Panel IVL-LT All-in-One Testing Equipment
Through the combination of the three-axis motion control system and the large-size semiconductor refrigeration and heating module, the problems of low automation and poor temperature control of Panel test equipment are solved, and efficient multi-size Panel testing and precise temperature control are achieved.
Patent Information
- Application Number
- CN202210509119.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Priority Date
- 2021-12-29
- Filing Date
- 2022-05-10
- Publication Date
- 2025-07-22
- Estimated Expiration
- 2042-05-10
AI Technical Summary
In the prior art, Panel testing equipment has low degree of automation, making it difficult to achieve batch and efficient testing of large-area TFT devices and single Panels, and the temperature control effect is not good.
It adopts a three-axis motion control system and a large-size semiconductor refrigeration and heating module, combined with a heat conductor and a water cooler, to achieve high-precision temperature control and automated testing, equipped with an IV scanning system and a high-precision programmable power supply, and supports independent temperature control and power supply of multi-size Panels.
It realizes high automation batch testing of large-area TFT devices and independent setting testing of single Panels, with accurate temperature control and power supply capabilities, and is suitable for testing needs of different sizes of Panels.
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Figure CN114994370B_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to the technical field of test equipment, and particularly relates to a Panel IVL-LT all-in-one test equipment. Background Art
[0002] In the display industry, the development of TFT technology has been rapid and even mature, and new display materials are also a hot research topic. TFT technology has an important performance in various displays. Therefore, the demand for Panel testing is increasing day by day, and most of the testing requirements are used for the optoelectronic stability detection of TFT devices or the comprehensive evaluation of the performance of TFT devices. The present invention is a Panel IVL-LT all-in-one test equipment, which serves the Panel testing of large-area TFT devices, has a high degree of automation, is suitable for batch testing, and can also perform independent setting tests on a single Panel. Summary of the Invention
[0003] In order to solve the problems existing in the above-mentioned prior art, the present invention provides a Panel IVL-LT all-in-one test equipment to solve the current technical problems.
[0004] The technical solution adopted by the present invention to solve its technical problems is as follows:
[0005] The present invention provides a Panel IVL-LT all-in-one test equipment, including: a housing, a three-axis motion control system is arranged inside the housing, the three-axis motion control system is arranged at the bottom of the housing, a heat conduction sheet is also arranged inside the housing, and the heat conduction sheet is arranged on a temperature control system.
[0006] Preferably, the three-axis motion control system includes a first track, a first slider is arranged on the first track, a second track is arranged on the first slider, a second slider is arranged on the second track, a third track is arranged on the second slider, a third slider is arranged on the third track, and a test device is arranged on the third slider.
[0007] Preferably, the temperature control system includes a plurality of semiconductor refrigeration and heating modules, and the semiconductor refrigeration and heating modules are fixed on the lower surface of the heat conduction sheet.
[0008] Preferably, a plurality of protrusions are arranged on the heat conduction sheet.
[0009] Preferably, a chute is arranged on the heat conduction sheet, and a clamp is arranged on the chute.
[0010] Preferably, a test bench is arranged inside the housing, and the heat conduction sheet is placed on the test bench.
[0011] Preferably, the Panel to be tested is placed on the heat conduction sheet.
[0012] Preferably, the fixture is fixed in the chute, a magnetic adsorption fixing block is adsorbed on the fixture, a connecting rod is arranged on the magnetic adsorption fixing block, a needle holder is arranged on the connecting rod, and a plurality of probes are arranged on the needle holder.
[0013] Preferably, a water cooler is arranged below the temperature control system.
