Plasma device

Abstract

The invention relates to a plasma device for applying cold atmospheric plasma to a surface to be treated, in particular textiles, leather and / or plastic fibers, having a housing, a plasma source arranged in the housing and a voltage source for applying a voltage to the plasma source, and having an actuator which is configured to activate the plasma source if the distance between the plasma source and the surface to be treated is within a predetermined distance, wherein the actuator has an adjustable and pre-stressed actuator element having at least one actuating element and a detection device which detects the position of the actuator element at least when the distance between the plasma source and the surface to be treated is within the predetermined distance. Using the plasma device according to the invention, in particular risks and emissions due to incorrect handling by the customer can be avoided, since the plasma source is only activated when the distance to the clothes to be cleaned is within a predetermined distance.

Description

TECHNICAL FIELD

[0001] The present invention relates to a plasma device, in particular for applying a cold atmospheric plasma to a surface to be treated, in particular textiles, leather and / or fibers. BACKGROUND

[0002] It is known that plasma can be used for disinfection, in particular of surfaces contaminated with bacteria. Typical applications of such plasma devices can be found in the field of disinfection or sterilization, in the field of surface functionalization and in the medical field, such as wound disinfection, wound treatment, healing and treatment of skin irritations and treatment of bacterial, viral and fungal skin diseases. Known plasma devices are now no longer limited to application to surfaces. Air can also be disinfected with plasma devices.

[0003] Bacteria are usually responsible for the formation of unpleasant odors on surfaces or in air volumes, metabolize existing nutrients and then produce substances with unpleasant odors. Killing or inactivating these bacteria can at least temporarily prevent the formation of additional substances with unpleasant odors or other molecules that are not related to odor but can cause discomfort, distress, illness, weakness or similar states, such as allergens, protein molecules or prions. However, the already existing substances are not eliminated, so that their odor can usually only be masked by additional volatile substances such as fragrances. It is therefore desirable to inactivate the substances that cause the odor.

[0004] Another field of use is the freshening of textiles and / or clothing instead of or in addition to washing.

[0005] It is known that textiles and / or garments can be freshened by various methods. One possibility is to mask the odor by a suitable, more pleasant odor or fragrance, but this does not remove the odor molecules or the odor source. Another possibility is to remove the source of the unpleasant odor (e.g. bacteria). However, in this way the existing odor molecules are not removed, but only the production of new odors is stopped, if all bacteria are permanently inactivated. Since the number of bacteria typically doubles in the preferred area (e.g. in the armpit) within 5 minutes, only 1 hour later 3 logarithmic reductions to one thousandth (1 / 1000) have to be replenished, so that this antibacterial method has to be repeated frequently. Another possibility is to destroy the malodor molecules by a chemical process. For this, in particular ozone can be used, but due to its toxicity, the ozone has to be filtered out of the air again after the chemical oxidation of the malodor molecules. Furthermore, the reaction is slow and requires a long interaction time, since ozone molecules only move at about 200 meters per second. The malodor molecules can also be removed by washing the textiles and / or garments. This is a standard process, partly mechanical, partly chemical. The standard process usually works well, but requires time, is expensive, has a high carbon dioxide emission and means that efforts have to be made to obtain a washing machine, which is not always feasible (e.g. when traveling). Another problem here is that not all textiles or garments can be washed, because they would be damaged or even destroyed during the washing process. Furthermore, washing below 40°C does not remove the odor source (e.g. bacteria) and can even promote the growth of the odor source. Likewise, unpleasant odors can also be removed by chemical cleaning. Basically the same principles apply as in the case of washing, while chemical cleaning agents can damage some textiles and / or garments.

[0006] In addition to the above methods, unpleasant odors can also be eliminated using cold atmospheric plasma devices. Conventionally, plasma devices can only be operated effectively at relatively high voltage amplitudes, and for electrical safety reasons, there are limitations on the operation of such devices in the vicinity of human skin. Furthermore, conventional devices are relatively large and inflexible.

[0007] In addition, plasma devices can generate a range of compounds. These can include, for example, electrons, ions, reactive compounds - in particular reactive oxygen (such as O3) and nitrogen species (such as NO, NO2, etc.), neutral species and UV light, some of which can be harmful to humans above certain thresholds. Furthermore, the local temperature rise at the interface of the plasma device with the surface to be treated can damage the material to be treated.

[0008] Therefore, the application of cold plasma to freshen garments must be both comfortable and safe. The treated fabric as well as the user should be protected from foreseeable problems, including misuse, and in addition enable problem-free operation. SUMMARY

[0009] The problem to be solved by the present application is therefore to specify an improved or at least an alternative embodiment of a plasma device which in particular overcomes the disadvantages known from the prior art.

