micrometer head can adjust the position of the connecting member in the vertical direction.

[0016] As an alternative technical solution of a detection device, the detection device further includes a limiting assembly. The limiting assembly is connected to the base, and the limiting assembly is used to limit the highest position and / or the lowest position of the connecting member on the guide rail; and / or,

[0017] The detection device further includes a position detection member. The position detection member is connected to the base, and the position detection member is used to detect the position of the detection instrument.

[0018] As an alternative technical solution of a detection device, the detection device further includes a connecting plate. The vertical mechanism and the braking mechanism are connected to the connecting plate, and the connecting plate is connected to the base.

[0019] As an alternative technical solution of a detection device, the vertical mechanism further includes a lead screw and a nut. The lead screw extends in the vertical direction, the nut is screwed to the lead screw and connected to the connecting member, and the driving member is connected to the base and used to drive the lead screw to rotate.

[0020] As an alternative technical solution of the detection device, the vertical mechanism further includes a driving wheel and a driven wheel. The driving member includes an output rotating shaft with an axis arranged vertically. The driving wheel is coaxially connected to the output rotating shaft, the driven wheel is coaxially connected to the lead screw, and a synchronous belt is tensioned between the driving wheel and the driven wheel.

[0021] As an alternative technical solution of the detection device, the detection device further includes an adapter. The adapter includes a first adapter portion and a second adapter portion. The first adapter portion is connected to the base, the second adapter portion is connected to the brake, and a flexible structure is connected between the first adapter portion and the second adapter portion.

[0022] As an alternative technical solution of the detection device, the detection device further includes:

[0023] A first translation assembly disposed on the base, and the first translation assembly can drive the stage to move along a horizontally arranged first direction; and / or,

[0024] A second translation assembly disposed on the base, and the second translation assembly can drive the stage to move along a horizontally arranged second direction; and / or

[0025] A rotation assembly disposed on the base, and the rotation assembly can drive the stage to rotate about a vertical axis.

[0026] The beneficial effects of the present invention: The detection device provided by the present invention includes a base, a vibration damping mechanism, a vertical mechanism, and a braking mechanism. The braking mechanism includes a brake and a connecting guide rail. The brake is connected to the base and is relatively stationary with the base. The connecting guide rail is connected to the connecting member, and the brake can brake the connecting guide rail. When the driving member stops, the brake can brake the connecting guide rail, thereby realizing the braking of the connecting member, improving the stiffness of the detection device in the vertical direction, reducing the movement amplitude of the connecting member relative to the base, improving the positioning accuracy and position stability of the upper connecting plate of the vertical mechanism, facilitating the relative rest of the connecting member, the stage and the base, and facilitating the realization of higher position stability requirements, thereby ensuring the accuracy of the detection result. Description of the Drawings

[0027] Figure 1 is a schematic structural diagram of the detection device provided by an embodiment of the present invention;

[0028] Figure 2 is a schematic structural diagram of a partial structure of the detection device provided by an embodiment of the present invention;

[0029] Figure 3 is a first cross-sectional view of a partial structure of the detection device provided by an embodiment of the present invention;

[0030] Figure 4It is the second cross-sectional view of a partial structure of the detection device provided by an embodiment of the present invention;

[0031] Figure 5 It is a schematic structural diagram of a braking mechanism provided by an embodiment of the present invention;

[0032] Figure 6 It is a schematic structural diagram of an adapter provided by an embodiment of the present invention.

[0033] In the figure:

[0034] 10. Detection instrument; 20. Product to be detected;

[0035] 1. Base;

[0036] 2. Vibration damping mechanism;

[0037] 3. Vertical mechanism; 31. Driving member; 32. Guide rail; 33. Connecting member; 331. Upper limit member; 332. Lower limit member; 333. Baffle; 334. Connecting block; 34. Lead screw; 341. Connecting frame; 35. Nut; 36. Driving wheel; 37. Driven wheel; 38. Timing belt;

[0038] 4. Braking mechanism; 41. Brake; 411. Pressure detection member; 42. Connecting guide rail; 43. Guide rail adapter;

