A device, system and method for controlling baking deformation of thin-wall bending vacuum chamber

Abstract

The present invention relates to a device, system and method for controlling the baking deformation of a thin-walled bending vacuum chamber, the device comprising a bellows; at least one group of spring force applying mechanisms, the spring force applying mechanisms comprising a first fixed plate, a second fixed plate, at least one compression spring and at least one guide rod, the guide rod corresponding to the compression spring one by one, one end of the guide rod passing through the first fixed plate, the other end fixed on the second fixed plate, the compression spring sleeved on the guide rod; a force adjusting structure for adjusting the compression amount of the compression spring, the other end of the spring abutting against the first fixed plate. The device uses the spring force to offset the atmospheric pressure acting on the end face of the bellows, thereby minimizing the pulling force transmitted to the two ends of the bending vacuum chamber, and preventing the pulling force from straightening the bending vacuum chamber.

Description

Technical Field

[0001] The present invention relates to the technical field of accelerators, and in particular to a device, system and method for controlling baking deformation of a thin-wall bending vacuum chamber. Background Art

[0002] In order to increase the storage life of accelerated ions, heavy ion accelerators need to obtain ultra-high / ultra-high vacuum in the ion transport channel surrounded by a stainless steel curved vacuum chamber. The method for obtaining an ultra-high vacuum system at room temperature must use high-temperature online baking.

[0003] During baking, bellows are installed at both ends of each bending vacuum chamber to absorb the deformation caused by thermal expansion of stainless steel materials. Figure 1 As shown, due to the difference in vacuum cross-sectional area between the flanges connected to the ends of the curved vacuum chamber with a runway-shaped cross-section and the bellows with a circular cross-sectional shape, the bellows at both ends have a compression tendency under the action of atmospheric pressure, which in turn causes a reaction force of axial force and radial force to be applied to the curved vacuum chamber at the same time, which easily causes plastic deformation of the curved vacuum chamber. The axial force at both ends of the curved vacuum chamber, when the pressure of atmospheric pressure acting on the two end surfaces of the bellows is transferred to the two ends of the curved vacuum chamber during vacuum pumping, generates a pulling force, and the pulling force of the two end surfaces acts on the two ends of the curved vacuum chamber with a certain bending angle, stretching the curved vacuum chamber into a straight trend, causing deformation.

[0004] In addition, in order to reduce the eddy current effect on the wall of the bending vacuum chamber, the thickness of the cavity wall needs to be further reduced, which will cause the mechanical properties of the bending vacuum chamber to deteriorate sharply and become extremely easy to deform; and when baked at high temperatures, the mechanical properties will further decrease, and even cause weld failure. Summary of the invention

[0005] In view of the above problems, an object of the present invention is to provide a device for controlling the baking deformation of a thin-walled bending vacuum chamber, using spring force to offset the atmospheric pressure acting on the end face of the bellows, thereby minimizing the pulling force transmitted to the two ends of the bending vacuum chamber, and preventing the pulling force from straightening the bending vacuum chamber.

[0006] To achieve the above object, the present invention adopts the following technical solutions:

[0007] In one aspect, the present invention provides a device for controlling the baking deformation of a thin-wall bending vacuum chamber, comprising:

[0008] A bellows and a movable flange and a fixed flange fixedly mounted at both ends of the bellows, wherein the movable flange is used to connect one end of the bellows to the thin-wall bending vacuum chamber, and the fixed flange is used to fix the other end of the bellows;

[0009] At least one set of spring force applying mechanism, the spring force applying mechanism comprises a first fixing plate, a second fixing plate, at least one compression spring and at least one guide rod, the first fixing plate is connected to the movable flange, the second fixing plate is connected to the fixing flange, the first fixing plate and the second fixing plate are arranged opposite to each other, one end of the guide rod passes through the first fixing plate, and the other end is fixed to the second fixing plate, and the compression spring is sleeved on the guide rod;

[0010] A force regulating mechanism, wherein an output end of the force regulating mechanism is connected to one end of the compression spring for regulating the compression amount of the compression spring, and the other end of the spring is in contact with the first fixing plate.

[0011] Furthermore, the spring force applying mechanism includes two groups, and the two groups of spring force applying mechanisms are symmetrically installed on both sides of the bellows. The force applying adjustment mechanism includes two groups, and the two groups of force applying adjustment mechanisms correspond to one group of spring force applying mechanism respectively.