[0010] The present application is based on the general idea of equipping a plasma device for applying a cold atmospheric plasma to a surface to be treated, in particular a textile, leather and / or plastic fiber, with a technically simple and reliable actuator which allows the activation of the plasma source only under predetermined boundary conditions. The plasma device according to the present application has a housing and a plasma source and a voltage source for applying a voltage to the plasma source arranged in the housing like the actuator, the actuator being configured to activate the plasma source if the distance between the plasma source and the surface to be treated is within a predetermined distance, wherein the actuator has an adjustable and pre-stressed actuator element having at least one actuating element and a detection device which detects the position of the actuator element at least when the distance between the plasma source and the surface to be treated is within the predetermined distance. Thus, the plasma device is configured to allow the activation of the plasma source (e.g. by a user, e.g. by a user input) only when the distance between the plasma source and the surface to be treated is within the predetermined distance. That is, the plasma is only ignited when the plasma device is in proximity to or in contact with the surface to be treated.

[0011] With the plasma device according to the present application, in particular, it can be avoided that a hazard is caused by a wrong handling of the customer, because the plasma source is only activated when the distance to the clothes to be cleaned is within a predetermined distance. Another advantage of the present application is a very compact and cost-advantageous design. This is also considered to contribute to avoid emissions in case the plasma device is not used as prescribed.

[0012] In the following description, the actuator is also to be understood as any structure suitable for allowing the activation of the plasma source only when the distance between the plasma source and the surface to be treated is within a predetermined distance. The detection device comprises for example a distance sensor or a light barrier. The detection device detects the distance and can directly or indirectly activate the plasma source if the distance between the plasma source and the surface to be treated is within the predetermined distance.

[0013] In an advantageous extension of the invention, a spring, an elastic plastic element such as a sealing lip, a foam element, or a rubber element, or a pneumatic or hydraulic reset device is provided for applying prestress and resetting the actuator element. This non-exhaustive enumeration allows for a wide selection of reliable and cost-effective reset devices that repeatedly reset the actuator element to its initial position and thereby deactivate the plasma source.

[0014] Suitably, the detection device includes a proximity sensor, a contact sensor, a microswitch, a strain gauge, a magnetic sensor, and / or an aperture. The actuator element has one or more actuating elements arranged in the device direction to enable the electronic equipment (here, the detection device) to recognize safe contact between the plasma device and the surface to be treated. These actuating elements can then be queried with any proximity or contact sensor, for example, by actuating the microswitch or responding to other sensors in the presence of a metal component / magnet. A strain gauge connected to a deformable material is also conceivable. This allows the detection device to be manufactured cost-effectively and with extreme flexibility.

[0015] In another advantageous extension of the invention, the detection device has an aperture and the actuating element has a beveled edge, wherein the detection device is configured such that it determines the extent of coverage of the aperture and thus the distance between the plasma source and the surface to be treated. Thus, by means of a detection device with the aperture, not only can an "on" or "off" position be indicated, but also an intermediate position depending on the distance between the plasma source and the surface to be treated.

[0016] Suitably, the detection device has an aperture and is arranged on a circuit board with an opening, wherein if the distance between the plasma source and the surface to be treated is within the predetermined distance, the opening is passed through or covered by the aperture, and the actuating element engages into the opening. Therefore, in this embodiment, the actuating element of the actuator element passes through the opening, thereby enabling a very space-saving design.

[0017] Preferably, the predefined distance is in the range of 0 to 4 mm, more preferably in the range of 0 to 1 mm. This has the particular advantage that the plasma source or a single plasma source segment can be activated and / or deactivated according to predefined parameters (e.g., distance). It is believed that this allows for further reduction of emissions from the plasma device and improvement of the overall efficiency of the plasma device.

[0018] Suitably, the plasma device may preferably include an indicator light or warning light configured to instruct the user to ventilate the area surrounding the plasma device after the plasma source has been turned on for a predetermined period of time. This ensures reliable long-term operation.

[0019] In an advantageous extension of the invention, a velocity sensor is provided to measure the speed at which the plasma device moves above the surface to be treated. The plasma device is preferably configured to automatically shut down its plasma source if the detected speed is below a first predetermined value or above a second predetermined value. This ensures that the plasma device operates within a suitable speed range—neither too slowly (to maintain the temperature at the contact point between the plasma device and the surface to be treated below an operating threshold, i.e., below a temperature that could damage the material) nor too fast (to meet the purpose of the treatment, such as deactivating odor molecules).

[0020] Suitably, a surface characteristic detection device, particularly a temperature sensor or humidity sensor, is provided to detect at least one characteristic of the surface to be treated. The at least one characteristic may be, for example, moisture content or temperature. That is, the surface characteristic detection device preferably includes a humidity sensor for detecting the humidity level of the surface to be treated, wherein the plasma device is preferably configured to automatically shut off the plasma source when the moisture content of the surface to be treated exceeds a predetermined humidity value, thereby preventing the plasma device from operating at excessive power. The moisture content of the surface to be treated can be determined by measuring the power drawn by the plasma source. Preferably, at least 10 seconds... -1 Optimal 50s -1 And the best 100s -1 The frequency of the measurement records the power consumed by the plasma source. This measurement can be performed, for example, in the control circuitry of the plasma device. Thus, the plasma source and the control circuitry can constitute the humidity sensor. However, a separate sensor can also be used. Alternatively or additionally, the surface characteristic detection device includes a temperature sensor for detecting the temperature of the surface to be treated, wherein the plasma device is configured to automatically shut off the plasma source when the temperature of the surface to be treated exceeds a predetermined temperature value, thereby preventing damage to the material being treated.

