Vacuum film press

Abstract

The application discloses a vacuum film press, comprising a film feeding device, a film recycling device and a film pressing device; the film feeding device is used for providing a plastic sealing film; the film recycling device is used for recycling the plastic sealing film; the film pressing device comprises an upper cavity and a lower cavity, a vacuum cavity can be formed between the upper cavity and the lower cavity, and the plastic sealing film passes between the upper cavity and the lower cavity; the film feeding device comprises a film feeding assembly, an expansion assembly and a first lifting device; the film recycling device comprises a recycling assembly, a tensioning assembly and a second lifting device; the first lifting device and the second lifting device are respectively arranged on the two sides of the film pressing device and are used for controlling the plastic sealing film between the upper cavity and the lower cavity to be movable up and down; the expansion assembly can be elastically deformed and is used for always expanding the plastic sealing film when the plastic sealing film is moved up and down by the first lifting device and the second lifting device; and the tensioning assembly is used for stretching and compacting the plastic sealing film. Through the above scheme, the plastic sealing film in the vacuum film press is kept in an expanded state.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor technology, in particular to a vacuum film press. BACKGROUND

[0002] A wafer is processed by continuous processing to make a circuit on the surface to complete various demand electronic components, and the wafer processing process is determined according to the demand, which generally includes multiple steps such as film coating, exposure, development, etching, ion implantation, metal sputtering and cutting, and the wafer needs to be packaged and film-pressed.

[0003] The current wafer processing machine adopts a mechanical roller film pressing method, in which the wafer is pressed by upper and lower rollers to make the plastic packaging film contact and fit with the wafer. Another method is to use a vacuum film press to press the wafer in a vacuum environment by a gas bag to make the plastic packaging film contact and fit with the wafer. Among them, the film feeding method of the vacuum film press has the problems of insufficient plastic packaging film tension or excessive stretching, which is a technical problem that needs to be solved by those skilled in the art. SUMMARY

[0004] The purpose of the present application is to provide a vacuum film press to keep the plastic packaging film in the vacuum film press in an expanded state.

[0005] The present application discloses a vacuum film press, comprising a film feeding device, a recycling device and a film pressing device; the film feeding device is used to provide a plastic packaging film; the recycling device is used to recycle the plastic packaging film; the film pressing device comprises an upper cavity and a lower cavity, a vacuum cavity can be formed between the upper cavity and the lower cavity, and the plastic packaging film passes between the upper cavity and the lower cavity; the film feeding device comprises a film feeding assembly, an expansion assembly and a first lifting device; the recycling device comprises a recycling assembly, a tensioning assembly and a second lifting device; the plastic packaging film is output by the film feeding assembly, passes through the expansion assembly, the first lifting device, the film pressing device, the second lifting device and the tensioning assembly, and is recycled by the recycling assembly; the first lifting device and the second lifting device are respectively arranged on both sides of the film pressing device to control the plastic packaging film to move up and down between the upper cavity and the lower cavity; the expansion assembly can elastically deform to always expand the plastic packaging film when the plastic packaging film moves up and down under the control of the first lifting device and the second lifting device; and the tensioning assembly is used to stretch and compress the plastic packaging film.

[0006] Optionally, the plastic sealing film has a first surface and a second surface opposite to the first surface, the first surface of the plastic sealing film is close to the upper cavity, the second surface of the plastic sealing film is close to the lower cavity, the second surface of the plastic sealing film has adhesion, the expansion assembly and the first lifting device are arranged on one side of the first surface of the plastic sealing film, and the second lifting device and the tensioning assembly are arranged on one side of the second surface of the plastic sealing film.

[0007] Optionally, the expansion assembly comprises a first expansion wheel, a first support, a second expansion wheel, a second support and an elastic structure, one end of the first support and one end of the second support are coaxially rotatably fixed, the first expansion wheel is arranged at the other end of the first support, the second expansion wheel is arranged at the other end of the second support, and the first support and the second support are connected by the elastic structure, and when the plastic sealing film moves up and down on the first lifting device and the second lifting device, the elastic structure between the first expansion wheel and the second expansion wheel is in an expanded state.

