A test object carrier

Abstract

The present invention discloses a carrier for an object to be tested, which comprises a base and a surface cover, wherein the base is provided with a convex block and a vacuum groove surrounding the convex block along a first direction, and is further provided with a first channel and a second channel, wherein the convex block is provided with a bearing surface for carrying the object to be tested, the first channel is connected to an external vacuum source for the vacuum groove, and the second channel is connected to the vacuum groove and opens to the bearing surface; the convex block and the second channel are respectively configured such that their projections on the first plane are suitable for being located in a non-detection area; the vacuum groove is configured such that the first detection area is suitable for being located within its projection on the first plane; the first channel is configured such that its projection on the first plane is located outside the projection of the object to be tested on the first plane; the surface cover is sealedly covered on the vacuum groove and enclosed with the vacuum groove to form a vacuum cavity; the portion where the projections of the vacuum groove and the surface cover on the first plane overlap with the first detection area is configured to be suitable for light transmission. The surface cover is prevented from deformation, and the object to be tested is prevented from damage.

Description

Technical Field

[0001] The present invention relates to the field of cover plate detection, and in particular to a carrier for an object to be detected. Background Art

[0002] In the field of inspection of transparent cover plates, such as mobile phone cover plates, it is necessary to transmit a light source and then use a camera to obtain an image, and judge whether the cover plate in the inspection area has defects based on the obtained image; the carrier is used to support the transparent cover plate and allow the light source to transmit, and the carrier is provided with a vertically upward adsorption hole to adsorb the middle of the cover plate to prevent the cover plate from moving; since the bottom of the carrier is provided with a surface light source and a transfer member, the light is transmitted from the bottom to the carrier and the cover plate. Therefore, if a vacuum source is installed at the bottom of the carrier and connected to the adsorption hole, the pipeline of the vacuum source needs to pass through the light source and the transfer member to be connected to the adsorption hole, which is not easy to install, and it is also easy to pull the pipeline of the vacuum source and cause damage when moving; therefore, it is necessary to remove the vacuum source from the side wall of the carrier. A vacuum channel is opened, and the vacuum channel is connected to the adsorption hole, which is convenient for installing a vacuum source. However, if the vacuum channel opened through the side wall of the carrier is directly connected to the adsorption hole, the detection area of ​​the cover plate and the vacuum channel will be captured by the camera together, and the channel wall of the vacuum channel will appear as a projection on the image, affecting the detection result. In order to overcome this phenomenon, the carrier includes a base and a surface cover. The base is provided with a vacuum groove and a first channel for connecting the vacuum groove to an external vacuum source. The surface cover is provided with a plurality of adsorption holes. The surface cover sealing cover is provided on the vacuum groove to connect the adsorption holes to the vacuum groove so as to adsorb the cover plate. When the vacuum cavity and the vacuum channel are captured by the camera together, the projection of the vacuum cavity is greater than the projection of the surface cover, which will not affect the detection of the surface cover.

[0003] The carrier is usually made of a transparent acrylic plate, which is easier to process and cheaper than glass. However, when the surface cover is made of a transparent acrylic plate, the thickness of the surface cover itself is not large when it is prepared to save materials, and adsorption holes are opened on it. Therefore, when it is used, it is subjected to atmospheric pressure at the vacuum groove and the adsorption holes, and the adsorption holes have a greater impact on it, which can easily cause the surface cover to deform downward. When a cover plate is placed on it, the cover plate is also deformed accordingly, destroying the linearity and flatness of the product. Summary of the invention

[0004] The purpose of the present invention is to overcome the problem that when the surface cover is made of a transparent acrylic plate in the background technology, the thickness of the surface cover itself is not large when it is prepared in order to save materials, and adsorption holes are opened on it. Therefore, when it is used, it is subjected to atmospheric pressure at the vacuum groove and the adsorption holes, and the adsorption holes have a greater impact on it, which can easily cause the surface cover to deform downward. When a cover plate is placed on it, the cover plate is also deformed accordingly, destroying the linearity and flatness of the product, and providing a carrier for an object to be tested.