[0021] Suitably, the plasma device is portable and the voltage source has a battery or rechargeable battery. This allows for relatively simple mobile use. Furthermore, the plasma source is replaceable. Thus, for example, the plasma device can be configured such that the plasma source is housed in a plasma source unit of the plasma device, and the voltage source is housed in the main housing of the plasma device, with the plasma source unit detachably connected to the main housing. In this way, the plasma device may, for example, include a main housing and a series of plasma source units, each particularly suited to a specific material to be treated.

[0022] As described herein, the term "cold atmospheric plasma" (CAP) refers to plasma that operates under normal atmospheric conditions (e.g., temperature and pressure) and allows for painless, in vivo application without harming fabrics. Cold atmospheric plasma can be generated, for example, by limiting the number of high-energy electrons and / or by cooling uncharged molecules / atoms within the plasma. An important characteristic of cold atmospheric plasma is that it still retains its antibacterial and antifungal properties.

[0023] As further described herein, the plasma source can be configured in any form capable of generating cold atmospheric plasma and applying it to the surface to be treated. Preferably, an SMD (Surface MicroDischarge) device is used. Further optional structural features are explained below.

[0024] Preferably, the plasma device is also configured to allow the plasma source to be reactivated (e.g., activated by a user, such as through user input) after the plasma source has been turned off for a predetermined waiting time, thereby reducing the concentration of toxic substances to significantly below a threshold.

[0025] Preferably, the plasma device includes a control circuit configured to adjust the plasma based on detected surface conditions, particularly detected humidity and / or temperature, so as to perform a freshening process without damaging the material being treated.

[0026] Preferably, the plasma source includes a first electrode, a second electrode, and a dielectric layer separating the first and second electrodes, wherein the first electrode is configured to ignite the cold atmospheric plasma to treat the surface to be treated. That is, the first electrode is arranged such that it is closer to the surface to be treated than the second electrode. The first electrode is preferably configured to contact the surface to be treated. The first electrode may also be covered by a dielectric material. Preferably, the first electrode or the dielectric material covering the first electrode is exposed to the surrounding atmosphere through an opening in the housing, while the second electrode is disposed within the housing. It should be noted that this electrode structure also represents an independent aspect of the invention and can be provided independently of the first aspect described above. However, this aspect can also be combined with each of the sensors described above.

[0027] To further enhance the safety of the plasma device, particularly to prevent misuse, the first electrode is grounded and / or the plasma device further includes an on / off button electrically connected to the first electrode, wherein the plasma device is configured to allow activation of the plasma source and / or selectively turn on the plasma source only when the on / off button is pressed. Therefore, when using the plasma device, there is no potential difference between the user and the first electrode, and thus no discharge will be emitted from the first electrode, i.e., the electrode that ignites the plasma, to the user.

[0028] In other words, a conductive connection between the first electrode and the user's skin can be established, for example, through a conductive switch and / or other conductive portions of the device's housing. Preferably, the device is designed such that the conductive switch and / or conductive housing portion must be held and / or pressed by the user for the plasma device to function (e.g., continuously held and / or pressed during operation of the plasma device). In other words, when the conductive switch and / or conductive housing portion is not pressed and / or held by the user, the device's control circuitry can deactivate the plasma source. This switch can be an on / off button for the device. However, an additional safety switch can also be used, which must be pressed in addition to the on / off button.

[0029] The switch (e.g., an on / off button) can be implemented as a mechanical switch or as any other type of contact sensor (e.g., a resistive or capacitive contact sensor).

[0030] Furthermore, for example, if the first electrode is an electrode in contact with the surface to be treated, the plasma device may also include a temperature sensor configured to detect the temperature of the first electrode. Preferably, the plasma device is configured to selectively and automatically shut off the plasma source when the temperature of the first electrode exceeds a predetermined temperature value. This reduces the risk of damage to the processed materials and / or fabrics caused by an overheated electrode.

[0031] To handle larger areas, the plasma device preferably includes segmented plasma sources, wherein one of the aforementioned safety architectures can be provided for each segment, such as distance sensors, light sensors, speed sensors, displays or warning lights, surface characteristic detection devices, etc.

[0032] Preferably, the plasma source includes at least one first plasma source segment and at least one second plasma source segment, wherein the plasma device is configured to selectively activate the first plasma source segment only when the distance between the first plasma source segment and the surface to be treated is within a predetermined distance, and to selectively activate the second plasma source segment only when the distance between the second plasma source segment and the surface to be treated is within the predetermined distance. The predetermined distance is preferably in the range of 0 to 4 mm, and more preferably in the range of 0 to 1 mm. This has the particular advantage of allowing individual plasma source segments to be activated and / or deactivated based on predefined parameters (e.g., distance).

