Air floating bearing equipment

Abstract

An air-floating bearing device disclosed in an embodiment of the present invention includes, for example: a bearing layer; a spacer layer connected to one side of the bearing layer; an air path connection layer connected to the side of the spacer layer away from the bearing layer; a first air pressure channel and a second air pressure channel for air-floating bearing of the test piece are formed between the bearing layer, the spacer layer and the air path connection layer; the first air pressure channel and the second air pressure channel respectively pass through the bearing layer, the spacer layer and the air path connection layer in sequence from the side of the bearing layer away from the air path connection layer, and extend to the side of the air path connection layer away from the bearing layer. The air-floating bearing device provided by the present invention is used to air-float the test piece by setting the first air path channel and the second air path channel to improve the air-floating bearing effect of the air-floating bearing device.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor technology, and in particular to an air floating bearing device. Background Art

[0002] When testing a piece of material to be tested (such as a wafer), it is necessary to carry it first. Air flotation is a commonly used method of carrying. The air flotation carrying device is provided with a positive pressure outlet area and an exhaust area. The positive pressure outlet area is used to float the piece of material to be tested, and then the gas of the piece of material to be tested is blown out through the exhaust area.

[0003] At present, most of the air-floating bearing devices on the market realize air-floating bearing of the workpiece by setting a positive pressure air-floating channel in the positive pressure outlet area and an exhaust groove in the exhaust area. However, this method will cause the gas in the central area of ​​the air-floating bearing device to be discharged from the edge of the bearing device along the exhaust groove, resulting in different exhaust effects of the air-floating bearing device in different areas of the workpiece to be tested, thereby affecting the bearing effect of the air-floating bearing device on the workpiece to be tested. In addition, when the workpiece to be tested is warped, the air-floating bearing effect of the air-floating bearing device on the workpiece to be tested will be worse. Summary of the invention

[0004] In view of at least some of the problems and shortcomings in the prior art, an embodiment of the present invention discloses an air floating support device, which is provided with a first air path channel and a second air path channel for air floating support of the test piece to improve the air floating support effect of the air floating support device.

[0005] On the one hand, an embodiment of the present invention provides an air-floating bearing device, for example, comprising: a bearing layer; a spacer layer connected to one side of the bearing layer; an air path connecting layer connected to the side of the spacer layer away from the bearing layer; wherein a first air pressure channel and a second air pressure channel for air-floating bearing of the test piece are formed between the bearing layer, the spacer layer and the air path connecting layer; the first air pressure channel and the second air pressure channel respectively pass through the bearing layer, the spacer layer and the air path connecting layer in sequence from the side of the bearing layer away from the air path connecting layer, and extend to the side of the air path connecting layer away from the bearing layer.

[0006] The air floating bearing device provided in this embodiment is provided with a first air path channel and a second air path channel for respectively supplying air to and exhausting air from the workpiece to be tested, so as to improve the air floating bearing effect of the air floating bearing device.

[0007] In one embodiment of the present invention, the bearing layer includes a bearing surface away from the air path connection layer, and a plurality of first air holes and a plurality of second air holes are arranged on the bearing surface. A first main airway and a plurality of first branch airways are also arranged on a side of the bearing layer adjacent to the spacing layer and opposite to the bearing surface, and the plurality of first branch airways are connected to the plurality of second air holes in a one-to-one correspondence; the spacing layer and the bearing layer form a first cavity, and the first cavity is respectively connected to the plurality of first air holes and the first main airway; the spacing layer is also provided with a first main airway through-hole and a plurality of first branch airway through-holes, and the first main airway passes through the first main airway through-hole, and the plurality of The first branch airway passes through the first branch airway via hole; the air path connection layer and the spacer layer form a second cavity, and the first branch airway is connected to the second cavity; a second main airway is also provided on the side of the air path connection layer adjacent to the spacer layer, and the second main airway is connected to the second cavity; the air path connection layer is also provided with a second main airway via hole, and the first main airway passes through the second main airway via hole; wherein, the first air pressure channel includes the multiple first air holes, the first cavity and the first main airway, and the second air pressure channel includes the multiple second air holes, the multiple first branch airways, the second cavity and the second main airway.

[0008] In one embodiment of the present invention, the shape of the bearing surface is circular; the multiple first air holes and the multiple second air holes are alternately arranged on the bearing surface, and form a plurality of circles of air pressure holes distributed in a circular ring shape with the axis of the bearing surface as the center; the plurality of circles of air pressure holes include an outer circle of air pressure holes close to the edge of the bearing surface and an inner circle of air pressure holes close to the axis of the bearing surface, and the pore density of the outer circle of air pressure holes is greater than the pore density of the inner circle of air pressure holes.

[0009] In one embodiment of the present invention, the air-floating bearing device also includes an air path control component, which is connected to the side of the air path connection layer away from the bearing layer; the air path control component includes: an air path connector, which is connected to the air path connection layer and is provided with a first air path access channel and a second air path access channel, the first air path access channel is connected to the first main air pipe, and the second air path access channel is connected to the second main air pipe; a first connecting pipe, which is connected to the first air path access channel; and a second connecting pipe, which is connected to the second air path access channel.

[0010] In one embodiment of the present invention, the first gas circuit access channel includes a first longitudinal access hole and a first transverse access hole, the first longitudinal access hole is connected to the first transverse access hole, and the first longitudinal access hole is also connected to the first main gas pipe; the second gas circuit access channel includes a second longitudinal access hole and a second transverse access hole, the second longitudinal access hole is connected to the second transverse access hole, and the second longitudinal access hole is also connected to the second main gas pipe; the gas circuit control component also includes a first pressure regulating valve and a second pressure regulating valve, the first pressure regulating valve is connected to the first longitudinal access hole, and the second pressure regulating valve is connected to the second longitudinal access hole. In one embodiment of the present invention, a mounting hole is provided in the middle of the bearing surface, a first positioning hole connected to the mounting hole and passing through the spacing layer is provided in the middle of the spacing layer, and a second positioning hole connected to the first positioning hole and passing through the gas path connecting layer is provided in the middle of the gas path connecting layer; the air floating bearing device also includes a warping correction structure, which includes: a correction disk, which is fixed in the mounting hole and is provided with a first correction air pressure channel; an air guide, which is connected to the correction disk and is provided in the first positioning hole and the second positioning hole, the air guide is provided with a second correction air pressure channel, and the second correction air pressure channel is connected to the first correction air pressure channel; and an air path control component, which is connected to the side of the air path connecting layer away from the bearing surface, the air path control component is provided with a third correction air pressure channel, and the third correction air pressure channel is connected to the second correction air pressure channel.