[0012] Furthermore, the force adjustment mechanism includes a motor, a lead screw, a nut and a force plate, the motor is fixedly installed, the output end of the motor is connected to the lead screw, the lead screw is arranged parallel to the guide rod, the nut is sleeved on the lead screw, the nut is fixedly connected to the force plate, and the force plate is connected to one end of the compression spring.

[0013] Furthermore, the spring force applying mechanism also includes a first guide ring and a second guide ring, the first guide ring and the second guide ring are both sleeved on the guide rod, and the first guide ring and the second guide ring are respectively fixedly connected to two ends of the compression spring.

[0014] Furthermore, it also includes an annular dynamometer, which is sleeved on the guide rod and located above the first guide ring, and is used to detect the force F applied by the force plate.

[0015] Furthermore, the compression spring and the guide rod each include two, the two guide rods are installed in parallel, each guide rod is sleeved with a compression spring, and the force application plate is connected to one end of the two compression springs.

[0016] Furthermore, threads are provided at both ends of the guide rod, and the middle is a smooth rod part. One end of the guide rod is fixed to the second fixing plate by a first locking nut and a second locking nut, and the other end passes through the first fixing plate and is fixed by a limit nut. The first fixing plate moves up and down along the guide rod.

[0017] Furthermore, a third locking nut is provided at the other end of the guide rod, and the third locking nut is used to prevent the limit nut from rotating.

[0018] In the second aspect, the present invention provides a system for controlling the baking deformation of a thin-walled bending vacuum chamber, comprising two devices for controlling the baking deformation of a thin-walled bending vacuum chamber and a controller, the two devices for controlling the baking deformation of a thin-walled bending vacuum chamber are respectively fixedly mounted at the two ends of the thin-walled bending vacuum chamber, the annular dynamometers and motors of the two devices for baking deformation of the thin-walled bending vacuum chamber are electrically connected to the controller, the annular dynamometer is used to detect the force F applied by the force plate, and send the detection result to the computer, and the controller controls the rotation of the motor according to the magnitude of the force F.

[0019] In a third aspect, the present invention provides a method for controlling the baking deformation of a thin-walled bending vacuum chamber. Based on the system for controlling the baking deformation of a thin-walled bending vacuum chamber, the method is characterized in that it comprises the steps of:

[0020] A judgment value F is set on the controller 设定 ;

[0021] The annular dynamometer detects the force F applied by the force-applying plate and sends the detection result to the controller. When the controller determines that F < F 设定 When the motor drives the force adjustment mechanism in the positive direction and generates pressure, the controller determines that F=F 设定 When , the motor stops rotating;

[0022] When the controller determines that F>F 设定 When the motor rotates in the reverse direction, the controller determines that F=F 设定 , the motor stops rotating.

[0023] The present invention adopts the above technical solution, which has the following advantages:

[0024] The elastic force of the compression spring is utilized to offset the atmospheric pressure acting on the end surface of the bellows, thereby minimizing the pulling force transmitted to the two ends of the bending vacuum chamber, and effectively preventing the bending vacuum chamber from being straightened. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Various other advantages and benefits will become apparent to those of ordinary skill in the art by reading the detailed description of the preferred embodiments below. The accompanying drawings are only for the purpose of illustrating the preferred embodiments and are not to be considered as limiting the present invention. Throughout the accompanying drawings, the same reference numerals are used to represent the same components. In the accompanying drawings:

[0026] Figure 1 It is a working principle diagram of the device for controlling the baking deformation of thin-wall bending vacuum chamber;

[0027] Figure 2 It is a structural schematic diagram of an embodiment of a device for controlling the baking deformation of a thin-wall bending vacuum chamber;

[0028] Figure 3 It is a front view of a device for controlling the baking deformation of a thin-wall bending vacuum chamber;

[0029] Figure 4 It is a schematic diagram of the system for controlling the baking deformation of a thin-wall bending vacuum chamber;

[0030] The symbols in the accompanying drawings are as follows:

[0031] 1-thin-wall bending vacuum chamber, 2-device for controlling baking deformation of thin-wall bending vacuum chamber, 3-computer, 21-bellows, 211-movable flange, 212-fixed flange, 22-force adjustment mechanism, 23-spring force mechanism, 24-first fixed plate, 25-second fixed plate, 26-force plate, 221-motor, 222-motor support, 223-screw, 224-nut, 231-first locking nut, 232-limiting nut, 233-annular dynamometer, 234-first guide ring, 235-compression spring, 236-second guide ring, 237-guide rod, 238-second locking nut, 239-third locking nut. DETAILED DESCRIPTION

[0032] The exemplary embodiments of the present invention will be described in more detail below with reference to the accompanying drawings. Although the exemplary embodiments of the present invention are shown in the accompanying drawings, it should be understood that the present invention can be implemented in various forms and should not be limited by the embodiments described herein. On the contrary, these embodiments are provided in order to enable a more thorough understanding of the present invention and to fully convey the scope of the present invention to those skilled in the art.

