Static electricity detection device and static electricity monitoring system

Abstract

The embodiments of the present disclosure provide an electrostatic detection device and an electrostatic monitoring system. The electrostatic detection device includes: a sensing module, which is arranged at a preset distance from the object to be detected, and is used to sense the electrostatic field of the object to be detected and generate an induced electrical signal corresponding to the electrostatic field; a signal selection module, which is connected to the sensing module, and is used to receive and output the induced electrical signal when the induced electrical signal meets the preset range; an amplification module, which is connected to the signal selection module, and is used to amplify the induced electrical signal and output the corresponding first voltage signal; a detection module, which is connected to the amplification module, and is used to collect the first voltage signal and determine the electrostatic voltage corresponding to the electrostatic field based on the reference voltage and the first voltage signal. The technical solution of the present disclosure improves the accuracy and sensitivity of the electrostatic detection device.

Description

Technical Field

[0001] The present disclosure relates to the field of display technology, and in particular to an electrostatic detection device and an electrostatic monitoring system. Background Art

[0002] Static electricity is generated during the production process of display substrates. If the electrostatic discharge (ESD) capability is insufficient, charge will accumulate inside the display substrate, leading to product defects (charge mura), such as vertical stripes (blocks), two-split screen, and three-split screen.

[0003] The electrostatic detection technology in the existing technology has low accuracy and sensitivity and is difficult to meet the needs. Summary of the Invention

[0004] The embodiments of the present disclosure provide an electrostatic detection device and an electrostatic monitoring system to solve or alleviate one or more technical problems in the prior art.

[0005] As a first aspect of an embodiment of the present disclosure, an embodiment of the present disclosure provides an electrostatic detection device, comprising:

[0006] The sensing module is arranged at a predetermined distance from the object to be detected, and is used to sense the electrostatic field of the object to be detected and generate an induced electrical signal corresponding to the electrostatic field;

[0007] a signal selection module connected to the sensing module, configured to receive the induced electrical signal and output the induced electrical signal when the induced electrical signal meets a preset range;

[0008] an amplification module, connected to the signal selection module, for amplifying the induced electrical signal and outputting a corresponding first voltage signal;

[0009] The detection module is connected to the amplification module and is used to collect the first voltage signal and determine the electrostatic voltage corresponding to the electrostatic field according to the reference voltage and the first voltage signal.

[0010] In some embodiments, the detection range of the detection module is -20V to 0V and 0 to +20V.

[0011] In some embodiments, the sensing module includes a tuning fork sensor and a sampling capacitor. The tuning fork sensor includes a sensing sub-module and a contact connection mechanism. The sensing sub-module is used to sense the electrostatic field and drive the contact connection mechanism to operate under the action of the electrostatic field. The contact connection mechanism is connected to different contacts of the sampling capacitor under the drive of different electrostatic fields, so that the sampling capacitor generates an induced electrical signal corresponding to the electrostatic field.

[0012] In some embodiments, the amplification module includes a current amplification regulator and a signal conversion sub-module. The current amplification regulator is used to amplify the induced electrical signal and generate an amplified current signal; the signal conversion sub-module is used to convert the received amplified current signal into a corresponding first voltage signal and output it.

[0013] In some embodiments, the electrostatic detection device further includes a resistance module, the resistance module including an input end and an output end, the input end of the resistance module being connected to the sensing module, and the output end of the resistance module being connected to the detection module, the resistance module being configured to allow the induced electrical signal to pass through and generate a second voltage signal at the output end when the induced electrical signal does not meet a preset range;

[0014] The detection module is used to collect the first voltage signal or the second voltage signal, and determine the electrostatic voltage corresponding to the electrostatic field according to the reference voltage and the collected voltage signal.

[0015] In some embodiments, the induced electrical signal is an alternating current signal, and the preset range is less than or equal to a current threshold.

[0016] In some embodiments, the preset distance ranges from 20 mm to 30 mm.

[0017] In some embodiments, the diameter of the detection area of the sensing module is Φ150 mm to Φ200 mm.

[0018] In some embodiments, the object to be detected includes a display substrate, the display substrate includes thin film transistors, and an active layer of at least one thin film transistor is made of metal oxide.