[0011] In one embodiment of the present invention, the mounting hole is a circular hole; the outer side surface of the correction disk adjacent to the bearing surface is circular, and a plurality of axial air holes are arranged on the outer side surface; the correction disk is also provided with a plurality of radial air holes, and the plurality of radial air holes are connected to the plurality of axial air holes one by one; a first connecting hole is arranged on the inner side surface of the correction disk away from the outer side surface, and the first connecting hole connects the plurality of radial air holes and the second corrective air pressure channel; the plurality of axial air holes, the plurality of radial air holes and the first connecting hole form the first corrective air pressure channel; the plurality of axial air holes are arranged at intervals from each other on the outer side surface and are arranged in a circular ring shape; the plurality of radial air holes are evenly distributed with the axis of the correction disk as the center, and converge at the first connecting hole.

[0012] In one embodiment of the present invention, the air guide component includes a connecting head and an air guide tube, one end of the connecting head is connected to the air guide tube, and the other end of the connecting head is connected to the correction disk, the connecting head is provided with a connecting hole, the connecting hole connects the first correction air pressure channel and the air guide tube, the connecting hole and the air guide tube form the second correction air pressure channel, the end of the air guide tube away from the connecting head is connected to the air path control component, and the air guide tube is also connected to the third correction air pressure channel.

[0013] In one embodiment of the present invention, the air circuit control component includes: an air circuit connector, a third connecting pipe and a conversion valve, the connecting pipe is connected between the air circuit connector and the conversion valve; the air circuit connector is installed on the side of the air floating bearing device away from the bearing surface; the air circuit connector is provided with a first through hole and a second through hole, the first through hole is intersected and connected with the second through hole, the air guide tube is inserted into the first through hole and connected to the third corrective air pressure channel, and the conversion valve is connected to the second through hole through the connecting pipe.

[0014] In one embodiment of the present invention, an air pressure control screw is respectively provided in the first air hole and the second air hole for controlling the pressure inside the first air hole and the second air hole; an external thread is provided on the outer wall of the air pressure control screw, and the air pressure control screw is connected to the first air hole and the second air hole through the external thread; an air pressure control hole is also provided on the air pressure control screw, and the air pressure control hole is connected to the first air hole or the second air hole.

[0015] It can be seen from the above that the above technical features of the present invention can have one or more of the following beneficial effects: by setting the first air path channel and the second air path channel for supplying and exhausting air to the workpiece to be tested, the bearing effect of the air floating bearing device is improved. Furthermore, the embodiment of the present invention is provided with a warping correction structure for correcting the warping of the workpiece to be tested, so as to improve the surface flatness of the workpiece to be tested, thereby improving the air floating bearing effect of the air floating bearing device on the workpiece to be tested. In addition, the embodiment of the present invention also sets different air hole densities of the inner and outer ring air pressure holes to improve the air floating bearing effect of the air floating bearing device; sets air pressure control screws in the first air hole and the second air hole to facilitate the adjustment of the pressure in the first air hole and the second air hole; sets a pressure regulating valve to more conveniently adjust the pressure in the first air pressure channel and the second air pressure channel. . BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other accompanying drawings can be obtained based on these accompanying drawings without paying creative work.

[0017] Figure 1 A schematic cross-sectional structure diagram of an air floating support device provided in an embodiment of the present invention.

[0018] Figure 2 A schematic diagram of the explosion structure of the air floating support device provided in an embodiment of the present invention.

[0019] Figure 3 A schematic diagram of the cross-sectional structure of a bearing layer provided in an embodiment of the present invention.

[0020] Figure 4 A schematic diagram of the cross-sectional structure of a spacing layer provided in an embodiment of the present invention.

[0021] Figure 5 Another schematic cross-sectional structure diagram of the air floating support device provided in an embodiment of the present invention.

[0022] Figure 6 for Figure 5 A partial enlarged schematic diagram of part A.

[0023] Figure 7 for Figure 5 A partial enlarged schematic diagram of part B.

[0024] Figure 8 A schematic diagram of the cross-sectional structure of the gas path connection layer provided in an embodiment of the present invention.

[0025] Fig. 9 A schematic cross-sectional view of another air floating support device provided in an embodiment of the present invention.

[0026] Fig.10 for Fig. 9 A partial enlarged schematic diagram of part D in the middle.

[0027] Fig.11 for Figure 5 A partial enlarged schematic diagram of part C in the middle.

[0028] Fig.12 A schematic cross-sectional view of another air floating support device provided in an embodiment of the present invention.

[0029] Fig.13 for Fig.12 A partial enlarged schematic diagram of part E in the middle.

[0030] Fig.14 A schematic cross-sectional view of another air floating support device provided in an embodiment of the present invention.

[0031] Fig.15 A schematic cross-sectional view of a warping correction structure provided in an embodiment of the present invention.

[0032] Fig.16 A schematic diagram of the cross-sectional structure of a correction disc provided in an embodiment of the present invention.

[0033] Fig.17 A schematic diagram of the cross-sectional structure of an air guide member provided in an embodiment of the present invention.

[0034] Fig.18 A schematic cross-sectional structure diagram of an air path control component provided in an embodiment of the present invention.

[0035] Fig.19 A schematic diagram of the structure of the gas path control component provided in an embodiment of the present invention.