[0033] Preferably, at least one of the first electrode and the second electrode comprises a first electrode segment in the region of the first plasma source segment and a second electrode segment in the region of the second plasma source segment. That is, at least one electrode may be a segmented electrode. Preferably, the other electrode is a common electrode assigned to the first and second electrode segments. However, a segmented second electrode may also be used.

[0034] Preferably, the first plasma source segment and the second plasma source segment are electrically connected in parallel. Attached Figure Description

[0035] The invention is described in more detail below with reference to the preferred embodiments shown in the accompanying drawings. However, the scope of the invention to be protected should not be limited to the description shown or described below, but should be defined by the appended claims. In the drawings,

[0036] Figure 1 A schematic diagram of a plasma device according to a preferred embodiment of the present invention is shown;

[0037] Figure 2 A schematic diagram of a plasma device according to a preferred embodiment of the present invention is shown;

[0038] Figure 3A Various wet / damp textiles are shown that did not show damage after being treated with cold atmospheric plasma, with dried fabrics after the same treatment also shown for comparison;

[0039] Figure 3B Various wet / damp textiles are shown, exhibiting specific damage upon exposure to cold atmospheric plasma, with dried fabrics after the same treatment also shown for comparison.

[0040] Figure 4A and Figure 4BThe plasma power consumed by the plasma source of the plasma device according to the invention is shown when the plasma device sweeps across the template fabric under the conditions detailed below.

[0041] Figure 5 This is a schematic cross-sectional view showing the structure of the plasma source of a plasma device according to a preferred embodiment of the present invention;

[0042] Figure 6A and Figure 6B Schematic top views of two examples of plasma sources with two plasma source segments are shown respectively;

[0043] Figure 7A and Figure 7B Figure 6A and Figure 6B An exemplary circuit diagram of the plasma source shown; and

[0044] Figure 8 A schematic diagram of a plasma device including a replaceable plasma source unit according to a preferred embodiment of the present invention is shown.

[0045] Figure 9 A cross-sectional view of the plasma device according to the invention in the actuator region is shown. Detailed Implementation

[0046] refer to Figure 1 According to a preferred embodiment of the present invention, a plasma device 100 for applying cold atmospheric plasma to a surface (not shown) to be treated includes a housing 102, a plasma source 104 within the housing 102, and a voltage source (not shown) within the housing 102 for applying voltage to the plasma source 104. The plasma source 104 may be held by a plasma source support 106 forming the front portion of the housing 102, such as... Figure 1 As shown. The plasma device 100 is configured to allow activation of the plasma source 104 only when the distance between the plasma source 104 and the surface to be treated is within a predetermined distance. For example, this can be achieved by... Figure 1 The distance sensor 110 shown or via a corresponding Figure 9 The actuator 900 is used to achieve selective switching.

[0047] Specifically, the actuator configured as distance sensor 110 is a mechanical distance sensor, having a voltage source connection terminal 114 electrically connected to the voltage source and a plasma source connection terminal 112 electrically connected to the plasma source 104. The voltage source connection terminal 114 and the plasma source connection terminal 112 are configured such that they are spaced apart from each other when the plasma device 100 is not in contact with the surface to be treated. Simultaneously, the voltage source connection terminal 114 and the plasma source connection terminal 112 are configured such that they are movable relative to each other. Therefore, when the plasma device 100 contacts the surface to be treated, the housing 102 (plasma source support 106) and / or the plasma source 104 press against the surface to be treated by pressing the plasma source connection terminal 112 inward toward the voltage source connection terminal 114 and finally electrically coupling the voltage source connection terminal 114 to the plasma source connection terminal 112, thereby allowing the voltage source to apply voltage, i.e., selectively activating the plasma source 104. Here, the connection terminals 112 and 114 do not necessarily have to be connected to the plasma source or the voltage source. Thus, for example, they can also be coupled to a controller (not shown) that indicates whether a connection exists.

[0048] The switching mechanism can certainly be implemented in different ways. For example, refer to... Figure 2 According to another preferred embodiment of the present invention, the plasma device 200 includes a housing 202, a plasma source 204, a plasma source support 206, and a voltage source (see below), which are similar to Figure 1 The corresponding elements in the illustrated embodiment. However, the plasma device 200 includes a light sensor 210 instead of the distance sensor 110, particularly as an actuator or detection device. As the plasma device 200 approaches the object to be treated, the light is gradually blocked by the object, and the amount of light received from the light sensor 210 decreases. The plasma device 200 is configured to selectively turn on the plasma source 204 when the amount of light received by the light sensor 210 is below a predetermined value, or to allow it to be turned on only in such cases (e.g., by a user). Here, when the plasma device 200 is maintained at a predetermined distance (e.g., 4 mm, 3 mm, 2 mm, or 1 mm) from the surface to be treated, the predetermined value can be determined by the amount of light received by the light sensor 210.