[0039] 51. First limit member; 52. Second limit member;

[0040] 61. Connecting plate; 62. Adapter; 621. First adapter portion; 622. Second adapter portion; 623. Flexible structure;

[0041] 7. Limit assembly;

[0042] 8. Position detection member;

[0043] 9. Translation and rotation mechanism; 91. First translation assembly; 92. Second translation assembly; 93. Rotation assembly. Detailed implementation manners

[0044] To make the technical problems solved by the present invention, the technical solutions adopted, and the achieved technical effects clearer, the technical solutions of the embodiments of the present invention will be further described in detail below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, rather than all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative efforts belong to the scope of protection of the present invention.

[0045] In the description of the present invention, unless otherwise clearly defined and limited, the terms "connected", "connected to", and "fixed" shall be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or integrated; it may be a mechanical connection or an electrical connection; it may be directly connected or indirectly connected through an intermediate medium, and it may be the communication inside two components or the interaction relationship between two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0046] In the present invention, unless otherwise clearly defined and limited, the first feature being "above" or "below" the second feature may include the direct contact between the first and second features, or may include the situation where the first and second features are not in direct contact but in contact through other features therebetween. Moreover, the first feature being "above", "over", and "on top of" the second feature includes that the first feature is directly above and obliquely above the second feature, or merely means that the horizontal height of the first feature is higher than that of the second feature. The first feature being "below", "beneath", and "under" the second feature includes that the first feature is directly below and obliquely below the second feature, or merely means that the horizontal height of the first feature is lower than that of the second feature.

[0047] The technical solution of the present invention will be further described below in conjunction with the accompanying drawings and through specific embodiments.

[0048] This embodiment provides a detection device for detecting Figure 1 the product 20 to be detected therein. In this embodiment, the product 20 to be detected is a wafer or a mask. In other embodiments, the product 20 to be detected may also be other products, which are not limited herein. Specifically, as Figures 1 to 3 shown, the detection device includes a base 1, a vibration damping mechanism 2, a vertical mechanism 3, and a braking mechanism 4. A stage is provided on the base 1, and the stage is used to carry the product 20 to be detected; the vibration damping mechanism 2 is provided at the bottom of the base 1; the vertical mechanism 3 is connected to the base 1 and is located directly above the stage. The vertical mechanism 3 includes a driving member 31, a guide rail 32, and a connecting member 33. The connecting member 33 is slidably connected to the vertically arranged guide rail 32, and the driving member 31 is used to drive the connecting member 33 to slide along the guide rail 32. A detection instrument 10 is connected to the connecting member 33; the braking mechanism 4 includes a brake 41 and a connecting guide rail 42. The brake 41 is connected to the base 1, the connecting guide rail 42 is connected to the connecting member 33, the connecting guide rail 42 is vertically arranged, the connecting guide rail 42 passes through the brake 41, and the brake 41 can brake the connecting guide rail 42.

[0049] The shock-absorbing mechanism 2 in this embodiment may include a hydraulic cylinder and a spring, which are arranged at the bottom of the base 1. One end of the hydraulic cylinder and the spring is connected to the base 1, and the other end is connected to the ground, playing a shock-absorbing role for the base 1. Further, two groups of shock-absorbing mechanisms 2 may be provided to further ensure the balance of the base 1. Moreover, the structure and connection position of the shock-absorbing mechanism 2 may refer to the prior art and will not be elaborated here. In this embodiment, the base 1 is made of marble material.

[0050] The detection device provided in this embodiment includes a base 1, a shock-absorbing mechanism 2, a vertical mechanism 3, and a braking mechanism 4. The product 20 to be detected can be placed on the stage of the base 1; the braking mechanism 4 includes a brake 41 and a connecting guide rail 42. The brake 41 is connected to the base 1 and is relatively stationary with the base 1. The connecting guide rail 42 is connected to the connecting member 33, and the brake 41 can brake the connecting guide rail 42. When the driving member 31 stops, the brake 41 can brake the connecting guide rail 42, thereby realizing the braking of the connecting member 33, improving the stiffness of the detection device in the vertical direction, reducing the movement amplitude of the connecting member 33 relative to the base 1, improving the positioning accuracy and position stability of the upper connecting plate of the vertical mechanism 3, facilitating the relative rest of the connecting member 33, the stage and the base 1, and meeting the requirements of higher position stability, thus ensuring the accuracy of the detection result.