[0005] To achieve the above object, the present invention adopts the following technical solutions:

[0006] The first technical solution is a test object carrier, which is suitable for being connected to an external vacuum source and used to carry the test object along a first direction, wherein the projection of the test object on a first plane perpendicular to the first direction is divided into a first detection area and a non-detection area, the first detection area is located at the outer edge of the non-detection area, and the portion of the test object located in the first detection area is configured to be suitable for light to be transmitted along the first direction; comprising:

[0007] A base, which is provided with a protrusion and a vacuum groove surrounding the protrusion along a first direction, and is also provided with a first channel and a second channel, the protrusion is provided with a bearing surface for bearing an object to be tested, the first channel is for the vacuum groove to be connected to an external vacuum source, and the second channel is connected to the vacuum groove and opens to the bearing surface; the protrusion and the second channel are respectively configured so that their projections on the first plane are suitable for being located in a non-detection area; the vacuum groove is configured so that the first detection area is suitable for being located within its projection on the first plane; the first channel is configured so that its projection on the first plane is located outside the projection of the object to be tested on the first plane; and

[0008] A surface cover, which is sealed and covers the vacuum groove and encloses the vacuum groove to form a vacuum cavity;

[0009] The vacuum groove and the portion of the cover projected on the first plane that overlaps with the first detection area are configured to be suitable for light transmission.

[0010] Based on the first technical solution, in the second technical solution, the base and the surface cover are both made of a transparent acrylic plate.

[0011] Based on the second technical solution, in the third technical solution, the projection of the object to be tested on a second plane parallel to the first direction is a second detection area, and the part of the object to be tested located in the second detection area is configured to be suitable for light transmission; the surface cover is configured so that when the object to be tested is carried on the carrying surface, the projection of the surface cover on the second plane does not overlap with the second detection area.

[0012] Based on the third technical solution, in the fourth technical solution, the base includes a main body and a supporting plate, the main body is provided with a protrusion, the vacuum groove surrounds the protrusion, the top surface of the protrusion is flush with the plane where the notch of the vacuum groove is located, and the supporting plate is fixed to the top surface of the protrusion to form the bump with the protrusion.

[0013] Based on the fourth technical solution, in the fifth technical solution, the body is provided with a connecting hole and an annular groove, one end of the connecting hole opens to the groove wall of the annular groove, and the other end opens to the groove wall of the vacuum groove, and the annular groove opens to the top surface of the protrusion; the bearing plate is provided with a plurality of adsorption holes penetrating along the first direction, one end of the adsorption hole opens to the bearing surface, and the other end opens to communicate with the annular groove;

[0014] The communicating hole, the annular groove and the adsorption hole are connected in sequence to form the second channel.

[0015] Based on the fifth technical solution, in a sixth technical solution, the annular groove includes a first annular groove and a second annular groove, and the first annular groove and the second annular groove are connected.

[0016] Based on the fifth technical solution, in the seventh technical solution, the supporting plate is further provided with an avoidance hole penetrating along the first direction, and the adsorption holes are arranged around the avoidance hole.

[0017] Based on the fifth technical solution, in the eighth technical solution, the base also includes a sealing member, the main body is also provided with a processing hole, the connecting hole includes a first groove, a second groove and a third groove, the first groove opens at the bottom wall of the vacuum groove, the third groove opens at the bottom wall of the annular groove, the two ends of the second groove are respectively vertically connected to the first groove and the third groove, the processing hole is connected to the second groove, and the sealing member is suitable for sealing and blocking the processing hole so that the first groove, the second groove and the third groove are connected in sequence to form the connecting hole.

[0018] Based on the first technical solution, in the ninth technical solution, the base is also provided with an installation groove, the installation groove surrounds the protrusion, the vacuum groove opens to the bottom wall of the installation groove, and the surface cover is seated on the bottom wall of the installation groove and sealed with the groove wall of the installation groove.

[0019] Based on the ninth technical solution, in the tenth technical solution, the bottom wall of the mounting groove forms a first supporting surface and a second supporting surface that are spaced apart, the opening of the vacuum groove is located between the first supporting surface and the second supporting surface, and the first supporting surface and the second supporting surface respectively support the inner and outer sides of the face cover.

