A product imaging control device for a vapor deposition furnace and a control method

Abstract

The application provides a product imaging control device and a control method for a vapor deposition furnace. The product imaging control device comprises: a laser measurement window arranged on a side wall of the vapor deposition furnace; a laser emission port of a laser measurement device is arranged opposite to the laser measurement window to collect product data in the vapor deposition furnace; a lifting device is connected to the laser measurement device; a data imaging device is used to form an image according to the product data collected by the laser measurement device; and a PLC control module is connected to the laser measurement device, the lifting device and the data imaging device. The laser measurement device can accurately measure the product in the vapor deposition furnace, and real-time specific measurement data can be obtained, so that the process can be adjusted, the process is stabilized, the yield of the product is improved, and the application has the characteristics of small error and high reliability.

Description

Technical Field

[0001] This invention relates to the field of vapor deposition furnace technology, and specifically to a product imaging control device and control method for vapor deposition furnaces. Background Technology

[0002] Currently, products inside vapor deposition furnaces are difficult to observe due to high temperatures, strong heat radiation, and the need for furnace insulation. The industry relies on manual and semi-automatic methods for observation, which suffer from large errors, insufficient reliability, and the inability to obtain real-time, detailed measurement data. This leads to process instability and low product yield. Therefore, it is necessary to provide a product imaging control device and method for vapor deposition furnaces. Summary of the Invention

[0003] This invention provides a product imaging control device and control method for a vapor deposition furnace to improve the product yield.

[0004] To achieve the above objectives, the present invention discloses a product imaging control device for a vapor deposition furnace, comprising: a laser measurement window for being formed on the side wall of the vapor deposition furnace; a laser measurement device having its laser emission port opposite to the laser measurement window for collecting product data within the vapor deposition furnace; a lifting device connected to the laser measurement device for driving the laser measurement device to move up and down; a data imaging device for performing graphic imaging based on the product data collected by the laser measurement device; and a PLC control module connected to the laser measurement device, the lifting device, and the data imaging device respectively, for controlling the laser measurement device to collect product data, transmitting the product data collected by the laser measurement device to the data imaging device, and controlling the lifting device to drive the laser measurement device to move up and down.

[0005] In one embodiment of the present invention, the laser measurement window is composed of multiple layers of quartz glass, and the outermost layer is provided with a high-temperature sealing adhesive layer.

[0006] In one embodiment of the present invention, heat insulation cotton is filled between adjacent layers of quartz glass.

[0007] In one embodiment of the present invention, the laser measurement window is equipped with an adjustable pressure nitrogen supply device, and the nitrogen supply device is provided with a nitrogen purging pipe extending toward the laser measurement window.

[0008] In one embodiment of the present invention, the PLC control module includes a PLC chip and an AC / DC converter, the lifting device includes a servo driver, a servo controller and a servo motor, the signal output terminal of the PLC chip is connected to the servo driver, the AC / DC converter is connected to the servo controller, and the servo controller is connected to the signal input terminal of the PLC chip.

[0009] Another aspect of the present invention discloses a product imaging control method for a vapor deposition furnace, comprising the following steps:

[0010] Step S1. Collect product data inside the vapor deposition furnace;

[0011] Step S2. Display the product's graphic image based on the collected product data;

[0012] Step S3. Compare the current diameter value d of the product in the collected product data with the preset diameter value dy of the product;

[0013] Step S4. When d > dy, reduce the opening of the upper and lower air valves used to control the temperature of the vapor deposition furnace to 50%. If the current opening value of the upper and lower air valves is less than or equal to 50%, adjust the opening of the upper air valve to half of the current opening value and adjust the opening of the lower air valve to one-third of the current opening value.

[0014] When d < dy, increase the opening of the upper and lower air valves to 60%. If the current opening value of the upper and lower air valves is greater than or equal to 50%, then increase the opening of the upper and lower air valves to 100%.

[0015] Step S5. Repeat steps S1 to S4 until the product is fully formed.

[0016] In one embodiment of the present invention, in step S1, a laser measuring device is used to collect product data inside the vapor deposition furnace.

[0017] In one embodiment of the present invention, in step S1, before production, the laser measuring device is driven to rise and fall using a lifting device based on the product's growth zero point; and during production, the laser measuring device is driven to rise and fall using a lifting device based on the product's growth height in the collected product data, so as to collect product data through laser measuring devices located at different heights.