[0019] As a second aspect of an embodiment of the present disclosure, an embodiment of the present disclosure provides an electrostatic monitoring system, including the electrostatic detection device in any embodiment of the present disclosure.

[0020] In some embodiments, the electrostatic monitoring system further includes a processor connected to the detection module in the electrostatic detection device, the processor being configured to receive the electrostatic voltage and process the electrostatic voltage received within a preset time range to determine the accumulated electrostatic voltage.

[0021] In some embodiments, the electrostatic monitoring system further includes an electrostatic eliminator configured to generate a neutralizing charge to neutralize the electrostatic charge generated by the object to be detected when the accumulated electrostatic voltage is greater than or equal to a preset voltage threshold.

[0022] The technical solution of the embodiment of the present disclosure is to set a signal selection module to select the induced electrical signal to be amplified by the amplification module, thereby reducing the range of the induced electrical signal that can be amplified by the amplification module, and further reducing the signal range detected by the detection module; and the amplification module amplifies the induced electrical signal that meets the preset range and outputs it to the detection module, thereby improving the detection accuracy and sensitivity of the detection module, thereby improving the accuracy and sensitivity of the electrostatic detection device, and improving the ESD detection performance of the electrostatic detection device.

[0023] The above summary is for illustrative purposes only and is not intended to be limiting in any way. In addition to the illustrative aspects, embodiments and features described above, further aspects, embodiments and features of the present disclosure will be readily apparent by reference to the accompanying drawings and the following detailed description. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] In the accompanying drawings, unless otherwise specified, the same reference numerals throughout the multiple drawings represent the same or similar components or elements. These drawings are not necessarily drawn to scale. It should be understood that these drawings only depict some embodiments according to the present disclosure and should not be regarded as limiting the scope of the present disclosure.

[0025] Figure 1 is a schematic cross-sectional view of a metal oxide display substrate;

[0026] Figure 2 This is a schematic structural diagram of an electrostatic detection device in one embodiment of the present disclosure;

[0027] Figure 3 This is a schematic diagram of an application scenario of an electrostatic detection device in one embodiment of the present disclosure;

[0028] Figure 4 This is a schematic structural diagram of an electrostatic detection device in another embodiment of the present disclosure;

[0029] Figure 5a This is a schematic structural diagram of a tuning fork sensor in one embodiment of the present disclosure;

[0030] Figure 5b A schematic diagram of the structure of a sampling capacitor in an embodiment of the present disclosure;

[0031] Figure 6a This is a structural diagram of a current amplifying regulator according to an embodiment of the present disclosure;

[0032] Figure 6b This is a schematic diagram of the structure of the signal conversion submodule in one embodiment of the present disclosure;

[0033] Figure 7 This is a schematic structural diagram of an electrostatic detection device in another embodiment of the present disclosure;

[0034] Figure 8 This is a schematic structural diagram of an electrostatic monitoring system according to an embodiment of the present disclosure;

[0035] Figure 9 The figure is a schematic diagram of the structure of an ion air gun. DETAILED DESCRIPTION

[0036] Hereinafter, only certain exemplary embodiments are briefly described. As will be appreciated by those skilled in the art, the described embodiments may be modified in various ways without departing from the spirit or scope of the present disclosure. Therefore, the drawings and description are to be considered as illustrative in nature and not restrictive.

[0037] The metal oxide display panel uses IGZO (Indium Gallium Zinc Oxide) technology, which has the characteristics of high electron mobility, with a mobility of about 10cm 2 / vs can increase the charge and discharge rate of the thin film transistor to the pixel electrode, improve the pixel response speed, and achieve a faster refresh rate. Metal oxide products are prone to residual charge accumulation inside the panel due to their fast electron migration rate.