[0049] It should be noted that the position of the light sensor 210 is not particularly restricted. Although the light sensor 210 is in Figure 2 The optical sensors are arranged at both ends of the plasma source 204, but additional or alternative optical sensors can be arranged, for example, at the center of the plasma source 204, as shown in optical sensor 220.

[0050] To investigate the safe use of plasma devices on textiles / clothing awaiting air conditioning, particularly regarding other aspects of the safety of the treated materials, the inventors subjected various fabrics to a series of cold atmospheric plasma treatments under both wet and dry conditions. The results are summarized in... Figure 3A and Figure 3B middle.

[0051] from Figure 3A and Figure 3B It can be seen that the treatment using the plasma device can be applied to all tested fabrics—dry or wet. The plasma device can move smoothly over all the fabrics examined—no clamping or jamming was observed. No color change or other damage was observed in any of the dry materials studied within the scope of this study. This result is independent of the number of washed samples. However, when treating wet / damp fabrics, some fabric samples showed damage, such as... Figure 3B The corresponding parts of the photograph are marked.

[0052] Here, derived from optical studies, it is shown that combustion of damp fabric occurs in slightly drier areas of the fabric, where plasma discharge is concentrated and local temperatures are increased.

[0053] Figure 4A and Figure 4B Measurements of plasma power consumed by the plasma source of a plasma device are shown, which applies cold atmospheric plasma to cotton fabrics with varying humidity conditions. Specifically, a sample termed "50% damp fabric" is a cotton fabric composed of equal sections of wet and dry areas, with the plasma device moving back and forth between the wet and dry sections. A sample termed "25% damp fabric" has a similar configuration, but the amount of humidity applied to the wet section is reduced (i.e., halved). Figure 4A Figure 1 shows 30 slides per minute, while Figure 4 shows 60 slides per minute. The results show a significant difference in plasma power depending on fabric humidity, as explained in more detail below.

[0054] The transition from the dry area of ​​the fabric to the 50% or 25% wet area is clearly visible. For the dry area of ​​the fabric, the plasma power consumption was determined to be approximately 2 watts for all samples examined within the scope of this study. This value increases to 3 to 9 watts as the plasma source moves to the wet areas (50% and 25%) of the fabric. Based on these results, it is assumed that... Figure 3B The damage to the wet fabric shown is due to an increase in localized temperature from the plasma source operating at increased power. Without being bound by theory, it is assumed that a wet surface increases resistance to plasma ignition. It is assumed that the plasma therefore ignites locally only at the dry / dryed areas and / or dry / dryed holes on the surface to be treated, where the resulting power concentration is high and may therefore lead to small, localized burns.

[0055] The results also showed that the power consumption measured for the 25% damp fabric portion was less than that for the 50% damp fabric portion. Nevertheless, all power consumption measured for the 50% and 25% damp fabric portions were significantly higher than the power measured for the dry portion of the fabric.

[0056] This illustrates the significant power consumption difference between dry and wet fabrics. Figure 4A compared to, Figure 4B This demonstrates that it is difficult to detect this difference for 25% damp fabrics and using a high traction speed (60 brushes per minute). This means that it is crucial to detect the plasma current consumption quickly enough to identify the humidity range using plasma power measurement techniques. Figure 4B Examples of slow recording are marked in the text, with ellipses representing 25% damp fabric. Therefore, it is assumed that recording should take at least 10 seconds. -1 Optimal 50s -1 And the best 100s -1 The frequency is used to record the power consumption of the plasma source.

[0057] Since the power consumed by the plasma source is affected by the air humidity of the fabric to be treated, considering... Figure 4A and Figure 4B The results shown suggest that the plasma device itself, capable of measuring the current consumption of the plasma source (e.g., by introducing an additional plasma current consumption measurement system, which can be implemented using any known circuitry—a "power monitor"), could be used as a humidity sensor. Using the plasma power consumption measurement system, the plasma device could also automatically shut down when the power exceeds a specific threshold. If the power exceeds a specific threshold and / or if a pattern indicating that the surface to be treated exceeds a specific humidity level is identified in the power measurement, the device can be automatically shut down and / or the power output to the plasma source can be automatically limited. Measurements like these can be used to define the parameters required to control a cold atmospheric plasma device for freshening clothes, define operating conditions, identify dry and damp sections of clothing and adapt the plasma power accordingly, provide different plasma settings for different fabrics, and control the plasma power based on the speed at which the freshener moves over the fabric. In short, in principle, a nearly autonomous control system can be built to ensure the safe operation of the cold atmospheric plasma device under specific operating conditions. This helps ensure the safe treatment of different fabrics under different conditions.

[0058] Figure 5 An exemplary structure of a plasma source for a plasma device according to a preferred embodiment of the present invention is shown.