[0008] Optionally, the expansion assembly comprises a third expansion wheel and an elastic telescopic rod, and when the plastic sealing film moves up and down on the first lifting device and the second lifting device, the elastic telescopic rod is in a contracted state.

[0009] Optionally, the expansion assembly is arranged at one end of the first lifting device, and the first lifting device controls the expansion assembly to move up and down.

[0010] Optionally, the expansion assembly is fixedly arranged between the film feeding assembly and the first lifting device.

[0011] Optionally, when the plastic sealing film moves up and down on the first lifting device and the second lifting device, the first expansion wheel and the second expansion wheel are always in abutment with the plastic sealing film, and the elastic structure is always in an expanded state.

[0012] Optionally, when the plastic sealing film moves up and down on the first lifting device and the second lifting device, the third expansion wheel is always in abutment with the plastic sealing film, and the elastic structure is always in a contracted state.

[0013] Optionally, the film feeding assembly comprises a dry film wheel, a release film wheel, a front pressing wheel and a rear pressing wheel, the dry film wheel outputs a composite film to the rear pressing wheel, the front pressing wheel separates the release film on the composite film and then outputs the release film to the release film wheel, the release film wheel is used for recycling the release film, and the rear pressing wheel outputs the plastic sealing film after separation to the expansion assembly, wherein the composite film comprises the plastic sealing film and the release film arranged on the plastic sealing film.

[0014] Optionally, the first lifting device comprises a first lifting roller and a first lifting cylinder; the second lifting device comprises a clamping structure, a second lifting roller and a second lifting cylinder, the plastic packaging film is output to the recycling assembly by the second lifting roller after passing through the clamping structure, the clamping structure and the second lifting roller are driven to move up and down by the second lifting cylinder; the tensioning assembly comprises a lower pressing roller, a middle pressing roller and an upper pressing roller; the recycling assembly comprises a recycling roller, the upper pressing roller, the middle pressing roller and the lower pressing roller are arranged in a vertical direction, the plastic packaging film is output from the second lifting roller, enters between the lower pressing roller and the middle pressing roller, surrounds the middle pressing roller counterclockwise, is output between the middle pressing roller and the upper pressing roller, surrounds the upper pressing roller clockwise and is then output to the recycling roller.

[0015] The application acts on the plastic packaging film by respectively arranging the expansion assembly and the tensioning assembly, wherein the tensioning assembly acts on the plastic packaging film after the film pressing process is completed, is used for stretching and pressing the plastic packaging film, can facilitate recycling, and the tension force acts on the plastic packaging film, so that the plastic packaging film can be kept in a tension state. The expansion assembly has a certain elasticity and can be elastically deformed, and the elastic force of the expansion assembly acts on the plastic packaging film after the expansion assembly always abuts against the plastic packaging film, so that the plastic packaging film is expanded. Under the action of the elastic counterforce, the tension of the plastic packaging film can be maintained according to the elastic force even if the tension force of the tensioning assembly is small, so that the plastic packaging film can be kept in a horizontal and flat state. Moreover, the expansion assembly always keeps the plastic packaging film in an expanded state, a horizontal state and a flat state under the action of the first lifting device and the second lifting device. BRIEF DESCRIPTION OF DRAWINGS

[0016] The accompanying drawings included are part of the specification and illustrate embodiments of the application and, together with the written description, serve to explain the principles of the application. Obviously, the drawings in the following description are only some embodiments of the application, and other drawings can be obtained by those skilled in the art without creative labor. In the drawings:

[0017] Figure 1 is a schematic view of a vacuum film press of a first embodiment of the application;

[0018] Figure 2 is a schematic view of a vacuum film press of a first embodiment of the application;

[0019] Figure 3 is a second state schematic view of a vacuum film press of a first embodiment of the application;

[0020] Figure 4 is a first state schematic view of a vacuum film press of a second embodiment of the application;

[0021] Figure 5 is a second state schematic diagram of the vacuum film press of the second embodiment of the present application.

