Polarization mode dispersion measurement using a polarization diversity receiver

Abstract

This invention discloses a photomask enclosure, comprising: an inner portion including a cover and a base plate; and an outer portion including a dome and a door. The door includes a latch and one or more movable posts that can be moved by actuation of the latch. The base plate includes movable photomask contacts that can be contacted by the movable posts. Contact between the movable posts and the movable photomask contacts causes the movable photomask contacts in the base plate to move toward the cover. This movement secures the photomask within the photomask enclosure.

Description

[0001] Cross-citation of related applications

[0002] This application claims the benefit and priority of U.S. Provisional Application No. 62 / 953,326, filed December 24, 2019, which is incorporated herein by reference for all purposes. Technical Field

[0003] This disclosure relates to a photomask box, and more specifically to a photomask box including a movable photomask holding feature for holding the photomask in a desired position. Background Technology

[0004] A photomask case is used for storing, transporting, and processing photomasks, specifically transporting photomasks to and from processing tools (e.g., lithography apparatus). The photomask case includes, for example, an EUV case used with extreme ultraviolet (EUV) lithography tools. The photomask case is constructed to reduce and / or prevent contamination or physical damage to the photomasks contained therein during movement, handling, and processing. The photomask case may include an outer case and an inner case within the outer case. The inner case may include a base plate and a cover that houses the photomask. The outer case includes a door and a dome that houses the inner case. Summary of the Invention

[0005] This disclosure relates to a photomask housing that includes movable holding features for holding a photomask positioned on a substrate.

[0006] The movable retaining feature allows the photomask to be securely positioned within the photomask housing, and is therefore less susceptible to vibration during handling or transport. By actuating this feature via a latch located in the door of the photomask housing, the photomask can be properly positioned within the housing without interference from the security feature before the housing is finally closed, and is secured when the housing is closed for transport, storage, or handling. Securely fastening the photomask limits or prevents damage to it, including vibration events, particle generation from contact between the photomask and the interior of the housing, and the like.

[0007] An embodiment of a photomask enclosure includes an internal portion comprising a cover and a base plate. The cover includes one or more cover photomask contacts coupled to the cover, and the base plate includes one or more movable photomask contacts, each of which is configured to move in a direction having a component perpendicular to a plane perpendicular to the base plate. The photomask enclosure includes an external portion comprising a dome and a door, wherein the door includes one or more movable posts and one or more latches configured to actuate the one or more movable posts. When the internal portion is positioned within the external portion and the door is secured to the dome, the one or more movable posts contact the one or more movable photomask contacts, causing the one or more movable photomask contacts to move toward the cover.

[0008] In one embodiment, each of the one or more movable photomask contacts is held in the substrate via a flexible component.

[0009] In an embodiment, when the flexible component is stationary, the movable photomask contact is at a distance greater than the thickness of the photomask to be stored in the photomask box from at least one of the one or more cover photomask contacts.

[0010] In one embodiment, each of the one or more latches is movable in a direction within the plane of the door.

[0011] In an embodiment, each of the one or more latches includes a sliding surface, rocker arm, or cam surface that contacts the surface of one or more movable posts.

[0012] In one embodiment, each of the one or more movable photomask contacts is configured to move in a direction perpendicular to the plane of the substrate.

[0013] In one embodiment, the box dome includes one or more protrusions that are positioned within the outer portion of the inner portion and contact the cover when the box door is fixed to the box dome.

[0014] In an embodiment, each of the cover contact elements comprises a polymer material.

[0015] In an embodiment, each of the movable photomask contacts comprises a polymer material.

[0016] In an embodiment, the one or more movable photomask contacts comprise three or more movable photomask contacts.

[0017] In one embodiment, the one or more movable photomask contacts include four movable photomask contacts.

[0018] In an embodiment, when the cover and the base plate are connected to each other, each of the one or more movable photomask contacts is opposite to one of the one or more cover photomask contacts.

[0019] In an embodiment, when the cover and the base plate are connected to each other, each of the one or more movable photomask contacts is offset from the one or more cover photomask contacts.

[0020] In an embodiment, each of the one or more movable photomask contacts is located at a position corresponding to a corner of the photomask.

