Probes, inspection tools and inspection tool units

Abstract

A probe, an inspection tool, and an inspection tool unit are provided, which can suppress the interference between adjacent straight portions when an elastic portion is extended or contracted. The probe comprises an elastic portion, a first contact portion arranged at one end of the elastic portion, and a second contact portion arranged at the other end of the elastic portion. The elastic portion comprises a first elastic sheet and a second elastic sheet, and a through hole arranged between the first elastic sheet and the second elastic sheet. The first elastic sheet and the second elastic sheet respectively comprise a plurality of straight portions and a curved portion connected to either of the two ends of each of the adjacent straight portions. The first straight portion arranged closest to the first contact portion is connected to the first contact portion on one end side of the second direction, and the second straight portion arranged closest to the second contact portion is connected to the second contact portion on the same side as the first contact portion. The middle portion of the outer curved portion of the curved portion of the first elastic sheet and the curved portion of the second elastic sheet, which is far from the center line of the elastic portion, has a width greater than the width of the straight portion connected to the outer curved portion.

Description

Technical Field

[0001] The present disclosure relates to a probe, an inspection tool, and an inspection tool unit. Background Art

[0002] In the manufacturing process of electronic component modules such as cameras and liquid crystal panels, conduction inspections and operation characteristic inspections are generally performed. These inspections are performed by connecting terminals for connection with a main substrate provided in the electronic component module and terminals of an inspection device using probes.

[0003] As such a probe, there is a probe described in Patent Document 1. The probe of Patent Document 1 includes: an elastic portion provided with a through hole; a first contact portion arranged at one end of the elastic portion in the length direction; and a second contact portion arranged at the other end of the elastic portion in the length direction. The elastic portion of the probe has a meandering shape in which straight portions and curved portions are alternately continuous.

[0004] Prior art literature

[0005] Patent Literature

[0006] Patent Document 1: Japanese Patent Application Publication No. 2017-223628

[0007] The probe has room for improvement in suppressing interference between adjacent straight line portions when the elastic portion expands and contracts. Summary of the invention

[0008] An object of the present disclosure is to provide a probe capable of suppressing interference between adjacent straight line portions when an elastic portion expands or contracts.

[0009] A probe according to one embodiment of the present disclosure has:

[0010] an elastic portion that expands and contracts along a first direction,

[0011] A first contact portion disposed at one end of the elastic portion in the first direction; and

[0012] a second contact portion disposed at the other end of the elastic portion in the first direction,

[0013] The elastic portion has:

[0014] a first elastic sheet and a second elastic sheet; and

[0015] a through hole provided between the first elastic sheet and the second elastic sheet,

[0016] The first elastic sheet and the second elastic sheet respectively have:

[0017] a plurality of straight line portions extending along a second direction intersecting the first direction; and

[0018] a curved portion connected to either of the two ends of each of the adjacent straight portions in the second direction,

[0019] The straight portions and the curved portions are alternately arranged along the first direction,

[0020] The first straight line portion, which is the straight line portion that is disposed closest to the first contact portion in the first direction, is connected to the first contact portion at one end side in the second direction.

[0021] The second straight line portion, which is the straight line portion closest to the second contact portion in the first direction, is connected to the second contact portion on the same side as the first contact portion in the second direction.

[0022] The middle portion of the outer curved portion of the curved portion of the first elastic piece and the curved portion of the second elastic piece, which is farther in the second direction from a center line passing through the center of the elastic portion in the second direction, has a width greater than a width of the straight portion connected to the outer curved portion.

[0023] An inspection tool according to one embodiment of the present disclosure includes:

[0024] The probe of the above method; and

[0025] a housing having a housing portion therein, the housing portion housing the probe in a state where a portion of the first contact portion and a portion of the second contact portion are exposed to the outside,

[0026] The probe has a connecting portion connecting the first contact portion and the first straight portion.

[0027] The probe is housed in the housing portion in a state where the first straight portion and the connecting portion are in contact with an inner surface of the housing constituting the housing portion in the first direction.

[0028] An inspection tool unit according to one aspect of the present disclosure includes a plurality of inspection tools according to the above aspect.

[0029] Effects of the Invention

[0030] According to the above probe, it is possible to realize a probe capable of suppressing interference between adjacent straight line portions when the elastic portion expands or contracts.

[0031] According to the inspection tool, it is possible to realize an inspection tool capable of suppressing interference between adjacent straight line portions of the elastic portion when the probe needle is extended or retracted.