[0051] In this embodiment, the detection instrument 10 is an optical detection device, which may specifically include a CCD camera, etc. The specific structure may adopt the prior art and will not be elaborated here. The connecting member 33 is in a plate shape and is arranged vertically, and its connection area with the detection instrument 10 is relatively large, which is conducive to stably connecting with the detection instrument 10. The structure of the brake 41 is the prior art. By pneumatic or electric means, a pressure is applied to the side of the connecting guide rail 42, so that a tangential frictional force is generated between the connecting guide rail 42 and the brake 41, and then the two are relatively stationary, thereby restricting the movement of the connecting member 33 in the vertical direction. Generally, a pressure detection member 411 is arranged on the brake 41 to detect the magnitude of the pressure applied by the brake 41 to the connecting guide rail 42.

[0052] Specifically, as Figure 2 and Figure 3 shown, the vertical mechanism 3 further includes a lead screw 34 and a nut 35. The lead screw 34 extends in the vertical direction, and the nut 35 is screwed with the lead screw 34 and is connected to the connecting member 33. The driving member 31 is connected to the base 1 and is used to drive the lead screw 34 to rotate. The vertical movement of the connecting member 33 is realized by using the lead screw 34 and the guide rail 32, and the structure is simple and convenient for installation. In this embodiment, the lead screw 34 is a ball screw, and two guide rails 32 are provided, which are respectively located on both sides of the lead screw 34. In other embodiments, the vertical mechanism 3 may further include a linear motor, and the linear motor drives the connecting member 33 to move, which is not limited here.

[0053] Further, the vertical mechanism 3 further includes a driving wheel 36 and a driven wheel 37. The driving member 31 includes an output rotating shaft with its axis arranged vertically. The driving wheel 36 is coaxially connected to the output rotating shaft, the driven wheel 37 is coaxially connected to the lead screw 34, and a timing belt 38 is tensioned between the driving wheel 36 and the driven wheel 37. The above structure is relatively simple. While ensuring the position accuracy of the connecting member 33, it can also reduce costs. Moreover, the power of the driving member 31 is transmitted to the lead screw 34 through the timing belt 38, the driving wheel 36 and the driven wheel 37, which is beneficial to shortening the length dimension of the vertical mechanism 3 in the vertical direction and is beneficial to the miniaturization of the detection device. In this embodiment, the driving member 31 is a driving motor, and its output rotating shaft is arranged vertically. In other embodiments, the driving member 31 can also be directly coaxially connected to the lead screw 34, which is not limited herein.

[0054] As a preferred solution, the detection device further includes a connecting plate 61. The vertical mechanism 3 and the braking mechanism 4 are connected to the connecting plate 61, and the connecting plate 61 is connected to the base 1. The setting of the connecting plate 61 makes the vertical mechanism 3 and the braking mechanism 4 connected as a whole, improving the modular degree of the structure of the detection device and facilitating the installation with the base 1.

[0055] Among them, as Figures 2 to 4 shown, the braking mechanism 4, the lead screw 34, the guide rail 32, and the nut 35 are all located between the connecting member 33 and the connecting plate 61. The lead screw 34 extends upward and is connected to the driven wheel 37. The braking mechanism 4 is located below the lead screw 34. In this embodiment, a connecting guide rail 42 is additionally provided, which can avoid the cooperation between the lead screw 34 and the brake 41, reducing the possibility of deformation of the lead screw 34, further ensuring the positioning accuracy of the connecting member 33 and the detection instrument 10 and the position stability of the connecting member 33, ensuring the accuracy of the detection result of the detection device, and also reducing the maintenance cost.