[0022] Wherein, 10, vacuum film press; 20, plastic sealing film; 100, film feeding device; 110, film feeding assembly; 111, dry film wheel; 112, release film wheel; 113, front pressing wheel; 114, rear pressing wheel; 130, expansion assembly; 131, first expansion wheel; 132, first support; 133, second expansion wheel; 134, second support; 135, elastic structure; 136, third expansion wheel; 137, elastic telescopic rod; 150, first lifting device; 151, first lifting roller; 152, first lifting cylinder; 200, recycling device; 210, recycling assembly; 211, recycling wheel; 230, tensioning assembly; 231, lower pressing wheel; 232, middle pressing wheel; 233, upper pressing wheel; 250, second lifting device; 251, second lifting roller; 252, second lifting cylinder; 253, clamping structure; 300, film pressing device; 310, upper cavity; 320, lower cavity. DETAILED DESCRIPTION

[0023] It is to be understood that the terminology used herein is for the purpose of describing specific embodiments only and is not intended to be limiting, but is intended to be representative of many alternative forms of implementation of the present application.

[0024] In the description of the present application, the terms "first", "second", "third", etc. are used only for the purpose of description, and should not be interpreted as indicating relative importance or implying that the indicated technical features are limited to one. Therefore, unless otherwise specified, the features defined with "first", "second", etc. can explicitly or implicitly include one or more of the features; the meaning of "multiple" is two or more. The term "comprising" and any variation thereof means non-exclusive inclusion, and one or more other features, integers, steps, operations, units, assemblies and / or combinations thereof can exist or be added.

[0025] In addition, the terms indicating the orientation or positional relationship of "center", "transverse", "upper", "lower", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. are described based on the orientation or relative position relationship shown in the drawings, and are only for the convenience of the simplified description of the present application, and are not intended to indicate that the indicated device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application.

[0026] In addition, unless specifically stated and limited otherwise, the terms "mounting", "connected", "connecting" should be interpreted broadly, for example, can be fixedly connected, can be detachably connected, or integrally connected; can be mechanically connected, can be electrically connected; can be directly connected, or indirectly connected through an intermediate medium, or internal communication of two elements. For those skilled in the art, the specific meaning of the above terms in this application can be understood according to the specific circumstances.

[0027] The application will be described in detail below with reference to the accompanying drawings and optional embodiments.

[0028] Figure 1 is a schematic diagram of a vacuum film press of a first embodiment of the application, as shown in Figure 1 The vacuum film press 10 includes a film feeding device 100, a recovery device 200 and a film pressing device 300, the film feeding device 100 is used to provide a plastic packaging film 20 to the film pressing device 300, the recovery device 200 is used to recover the used plastic packaging film 20 from the film pressing device 300, and the film pressing device 300 includes an upper cavity 310 and a lower cavity 320, the plastic packaging film 20 passes between the upper cavity 310 and the lower cavity 320, and after the upper cavity 310 and the lower cavity 320 are closed, a vacuum cavity is formed in the film pressing device 300 by vacuumizing. It should be understood that the plastic packaging film 20 is relatively thin and will not affect the sealing of the vacuum cavity between the upper cavity 310 and the lower cavity 320.

[0029] Figure 2 is a schematic diagram of a vacuum film press of a first embodiment of the application, as shown in Figure 2 The film device includes a film feeding assembly 110, an expansion assembly 130 and a first lifting device 150; the recovery device 200 includes a recovery assembly 210, a tensioning assembly 230 and a second lifting device 250; the plastic packaging film 20 is output by the film feeding assembly 110, passes through the expansion assembly 130, the first lifting device 150, the film pressing device 300, the second lifting device 250 and the tensioning assembly 230, and is recovered by the recovery assembly 210; the first lifting device 150 and the second lifting device 250 are respectively arranged on both sides of the film pressing device 300, and are used to control the plastic packaging film 20 between the upper cavity 310 and the lower cavity 320 to move up and down; the expansion assembly 130 can be elastically deformed, and is used to always expand the plastic packaging film 20 when the plastic packaging film 20 moves up and down under the control of the first lifting device 150 and the second lifting device 250; and the tensioning assembly 230 is used to stretch and compress the plastic packaging film 20.