[0032] According to the inspection tool unit, with the inspection tool, it is possible to realize an inspection tool unit capable of suppressing interference between adjacent straight line portions of the elastic portion when the probe is extended and retracted. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] Figure 1 It is a perspective view showing an inspection tool according to one embodiment of the present disclosure.

[0034] Figure 2 It is along Figure 1 Cross-sectional view along line II-II.

[0035] Figure 3 It is stored in Figure 1 A first partial plan view of a probe of an inspection tool.

[0036] Figure 4 It is stored in Figure 1 A second partial plan view of the probe of the inspection tool.

[0037] Figure 5 Yes Figure 1 A plan view of an inspection tool unit of an inspection tool.

[0038] Figure 6 It means to be stored in Figure 1 A partial plan view of a modified example of a probe of an inspection tool.

[0039] Description of symbols

[0040] 1. Check tool unit

[0041] 10. Inspection Tools

[0042] 20 Shell

[0043] 21 Shell body

[0044] 211 Wall

[0045] 212 through holes

[0046] 22 cover

[0047] 221 pages

[0048] 23 Storage Department

[0049] 231 bottom

[0050] 232, 234 side

[0051] 233 corner

[0052] 24 first opening

[0053] 25 Second opening

[0054] 26 through holes

[0055] 30 probes

[0056] 31 Elastic part

[0057] 32 first contact portion

[0058] 321 Main body

[0059] 322 First Leg

[0060] 323 Second Leg

[0061] 324 Gap

[0062] 325 first contact portion

[0063] 326, 328 protrusions

[0064] 327 second contact part

[0065] 33 second contact portion

[0066] 331 Main body

[0067] 332 third contact part

[0068] 333 Gap

[0069] 40 first elastic sheet

[0070] 41 First straight line

[0071] 42 The third straight line

[0072] 43 Outer bend

[0073] 431 end

[0074] 432 Middle

[0075] 44 medial curvature

[0076] 441 end

[0077] 442 Middle

[0078] 45 Second straight line

[0079] 50 second elastic sheet

[0080] 51 The third straight line

[0081] 52 Outer bend

[0082] 521 end

[0083] 522 Middle

[0084] 53 medial curvature

[0085] 531 end

[0086] 532 Middle

[0087] 60 through holes

[0088] 70 connection part DETAILED DESCRIPTION

[0089] Below, an example of the present disclosure is described according to the accompanying drawings. In addition, in the following description, terms indicating specific directions or positions (for example, terms including "upper", "lower", "right", and "left") are used as needed, but the use of these terms is to facilitate understanding of the present disclosure with reference to the accompanying drawings, and the technical scope of the present disclosure is not limited by the meaning of these terms. In addition, the following description is essentially just an example and is not intended to limit the present disclosure, its applications or its uses. Furthermore, the drawings are schematic, and the ratios of various dimensions, etc. are not necessarily consistent with the actual situation.

[0090] like Figure 1 As shown, the inspection tool 10 of one embodiment of the present disclosure includes a housing 20 and a probe 30 housed inside the housing 20. In this embodiment, the inspection tool 10 includes a plurality of probes 30. Each probe 30 is, for example, an elongated thin plate formed by electroforming using a conductive material, and is retracted along a first direction (e.g., the Y direction). The probes 30 are arranged at intervals in the plate thickness direction (e.g., the Z direction), and are housed in the housing 20 in a mutually electrically independent state.

[0091] As an example, the housing 20 is in an insulating substantially rectangular parallelepiped shape. Figure 1 As shown, the housing body 21 and the cover 22 are provided.

[0092] like Figure 2 As shown, the housing body 21 has: a concave storage portion 23 provided therein and accommodating the probe 30; a first opening portion 24 provided at one end in the first direction Y; and a second opening portion 25 provided at the other end in the first direction Y. In the present embodiment, the housing body 21 has a plurality of storage portions 23. Each storage portion 23 has a substantially rectangular shape extending in its length direction when viewed along the plate thickness direction Z of the accommodated probe 30, and is connected to the first opening portion 24 and the second opening portion 25.

