Control device, system, method, and non-transitory computer-readable recording medium

Abstract

The present application provides a control device, system, method, and program capable of performing simultaneous measurement of counting in multiple energy ranges with an efficient structure. The control device (200) controls an X-ray detector (100), outputs a measurement result, and includes a setting section (220) that sets an energy range of detected X-rays for each unit region of the X-ray detector (100), a data management section (250) that acquires a count value for each unit region set as an energy range as measurement data as a result of X-ray measurement, and an output section (270) that outputs the measurement data. Thus, simultaneous measurement of counting in multiple energy ranges can be performed.

Description

Technical Field

[0001] The present invention relates to a control device for controlling an X-ray measuring apparatus and outputting measurement results, a system equipped with the control device, a method and procedure for measuring X-rays. Background Technology

[0002] In recent years, experiments involving X-ray detection with different energies have been conducted (see Non-Patent Literature 1). In the experiment described in Non-Patent Literature 1, a polycrystalline emission spectrometer with crystals divided along the dispersion and focusing directions was used to spectrally decompose the fluorescence from the sample. In this experiment, Si(111) crystals were used for the determination of the Kα region, and Si(220) crystals were used for the determination of the core region based on Kβ and valence, but these measurements need to be performed separately depending on the application.

[0003] Furthermore, a technique for zero-point adjustment using a combination of a DA converter and an amplifier with a detector having a fixed energy threshold is known (see Patent Document 1). For the same detector, a technique is also known that involves pre-storing the characteristics of each pixel, generating a calibration table based on the input measurement conditions, and using the calibration table to correct the measured X-ray intensity data (see Patent Document 2).

[0004] Prior art literature

[0005] Patent documents

[0006] Patent Document 1: International Publication No. 2012 / 077218

[0007] Patent Document 2: International Publication No. 2016 / 063586

[0008] Non-patent literature

[0009] Non-patent document 1: "Probing Transient Valence Orbital Changes with Picosecond Valence-to-Core X-ray Emission Spectroscopy", Anne Marie March, Tadesse A. Assefa, Christina Boemer, Christian Bressler, Alexander Britz, Michael Diez, Gilles Doumy, Andreas Galler, Manuel Harder, Dmitry Khakhulin, Zoltan Nemeth, Matya s Pa pai, Sebastian Schulz, Stephen H. Southworth, Hasan Yavas, Linda Young, Wojciech Gawelda, and Gyorgy Vanko, THE JOURNAL OF PHYSICAL CHEMIST RY C2017, 121, 2620-2626 Summary of the Invention

[0010] -The problem the invention aims to solve-

[0011] In the experiment described in Non-Patent Document 1, it is necessary to measure X-rays of different energies in each of the defined light-receiving areas. However, if it is necessary to measure X-rays of different energies, each energy needs to be measured separately, and the overall measurement requires a huge amount of time.

[0012] The present invention was made in view of the following circumstances, and its object is to provide a control device, system, method and procedure capable of simultaneously measuring multiple energy ranges.

[0013] -Methods used to solve problems-

[0014] (1) To achieve the above objective, the control device of the present invention is a control device for controlling an X-ray detector and outputting measurement results, characterized in that it comprises: a setting unit for setting the energy range of the detected X-rays for each unit region of the X-ray detector; a data management unit for acquiring, as the result of the X-ray measurement, the count value of the energy range set for each unit region as measurement data; and an output unit for outputting the measurement data, wherein the setting unit sets different energy ranges in at least two or more unit regions. Thus, it is possible to simultaneously measure the counts of multiple energy ranges.

[0015] (2) Furthermore, the control device of the present invention is characterized in that the setting unit, for a fixed global threshold in all regions, relatively performs at least one of zero-point shifting and gain change of the signal input by X-ray detection for each unit region, thereby setting the energy range. Thus, each energy range can be set by relatively changing the apparent threshold through zero-point and gain adjustment while the set global threshold is fixed.

[0016] (3) Furthermore, the control device of the present invention is characterized in that the setting unit performs the zero-point movement by changing the setting of the DA converter within the X-ray detector. Thus, zero-point movement can be performed using the function of the DA converter.

[0017] (4) Furthermore, the control device of the present invention is characterized in that the setting unit sets the energy range in each of the single or multiple aggregated regions that are formed by aggregating adjacent unit regions in the X-ray detector and have arbitrary size and shape. Therefore, when it is desired to obtain data from multiple energy ranges simultaneously on the same sample, measurement can be performed with high efficiency.

[0018] (5) Furthermore, the control device of the present invention is characterized in that the X-ray detector is capable of performing imaging synchronized with movement, the setting unit allocates each energy range for each row in the imaging synchronized with movement that is perpendicular to the movement direction of the X-ray detector, and the output unit outputs the count value of the entire detection area reconstructed according to each set energy range. By reconstructing the data obtained in this way, counts of multiple energy ranges can be obtained efficiently for each position.