[0036] Description of main component symbols:

[0037] 10 is an air-floating bearing device; 100 is a bearing layer; 110 is a bearing surface; 111 is a first air hole; 1111 is an air pressure control screw; 1112 is an air pressure control hole; 112 is a second air hole; 1121 is an air pressure control screw; 1122 is an air pressure control hole; 113 is a sixth mounting hole; 120 is a first main airway; 130 is a first branch airway; 131 is a thick main airway end; 132 is a thin branch airway end; 1321 is an external thread; 133 is a third annular groove; 140 is a first mounting hole; 150 is a fourth mounting hole; 200 is a spacing layer; 210 is the first main airway through hole; 220 is the first branch airway through hole; 221 is the first chamfer; 230 is the first annular groove; 240 is the second annular groove; 250 is the second mounting hole; 260 is the first fastener through hole; 270 is the fifth mounting hole; 280 is the first positioning hole; 300 is the airway connection layer; 310 is the second main airway through hole; 320 is the second main airway; 330 is the third mounting hole; 340 is the second fastener through hole; 350 is the second positioning hole; 410 is the first air pressure channel; 420 is the second air pressure channel; 510 is the first cavity; 520 is the second cavity; 610 is the first sealing member; 620 is the second sealing member; 630 is the third sealing member; 710 is the first fastener; 720 is the second fastener; 730 is the third fastener; 740 is the fourth fastener; 800 is the warpage correction structure; 810 is the correction disk; 811 is the first correction air pressure channel; 812 is the axial air hole; 813 is the radial air hole; 814 is the first connecting hole; 820 is the air guide; 821 is the second correction air pressure channel; 822 is the connector; 8221 is the connecting hole; 823 is the air guide tube; 830 is Air circuit control component; 831 is the third corrective air pressure channel; 832 is the air circuit connector; 8321 is the first through hole; 8322 is the second through hole; 8323 is the first air circuit access channel; 8324 is the first longitudinal access hole; 8325 is the first transverse access hole; 8326 is the second air circuit access channel; 8327 is the second longitudinal access hole; 8328 is the second transverse access hole; 833 is the third connecting pipe; 834 is the conversion valve; 835 is the first connecting pipe; 836 is the second connecting pipe; 837 is the first pressure regulating valve; 838 is the second pressure regulating valve. DETAILED DESCRIPTION

[0038] In order to make the purpose, technical solution and advantages of the present invention clearer, the technical solution of the present invention will be clearly and completely described below in conjunction with the specific embodiments of the present invention and the corresponding drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention.

[0039] It should be noted that the directional terms mentioned in the embodiments of the present invention, such as "upper", "lower", "front", "back", "left", "right", "inner", "outer", "side", etc., are only reference to the directions of the attached drawings. Therefore, the directional terms used are used to illustrate and understand the present invention, rather than to limit the present invention. For the sake of understanding and ease of description, the size and thickness of each component shown in the drawings are arbitrarily shown, but the present invention is not limited thereto.

[0040] It is understood that when a component such as a layer, film, region or substrate is referred to as being "on" another component, the component may be directly on the other component, or intervening components may also be present. In addition, in the specification, unless explicitly described to the contrary, the word "comprising" will be understood to mean including the components, but not excluding any other components. Furthermore, in the specification, "on..." means being located above or below the target component, and does not mean necessarily being located on the top based on gravity.

[0041] In conjunction with the accompanying drawings, some embodiments of the present invention are described in detail below. In the absence of conflict, the following embodiments and features in the embodiments may be combined with each other.

[0042] The embodiment of the present invention provides an air-floating bearing device. The air-floating bearing device 10 is used for air-floating bearing of a test object, where the test object may be, for example, a wafer. Figure 1 and Figure 2, the air-floating bearing device 10 provided in the embodiment of the present invention, for example, includes: a bearing layer 100, a spacer layer 200 and an air-path connecting layer 300. Among them, the spacer layer 200 is connected to one side of the bearing layer 100, and the air-path connecting layer 300 is connected to the side of the spacer layer 200 away from the bearing layer 100. Further, for example, a first air pressure channel 410 and a second air pressure channel 420 for air-floating bearing of the test piece may be formed between the bearing layer 100, the spacer layer 200 and the air-path connecting layer 300. Specifically, the first air pressure channel 410 and the second air pressure channel 420 respectively pass through the bearing layer 100, the spacer layer 200 and the air-path connecting layer 300 from the side of the bearing layer 100 away from the air-path connecting layer 300 in sequence, and extend to the side of the air-path connecting layer 300 away from the bearing layer 100. Among them, the air pressure of the air flow in the first air pressure channel 410 is greater than an air pressure threshold, that is, the air flow in the channel is positive pressure gas, that is, the first air pressure channel 410 is, for example, a positive air pressure channel. The air pressure of the air flow in the second air pressure channel 420 is less than the air pressure threshold, that is, the air flow in the channel is negative pressure gas, that is, the second air pressure channel 420 is, for example, a negative air pressure channel. The first air pressure channel 410 is used to send out an air flow to float the test piece, and the second air pressure channel 420 is used to discharge the air flow blocked by the test piece between the air floating bearing device 10 and the test piece, and then cooperate with the air flow sent out by the first air pressure channel 410 so that the air floating bearing device 10 can carry the test piece by air floating.

[0043] Furthermore, a first cavity 510 is formed between the spacer layer 200 and the bearing layer 100, and a second cavity 520 is formed between the air path connection layer 300 and the spacer layer 200. The air pressure of the airflow in the first cavity 510 is greater than a pressure threshold, that is, the relative pressure is a positive value; the air pressure of the airflow in the second cavity 520 is less than the pressure threshold, that is, the relative pressure is a negative value. It should be noted that the pressure threshold mentioned above can be determined according to actual needs, such as standard atmospheric pressure or zero.