[0093] The first opening 24 is configured so that only the first contact portion 32 of the probe 30 described later can be inserted from the first direction Y. The first opening 24 is connected to the through hole 212, which penetrates the wall 211 of the housing body 21 that constitutes the bottom surface 231 of the storage portion 23 in the first direction Y. One end of the through hole 212 in a second direction (e.g., X direction) intersecting the first direction Y is connected to a side surface 232 of the storage portion 23. The other end of the through hole 212 in the second direction X is connected to the bottom surface 231 of the storage portion 23. The corner 233 connecting the through hole 212 and the bottom surface 231 of the storage portion 23 is C-chamfered. Thus, the probe 30 is prevented from being damaged by contact with the housing body 21 when extending or retracting.

[0094] The second opening 25 is configured so that the probe 30 can be inserted as a whole from the first direction Y. One end of the second opening 25 in the second direction X is connected to a side surface 232 of the housing 23 in the second direction X, and the other end of the second opening 25 in the second direction X is connected to another side surface 234 of the housing 23 in the second direction X.

[0095] The cover 22 is mounted on the end surface of the housing body 21 on the second opening 25 side, covering the second opening 25. The cover 22 has a through hole 26 that can only accommodate the second contact portion 33. When the cover 22 is mounted on the housing body 21, the through hole 26 is arranged on an imaginary straight line L1 that passes through the first opening 24 and extends along the first direction Y. In other words, the through hole 212 of the housing body 21 and the through hole 26 of the cover 22 are arranged on the same axis with the imaginary straight line L1 as the axis. In the present embodiment, the imaginary straight line L1 passes through the center of the main body 321 of the first contact portion 32 in the second direction X and the third contact portion 332 of the second contact portion 33. One end of the through hole 26 in the second direction X is connected to a side surface 232 of the receiving portion 23 in the second direction X.

[0096] The first straight portion 41 of the probe 30 accommodated in the accommodating portion 23, which constitutes the elastic portion 31 of the probe 30 to be described later, contacts the inner surface of the housing body 21 constituting the bottom surface 231 of the accommodating portion 23. A portion of the first contact portion 32 is exposed to the outside of the housing 20 via the first opening 24. In addition, the second straight portion 45 of the elastic portion 31 of the probe 30 to be described later and the connecting portion 70 of the probe 30 accommodated in the accommodating portion 23 contact the surface 221 of the cover portion 22 constituting the accommodating portion 23, which faces the housing body 21. The second contact portion 33 of the probe 30 to be described later is exposed to the outside of the housing 20 via the second opening 25.

[0097] For example Figure 2As shown, the probe 30 includes: an elastic portion 31 that expands and contracts along the first direction Y; a first contact portion 32 disposed at one end of the elastic portion 31 in the first direction Y; and a second contact portion 33 disposed at the other end of the elastic portion 31 in the first direction Y.

[0098] As an example, Figure 2 As shown, the elastic portion 31 has a meandering shape as a whole. Figure 3 and Figure 4 As shown, the elastic portion 31 includes a first elastic piece 40 and a second elastic piece 50 , and a through hole 60 provided between the first elastic piece 40 and the second elastic piece 50 .

[0099] The first elastic piece 40 and the second elastic piece 50 each have a plurality of straight portions and at least one curved portion, and the straight portions and the curved portions are alternately arranged along the first direction Y. Each straight portion extends along the second direction X. The curved portion connects one of the two ends in the second direction X of each adjacent straight portion.

[0100] The plurality of straight portions include a first straight portion 41, a second straight portion 45, and third straight portions 42 and 51. The first straight portion 41 is disposed closest to the first contact portion 32 in the first direction Y. The second straight portion 45 is disposed closest to the second contact portion 33 in the first direction Y. The third straight portions 42 and 51 are disposed between the first straight portion 41 and the second straight portion 45 in the first direction Y. In the present embodiment, the first straight portion 41 and the second straight portion 45 both constitute a part of the first elastic sheet 40. The first straight portion 41, the second straight portion 45, and the third straight portions 42 and 51 have substantially the same width W1 (in other words, the length in the first direction Y).

[0101] like Figure 3 As shown, the first straight portion 41 is at one end side of the second direction X (for example Figure 3 The left side of ) is connected to the first contact portion 32.

[0102] like Figure 4 As shown, the second straight line portion 45 is on the same side as the first contact portion 32 in the second direction X (eg Figure 4 In the present embodiment, the second straight portion 45 is connected to the second contact portion 33 via the connecting portion 70. The connecting portion 70 has a width substantially the same as the length from the outer end of the straight portion of the first elastic piece 40 in the first direction Y to the outer end of the second elastic piece 50 (in other words, the length in the first direction Y), and no through hole 60 is provided.

