An adsorption laser processing rotary table

Abstract

The present invention relates to an adsorption laser processing rotary table. The table comprises, from bottom to top, a fixed base, a motor, an adsorption table base, and an adsorption table. The motor is mounted on the fixed base at the bottom, and a drive end at the top of the motor is connected to the adsorption table base at the top. The adsorption table base is mounted on the adsorption table base. The present invention uses adsorption to fix and position products during laser cutting, addressing issues such as product flatness, processing efficiency, anti-static properties, and wide-angle rotation. The present invention also features an adjustment mechanism to adjust the tabletop flatness.

Description

Technical Field

[0001] The present invention relates to the technical field related to semiconductor chips, and in particular to an adsorption laser processing rotary table, and specifically to a 12-inch adsorption laser processing rotary table. Background Art

[0002] The chip manufacturing process is complex and involves many steps, among which silicon wafer cutting is one of the links. Currently, eight-inch wafers are mostly used, but they will be increased to twelve inches in the future to improve efficiency.

[0003] There are currently two methods for processing silicon wafers: one is cutting with a knife wheel; the other is laser processing;

[0004] The cutting efficiency of the cutter wheel is low, the appearance is poor, the consumables are expensive, and a lot of wastewater is generated, causing pollution;

[0005] Laser processing is highly efficient and has a consistent and beautiful appearance. Laser uses focal energy to process products, which places high demands on the flatness of the products being processed. Conventionally, eight-inch pieces are processed, but now twelve-inch pieces are required, which places higher demands on the flatness of the table. It is also necessary to be able to rotate at multiple angles for processing and to have anti-static treatment.

[0006] In view of the above-mentioned defects, the designers have actively carried out research and innovation in order to create an adsorption laser processing rotary table to make it more valuable for industrial use. Summary of the Invention

[0007] In order to solve the above technical problems, the purpose of the present invention is to provide an adsorption laser processing rotary table.

[0008] To achieve the above object, the present invention adopts the following technical solutions:

[0009] An adsorption laser processing rotary table comprises, from bottom to top, a fixed base, a motor, an adsorption table base and an adsorption table, the motor being mounted on the fixed base below, the driving end at the top of the motor being connected to the driving device of the adsorption table base above, the adsorption table being mounted on the adsorption table base, the bottom of the adsorption table base being mounted with a gas-electric slip ring, the gas-electric slip ring being connected to the first slip ring fixing plate at the top, the first slip ring fixing plate being mounted on the bottom of the adsorption table base, a second sealing ring being arranged in a groove on the first slip ring fixing plate, the bottom of the gas-electric slip ring being connected to the first sealing plate below through the second slip ring fixing plate, a second sealing plate being arranged on one side of the first sealing plate, the first sealing plate and the second sealing plate being both located in the groove at the bottom of the motor, the adsorption table being positioned on the adsorption table base by the first sealing ring and the positioning pin, the first sealing ring being placed in the central groove of the adsorption table base, the positioning pin and the conductive column being screwed into the holes of the adsorption table base respectively.

[0010] As a further improvement of the present invention, the motor is installed on the fixed base through an adjusting mechanism. The adjusting mechanism includes a bottom flat washer, a threaded sleeve, a locking nut, an adjusting nut, a spacer, an upper thick flat washer, a butterfly spring washer, an upper thin flat washer and a locking screw. The bottom flat washer is fixed on the fixed base, the adjusting nut is screwed into the internal thread of the threaded sleeve, and then screwed into the threaded hole of the motor base plate as a whole. The bottom of the motor base plate is then locked and fixed with a locking nut, the spacer is placed in the inner hole of the adjusting nut, the upper thin flat washer, four butterfly spring washers and the upper thick flat washer are sequentially inserted into the locking screw from top to bottom, and then locked as a whole through the spacer and the threaded hole of the fixed base through the locking screw.

[0011] As a further improvement of the present invention, a horizontal first limit block is provided on the side of the adsorption table base, a vertical second limit block is connected to the bottom of the first limit block, the limit pin is screwed into the threaded hole of the second limit block, and a limit mechanism is provided on the motor on one side of the adsorption table base, and the limit pin is cooperated with the limit mechanism below.

[0012] As a further improvement of the present invention, the limiting mechanism includes a base plate, a push block, a sensing sheet, a guide rail, a slider and a sensor. The two sensors are fixed on both sides of the base plate along the Y-axis direction. The guide rail is installed on the base plate along the Y-axis direction. The push block is connected to the guide rail below through the slider at the bottom. The sensing sheet is installed on both sides of the push block along the Y-axis direction. The limiting pin is cooperated with the push block below.