[0038] Figure 1 Schematic diagram of a cross section of a metal oxide display substrate. Figure 1 As shown, the display substrate includes a thin film transistor arranged on a substrate 11, and also includes a first electrode layer 13 and a second electrode layer 14, and an insulating layer arranged between adjacent conductive layers. The thin film transistor includes a gate electrode 121, an active layer 122, a source electrode 123 and a drain electrode 124. Compared with A-Si products, the active layer 122 of the metal oxide product adopts IGZO film material. After the IGZO film is formed, the static electricity of the corresponding substrate cannot be completely eliminated during the transfer process. Therefore, during the substrate cutting production process, the static electricity of the equipment inside the substrate will also cause charge accumulation. Metal oxide products have strict requirements on electrostatic protection during the module production process, and the electrostatic discharge of the equipment needs to be monitored closely.

[0039] Furthermore, different materials have varying abilities to release charge. Conductive materials, such as bonded circuit boards, can evenly release internal induced charges into the panel's metal conductive circuits. Prior to the bonding process, the IGZO film layer within the metal oxide substrate, for example, has varying abilities to release static electricity. This can lead to charge accumulation within the substrate, resulting in product defects (charge mura), such as vertical streaks (blocks), split-screen displays (two-thirds), and other defects. Furthermore, static electricity can affect the performance of metal oxide thin-film transistors, and thus the performance of the display panel.

[0040] In view of the high occurrence of static electricity in the production process of metal oxide products, it is necessary to propose an electrostatic detection device with better accuracy and sensitivity to detect and monitor electrostatic discharge (ESD) during the production process.

[0041] Figure 2 Schematic diagram of the structure of an electrostatic detection device in one embodiment of the present disclosure. Figure 3 Schematic diagram of an application scenario of an electrostatic detection device in an embodiment of the present disclosure. Figure 2 As shown, the electrostatic detection device 20 may include a sensing module 21, a signal selection module 22, an amplification module 23 and a detection module 24. Figure 3 As shown, the object to be detected 71, such as a substrate, is placed on an equipment operation platform 72 during the production process. The object to be detected 71 will generate static electricity during the production process.

[0042] like Figure 2 and Figure 3 As shown, the sensing module 21 is set at a position where the distance between it and the object to be detected 71 is a preset distance L. The sensing module 21 is used to sense the electrostatic field Q of the object to be detected and generate an induced electrical signal corresponding to the electrostatic field Q.

[0043] The signal selection module 22 is connected to the sensing module 21. The signal selection module 22 has a signal selection function. The signal selection module 22 is used to receive the induced electrical signal and output the induced electrical signal when the induced electrical signal meets a preset range. Exemplarily, the signal selection module 22 may include an input end and an output end. The input end of the signal selection module 22 is connected to the sensing module 21 and receives the induced electrical signal output by the sensing module 21. When the induced electrical signal meets the preset range, the output end of the signal selection module 22 outputs the induced electrical signal. Exemplarily, the induced electrical signal generated by the sensing module 21 is I0. When the induced electrical signal meets the preset range, the induced electrical signal is recorded as I1. Then, when the signal selection module 22 receives the induced electrical signal I1, it outputs the induced electrical signal I1 at the output end.

[0044] The amplifying module 23 is connected to the signal selecting module 22. For example, the amplifying module 23 is connected to the output end of the signal selecting module 22. The amplifying module 23 is used to amplify the induced electrical signal I1 and output a corresponding first voltage signal V FB For example, the amplifying module 23 amplifies the voltage V1 at the input end and outputs a first voltage signal V FB .

[0045] The detection module 24 is connected to the amplification module 23, and the detection module 24 can also be connected to the reference voltage terminal VSS. The detection module 24 is used to collect the first voltage signal V FB, and according to the reference voltage Vss and the collected first voltage signal V FB Determine the electrostatic voltage corresponding to the electrostatic field.

[0046] Exemplarily, the preset range may be set as needed, for example, the preset range may be less than or equal to a preset threshold.

[0047] In the electrostatic detection device of the embodiment of the present disclosure, the sensing module 21 can generate an induced electrical signal corresponding to the electrostatic field; the signal selection module 22 receives and outputs the induced electrical signal when the induced electrical signal meets the preset range; the amplification module 23 amplifies the induced electrical signal and outputs the corresponding first voltage signal V FB , so that the detection module 24 can collect the first voltage signal V FB , and then determine the electrostatic voltage corresponding to the electrostatic field.