[0019] (6) Furthermore, the control device of the present invention is characterized in that the setting unit is set such that multiple energy ranges are distributed to each unit area on the light-receiving surface. Thus, even at the expense of position resolution, data of multiple energy ranges can be simultaneously and statically measured and obtained.

[0020] (7) Furthermore, the control device of the present invention is characterized in that the setting unit is set such that a repeating unit region is periodically repeated, the repeating unit region comprising one of each type of unit region for all energy ranges. Thus, data for multiple energy ranges can be obtained simultaneously through static measurement with a simple structure.

[0021] (8) Furthermore, the system of the present invention is characterized by comprising: an X-ray measuring apparatus having the X-ray detector; and a control device as described in any one of (1) to (6) above. Thus, by controlling the X-ray measuring apparatus by the control device, requests to simultaneously measure counts of multiple energy ranges can be met.

[0022] (9) Furthermore, the method of the present invention is characterized by comprising: a step of setting the energy range of the detected X-rays for each unit region of the X-ray detector; a step of performing X-ray measurement using the X-ray detector; a step of obtaining a count value of the energy range set for each unit region as measurement data as a result of the X-ray measurement; and a step of outputting the measurement data, wherein different energy ranges are set in at least two or more unit regions when setting the energy range. Thus, simultaneous measurement of counts for multiple energy ranges is possible.

[0023] (10) Furthermore, the method of the present invention is characterized in that the X-ray detector is a two-dimensional detector, and in the detection step, the X-ray detector is used to detect the scattered X-rays caused by irradiating the sample with X-rays of a specific wavelength, thereby simultaneously detecting diffracted X-rays and fluorescent X-rays. Thus, fluorescence X-ray segment analysis can be performed simultaneously with X-ray diffraction measurement, enabling more efficient experimentation.

[0024] (11) Furthermore, the method of the present invention is characterized in that the X-ray detector is a two-dimensional detector, and in the detection step, the X-ray detector is used to detect the X-rays scattered by irradiating the sample with white X-rays. Thus, even when there are limitations in the normal scanning range, the same measurement as scanning measurement can be performed.

[0025] (12) Furthermore, the program of the present invention is a program for controlling an X-ray detector and outputting measurement results, characterized in that the computer performs the following steps: processing to set the energy range of the detected X-rays for each unit region of the X-ray detector; processing to obtain the count value of the energy range set for each unit region as measurement data as a result of the X-ray measurement; and processing to output the measurement data, wherein different energy ranges are set in at least two or more unit regions when setting the energy range. Thus, simultaneous measurement of counts for multiple energy ranges is possible.

[0026] -Invention Effects-

[0027] According to the present invention, it is possible to simultaneously measure and count multiple energy ranges. Attached Figure Description

[0028] Figure 1 This is a schematic diagram showing the structure of the X-ray measurement system of the present invention.

[0029] Figure 2 This is a schematic diagram showing the structure of the X-ray detector of the present invention.

[0030] Figure 3 It is a schematic diagram showing the signal adjustments made on a per-pixel basis.

[0031] Figure 4 This is a block diagram illustrating the structure of the control device of the present invention.

[0032] Figure 5 This is a flowchart illustrating the X-ray measurement method of the first embodiment.

[0033] Figure 6 It is a graph showing the outline of multiple pixels before correction.

[0034] Figure 7 (a) to (c) are graphs representing zero-point adjustment based on Trim-DAC.

[0035] Figure 8 This is a flowchart illustrating the X-ray measurement method of the second embodiment.

[0036] Figure 9 This is a schematic diagram showing the setup of the X-ray detector in the second embodiment.

[0037] Figure 10 This is a flowchart illustrating the X-ray measurement method of the third embodiment.

[0038] Figure 11 This is a schematic diagram showing the setup of the X-ray detector in the third embodiment. Detailed Implementation

[0039] Next, embodiments of the present invention will be described with reference to the accompanying drawings. For ease of understanding, the same structural elements will be labeled with the same reference numerals in the drawings, and repeated descriptions will be omitted.

[0040] [First Implementation Method]

[0041] (Structure of an X-ray measurement system)

[0042] Figure 1 This is a schematic diagram showing the structure of the X-ray measuring system 10. (See diagram for example.) Figure 1 As shown, the X-ray measurement system 10 includes an X-ray measuring device 50 and a control device 200. The X-ray measuring device 50 acquires data containing distributed count values ​​by measurement. The control device 200 controls the X-ray measuring device 50 and processes the acquired data. Details of the X-ray measuring device 50 and the control device 200 will be described later.