[0030] The application acts on the plastic packaging film 20 by respectively setting the expansion assembly 130 and the tension assembly 230, wherein the tension assembly 230 acts on the plastic packaging film 20 after the film pressing process is completed, is used for stretching and pressing the plastic packaging film 20, can facilitate recycling, and the tension force acts on the plastic packaging film 20, so that the plastic packaging film 20 can be kept in a tension state. The expansion assembly 130 has a certain elasticity and can be elastically deformed, always abuts against the plastic packaging film 20, and the elastic force of the expansion assembly 130 is applied to the plastic packaging film 20, so that the plastic packaging film 20 is expanded. Under the action of the elastic counterforce, even if the tension force of the tension assembly 230 is small, the tension of the plastic packaging film 20 can be maintained according to the elastic force, so that the plastic packaging film 20 can be kept in a horizontal and flat state. Moreover, the expansion assembly 130 always protects the expansion state of the plastic packaging film 20 under the action of the first lifting device 150 and the second lifting device 250, keeps the plastic packaging film 20 in a horizontal and flat state. It should be understood that, as shown in Figure 1 , the plastic packaging film 20 between the film feeding device 100 and the recycling device 200 in the film pressing device 300 has no support and needs to rely on the tension between the film feeding device 100 and the recycling device 200 to maintain the height of the plastic packaging film 20 and keep the plastic packaging film 20 in a horizontal state. However, when the tension is too large or too small, the plastic packaging film 20 can be excessively stretched or cannot be kept in a horizontal and flat state, which causes inconvenience in wafer film coating. The vacuum film presser of the application Figure 2 can completely solve the problem.

[0031] Specifically, the first lifting device 150 and the second lifting device 250 are used to control the up-and-down movement of the plastic packaging film 20 between the upper cavity 310 and the lower cavity 320, which is mainly to prevent the problem of the plastic packaging film 20 touching the wafer during movement, so that the plastic packaging film 20 is away from the wafer during the movement of replacing the new one. In the embodiment, due to the expansion assembly 130, the up-and-down movement of the plastic packaging film 20 between the upper cavity 310 and the lower cavity 320 can be controlled, and the up-and-down movement of the whole film feeding device 100 and the recycling device 200 does not need to be controlled, that is, the movement of the plastic packaging film 20 between the upper cavity 310 and the lower cavity 320 can be realized. The wafer film pressing process can include: placing the wafer without film pressing treatment on the workbench of the lower cavity 320, providing the unused plastic packaging film 20 above the wafer through the action of the film feeding device 100 and the recycling device 200, at this time the plastic packaging film 20 does not directly contact the wafer, moving the plastic packaging film 20 between the upper cavity 310 and the lower cavity 320 downward, then moving the upper cavity 310 downward, closing the upper cavity 310 and the lower cavity 320 and vacuumizing, inflating the air bag on the upper cavity 310 to realize the film pressing treatment of the wafer, after completion, moving the upper cavity 310 upward, after cutting the plastic packaging film 20, taking out the wafer after film pressing treatment, and repeating the step of taking out the wafer without film pressing treatment, to complete the film pressing process of the next wafer without film pressing treatment. Of course, in order to better realize the film pressing treatment of the wafer, the upper cavity 310 and the lower cavity 320 in the embodiment are also movable respectively. The first lifting device 150 and the second lifting device 250 can adopt the mode of air cylinder and push wheel, the push wheel moves up and down through the control of the air cylinder, and the plastic packaging film 20 abuts against the push wheel.