[0014] The beneficial effects of the present invention are as follows: This device serves for the Panel test of large-area TFT devices, has a high degree of automation, is suitable for batch testing, and can also perform independent setting tests on a single Panel; at the same time, this device adopts an independent large-size semiconductor refrigeration and heating module, which can achieve independent temperature control of the area and has a good use effect. Description of the Drawings
[0015] The above aspects and advantages of the present invention will become obvious and easy to understand from the description of the embodiments in conjunction with the following drawings, wherein:
[0016] Figure 1 is a schematic structural diagram of the Panel IVL-LT all-in-one machine test equipment according to an embodiment of the present invention;
[0017] Figure 2 is a top view structural diagram of the Panel IVL-LT all-in-one machine test equipment according to an embodiment of the present invention;
[0018] Figure 3 is a schematic structural diagram of the fixture position of the Panel IVL-LT all-in-one machine test equipment according to an embodiment of the present invention;
[0019] Figure 4 is a schematic structural diagram of the fixture position of the Panel IVL-LT all-in-one machine test equipment according to an embodiment of the present invention;
[0020] Figure 5 is a schematic structural diagram of the heat conducting sheet with different-sized Panels placed on the Panel IVL-LT all-in-one machine test equipment according to an embodiment of the present invention;
[0021] Figure 6 is a schematic structural diagram of the heat conducting sheet with different-sized Panels placed on the Panel IVL-LT all-in-one machine test equipment according to an embodiment of the present invention;
[0022] Figure 7 is a schematic structural diagram of the heat conducting sheet with different-sized Panels placed on the Panel IVL-LT all-in-one machine test equipment according to an embodiment of the present invention.
[0023] Description of the Reference Numerals:
[0024] In Figures 1-7Among them, chute 1; connecting rod 2; magnetic adsorption fixing block 3; body 4; needle card 5; probe 6; first track 7; testing device 8; third track 9; second track 10; test bench 11; Panel under test 12; fixture 13; housing 14; heat conducting sheet 15. Detailed implementation manner
[0025] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.
[0026] The present invention provides a Panel IVL-LT integrated machine testing device, including: housing 14, a three-axis motion control system is arranged inside the housing 14, the three-axis motion control system is arranged at the bottom of the housing 14, and a heat conducting sheet 15 is also arranged inside the housing 14, and the heat conducting sheet 15 is arranged on the temperature control system. The housing 14 is a metal box body, and the heat conducting sheet 15 is a rectangular copper plate.
[0027] The three-axis motion control system includes a first track 7, a first slider is arranged on the first track 7, a second track 10 is arranged on the first slider, a second slider is arranged on the second track 10, a third track 9 is arranged on the second slider, a third slider is arranged on the third track 9, and a testing device 8 is arranged on the third slider. The first track 7, the second track 10, and the third track 9 are all metal tracks, the first slider, the second slider, and the third slider are all metal sliders, and the testing device 8 can use a CS2000A brightness testing device. The CS2000A can test any position of the Panel, and it is necessary to cooperate with a CCD lens to realize automatic alignment of the light emitting points, and the alignment accuracy is 0.02 mm.
[0028] The temperature control system includes a plurality of semiconductor refrigeration and heating modules, and the semiconductor refrigeration and heating modules are fixed on the lower surface of the heat conducting sheet 15, and the plurality of semiconductor refrigeration and heating modules adopt existing technologies.
[0029] A plurality of protrusions are arranged on the heat conducting sheet 15 to facilitate loading of the Panel.
[0030] A chute 1 is arranged on the heat conducting sheet 15, a fixture 13 is arranged on the chute 1, the chute 1 is a metal groove, and the fixture 13 can be fixed on the chute 1. A test bench 11 is arranged inside the housing 14, the heat conducting sheet 15 is placed on the test bench 11, and the test bench 11 is a metal bracket. The Panel under test 12 is placed on the heat conducting sheet 15, and the Panel is cooled through the heat conducting sheet 15.
[0031] The fixture 13 is fixed within the sliding groove 1. A magnetic adsorption fixing block 3 is adsorbed on the fixture 13. A connecting rod 2 is provided on the magnetic adsorption fixing block 3. A pin card 5 is provided on the connecting rod 2. A number of probes 6 are provided on the pin card 5. The fixture 13 is a movable Pad power supply fixture. In the simplest case, its body 4 can be a rectangular metal block, fixed on the sliding groove 1. The magnetic adsorption fixing block 3 is a magnet, adsorbed on the body 4. The connecting rod 2 is a metal rod. The pin card 5 is a metal plate, on which a number of probes 6 are provided. This fixture 13 uses the Pogopin pin card method to contact the Pad for power supply. As a preferred solution, the body 4 of the fixture 13 can be a platform that can displace in the XY directions on the horizontal plane, where XY is orthogonal, for precisely pressing onto the Pad of the Panel for power supply, and manual Pad alignment contact is required. Since the Pad power supply fixture 13 is movable and detachable, different numbers or pin cards of the probe fixture can be equipped according to the Pad requirements of different Panels.
[0032] A water cooler is provided below the temperature control system. The water cooler can adopt the existing technology and is used to cool the semiconductor refrigeration and heating module.