[0033] An embodiment of the present invention provides a device for controlling the baking deformation of a thin-walled bending vacuum chamber, comprising: a bellows, a movable flange and a fixed flange fixedly mounted on both ends of the bellows, at least one set of spring force applying mechanism and a force adjusting mechanism. The movable flange is used to connect one end of the bellows with the thin-walled bending vacuum chamber, and the fixed flange is used to fix the other end of the bellows. The spring force applying mechanism comprises a first fixed plate, a second fixed plate, at least one compression spring and at least one guide rod, the first fixed plate is connected to the movable flange, the second fixed plate is connected to the fixed flange, the first fixed plate and the second fixed plate are arranged oppositely, the guide rod corresponds to the compression spring one by one, one end of the guide rod is fixed to the first fixed plate, and the other end is fixed to the second fixed plate, and the compression spring is sleeved on the guide rod. The force adjusting mechanism is fixedly mounted on the first fixed plate or the second fixed plate, the output end of the force adjusting mechanism is connected to one end of the compression spring, used to adjust the compression amount of the compression spring, and the other end of the spring abuts against the first fixed plate. The present invention uses the elastic force provided by the compression spring to offset the atmospheric pressure on the bellows to achieve the effect of force neutralization, and ultimately minimizes the resultant force transmitted to the two ends of the bending vacuum chamber, thereby achieving the purpose of reducing the deformation of the bending vacuum chamber.

[0034] Example 1

[0035] Combination Figure 2 and Figure 3 As shown, the two ends of the thin-walled bending vacuum chamber 1 are respectively connected to two devices for controlling the baking deformation of the thin-walled bending vacuum chamber. The movable flange 211 is used to connect one end of the bellows 21 with the thin-walled bending vacuum chamber 1, and the fixed flange 212 is used to fix the other end of the bellows 21, and the fixed flange 212 limits 6 degrees of freedom. The elastic force provided by the compression spring 235 is used to offset the atmospheric pressure on the bellows 21 to achieve the effect of force neutralization, and finally minimize the combined force transmitted to the two ends of the thin-walled bending vacuum chamber 1, thereby achieving the purpose of reducing the deformation of the bending vacuum chamber.

[0036] Each of the thin-walled bending vacuum chambers 1 includes two groups of spring force applying mechanisms 23, which are symmetrically installed on both sides of the bellows 21. The spring force applying mechanisms 23 include a first fixed plate 24, a second fixed plate 25, at least one compression spring 235 and at least one guide rod 237. The first fixed plate 24 is connected to the movable flange 211, and the second fixed plate 25 is connected to the fixed flange 212. The first fixed plate 24 and the second fixed plate 25 are arranged opposite to each other, and the guide rod 237 corresponds to the compression spring 235 one by one. One end of the guide rod 237 passes through the first fixed plate 24, and the other end is fixed on the second fixed plate 25. The compression spring 235 is sleeved on the guide rod 237.

[0037] Specifically, the compression spring 235 and the guide rod 237 each include two, the two guide rods 237 are installed in parallel, each guide rod 237 is sleeved with a compression spring 235, and the force plate 26 is connected to one end of the two compression springs 235.

[0038] The two ends of the guide rod 237 are provided with threads, and the middle part is a smooth rod part. One end of the guide rod 237 is fixed to the second fixing plate 25 by a first locking nut 231 and a second locking nut 238, and the other end passes through the first fixing plate 24, and a limit nut 232 is fixed on the top, so that the first fixing plate 24 can move up and down along the guide rod. The other end of the guide rod 237 is also sleeved with a third locking nut 239, and the third locking nut 239 prevents the limit nut 232 from rotating.

[0039] It should be noted that the spring force applying mechanism 23 is not limited to being set to two types, and can also be set to one group or more than two groups. Each group of the spring force applying mechanism 23 is not limited to being set to include two compression springs 235, and can also be set to include only one or more than two compression springs 235.

[0040] The spring force applying mechanism 23 further includes a first guide ring 234, a second guide ring 236 and an annular dynamometer 233. The first guide ring 234 and the second guide ring 236 are both sleeved on the guide rod 237. The first guide ring 234 and the second guide ring 236 are respectively fixedly connected to the two ends of the compression spring 235. The annular dynamometer 233 is sleeved on the guide rod 237 and is located above the first guide ring 234. The annular dynamometer 233 is used to detect the force F applied by the compression spring 235.