[0044] Specifically, see Figure 2 and Figure 3The bearing layer 100 may, for example, include a bearing surface 110 away from the spacer layer 200. The bearing surface 110 may, for example, be circular, and the test piece may, for example, be carried on the bearing surface 110 by air floating. The bearing surface 110 may, for example, be provided with a plurality of first air holes 111 and a plurality of second air holes 112. Among them, the plurality of first air holes 111 are used to send out airflow to float the test piece, and the plurality of second air holes 112 are used to discharge the excess airflow between the air floating bearing device 10 and the test piece. The airflow sent out by the first air holes 111 and the airflow discharged by the second air holes 112 cooperate with each other so that the air floating bearing device 10 can carry the test piece by air floating. The plurality of first air holes 111 and the plurality of second air holes 112 may, for example, be alternately arranged on the bearing surface 110, and form a plurality of circles of air pressure holes distributed in a circular ring shape with the axis of the bearing surface 110 as the center. In this way, the air supply efficiency of the multiple first air holes 111 and the exhaust efficiency of the multiple second air holes 112 can be made similar, so that the air flotation bearing effect of the air flotation bearing device 10 is better. Furthermore, the multiple circles of air pressure holes may, for example, include an outer circle of air pressure holes close to the edge of the bearing surface 110 and an inner circle of air pressure holes close to the axis of the bearing surface 110, and the pore density of the outer circle of air pressure holes is not equal to the pore density of the inner circle of air pressure holes. Preferably, the pore density of the outer circle of air pressure holes is greater than the pore density of the inner circle of air pressure holes. In this way, the exhaust efficiency of the central area and the edge area of ​​the workpiece to be tested by the air flotation bearing device 10 can be made similar, thereby reducing the uneven air flotation bearing of different areas of the workpiece to be tested due to the large difference in the exhaust efficiency of the central area and the edge area of ​​the workpiece to be tested by the air flotation bearing device 10. Furthermore, the aperture range of the first pore 111 can be, for example, 0.03-0.07 mm, so that the aperture of the first pore 111 in the central area of ​​the carrier layer 100 can be prevented from being too large and reducing the pressure of the positive pressure gas, thereby resulting in a poor flotation effect; in addition, it can also prevent the aperture of the first pore 111 from being too small, resulting in a small blown air flow, thereby resulting in a poor flotation effect. Preferably, the aperture size of the first pore 111 can be, for example, 0.05 mm. The aperture range of the second pore 112 can also be, for example, 0.03-0.07 mm, and preferably, the aperture size of the second pore 112 can also be, for example, 0.05 mm.

[0045] Based on the above, a first main air duct 120 and a plurality of first branch air ducts 130 are provided on the side of the bearing layer 100 adjacent to the spacer layer 200 and opposite to the bearing surface 110. The first main air duct 120 may be, for example, a hollow circular tube, and is provided near the center of the bearing layer 100 and connected to the first cavity 510. The plurality of first air holes 111, the first main air duct 120 and the first cavity 510 may, for example, form a first air pressure channel 410. The first branch air duct 130 may also be, for example, a hollow tubular structure, and the plurality of first branch air ducts 130 are connected to the plurality of second air holes 112 in a one-to-one correspondence. Furthermore, a plurality of first mounting holes 140 may be provided at the edge of the bearing layer 100, and the plurality of first mounting holes 140 may, for example, penetrate the bearing layer 100.

[0046] As mentioned above, see Figure 4 The spacer layer 200 is provided with a first main airway through hole 210 corresponding to the first main airway 120, and the first main airway through hole 210 penetrates the spacer layer 200. The first main airway 120 passes through the first main airway through hole 210 and extends to the side of the spacer layer 200 away from the bearing layer 100. Further, see Figure 5 and Figure 6 , a first annular groove 230 is provided at an edge of the spacer layer 200 adjacent to the bearing layer 100, and a second annular groove 240 is provided at an edge of the spacer layer 200 adjacent to the gas path connection layer 300. A first sealing member 610 may be provided in the first annular groove 230, for example, and the first sealing member 610 abuts against the spacer layer 200 and the bearing layer 100; a second sealing member 620 may be provided in the second annular groove 240, for example, and the second sealing member 620 abuts against the spacer layer 200 and the gas path connection layer 300. For example, the first sealing member 610 and the second sealing member 620 may be sealing rings such as rubber O-rings. The first seal 610 and the second seal 620 are provided to seal the spacer layer 200 and the bearing layer 100, and the spacer layer 200 and the air path connecting layer 300, so as to ensure the sealing of the positive pressure gas in the first air pressure channel 410 and the negative pressure gas in the second air pressure channel 420, thereby maintaining the air pressure stability of the first air pressure channel 410 and the second air pressure channel 420, and improving the air flotation effect of the air flotation bearing device 10.

[0047] Furthermore, see Figure 4 The spacer layer 200 is also provided with a plurality of first airway tube via holes 220, and the plurality of first airway tube via holes 220 respectively penetrate the spacer layer 200. The plurality of first airway tube via holes 220 correspond to the plurality of first airway tubes 130 one by one, and the plurality of first airway tubes 130 pass through the plurality of first airway tube via holes 220 and extend to the side of the spacer layer 200 away from the bearing layer 100, and are connected to the second cavity 520. Further, see Figure 7 Each of the first branch airway tubes 130 may, for example, include a thick branch airway tube end 131 and a thin branch airway tube end 132, wherein the thick branch airway tube end 131 is connected to the thin branch airway tube end 132, and a step surface is formed at the connection between the thick branch airway tube end 131 and the thin branch airway tube end 132. The thin branch airway tube end 132 may, for example, be inserted into the first branch airway tube through hole 220 corresponding to the first branch airway tube 130, and the step surface abuts on the side of the spacer layer 200 adjacent to the bearing layer 100. The step surface may, for example, be provided with a third annular groove 133, and a third sealing member 630 may, for example, be provided in the third annular groove 133, and the third sealing member 630 may, for example, abut against the spacer layer 200 and one end of the thick branch airway tube end 131 close to the spacer layer 200. The third sealing member 630 may, for example, be a sealing ring such as an O-shaped rubber ring. The end of the thin air guide tube end 132 away from the bearing layer 100 may be provided with an external thread 1321, and the spacer layer 200 is further provided with a plurality of fastening nuts (not shown in the figure), which are connected to the first air guide tube 130 through the external thread 1321 and abut against the side of the spacer layer 200 away from the bearing layer 100. The provision of the fastening nuts is conducive to sealing between the bearing layer 100 and the spacer layer 200, and can further improve the connection fastness of the air floating bearing device 10.

