Microchannel plate collimator X-ray detection device and detection method

Abstract

The present invention discloses a microchannel plate collimator X-ray detection device and detection method, comprising an X-ray source, a stage, a collimator, an X-ray camera, and a shielding device. The stage is provided with a through hole, the collimator is disposed on the stage and is located on the rear side of the stage, the X-ray source and the X-ray camera are disposed in front and behind the collimator, respectively, and the X-ray source, collimator, and X-ray camera are located on the same axis. The detection device of the present invention significantly shortens the distance between the X-ray source and the X-ray camera, thereby reducing the size of the detection device and lowering costs. The method of use thereof can obtain a two-dimensional rocking curve through a single measurement. Moreover, the light source distance is short, the particle flux is large, and the single measurement time is short, effectively improving the efficiency of the detection operation while reducing the risk of personnel exposure.

Description

Technical Field

[0001] The present invention relates to the technical field of X-ray optical imaging devices, and in particular to a microchannel plate collimator X-ray detection device and a detection method. Background Art

[0002] Capillary lead glass microchannel plates (MCPs) are lead glass panels covered with an array of tiny through-holes, typically used as X-ray optical components. Each MCP must be tested before use to ensure its parameters meet the required specifications.

[0003] Existing detection methods for microchannel plates all use parallel X-ray light incident at different angles for detection. Since parallel X-ray light is difficult to obtain, the commonly used method is to extend the optical path, resulting in the size of commonly used beam detection devices being longer. The specific detection method of the beam detection device is to perform angle scanning in two dimensions, draw a rocking curve, and then analyze the results. However, there are major problems with the above-mentioned detection device and detection method. The beam detection device has the disadvantages of being large in size and high in cost. During the detection, each angle needs to be counted for a long enough time or a sufficient number of counts need to be accumulated to ensure the accuracy of the results, which is time-consuming. At the same time, multiple long-term detections also cause X-rays to affect the personal health of the detection personnel. Even if protection is enhanced, not only does it seriously increase the cost, but it is also impossible to avoid the harm caused by multiple tests.

[0004] The present invention provides a microchannel plate collimator X-ray detection device and a detection method to solve the above problems. Summary of the Invention

[0005] The present invention provides a microchannel plate collimator X-ray detection device and a detection method, which reduce the volume of the detection device and achieve one-time imaging while meeting detection requirements.

[0006] The technical solution adopted by the present invention to solve the above technical problems is:

[0007] A microchannel plate collimator X-ray detection device, comprising an X-ray source, a stage, a collimator, an X-ray camera, and a shielding device, wherein the stage is provided with a through hole, the collimator is provided on the stage and is located at the rear side of the stage, the X-ray source and the X-ray camera are respectively provided in front and behind the collimator, and the X-ray source, collimator, and X-ray camera are located on the same axis;

[0008] The X-ray source emits a point light source, and the X-ray camera receives the X-rays and forms an image. The distance between the X-ray source and the X-ray camera is L, and the distance L is determined using the following formula:

[0009] tg(θ)=d / L

[0010] Where θ is the angular resolution of the system measurement and d is the pixel size of the X-ray camera.

[0011] Furthermore, the detection indicators of the collimator include pointing accuracy, opening area ratio and field of view, and the pointing accuracy includes hole-hole parallelism and hole-surface perpendicularity.

[0012] Furthermore, the imaging result of the X-ray camera is a circle whose brightness gradually darkens from the center to the outside.

[0013] A method for using a microchannel plate collimator X-ray detection device comprises the following steps:

[0014] S1, system preparation: according to the measurement accuracy requirements, adjust the relative positions of the X-ray source, stage and X-ray camera and ensure that they are on the same axis. After the adjustment is completed, install the collimator;

[0015] S2, connecting the system: connecting the X-ray source, stage and X-ray camera to the test system;

[0016] S3, conducting a test: operating the X-ray source and the X-ray camera, and the X-ray camera receives X-rays and forms an image;

[0017] S4, result conversion: convert the virtual original image imaged by the X-ray camera to obtain a three-dimensional PicC brightness distribution map, obtain the parameter indicators of the collimator based on the three-dimensional PicC brightness distribution map, and compare them with the expected values.

[0018] Furthermore, in step S4, the spatial coordinates in the horizontal direction of the PicC brightness distribution three-dimensional graph are the incident light inclination angle of the X-ray; the peak value of the PicC brightness distribution three-dimensional graph is the opening area ratio parameter of the collimator; the angle value corresponding to the position of the peak value of the PicC brightness distribution three-dimensional graph is the pointing accuracy parameter of the collimator, and the half-width height of the peak value of the PicC brightness distribution three-dimensional graph is the field of view parameter of the collimator.