[0059] The plasma source 500 includes a first electrode 502, a second electrode 504, and a dielectric layer 506 separating the first electrode 502 and the second electrode 504. The first electrode 502 is configured to ignite cold atmospheric plasma to treat the surface to be treated. That is, the first electrode 502 is arranged such that the first electrode 502 is closer to the surface to be treated than the second electrode. Figure 5 In this process, the first electrode 502 is also covered by a dielectric material 508, which is preferably composed of a plasma-resistant insulating material, such as glass fiber reinforced hydrocarbon ceramic.

[0060] Viewed in the stacking direction, the second electrode 504 preferably has a thickness of at least 10 μm, and the first electrode 502 preferably has a thickness of at least 10 μm to a maximum of 50 μm, also viewed in the stacking direction. Viewed in the stacking direction, the dielectric layer 506 preferably has a thickness of at least 100 μm to a maximum of 300 μm. The dielectric material 508 preferably has a thickness of at least 0.1 μm in the stacking direction. The dielectric material 508 preferably has a thickness of at most 30 μm in the stacking direction, and more preferably at most 10 μm. Therefore, the thickness in the stacking direction can be between 0.1 μm and 30 μm, or between 0.1 μm and 10 μm.

[0061] Preferably, the first electrode 502 and / or the second electrode 504 respectively include coating 503 and coating 505, said coating 503 and coating 505 comprising one of the following materials: electroless nickel immersion gold (ENIG), electroless nickel immersion gold (ENEPIG), electroless nickel immersion gold (ENIPIG), electroless palladium (EP) and electroless palladium immersion gold (EPIG), or hard gold. Coating 503 and / or coating 505 may have a thickness of at least 0.5 μm, preferably at least 0.8 μm. Coating 503 and / or coating 505 may have a thickness of 1.5 μm or less, preferably 1.25 μm or less. Therefore, coating 503 and / or coating 505 may have a thickness of 0.5 μm to 1.5 μm, preferably 0.8 μm to 1.25 μm, particularly when coating 503 and / or coating 505 are made of hard gold or another of the above materials.

[0062] The aforementioned stacked structure is preferably constructed on the substrate element 510, and the dielectric layer 506 may also be arranged on the substrate element 510 and / or the second electrode 504 may be accommodated in the substrate element 510.

[0063] As explained above, the plasma device according to the invention may include segmented plasma sources, wherein segments can still be retained. Figure 5 The basic structure shown.

[0064] Referring to Figure 6A, the plasma source 600A includes a first plasma source segment PQ1 and a second plasma source segment PQ2. The plasma device 600A is configured to selectively activate the first plasma source segment PQ1 only when the distance between the first plasma source segment and the surface to be treated is within a predetermined distance, and to selectively activate the second plasma source segment PQ2 only when the distance between the second plasma source segment and the surface to be treated is within the predetermined distance. As described above, this can be achieved by... Figure 9 Distance sensors and / or light sensors and / or actuators 900 are used to selectively activate each of the plasma source segments PQ1 and PQ2. Furthermore, each of the plasma source segments PQ1 and PQ2 can be independently equipped with the aforementioned safety measures, such as velocity sensors and surface characteristic detection devices.

[0065] and Figure 5 The plasma source 500 shown has a similar structure. Plasma source 600A also includes a first electrode 602A, a second electrode 604A, and a dielectric layer separating the first electrode 602A and the second electrode 604A, but the dielectric layer is not shown for better illustration of the electrode arrangement. Plasma source segments PQ1 and PQ2 are formed because the first electrode 602A includes a first electrode segment 602A-1 in the region of the first plasma source segment PQ1 and a second electrode segment 602A-2 in the region of the second plasma source segment PQ1. Meanwhile, the second electrode 604A can be a common electrode allocated to the first and second electrode segments 602A-1 and 602A-2.

[0066] The corresponding circuit diagram of plasma source 600A is shown. Figure 7A As can be seen, plasma source segments PQ1 and PQ2 are electrically connected in parallel and can be activated or deactivated independently of each other.

[0067] Figure 6B and 7B A schematic diagram of plasma source 600B and its corresponding circuit diagram are shown. Similar to plasma source 600A in Figure 6A, plasma source 600B includes a first electrode 602B, a second electrode 604B, and a dielectric layer (not shown) separating the first electrode 602B and the second electrode 604B. Figure 6B In the process, the second electrode 604B includes a first electrode segment 604B-1 and a second electrode segment 604B-2. Therefore, the plasma source 600B also consists of plasma source segments PQ1 and PQ2, which are connected in parallel and can be activated and deactivated independently of each other. Figure 7B As shown. As already mentioned, plasma devices with segmented plasma sources are particularly suitable for processing large areas.

[0068] Figure 8 A schematic diagram of a plasma device with a replaceable plasma source unit is shown.