[0048] See also Figure 7 , a first chamfer 221 is further provided on the side of the first branch air guide tube through hole 220 away from the bearing layer 100, and the first chamfer 221 may be, for example, a conical groove. A fourth sealing member (not shown in the figure) may be provided in the first chamfer 221, and the fourth sealing member may, for example, abut against the first chamfer 221 and the thin branch air guide tube end 132. Preferably, the fourth sealing member may be, for example, a glue sealing structure, for example, the glue sealing structure may be formed by providing glue in the first chamfer 221. Providing a variety of sealing structures can improve the air tightness of the present air floating bearing device 10, thereby improving the air floating bearing effect.

[0049] As mentioned above, see Figure 4 , Figure 5 and Figure 6, the edge position of the spacer layer 200 may be provided with a plurality of second mounting holes 250, for example, wherein the first part of the plurality of second mounting holes 250 may be provided, for example, in one-to-one correspondence with the plurality of first mounting holes 140, and the projection centers of the plurality of first mounting holes 140 and the plurality of second mounting holes 250 on the bearing layer 100 may be located, for example, on the same circumference. The plurality of first fasteners 710 may, for example, pass through the plurality of first mounting holes 140 and be connected in the first part of the second mounting holes 250 corresponding to the plurality of first mounting holes 140, for example, the first fasteners 710 may, for example, be threaded fasteners. In this way, the connection between the bearing layer 100 and the spacer layer 200 can be made tighter, so as to improve the fastening strength of the air-floating bearing device 10, and further improve the air-floating bearing effect of the air-floating bearing device 10.

[0050] See also Figure 8 , the air path connection layer 300 is provided with a second main airway via 310 corresponding to the first main airway via 210, and the second main airway via 310 penetrates the air path connection layer 300. The first main airway 120 sequentially penetrates the first main airway via 210 and the second main airway via 310, and extends to the side of the air path connection layer 300 away from the spacing layer 200. In addition, the air path connection layer 300 is also provided with a second main airway 320, and the second main airway 320 is connected to the second cavity 520. The plurality of second air holes 112, the plurality of first branch airways 130, the second main airway 320 and the second cavity 520 can, for example, form a second air pressure channel 420. In addition, see Fig. 9 and Fig.10 , the edge position of the gas path connection layer 300 may be provided with a plurality of third mounting holes 330, for example, the plurality of third mounting holes 330 may be located at the edge position of the gas path connection layer 300, and the plurality of third mounting holes 330 may be arranged one-to-one with the second part second mounting holes of the plurality of second mounting holes 250. The projection centers of the plurality of second mounting holes 250 and the plurality of third mounting holes 330 on the bearing layer 100 may be located on the same circumference, for example. Furthermore, the projections of the plurality of first mounting holes 140 and the plurality of third mounting holes 330 on the bearing layer 100 are spaced from each other and arranged alternately on the circumference. The plurality of second fasteners 720 may, for example, pass through the plurality of third mounting holes 330 and be connected in the second part second mounting holes 250 corresponding to the plurality of third mounting holes 330. For example, the plurality of second fasteners 720 may, for example, be threaded fasteners. In this way, the connection between the spacer layer 200 and the air path connection layer 300 can be made tighter, so as to improve the fastening strength of the air floating bearing device 10 , and further improve the air floating bearing effect of the air floating bearing device 10 .

[0051] In a specific implementation of this embodiment, see Figure 5 and Fig.11The first air hole 111 and the second air hole 112 may be provided with an air pressure control screw 1111 and an air pressure control screw 1121, respectively, for controlling and adjusting the pressure in the first air hole 111 and the second air hole 112. Fig.11 , the inner walls of the first air hole 111 and the second air hole 112 are respectively provided with internal threads, and the outer walls of the air pressure control screw 1111 and the air pressure control screw 1121 may be provided with external threads, and the air pressure control screw 1111 and the air pressure control screw 1121 may be connected in the first air hole 111 and the second air hole 112, for example, through external threads and internal threads. Further, the air pressure control screw 1111 is provided with an air pressure control hole 1112, and the air pressure control hole 1112 communicates with the first air hole 111 and the first cavity 510. The air pressure control screw 1121 is provided with an air pressure control hole 1122, and the air pressure control hole 1122 communicates with the second air hole 112 and the second cavity 520. The pressure in the first air hole 111 and the second air hole 112 may be adjusted, for example, by adjusting the aperture sizes of the air pressure control holes 1112 and the air pressure control holes 1122.

[0052] In another specific implementation of this embodiment, see Fig.12 and Fig.13 , the bearing layer 100 is further provided with a plurality of fourth mounting holes 150 on the side away from the bearing surface 110, and the spacer layer 200 may be provided with first fastener through holes 260 corresponding to the plurality of fourth mounting holes 150, for example. The plurality of third fasteners 730 respectively pass through the plurality of first fastener through holes 260 and are connected to the plurality of fourth mounting holes 150. For example, the third fasteners 730 may be fastening screws. See also Fig.13 , the spacer layer 200 may be provided with a plurality of fifth mounting holes 270 on one side away from the bearing surface 110, and the gas path connection layer 300 may be provided with a plurality of second fastener holes 340 corresponding to the plurality of fifth mounting holes 270. The plurality of fourth fasteners 740 respectively pass through the plurality of second fastener holes 340 and are connected to the plurality of fifth mounting holes 270. For example, the fourth fasteners 740 may also be fastening screws. The provision of the plurality of third fasteners 730 and the plurality of fourth fasteners 740 is conducive to increasing the strength of the bearing device 10, thereby improving the fastening strength of the bearing device 10.