[0043] (Structure of an X-ray measuring device)

[0044] The X-ray measuring apparatus 50 includes an X-ray irradiation unit 60, a sample support unit 70, a drive unit 80, and an X-ray detector 100. The X-ray irradiation unit 60 includes an X-ray source and optical equipment to irradiate the sample S with X-rays. Examples of optical equipment include slits and reflectors. The X-ray source uses a target such as Mo or Cu to extract characteristic X-rays or white X-rays. Multiple X-ray sources can be used simultaneously for measurement. The X-ray irradiation direction can be adjusted according to the configuration of the X-ray irradiation unit 60.

[0045] The sample support 70 supports the sample S. The sample support 70 can adjust the posture of the sample S during preparation and measurement. The drive unit 80 is, for example, a force-generating unit such as a stepper motor and its transmission mechanism. The drive unit 80 operates according to instructions from the control device 200, thereby enabling position adjustments of the X-ray irradiation unit 60, the sample support 70, and the X-ray detector 100. The drive unit 80 can also move the X-ray detector 100 in the 2θ direction during measurement.

[0046] The X-ray detector 100 receives X-rays on the light-receiving surface 105 and obtains a count value of the X-rays that meet the conditions. Thus, it is possible to detect the X-rays scattered by the sample S. Furthermore, the X-ray detector 100 can be a one-dimensional detector, but a two-dimensional detector is preferred. Details of the X-ray detector 100 will be described later.

[0047] (Structure of an X-ray detector)

[0048] Figure 2 This is a schematic diagram showing the structure of the X-ray detector 100. Figure 2 For the sake of simplicity, passive components such as capacitors have been omitted. The X-ray detector 100 is a photon-counting semiconductor detector with a two-dimensional data buffer function. The X-ray detector 100 detects X-rays and transmits the detection data to the outside frame by frame.

[0049] like Figure 2 As shown, the X-ray detector 100 includes a sensor 110, a readout circuit 120, a memory 150, and a transmission circuit 160. Additionally, in Figure 2 For convenience, the diagram shows the structure corresponding to one sensor 110 and readout circuit 120, i.e., the circuit structure corresponding to one pixel (unit area). However, in reality, the X-ray detector 100 shares a single memory 150 and transmission circuit 160 with respect to each pixel, and possesses the same... Figure 2The diagram shows multiple sensors 110 with identical pixels and a readout circuit 120. Furthermore, a "unit area" refers to the smallest controllable set area capable of independently detecting X-rays, essentially corresponding to a pixel or band as the smallest sensor element. A unit area may also contain multiple sensor elements.

[0050] Sensor 110 generates a pulse when it detects photons of X-rays through exposure. Sensor 110 can detect the intensity of the X-ray beam incident on the light-receiving surface 105 as surface information. Readout circuit 120 has the function of reading out pulses and includes detection circuit 130 and counters 141 and 142.

[0051] The detection circuit 130 determines whether the pulse is higher than the global threshold. If it is higher, it sends the pulse as a voltage signal to counters 141 and 142. Counters 141 and 142 count the voltage signals and output the results. The memory 150 reads the count values ​​from counters 141 and 142 and stores them. The memory 150 converts unaligned data into an actual spatial configuration and can transfer data to subsequent stages.

[0052] The global threshold used to determine the pulse is set to a fixed value throughout the detector. The transmission circuit 160 transmits the count value stored in the memory 150 to the control device 200.

[0053] The detection circuit 130 includes a preamplifier 131, a postamplifier 133, a gain setting voltage supply source g1, a preamplifier DA converter 132 for gain adjustment, a postamplifier DA converter 134, a threshold voltage supply source t1, DA converters 135 and 137 for zero-point adjustment, and wave height discriminators 136 and 138 for high and low sides.

[0054] Amplifiers 131 and 133 are divided into two stages. The pre-amplifier 131 amplifies the current signal generated by the sensor 110. The pre-amplifier 131 is, for example, a charge amplifier circuit. The pre-amplifier DA converter 132 corrects the amplified input signal. The post-amplifier 133 amplifies the signal corrected by the pre-amplifier DA converter 132. The post-amplifier 133 is, for example, a waveform shaping amplifier circuit. The post-amplifier DA converter 134 corrects the charge signal amplified by the post-amplifier 133.

[0055] Two DA converters 132 and 134 (supply source g1 for gain setting voltage) are connected to the output sides of amplifiers 131 and 133 respectively for offset correction, and their outputs are analog summed. Gain adjustment is performed by DA converter 132, which adjusts the gain of amplifier 133, and the signal input to amplifier 133 is amplified by the gain set by DA converter 132. This circuit is common on both the LOW and HIGH sides. Thus, DA converter 132 used for gain adjustment is called a Gain-DAC. In addition, DA converters 135 and 137 are used for zero-point adjustment and are called Trim-DACs.