[0013] As a further improvement of the present invention, the guide rails are mounted on the base plate through baffles on both sides along the Y-axis direction, and two tension springs are arranged on the base plate between the baffles along the Y-axis direction. One end of the two tension springs along the Y-axis direction is fixed to the base plate, and the other end of the two tension springs along the Y-axis direction is connected to the push block.

[0014] As a further improvement of the present invention, joints are respectively connected on both sides of the gas-electric slip ring, and the two joints are respectively connected to two vacuum lines. One of the vacuum lines enters the internal flow channel of the adsorption table base through the gas-electric slip ring, forming a vacuum between the adsorption table base and the adsorption table, which can fix the adsorption table. When the vacuum is turned off, the adsorption table can be removed; the other vacuum line directly enters the porous material on the upper surface of the adsorption table to adsorb the processed products. When the motor rotates, the gas-electric slip ring ensures that the two vacuum lines are not disconnected.

[0015] By means of the above solution, the present invention has at least the following advantages:

[0016] The present invention uses laser cutting to adsorb, fix and position the product, solving the problems of product flatness, processing efficiency, anti-static and large-angle rotation; the present invention can adjust the flatness of the table through an adjustment mechanism.

[0017] The above description is only an overview of the technical solution of the present invention. In order to more clearly understand the technical means of the present invention and implement it according to the contents of the specification, the following is a detailed description of the preferred embodiments of the present invention with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following briefly introduces the drawings required for use in the embodiments. It should be understood that the following drawings only illustrate certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying any creative work.

[0019] Figure 1 This is a structural schematic diagram of an adsorption laser processing rotary table of the present invention;

[0020] Figure 2 yes Figure 1 Schematic diagram of the structure after removal;

[0021] Figure 3 yes Figure 1 or Figure 2 Schematic diagram of the internal structure of the middle adjustment mechanism;

[0022] Figure 4 yes Figure 1 Schematic diagram of the internal structure;

[0023] Figure 5 yes Figure 1 or Figure 2 Schematic diagram of the structure of the middle limit mechanism;

[0024] Figure 6 yes Figure 4 Schematic diagram of the structure of the slip ring part of the Zhongqi Electric.

[0025] The meanings of the reference numerals in the figures are as follows.

[0026] 1 Fixed base 2 Motor

[0027] 3 Adsorption platform 4 Adjustment mechanism

[0028] 5 Limiting mechanism 6 Adsorption platform base

[0029] 7 First sealing ring 8 Positioning pin

[0030] 9 First limit block 10 Second limit block

[0031] 11 Limit pin 12 Conductive column

[0032] 13 Pneumatic slip ring 14 First slip ring fixing plate

[0033] 15 Second sealing ring 16 Second slip ring fixing plate

[0034] 17 Joint 18 First sealing plate

[0035] 19 Second sealing plate 4-1 bottom flat pad

[0036] 4-2 threaded sleeve 4-3 lock nut

[0037] 4-4 Adjusting nut 4-5 Spacer

[0038] 4-6 upper thick flat washer 4-7 butterfly spring washer

[0039] 4-8 upper thin flat washer 4-9 locking screw

[0040] 5-1 bottom plate 5-2 baffle

[0041] 5-3 push block 5-4 sensor piece

[0042] 5-5 guide rail 5-6 slider

[0043] 5-7 sensor 5-8 tension spring

[0044] A first adjustment point B second adjustment point

[0045] C third adjustment point D fourth adjustment point

[0046] E fifth adjustment point DETAILED DESCRIPTION

[0047] The following embodiments of the present invention are described in further detail with reference to the accompanying drawings and examples. The following examples are used to illustrate the present invention but are not intended to limit the scope of the present invention.

[0048] In order to enable those skilled in the art to better understand the solutions of the present invention, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. The components of the embodiments of the present invention generally described and shown in the drawings herein can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the present invention provided in the drawings is not intended to limit the scope of the invention claimed for protection, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without making creative work are within the scope of protection of the present invention.