[0018] In one embodiment of the present invention, in step S2, a data imaging device is used to display the product as a graphic image based on the collected product data.

[0019] In summary, the present invention has at least the following beneficial effects:

[0020] 1. This invention uses a laser measuring device to perform laser detection on the product inside the vapor deposition furnace through a laser measuring window, measuring the product's size data (accurate to 1mm, with a reliability of over 95%, which is a significant improvement over the current 10mm accuracy and 80% reliability of manual measurement). Based on the product's size data, a data imaging device is used to create a graphic image. Then, a PLC control module uses a lifting device to drive the laser measuring device to rise and fall according to the different product processes, so that the laser measuring device can accurately measure the product inside the vapor deposition furnace and obtain real-time specific measurement data. This allows for process adjustment and stabilization, thereby improving the product yield. It features small error and high reliability.

[0021] 2. The product imaging control method for a vapor deposition furnace of the present invention first collects product data inside the vapor deposition furnace and performs graphic imaging. Then, it compares the current diameter value d of the product in the collected product data with the preset diameter value dy of the product. Based on the comparison result, it adjusts the opening degree of the upper and lower air valves used to control the temperature of the vapor deposition furnace. By continuously adjusting the temperature, the forming size of the product is controlled. This scheme can adjust the process according to the real-time specific measurement data, stabilize the process, and improve the product yield. It has the characteristics of small error and high reliability. Attached Figure Description

[0022] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0023] Figure 1 This is a schematic diagram of the structure of the laser measurement window and laser measurement device involved in some embodiments of the present invention.

[0024] Figure 2 This is a schematic diagram of the control relationship of the PLC control module involved in some embodiments of the present invention.

[0025] Figure 3 This is a schematic diagram illustrating the steps of a product imaging control method for a vapor deposition furnace as described in some embodiments of the present invention.

[0026] Figure 4 This is a schematic diagram illustrating the product growth simulation involved in some embodiments of the present invention.

[0027] Figure label:

[0028] 1. Chemical vapor deposition furnace; 11. Laser measurement window;

[0029] 2. Laser measuring device; 21. Lifting device. Detailed Implementation

[0030] In the following description, only certain exemplary embodiments are briefly described. As those skilled in the art will recognize, the described embodiments can be modified in various ways without departing from the spirit or scope of the invention. Therefore, the drawings and description are considered to be exemplary in nature and not restrictive.

[0031] Furthermore, the terms "installation," "connection," "linking," and "fixing" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0032] The embodiments of the present invention will now be described in detail with reference to the accompanying drawings.

[0033] like Figure 1 and Figure 2 As shown, this embodiment provides a product imaging control device for a vapor deposition furnace, including: a laser measurement window 11, which is formed on the side wall of a vapor deposition furnace 1; a laser measurement device 2, whose laser emission port is arranged opposite to the laser measurement window 11 to collect product data inside the vapor deposition furnace 1; a lifting device 21, which is connected to the laser measurement device 2 to drive the laser measurement device 2 to move up and down; a data imaging device, which is used to perform graphic imaging based on the product data collected by the laser measurement device 2; and a PLC control module, which is connected to the laser measurement device 2, the lifting device 21 and the data imaging device respectively, to control the laser measurement device 2 to collect product data, transmit the product data collected by the laser measurement device 2 to the data imaging device, and control the lifting device 21 to drive the laser measurement device 2 to move up and down.

[0034] It should be understood that the product imaging control device used in this vapor deposition furnace performs laser detection on the product inside the vapor deposition furnace 1 through the laser measurement window 11 via the laser measurement device 2, measuring the real-time size data of the product. The data imaging device performs graphic imaging based on the real-time size data of the product, allowing direct observation of the current forming status of the product. At the same time, based on the real-time size data of the product, the height of the laser measurement device 2 is adjusted by the lifting device 21, making the real-time size data of the product obtained by the laser measurement device 2 more accurate, with smaller errors and higher reliability. This makes the process adjustments made based on the real-time size data of the product more direct and effective, thereby improving the product yield. Of course, the process can also be adjusted directly based on the current forming status of the product, so that the product size conforms to the preset size and meets the product forming requirements, thereby stabilizing the process and improving the product yield.

[0035] It is understood that the laser measurement device 2, the data imaging device, and the PLC control module are all existing devices. The laser measurement device 2 and the data imaging device can also be replaced by existing laser imaging devices. The focus of this embodiment is to realize the automation of product imaging and product forming through the above structure, filling the gap in the field of automated product imaging and product forming of vapor deposition furnace 1.