[0056] On the other hand, zero-point adjustment is performed by DA converters 135 and 137 connected to wave height discriminators 136 and 138. The zero point of the signal input to wave height discriminators 136 and 138 varies according to the values ​​from DA converters 135 and 137. They are configured as different circuits on the LOW and HIGH sides. Furthermore, zero-point adjustment refers to adjusting the DC level of the amplifier's output signal.

[0057] Furthermore, the global threshold can be set by dividing the digital signal (supply source t1) of the input wave height discriminators 136 and 138 into a LOW side and a HIGH side. For global setting, the global threshold is fixed at the LOW side and HIGH side respectively throughout the entire region. On the other hand, as a result, the energy threshold is relatively adjusted by adjusting the gain and zero point of the input signal to the wave height discriminators 136 and 138. Regarding the energy range, it is set by setting the energy threshold only for the LOW side or the HIGH side, or both the LOW side and the HIGH side.

[0058] DA converters 132, 134 and DA converters 135, 137 are typically used to uniformly adjust the deviation of the input signal relative to a threshold that is globally set to be fixed for all pixels. Figure 3 This is a schematic diagram showing the signal adjustments made to each pixel. Figure 3 In the diagram, the horizontal axis represents individual pixels, and the vertical axis represents energy. For example... Figure 3 As shown, in the four DA converters, by adjusting the gain and zero point for each pixel, it is possible to eliminate the deviation of each pixel and determine whether it is higher than the global threshold.

[0059] In the X-ray detector 100, the gain converters 132 and 134 and the zero-point adjustment converters 135 and 137, which are configured for each pixel, are used. By using any one or both of them, the energy threshold can be changed. By applying this mechanism, different energy thresholds can be set for each pixel 110.

[0060] The amplification rate of each amplifier and the offset value of the DA converter are assigned by settings from the control device 200. Furthermore, to set the energy threshold for each pixel 110, as described above, using the existing Trim-DAC configured for uniformity correction is preferred in terms of efficiency, but a new circuit with Trim-DAC functionality can also be provided. Alternatively, the same function can be achieved using a driver already configured for power supply within the existing circuitry. Regarding the Gain-DAC, the existing Gain-DAC can be effectively used, but a new circuit with Gain-DAC functionality can also be provided.

[0061] Furthermore, amplifiers 131 and 133 are composed of current amplification circuits, and DA converters 132 and 134 can also be current output types. Therefore, even when the size of the readout unit is limited, the signal can be effectively corrected. The DA converters are preferably current output types. Current output type DA converters have a simple circuit structure, making them particularly suitable for situations where circuit components are constructed in small readout units. In this case, by further equipping amplifiers 131 and 133 themselves as current amplification circuits, analog summation of the outputs of amplifiers 131 and 133 can be performed without intermediate current-to-voltage conversion circuits. Alternatively, a conversion circuit can be provided to perform the aforementioned analog summation after converting the signal to a voltage signal.

[0062] The wave height discriminators 136 and 138 on the High and Low sides, respectively, discriminate the output signal of the subsequent DA converter 134 based on a threshold determined by the threshold voltage supply source t1. Counters 141 and 142 count the signals discriminated on the High and Low sides, respectively. The threshold voltage supply source t1 is globally set and is common to all pixels.

[0063] (Structure of the control device)

[0064] Figure 4 This is a block diagram showing the structure of the control device 200. The control device 200 is, for example, a device (computer) equipped with a processor and memory such as a PC, which controls the X-ray measuring device 50 by executing a program, processes the obtained data, and outputs the measurement results. The control device 200 includes an input unit 210, a setting unit 220, a setting information management unit 230, a data management unit 250, a reconstruction unit 260, and an output unit 270.

[0065] The input unit 210 accepts information input from input devices such as a mouse and keyboard. For example, it can accept information specifying the type of X-ray measurement and the method for setting the energy range of each corresponding pixel.

[0066] When setting the energy range, a global threshold is assumed to exist. The global threshold is a fixed value set for the global setting of the wave height discriminator. Therefore, each detection circuit determines whether the pulse height from the sensor is higher than the global threshold, which is common to all pixels. In contrast, the energy threshold is a substantial threshold that changes relative to the global threshold by altering the gain and zero point of the pulse output from the sensor for each pixel. Furthermore, by setting energy thresholds on the LOW and HIGH sides for a single pixel, an energy range can be set for each pixel. Additionally, when there is only one global threshold value, a lower limit can be set by setting an energy threshold for each pixel, thereby setting the energy range. The energy threshold can be directly input by the measurer via the input unit 210, or it can be automatically input from tables, formulas, etc., pre-prepared in memory, depending on the type of measurement.

[0067] The setting unit sets the energy range of the detected X-rays for each unit region (pixel) of the X-ray detector, and sets different energy ranges for at least two or more unit regions. Preferably, the setting unit 220 sets the energy range of the detected X-rays to a specific range corresponding to the type of X-ray being measured for each pixel of the X-ray detector 100. This allows for simultaneous measurement and counting of multiple energy ranges.