[0020] From the above description of the present invention, it can be seen that compared with the prior art, the present invention has the following beneficial effects:

[0021] 1. The first technical solution is that the vacuum groove is configured so that the first detection area is suitable to be located within its projection on the first plane, and the portion of the vacuum groove and the surface cover whose projection on the first plane overlaps with the first detection area is configured to be suitable for light transmission, so that the first detection area of ​​the object to be detected can be detected, the first channel is configured so that its projection on the first plane is located outside the projection of the object to be detected on the first plane, and the protrusion and the second channel are respectively configured so that their projections on the first plane are suitable to be located in the non-detection area, so that the first channel, the protrusion and the second channel will not affect the detection of the first detection area of ​​the object to be detected;

[0022] The first channel is connected to the vacuum groove and connected to an external vacuum source, the second channel is connected to the vacuum groove and opens to the carrying surface, the surface cover is sealed on the vacuum groove and encloses the vacuum groove to form a vacuum cavity, when the object to be tested is on the carrying surface and the vacuum source is working, the gas in the second channel, the vacuum cavity and the first channel is evacuated, so as to vacuum adsorb the object to be tested;

[0023] Since the second channel is opened on the base with a larger mass, the cover is only subjected to atmospheric pressure at the vacuum groove and will not be deformed. The base itself has a large mass and will not be deformed even if the second channel is opened. Therefore, the object carrier will not be deformed during vacuum use, thereby increasing its service life and preventing damage to the object to be tested.

[0024] 2. The second technical solution is that both the base and the cover are made of transparent acrylic plates, which is low in cost and easy to process.

[0025] 3. The third technical solution is to make the projection of the face cover on the second plane not overlap with the second detection area, so as to form a gap between the edge of the object to be tested and the face cover, thereby preventing the camera from being unable to obtain the edge image of the object to be tested due to the object to be tested being attached to the face cover during edge detection, thereby affecting the detection, and reducing the contact area between the object carrier and the object to be tested, thereby reducing contamination.

[0026] 4. The fourth technical solution is to make the top surface of the protrusion flush with the plane where the notch of the vacuum groove is located, and the supporting plate is fixed to the top surface of the protrusion to form a convex block with the protrusion, so that the convex block is higher than the surface cover to form a gap between the edge of the object to be tested and the surface cover.

[0027] 5. The fifth technical solution forms a second channel by sequentially connecting the connecting hole, the annular groove and the adsorption hole. The main body is provided with a connecting hole and annular groove, and the supporting plate is provided with a plurality of adsorption holes penetrating along the first direction, so as to facilitate the processing of the second channel and save materials.

[0028] 6. The sixth technical solution increases the adsorption area by including the first annular groove and the second annular groove, and reduces the number of connecting holes, thereby facilitating processing.

[0029] 7. The seventh technical solution is to reduce the contact area between the cover plate and the carrier plate by setting avoidance holes, thereby preventing the cover plate from being contaminated again.

[0030] 8. The eighth technical solution includes a connecting hole including a first groove, a second groove and a third groove. The first groove opens at the bottom wall of the vacuum groove, the third groove opens at the bottom wall of the annular groove, the two ends of the second groove are respectively vertically connected to the first groove and the third groove, the processing hole is connected to the second groove, and the sealing member blocks the processing hole so that the first groove, the second groove and the third groove are connected in sequence to form a connecting hole, which is convenient for processing the connecting hole.

[0031] 9. The ninth technical solution is that a mounting groove is further provided through the base, the vacuum groove opens to the bottom wall of the mounting groove, the surface cover is seated on the bottom wall of the mounting groove and is sealed with the groove wall of the mounting groove, thereby reducing the volume of the surface cover and saving materials.

[0032] 10. The tenth technical solution is to form a first supporting surface and a second supporting surface spaced apart by the bottom wall of the mounting groove, wherein the first supporting surface and the second supporting surface respectively support the inner side and the outer side of the surface cover, thereby making it easier for the surface cover to seal the vacuum groove. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0034] Figure 1 is a three-dimensional diagram of the test object carrier in Example 1;

[0035] Figure 2 It is an exploded view of the test object carrier in Example 1;

[0036] Figure 3 Schematic diagram of the structure of the test object carrier in Example 1;

[0037] Figure 4 It is a three-dimensional diagram of the main body in the first embodiment;

[0038] Figure 5 It is a structural schematic diagram of the main body in the first embodiment;

[0039] Figure 6 It is a projection diagram of the mobile phone cover on the first plane in Example 1;

[0040] Figure 7 This is a detection state diagram of the mobile phone cover in Example 1;