[0103] The curved portion includes an outer curved portion 43, 52 and an inner curved portion 44, 53. The outer curved portion 43, 52 constitutes a curved portion of the first elastic piece 40 and the second elastic piece 50 that is far from the center line CL passing through the center of the elastic portion 31 in the second direction X. The inner curved portion 44, 53 constitutes a curved portion of the first elastic piece 40 and the second elastic piece 50 that is close to the center line CL in the second direction X. In the present embodiment, the middle portion of the inner curved portion 44, 53, excluding the two end portions connected to the straight portion, has a width W3 that is smaller than the width W2 of the middle portion of the outer curved portion 43, 52.

[0104] like Figure 3 As shown in FIG. 1 , the middle portion 432, 522 of the outer curved portion 43, 52 has a width W2 (in other words, the length in the radial direction relative to the center of curvature of the outer curved portion 43, 52) greater than the width W1 of the straight portion connected to the outer curved portion 43, 52. That is, the width of the middle portion 432, 522 of the outer curved portion 43, 52 is greater than the width of the end portion 431, 521 connected to the straight portion. In the present embodiment, with respect to the width W2 of the outer curved portion 43, 52, the width W21 of the portion of the middle portion 432, 522 farthest from the center line CL in the second direction X is the largest, and gradually decreases as it approaches the center line CL from this portion.

[0105] like Figure 4 As shown in FIG. 1 , the middle portion 442, 532 of the inner curved portion 44, 53 has a width W3 (in other words, the length in the radial direction relative to the center of curvature of the inner curved portion 44, 53) greater than the width W1 of the straight portion connected to the inner curved portion 44, 53. That is, the width of the middle portion 442, 532 of the inner curved portion 44, 53 is greater than the width of the end portion 441, 531 connected to the straight portion. In the present embodiment, the width W3 of the inner curved portion 44, 53 is also the same as the outer curved portion 43, 52, and the width W31 of the portion of the middle portion 442, 532 farthest from the center line CL in the second direction X is the largest, and gradually decreases as it approaches the center line CL from this portion.

[0106] like Figure 2 As shown, the through hole 60 extends continuously from one end to the other end in the direction in which the elastic part 31 extends along the shape of the elastic part 31. That is, the through hole 60 between the straight part of the first elastic piece 40 and the straight part of the second elastic piece 50 and the through hole 60 between the curved part of the first elastic piece 40 and the curved part of the second elastic piece 50 are connected to each other. In this embodiment, the through hole 60 at the curved part has a width W5 less than the width W4 of the through hole 60 at the straight part. The widths W4 and W5 of the through hole 60 are, for example, the length of the straight distance between the first elastic piece 40 and the second elastic piece 50.

[0107] like Figure 2 As shown, the first contact portion 32 includes: a main body portion 321 connected to the first straight portion 41 of the elastic portion 31; and a first leg portion 322 and a second leg portion 323, which extend from the main body portion 321 along the first direction Y in a direction away from the first straight portion 41. The first leg portion 322 and the second leg portion 323 are arranged in the second direction X with a gap 324 between them.

[0108] The first leg 322 has a pair of first contact portions 325 arranged at intervals in the second direction X, and the pair of first contact portions 325 are provided at the end of the first leg 322 farther from the main body 321 in the first direction Y. A protrusion 326 is provided at the end of the first leg 322 farther from the main body 321 in the first direction Y, and protrudes in the direction approaching the second leg 323 in the second direction X. Each first contact portion 325 is respectively arranged at both ends of the protrusion 326 in the second direction X. The portion of the protrusion 326 between the pair of first contact portions 325 is recessed in the first direction Y toward the main body 321.

[0109] The second leg 323 has a pair of second contact portions 327 arranged at intervals in the second direction X, and the pair of second contact portions 327 are provided at the end of the second leg 323 farther from the main body 321 in the first direction Y. A protrusion 328 is provided at the end of the second leg 323 farther from the main body 321 in the first direction Y, and protrudes toward the first leg 322 in the second direction X. Each second contact portion 327 is respectively arranged at both ends of the protrusion 328 in the second direction X. The portion of the protrusion 328 between the pair of second contact portions 327 is recessed in the first direction Y toward the main body 321.