[0048] Such an electrostatic detection device can select the induced electrical signal amplified by the amplification module 23 by setting a signal selection module 22, thereby reducing the range of the induced electrical signal that can be amplified by the amplification module 23, and further reducing the signal range detected by the detection module 24; and, the amplification module 23 amplifies the induced electrical signal that meets the preset range and outputs it to the detection module 24, thereby improving the detection accuracy and sensitivity of the detection module 24, thereby improving the accuracy and sensitivity of the electrostatic detection device, and improving the ESD detection performance of the electrostatic detection device.

[0049] In addition, the parameter representing the electrostatic field strength is usually the electrostatic voltage. In the embodiment of the present disclosure, the amplification module 23 outputs the first voltage signal V FB , the detection module 24 collects the first voltage signal V FB After that, the electrostatic voltage corresponding to the electrostatic field is determined. As a result, the signal collected by detection module 24 and the determined signal are of the same type (both voltage signals). This avoids signal conversion within detection module 24, improves the detection efficiency of detection module 24, and further increases the detection frequency and response speed of the electrostatic detection device. The response speed of the electrostatic detection device of the disclosed embodiment can reach 50μm, which is much higher than the response speed of electrostatic detection devices in the prior art.

[0050] In one embodiment, the detection range of the detection module 24 is -20V to 0 (inclusive) and 0 to +20V (inclusive). When the electrostatic voltage determined by the detection module 24 is a positive number, it indicates that the electrostatic field is generated by positive charges. When the electrostatic voltage determined by the detection module 24 is a negative number, it indicates that the electrostatic field is generated by negative charges.

[0051] Figure 4FIG. 1 is a schematic diagram of the structure of an electrostatic detection device in another embodiment of the present disclosure. Figure 4 As shown, the sensing module 21 may include a tuning fork sensor 211 and a sampling capacitor 212 . Figure 5a Schematic diagram of the structure of a tuning fork sensor in one embodiment of the present disclosure. Figure 5b FIG. 1 is a schematic diagram of the structure of a sampling capacitor in one embodiment of the present disclosure. Figure 5a As shown, the tuning fork sensor 211 may include a sensing submodule 31 and a contact connection mechanism 32 . The sensing submodule 31 is used to sense the electrostatic field of the object to be detected and drive the contact connection mechanism 32 to operate under the action of the electrostatic field.

[0052] like Figure 5b As shown, sampling capacitor 212 may include multiple storage capacitors 41, a capacitor substrate 43, and four current sensing circuits, where 42, 44, 45, and 46 are contacts of the four current sensing circuits. Each current sensing circuit contact is connected to a different number of storage capacitors. Sampling capacitor 212 also includes an output contact 51.

[0053] The contact connection mechanism 32 of the tuning fork sensor 211 can be arranged above the sampling capacitor 212. The contact connection mechanism 32 can be connected to different contacts of the sampling capacitor 212 under the drive of different electrostatic fields, so that the sampling capacitor generates an induced electrical signal corresponding to the electrostatic field. For example, Figure 5a As shown, the contact connection mechanism 32 may include a housing 321 and a tuning fork connection pin 322, and the induction submodule 31 may be disposed within the housing 321. When the induction submodule 31 senses different electrostatic fields, it may drive the tuning fork connection pin 322 to rotate to different angles, so that the tuning fork connection pin 322 may be connected to different contacts of the sampling capacitor 212, causing the sampling capacitor to generate an induced electrical signal corresponding to the electrostatic field. It should be noted that Figure 5a The structure of the tuning fork sensor 211 is merely shown for example. The specific structure of the tuning fork sensor 211 can be set as needed as long as the functions of this embodiment can be achieved.

[0054] In one embodiment, the induced electrical signal I0 generated by the sensing module 21 may be an AC current signal, and the preset range may be less than or equal to a current threshold. Thus, when the induced electrical signal is less than or equal to the current threshold, the signal selection module 22 may receive the induced electrical signal and output it. For example, when the induced electrical signal is an AC current signal, the induced electrical signal is less than or equal to the current threshold, i.e., the signal value of the induced electrical signal (regardless of the signal direction) is less than or equal to the current threshold.