[0041] Description of main reference numerals:

[0042] The object carrier 10; the base 1; the body 11; the vacuum groove 111; the protrusion 112; the mounting groove 113; the first supporting surface 1131; the second supporting surface 1132; the first channel 114; the connecting hole 115; the first groove 1151; the second groove 1152; the third groove 1153; the annular groove 116; the first annular groove 1161; the second annular groove 1162; the processing hole 117; the bearing plate 12; the bearing surface 121; the avoidance hole 122; the adsorption hole 123; the sealing member 13; the protrusion 14; the second channel 15; the vacuum chamber 16; the cover 2;

[0043] Mobile phone cover 20; first detection area 201; non-detection area 202;

[0044] A first plane 30;

[0045] A second plane 40; DETAILED DESCRIPTION

[0046] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are preferred embodiments of the present invention and should not be regarded as excluding other embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0047] In the claims, description and the above-mentioned drawings of the present invention, unless otherwise clearly defined, the use of terms such as "first", "second" or "third" etc. are for distinguishing different objects rather than for describing a specific order.

[0048] In the claims, specification and the above-mentioned drawings of the present invention, unless otherwise explicitly defined, directional words, such as the terms "center", "lateral", "longitudinal", "horizontal", "vertical", "top", "bottom", "inside", "outside", "up", "down", "front", "back", "left", "right", "clockwise", "counterclockwise", etc., indicating directions or positional relationships are based on the directions and positional relationships shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific direction or be constructed and operated in a specific direction, and therefore cannot be understood as limiting the specific protection scope of the present invention.

[0049] In the claims, specification and the above drawings of the present invention, unless otherwise clearly defined, if the term "fixed connection" or "fixed connection" is used, it should be understood in a broad sense, that is, any connection method without a displacement relationship and relative rotation relationship between the two, that is to say, including non-detachable fixed connection, detachable fixed connection, integrated connection and fixed connection through other devices or elements.

[0050] In the claims, description and drawings of the present invention, if the terms "include", "have" and their variations are used, they are intended to mean "including but not limited to".

[0051] refer to Figure 3 , Figure 6 , Figure 7, a test object carrier 10, which is suitable for an external vacuum source and is used to carry the test object along a first direction. In this embodiment, the first direction is a direction perpendicular to the ground when in use. The projection of the test object on a first plane 30 perpendicular to the first direction is divided into a first detection area 201 and a non-detection area 202. The first detection area 201 is located at the outer edge of the non-detection area 202. The projection of the test object on a second plane 40 parallel to the first direction is a second detection area. The part of the test object located in the first detection area 201 is configured to be suitable for light to be transmitted along the first direction to facilitate the camera to obtain an image. The part of the test object located in the second detection area is configured to be suitable for light to be transmitted in order to obtain an image. The non-detection area 202 is an area where the product does not need to be detected. In this solution, the test object includes a detection part and a non-detection part. The first detection area 201, the second detection area and the non-detection area 202 defined by projection refer to the projection of the detection part or the non-detection part on a certain plane. The actual detection part and the non-detection part are three-dimensional structures. In this embodiment, the object to be tested is a mobile phone cover 20 as an example. The overall shape of the mobile phone cover 20 is a rectangular parallelepiped and the entirety can be transmitted by light. There are four second planes 40 , which are parallel to the four side walls of the mobile phone cover 20 .

[0052] refer to Figure 1-Figure 3 The object carrier 10 includes a base 1 and a cover 2 .

[0053] The base 1 is provided with a vacuum groove 111, a first channel 114, a second channel 15, a protrusion 14 and a mounting groove 113. Specifically, the base 1 includes a body 11, a bearing plate 12 and a sealing member 13.

[0054] refer to Figure 4 , Figure 5 The body 11 is provided with a vacuum groove 111 and a protrusion 112. The vacuum groove 111 opens upward along the first direction and surrounds the protrusion 112. The top surface of the protrusion 112 is flush with the groove plane of the vacuum groove 111. The vacuum groove 111 is configured so that the first detection area 201 is suitable for being located within the projection of the vacuum groove 111 on the first plane 30. The protrusion 112 is provided with a step surface parallel to its top surface.