[0069] Reference Figure 8 The plasma device 800 includes a plasma source unit 801 detachably coupled to a main housing 810. The plasma source unit 801 specifically includes a plasma source 802, and the main housing 810 includes a battery module 803 serving as a voltage source. The main housing 810 also includes charging electronics 807 for charging the battery module 803 and a control module 805 responsible for coordinating the corresponding functions of the plasma device 800. The main housing 810 is also equipped with a main switch 806 and a power interface 808.

[0070] The coupling between the plasma source unit 801 and the main housing 810 can be achieved, for example, through a mechanical coupling device 804 and an electrical connection 809, which connects the plasma source unit 801 and the main housing 810 structurally and electrically. The coupling device 804 can be a pair of magnets. Of course, other coupling methods, such as mechanical coupling devices (e.g., snap-fit ​​components or screws), are also possible. The electrical connection 809 can be, for example, as... Figure 8 The socket can be implemented in the form shown or other suitable structures. In this way, plasma source unit 801 can be replaced by other plasma source units, which may have different shapes / electrode structures, for example, on the side facing the material to be treated. This expands the application window of plasma device 800.

[0071] The main housing 810 is preferably configured such that if the plasma source unit 801 is separated and / or improperly coupled via the mechanical coupling device 804, no electrical energy is generated at the contact of the electrical connection 809 provided on the main housing 810. For this purpose, the main housing 810 and the plasma source unit 801 can be configured such that the circuit supplying voltage to the contact of the main housing 810 when the plasma source unit 801 is separated is not closed. Alternatively or additionally, a sensor can be provided on the main housing 810 to check for sufficient coupling. Thus, for example, a mechanical sensor can be provided such that it is pressed only when the plasma source unit 801 is fully coupled to the main housing 810. This sensor can be electrically connected to the control module 805.

[0072] according to Figure 9 The plasma device 900 according to the invention shown therefor applying cold atmospheric plasma to a surface to be treated, particularly to textiles, leather, and / or plastic fibers, has an actuator 913 configured to activate if the distance between the plasma source and the surface to be treated is within a predetermined distance. Figure 9 Not shown in detail, but for example inFigure 1 The plasma source 102 shown in the figure includes an actuator 913 with an adjustable and pre-stressed actuator element 914 and a detection device 916. The actuator element has at least one actuator element 915, and the detection device 916 detects the position of the actuator element 914 at least when the distance between the plasma source and the surface to be treated is within a predetermined distance. This also means that in this case, the distance between the actuator element 914 and the actuator 913 is within a predefined distance. Here, if, for example, the plasma device 900 is placed on the surface to be treated, the actuator element 914 can be adjusted in the direction of the actuator 913. Therefore, using the plasma device 900 according to the invention can in particular avoid dangers caused by customer misoperation, because the plasma source is activated only when the distance to the clothes to be cleaned is within a predetermined distance. Here, the predetermined distance is in the range of 0 to 4 mm, preferably 0 to 1 mm. This has the particular advantage that the plasma source or a single plasma source segment can be activated and / or deactivated according to predefined parameters (e.g., distance). This can further reduce emissions and improve the overall efficiency of the plasma device 900.

[0073] In an advantageous extension of the invention, a spring 917, an elastic plastic element such as a sealing lip, a foam element, or a rubber element, or a pneumatic or hydraulic reset device are provided to apply prestress and reset the actuator element 914. This represents a wide range of reliable and cost-effective reset devices that repeatedly reset the actuator element 914 to its initial position and thereby deactivate the plasma source.

[0074] Suitably, the detection device 916 includes a proximity sensor, a contact sensor, a microswitch, a strain gauge, a magnetic sensor, and / or an aperture 918. Actuator elements 914 are provided with one or more actuating elements 915 in the device orientation 919 to enable electronic equipment 900 (here, the detection device 916) to recognize safe contact between the plasma device 900 and the surface to be treated. These actuating elements 915 can then be queried with any proximity or contact sensor, for example, by actuating a microswitch or, in the case of a metal component / magnet, by responding to other sensors. A strain gauge connected to a deformable material is also conceivable. This allows the detection device 916 to be manufactured cost-effectively and with extreme flexibility.

[0075] Advantageously, the detection device 916 has the aforementioned aperture 918, while the actuating element 915 has a beveled edge. The detection device 916 is configured such that it determines the coverage of the aperture 918, thereby determining the distance between the plasma source and the surface to be treated. Thus, by means of the detection device 916 with the aperture 918, not only can the "on" or "off" position be indicated, but also an intermediate position depending on the distance between the plasma source and the surface to be treated.

[0076] according to Figure 9 The detection device 916 has an aperture 918 and is arranged on a circuit board 920, wherein the circuit board 920 has an opening 921. If the distance between the plasma source and the surface to be treated is within a predetermined distance, the opening 921 is passed through or covered by the aperture 918, and the actuating element 915 engages with the opening. Therefore, in this embodiment, the actuating element 915 passes through the opening 921, thereby enabling a very space-saving design.