[0068] The setting unit 220 sets the energy range as described above by performing at least one of zero-point shifting (offset correction) and gain (magnification) changes on a per-pixel basis on a globally set fixed threshold (global threshold). Thus, the globally set threshold can be relatively changed directly by adjusting the zero point and gain in a common state for all pixels, allowing each pixel to have its own energy range set.

[0069] The setting unit 220 moves the zero point by changing the settings of the DA converters 132 and 134 within the X-ray detector 100. In this case, the existing Trim-DAC function can be utilized to simultaneously measure and count multiple energy ranges with a simple structure.

[0070] The setting unit 220 can set the energy range to be detected for each set region formed by adjacent pixel sets in the X-ray detector 100. Therefore, data for multiple energy ranges can be measured simultaneously for the same sample S.

[0071] A set region can be a single pixel as the smallest unit, a line or block (rectangular) unit composed of multiple pixels, or the entire region as the largest unit. Furthermore, a set region can be a region obtained by dividing the entire region, or it can be a given portion of the entire region. Additionally, a set region can be more than one type throughout the entire region, and can have various sizes and shapes. That is, a set region can be a single or multiple regions with arbitrary sizes and shapes. Moreover, a set region can range from one pixel to all pixels of the entire region, but the energy threshold adjustment is not performed on a per-set-region basis, but rather on a pixel-by-pixel basis. Furthermore, specific set regions have the same energy threshold, unlike the repetitive unit regions in static measurements.

[0072] The setting information management unit 230 stores and manages the setting information applied to the X-ray measuring apparatus 50. Upon request, the setting information management unit 230 outputs the managed setting information to the reconstruction unit 260.

[0073] As a result of X-ray measurement, the data management unit 250 obtains the count value of the energy range set for each pixel, and manages the count value as measurement data by corresponding it with the zero point and threshold of the energy.

[0074] The reconstruction unit 260 reconstructs the acquired measurement data using the applied setting information. Specifically, it collects the acquired count values ​​into count values ​​within a set energy range and constructs image data for each energy range. Thus, for example, it is possible to calculate the distribution of count values ​​in a set area with the same energy range. In this way, reconstruction means outputting count values ​​that are basically managed in each energy range, but also includes directly reading and outputting measurement data obtained under the conditions of the application.

[0075] The output unit 270 outputs measurement data in a form corresponding to the type of X-ray measurement. For example, it outputs the distribution of count values ​​for each set of regions with the same energy range. Thus, when it is desired to measure the distribution of count values ​​for a specific energy range for each divided region of the light-receiving surface, it is possible to perform measurements for multiple required energies in a single measurement, thereby enabling highly efficient measurements.

[0076] (X-ray measurement method)

[0077] A method for simultaneously measuring X-rays of different energies using an X-ray measuring system 10 configured as described above will be explained. Figure 5 This is a flowchart illustrating the X-ray measurement method. First, the user sets up the sample S in the X-ray measurement apparatus 50 (step S11). For example, when wanting to measure Kα rays diffracted in one region and Kβ rays in another region on the same sample, the user specifies the measurement type and measurement area to the control device 200 (step S12).

[0078] The control device 200 converts the user's specifications into setting information, and sets the energy range for detecting X-rays for each pixel of the X-ray detector 100 according to this setting information (step S13). For example, the setting information is information that fixes the static measurement of the X-ray detector 100 and the energy range of each region of the light-receiving surface. The X-ray detector 100 is zero-point adjusted by an amplifier or a DA converter according to the setting. Details regarding zero-point adjustment will be described later.

[0079] The user instructs the control device 200 to begin measurement. Based on the instruction from the control device 200, the X-ray measuring device 50 performs X-ray measurement using the X-ray detector 100 (step S14). As a result of the X-ray measurement, the control device 200 obtains the count value of the energy range set for each pixel and manages it as measurement data.

[0080] The control device 200 manages and reconstructs the measurement data of the acquired count values ​​(step S15). For example, it calculates the energy range of each region of the light-receiving surface and establishes a correspondence with the count values. Then, it outputs the measurement data in a form corresponding to the purpose of the X-ray measurement (step S16). For example, it can display the distribution of count values ​​for a specific energy range region on one screen and display the distribution of count values ​​for other energy range regions on other screens.

[0081] (Midnight Adjustment)

[0082] As mentioned above, zero-point adjustment is performed by appropriately setting the magnification and offset value.

[0083] Figure 6 This is a graph showing the contours of multiple pixels before correction. The "correction" here refers to the correction of the deviation for each individual pixel. There are deviations in the wave height of the X-rays received by each pixel. However, as... Figure 6 As shown, the desired peak value can be detected by uniformly setting the thresholds for both the Low and High sides for any pixel. This uniform threshold is a global setting determined by a constant voltage relative to ground.