[0055] The main body 11 is also provided with a mounting groove 113, and the mounting groove 113 surrounds the protrusion 112. The vacuum groove 111 opens at the bottom wall of the mounting groove 113. Specifically, the bottom wall of the mounting groove 113 forms a first supporting surface 1131 and a second supporting surface 1132 that are spaced apart. The projections of the first supporting surface 1131 and the second supporting surface 1132 on the first plane 30 are both annular. The opening of the vacuum groove 111 is located between the first supporting surface 1131 and the second supporting surface 1132. The first supporting surface 1131 is formed by the step surface of the protrusion 112.

[0056] The body 11 is also provided with a first channel 114, and the first channel 114 is connected to an external vacuum source for the vacuum groove 111. One end of the first channel 114 opens on the outer surface of the body 11 parallel to the first direction, and the other end opens on the bottom of the vacuum groove 111. Compared with the other end opening on the side wall of the vacuum groove 111, the size of the opening is not limited by the groove depth of the vacuum groove 111, and the force required for vacuum adsorption is reduced, which is also more convenient for processing. The projection of the first channel 114 on the first plane 30 is located outside the projection of the mobile phone cover 20 on the first plane 30, so that when the camera obtains the image of the first detection area 201 of the mobile phone cover 20, the image of the first channel 114 will not overlap with the image of the first detection area 201, and there is no interference. In this embodiment, two first channels 114 are symmetrically provided to increase the speed of forming a vacuum.

[0057] The body 11 is further provided with a connecting hole 115 , an annular groove 116 and a processing hole 117 . The annular groove 116 opens on the top surface of the protrusion 112 . One end of the connecting hole 115 opens on the groove wall of the annular groove 116 , and the other end opens on the groove wall of the vacuum groove 111 .

[0058] Specifically, the connecting hole 115 includes a first groove 1151, a second groove 1152 and a third groove 1153 which are connected in sequence. The first groove 1151 extends in the first direction and opens at the groove bottom wall of the vacuum groove 111. The third groove 1153 extends in the first direction and opens at the groove bottom wall of the annular groove 116. The two ends of the second groove 1152 are respectively connected to the first groove 1151 and the third groove 1153 vertically. The processing hole 117 extends in the first direction. One end of the processing hole 117 is opened to communicate with the second groove 1152 and the other end is opened to the bottom surface of the body 11. The shape of the sealing member 13 is adapted to the processing hole 117 to be suitable for sealing and blocking the processing hole 117 so that the first groove 1151, the second groove 1152 and the third groove 1153 are connected in sequence to form the connecting hole 115. This structure is convenient for processing, and the opening size of the first groove 1151 is not limited by the groove depth of the vacuum groove 111. In this embodiment, two connecting holes 115 are symmetrically provided to increase the speed of forming a vacuum.

[0059] The annular groove 116 includes a first annular groove 1161 and a second annular groove 1162. The openings of the first annular groove 1161 and the second annular groove 1162 are both on the top surface of the protrusion 112. The first annular groove 1161 and the second annular groove 1162 are connected to increase the adsorption area and reduce the number of connecting holes 115, thereby facilitating processing.

[0060] refer to Figure 2 , Figure 3The top surface of the carrying plate 12 is formed with a carrying surface 121 for carrying the mobile phone cover 20. The carrying plate 12 is fixedly arranged on the top surface of the protrusion 112 to form a protrusion 14 protruding along the first direction with the protrusion 112, and when the mobile phone cover 20 is carried on the carrying surface 121, the projection of the surface cover 2 on the second plane 40 does not overlap with the second detection area, so that a gap is formed between the edge of the mobile phone cover 20 and the surface cover 2, so as to avoid the camera being unable to obtain the edge image of the mobile phone cover 20 due to the mobile phone cover 20 being attached to the surface cover 2 during edge detection of the mobile phone cover 20, affecting the detection, and reducing the contact area between the object carrier 10 and the object to be tested, thereby reducing contamination. In this embodiment, the carrier plate 12 is bonded and fixed to the protrusion 112. After the fixation is completed, the vacuum groove 111 and the mounting groove 113 surround the protrusion 14. In this embodiment, the vacuum groove 111 surrounds the protrusion 14, that is, the projection of the vacuum groove 111 on the first plane 30 is in the shape of a "U". Of course, according to the detection area of ​​the mobile phone cover 20, it can also be set to be partially surrounded, such as the projection of the vacuum groove 111 on the first plane 30 is in the shape of a "concave". Similarly, in this embodiment, the mounting groove 113 surrounds the protrusion 14.

