A sample support column mounting structure

Abstract

The application provides a sample support column mounting structure, comprising a sample support column and a displacement table, wherein the sample support column is detachably connected with the displacement table, the sample support column comprises a sample adsorption end, the sample support column is provided with a first gas guide hole, the first gas guide hole is connected with the sample adsorption end in a gas path, the displacement table is provided with a second gas guide hole, and the second gas guide hole and the first gas guide hole are in mutual alignment.

Description

Technical Field

[0001] The invention belongs to the technical field of probe stations, and in particular relates to a sample support column installation structure. Background Art

[0002] Probe station testing equipment is a widely used non-destructive testing method that can be used to test the electrical, optoelectronic, and high-frequency properties of material samples or devices. It has extensive applications in the fields of physics and semiconductors. In order for the probe assembly to extend to the test location, it is usually necessary to place the probe assembly as close to the test location as possible. At the same time, because the probe assembly usually needs to be combined with corresponding fixed and movable structures, it needs to have the necessary shape and volume. Therefore, the location where the test sample can be placed and supported is greatly limited. In order to keep the test sample in the preset position, it is generally necessary to support the sample to the preset position through a support structure.

[0003] Due to the differences in the support structures required for different types of samples to be tested, for example, when testing chips or packaged devices, the support structure also needs to be able to connect to the pins of the chip or packaged device so that the chip or packaged device can input or output signals, which requires a corresponding lead structure; when testing wafers, there is no need to connect the pins, and no corresponding lead structure is required. Since the chip is generally connected to the pins reserved on the support structure by welding or binding to form a fixed connection, when testing different samples, the corresponding support structure needs to be disassembled and assembled. The disassembly and assembly needs to be carried out in the small space formed by other components of the probe station. The disassembly and assembly process is time-consuming and labor-intensive, which greatly reduces the efficiency of the probe station. Therefore, the probe station equipment in the prior art has the problem of time-consuming and labor-intensive sample support structure replacement. Summary of the Invention

[0004] In view of the problem in the prior art that the replacement of a sample support structure is time-consuming and labor-intensive, the present invention provides a sample support column installation structure.

[0005] The present invention provides a sample support column installation structure, including a sample support column and a displacement platform. The sample support column is detachably connected to the displacement platform. The sample support column includes a sample adsorption end. The sample support column is provided with a first air guide hole, and the first air guide hole is connected to the air path of the sample adsorption end; the displacement platform is provided with a second air guide hole; the second air guide hole and the first air guide hole are aligned with each other.

[0006] Preferably, the sample support column further comprises a sealing block, which is arranged on a contact surface between the sample support column and the displacement stage, and the first air guide hole is provided on the sealing block.

[0007] Furthermore, a sealing ring is provided between the sealing block and the sample supporting column.

[0008] Preferably, in addition to being able to adsorb the sample, the sample support column can also be replaced with a sample support column that can be electrically connected to the sample being tested. Furthermore, the translation stage also includes a second plug connector, which is provided on the surface of the translation stage connected to the sample support column.

[0009] Optionally, the sealing block is provided with a plug connector accommodating cavity, and both end surfaces of the sealing block are sealed to each other.

[0010] Further preferably, the sample support column is capable of adsorbing samples and electrically connecting to the sample to be tested, and the sample support column also includes a first plug connector, and the second plug connector is configured to be plugged into the first plug connector.

[0011] Still further preferably, the sealing block is provided with a first plug-in through hole, and the first plug connector is plugged into the first plug-in through hole to form an airtight seal.

[0012] Preferably, the sample support column further comprises a connecting plate, which is arranged on a side of the sample support column close to the translation stage, the connecting plate is provided with a screw receiving hole, the translation stage is provided with a threaded hole, and the screw receiving hole is arranged in alignment with the threaded hole.

[0013] Preferably, the sealing block is provided with a boss protruding toward the sample supporting column, and a plug receiving groove is further provided on a side of the sealing block close to the translation stage.

[0014] Preferably, the sealing block is provided with a first plug-in through-hole, the first plug-in through-hole passes through the sealing block, the first plug connector is inserted into the first plug-in through-hole, and the first plug connector is airtightly sealed with the first plug-in through-hole.

[0015] Preferably, the translation stage is provided with a second plug hole, and the second plug hole can at least accommodate the connection terminal of the second plug connector.