[0053] In summary, the air-floating bearing device 10 provided in the embodiment of the present invention is used for air-floating bearing of the test piece by setting the first air path channel and the second air path channel. Specifically, the embodiment of the present invention sets a specific air path structure including the first air hole and the second air hole for air-floating bearing of the test piece to improve the bearing effect of the air-floating bearing device. On the one hand, the embodiment of the present invention is provided with a plurality of fasteners to fasten the bearing layer, the spacer layer, and the air path connection layer to improve the fastening strength and air-floating bearing effect of the air-floating bearing device; on the other hand, the embodiment of the present invention is provided with a plurality of seals for sealing the air path connection channel to improve the air tightness of the air-floating bearing device, thereby improving the air-floating bearing effect of the air-floating bearing device. In addition, the embodiment of the present invention also sets different air hole densities of the inner and outer ring air pressure holes to improve the air-floating bearing effect of the air-floating bearing device; sets the appropriate aperture size of the first air hole and the second air hole to improve the air-floating bearing effect; and sets air pressure adjustment screws in the first air hole and the second air hole to facilitate adjusting the pressure in the first air hole and the second air hole.

[0054] In a specific implementation of this embodiment, see Fig.14 , the air-floating bearing device 10 may, for example, further include a warping correction structure 800. The warping correction structure 800 is used to correct the warping of the piece to be tested when the piece to be tested is warped. Simply put, the warping condition of the piece to be tested may, for example, include a warping condition in which the middle part of the piece to be tested is convex and a warping condition in which the middle part of the piece to be tested is concave. When the piece to be tested is warped in which the middle part is convex, the warping correction structure 800 adsorbs the convex part in the middle of the piece to be tested; when the piece to be tested is warped in which the middle part is concave, the warping correction structure 800 supplies air to the concave part in the middle of the piece to be tested, thereby completing the warping correction, thereby improving the surface flatness of the piece to be tested, and thereby improving the detection accuracy of the piece to be tested.

[0055] Specifically, see Figure 3 , Figure 4 and Figure 8 The middle of the bearing surface 110 may be provided with a sixth mounting hole 113, the middle of the spacer layer 200 may be provided with a first positioning hole 280 that is connected to the sixth mounting hole 113 and passes through the spacer layer 200, and the middle of the gas path connection layer 300 may be provided with a second positioning hole 350 that is connected to the first positioning hole 280 and passes through the gas path connection layer 300. Further, see Fig.15, the warpage correction structure 800 may, for example, include a correction disk 810, an air guide 820, and an air path control component 830. The correction disk 810 may, for example, be fixedly disposed in the sixth mounting hole 113, and the correction disk 810 is provided with a first correction air pressure channel 811. The air guide 820 is connected to the side of the correction disk 810 away from the bearing surface 110, and is disposed in the first positioning hole 280 and the second positioning hole 350. The air guide 820 is provided with a second correction air pressure channel 821, and the second correction air pressure channel 821 is connected to the first correction air pressure channel 811. The air path control component 830 is disposed on the side of the air path connection layer 300 away from the bearing surface 110, and is provided with a third correction air pressure channel 831, and the third correction air pressure channel 831 is connected to the second correction air pressure channel 821. The first correction air pressure channel 811 , the second correction air pressure channel 821 and the third correction air pressure channel 831 cooperate with each other so that the air floating bearing device 10 can correct the warping of the workpiece to be tested.

[0056] Specifically, see Fig.16 , the outer side surface of the correction disk 810 adjacent to the bearing surface 110 is circular, and a plurality of axial air holes 812 are arranged on the outer side surface of the correction disk 810. For example, the plurality of axial air holes 812 are used to correct the warping of the test piece. Among them, the plurality of axial air holes 812 are arranged on the outer side surface of the correction disk 810 at intervals from each other and arranged in a circular ring. In this way, the air delivery efficiency or adsorption efficiency of the plurality of axial air holes 812 is similar, thereby improving the correction effect on the warping of the test piece. The correction disk 810 is also provided with a plurality of radial air holes 813, and the plurality of radial air holes 813 can, for example, be connected to the plurality of axial air holes 812 in a one-to-one correspondence. A first connecting hole 814 is provided at the center of one side of the correction disk 810 away from the outer side surface of the correction disk 810, and the first connecting hole 814 connects the plurality of radial air holes 813 and the second correction air pressure channel 821. The plurality of radial air holes 813 are evenly distributed around the axis of the correction disk 810 and intersect at the first connecting hole 814. The plurality of radial air holes 813 are used to connect the plurality of axial air holes 812 and the first connecting hole 814. The plurality of axial air holes 812, the plurality of radial air holes 813 and the first connecting hole 814 may, for example, form the first correction air pressure channel 811.

[0057] See also Fig.17, the air guide 820 may include, for example, a connector 822 and an air guide tube 823, one end of the connector 822 is connected to the side of the correction disk 810 away from the bearing surface 110, and the other end of the connector 822 is connected to the air guide tube 823. Specifically, the connector 822 may be, for example, a cylinder, and is correspondingly arranged at the first connecting hole 814. The connector 822 may be, for example, provided with a connecting hole 8221, and the connecting hole 8221 may be, for example, arranged at the axis of the connector 822, and penetrate the connector 822 and connect to the air guide tube 823. The connecting hole 8221 is used to connect the first correction air pressure channel 811 and the air guide tube 823, and the connecting hole 8221 and the air guide tube 823 may, for example, form a second correction air pressure channel 821. The air guide tube 823 may be, for example, a hollow cylinder. One end of the air guide tube 823 away from the connector 822 passes through the first positioning hole 280 and the second positioning hole 350 , and is connected to the air path control component 830 .

[0058] As mentioned above, see Fig.18 , the gas circuit control component 830 may, for example, include: a gas circuit connector 832. The gas circuit connector 832 is arranged on the side of the gas circuit connection layer 300 away from the spacer layer 200. The gas circuit connector 832 is provided with a first through hole 8321 and a second through hole 8322, and the first through hole 8321 and the second through hole 8322 intersect and communicate with each other, wherein one end of the air guide tube 823 away from the connector 822 passes through the first positioning hole 280 and the second positioning hole 350, and extends into the first through hole 8321, thereby connecting to the gas circuit control component 830. The first through hole 8321 may, for example, pass through the gas circuit connector 832, and one end of the first through hole 8321 away from the air guide tube 823 is connected to an external gas source. The first through hole 8321 and the second through hole 8322 may, for example, form a third corrective air pressure channel 831, and one end of the air guide tube 823 away from the connecting head 822 extends into the first through hole 8321 and is connected to the third corrective air pressure channel 831, that is, the first corrective air pressure channel 811 may, for example, be connected to the third corrective air pressure channel 831 through the second corrective air pressure channel 821.