[0056] Further, the connecting guide rail 42 is detachably connected to the connecting member 33. When the connecting guide rail 42 is deformed, it is convenient to replace the connecting guide rail 42, reducing the maintenance cost and improving the durability of the detection device.

[0057] Specifically, as Figures 2 to 5As shown, the braking mechanism 4 further includes a guide rail adapter 43. The guide rail adapter 43 is disposed between the connecting guide rail 42 and the connecting member 33, that is, the connecting guide rail 42 is connected to the guide rail adapter 43, and the guide rail adapter 43 is detachably connected to the connecting member 33, which is beneficial to reducing the width of the connecting guide rail 42 in the direction perpendicular to the connecting member 33, reducing the width requirement for the connecting guide rail 42, beneficial to reducing the size of the brake 41, and reducing the cost. In this embodiment, the guide rail adapter 43 can also be detachably connected to the connecting guide rail 42, facilitating the replacement of the guide rail adapter 43 and the connecting guide rail 42, avoiding the synchronous replacement of the guide rail adapter 43 when replacing the connecting guide rail 42, and reducing the maintenance cost. In this embodiment, the guide rail adapter 43 is in a plate shape, parallel and attached to the connecting member 33.

[0058] In this embodiment, the axial stiffness K of the lead screw 34 is set b = 66 N / μm, the residual vibration acceleration a in the vertical direction generated by the vibration damping mechanism 2 on the base 1 = 0.06 m / s 2 , the load m of the vertical axis = 30 kg, and the load m is specifically the weight of the optical detection device. Thus, the position stability P of the lead screw 34 in the static state in the prior art can be calculated s as:

[0059] P s = ma / K b = (30 × 0.06) / 66 = 0.027 μm = 27 nm. (Formula 1)

[0060] This position stability value P s far exceeds the position stability requirement of less than 10 nm required by the defect detection device.

[0061] The detection device provided in this embodiment adds a braking mechanism 4 in the vertical direction, which can increase the vertical stiffness of the vertical mechanism 3, and further achieve that under the disturbance of the residual acceleration of the base 1, the position stability of the lead screw 34 reaches the nanometer level accuracy.

[0062] Specifically, the axial stiffness K of the brake 41 c = 160 N / μm, and other calculation parameters are the same as above. It can be calculated that the improved position stability P s ' of the lead screw 34 proposed in this embodiment in the static state is:

[0063] P s ' = ma / (K b + K c ) = (30 × 0.06) / (66 + 160) = 0.008 μm = 8 nm. (Formula 2)

[0064] It can be seen that adding a braking mechanism 4 in the vertical direction can enhance the vertical stiffness of the vertical mechanism 3, and further achieve improved position stability P of the lead screw 34 under the disturbance of the residual acceleration of the base 1 s ’ reaching nanometer-level accuracy.

[0065] Among them, the principles of the above formulas 1 and 2 are both prior arts and not the key points protected by this embodiment.

[0066] As a preferred solution, as Figure 3 、 Figure 5 and Figure 6 shown, the detection device further includes an adapter 62. The adapter 62 includes a first adapter part 621 and a second adapter part 622. The first adapter part 621 is connected to the base 1, the second adapter part 622 is connected to the brake 41, and a flexible structure 623 is connected between the first adapter part 621 and the second adapter part 622. If the axis of the connecting guide rail 42 deviates from the vertical direction due to the low installation accuracy of the brake 41, that is, the connecting guide rail 42 is not parallel to the lead screw 34, at this time, the flexible structure 623 is provided so that the first adapter part 621 and the second adapter part 622 can deflect relative to each other. During the movement of the connecting member 33, the flexible structure 623 can realize the deflection of the connecting guide rail 42, ensure that the connecting guide rail 42 is parallel to the lead screw 34, thereby ensuring that the connecting member 33 can move smoothly, realizing the detection function of the detection device, and avoiding the deformation of the connecting guide rail 42 caused by extrusion with the brake 41, reducing the maintenance cost, and also ensuring the smooth movement of the connecting member 33.