[0110] In this embodiment, the pair of first contact portions 325 and the pair of second contact portions 327 are arranged on the same imaginary straight line L2 extending along the second direction X. The gap 324 between the first leg portion 322 and the second leg portion 323 is smallest in the second direction X at the portion where the protrusions 326 and 328 are provided.

[0111] like Figure 2As shown, the second contact portion 33 has a main body portion 331 connected to the connecting portion 70 and a third contact portion 332 provided on the main body portion 331. The main body portion 331 has, for example, a substantially rectangular shape extending along the first direction Y. The third contact portion 332 is provided at an end of the main body portion 331 in the first direction Y that is farther from the elastic portion 31, and has a curved shape that protrudes in a direction away from the elastic portion 31 along the first direction Y. A notch 333 is provided at an end of the main body portion 331 in the first direction Y that is closer to the elastic portion 31. The notch 333 is provided at an end of the main body portion 331 on the opposite side of the end connected to the connecting portion 70 in the second direction X.

[0112] The probe 30 can exert the following effects.

[0113] The probe 30 includes an elastic portion 31 that expands and contracts along a first direction, a first contact portion 32 that is disposed at one end of the elastic portion 31 in the first direction, and a second contact portion 33 that is disposed at the other end of the elastic portion 31 in the first direction. The elastic portion 31 includes a first elastic piece 40 and a second elastic piece 50, and a through hole 60 provided between the first elastic piece 40 and the second elastic piece 50. The first elastic piece 40 and the second elastic piece 50 each include a plurality of straight portions extending along the second direction and a curved portion connected to either of the two ends of each of the adjacent straight portions in the second direction. The straight portions and the curved portions are alternately disposed along the first direction. The first straight portion 41 that is disposed closest to the first contact portion 32 in the first direction is connected to the first contact portion 32 at one end side in the second direction. The second straight portion 45 that is disposed closest to the second contact portion 33 in the first direction is connected to the second contact portion 33 on the same side as the first contact portion 32 in the second direction. The middle portions 432 and 522 of the outer curved portions 43 and 52, which are far from the center line CL in the second direction, of the curved portions of the first elastic piece 40 and the second elastic piece 50 have a width W2 greater than the width W1 of the straight portion connected to the outer curved portions 43 and 52. With such a structure, when the probe 30 is extended and retracted along the first direction, contact between adjacent straight portions of the elastic portion 31 can be avoided. As a result, the following probe 30 can be realized: interference between adjacent straight portions when the elastic portion 31 is extended and retracted can be suppressed. In addition, when the probe 30 is compressed, the stress applied to the elastic portion 31 is dispersed from the curved portion to the straight portion as a whole, thereby improving the durability of the probe 30.

[0114] The through hole 60 at the curved portion has a width W5 that is less than the width W4 of the through hole 60 at the straight portion. With such a structure, when the probe 30 is extended or retracted along the first direction, contact between adjacent straight portions of the elastic portion 31 can be more reliably avoided. In addition, when the probe 30 is compressed, the stress applied to the elastic portion 31 can be more reliably dispersed.

[0115] The middle portions 442 and 532 of the inner curved portions 44 and 53 closer to the center line CL in the second direction of the curved portions of the first elastic piece 40 and the second elastic piece 50 have a width W3 smaller than the width W2 of the middle portions 432 and 522 of the outer curved portions 43 and 52. With such a structure, the stress applied to the elastic portion 31 when the probe 30 is compressed can be dispersed more reliably.

[0116] The middle portions 442 and 532 of the inner curved portions 44 and 53 closer to the center line CL in the second direction of the curved portions of the first elastic piece 40 and the second elastic piece 50 have a width W3 greater than the width W1 of the straight portion connected to the inner curved portions 44 and 53. With such a structure, the stress applied to the elastic portion 31 when the probe 30 is compressed can be dispersed more reliably.

[0117] The first contact portion 32 includes a main body portion 321 connected to the first straight portion 41, and a first leg portion 322 and a second leg portion 323, which extend from the main body portion 321 in the first direction away from the first straight portion 41 and are arranged with a gap 324 between them in the second direction. The first leg portion 322 includes a pair of first contact portions 325 arranged with a gap in the second direction, and the pair of first contact portions 325 are provided at the end of the first leg portion 322 in the first direction farther from the main body portion 321. The second leg portion 323 includes a pair of second contact portions 327 arranged with a gap in the second direction, and the pair of second contact portions 327 are provided at the end of the second leg portion 323 in the first direction farther from the main body portion 321. With such a structure, the pair of first contact portions 325 and the pair of second contact portions 327 are slidably contacted (wiped) with respect to the inspection object or the inspection device in the second direction, so that foreign matter attached to the inspection object or the inspection device can be removed. In addition, foreign matter removed by wiping can be discharged from the gap 324 between the first leg portion 322 and the second leg portion 323. As a result, the contact reliability of the probe 30 can be improved.