[0055] It should be noted that if Figure 4As shown, when the electrostatic field Q is generated by positive charges, the induced electric signal I0 is a positive current, and when the electrostatic field Q is generated by negative charges, the induced electric signal I0 is a negative current.

[0056] When the induced electrical signal is too small, if the detection module 24 is used for direct detection, the detection accuracy is relatively low and it is difficult to detect. In the embodiment of the present disclosure, when the induced electrical signal is less than or equal to the current threshold, the amplification module 23 is used to amplify the induced electrical signal and output the corresponding amplified first voltage signal V FB , the detection module 24 collects the first voltage signal V FB , thus improving the detection precision and accuracy of the detection module 24, ensuring that the detection module 24 can detect the first voltage signal V corresponding to the induced electrical signal in real time FB .

[0057] In one embodiment, Figure 4 As shown, the signal selection module 22 may include a logic selection circuit, and the logic selection circuit may include a logic selector 221. It should be noted that, Figure 4 The figure only schematically shows the logic selection circuit including the logic selector 221. Those skilled in the art can set a suitable logic selection circuit according to the function of the signal selection module 22. The embodiment of the present disclosure does not limit the specific structure of the signal selection module 22, as long as the function of the signal selection module can be realized.

[0058] In one embodiment, Figure 4 As shown, the amplification module 23 may include a current amplification regulator 231 and a signal conversion submodule 232. The current amplification regulator 231 is used to amplify the induced electrical signal and generate an amplified current signal. The signal conversion submodule 232 is used to convert the received amplified current signal into a corresponding first voltage signal V FB And output.

[0059] Figure 6a FIG. 1 is a schematic diagram of the structure of a current amplifier regulator in an embodiment of the present disclosure. For example, Figure 6a As shown, the first node N1 is the input end of the current amplifying regulator 231 , and the second node N2 is the output end of the current amplifying regulator 231 .

[0060] It should be noted that Figure 6a The structure of the current amplifying regulator 231 is shown only as an example. In actual implementation, the circuit and structure of the current amplifying regulator can be set as needed as long as the amplification effect can be achieved.

[0061] Figure 6b FIG. 1 is a schematic diagram of the structure of the signal conversion submodule in an embodiment of the present disclosure. Figure 6b As shown, the signal conversion submodule 232 may include a high voltage generator, wherein the third node N3 is the input end of the signal conversion submodule 232, and the fourth node N4 is the output end of the signal conversion submodule 232. The input end of the signal conversion submodule 232 may be connected to the output end of the current amplifier regulator 231, and the input end of the signal conversion submodule 232 may receive the amplified current signal outputted from the output end of the current amplifier regulator 231, and the output end of the signal conversion submodule 232 may output the corresponding first voltage signal V FB .

[0062] It should be noted that Figure 6b The structure of the signal conversion submodule 232 is shown only as an example. In actual implementation, the circuit and structure of the signal conversion submodule 232 can be set as needed, as long as the corresponding voltage signal can be output.

[0063] In one embodiment, Figure 3 As shown, the sensing module 21 is set at a position where the distance between it and the object to be detected is a preset distance L. For example, the preset distance L can range from 20mm to 30mm (including endpoint values). In other words, the value of the preset distance L can be any value between 20mm and 30mm. For example, the preset distance L can be 25mm. Setting the preset distance L to 20mm to 30mm can improve the sensing accuracy of the sensing module 21 for the electrostatic field, avoid the electrostatic field from affecting the performance of the sensing module 21, and ensure that the sensing module 21 can detect the change in the electrostatic field in real time when the electrostatic field changes.

[0064] It should be noted that the sensing module 21 may include a sensing probe for sensing an electrostatic field, and the sensing module 21 is set at a position where the distance between the sensing module 21 and the object to be detected is a preset distance L, that is, the sensing probe is set at a position where the distance between the sensing module 21 and the object to be detected is a preset distance L. Figure 5a In the tuning fork sensor shown, the sensing probe may be the sensing submodule 31 of the tuning fork sensor.