[0032] As Figure 2As shown, the film feeding assembly 110 includes a dry film wheel 111, a release film wheel 112, a front pressing wheel 113 and a rear pressing wheel 114, the dry film wheel 111 outputs the composite film to the rear pressing wheel 114, the front pressing wheel 113 separates the release film on the composite film and then outputs to the release film wheel 112, the release film wheel 112 is used to recycle the release film; the rear pressing wheel 114 outputs the separated plastic packaging film 20 to the expansion assembly 130, wherein the composite film includes a plastic packaging film 20 and a release film arranged on the plastic packaging film 20; the plastic packaging film has a first surface and a second surface opposite to the first surface, the first surface of the plastic packaging film 20 is close to the upper cavity 310, the second surface of the plastic packaging film 20 is close to the lower cavity 320, the second surface of the plastic packaging film 20 has adhesion, and the release film is arranged on the second surface of the plastic packaging film 20. The composite film generally adopts a three-layer structure, the middle is an EMC (Epoxy Molding Compound, epoxy resin film plastic) film or an RP (PhotoResist, photoresist) film, both sides of the EMC have adhesion, and the two sides are respectively attached with release films, the release film is generally a PET (Polyethylene terephthalate, thermoplastic polyester) film, in this embodiment, the front pressing wheel 113 outputs the release film to the release film wheel 112 for recycling. The front pressing wheel 113 and the release film wheel 112 are arranged on the same side, the rear pressing wheel 114 and the dry film wheel 111 are arranged on the other side, and the front pressing wheel 113 and the rear pressing wheel 114 are horizontally arranged and only abut each other through the composite film.

[0033] Considering that the first surface of the plastic packaging film 20 does not have adhesion, the second surface of the plastic packaging film 20 has adhesion, and the second surface of the plastic packaging film 20 needs to be subjected to a film pressing process with a wafer, therefore, during the process that the plastic packaging film 20 is output from the rear pressing wheel 114 to the upper cavity 310, the second surface of the plastic packaging film 20 cannot be directly contacted with any structure. Therefore, the expansion assembly 130 and the first lifting device 150 are arranged on one side of the first surface of the plastic packaging film 20. However, for the plastic packaging film 20 after the film pressing device 300, there is no such limitation, the second lifting device 250 and the tensioning assembly 230 can be arranged on one side of the second surface of the plastic packaging film 20, and can provide support to the plastic packaging film 20.

[0034] Specifically, the first lifting device 150 comprises a first lifting roller 151 and a first lifting cylinder 152; the second lifting device 250 comprises a clamping structure 253, a second lifting roller 251 and a second lifting cylinder 252, the plastic packaging film 20 is output to the recycling assembly 210 by the second lifting roller 251 after passing through the clamping structure 253, and the clamping structure 253 and the second lifting roller 251 are driven to move up and down by the second lifting cylinder 252; the clamping structure 253 is used to flatten and transmit the plastic packaging film 20 to the tensioning assembly 230, so as to prevent the cut plastic packaging film 20 from overlapping and winding.

[0035] Specifically, the tensioning assembly 230 comprises a lower pressing roller 231, a middle pressing roller 232 and an upper pressing roller 233, and the recycling assembly 210 comprises a recycling roller 211, wherein the upper pressing roller 233, the middle pressing roller 232 and the lower pressing roller 231 are arranged in a vertical direction, and only the plastic packaging film 20 can pass between the upper pressing roller 233 and the middle pressing roller 232 and between the middle pressing roller 232 and the lower pressing roller 231, and the three are tightly matched to press the plastic packaging film 20. After the plastic packaging film 20 is output from the second lifting roller 251, it enters the tensioning assembly 230 from between the lower pressing roller 231 and the middle pressing roller 232, circulates around the middle pressing roller 232 counterclockwise, is output from between the middle pressing roller 232 and the upper pressing roller 233, and circulates around the upper pressing roller 233 clockwise and is then output to the recycling roller 211, wherein the recycling roller 211 is arranged above the upper pressing roller 233, and a guide wheel can be further arranged between the upper pressing roller 233 and the recycling roller 211, so as to prevent the plastic packaging film 20 between the recycling roller 211 and the upper pressing roller 233 from being in a slack state, and make the plastic packaging film 20 in a tension state.