[0067] In this embodiment, the adapter 62 is in a plate shape, and two L-groove structures are formed on the top surface of the adapter 62. The vertical part of the L-groove structure extends downward toward the middle of the adapter 62, the horizontal part of the L-groove structure communicates with the bottom of the vertical part and extends inward toward the middle of the adapter 62, and the horizontal parts of the two L-groove structures are facing each other and arranged at intervals, forming a flexible hinge in the middle of the adapter 62, where the second adapter part 622 is formed at the upper middle position of the adapter 62. In other embodiments, the flexible structure 623 can also be a rubber part or a flexible hinge can be formed through other groove-shaped structures, which is not limited here.

[0068] As a preferred solution, as Figures 2 to 4 shown, the detection device further includes a first limiting member 51. An upper limiting member 331 is connected to the connecting member 33. The upper limiting member 331 is connected to the connecting member 33. The first limiting member 51 is located directly above the upper limiting member 331, and the upper limiting member 331 can abut against the first limiting member 51. Setting the first limiting member 51 and the upper limiting member 331 can limit the highest position of the connecting member 33 moving along the guide rail 32, avoid the connecting member 33 moving to too high a position, and avoid the increase in energy consumption.

[0069] Specifically, the upper limit member 331 is arranged in a U-shaped plate form, including a first side arm, a second side arm, and a connecting arm connecting between the first side arm and the second side arm. Sliders are slidably connected to the two guide rails 32. The first side arm and the second side arm are respectively connected to a slider. The upper limit member 331 is connected to the side of the connecting member 33 facing the connecting plate 61. The connecting arm is connected to the nut 35 on the lead screw 34. Among them, the lead screw 34 is located between the first side arm and the second side arm. The end of the lead screw 34 is connected to the connecting plate 61 through a connecting frame 341, and the lead screw 34 rotates through the connecting frame 341. The connecting frame 341 is located above the upper limit member 331. A first limit member 51 is connected to the side of the connecting frame 341 facing the first side arm. The first limit member 51 is in a block shape, and the first side arm can abut against the first limit member 51.

[0070] Further, as Figures 2 to 4 shown, the detection device further includes a second limit member 52. A lower limit member 332 is connected to the connecting member 33. The second limit member 52 is located directly below the lower limit member 332, and the lower limit member 332 can abut against the second limit member 52. The setting of the second limit member 52 and the lower limit member 332 can limit the lowest position of the connecting member 33 moving along the guide rail 32, avoiding the position of the connecting member 33 moving too low and colliding with the product 20 to be detected.

[0071] Specifically, the second limit member 52 is in a block shape and is connected to the connecting plate 61. The second limit member 52 is arranged between the second side arm and the connecting plate 61. A lower limit member 332 is connected to the top of the second side arm. The lower limit member 332 extends downward between the second side arm and the connecting plate 61, and the second limit member 52 can abut against the bottom of the lower limit member 332.

[0072] Preferably, the lower limit member 332 is a differential head, and the differential head can adjust the position of the connecting member 33 in the vertical direction. The differential head includes a fixed section, a telescopic section, and a rotating handle. The rotating handle is arranged at the top of the fixed section. The bottom of the fixed section is telescopically provided with the telescopic section. When the rotating handle is screwed, the telescopic section can extend or retract from the fixed section. The specific structure of the differential head can refer to the prior art and will not be elaborated here. A connecting block 334 is connected to the top of the second side arm. The lower limit member 332 vertically penetrates the connecting block 334, and the fixed section is connected to the connecting block 334 and extends between the second side arm and the connecting plate 61. When the lower limit member 332 abuts against the second limit member 52, rotate the rotating handle of the differential head to finely adjust the position of the connecting member 33. It can be understood that when the differential head is used, the brake 41 does not brake the connecting guide rail 42.