[0059] Further, see Fig.19, the air path control component 830 may, for example, further include a third connecting pipe 833 and a conversion valve 834. One end of the third connecting pipe 833 may, for example, be connected to the second through hole 8322. Specifically, the third connecting pipe 833 may, for example, be an elbow connection component. The conversion valve 834 may, for example, be disposed at one end of the third connecting pipe 833 away from the second through hole 8322. The conversion valve 834 may, for example, be connected to the second through hole 8322 through the third connecting pipe 833, that is, the conversion valve 834 may, for example, be connected to the third corrective air pressure channel 831 through the third connecting pipe 833. In addition, the end of the conversion valve 834 away from the third connecting pipe 833 may also, for example, be connected to a positive pressure air source or a negative pressure air source. The conversion valve 834 can be used to convert the third correction air pressure channel 831 to connect to a positive pressure air source or a negative pressure air source, so that the multiple axial air holes 812 on the correction disk 810 can deliver air or adsorb, thereby enabling the air floating support device 10 to correct the warping of the test piece.

[0060] In accordance with the above, see Fig.18 , the gas circuit connector 832 may, for example, be provided with a first gas circuit access channel 8323 and a second gas circuit access channel 8326. Among them, the first gas circuit access channel 8323 may, for example, be provided corresponding to the second main gas pipe through hole 310, and the first gas circuit access channel 8323 may, for example, be connected to the first main gas pipe 120. Specifically, the first gas circuit access channel 8323 includes a first longitudinal access hole 8324 and a first transverse access hole 8325, the first longitudinal access hole 8324 connects the first transverse access hole 8325 and the first main gas pipe 120, and the first transverse access hole 8325 may, for example, be connected to an external positive pressure gas source. Based on the above, the second gas circuit access channel 8326 may, for example, be provided corresponding to the second main gas pipe 320, and the second gas circuit access channel 8326 may, for example, be connected to the second main gas pipe 320. Specifically, the second gas access channel 8326 includes a second longitudinal access hole 8327 and a second transverse access hole 8328, the second longitudinal access hole 8327 connects the second transverse access hole 8328 and the second main gas pipe 320, and the second transverse access hole 8328 can be connected to an external negative pressure gas source, for example.

[0061] Furthermore, see Fig.19, the air circuit control component 830 may, for example, include a first connecting pipe 835 and a second connecting pipe 836. One end of the first connecting pipe 835 may, for example, be connected to the first air circuit access channel 8323, and the other end of the first connecting pipe 835 may, for example, be connected to an external positive pressure gas source. Specifically, one end of the first connecting pipe 835 may, for example, be connected to the first transverse access hole 8325, and the first main air pipe 120 may, for example, be connected to the first connecting pipe 835 through the first longitudinal access hole 8324. One end of the second connecting pipe 836 may, for example, be connected to the second air circuit access channel 8326, and the other end of the second connecting pipe 836 may, for example, be connected to an external negative pressure gas source. Specifically, one end of the second connecting pipe 836 may, for example, be connected to the second transverse access hole 8328, and the second main air pipe 320 may, for example, be connected to the second connecting pipe 836 through the second longitudinal access hole 8327.

[0062] In a specific implementation method of this embodiment, see Fig.18 The gas circuit control component 830 may also include, for example, a first pressure regulating valve 837 and a second pressure regulating valve 838. The first pressure regulating valve 837 is connected to the first longitudinal access hole 8324 for controlling the pressure in the first gas pressure channel 410, and the second pressure regulating valve 838 is connected to the second longitudinal access hole 8327 for controlling the pressure in the second gas pressure channel 420.

[0063] In summary, the air-floating bearing device 10 provided in the embodiment of the present invention is used for air-floating bearing of the workpiece to be tested by setting the first air path channel and the second air path channel. On the one hand, the embodiment of the present invention is provided with a plurality of fasteners to fasten and connect the bearing layer, the spacer layer, and the air path connection layer to improve the fastening strength and air-floating bearing effect of the air-floating bearing device; on the other hand, the embodiment of the present invention is provided with a plurality of seals to seal the air path connection channel to improve the air tightness of the air-floating bearing device, thereby improving the air-floating bearing effect of the air-floating bearing device. Furthermore, the embodiment of the present invention is provided with a warping correction structure to correct the warping of the workpiece to be tested, thereby improving the surface flatness of the workpiece to be tested, thereby improving the air-floating bearing effect of the air-floating bearing device on the workpiece to be tested. In addition, the embodiment of the present invention also sets different pore densities of the inner and outer ring air pressure holes to improve the air-floating bearing effect of the air-floating bearing device; sets the appropriate aperture size of the first pore and the second pore to improve the air-floating bearing effect; and sets air pressure adjustment screws in the first pore and the second pore to facilitate adjusting the pressure in the first pore and the second pore.

[0064] It can be understood that the aforementioned embodiments are merely exemplary descriptions of the present invention. The technical solutions of the various embodiments can be arbitrarily combined and used in combination, provided that the technical features do not conflict, the structures do not contradict, and the purpose of the present invention is not violated.