[0021] In one embodiment, a method of moving a contact within a housing includes actuating one or more latches positioned within the housing door by attaching the housing door to a housing dome, and driving one or more movable posts via the one or more latches to extend in a direction having a component perpendicular to the plane of the housing door. Each of the one or more movable posts contacts a movable photomask contact positioned within the housing door and the housing dome, such that the movable photomask contact moves in a direction having a component perpendicular to the plane of the base plate and toward a cover positioned within the housing door and the housing dome.

[0022] In one embodiment, activating the one or more latches includes moving the one or more latches in one or more directions parallel to the plane of the door.

[0023] In one embodiment, driving the movable post via the one or more latches includes contacting one of the one or more movable posts with a cam surface on each of the one or more latches.

[0024] In one embodiment, the method further includes: placing the photomask on a base plate of the box; attaching the base plate of the box to a lid of the box; and placing the attached base plate and lid within a space inside the box dome. In another embodiment, the attached base plate and lid, when placed inside the box dome, contact one or more protrusions from the box dome.

[0025] In one embodiment, at least three movable posts are driven via one or more latches.

[0026] In one embodiment, the cover includes one or more cover photomask contacts, each of which is opposite to one of the movable photomask contacts.

[0027] In one embodiment, the cover includes one or more cover photomask contacts, each of which is offset from the movable photomask contact.

[0028] In one embodiment, a photomask housing includes an internal portion comprising a cover and a base plate. The cover includes one or more cover photomask contacts coupled to the cover, and the base plate includes one or more apertures. The photomask housing includes an external portion comprising a housing dome and a housing door. The housing door includes one or more movable posts and one or more latches configured to actuate the one or more movable posts. When the internal portion is positioned within the external portion and the housing door is secured to the housing dome, the one or more movable posts extend through the one or more apertures into the internal portion.

[0029] In one embodiment, each of the one or more latches is movable in a direction within the plane of the door.

[0030] In an embodiment, each of the one or more latches includes a sliding surface, rocker arm, or cam surface that contacts the surface of one or more of the movable posts.

[0031] In one embodiment, the box dome includes one or more protrusions that are positioned within the outer portion of the inner portion and contact the cover when the box door is fixed to the box dome.

[0032] In an embodiment, each of the cover contact elements comprises a polymer material.

[0033] In one embodiment, each of the movable columns comprises a polymer material.

[0034] In one embodiment, the one or more movable columns comprise three or more movable columns.

[0035] In one embodiment, the one or more movable columns comprise four movable columns.

[0036] In an embodiment, when the cover and the base plate are connected to each other, each of the one or more apertures is opposite to one of the one or more cover photomask contacts.

[0037] In one embodiment, when the cover and the base plate are connected to each other, each of the one or more apertures is offset from the one or more cover photomask contacts.

[0038] In an embodiment, each of the one or more apertures is located at a position corresponding to a corner of the photomask.

[0039] In one embodiment, the photomask box further includes a seal disposed in each of the apertures.

[0040] In one embodiment, a method of providing contacts within a housing includes attaching a housing door to a housing dome using a cam to activate one or more latches positioned within the housing door and driving one or more movable posts via the one or more latches or the cam to extend in a direction having a component perpendicular to the plane of the housing door. When driven via the one or more latches or the cam, each of the one or more movable posts extends through a base plate into an interior portion of the housing.

[0041] In one embodiment, activating the one or more latches involves moving the one or more latches in one or more directions parallel to the plane of the door.

[0042] In one embodiment, the movable post is driven via one or more latches, including a cam surface on each of the one or more latches contacting one of the one or more movable posts.

[0043] In an embodiment, the method further includes: placing a photomask on a base plate of the box; attaching the base plate of the box to a lid of the box; and placing the attached base plate and lid in a space within the dome of the box.

[0044] In one embodiment, the combined base plate and cover contact one or more protrusions from the box dome when placed inside the box dome.

[0045] In one embodiment, at least three movable posts are driven via one or more latches.

[0046] In one embodiment, the cover includes one or more cover photomask contacts, each of which is opposite to one of the movable posts.

[0047] In one embodiment, the cover includes one or more cover photomask contacts, each of which is offset from the movable post.