[0073] As a preferred solution, as Figure 2 and Figure 3As shown, the detection device further includes a limiting component 7. The limiting component 7 is connected to the base 1 and is used to limit the highest position and / or the lowest position of the connecting member 33 on the guide rail 32. By setting the limiting component 7, the highest position and the lowest position of the connecting member 33 are further restricted. Acting together with the first limiting member 51 and the second limiting member 52, the reliability of limiting the connecting member 33 is ensured. In this embodiment, the limiting component 7 may include two limit switches, which are arranged at intervals in the vertical direction, and both of the two limit switches are connected to the connecting plate 61. The two limit switches respectively limit the highest position and the lowest position of the connecting member 33 on the guide rail 32. The structure and control principle of the limit switch are both prior arts and will not be elaborated here. Further, a baffle 333 is connected to the connecting member 33. When the baffle 333 touches any one of the limit switches, the driving member 31 and the brake 41 can also be controlled to close. The specific control method can also refer to the prior art and will not be elaborated here. The limit switch in the limiting component 7 may further include a photoelectric switch. When the baffle 333 blocks the light emitted by any one of the photoelectric switches, the driving member 31 and the brake 41 can be controlled to close.

[0074] When detecting the product 20 to be detected, the detection instrument 10 should be located at the preset detection position. Further, the detection device further includes a position detection member 8. The position detection member 8 is connected to the base 1 and is used to detect the position of the detection instrument 10. By setting the position detection member 8, it can be detected whether the detection instrument 10 is located at the preset detection position, and the opening and closing of the driving member 31 can be controlled in time. It can be understood that the preset detection position of the detection instrument 10 is between the highest position and the lowest position of the detection instrument 10. In this embodiment, the position detection member 8 is a grating scale and is connected to the connecting plate 61.

[0075] Preferably, as Figure 1 shown, the detection device further includes a translation and rotation mechanism 9. The translation and rotation mechanism 9 can drive the stage to translate or rotate around the vertical axis. Specifically, the translation and rotation mechanism 9 includes a first translation component 91. The first translation component 91 is placed on the base 1 and can drive the stage to move along the horizontally arranged first direction, which is convenient for moving the position of the product 20 to be detected on the stage, conducive to making the detection point of the product 20 to be detected directly opposite to the detection instrument 10, ensuring the accuracy of the detection result, and also facilitating the detection of multiple positions of the product 20 to be detected, improving the practicability. The first translation component 91 can be a linear motor or a cylinder and other structures, which is not limited here.

[0076] Further, the translation and rotation mechanism 9 includes a second translation component 92. The second translation component 92 is disposed on the base 1, and the second translation component 92 can drive the stage to move along a horizontally arranged second direction, which further facilitates moving the position of the product 20 to be detected on the stage, is conducive to making the detection point of the product 20 to be detected directly opposite to the detection instrument 10, ensuring the accuracy of the detection result, and also further facilitating detecting multiple positions of the product 20 to be detected, thus improving the practicability. The second translation component 92 can be a linear motor, a cylinder or other structures. The structure of the second translation component 92 can be the same as or different from that of the first translation component 91, and no limitation is made here.

[0077] In this embodiment, the first direction is perpendicular to the second direction. In other embodiments, the first direction and the second direction can also be inclined, and no limitation is made here.

[0078] Still further, the translation and rotation mechanism 9 includes a rotation component 93. The rotation component 93 is disposed on the base 1, and the rotation component 93 can drive the stage to rotate around a vertical axis, which is conducive to adjusting the detection point of the product 20 to be detected to be directly opposite to the detection instrument 10, ensuring the accuracy of the detection result, and also further facilitating detecting multiple positions of the product 20 to be detected, thus improving the practicability. The rotation component 93 can be a driving motor or other structures, and no limitation is made here. In this embodiment, the stage is placed on the output end of the rotation component 93, the rotation component 93 is placed on the output end of the first translation component 91, and the first translation component 91 is placed on the output end of the second translation component 92. In other embodiments, the rotation component 93 can also be placed on the output end of the second translation component 92, and the second translation component 92 can be placed on the output end of the first translation component 91, and no limitation is made here.

[0079] In this embodiment, the translation and rotation mechanism 9 includes a first translation component 91, a second translation component 92 and a rotation component 93. In other embodiments, the translation and rotation mechanism 9 can also only include one or two of the first translation component 91, the second translation component 92 and the rotation component 93, and no limitation is made here.