[0019] The beneficial effects of the present invention are as follows:

[0020] The detection device significantly shortens the distance between the X-ray source and the X-ray camera, thereby reducing the size of the detection device and reducing costs;

[0021] A two-dimensional rocking curve can be obtained in one measurement. Furthermore, the light source is close, the particle flux is large, and the single measurement time is short, effectively improving the efficiency of the inspection operation while reducing the risk of personnel exposure.

[0022] The present invention has the advantages of simple structure, easy operation, high detection accuracy, higher safety and lower cost, while effectively improving work efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 Schematic diagram of the device structure of the present invention;

[0024] Figure 2 is a schematic diagram of a virtual original image of the present invention;

[0025] Figure 3 Schematic diagram of the three-dimensional brightness distribution of PicC of the present invention;

[0026] Figure 4 Schematic diagram of the rocking curve of the prior art.

[0027] Reference numerals: 1 - X-ray source, 2 - stage, 3 - collimator, 4 - X-camera. DETAILED DESCRIPTION

[0028] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0029] In the description of this patent, it should be understood that the terms "center", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the accompanying drawings. They are only for the convenience of describing this patent and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, they should not be understood as limitations on this patent.

[0030] Current beamline devices perform testing by placing the sample on a high-precision turntable and measuring the transmission efficiency at different inclination angles. The number of X-ray particles that penetrate the sample is then counted, creating a two-dimensional rocking curve. The peak height of the rocking curve represents the aperture area ratio; the peak coordinate represents the pointing accuracy; and the width at half-height of the peak represents the field of view. However, these devices are relatively large. High-precision devices typically have optical path lengths in the hundreds of meters range. For devices with optical path lengths in the meter range, due to precision and structural limitations, they cannot fully meet the accuracy requirements of the test. Furthermore, these devices share the drawback of requiring angular scanning in two dimensions. Each angle must be counted for a sufficient period of time or a sufficient number of counts to plot the rocking curve, resulting in lengthy testing times. Furthermore, since the measurement results at each inclination angle must be statistically significant, shortening the measurement time is impossible.

[0031] like Figure 1 、 2, 3, and 4, a microchannel plate collimator X-ray detection device includes an X-ray source 1, a stage 2, a collimator 3, an X-ray camera 4, and a shielding device. The stage 2 is provided with a through hole. The collimator 3 is provided on the stage 2 and is located at the rear side of the stage 2. The X-ray source 1 and the X-ray camera 4 are respectively provided in front and behind the collimator 3. The X-ray source 1, the collimator 3, and the X-ray camera 4 are located on the same axis.

[0032] The X-ray source 1 is a microfocus X-ray source for emitting a point light source. The X-ray camera receives the X-rays and forms an image. The distance between the X-ray source 1 and the X-ray camera 4 is L. The following formula is used to determine the distance L:

[0033] tg(θ)=d / L

[0034] Where θ is the angular resolution of the system measurement and d is the pixel size of the X-ray camera.

[0035] The principle of the present invention is as follows: an X-ray source 1 emits a point light source to form divergent light. The emitted X-rays pass through a collimator 3 and are received by an X-ray camera 4, forming a circular imaging result on the X-ray camera 4. The original image obtained by the X-ray camera 4 is then converted to a virtual image, and the corresponding parameter data is then derived. The present invention uses a point light source to emit a large number of X-ray particles at once. Due to the small value of L, a single emission measurement can form an image on the X-ray camera 4. The imaging result can then be calculated based on the image, making it faster than existing detection methods.

[0036] In a preferred embodiment of the present invention, d = 10.8 μm, L = 331.8 mm, and θ = 6.7 arcsec. Compared to a 103-meter-long beam system, the optical path length of the present invention is 331.8 mm, significantly shortening the optical path distance. Compared to a 1-meter-long beam system, the detection accuracy of the present invention is 6.7 arc seconds, achieving even higher accuracy.

[0037] Furthermore, the detection indicators of the collimator 3 include pointing accuracy, aperture area ratio, and field of view. The pointing accuracy includes hole-hole parallelism and hole-surface perpendicularity. Hole-hole parallelism is the degree of parallelism between the microholes, with an expected value of 0". Hole-surface perpendicularity is the degree of perpendicularity between the microholes and the mounting surface, with an expected value of 90°. The aperture area ratio is the ratio of the microhole area to the total area. The field of view is the area that can be effectively observed, which is the field of view angle θ.

[0038] Furthermore, the imaging result of the X-ray camera is a circle with the highest brightness in the center and gradually darkening outwards.