[0049] Example

[0050] like Figures 1 to 6 As shown,

[0051] An adsorption laser processing rotary table, which includes a fixed base 1, a motor 2, an adsorption table base 6 and an adsorption table 3 from bottom to top. The motor 2 is installed on the fixed base 1 at the bottom. The driving end of the top of the motor 2 is connected to the adsorption table base 6 at the top. The adsorption table 3 is installed on the adsorption table base 6. The bottom of the adsorption table base 6 is installed with a gas-electric slip ring 13. The gas-electric slip ring 13 is connected to the first slip ring fixing plate 14 at the top. The first slip ring fixing plate 14 is installed at the bottom of the adsorption table base 6. The groove on the first slip ring fixing plate 14 is provided with a first Second sealing ring 15, the bottom of the gas-electric slip ring 13 is connected to the first sealing plate 18 below through the second slip ring fixing plate 16. A second sealing plate 19 is provided on one side of the first sealing plate 18. The first sealing plate 18 and the second sealing plate 19 are both located in the groove at the bottom of the motor 2. The adsorption platform 3 is positioned on the adsorption platform base 6 through the first sealing ring 7 and the positioning pin 8, and is fixed to the adsorption base 6 by vacuum. The first sealing ring 7 is placed in the central groove of the adsorption platform base 6, and the positioning pin 8 and the conductive column 12 are respectively screwed into the holes of the adsorption platform base 6.

[0052] Preferably, the motor 2 is installed on the fixed base 1 through an adjusting mechanism 4, and the adjusting mechanism 4 includes a bottom flat washer 4-1, a threaded sleeve 4-2, a locking nut 4-3, an adjusting nut 4-4, a spacer 4-5, an upper thick flat washer 4-6, a butterfly spring washer 4-7, an upper thin flat washer 4-8 and a locking screw 4-9. The bottom flat washer 4-1 is fixed on the fixed base 1, the adjusting nut 4-4 is screwed into the internal thread of the threaded sleeve 4-2, and then screwed into the threaded hole of the bottom plate of the motor 2 as a whole, and the bottom of the bottom plate of the motor 2 is then locked and fixed with the locking nut 4-3, the spacer 4-5 is placed in the inner hole of the adjusting nut 4-4, the upper thin flat washer 4-8, four butterfly spring washers 4-7 and the upper thick flat washer 4-6 are sequentially inserted into the locking screw 4-9 from top to bottom, and then locked as a whole through the spacer 4-5 and the threaded hole of the fixed base 1 through the locking screw 4-9.

[0053] Preferably, a horizontal first limit block 9 is provided on the side of the adsorption table base 6, and a vertical second limit block 10 is connected to the bottom of the first limit block 9. The limit pin 11 is screwed into the threaded hole of the second limit block 10. A limit mechanism 5 is provided on the motor 2 on one side of the adsorption table base 6, and the limit pin 11 is provided in cooperation with the limit mechanism 5 below.

[0054] Preferably, the limiting mechanism 5 includes a base plate 5-1, a push block 5-3, a sensor sheet 5-4, a guide rail 5-5, a slider 5-6 and a sensor 5-7. The two sensors 5-7 are fixed on the base plate 5-1 on both sides along the Y-axis direction. The guide rail 5-5 is installed on the base plate 5-1 along the Y-axis direction. The push block 5-3 is connected to the guide rail 5-5 below through the slider 5-6 at the bottom. The sensor sheet 5-4 is installed on both sides of the push block 5-3 along the Y-axis direction. The limiting pin 11 is arranged in cooperation with the push block 5-3 below.

[0055] Preferably, the guide rail 5-5 is installed on the base plate 5-1 through baffles 5-2 on both sides along the Y-axis direction, and two tension springs 5-8 are arranged on the base plate 5-1 between the baffles 5-2 along the Y-axis direction. One end of the two tension springs 5-8 along the Y-axis direction is fixed to the base plate 5-1, and the other end of the two tension springs 5-8 along the Y-axis direction is connected to the push block 5-3.

[0056] Preferably, joints 17 are connected to both sides of the gas-electric slip ring 13, and the two joints 17 are connected to two vacuum lines respectively. One vacuum line enters the internal flow channel of the adsorption platform base 6 through the gas-electric slip ring 13, forming a vacuum between the adsorption platform base 6 and the adsorption platform 3, which can fix the adsorption platform 3. The adsorption platform 3 can be removed when the vacuum is turned off; the other vacuum line directly enters the porous material on the upper surface of the adsorption platform 3 to adsorb the processed products. When the motor 2 rotates, the gas-electric slip ring 13 ensures that the two vacuum lines are not disconnected.