[0016] Optionally, the outer edge of the sealing block is not circular, and the sealing block is embedded in the sample supporting column.

[0017] Optionally, the edge of the sealing block is circular, a limiting protrusion is provided on the circular edge, and the sample support column is provided with a limiting groove matching the limiting protrusion.

[0018] Preferably, adsorption grooves are provided at the contact surfaces of the first air guide holes and the second air guide holes, and the area of ​​the adsorption grooves is larger than the cross-sectional area of ​​the first air guide holes and the second air guide holes.

[0019] Furthermore, the connecting plate contacts the displacement table.

[0020] The present invention has at least the following beneficial effects: when replacing the sample support column, there is no need to perform air line connection operations, and the sample support column is easy to replace; by utilizing the pressure difference of the air line, a certain adsorption force toward the displacement stage is generated on the sample support column, so that when the two are placed but not yet fixed, they can resist certain external vibrations or influences, avoid or reduce position changes, and improve overall stability and usage experience. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 This is a schematic diagram of the overall structure of a sample support column installation structure.

[0022] Figure 2 for Figure 1 Exploded view of the sample support column mounting structure shown.

[0023] Figure 3 for Figure 2 Magnified view of part A.

[0024] Figure 4 Schematic diagram of the structure of the sample support column.

[0025] Figure 5 Schematic diagram of the structure of a sample support column in another embodiment.

[0026] Figure 6 This is a schematic diagram of the overall structure of a sample support column installation structure according to another embodiment.

[0027] Figure 7 Schematic diagram of the structure of a sample support column in yet another embodiment. DETAILED DESCRIPTION

[0028] In order to make the purpose and features of the present invention more obvious and easy to understand, the specific embodiments of the present invention are further described below in conjunction with the accompanying drawings. It should be noted that the drawings are all in a very simplified form and use non-precise ratios, which are only used for the purpose of conveniently and clearly assisting in explaining the embodiments of the present invention.

[0029] The present invention provides a sample support column installation structure, including a sample support column 100 and a displacement stage 200. The sample support column 100 is provided with a sample adsorption end 111, which adsorbs the sample to be tested and fixes the sample to be tested. In order to provide the sample adsorption end 111 with the required air pressure for adsorption, the sample support column 100 is provided with a corresponding air path. As an optional method, such as Figure 2As shown, a first air guide hole 123 is provided at the bottom of the sample support column, through which the air path of the external air extraction device is connected, and the first air guide hole 123 is connected to the air path of the sample adsorption end 111. When in use, the bottom of the sample support column 100 is generally fixed to the displacement stage 200. Therefore, a second air guide hole 218 is provided at a position corresponding to the first air guide hole 123 on the contact surface between the displacement stage 200 and the sample support column 100, so that the first air guide hole 123 and the second air guide hole 218 are aligned, thereby achieving air path communication. When the sample column needs to be replaced, the detachable connector is removed, and then the sample support column 100 can be separated from the displacement stage 200. When the sample column 100 needs to be installed on the displacement stage, the first air guide hole 123 and the second air guide hole 218 are aligned with each other, and there is no need for air path connection, which simplifies the installation steps of the support column and improves installation efficiency.

[0030] By connecting the second air guide hole 218 of the displacement stage 200 to an external air extraction device and to the sample adsorption end 111 through the first air guide hole 123, a pressure difference is generated between the inside and outside of the sample support column 100 at the sample adsorption end 111. Under the action of the pressure difference, the sample adsorption end 111 adsorbs the sample to be tested, thereby fixing the sample to be tested. When the sample to be tested needs to be removed, the air extraction is stopped or reduced so that the pressure difference between the inside and outside of the sample support column 100 at the sample adsorption end 111 approaches zero, thereby facilitating the removal of the sample to be tested. In addition, when installing the sample support column 100, a pressure difference can be generated between the inside and outside of the sample support column 100 by the air extraction device. By utilizing this pressure difference, a certain adsorption force can be generated on the sample support column 100 toward the displacement stage 200, so that the two can resist certain external vibrations or influences when they are placed but not yet fixed, avoiding or reducing position changes, and improving overall stability and user experience.

[0031] Please refer to Figure 2 The sample support column 100 also includes a sealing block 120, which is positioned on the interface between the sample support column 100 and the translation stage 200. The sealing block 120 is provided with a first air guide hole 123. This sealing block 120 enables quick assembly and disassembly. Furthermore, a sealing ring is provided between the sealing block 120 and the sample support column 100 to ensure a seal between the sample support column 100 and the sealing block 120, thereby ensuring effective adsorption.