[0036] Figure 3 is a second state schematic diagram of the vacuum film press of the first embodiment of the present application, the expansion assembly 130 comprises a first expansion roller 131, a first support 132, a second expansion roller 133, a second support 134 and an elastic structure 135, one end of the first support 132 and one end of the second support 134 are coaxially rotatably fixed, the first expansion roller 131 is arranged at the other end of the first support 132, the second expansion roller 133 is arranged at the other end of the second support 134, and the first support 132 and the second support 134 are connected by the elastic structure 135, and when the plastic packaging film 20 moves up and down under the action of the first lifting device 150 and the second lifting device 250, the elastic structure 135 between the first expansion roller 131 and the second expansion roller 133 is in an expanded state. Specifically, the expansion assembly 130 can be fixedly arranged between the film feeding assembly 110 and the first lifting device 150.

[0037] In combinationFigure 2 and Figure 3 as shown in FIG. 1, Figure 2 is a state in which the plastic packaging film 20 is far away from the wafer, and the first expansion wheel 131 and the second expansion wheel 133 of the expansion assembly 130 are far away from each other at this time. At this time, the elastic force of the elastic structure 135 is relatively large, so that the plastic packaging film 20 between the film feeding device 100 and the recycling device 200 is kept in a tension state. When the tension of the plastic packaging film 20 is not enough, that is, less than the elasticity of the elastic structure 135, the elastic structure 135 is contracted, and the first expansion wheel 131 and the second expansion wheel 133 move towards each other, so that the plastic packaging film 20 is expanded outward, and the tension is increased. When the tension of the plastic packaging film 20 is too large, that is, greater than the elasticity of the elastic structure 135, the elastic structure 135 is elongated, and the first expansion wheel 131 and the second expansion wheel 133 move away from each other, so that the plastic packaging film 20 is contracted inward, and the tension is reduced. Figure 3 is a state in which the plastic packaging film 20 is close to the wafer, and the adjustment process of the expansion assembly 130 is similar to the above. Through the expansion assembly 130, the tension of the plastic packaging film 20 is adjusted, so that the plastic packaging film 20 is always kept in a tension state, and the plastic packaging film 20 in the film pressing device 300 is kept in a horizontal state. Moreover, in the extreme case, when the tension of the plastic packaging film 20 is not enough, the elastic structure 135 has returned to the natural state, so that the plastic packaging film 20 between the rear pressing wheel 114 and the first lifting device 150 is in a maximum expansion state, and the plastic packaging film 20 in the film pressing device 300 is not enough to keep flat with tension. The second lifting device 250 or the tensioning assembly 230 can be adjusted to make the plastic packaging film 20 in the film pressing device 300 keep flat with enough tension.

[0038] It should be noted that in the process of elastic deformation of the expansion assembly 130, the central axis of the expansion assembly 130 is always perpendicular to the plastic packaging film 20 between the first expansion wheel 131 and the second expansion wheel 133. The elastic structure 135 can be a spring structure. In one case, when the plastic packaging film 20 moves up and down on the first lifting device 150 and the second lifting device 250, the first expansion wheel 131 and the second expansion wheel 133 are always in contact with the plastic packaging film 20, and the elastic structure 135 is always in an expanded state. In another case, Figure 3 the elastic structure 135 in the expansion assembly 130 is in a natural state. The expanded state of the elastic structure 135 is an elongated state, and the contracted state is a shortened state. The two cases are related to the length of the first support 132 and the second support 134 and the distance of the plastic packaging film 20, which can be set according to actual conditions.

[0039] In another embodiment, the expansion assembly 130 is arranged at one end of the first lifting device 150, and the first lifting device 150 controls the up-and-down movement of the expansion assembly 130. The same effect can also be achieved.

[0040] Figure 4 is a first state diagram of a vacuum film press of a second embodiment of the present application, Figure 5 is a second state diagram of a vacuum film press of the second embodiment of the present application. In this embodiment, other structures are the same as those in the above-mentioned first and second embodiments, and the expansion assembly 130 is different. The expansion assembly 130 includes a third expansion wheel 136 and an elastic telescopic rod 137. When the plastic encapsulation film 20 is moved up and down by the first lifting device 150 and the second lifting device 250, the elastic telescopic rod 137 is in a contracted state. When the plastic encapsulation film 20 is moved up and down by the first lifting device 150 and the second lifting device 250, the third expansion wheel 136 is always in abutment with the plastic encapsulation film 20, and the elastic structure 135 is always in a contracted state. Specifically, the expansion assembly 130 is fixedly arranged between the film feeding assembly 110 and the first lifting device 150.