[0036] In some embodiments, the laser measurement window 11 is composed of multiple layers of quartz glass, with a high-temperature sealant layer on the outermost layer. In this embodiment, the high-temperature sealant layer is distributed along the edge of the laser measurement window 11 and is mainly filled with high-temperature sealant, which can seal and insulate the laser measurement window 11. The high-temperature sealant is an existing material.

[0037] In some embodiments, thermal insulation cotton is filled between adjacent layers of quartz glass. In this embodiment, the thermal insulation cotton is distributed along the edge of the laser measurement window 11, and the thermal insulation cotton is existing high-temperature thermal insulation cotton, further improving the sealing and heat insulation effect.

[0038] In some embodiments, the laser measurement window 11 is equipped with an adjustable pressure nitrogen supply device, which has a nitrogen purge pipe extending into the laser measurement window 11. In this embodiment, the nitrogen purge pipe prevents air from seeping into the laser measurement window 11 and also prevents gas inside the vapor deposition furnace 1 from leaking out of the laser measurement window 11.

[0039] In some embodiments, the PLC control module includes a PLC chip and an AC / DC converter. The lifting device 21 includes a servo driver, a servo controller, and a servo motor. The signal output terminal of the PLC chip is connected to the servo driver, the AC / DC converter is connected to the servo controller, and the servo controller is connected to the signal input terminal of the PLC chip. In this scheme, AC220V AC power is externally connected to the AC / DC converter and converted into DC power to power the servo controller, the laser measuring device 2, and the data imaging device. The lifting control signal is output to the servo driver through the PLC chip. With the cooperation of the servo driver and the servo controller, the servo motor is controlled to rotate forward or reverse, thereby causing the laser measuring device 2 on the lifting device 21 to rise or fall. The PLC chip, AC / DC converter, servo driver, servo controller, and servo motor are all existing devices, such as... Figure 2 As shown, a PC (computer) is also provided to control the execution program of the PLC chip. This embodiment provides an implementable solution.

[0040] like Figure 3 As shown, this embodiment provides a product imaging control method for a vapor deposition furnace, including the following steps:

[0041] Step S1. Collect product data inside the vapor deposition furnace 1;

[0042] Step S2. Display the product's graphic image based on the collected product data;

[0043] Step S3. Compare the current diameter value d of the product in the collected product data with the preset diameter value dy of the product;

[0044] Step S4. When d > dy, reduce the opening of the upper and lower air valves of the vapor deposition furnace 1 used for temperature control to 50%. If the current opening value of the upper and lower air valves is less than or equal to 50%, adjust the opening of the upper air valve to half of the current opening value and adjust the opening of the lower air valve to one-third of the current opening value.

[0045] When d < dy, increase the opening of the upper and lower air valves to 60%. If the current opening value of the upper and lower air valves is greater than or equal to 50%, then increase the opening of the upper and lower air valves to 100%.

[0046] Step S5. Repeat steps S1 to S4 until the product is fully formed.

[0047] In step S1, a laser measuring device 2 is used to collect product data inside the vapor deposition furnace 1. The laser ranging data acquisition cycle of the laser measuring device 2 is 0.5 seconds, and the effective value of the laser ranging data is the minimum value collected every 60 seconds. In practice, product growth has two directions: horizontal and vertical. In the horizontal direction, the product is spread out in a high-temperature environment by rotating and swinging the base. Here, 60 seconds refers to one swing cycle.

[0048] In step S1, before production, the laser measuring device 2 is driven to rise and fall using the lifting device 21 based on the product's growth zero point; and during production, the laser measuring device 2 is driven to rise and fall using the lifting device 21 based on the product's growth height from the collected product data, so as to collect product data through the laser measuring device 2 located at different heights. The product's growth zero point is determined according to product requirements. During production, the laser emission port of the laser measuring device 2 is fixedly aligned with the product's growth zero point; however, when process analysis is required to stabilize the process (adjust the process), the laser measuring device 2 is driven to rise and fall using the lifting device 21. The product data collected by the laser measuring device 2 at different heights will be different. By performing process analysis using these different product data, errors can be further reduced, which is beneficial for stabilizing the process and improving the product yield.

[0049] In step S2, based on the collected product data, a data imaging device is used to display the product in graphic form. The data imaging device can use various existing configuration software to complete the data display and graphic imaging display.