[0084] Figure 7 Figures (a) through (c) are graphs representing the zero-point adjustment performed by the Trim-DAC circuit. The horizontal axis of the graph represents the global threshold, and the vertical axis represents the count value. Figure 7In the examples shown in (a) to (c), to visually represent the change in the position of the zero point caused by the Trim-DAC, the waveform obtained by varying the global threshold from 0 to 512 is shown shifting with Trim-DAC values ​​of 0, 10, and 20. Furthermore, while LSB (Least Significant Bit) is listed as the unit in each figure, the actual amount of signal change in one bit differs between one bit in the Trim-DAC circuit and one bit in the signal that sets the threshold of the waveform height discriminator.

[0085] Figure 7 (a) represents the chart with a zero-point adjustment trimming value of v0. In contrast, Figure 7 (b) is pruned by adjusting the zero point by 10, thereby relatively increasing the energy threshold (i.e., lowering the zero point). Furthermore, Figure 7 (c) Zero-point adjustment 20, relatively further increases the energy threshold (i.e., further decreases it). In this way, zero-point adjustment in the detection circuit 130 can be performed.

[0086] exist Figure 7 In the examples shown in (a) to (c), consider, for instance, the case where the global threshold is set to 400 to adjust the Trim value. Figure 7 In the example shown in (a), the energy threshold is -4 keV. Figure 7 In the example shown in (b), the energy threshold is 1.2 keV. Figure 7 In the example shown in (c), the energy threshold is +1 keV. This allows the energy threshold to be changed for each pixel.

[0087] [Second Implementation]

[0088] The first embodiment is suitable for static measurements, but sometimes it is necessary to perform photography that is synchronized with movement, such as TDI (Time Delay Integration) measurements. In this embodiment, the X-ray measuring device and the control device have the same structure, but the measurement method is different.

[0089] (X-ray measurement method using TDI scanning)

[0090] Figure 8 This is a flowchart illustrating an X-ray measurement method using TDI measurement. First, the user sets up the sample in the X-ray measurement apparatus (step S21). For example, when wanting to detect X-rays in each of multiple energy ranges for a certain area, the user specifies the measurement type and measurement area for the control device 200 (step S22).

[0091] The control device 200 converts the user's specifications into setting information, and sets the energy range of the detected X-rays for each pixel of the X-ray detector 100 according to this setting information (step S23). For example, the setting information includes TDI measurement and the energy range for each row. The X-ray detector 100 is zero-point adjusted by an amplifier or a DA converter according to the settings.

[0092] In the case of a TDI scan of the X-ray detector 100, each energy range is assigned to a pixel in each row perpendicular to the moving direction of the X-ray detector 100 in the TDI scan.

[0093] The user instructs the control device 200 to begin measurement, and the X-ray detector 100 is moved and X-ray measurement is performed simultaneously according to the instruction from the control device 200 (step S24). As a result of the X-ray measurement, the control device 200 obtains the count value of the energy range set for each pixel and manages it as measurement data.

[0094] The control device 200 manages and reconstructs the measurement data of the acquired count values ​​(step S25). For example, it establishes a correspondence between pixels and energy ranges and count values. Then, it reconstructs the count values ​​of the entire detection area according to each set energy range. The distribution of the count values ​​according to each energy range is output to each screen. In this way, the measurement data is output in a form corresponding to the purpose of X-ray measurement (step S26).

[0095] (Specific example of using TDI scanning)

[0096] With each energy range assigned to a pixel, TDI measurement is set in the X-ray measuring apparatus 50, and the actual threshold is determined by the row (pixel column) perpendicular to the scanning direction. Figure 9 This is a schematic diagram showing the setup of the X-ray detector 100. Figure 9 In the example shown, the energy range of each row 111 in the light-receiving surface 105 is set to 4.0–4.1 keV, 4.1–4.2 keV, 4.2–4.3 keV, and so on. For example, by setting different energy ranges for all 775 rows, X-ray detection images of 775 different energy ranges can be obtained. By setting it in this way and performing TDI scanning, measurement data for multiple energy ranges can be obtained for the same angle. The measurement described above can be considered a hypothetical MCA measurement.

[0097] Furthermore, by applying the above example, different energy ranges can be set for each row, and an energy profile can be constructed based on these settings. The results can then be used to determine Kα and Kβ rays, and Kβ rays can be removed from the energy profile. The more precisely the energy range is set, the finer the energy profile can be obtained, and the more accurately Kβ rays can be removed.

[0098] In the above example, TDI scanning is used as the imaging method, but the imaging method is not limited to TDI scanning as long as the imaging is synchronized with the movement. Instead of TDI scanning, it is also possible to swing in the scanning direction with a given line amount (e.g., 1 line amount), or swing in a rotational direction centered on the center of the detection area.