[0118] The inspection tool 10 can achieve the following effects.

[0119] The inspection tool 10 includes: a probe 30; and a housing 20 having a housing 23 inside thereof, wherein the housing 23 houses the probe 30 in a state where a portion of the first contact portion 32 and a portion of the second contact portion 33 are exposed to the outside. The probe 30 includes a connecting portion 70 connecting the second contact portion 33 and the second straight portion 45, and is housed in the housing 23 in a state where the second straight portion 45 and the connecting portion 70 are in contact with the inner surface of the housing 20 constituting the housing 23 in the first direction. The inspection tool 10 can be realized in which interference between adjacent straight portions of the elastic portion 31 when the probe 30 is extended or retracted can be suppressed. In addition, the elasticity of the elastic portion 31 can be ensured, and the strength of the inspection tool 10 can be ensured when the probe 30 is pressed from the first contact portion 32 toward the second contact portion 33.

[0120] The outer curved portion of the accommodated probe 30 has a width extending from the outer surface of the curved portion farther from the center line CL in the second direction toward the center line CL. With such a structure, the probe 30 can operate normally even when the space of the accommodating portion 23 is limited.

[0121] The inspection tool 10 and the probe 30 may also be configured as follows.

[0122] like Figure 5 As shown, the inspection tool unit 1 can be composed of a plurality of inspection tools 10. The inspection tool unit 1 may include a housing for accommodating and positioning the plurality of inspection tools 10.

[0123] In the above embodiment, the probe 30 includes the elastic portion 31 in which the outer curved portion (e.g., curved portion 52) close to the imaginary straight line L1 and the outer curved portion (e.g., curved portion 43) far from the imaginary straight line L1 are substantially the same in shape, and the width W21 of the portion farthest from the center line CL in the second direction X is substantially the same, but the present invention is not limited thereto. Figure 6 As shown in FIG. 1 , the probe 30 may also include an outer curved portion (such as the curved portion 52) close to the imaginary straight line L1 and an outer curved portion (such as the curved portion 43) far from the imaginary straight line L1 having elastic portions 31 of different shapes. Figure 6 In the probe 30, the width W22 of the portion of the curved portion 52 farthest from the center line CL in the second direction X is greater than the width W23 of the portion of the curved portion 43 farthest from the center line CL in the second direction X. The width W2 of the middle portion 432 of the curved portion 43 has a width W2 slightly greater than the width W1 of the straight portion connected to the curved portion 43. With such a configuration, the extension and contraction of the elastic portion 31 can be linearized, and the side slip (i.e., movement in the second direction X) of the first contact portion 32 and the second contact portion 33 can be prevented.

[0124] The elastic part 31 may have a plurality of straight portions, and may have at least one curved portion.

[0125] The first contact portion 32 and the second contact portion 33 can adopt any structure according to the design of the probe 30. For example, contacts of any shape and structure can be provided on the first contact portion 32 and the second contact portion 33 according to the inspection object or the inspection device. That is, it is not limited to the case where the first contact portion 32 has the first leg portion 322 and the second leg portion 323, and the second contact portion 33 may have the first leg portion 322 and the second leg portion 323. Both the first contact portion 32 and the second contact portion 33 may have the first leg portion 322 and the second leg portion 323.

[0126] The housing 20 can adopt any structure that can accommodate at least one probe 30 .

[0127] The connection portion 70 may be provided on the first straight portion 41 side instead of the second straight portion 45 side. That is, the probe 30 may be stored in the storage portion 23 with the first straight portion 41 and the connection portion 70 in contact with the bottom surface 231 of the housing 20 in the first direction Y.

[0128] In the above, various embodiments of the present disclosure have been described in detail with reference to the drawings, and finally various aspects of the present disclosure will be described. In addition, in the following description, reference numerals are also attached as an example.