[0080] Obviously, the above embodiments of the present invention are merely examples for clearly explaining the present invention, rather than limiting the implementation manners of the present invention. For those of ordinary skill in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all the implementation manners here. Any modifications, equivalent replacements and improvements made within the spirit and principle of the present invention shall be included in the protection scope of the claims of the present invention.

Claims

1. A detection device, characterized in that, Comprising: A base (1) provided with a stage on the base (1); A vibration damping mechanism (2) disposed at the bottom of the base (1); A vertical mechanism (3) connected to the base (1) and located directly above the stage. The vertical mechanism (3) includes a driving member (31), a guide rail (32), and a connecting member (33). The connecting member (33) is slidably connected to the vertically arranged guide rail (32). The driving member (31) is used to drive the connecting member (33) to slide along the guide rail (32). A detection instrument (10) is connected to the connecting member (33); A braking mechanism (4) includes a brake (41) and a connecting guide rail (42). The brake (41) is connected to the base (1), and the connecting guide rail (42) is connected to the connecting member (33). The connecting guide rail (42) is vertically arranged and passes through the brake (41), and the brake (41) can brake the connecting guide rail (42); The detection device further includes an adapter (62). The adapter (62) includes a first adapter portion (621) and a second adapter portion (622). The first adapter portion (621) is connected to the base (1), and the second adapter portion (622) is connected to the brake (41). A flexible structure (623) is connected between the first adapter portion (621) and the second adapter portion (622).

2. The detection device according to claim 1, characterized in that, The detection device further includes a first limiting member (51). An upper limiting member (331) is connected to the connecting member (33). The upper limiting member (331) is connected to the connecting member (33). The first limiting member (51) is located directly above the upper limiting member (331), and the upper limiting member (331) can abut against the first limiting member (51).

3. The detection device according to claim 1, wherein The detection device further includes a second limiting member (52). A lower limiting member (332) is connected to the connecting member (33). The second limiting member (52) is located directly below the lower limiting member (332), and the lower limiting member (332) can abut against the second limiting member (52).

4. The detection device according to claim 3, wherein, The lower limiting member (332) is a differential head, and the differential head can adjust the position of the connecting member (33) in the vertical direction.

5. The detection device according to claim 1, wherein The detection device further includes a limiting assembly (7). The limiting assembly (7) is connected to the base (1), and the limiting assembly (7) is used to limit the highest position and / or the lowest position of the connecting member (33) on the guide rail (32); and / or, The detection device further includes a position detection member (8). The position detection member (8) is connected to the base (1), and the position detection member (8) is used to detect the position of the detection instrument (10).

6. The detection device according to claim 1, wherein The detection device further includes a connecting plate (61). The vertical mechanism (3) and the braking mechanism (4) are connected to the connecting plate (61), and the connecting plate (61) is connected to the base (1).

7. The detection device according to claim 1, wherein The vertical mechanism (3) further includes a lead screw (34) and a nut (35). The lead screw (34) extends in the vertical direction. The nut (35) is threadedly connected to the lead screw (34) and is connected to the connecting member (33). The driving member (31) is connected to the base (1) and is used to drive the lead screw (34) to rotate.

8. The detection device according to claim 7, wherein The vertical mechanism (3) further includes a driving pulley (36) and a driven pulley (37). The driving member (31) includes an output rotating shaft with an axis arranged vertically. The driving pulley (36) is coaxially connected to the output rotating shaft. The driven pulley (37) is coaxially connected to the lead screw (34). A timing belt (38) is tensioned between the driving pulley (36) and the driven pulley (37).

9. The detection device according to any one of claims 1-8, characterized in that, The detection device further includes: A first translation assembly (91) placed on the base (1). The first translation assembly (91) can drive the stage to move in a first direction arranged horizontally; and / or, A second translation assembly (92) placed on the base (1). The second translation assembly (92) can drive the stage to move in a second direction arranged horizontally; and / or A rotation assembly (93) placed on the base (1). The rotation assembly (93) can drive the stage to rotate about a vertical axis.

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