[0099] [Third Implementation Method]

[0100] In the first embodiment, the measurement is performed by changing the energy range that can be detected for a specific area of ​​the light-receiving surface, but it is also possible to perform measurements of different energy ranges simultaneously over a wider range. In this embodiment, the structures of the X-ray measuring device and the control device are the same, but the measurement method is different.

[0101] (X-ray measurement method based on static measurement of multiple colors)

[0102] Figure 10 This is a flowchart illustrating an X-ray measurement method for static measurements of multiple colors. First, the user sets up the sample S in the X-ray measurement apparatus 50 (step S31). For example, when the user wants to detect X-rays in multiple given energy ranges over a wide range, the user specifies the measurement type and measurement area to the control device 200 (step S32).

[0103] The control device 200 converts the user's specifications into setting information, and sets the energy range of the detected X-rays for each pixel of the X-ray detector 100 according to the setting information (step S33). For example, the setting information includes information on static measurement and the area to be measured. The X-ray detector 100 is zero-point adjusted by an amplifier or a DA converter according to the settings.

[0104] At this time, the setting unit 220 preferably sets the pixels to distribute multiple energy ranges among the pixels in the detector. This allows data from multiple energy ranges to be acquired simultaneously using static measurement. However, this sacrifices positional resolution to some extent. Furthermore, the aforementioned "dispersion" is preferably performed uniformly. "Uniform" includes not only regularly arranged configurations but also randomly arranged configurations.

[0105] The user instructs the control device 200 to begin the measurement. Based on the instruction from the control device 200, the X-ray measuring device 50 fixes the X-ray detector 100 to perform the X-ray measurement (step S34). As a result of the X-ray measurement, the control device 200 obtains the count value of the energy range set for each pixel and manages it as measurement data.

[0106] The control device 200 manages and reconstructs the measurement data of the acquired count values ​​(step S35). For example, it establishes a correspondence between pixels and energy ranges and count values. Then, the output unit 270 reconstructs the count values ​​of the entire detection area for each pixel with a given energy range set. In this case, for example, although position information is sacrificed, diffraction images of X-rays of multiple wavelengths can be obtained simultaneously. As a form corresponding to the purpose of X-ray measurement, the distribution of the count values ​​of the entire detection area is output to each screen according to each energy range (step S36).

[0107] (Specific examples of static measurements of multiple colors)

[0108] The setting unit 220 preferably sets the energy range of each pixel so that a repeating unit area containing all types of pixels within the energy range is periodically repeated. Figure 11 This is a schematic diagram showing the setup of the X-ray detector.

[0109] exist Figure 11 In the example shown, four pixels 110a to 110d (4 colors), each with a given energy range, are used as repeating units 115, and the energy range of each pixel is set. This allows for the simultaneous acquisition of data for multiple energy ranges through static measurement with a simple structure. In the example above, four pixels constitute a repeating unit, but nine pixels (9 colors) can also be used. Furthermore, this regularity is not required; multiple pixels can be set in a random configuration.

[0110] [Fourth Implementation Method]

[0111] According to the above-described implementation, the distribution of count values ​​for the entire detection area can be output to each screen according to each energy range, but the energy distribution can also be output for the position of each pixel. Using these two output methods, in the detection step, an X-ray detector is used to detect the X-rays scattered by X-rays irradiated with a specific wavelength onto the sample, thereby enabling the simultaneous detection of diffracted X-rays and fluorescent X-rays. Such a method can be applied, for example, in measurements using TDI scanning.

[0112] [Fifth Implementation Method]

[0113] In the above embodiments, there is no particular limitation on using either characteristic X-rays or white X-rays, but by using white X-rays, a large range of analytical data in k-space can be obtained within a narrow scanning range. In this case, the narrow scanning range allows for efficient time-varying experiments. The diffraction condition for crystals is 2dsinθ=nλ, therefore, by changing λ compared to measurement with a fixed λ, a large range of diffraction images can be obtained in k-space even for objects where the range of variation of θ is limited.

[0114] For example, by using white X-rays as the X-ray source, the same results as those obtained by scanning can be obtained even when there are limitations in the normal scanning range. Therefore, when using characteristic X-rays, difficult in-situ experiments can be performed.

[0115] In the above embodiments, the control device 200 is configured as a single device, but it can also be configured as a system with some functions and structures located in the cloud. Furthermore, the function of the control device 200 can be set as a circuit within the X-ray detector 100. Additionally, in the above embodiments, a global threshold is set commonly across all regions, but it is also possible to have a structure that does not have a global threshold but allows setting an energy threshold for each unit region.

[0116] Furthermore, this international application claims priority based on Japanese Patent Application No. 2020-011214, filed on January 27, 2020, and incorporates the entire contents of Japanese Patent Application No. 2020-011214 into this international application.