[0061] The bearing plate 12 is provided with an avoidance hole 122 and a plurality of adsorption holes 123 penetrating along the first direction, and the top surface of the bearing plate 12 forms a bearing surface 121. One end of the plurality of adsorption holes 123 opens to the bearing surface 121, and the other end opens to communicate with the annular groove 116. Specifically, the plurality of adsorption holes 123 form two groups of adsorption hole groups arranged in an annular manner, and the two adsorption hole groups correspond to the first annular groove 1161 and the second annular groove 1162, respectively. The connecting hole 115, the annular groove 116 and the adsorption holes 123 are connected in sequence to form a second channel 15, so that the second channel 15 is connected to the vacuum groove 111 and opens to the bearing surface 121;

[0062] The bump 14 and the second channel 15 are respectively configured such that projections of the bump 14 and the second channel 15 on the first plane 30 are suitable to be located within the non-detection area 202 so as not to affect the detection.

[0063] The carrier plate 12 is further provided with an avoidance hole 122 penetrating along the first direction, and the adsorption holes 123 are arranged around the avoidance hole 122. By providing the avoidance hole 122, the contact area between the cover plate and the carrier plate 12 is reduced to prevent the cover plate from being contaminated again.

[0064] refer to Figure 2 , Figure 3The cover 2 is sealed on the vacuum groove 111 and encloses the vacuum groove 111 to form a vacuum chamber 16; the base 1 is also provided with a mounting groove 113, the vacuum groove 111 opens at the bottom wall of the mounting groove 113, the cover 2 is seated on the bottom wall of the mounting groove 113 and is sealed with the groove wall of the mounting groove 113, thereby reducing the volume of the cover 2 and saving materials. Specifically, the cover 2 is seated on the first supporting surface 1131 and the second supporting surface 1132 and is sealed with the groove wall of the mounting groove 113, so that the first supporting surface 1131 and the second supporting surface 1132 support the inner side and the outer side of the cover 2 respectively, and glue can be applied on the first supporting surface 1131 and the second supporting surface 1132, so that it is easier for the cover 2 to seal the vacuum groove 111.

[0065] The vacuum groove 111 and the portion of the cover 2 projected on the first plane 30 that overlaps with the first detection area 201 are configured to be suitable for light transmission, thereby providing for detection of the mobile phone cover 20 .

[0066] Preferably, the base 1 and the cover 2 are both made of transparent acrylic plates, which are low in cost and easy to process.

[0067] The vacuum groove 111 is configured so that the first detection area 201 is suitable for being located within its projection on the first plane 30, and the portion where the projection of the vacuum groove 111 and the cover 2 on the first plane 30 overlaps with the first detection area 201 is configured to be suitable for light transmission, so that the first detection area 201 of the object to be detected can be detected, the first channel 114 is configured so that its projection on the first plane 30 is located outside the projection of the object to be detected on the first plane 30, and the protrusion 14 and the second channel 15 are respectively configured so that their projections on the first plane 30 are suitable for being located within the non-detection area 202, so that the first channel 114, the protrusion 14 and the second channel 15 will not affect the detection of the first detection area 201 of the object to be detected;

[0068] The first channel 114 connects the vacuum groove 111 to an external vacuum source, the second channel 15 connects the vacuum groove 111 and opens to the carrying surface 121, the cover 2 is sealedly covered on the vacuum groove 111 and encloses the vacuum groove 111 to form a vacuum chamber 16. When the object to be tested is on the carrying surface 121 and the vacuum source is working, the gas in the second channel 15, the vacuum chamber 16 and the first channel 114 is evacuated, so that the object to be tested is vacuum-absorbed;

[0069] Since the second channel 15 is opened on the base 1 with a larger mass, the cover 2 is only subjected to the atmospheric pressure at the vacuum groove 111, and the cover 2 will not be deformed. The base 1 itself has a large mass and will not be deformed even if the second channel 15 is opened. Therefore, the object carrier 10 will not be deformed during vacuum use, thereby increasing the service life and preventing damage to the object to be tested.