[0065] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. An air-floating bearing device, characterized in that: include: Bearing layer; A spacer layer connected to one side of the bearing layer; An air path connection layer connected to a side of the spacer layer away from the bearing layer; Among them, a first air pressure channel and a second air pressure channel for air-floating the test piece are formed between the bearing layer, the spacing layer and the air path connection layer; the first air pressure channel and the second air pressure channel respectively pass through the bearing layer, the spacing layer and the air path connection layer in sequence from a side of the bearing layer away from the air path connection layer, and extend to a side of the air path connection layer away from the bearing layer; The bearing layer is provided with a mounting hole in the middle, the spacing layer is provided with a first positioning hole in the middle that is connected to the mounting hole and passes through the spacing layer, and the gas path connection layer is provided with a second positioning hole in the middle that is connected to the first positioning hole and passes through the gas path connection layer; The air-floating bearing device further includes a warping correction structure, and the warping correction structure includes: A correction disk, fixed in the mounting hole and provided with a first correction air pressure channel; an air guide connected to the correction disk and disposed in the first positioning hole and the second positioning hole, the air guide being provided with a second correction air pressure channel, the second correction air pressure channel being connected to the first correction air pressure channel; and The air path control component is connected to the side of the air path connection layer away from the bearing surface. The air path control component is provided with a third corrective air pressure channel, and the third corrective air pressure channel is connected to the second corrective air pressure channel.

2. The air-floating bearing device according to claim 1, characterized in that: The bearing layer comprises a bearing surface away from the air path connection layer, the bearing surface is provided with a plurality of first air holes and a plurality of second air holes, a first main airway and a plurality of first branch airways are further provided on a side of the bearing layer adjacent to the spacing layer and opposite to the bearing surface, the plurality of first branch airways are connected to the plurality of second air holes one by one; The spacer layer and the bearing layer form a first cavity, and the first cavity is connected to the plurality of first air holes and the first main air pipe respectively; The spacer layer is also provided with a first main airway through hole and a plurality of first branch airway through holes, the first main airway passes through the first main airway through hole, and the plurality of first branch airways pass through the first branch airway through hole; The air path connection layer and the spacer layer form a second cavity, and the first branch airway is connected to the second cavity; a second main airway is also provided on a side of the air path connection layer adjacent to the spacer layer, and the second main airway is connected to the second cavity; the air path connection layer is also provided with a second main airway through hole, and the first main airway passes through the second main airway through hole; The first air pressure channel includes the plurality of first air holes, the first cavity and the first main airway, and the second air pressure channel includes the plurality of second air holes, the plurality of first branch airways, the second cavity and the second main airway.

3. The air-floating bearing device according to claim 2, characterized in that: The bearing surface is circular in shape; the multiple first air holes and the multiple second air holes are alternately arranged on the bearing surface, and form a plurality of circles of air pressure holes distributed in a circular ring shape with the axis of the bearing surface as the center; the plurality of circles of air pressure holes include an outer circle of air pressure holes close to the edge of the bearing surface and an inner circle of air pressure holes close to the axis of the bearing surface, and the pore density of the outer circle of air pressure holes is greater than the pore density of the inner circle of air pressure holes.

4. The air-floating bearing device according to claim 2, characterized in that: The air-floating bearing device further comprises an air path control component, which is connected to a side of the air path connection layer away from the bearing layer; the air path control component comprises: an air path connector, connected to the air path connection layer and provided with a first air path access channel and a second air path access channel, wherein the first air path access channel is connected to the first main air path pipe, and the second air path access channel is connected to the second main air path pipe; a first connecting pipe connected to the first gas path access channel; and The second connecting pipe is connected to the second gas path access channel.

5. The air floating bearing device according to claim 4, characterized in that: The first gas path access channel comprises a first longitudinal access hole and a first transverse access hole, the first longitudinal access hole is connected to the first transverse access hole, and the first longitudinal access hole is also connected to the first main gas pipe; The second gas path access channel comprises a second longitudinal access hole and a second transverse access hole, the second longitudinal access hole is connected to the second transverse access hole, and the second longitudinal access hole is also connected to the second main gas pipe; The gas path control component further includes a first pressure regulating valve and a second pressure regulating valve, wherein the first pressure regulating valve is connected to the first longitudinal access hole, and the second pressure regulating valve is connected to the second longitudinal access hole.

6. The air floating bearing device according to claim 1, characterized in that: The mounting hole is a circular hole; the outer side surface of the correction disk adjacent to the bearing surface is circular, and a plurality of axial air holes are arranged on the outer side surface, and a plurality of radial air holes are also arranged on the correction disk, and the plurality of radial air holes are connected to the plurality of axial air holes one by one, and a first connecting hole is arranged on the inner side surface of the correction disk away from the outer side surface, and the first connecting hole connects the plurality of radial air holes and the second correction air pressure channel, and the plurality of axial air holes, the plurality of radial air holes and the first connecting hole form the first correction air pressure channel; the plurality of axial air holes are arranged at intervals from each other on the outer side surface and are arranged in a circular ring shape; the plurality of radial air holes are evenly distributed with the axis of the correction disk as the center, and intersect at the first connecting hole.

7. The air-floating bearing device according to claim 6, characterized in that: The air guide component includes a connecting head and an air guide tube, one end of the connecting head is connected to the air guide tube, and the other end of the connecting head is connected to the correction disk. The connecting head is provided with a connecting hole, and the connecting hole connects the first correction air pressure channel and the air guide tube. The connecting hole and the air guide tube form the second correction air pressure channel. One end of the air guide tube away from the connecting head is connected to the air path control component, and the air guide tube is also connected to the third correction air pressure channel.

8. The air-floating bearing device according to claim 7, characterized in that: The air circuit control component includes: an air circuit connector, a third connecting pipe and a conversion valve, wherein the connecting pipe is connected between the air circuit connector and the conversion valve; the air circuit connector is installed on the side of the air floating bearing device away from the bearing surface; the air circuit connector is provided with a first through hole and a second through hole, the first through hole intersects and connects with the second through hole, the air guide tube is inserted into the first through hole and connected to the third corrective air pressure channel, and the conversion valve is connected to the second through hole through the connecting pipe.

9. The air floating bearing device according to claim 2, characterized in that: The first air hole and the second air hole are respectively provided with air pressure control screws for controlling the pressure inside the first air hole and the second air hole; the outer wall of the air pressure control screw is provided with an external thread, and the air pressure control screw is connected to the first air hole and the second air hole through the external thread; the air pressure control screw is also provided with an air pressure control hole, and the air pressure control hole is connected to the first air hole or the second air hole.

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