[0117] -Symbol Explanation-

[0118] 10 X-ray measurement system

[0119] 50 X-ray measuring device

[0120] 60 X-ray irradiation section

[0121] 70 Sample support

[0122] 80 Drive Unit

[0123] 100 X-ray detector

[0124] 105 Light-receiving surface

[0125] 110 sensor (pixels)

[0126] 110a~110d pixels

[0127] Line 111

[0128] 115 repeating units

[0129] 120 Readout Circuit

[0130] 130 Detection Circuit

[0131] 131, 133 amplifiers

[0132] 132, 134, 135, 137 DA converters

[0133] t1 Threshold voltage supply source

[0134] g1 is the supply source of the gain setting voltage.

[0135] 136, 138 Wave height discriminator

[0136] Counters 141 and 142

[0137] 150 memory

[0138] 160 Transmission Circuit

[0139] 200 control device

[0140] 210 Input Section

[0141] 220 Setting Department

[0142] 230. Information Management Department

[0143] 250 Data Management Department

[0144] 260 Reconstruction Department

[0145] 270 Output Section

[0146] S sample.

Claims

1. A control device, characterized in that, The control device controls the X-ray detector and outputs the measurement results. The control device includes: The setting unit sets the energy range of the detected X-rays for each unit area of ​​the X-ray detector; The data management department obtains the count values ​​of the energy range set for each unit area as measurement data, based on the results of X-ray measurements. as well as The output unit outputs the measured data. The setting unit sets different energy ranges in at least two unit regions. The X-ray detector is capable of performing imaging synchronized with movement. The setting unit allocates energy ranges for each row in the imaging process synchronized with the movement, perpendicular to the direction of movement of the X-ray detector. The output unit outputs the count values ​​of all detection areas reconstructed according to each set energy range.

2. An X-ray measurement system, characterized in that, The X-ray measurement system includes an X-ray measuring device with an X-ray detector and a control device. The control device controls the X-ray detector and outputs the measurement results. The control device includes: The setting unit sets the energy range of the detected X-rays for each unit area of ​​the X-ray detector; The data management department obtains the count values ​​of the energy range set for each unit area as measurement data, based on the results of X-ray measurements. as well as The output unit outputs the measured data. The setting unit sets different energy ranges in at least two unit regions.

3. The X-ray measurement system according to claim 2, characterized in that, The setting unit sets the energy range by relative zero-point shifting and gain change of the signal input by X-ray detection for each unit region, based on a fixed global threshold across all regions.

4. The X-ray measurement system according to claim 3, characterized in that, The setting unit performs the zero-point movement by changing the setting of the DA converter within the X-ray detector.

5. The X-ray measuring system according to any one of claims 2 to 4, characterized in that, The setting unit sets the energy range in each of one or more aggregated regions that are formed by aggregating adjacent unit regions in the X-ray detector and have arbitrary size and shape.

6. The X-ray measuring system according to any one of claims 2 to 4, characterized in that, The X-ray detector is capable of performing imaging synchronized with movement. The setting unit allocates energy ranges for each row in the imaging process synchronized with the movement, perpendicular to the direction of movement of the X-ray detector. The output unit outputs the count values ​​of all detection areas reconstructed according to each set energy range.

7. The X-ray measuring system according to any one of claims 2 to 4, characterized in that, The setting unit sets the energy range to be distributed in various unit areas on the light-receiving surface.

8. The X-ray measuring system according to claim 7, characterized in that, The setting unit is configured such that the repeating unit region repeats periodically, and the repeating unit region includes one of each type of unit region in the energy range.

9. A method for simultaneously measuring X-rays of different energies. The method is characterized by including: The steps for setting the energy range of the X-rays to be detected for each unit area of ​​the X-ray detector; The steps of performing X-ray measurements using the X-ray detector; As a result of the X-ray measurement, the step of obtaining the count value of the energy range set for each unit area as the measurement data; as well as The step of outputting the measured data, When setting the energy range, for a fixed global threshold across all regions, at least one of zero-point shift and gain change of the signal input by X-ray detection is performed relative to each unit region, thereby setting different energy ranges in at least two or more unit regions.

10. The method according to claim 9, characterized in that, The X-ray detector is a two-dimensional detector. In the detection step, the X-ray detector is used to detect the X-rays scattered by the white X-rays irradiating the sample.

11. A non-transient computer-readable recording medium, wherein a program is recorded thereon, the program controlling an X-ray detector and outputting measurement results, characterized in that, The program causes the computer to execute: The processing involves setting the energy range of the detected X-rays for each unit area of ​​the X-ray detector; As a result of X-ray measurement, the count values ​​of the energy range set for each unit area are obtained and processed as measurement data. as well as Processing of the measured data output. When setting the energy range, for a fixed global threshold across all regions, at least one of zero-point shift and gain change of the signal input by X-ray detection is performed relative to each unit region, thereby setting different energy ranges in at least two or more unit regions.

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