[0041] The force adjustment mechanism 22 is fixedly installed, and the output end of the force adjustment mechanism 22 is connected to one end of the compression spring 235 for adjusting the compression amount of the compression spring 235, and the other end of the compression spring 235 is in contact with the first fixed plate 25. Specifically, the force adjustment mechanism 22 includes a motor 221, a lead screw 223, a nut 224 and a force plate 26. The motor 221 is fixedly installed on the first fixed plate 24, and the output end of the motor 221 is connected to the lead screw 223, and the lead screw 223 is arranged parallel to the guide rod 237. The nut 224 is sleeved on the lead screw 223, and the nut 224 is fixedly connected to the force plate 26, and the force plate 26 is connected to one end of the compression spring 235. Each group of the spring force mechanism 23 corresponds to a force adjustment mechanism 22.

[0042] It should be noted here that, as an implementation mode, the motor 221 of the force adjustment mechanism 22 can be fixedly mounted on the second fixing plate 25, and the lead screw 223 passes through the second fixing plate 25 and is rotatably connected to the second fixing plate 25. The nut 224 is sleeved on the lead screw 223, and the nut 224 is fixedly connected to the force plate 26. The motor 221 drives the lead screw 223 to rotate, and the rotation of the lead screw 223 drives the nut 224 to move along the lead screw 223, and then the force plate 26 moves downward and drives the compression spring 235 to contract.

[0043] As another implementation, the motor 221 may also be fixed on other auxiliary mechanisms, and the lead screw 223 passes through the first fixing plate 24 , and the first fixing plate 24 may move up and down along the lead screw 223 .

[0044] Example 2

[0045] Embodiment 2 of the present invention also provides a system for controlling the baking deformation of a thin-walled bending vacuum chamber, comprising two devices 2 for controlling the baking deformation of a thin-walled bending vacuum chamber and a controller, wherein the controller may be a computer, and the two devices 2 for controlling the baking deformation of a thin-walled bending vacuum chamber are respectively fixedly mounted at the two ends of the thin-walled bending vacuum chamber 1, and the annular dynamometers 233 and motors 221 of the two devices 2 for baking deformation of the thin-walled bending vacuum chamber are electrically connected to the computer, and the annular dynamometer 233 is used to detect the force F applied by the compression spring 235, and send the detection result to the computer, and the computer controls the rotation of the motor 221 according to the magnitude of the force F.

[0046] Example 3

[0047] Embodiment 3 of the present invention provides a method for controlling the baking deformation of a thin-walled bending vacuum chamber, based on the system for controlling the baking deformation of a thin-walled bending vacuum chamber in Embodiment 2, comprising the steps of:

[0048] A judgment value F is set on the computer 设定 , the F 设定 is the calculated pulling force.

[0049] The annular dynamometer 233 detects the force F applied by the compression spring 235 and sends the detection result to the computer 3. When the computer determines that F < F 设定 When the motor 221 drives the spring mechanism 23 in the positive direction and generates pressure, the computer determines that F=F 设定 When , the motor 221 stops rotating.

[0050] When the computer determines that F>F 设定 When the motor 221 rotates in the reverse direction, the computer determines that F=F 设定 When , the motor 221 stops rotating.

[0051] As one implementation, the bending vacuum chamber 1 does not produce axial deformation at room temperature, but produces axial elongation deformation of several millimeters at high temperature, and the ratio of the elongation deformation to the total length of the bending vacuum chamber 1 is a constant value;

[0052] The bending vacuum chamber 1 will inevitably produce axial elongation deformation due to the high-temperature baking conditions required by the background technology; the elongation deformation will push the movable flange 21 connected thereto to produce axial compression displacement.

[0053] The axial compression displacement will cause the force of the spring force mechanism 23 to increase.

[0054] The increase in force will be transmitted to the computer by the annular dynamometer 233. The computer 3 determines that F>F 设定 , the motor 221 rotates in the reverse direction until the computer 3 determines that F=F 设定 ;

[0055] As another implementation, when the bending vacuum chamber 1 returns to room temperature after baking, it will definitely produce axial shortening deformation; this shortening deformation will pull the movable flange 21 connected thereto to produce axial tensile displacement.

[0056] The axial tensile displacement will cause the force of the spring force applying mechanism 23 to decrease.

[0057] The force reduction will be transmitted to the computer 3 by the annular dynamometer 233. The computer 3 determines that F < F 设定 , the motor 221 rotates in the reverse direction until the computer 3 determines that F=F 设定 .