[0039] A detection method for a microchannel plate collimator X-ray detection device comprises the following steps:

[0040] S1, system preparation: according to the measurement accuracy requirements, adjust the relative positions of the X-ray source 1, stage 2 and X-ray camera 4 and ensure that they are on the same axis. After the adjustment is completed, install the collimator 3;

[0041] S2, connecting the system: connecting the X-ray source 1, the stage 2 and the X-ray camera 4 to the test system;

[0042] S3, performing a test: operating the X-ray source 1 and the X-ray camera 4, and the X-ray camera 4 receives X-rays and forms an image;

[0043] S4, result conversion: convert the virtual original image formed by the X-ray camera 4 to obtain a three-dimensional PicC brightness distribution map, obtain the parameter index of the collimator 3 based on the three-dimensional PicC brightness distribution map, and compare it with the expected value.

[0044] like Figure 3 As shown, further, in step S4, the spatial coordinate of the PicC brightness distribution three-dimensional graph in the horizontal direction is the incident light inclination angle of the X-ray; the peak value of the PicC brightness distribution three-dimensional graph is the opening area ratio parameter of the collimator 3; the angle value corresponding to the position of the peak value of the PicC brightness distribution three-dimensional graph is the pointing accuracy parameter of the collimator 3, and the half-width height of the peak value of the PicC brightness distribution three-dimensional graph is the field of view parameter of the collimator 3.

[0045] Furthermore, in step S3, the operation of eliminating the systematic error of pointing accuracy is as follows: first measure once to obtain the imaging result, and obtain the center coordinate A, then rotate 180° along the mounting surface, measure again to obtain the imaging result, and obtain the center coordinate B, where (A+B) / 2 is the systematic error; (AB) / 2 is the absolute pointing accuracy value of the collimator 3.

[0046] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above and that the invention can be embodied in other specific forms without departing from the spirit or essential characteristics of the invention. Therefore, the embodiments should be considered in all respects as illustrative and non-restrictive, and the scope of the invention is defined by the appended claims rather than the foregoing description. It is intended that all variations within the meaning and range of equivalents of the claims be embraced herein, and any reference signs in the claims should not be construed as limiting the claims to which they relate.

Claims

1. A detection method for a microchannel plate collimator X-ray detection device, characterized in that: The detection device comprises an X-ray source (1), a stage (2), a collimator (3), an X-ray camera (4) and a shielding device, wherein the stage (2) is provided with a through hole, the collimator (3) is provided on the stage (2) and is located at the rear side of the stage (2), the X-ray source (1) and the X-ray camera (4) are respectively provided at the front and rear sides of the collimator (3), and the X-ray source (1), the collimator (3) and the X-ray camera (4) are located on the same axis; The X-ray source (1) emits a point light source, and the X-ray camera receives the X-rays and forms an image. The distance between the X-ray source (1) and the X-ray camera (4) is L, and the distance L is determined by the following formula: tg(θ)=d / L Where θ is the angular resolution of the system measurement, and d is the pixel size of the X-ray camera; The detection method includes the following steps: S1, system preparation: according to the measurement accuracy requirements, adjust the relative positions of the X-ray source (1), the stage (2) and the X-ray camera (4), and ensure that they are located on the same axis. After the adjustment is completed, install the collimator (3); S2, connecting the system: connecting the X-ray source (1), the stage (2) and the X-ray camera (4) to the test system; S3, performing a test: operating the X-ray source (1) and the X-ray camera (4), and the X-ray camera (4) receives X-rays and forms an image; S4, result conversion: converting the virtual original image formed by the X-ray camera (4) to obtain a three-dimensional map of PicC brightness distribution, obtaining the parameter index of the collimator (3) based on the three-dimensional map of PicC brightness distribution, and comparing it with the expected value; In step S4, the spatial coordinates of the PicC brightness distribution three-dimensional graph in the horizontal direction are the incident light inclination angle of the X-ray; the peak value of the PicC brightness distribution three-dimensional graph is the aperture area ratio parameter of the collimator (3); the angle value corresponding to the position of the peak value of the PicC brightness distribution three-dimensional graph is the pointing accuracy parameter of the collimator (3), and the half-width height of the peak value of the PicC brightness distribution three-dimensional graph is the field of view parameter of the collimator (3).

2. The detection method of a microchannel plate collimator X-ray detection device according to claim 1, characterized in that: The detection indicators of the collimator (3) include pointing accuracy, opening area ratio and field of view, and the pointing accuracy includes hole-hole parallelism and hole-surface perpendicularity.

3. The detection method of a microchannel plate collimator X-ray detection device according to claim 1, characterized in that: The imaging result of the X-ray camera is a circle whose brightness gradually darkens from the center to the outside.

Images