[0070] The description of the above specification and embodiments is used to explain the protection scope of the present invention, but does not constitute a limitation on the protection scope of the present invention. Through the enlightenment of the present invention or the above embodiments, ordinary technicians in this field can obtain modifications, equivalent substitutions or other improvements to the embodiments of the present invention or part of the technical features thereof through logical analysis, reasoning or limited experiments, which should be included in the protection scope of the present invention.

Claims

1. A test object carrier, which is suitable for being connected to an external vacuum source and used to carry the test object along a first direction, wherein the projection of the test object on a first plane perpendicular to the first direction is divided into a first detection area and a non-detection area, the first detection area is located at the outer edge of the non-detection area, and the portion of the test object located in the first detection area is configured to allow light to be transmitted along the first direction; characterized in that: include: A base, which is provided with a protrusion and a vacuum groove surrounding the protrusion along a first direction, and is also provided with a first channel and a second channel, the protrusion is provided with a bearing surface for bearing an object to be tested, the first channel is for the vacuum groove to be connected to an external vacuum source, and the second channel is connected to the vacuum groove and opens to the bearing surface; the protrusion and the second channel are respectively configured so that their projections on the first plane are suitable for being located in a non-detection area; the vacuum groove is configured so that the first detection area is suitable for being located within its projection on the first plane; the first channel is configured so that its projection on the first plane is located outside the projection of the object to be tested on the first plane; and A surface cover, which is sealed and covers the vacuum groove and encloses the vacuum groove to form a vacuum cavity; The vacuum groove and the portion of the cover projected on the first plane that overlaps with the first detection area are configured to be suitable for light transmission.

2. The test object carrier according to claim 1, characterized in that: The base and the surface cover are both made of transparent acrylic plates.

3. The test object carrier according to claim 2, characterized in that: The projection of the object to be detected on a second plane parallel to the first direction is a second detection area, and the portion of the object to be detected located in the second detection area is configured to be suitable for light transmission; The surface cover is configured so that when the object to be detected is carried on the carrying surface, a projection of the surface cover on the second plane does not overlap with the second detection area.

4. The test object carrier according to claim 3, characterized in that: The base includes a body and a supporting plate, the body is provided with a protrusion, the vacuum groove surrounds the protrusion, the top surface of the protrusion is flush with the plane where the notch of the vacuum groove is located, and the supporting plate is fixed to the top surface of the protrusion to form the convex block with the protrusion.

5. The test object carrier according to claim 4, characterized in that: The body is provided with a connecting hole and an annular groove, one end of the connecting hole opens to the groove wall of the annular groove, and the other end opens to the groove wall of the vacuum groove, and the annular groove opens to the top surface of the protrusion; the carrying plate is provided with a plurality of adsorption holes penetrating along the first direction, one end of the adsorption hole opens to the carrying surface, and the other end opens to communicate with the annular groove; The communicating hole, the annular groove and the adsorption hole are connected in sequence to form the second channel.

6. The test object carrier according to claim 5, characterized in that: The annular groove includes a first annular groove and a second annular groove, and the first annular groove and the second annular groove are communicated.

7. The test object carrier according to claim 5, characterized in that: The carrying plate is further provided with an avoidance hole penetrating along the first direction, and the adsorption holes are arranged around the avoidance hole.

8. The test object carrier according to claim 5, characterized in that: The base also includes a sealing member, and the main body is further provided with a processing hole, the connecting hole includes a first groove, a second groove and a third groove, the first groove opens at the groove bottom wall of the vacuum groove, the third groove opens at the groove bottom wall of the annular groove, the two ends of the second groove are respectively vertically connected to the first groove and the third groove, the processing hole is connected to the second groove, and the sealing member is suitable for sealing and blocking the processing hole so that the first groove, the second groove and the third groove are connected in sequence to form the connecting hole.

9. The test object carrier according to claim 1, characterized in that: The base is further provided with a mounting groove, the mounting groove surrounds the protrusion, the vacuum groove opens to the bottom wall of the mounting groove, the surface cover is seated on the bottom wall of the mounting groove and is sealed with the groove wall of the mounting groove.

10. The test object carrier according to claim 9, characterized in that: The bottom wall of the mounting groove forms a first supporting surface and a second supporting surface which are spaced apart from each other. The opening of the vacuum groove is located between the first supporting surface and the second supporting surface. The first supporting surface and the second supporting surface respectively support the inner side and the outer side of the surface cover.

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