[0065] In one embodiment, Figure 3 As shown, the diameter of the detection area of the sensing module 21 is Φ150mm to Φ200mm (inclusive). The detection area of the sensing module 21 can be a circular area centered on the center of the object to be detected on the equipment operating platform, with a diameter range of Φ150mm to Φ200mm (inclusive). This configuration greatly increases the detection area of the sensing module 21, allowing for better detection of the electrostatic field of the object to be detected.

[0066] Exemplarily, the diameter of the detection area of the sensing module 21 may be any value between 150 mm and 200 mm. For example, the diameter of the detection area of the sensing module 21 may be 170 mm.

[0067] like Figure 3 As shown, in order to prevent the electrostatic detection device 20 from being interfered with by the outside world, the electrostatic detection device 20 can be connected to the ground terminal GND, and the equipment operation platform for placing the object to be detected can be connected to the ground terminal GND. Such a connection setting is conducive to the release of static electricity and avoids excessive electrostatic field from damaging the product.

[0068] Figure 7 FIG. 1 is a schematic diagram of the structure of an electrostatic detection device in another embodiment of the present disclosure. In one embodiment, as Figure 7 As shown, the electrostatic detection device may further include a resistor module R, which may include an input end and an output end. The input end of the resistor module R is connected to the sensing module 21. For example, the input end of the resistor module R is connected to the sampling capacitor 212 in the sensing module 21. The output end of the resistor module R is connected to the detection module 24. The resistor module R is used to allow the induced electrical signal to pass through and generate a second voltage signal at the output end when the induced electrical signal does not meet the preset range. The detection module 24 is used to collect the first voltage signal or the second voltage signal, and determine the electrostatic voltage corresponding to the electrostatic field based on the reference voltage and the collected voltage signal.

[0069] In the embodiment of the present disclosure, when the induced electrical signal does not meet the preset range, the induced electrical signal is large enough and does not need to be amplified. The induced electrical signal can pass through the resistor module R, thereby generating a second voltage signal at the output end of the resistor module R.

[0070] like Figure 7 As shown, when the induced electrical signal I0 meets the preset range, the induced electrical signal I0 is recorded as the induced electrical signal I1. When the induced electrical signal I0 does not meet the preset range, the induced electrical signal I0 is recorded as the induced electrical signal I2. The induced electrical signal I1 is less than or equal to the current threshold. The induced electrical signal I1 needs to be amplified by the amplification module 23. After the amplification module 23 amplifies the induced electrical signal I1, it outputs a first voltage signal V FB induced electrical signal I2 is greater than the current threshold, the induced electrical signal I2 no longer needs to be amplified, the resistor module R for the induced electrical signal I2 passes through to generate a second voltage signal, so that the detection module 24 is collected.

[0071] In the electrostatic detection device of the embodiment of the present disclosure, when the induced electrical signal meets the preset range, the induced electrical signal is amplified by the amplification module 23, and the corresponding first voltage signal V is output at the output end of the amplification module 23. FBWhen the induced electrical signal falls outside the preset range, amplification is not required. Instead, the induced electrical signal passes through resistor module R, generating a second voltage signal at the output of resistor module R. The detection module collects either the first voltage signal or the second voltage signal to determine the electrostatic voltage corresponding to the electrostatic field. This electrostatic detection device processes induced electrical signals of varying ranges separately, eliminating the need for amplification for induced electrical signals outside the preset range. This can further improve the detection frequency and response speed of the electrostatic detection device.

[0072] Exemplarily, the resistance value of the resistance module R can be set as needed and is not specifically limited here.

[0073] In one embodiment, the object to be detected includes a display substrate, the display substrate includes thin film transistors, and the active layer of at least one thin film transistor is made of metal oxide. This enables ESD detection during the production process of metal oxide products.

[0074] The present disclosure also provides an electrostatic monitoring system, including the electrostatic detection device of any of the present disclosure embodiments. The electrostatic monitoring system, utilizing the electrostatic detection device of the present disclosure embodiments, can perform real-time detection of the electrostatic field of an object to be detected during the production process, providing data support for electrostatic monitoring and static elimination during the production process.