[0041] Figure 4 is a state in which the plastic encapsulation film 20 is away from the wafer. At this time, the elastic structure 135 of the expansion assembly 130 is in a compressed state, and the contraction degree is large. At this time, the elastic force of the elastic structure 135 is large, so that the plastic encapsulation film 20 between the film feeding device 100 and the recovery device 200 is kept in a tension state. When the tension of the plastic encapsulation film 20 is not enough, i.e., less than the elasticity of the elastic structure 135, the elastic structure 135 is elongated, the third expansion wheel 136 moves in the elongation direction of the elastic structure 135, so that the plastic encapsulation film 20 is expanded outward, and the tension is increased. When the tension of the plastic encapsulation film 20 is too large, i.e., greater than the elasticity of the elastic structure 135, the elastic structure 135 is contracted, the third expansion wheel 136 moves in the contraction direction of the elastic structure 135, so that the plastic encapsulation film 20 is contracted inward, and the tension is reduced. Figure 5 is a state in which the plastic encapsulation film 20 is close to the wafer. The adjustment process of the expansion assembly 130 is similar to the above-mentioned process. Through the expansion assembly 130, the tension of the plastic encapsulation film 20 is adjusted, so that the plastic encapsulation film 20 is always kept in a tension state, and the plastic encapsulation film 20 in the film pressing device 300 is kept in a horizontal state.

[0042] In another embodiment, the expansion assembly 130 is arranged at one end of the first lifting device 150, and the first lifting device 150 controls the up-and-down movement of the expansion assembly 130. The same effect can also be achieved. It is necessary to Figures 2-5It is explained that the structures in the figure are, for example, the dry film wheel 111, the release film wheel 112, the front press wheel 113 and the rear press wheel 114 in the film feeding device 100, the first lifting cylinder in the first lifting device 150, the second lifting cylinder 252 of the second lifting structure, and the lower press wheel 231, the middle press wheel 232, the upper press wheel 233 and the recovery wheel 211 are respectively fixed in the vacuum film press 10.

[0043] It should be noted that the inventive concept of the present application can form a very large number of embodiments, but the length of the application file is limited and cannot list them one by one, so the above described embodiments or technical features can be combined to form new embodiments without conflict. The combination of each embodiment or technical feature will enhance the original technical effect.

[0044] The above is a further detailed description of the present application in combination with specific optional embodiments, and cannot be considered as limiting the specific implementation of the present application to these descriptions. For ordinary skilled persons in the art to which the present application belongs, without departing from the concept of the present application, a number of simple deductions or substitutions can be made, which should be considered as belonging to the protection scope of the present application.