[0033] This device serves the Panel test of large-area TFT devices, has a high degree of automation, is suitable for batch testing, and can also perform independent setting tests on a single Panel; at the same time, this device adopts an independent large-size semiconductor refrigeration and heating module, which can achieve independent temperature control of regions (commonly: 4 independent large-size semiconductor refrigeration and heating modules are adopted, which can achieve independent temperature control of 4 regions, meet the temperature control requirements of 4 16.9-inch Panels, and at the same time, the same temperature control can also be achieved for every two regions, meet the temperature control requirements of 2 31-inch Panels, and at the same time, the same temperature control can also be achieved for 4 regions, meet the temperature control requirements of 1 65-inch Panel).
[0034] This device is also equipped with an IV scanning system, which uses a Keithley 2635B source meter to achieve programmed IV scanning and data acquisition. It is also equipped with a high-precision programmable power supply: an 8-channel high-precision programmable power supply of the ZQE801 model, which is mainly used to provide the power required for the life aging test of the Panel.
[0035] Table 1 High-precision programmable power supply parameters
[0036]
[0037] For a 65-inch Panel, Pad power supply fixtures can be equipped on four sides. Among them, the upper and lower long sides adopt the movable slide rail method, and the power supply fixtures on the long sides can move freely in the short side direction; while the left and right short sides adopt the detachable method, mainly fixed through the screw holes on the sample table;
[0038] For the 31-inch Panel, 4-sided Pad power supply fixtures can also be equipped, but 2 additional Pad power supply fixtures need to be added in the middle, and these two Pad power supply fixtures can be fixed with screw holes; the Pads on the long sides and short sides can move the power supply fixtures to meet the power supply requirements at different positions;
[0039] For the 16.9-inch Panel, in addition to sharing the long-side Pad fixtures at the bottom and the top, 2 additional long-side Pad fixtures and several short-side Pad fixtures can be added. They are all fixed with the screw holes on the sample stage to meet the power supply requirements for 4 pieces of 16.9-inch Panels;
[0040] Finally, it should be noted that the above are only the preferred embodiments of the present invention and are not used to limit the present invention. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions recorded in the foregoing embodiments, or perform equivalent replacements for some of the technical features. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention shall be included within the protection scope of the present invention.
Claims
1. A Panel IVL-LT all-in-one machine testing device, comprising: The housing is characterized in that: a three-axis motion control system is arranged inside the housing, the three-axis motion control system is arranged at the bottom of the housing, a heat conducting sheet is further arranged inside the housing, and the heat conducting sheet is arranged on the temperature control system; the three-axis motion control system includes a first track, a first slider is arranged on the first track, a second track is arranged on the first slider, a second slider is arranged on the second track, a third track is arranged on the second slider, a third slider is arranged on the third track, and a testing device is arranged on the third slider; the temperature control system includes a plurality of semiconductor refrigeration and heating modules, and the semiconductor refrigeration and heating modules are fixed on the lower surface of the heat conducting sheet; a plurality of protrusions are arranged on the heat conducting sheet; a chute is arranged on the heat conducting sheet, and a clamp is arranged on the chute; the clamp is a movable Pad power supply clamp, and in the simplest case, its body can be a rectangular metal block, fixed on the chute, the magnetic adsorption fixing block is a magnet, adsorbed on the body, the connecting rod is a metal rod, the pin card is a metal plate, and a plurality of probes are arranged thereon. The clamp is in contact with the Pad for power supply by adopting the Pogo pin card method.
2. The Panel IVL-LT all-in-one machine testing device according to claim 1, characterized in that: A test bench is arranged inside the housing, and the heat conducting sheet is placed on the test bench.
3. The Panel IVL-LT all-in-one machine testing device according to claim 1, characterized in that: The Panel to be tested is placed on the heat conducting sheet.
4. The Panel IVL-LT all-in-one test device according to claim 1, wherein: The clamp is fixed in the chute, a magnetic adsorption fixing block is adsorbed on the clamp, a connecting rod is arranged on the magnetic adsorption fixing block, a pin card is arranged on the connecting rod, and a plurality of probes are arranged on the pin card.
5. The Panel IVL-LT all-in-one machine testing device according to claim 1, wherein: A water cooler is arranged below the temperature control system.
Citation Information
Patent Citations
Automatic chip strip testing machine
CN107894561A