[0075] Figure 8 FIG. 1 is a schematic diagram of the structure of an electrostatic monitoring system according to an embodiment of the present disclosure. In one embodiment, Figure 8 As shown, the electrostatic monitoring system may further include a processor 61, which is connected to the detection module 24 in the electrostatic detection device. Processor 61 is configured to receive the electrostatic voltage corresponding to the electrostatic field determined by the detection module 24 and process the electrostatic voltage received within a preset time range to determine a cumulative electrostatic voltage. For example, processor 61 may record changes in the electrostatic field at the monitoring location in real time, providing guidance for electrostatic monitoring during the production process.

[0076] The accumulated static voltage reflects the magnitude of the static field in the detection area within a preset timeframe, providing data support for static monitoring and static elimination during the production process. For example, when the accumulated static voltage reaches a preset value, static elimination measures are required to prevent static-induced product damage. If the accumulated static voltage does not reach the preset value, monitoring can continue without taking static elimination measures.

[0077] For example, the static electricity monitoring system in the embodiment of the present disclosure can monitor the cumulative static electricity voltage of 0.01KV to 20KV, with a large monitoring range and a wide range of applications.

[0078] In one embodiment, the processor 61 is used to receive the electrostatic voltage and integrate the electrostatic voltage received within a preset time range to determine the cumulative electrostatic voltage V M The following integral formula can be used:

[0079]

[0080] Among them, A represents the area of the detection area, E is the integral function, L is the distance between the sensing module and the object to be detected, and v is the electrostatic voltage of the electrostatic field, which can change continuously.

[0081] Exemplarily, the detection module 24 in the electrostatic detection device can collect the electrostatic voltage corresponding to the electrostatic field in real time, and fit the integral function E according to the collected electrostatic voltage.

[0082] Figure 9 This is a schematic diagram of the structure of an ion air gun. Ion air guns can be used to eliminate static electricity. The electrolytic head of the ion air gun electrolyzes alcohol to generate a neutralizing charge, which neutralizes static electricity in areas where ESD levels exceed the standard, effectively eliminating static electricity.

[0083] The anti-static ion nozzle uses an electrolytic head to break down alcohol, generating large amounts of positive and negative air masses. These compressed air then blows away impurities and neutralizes electrical charges on objects. When the surface charge is negative, it attracts positive charges in the airflow. When the surface charge is positive, it attracts negative charges in the airflow, neutralizing static electricity on the object and further eliminating static electricity. The high-speed compressed air also removes stubborn dust from objects.

[0084] When the static electricity monitoring system detects that the accumulated static electricity voltage has reached a preset value, a handheld ionizing air gun can be used to eliminate static electricity. In one embodiment, the static electricity monitoring system may also include a static electricity elimination device. This device is designed to generate a neutralizing charge to neutralize the static charge generated by the object being monitored when the accumulated static electricity voltage is greater than or equal to a preset voltage threshold. This allows for automatic static electricity neutralization at locations where ESD exceeds the specified value, improving the efficiency of the static electricity monitoring system.

[0085] The electrostatic detection device and electrostatic monitoring system in the embodiments of the present disclosure have a high frequency and fast response speed for detecting and monitoring electrostatic fields, and can reflect the electrostatic field of the object to be detected in real time. The response speed of the electrostatic detection device can reach 50μs, and the accuracy of the electrostatic detection device can be maintained at 5%.

[0086] In the description of this specification, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present disclosure and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present disclosure.

[0087] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features being referred to. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of such features. Throughout the present disclosure, "plurality" means two or more, unless otherwise specifically defined.

[0088] In this disclosure, unless otherwise expressly specified or limited, terms such as "mounted," "connected," "connect," and "fixed" should be understood broadly. For example, they may refer to fixed connections, detachable connections, or integration; mechanical connections, electrical connections, or communication; direct connections or indirect connections through an intermediate medium; and internal connections between two components or interactions between two components. Those skilled in the art will understand the specific meanings of these terms in this disclosure based on specific circumstances.