Claims

1. A vacuum diaphragm press, comprising: Film feeding device, used to provide plastic sealing film; Recycling equipment for recycling plastic sealing film; as well as A film pressing device includes an upper cavity and a lower cavity, wherein a vacuum cavity can be formed between the upper cavity and the lower cavity, and the plastic sealing film passes through the space between the upper cavity and the lower cavity; The film feeding device is characterized in that it includes a film feeding assembly, an expansion assembly, and a first lifting device; The recovery device includes a recovery assembly, a tensioning assembly, and a second lifting device; The plastic sealing film is output by the film feeding assembly, passes through the expansion assembly, the first lifting device, the film pressing device, the second lifting device, and the tensioning assembly, and is then recovered by the recycling assembly. The first lifting device and the second lifting device are respectively disposed on both sides of the film pressing device, and are used to control the plastic sealing film between the upper cavity and the lower cavity to move up and down; The expansion component is elastically deformable and is used to always expand the plastic seal film so that the plastic seal film is under tension when the plastic seal film is moved up and down by the first lifting device and the second lifting device; the tensioning component is used to stretch and compress the plastic seal film. The first lifting device includes a first lifting roller and a first lifting cylinder; the second lifting device includes a clamping structure, a second lifting roller and a second lifting cylinder. After the plastic sealing film passes through the clamping structure, it is output to the recycling component by the second lifting roller. The clamping structure and the second lifting roller are driven to move up and down by the second lifting cylinder. The expansion assembly includes a first expansion wheel, a first bracket, a second expansion wheel, a second bracket, and an elastic structure. One end of the first bracket and one end of the second bracket are coaxially rotatably fixed. The first expansion wheel is disposed at the other end of the first bracket, and the second expansion wheel is disposed at the other end of the second bracket. The first bracket and the second bracket are connected by the elastic structure. The tensioning assembly includes a lower pressing roller, a middle pressing roller, and an upper pressing roller; the recycling assembly includes a recycling roller. The upper pressing roller, the middle pressing roller, and the lower pressing roller are arranged vertically. The plastic sealing film is output from the second lifting roller, enters between the lower pressing roller and the middle pressing roller, rotates counterclockwise around the middle pressing roller, is output between the middle pressing roller and the upper pressing roller, and rotates clockwise around the upper pressing roller before being output to the recycling roller. The greater the distance between the first expansion wheel and the second expansion wheel, the greater the elastic force of the elastic structure. When the tension on the plastic seal film is insufficient, less than the elastic force of the elastic structure, the elastic structure contracts, and the first expansion wheel and the second expansion wheel move in the converging direction, causing the plastic seal film to expand outward and the tension to increase. When the tension on the plastic sealant is too high, exceeding the elastic force of the elastic structure, the elastic structure elongates, and the first expansion wheel and the second expansion wheel move in opposite directions, causing the plastic sealant to contract inward and the tension to decrease.

2. The vacuum membrane press according to claim 1, characterized in that, The plastic sealant has a first side and a second side opposite to the first side. The first side of the plastic sealant is close to the upper cavity, and the second side of the plastic sealant is close to the lower cavity. The second side of the plastic sealant is adhesive. The expansion assembly and the first lifting device are disposed on one side of the first side of the plastic sealant, and the second lifting device and the tensioning assembly are disposed on one side of the second side of the plastic sealant.

3. The vacuum membrane press according to claim 2, characterized in that, When the plastic sealing film moves up and down under the influence of the first lifting device and the second lifting device, the elastic structure between the first expansion wheel and the second expansion wheel is in an expanded state.

4. The vacuum membrane press according to claim 2, characterized in that, The expansion assembly includes a third expansion wheel and an elastic telescopic rod. When the plastic sealing film moves up and down under the influence of the first lifting device and the second lifting device, the elastic telescopic rod is in a contracted state.

5. The vacuum membrane press according to claim 3 or 4, characterized in that, The expansion component is located at one end of the first lifting device, and the first lifting device controls the expansion component to move up and down.

6. The vacuum membrane press according to claim 3 or 4, characterized in that, The expansion assembly is fixedly disposed between the film feeding assembly and the first lifting device.

7. The vacuum membrane press according to claim 3, characterized in that, When the plastic sealant is moved up and down by the first lifting device and the second lifting device, the first expansion wheel and the second expansion wheel are always in contact with the plastic sealant, and the elastic structure is always in an expanded state.

8. The vacuum membrane press according to claim 4, characterized in that, When the plastic sealant is moved up and down by the first lifting device and the second lifting device, the third expansion wheel is always in contact with the plastic sealant, and the elastic structure is always in a contracted state.

9. The vacuum membrane press according to claim 1, characterized in that, The film feeding assembly includes a dry film roller, a release film roller, a front pressing roller, and a rear pressing roller. The dry film roller outputs the composite film to the rear pressing roller. The front pressing roller separates the release film from the composite film and outputs it to the release film roller. The release film roller is used to collect the release film. The rear pressing roller outputs the separated plastic seal film to the expansion assembly. The composite film includes a plastic seal film and a release film disposed on the plastic seal film.

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