[0032] Please refer to Figure 3In addition to being able to adsorb samples, the sample support column 100 can also be electrically connected to the sample to be tested, thereby sending electrical signals to the sample to be tested and performing corresponding tests. Specifically, the sample adsorption end 111 includes the functions of adsorption and electrical connection at the same time. For example, a cavity for accommodating circuits and pins is provided on the sample adsorption end 111, and corresponding pins or electrical connection elements are provided. At this time, the sample support column 100 also includes a first plug connector 130, and the displacement stage 200 also includes a second plug connector 240. The first plug connector 130 is electrically connected to the second plug connector 240, and the first plug connector 130 is electrically connected to the sample adsorption end 111. It can be understood that in addition to the function of sample adsorption, the sample adsorption end 111 can also have a connection circuit that matches the connection pin of the sample to be tested. The first plug connector 130 is electrically connected to the corresponding circuit of the sample adsorption end 111. In this configuration, the sample support column 100 has no exposed wiring, improving the overall structural stability of the column. Furthermore, the plug connector electrically connects the column to the translation stage 200, eliminating the need for frequent connection and disconnection of multiple wiring. A single plug-in / plug operation connects and disconnects all pins of the sample under test, making operation convenient. This structure greatly facilitates replacement of the sample support column 100, improving its efficiency and reducing its difficulty.

[0033] More specifically, please refer to Figure 2 、 Figure 4 The sealing block 120 is provided with a first plugging hole 122, into which the first plug connector 130 is inserted, and the first plug connector 130 and the first plugging hole 122 are airtightly sealed. Alternatively, the sealing block 120 is provided with a boss 121 protruding toward the sample support column 100. A plug receiving groove 124 is also provided on the side of the sealing block 120 near the translation stage 200. The first plugging hole 122 extends through the sealing block 120, that is, from the side of the boss 121 near the sample support column 100 to the plug receiving groove 124. The first plug connector 130 is also provided with a plug end 131 and a connection end 132 extending along the plugging direction.

[0034] Please refer to Figure 2 、 3 The second plug connector 240 is provided with a plug end 241 and a connection end 242 extending along the plugging direction. During use, the plug end 241 of the second plug connector 240 plugs into the plug end 131 of the first plug connector 130, the connection end 132 of the first plug connector 130 is electrically connected to the corresponding component on the sample adsorption end 111, and the connection end 242 of the second plug connector 240 is electrically connected to an external device through the second plug hole 215 of the translation stage 200. The second plug hole 215 is capable of accommodating at least the connection end 242 of the second plug connector 240.

[0035] Please refer to Figure 3The second plug hole 215 has an opening on the side facing the sample support column 100, and the second plug connector 240 is provided with a connecting plate 243 perpendicular to the plugging direction. The plug fixing plate 216 and the connecting plate 243 match each other in shape. The second plug connector 240 and the translation stage 200 are fixed to each other via the plug fixing plate 216 and the connecting plate 243. Preferably, a countersunk hole is provided on the connecting plate 243, and a threaded hole is provided at a corresponding position on the plug fixing plate 216. A countersunk screw passes through the countersunk hole and is threadedly connected to the threaded hole. Alternatively, the second plug connector 240 and the translation stage 200 can be connected by means of clamping, bonding, air pressure adsorption, etc.

[0036] For different types of sample support columns 100, corresponding sealing blocks 120 can be selected. The above content describes a specific structure of a sample support column 100 with both adsorption and electrical connection. In addition, Figure 5 As shown, the sample support side of the sample support column 100 can also be provided with an air suction device 116. Optionally, the first plug connector 130 can be eliminated and the sealing block 120 can be adjusted accordingly. Figure 5 、 Figure 7 The sealing block 120 is provided with a plug receiving cavity 125, and both end surfaces of the sealing block 120 are sealed to each other.

[0037] In addition, a corresponding alignment structure is provided on the sealing block 120. Figure 2 、 Figure 4 、 Figure 6 As shown, the outer edge of the sealing block 120 is not circular, for example, it is square, polygonal, elliptical, etc. The sealing block 120 is embedded in the sample support column 100 and is limited by the outer edge of the sealing block 120. In addition, as shown in FIG. Figure 5 As shown, the edge of the sealing block 120 can also be set to a circular shape, and a corresponding limiting protrusion is provided on the circular edge, and a matching limiting groove 115 is provided on the sample support column 100. When there are circuits in the sample support column 100, this alignment structure prevents the circuits in the sample support column 100 from being entangled.