[0129] The probe 30 of the first aspect of the present disclosure has:

[0130] The elastic portion 31 is configured to expand and contract along a first direction;

[0131] A first contact portion 32 disposed at one end of the elastic portion 31 in the first direction; and

[0132] The second contact portion 33 is disposed at the other end of the elastic portion 31 in the first direction.

[0133] The elastic portion 31 has:

[0134] A first elastic sheet 40 and a second elastic sheet 50; and

[0135] The through hole 60 is provided between the first elastic piece 40 and the second elastic piece 50.

[0136] The first elastic piece 40 and the second elastic piece 50 respectively have:

[0137] a plurality of straight line portions extending along a second direction intersecting the first direction; and

[0138] a curved portion connected to either of the two ends of each of the adjacent straight portions in the second direction,

[0139] The straight portions and the curved portions are alternately arranged along the first direction,

[0140] The first straight line portion 41, which is the straight line portion closest to the first contact portion 32 in the first direction, is connected to the first contact portion 32 at one end side in the second direction.

[0141] The second straight line portion 45, which is the straight line portion closest to the second contact portion in the first direction, is connected to the second contact portion 33 on the same side as the first contact portion 32 in the second direction.

[0142] The middle portion of the outer curved portion of the curved portion of the first elastic piece 40 and the curved portion of the second elastic piece 50, which is farther from the center line CL passing through the center of the elastic portion 31 in the second direction in the second direction, has a width W2 greater than the width W1 of the straight portion connected to the outer curved portion.

[0143] In the probe 30 according to the second aspect of the present disclosure, the through hole 60 at the curved portion has a width W5 that is less than or equal to the width W4 of the through hole 60 at the straight portion.

[0144] In the probe 30 of the third aspect of the present disclosure, the middle portion of the inner curved portion of the curved portion of the first elastic piece 40 and the second elastic piece 50 closer to the center line CL in the second direction has a width W3 smaller than the width W2 of the outer curved portion.

[0145] In the probe 30 according to the fourth aspect of the present disclosure,

[0146] The elastic portion 31 has a plurality of outer curved portions.

[0147] Among the plurality of outer curved portions, a middle portion of the outer curved portion closer to an imaginary straight line L1 passing through the first contact portion and the second contact portion and extending in the first direction has a width W22 greater than a width W23 of the outer curved portion farther from the imaginary straight line.

[0148] In the probe 30 according to the fifth aspect of the present disclosure,

[0149] Of the curved portions of the first elastic piece 40 and the second elastic piece 50 , the middle portion of the inner curved portion closer to the center line CL in the second direction has a width W3 greater than a width W1 of the straight portion connected to the inner curved portion.

[0150] In the probe 30 according to the sixth aspect of the present disclosure,

[0151] At least one of the first contact portion 32 and the second contact portion 33 has:

[0152] A main body portion 321 connected to the straight portion; and

[0153] The first leg portion 322 and the second leg portion 323 extend from the main body portion 321 along the first direction in a direction away from the straight portion, and are arranged with a gap 324 between them in the second direction.

[0154] The first leg portion 322 has a pair of first contact portions 325 spaced apart in the second direction, and the pair of first contact portions 325 are provided at ends of the first leg portion 322 farther from the main body portion 321 in the first direction.

[0155] The second leg portion 323 includes a pair of second contact portions 327 spaced apart in the second direction. The pair of second contact portions 327 are provided at ends of the second leg portion 323 farther from the main body portion 321 in the first direction.

[0156] The inspection tool 10 according to the seventh aspect of the present disclosure includes:

[0157] The probe 30 of the above-mentioned manner; and

[0158] The housing 20 has a housing portion 23 therein, and the housing portion 23 houses the probe 30 in a state where a portion of the first contact portion 32 and a portion of the second contact portion 33 are exposed to the outside.

[0159] The probe 30 has a connecting portion 70 connecting the first contact portion 32 and the first straight portion 41 or connecting the second contact portion 33 and the second straight portion 45.

[0160] The probe 30 is housed in the housing portion 23 in a state where the first straight portion 41 and the connecting portion 70 or the second straight portion 45 and the connecting portion 70 are in contact with the inner surface of the housing 20 constituting the housing portion 23 in the first direction.

[0161] In the inspection tool 10 according to the eighth aspect of the present disclosure, the outer curved portion has a width extending from an outer surface of the curved portion farther from the center line CL in the second direction toward a direction approaching the center line CL.