[0050] The preset diameter value dy and preset temperature value Ty of the product can be set according to the actual production process requirements of the product. In practical applications, the opening degree can be changed by manually or remotely controlling the upper and lower air valves. The above control method can be integrated into the PLC control module through PLC programming and executed by the PLC chip to achieve automation. PLC programming is an existing solution and will not be described in detail here.

[0051] The relationship between the product diameter d and the product growth height h during product growth is as follows: Figure 4 As shown in the product growth simulation diagram, it can be fully demonstrated that the above control methods and control devices can be applied to actual production, stabilize the process, reduce errors, have high reliability, and effectively improve the product yield.

[0052] In summary, several specific embodiments of the present invention have been disclosed. Without contradiction, the various embodiments can be freely combined to form new embodiments. That is, embodiments that are alternative solutions can be freely substituted for each other, but cannot be combined with each other; embodiments that are not alternative solutions can be combined with each other. These new embodiments are also part of the substantive content of the present invention.

[0053] The above embodiments describe several specific implementations of the present invention. However, those skilled in the art should understand that various changes or modifications can be made to these implementations without departing from the principles and essence of the present invention, but all such changes and modifications fall within the protection scope of the present invention.

Claims

1. A product imaging control method for a vapor deposition furnace, characterized in that, Includes the following steps: Step S1. Collect product data inside the vapor deposition furnace; Step S2. Display the product's graphic image based on the collected product data; Step S3. Compare the current diameter value d of the product in the collected product data with the preset diameter value dy of the product; Step S4. When d > dy, reduce the opening of the upper and lower air valves used to control the temperature of the vapor deposition furnace to 50%. If the current opening value of the upper and lower air valves is less than or equal to 50%, adjust the opening of the upper air valve to half of the current opening value and adjust the opening of the lower air valve to one-third of the current opening value. When d < dy, increase the opening of the upper and lower air valves to 60%. If the current opening value of the upper and lower air valves is greater than or equal to 50%, then increase the opening of the upper and lower air valves to 100%. Step S5. Repeat steps S1 to S4 until the product is fully formed.

2. The product imaging control method for a vapor deposition furnace according to claim 1, characterized in that, In step S1, a laser measurement device is used to collect product data inside the vapor deposition furnace.

3. The product imaging control method for a vapor deposition furnace according to claim 2, characterized in that, In step S1, before production, the laser measuring device is driven to rise and fall using a lifting device based on the product's growth zero point; and during production, the laser measuring device is driven to rise and fall using a lifting device based on the product's growth height in the collected product data, so as to collect product data through laser measuring devices located at different heights.

4. The product imaging control method for a vapor deposition furnace according to claim 3, characterized in that, In step S2, based on the collected product data, a data imaging device is used to display the product as a graphic image.

5. The product imaging control method for a vapor deposition furnace according to claim 1, characterized in that, The apparatus used in this method includes: A laser measurement window is used to be opened on the side wall of the vapor deposition furnace; A laser measurement device, wherein the laser emission port is positioned opposite to the laser measurement window, to collect product data inside the vapor deposition furnace; A lifting device is connected to the laser measuring device to drive the laser measuring device to move up and down; A data imaging device is used to perform graphic imaging based on product data acquired by the laser measuring device; and The PLC control module is connected to the laser measuring device, the lifting device, and the data imaging device respectively, to control the laser measuring device to collect product data, transmit the product data collected by the laser measuring device to the data imaging device, and control the lifting device to drive the laser measuring device to rise and fall.

6. The product imaging control method for a vapor deposition furnace according to claim 5, characterized in that, The laser measurement window is made of multiple layers of quartz glass, and the outermost layer is provided with a high-temperature sealing adhesive layer.

7. The product imaging control method for a vapor deposition furnace according to claim 6, characterized in that, The spaces between the quartz glass layers are filled with insulating cotton.

8. The product imaging control method for a vapor deposition furnace according to claim 6, characterized in that, The laser measurement window is equipped with an adjustable pressure nitrogen supply device, which has a nitrogen purging pipe extending into the laser measurement window.

9. The product imaging control method for a vapor deposition furnace according to claim 5, characterized in that, The PLC control module includes a PLC chip and an AC / DC converter. The lifting device includes a servo driver, a servo controller, and a servo motor. The signal output terminal of the PLC chip is connected to the servo driver, the AC / DC converter is connected to the servo controller, and the servo controller is connected to the signal input terminal of the PLC chip.

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