[0057] Working principle and working process of the present invention:

[0058] After the entire mechanism is assembled, the flatness of the adsorption platform 3 must first be adjusted using the adjustment mechanism 4. Adjustment nut 4-4 mates with threaded sleeve 4-2 using a 0.25mm fine-pitch thread. By turning the hexagonal socket at the lower end of adjustment nut 4-4, the entire height above motor 2 can be adjusted vertically, leaving approximately 2mm of clearance between motor 2 and fixed base 1 for leveling. Turning locking screw 4-9 depresses butterfly spring washer 4-7. After being compressed by approximately 2mm, butterfly spring washer 4-7 stops, leaving the remaining compressible space for leveling. The motor 2 is fixed to fixed base 1 in opposition to the force exerted by the compression of butterfly spring washer 4-7.

[0059] The two connectors 17 are connected to two vacuum lines respectively. One of the vacuum lines enters the internal flow channel of the adsorption platform base 6 through the pneumatic slip ring 13, forming a vacuum between the adsorption platform base 6 and the adsorption platform 3, which can fix the adsorption platform 3. When the vacuum is turned off, the adsorption platform 3 can be removed and replaced with an adsorption platform of a different size; the other vacuum line directly enters the porous material on the upper surface of the adsorption platform 3 to adsorb the processed products. When the motor 2 rotates, the pneumatic slip ring 13 ensures that the two vacuum lines are not disconnected.

[0060] When the motor 2 rotates, the limit pin 11 hits the push block 5-3, and the slider 5-6 connected to the push block 5-3 slides along the guide rail 5-5. The tension spring 5-8 on one side is stretched and the tension spring 5-8 on the other side is compressed. When the induction sheet 5-4 on the push block 5-3 moves to the sensor 5-7, an in-position sensing signal is output, and the motor 2 stops rotating. When the motor 2 rotates in the opposite direction, the tension spring 5-8 is restored to move the push block 5-3 to the middle position. The limit pin 11 rotates from the other direction and the same action process is performed. In this way, the motor 2 can be rotated 380 degrees, and cutting at any angle can be achieved.

[0061] Static electricity treatment: When the adsorption platform 3 is placed on the adsorption platform base 6, the conductive column 12 is compressed, and the upper surface of the adsorption platform 3 is inlaid with porous silicon carbide material for adsorption. The interior of the adsorption platform 3 is inlaid with a metal part. The upper surface of the metal part is conductive to the silicon carbide, and the lower surface of the metal part is in contact with the conductive column 12. The conductive column 12 is installed on the metal part inlaid on the adsorption platform base 6. The back of this metal part is connected to the wire of the gas-electric slip ring 13. The wire coming out of the gas-electric slip ring 13 is grounded. Finally, the static electricity on the surface of the adsorption platform 3 can be successfully discharged, thereby achieving the purpose of eliminating static electricity.

[0062] Leveling steps: reserve 2mm space between the adjusting nuts 4-4 of the fourth adjusting point D and the fifth adjusting point E and the bottom flat washer 4-1, and do not screw the locking screws 4-9 of these two points into the threaded holes of the fixed base 1; measure the surface flatness of the adsorption platform 3 through the imaging mechanism, adjust the first adjusting point A, the second adjusting point B, and the third adjusting point C. The three points determine a plane. After the level is adjusted, rotate the adjusting nuts 4-4 of the fourth adjusting point D and the fifth adjusting point E downward to fit with the bottom flat washer 4-1, and then screw the locking screws 4-9 of these two points into the threaded holes of the fixed base 1 and lock them to achieve overall strengthening of the connection between the motor 3 and the fixed base 1.

[0063] This invention provides adsorption, fixation, and positioning for laser cutting of 12-inch silicon wafers, addressing issues such as product flatness, processing efficiency, anti-static properties, and wide-angle rotation. The invention utilizes a threaded structure with spring washers to adjust the tabletop's flatness; a slider's movement limiter enables wide-angle rotation of the motor; and porous silicon carbide, in conjunction with conductive pillars and slip rings, achieves static dissipation, meeting semiconductor industry requirements. Laser processing improves efficiency and enhances product appearance.

[0064] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like to indicate directions or positional relationships based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the devices or elements referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", etc. are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly referring to the number of technical features indicated. Therefore, features defined as "first", "second", etc. may explicitly or implicitly include one or more of such features. In the description of the present invention, unless otherwise specified, "multiple" means two or more.

[0065] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected" and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be internal communication between two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood by specific circumstances.

[0066] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the technical principles of the present invention. These improvements and modifications should also be regarded as the scope of protection of the present invention.