[0077] The plasma device 900 may also include an indicator light or warning light that instructs the user to ventilate the area surrounding the plasma device 900 after the plasma source has been switched on for a predetermined period of time. The plasma device 900 may also include a speed sensor to measure the speed at which the plasma device moves above the surface to be treated, wherein if the detected speed is lower than a first predetermined value or higher than a second predetermined value, the plasma device 900 preferably automatically shuts off the plasma source. This ensures that the plasma device 900 operates within an optimal speed range, neither too slow (to maintain the temperature at the interface between the plasma device 900 and the surface to be treated below an operating threshold, i.e., below a temperature that could damage the material to be treated) nor too fast (to meet the purpose of treatment, such as deactivating odor molecules).

[0078] Suitably, a surface characteristic detection device, particularly a temperature sensor or a humidity sensor, is provided to detect at least one characteristic of the surface to be treated. The at least one characteristic may be, for example, moisture content or temperature. That is, the surface characteristic detection device preferably includes a humidity sensor for detecting the humidity level of the surface to be treated, wherein when the moisture content of the surface to be treated exceeds a predetermined humidity value, the plasma device 900 preferably automatically shuts off the plasma source, thereby preventing the plasma device 900 from operating at excessive power. The moisture content of the surface to be treated can be determined by measuring the power drawn by the plasma source. Alternatively or additionally, the surface characteristic detection device includes a temperature sensor for detecting the temperature of the surface to be treated, wherein when the temperature of the surface to be treated exceeds a predetermined temperature value, the plasma device 900 preferably automatically shuts off the plasma source, thereby preventing damage to the material being treated.

[0079] Furthermore, the plasma device 900 is preferably portable and the voltage source has a battery or rechargeable battery. This allows for relatively simple mobile use. Additionally, the plasma source is replaceable. Thus, for example, the plasma device 900 can be configured such that the plasma source is housed in a plasma source unit of the plasma device 900, and the voltage source is housed in the main housing of the plasma device 900, with the plasma source unit detachably connected to the main housing. In this way, the plasma device 900 may, for example, include a main housing and a series of plasma source units, each plasma source unit being particularly suitable for a specific material to be treated.

Claims

1. A plasma apparatus for applying cold atmospheric plasma to a surface to be treated, comprising a housing, a plasma source disposed within the housing, and a voltage source for applying voltage to the plasma source, and an actuator configured to activate the plasma source if the distance between the plasma source and the surface to be treated is within a predetermined distance, wherein the actuator has an adjustable and prestressed actuator element and a detection device, the actuator element having at least one actuating element, and the detection device detecting the position of the actuator element at least when the distance between the plasma source and the surface to be treated is within the predetermined distance.

2. The plasma device according to claim 1, characterized in that, The plasma device is configured to apply cold atmospheric plasma to textiles, leather, and / or plastic fibers.

3. The plasma device according to claim 1, characterized in that, A spring, pneumatic, or hydraulic reset device is provided to apply prestress and reset the actuator element.

4. The plasma device according to claim 1, characterized in that, An elastic plastic element is provided to apply prestress and reset the actuator element.

5. The plasma device according to claim 4, characterized in that, The elastic plastic element includes a sealing lip, a foam element, or a rubber element.

6. The plasma device according to any one of claims 1 to 5, characterized in that, The detection device includes a proximity sensor, a contact sensor, a micro switch, a strain gauge, a magnetic sensor, and / or an aperture.

7. The plasma device according to claim 6, characterized in that, The detection device has an aperture and the actuation element has a beveled edge, wherein the detection device is configured such that it determines the coverage of the aperture and thus the distance between the plasma source and the surface to be treated.

8. The plasma device according to any one of claims 1 to 5, characterized in that, The detection device has an aperture and is arranged on a circuit board, and the circuit board has an opening through which the aperture passes and the actuating element engages if the distance between the plasma source and the surface to be treated is within the predetermined distance.

9. The plasma device according to any one of claims 1 to 5, characterized in that, The predetermined distance is in the range of 0 to 4 mm.

10. The plasma device according to any one of claims 1 to 5, characterized in that, The predetermined distance is in the range of 0 to 1 mm.

11. The plasma device according to any one of claims 1 to 5, characterized in that, An indicator light or warning light is provided, which is configured to instruct the user to ventilate the area around the plasma device after the plasma source has been turned on for a predetermined period of time.

12. The plasma device according to any one of claims 1 to 5, characterized in that, A velocity sensor is provided to measure the speed at which the plasma device moves above the surface to be treated, wherein the plasma device is configured to automatically shut down the plasma source if the detected speed is lower than a first predetermined value or higher than a second predetermined value.

13. The plasma device according to any one of claims 1 to 5, characterized in that, A surface characteristic detection device is provided to detect at least one characteristic of the surface to be treated.

14. The plasma device according to claim 13, characterized in that, The surface characteristic detection device is a temperature sensor or a humidity sensor.

15. The plasma device according to any one of claims 1 to 5, characterized in that, The plasma device is portable and the voltage source has a battery.

16. The plasma device according to claim 15, characterized in that, The battery includes a storage battery.

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