[0089] In the present disclosure, unless otherwise expressly specified or limited, a first feature being "above" or "below" a second feature may include the first and second features being in direct contact, or may include the first and second features being in contact not directly but through another feature between them. Moreover, a first feature being "above," "above," and "above" a second feature includes the first feature being directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below," "below," and "below" a second feature includes the first feature being directly above and obliquely above the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0090] The disclosure above provides many different embodiments or examples for implementing different structures of the present disclosure. In order to simplify the present disclosure, the components and settings of specific examples are described above. Of course, these are merely examples and are not intended to limit the present disclosure. In addition, the present disclosure may repeat reference numbers and / or reference letters in different examples. Such repetition is for the purpose of simplicity and clarity and does not in itself indicate the relationship between the various embodiments and / or settings discussed.

[0091] The above are only specific embodiments of the present disclosure, but the scope of protection of the present disclosure is not limited thereto. Any person skilled in the art can easily conceive of various modifications or substitutions within the technical scope disclosed in this disclosure, and such modifications or substitutions should be included in the scope of protection of the present disclosure. Therefore, the scope of protection of the present disclosure should be based on the scope of protection of the claims.

Claims

1. An electrostatic detection device, characterized in that: include: The sensing module is arranged at a predetermined distance from the object to be detected, and is used to sense the electrostatic field of the object to be detected and generate an induced electrical signal corresponding to the electrostatic field; a signal selection module connected to the sensing module, configured to receive and output the induced electrical signal when the induced electrical signal meets a preset range; an amplification module, connected to the signal selection module, configured to amplify the induced electrical signal and output a corresponding first voltage signal; A detection module connected to the amplification module; a resistance module, the resistance module comprising an input end and an output end, the input end of the resistance module being connected to the sensing module, the output end of the resistance module being connected to the detection module, the resistance module being configured to allow the induced electrical signal to pass through and generate a second voltage signal at the output end when the induced electrical signal does not meet the preset range; The detection module is used to collect the first voltage signal or the second voltage signal, and determine the electrostatic voltage corresponding to the electrostatic field according to a reference voltage and the collected first voltage signal or the second voltage signal.

2. The static electricity detection device according to claim 1, characterized in that The detection range of the detection module is -20V to 0V and 0 to +20V.

3. The static electricity detection device according to claim 1, wherein: The sensing module includes a tuning fork sensor and a sampling capacitor. The tuning fork sensor includes a sensing submodule and a contact connection mechanism. The sensing submodule is used to sense the electrostatic field and drive the contact connection mechanism to operate under the action of the electrostatic field. The contact connection mechanism is connected to different contacts of the sampling capacitor under the drive of different electrostatic fields, so that the sampling capacitor generates the induced electrical signal corresponding to the electrostatic field.

4. The static electricity detection device according to claim 1, wherein: The amplification module includes a current amplification regulator and a signal conversion submodule, wherein the current amplification regulator is used to amplify the induced electrical signal and generate an amplified current signal; The signal conversion submodule is used to convert the received amplified current signal into a corresponding first voltage signal and output the first voltage signal.

5. The static electricity detection device according to claim 1, wherein: The induced electrical signal is an alternating current signal, and the preset range is less than or equal to a current threshold.

6. The static electricity detection device according to claim 1, wherein: The preset distance ranges from 20 mm to 30 mm.

7. The static electricity detection device according to claim 1, wherein: The diameter of the detection area of the sensing module is Φ150mm to Φ200mm.

8. The static electricity detection device according to claim 1, wherein: The object to be detected includes a display substrate, the display substrate includes thin film transistors, and the material of the active layer of at least one of the thin film transistors is metal oxide.

9. An electrostatic monitoring system, characterized in that: The invention comprises the electrostatic detection device according to any one of claims 1 to 8.

10. The static electricity monitoring system according to claim 9, characterized in that: It also includes a processor connected to the detection module in the electrostatic detection device, and the processor is used to receive the electrostatic voltage and process the electrostatic voltage received within a preset time range to determine the accumulated electrostatic voltage.

11. The static electricity monitoring system according to claim 10, characterized in that: It also includes an electrostatic eliminator, which is used to generate neutralizing charges to neutralize the static charge generated by the object to be detected when the accumulated electrostatic voltage is greater than or equal to a preset voltage threshold.

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