[0038] The sample support column 100 also includes a connecting plate 113, which is disposed on a side of the sample support column 100 near the translation stage 200. The connecting plate 113 is provided with screw holes 114, which are aligned with the threaded holes 114 provided on the translation stage. The connecting plate 113 is in surface contact with the translation stage 200. Screws are used to connect the sample support column 100 to the translation stage 200.

[0039] Adsorption grooves 217 are provided at the contact surface between the first and second air holes 123, 218. The area of ​​adsorption grooves 217 is larger than the cross-sectional area of ​​the first and second air holes 123, 218. To prevent relative displacement between the sample support column 100 and the translation stage 200 during installation of the fastening screws, adsorption grooves 217 can be used to create a suction cup-like structure and effect, enhancing the adsorption strength between the sample support column 100 and the translation stage 200. This prevents a certain degree of collision between the sample support column 100 and the translation stage 200 when not fastened with fasteners, ensuring that the sample support column 100 is initially fixed in place for easy subsequent installation.

[0040] In addition, if Figure 1 、 Figure 6 As shown, the translation stage 200 may be a rotational translation stage or a translational translation stage, for example, a translation stage that moves in at least one of a horizontal direction and a vertical direction.

[0041] The basic principles, main features, and advantages of the present invention are shown and described above, and therefore, the above description is merely an embodiment of the present invention. It should be understood by those skilled in the art that the present invention is not limited to the above embodiment. The above embodiment and description only describe the principles of the present invention. Without departing from the spirit and scope of the present invention, the present invention also includes various equivalent changes and improvements, which will fall within the scope of the invention as claimed.

Claims

1. A sample support column mounting structure, characterized in that: The sample support column comprises a sample support column and a displacement stage, wherein the sample support column and the displacement stage are detachably connected, the sample support column comprises a sample adsorption end, the sample support column is provided with a first air guide hole, and the first air guide hole is connected to the air path of the sample adsorption end; the displacement stage is provided with a second air guide hole; the second air guide hole and the first air guide hole are aligned with each other; the sample adsorption end simultaneously comprises the functions of adsorption and electrical connection, the sample support column further comprises a first plug connector, the displacement stage further comprises a second plug connector, the first plug connector is electrically connected to the second plug connector, and the first plug connector is electrically connected to the corresponding circuit of the sample adsorption end; The sample support column further includes a sealing block, which is disposed on a contact surface between the sample support column and the translation stage, and the first air guide hole is disposed in the sealing block; the sealing block is provided with a first plug-in through hole, the first plug connector is inserted into the first plug-in through hole, and the first plug connector and the first plug-in through hole are airtightly sealed; The outer edge of the sealing block is not circular, and the sealing block is embedded in the sample support column. or, The edge of the sealing block is circular, a limiting protrusion is provided on the circular edge, and the sample support column is provided with a limiting groove matching the limiting protrusion.

2. The sample support column mounting structure according to claim 1, wherein: An adsorption groove is provided at the contact surface of the first air guide hole and the second air guide hole, and the area of ​​the adsorption groove is larger than the cross-sectional area of ​​the first air guide hole and the second air guide hole.

3. The sample support column mounting structure according to claim 1, wherein: The translation stage further includes a second plug connector, which is arranged on the surface of the translation stage connected to the sample support column.

4. The sample support column mounting structure according to claim 3, wherein: The sample support column further includes a first plug connector. The sealing block is provided with a first plug through hole. The first plug connector is plugged into the first plug through hole to form an airtight seal. The second plug connector is configured to be pluggable with the first plug connector.

5. The sample support column mounting structure according to claim 3, wherein: The sealing block is provided with a plug connector accommodating cavity, and both end surfaces of the sealing block are sealed to each other.

6. The sample support column mounting structure according to claim 1, wherein: The sample support column further includes a connecting plate, which is arranged on a side of the sample support column close to the translation stage. The connecting plate is provided with a screw receiving hole, and the translation stage is provided with a threaded hole, and the screw receiving hole is arranged in alignment with the threaded hole.

7. The sample support column mounting structure according to claim 6, characterized in that: The connecting plate is in surface contact with the displacement stage.

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