[0162] The inspection tool unit 1 of the ninth aspect of the present disclosure includes a plurality of the inspection tools 10 of the above-mentioned aspects.

[0163] It should be noted that, by appropriately combining any of the above-mentioned various embodiments or variations, the effects possessed by each can be exerted. In addition, the embodiments can be combined with each other, or the embodiments can be combined with each other, or the embodiments can be combined with the embodiments, and the features in different embodiments or embodiments can also be combined with each other.

[0164] The present disclosure has been fully described in relation to the preferred embodiments with reference to the accompanying drawings, but various changes and modifications may be made by those skilled in the art, and it should be understood that such changes and modifications are included within the scope of the present disclosure as long as they do not depart from the scope of the appended claims.

[0165] Industrial Applicability

[0166] The socket disclosed herein can be applied to modules having a BtoB (Business-to-Business) connector as a connection medium, such as a camera module, and inspection tools used for inspecting semiconductor packages such as SOP (Small Outline Package), QFP (Quad Flat Package), and BGA (Ball grid array).

Claims

1. A probe, comprising: an elastic portion that expands and contracts along a first direction, A first contact portion disposed at one end of the elastic portion in the first direction; and a second contact portion disposed at the other end of the elastic portion in the first direction, The elastic portion has: a first elastic sheet and a second elastic sheet; and a through hole provided between the first elastic sheet and the second elastic sheet, The first elastic sheet and the second elastic sheet respectively have: a plurality of straight line portions extending along a second direction intersecting the first direction; and a curved portion connected to either of the two ends of each of the adjacent straight portions in the second direction, The straight portions and the curved portions are alternately arranged along the first direction, The first straight line portion, which is the straight line portion that is disposed closest to the first contact portion in the first direction, is connected to the first contact portion at one end side in the second direction. The second straight line portion, which is the straight line portion closest to the second contact portion in the first direction, is connected to the second contact portion on the same side as the first contact portion in the second direction. The middle portion of the outer curved portion of the curved portion of the first elastic piece and the curved portion of the second elastic piece, which is farther in the second direction from a center line passing through the center of the elastic portion in the second direction, has a width greater than a width of the straight portion connected to the outer curved portion. The through hole at the curved portion has a width that is less than or equal to a width of the through hole at the straight portion.

2. The probe according to claim 1, wherein Of the bent portions of the first elastic piece and the second elastic piece, a middle portion of an inner bent portion closer to the center line in the second direction has a width smaller than a width of a middle portion of the outer bent portion.

3. The probe according to claim 1 or 2, wherein: The elastic portion has a plurality of outer curved portions. Among the plurality of outer curved portions, a middle portion of the outer curved portion closer to an imaginary straight line passing through the first contact portion and the second contact portion and extending in the first direction has a width greater than a width of the outer curved portion farther from the imaginary straight line.

4. The probe according to claim 1 or 2, wherein: Of the curved portions of the first elastic piece and the second elastic piece, a middle portion of an inner curved portion closer to the center line in the second direction has a width greater than a width of the straight portion connected to the inner curved portion.

5. The probe according to claim 1 or 2, wherein: At least one of the first contact portion and the second contact portion has: a main body portion connected to the straight portion; as well as The first leg portion and the second leg portion extend from the main body portion along the first direction in a direction away from the straight portion, and are arranged with a gap between them in the second direction. The first leg has a pair of first contact portions spaced apart in the second direction, the pair of first contact portions being provided at ends of the first leg farther from the main body in the first direction, The second leg portion includes a pair of second contact portions that are spaced apart in the second direction, and the pair of second contact portions are provided at ends of the second leg portion that are farther from the main body portion in the first direction.

6. An inspection tool, comprising: The probe according to any one of claims 1 to 5; and a housing having a housing portion therein, the housing portion housing the probe in a state where a portion of the first contact portion and a portion of the second contact portion are exposed to the outside, The probe has a connecting portion, the connecting portion connecting the first contact portion and the first straight portion or connecting the second contact portion and the second straight portion, The probe is housed in the housing portion in a state where the first straight portion and the connecting portion or the second straight portion and the connecting portion are in contact with an inner surface of the housing constituting the housing portion in the first direction.

7. The inspection tool according to claim 6, wherein: The outer curved portion has a width extending from an outer surface of the curved portion farther from the center line in the second direction toward a direction approaching the center line.

8. An inspection tool unit comprising a plurality of inspection tools according to claim 6 or 7.

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