[0058] In the present invention, the elastic force of the compression spring 235 is used to actively offset the pulling force on the thin-wall bending vacuum chamber 1 caused by the atmospheric pressure, thereby reducing the deformation of the thin-wall bending vacuum chamber.

[0059] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A device for controlling the baking deformation of a thin-wall bending vacuum chamber, characterized in that: include: A bellows and a movable flange and a fixed flange fixedly mounted at both ends of the bellows, wherein the movable flange is used to connect one end of the bellows to the thin-wall bending vacuum chamber, and the fixed flange is used to fix the other end of the bellows; At least one set of spring force applying mechanism, the spring force applying mechanism comprises a first fixing plate, a second fixing plate, at least one compression spring and at least one guide rod, the first fixing plate is connected to the movable flange, the second fixing plate is connected to the fixing flange, the first fixing plate and the second fixing plate are arranged opposite to each other, one end of the guide rod passes through the first fixing plate, and the other end is fixed to the second fixing plate, and the compression spring is sleeved on the guide rod; A force adjustment mechanism, wherein an output end of the force adjustment mechanism is connected to one end of the compression spring for adjusting the compression amount of the compression spring, and the other end of the compression spring is in contact with the first fixing plate; The force adjustment mechanism comprises a motor, a lead screw, a nut and a force plate, wherein the motor is fixedly installed, the output end of the motor is connected to the lead screw, the lead screw is arranged parallel to the guide rod, the nut is sleeved on the lead screw, the nut is fixedly connected to the force plate, and the force plate is connected to one end of the compression spring; The spring force applying mechanism also includes a first guide ring, a second guide ring and an annular dynamometer, the first guide ring and the second guide ring are both mounted on the guide rod, and the first guide ring and the second guide ring are respectively fixedly connected to the two ends of the compression spring; the annular dynamometer is mounted on the guide rod and is located above the first guide ring, and the annular dynamometer is used to detect the force F applied by the force applying plate.

2. The device for controlling the baking deformation of thin-wall bending vacuum chamber according to claim 1, characterized in that: The spring force applying mechanism comprises two groups, and the two groups of spring force applying mechanisms are symmetrically installed on both sides of the bellows. The force applying adjustment mechanism comprises two groups, and the two groups of force applying adjustment mechanisms correspond to the two groups of spring force applying mechanisms one by one.

3. The device for controlling the baking deformation of thin-wall bending vacuum chamber according to claim 1, characterized in that: The compression spring and the guide rod each include two, the two guide rods are installed in parallel, each guide rod is sleeved with a compression spring, and the force application plate is connected to one end of the two compression springs.

4. The device for controlling the baking deformation of a thin-wall bending vacuum chamber according to claim 3, characterized in that: The two ends of the guide rod are provided with threads, and the middle is a smooth rod part. One end of the guide rod is fixed to the second fixing plate by a first locking nut and a second locking nut, and the other end passes through the first fixing plate and is fixed by a limit nut. The first fixing plate moves up and down along the guide rod.

5. The device for controlling the baking deformation of a thin-wall bending vacuum chamber according to claim 4, characterized in that: A third locking nut is also provided at the other end of the guide rod, and the third locking nut is used to prevent the limit nut from rotating.

6. A system for controlling the baking deformation of a thin-wall bending vacuum chamber, characterized in that: It comprises two devices and a controller for controlling the baking deformation of a thin-walled bending vacuum chamber as described in any one of claims 1 to 5, wherein the two devices for controlling the baking deformation of a thin-walled bending vacuum chamber are respectively fixedly mounted at the two ends of the thin-walled bending vacuum chamber, and the annular dynamometers and motors of the two devices for controlling the baking deformation of a thin-walled bending vacuum chamber are electrically connected to the controller, the annular dynamometer is used to detect the force F applied by the force plate, and send the detection result to the controller, and the controller controls the rotation of the motor according to the magnitude of the force F.

7. A method for controlling the baking deformation of a thin-walled bending vacuum chamber, based on the system for controlling the baking deformation of a thin-walled bending vacuum chamber according to claim 6, characterized in that: Includes steps: A judgment value F is set on the controller 设定 ; The annular dynamometer detects the force F applied by the force-applying plate and sends the detection result to the controller. When the controller determines that F < F 设定 When the motor drives the force adjustment mechanism in the positive direction and generates pressure, the controller determines that F=F 设定 When , the motor stops rotating; When the controller determines that F>F 设定 When the motor rotates in the reverse direction, the controller determines that F=F 设定 , the motor stops rotating.

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