Claims

1. An adsorption laser processing rotary table, characterized in that: From bottom to top, the device comprises a fixed base (1), a motor (2), an adsorption platform base (6) and an adsorption platform (3), wherein the motor (2) is mounted on the fixed base (1) at the bottom, the driving end at the top of the motor (2) is connected to the adsorption platform base (6) at the top, the adsorption platform (3) is mounted on the adsorption platform base (6), the bottom of the adsorption platform base (6) is mounted with an air-electric slip ring (13), the air-electric slip ring (13) is connected to the first slip ring fixing plate (14) at the top, the first slip ring fixing plate (14) is mounted on the bottom of the adsorption platform base (6), and a groove on the first slip ring fixing plate (14) is provided. There is a second sealing ring (15), the bottom of the gas-electric slip ring (13) is connected to the first sealing plate (18) below through the second slip ring fixing plate (16), a second sealing plate (19) is provided on one side of the first sealing plate (18), the first sealing plate (18) and the second sealing plate (19) are both located in the groove at the bottom of the motor (2), the adsorption platform (3) is positioned on the adsorption platform base (6) through the first sealing ring (7) and the positioning pin (8), the first sealing ring (7) is placed in the central groove of the adsorption platform base (6), and the positioning pin (8) and the conductive column (12) are respectively screwed into the hole of the adsorption platform base (6); A horizontal first limit block (9) is provided on the side of the adsorption platform base (6), a vertical second limit block (10) is connected to the bottom of the first limit block (9), a limit pin (11) is screwed into the threaded hole of the second limit block (10), a limit mechanism (5) is provided on the motor (2) on one side of the adsorption platform base (6), and the limit pin (11) is arranged in cooperation with the limit mechanism (5) below; The limiting mechanism (5) comprises a base plate (5-1), a push block (5-3), a sensing sheet (5-4), a guide rail (5-5), a slider (5-6) and a sensor (5-7). The two sensors (5-7) are fixed on both sides of the base plate (5-1) along the Y-axis direction. The guide rail (5-5) is installed on the base plate (5-1) along the Y-axis direction. The push block (5-3) is connected to the guide rail (5-5) below through the slider (5-6) at the bottom. The sensing sheet (5-4) is installed on both sides of the push block (5-3) along the Y-axis direction. The limiting pin (11) is arranged in cooperation with the push block (5-3) below.

2. The adsorption laser processing rotary table according to claim 1, characterized in that: The motor (2) is mounted on the fixed base (1) via an adjusting mechanism (4), wherein the adjusting mechanism (4) comprises a bottom flat washer (4-1), a threaded sleeve (4-2), a locking nut (4-3), an adjusting nut (4-4), a spacer (4-5), an upper thick flat washer (4-6), a butterfly spring washer (4-7), an upper thin flat washer (4-8) and a locking screw (4-9), wherein the bottom flat washer (4-1) is fixed on the fixed base (1), and the adjusting nut (4-4) is screwed into the threaded sleeve (4- 2), and then screwed into the threaded hole of the motor (2) bottom plate as a whole. The bottom of the motor (2) bottom plate is then locked and fixed with a locking nut (4-3). The spacer (4-5) is placed in the inner hole of the adjusting nut (4-4). The upper thin flat washer (4-8), four butterfly spring washers (4-7) and the upper thick flat washer (4-6) are sequentially inserted into the locking screw (4-9) from top to bottom, and then the whole is passed through the spacer (4-5) and the threaded hole of the fixed base (1) through the locking screw (4-9).

3. The adsorption laser processing rotary table according to claim 1, characterized in that: The guide rail (5-5) is mounted on the base plate (5-1) via baffles (5-2) on both sides along the Y-axis direction. Two tension springs (5-8) are arranged on the base plate (5-1) between the baffles (5-2) along the Y-axis direction. One end of the two tension springs (5-8) along the Y-axis direction is fixed to the base plate (5-1), and the other end of the two tension springs (5-8) along the Y-axis direction is connected to the push block (5-3).

4. The adsorption laser processing rotary table according to claim 1, characterized in that: The two sides of the gas-electric slip ring (13) are respectively connected with joints (17), and the two joints (17) are respectively connected to two vacuums, one of which enters the internal flow channel of the adsorption platform base (6) through the gas-electric slip ring (13), forming a vacuum between the adsorption platform base (6) and the adsorption platform (3), which can fix the adsorption platform (3). When the vacuum is turned off, the adsorption platform (3) can be removed; the other vacuum directly enters the porous material on the upper surface of the adsorption platform (3) to adsorb the processed products. When the motor (2) rotates, the gas-electric slip ring (13) realizes that the two vacuums are not disconnected.

Images