[0048] In an embodiment, the method further includes forming a seal between the base plate and the one or more movable posts. Attached Figure Description

[0049] This disclosure can be understood more fully by considering the following description of various illustrative embodiments in conjunction with the accompanying drawings.

[0050] Figure 1 A photomask box according to an embodiment is shown, including a partial cross-sectional view.

[0051] Figure 1A The presentation has been expanded to provide further details. Figure 1 A partial cross-sectional view.

[0052] Figure 2 A plan view of the base plate of the photomask box according to an embodiment is shown.

[0053] Figure 3 A cross-sectional view of a photomask box according to an embodiment is shown.

[0054] Figure 4 A flowchart illustrating a method for moving one or more photomask contacts according to an embodiment.

[0055] While this disclosure is adaptable to various modifications and alternatives, these have been illustrated by way of example in the drawings and will be described in detail. However, it should be understood that it is not intended to limit aspects of this disclosure to the specific illustrative embodiments described. Rather, it is intended to cover all modifications, equivalents, and alternatives falling within the spirit and scope of this disclosure. Detailed Implementation

[0056] The following detailed description should be read with reference to the accompanying drawings, in which similar elements in different drawings are numbered the same. The detailed description and drawings (not necessarily drawn to scale) depict illustrative embodiments and are not intended to limit the scope of the invention. The depicted illustrative embodiments are intended to be exemplary only. Selected features of any illustrative embodiment may be incorporated into additional embodiments unless clearly stated otherwise.

[0057] As used in this specification and the appended claims, the singular forms “a” and “the” include the plural references, unless otherwise clearly indicated. As used in this specification and the appended claims, the term “or” is generally used in its meaning as including “and / or”, unless otherwise clearly indicated.

[0058] The term "approximately" generally refers to a range of numbers that are considered equivalent to the stated value (e.g., having the same function or result). In many instances, the term "approximately" may include numbers rounded to the nearest significant number.

[0059] This disclosure relates to a photomask housing, and more specifically to a photomask housing comprising a movable photomask holding feature for holding the photomask.

[0060] Figure 1 The image mask box 100 according to an embodiment is shown, including a partial cross-sectional view, and Figure 1A The presentation has been expanded to provide further details. Figure 1 A partial cross-sectional view.

[0061] The photomask housing 100 includes an outer portion 122, which includes a housing dome 102 and a housing door 104. The photomask housing 100 also includes an inner portion 124, which includes a base plate 106 and a cover 108. The base plate 106 includes a movable photomask contact 110. The cover 108 includes a cover photomask contact 112. When the inner and outer portions of the photomask housing 100 are assembled and the housing door 104 is engaged with the housing dome 102, the movable photomask contact 110 is contacted by a movable post 114. The movable post 114 contacts an actuation mechanism 116, which is driven by a latch 118 of the housing door 104.

[0062] The dome 102 is part of the outer portion 122 of the photomask housing 100. The dome 102 may include one or more features configured to contact the cover 108 during assembly of the photomask housing 100. The dome 102 includes an internal space. The internal space may include a first internal space sized to accommodate the internal portion 124 of the photomask housing 100 and a second space configured to accommodate the door 104 at an end of the dome 102. The second space may be defined by a lip. The portion of the dome 102 surrounding the second space may include one or more slots or other openings configured to receive an end of a latch 118. The dome 102 may be made of a polymer material.

[0063] The door 104 is another part of the outer portion 122 of the photomask housing 100. The door 104 is configured to combine with the dome 102 to form the outer portion 122 of the photomask housing 100. The door 104 is sized to fit within the space of the dome 102, thereby closing one end of the dome 102. The door 104 includes a latch 118 and an actuation mechanism 116. The door 104 is further connected to a movable post 114. When the latch 118 is in the deployed position, the door 104 can be engaged with the dome 102 via one or more latches 118. When the latch 118 is not in the deployed position, the door 104 can be removed from the dome 102.

[0064] When the dome 102 and the door 104 are joined together, the dome 102 and the door 104 together define an internal space capable of accommodating the internal portion 124 of the photomask box 100, which includes the base plate 106 and the cover 108. The dome 102 and the door 104 may include features that project into the internal space and are configured to contact the base plate 106 or the cover 108 to hold the base plate 106 or the cover 108 in place when the photomask box 100 is assembled.

[0065] The base plate 106 is part of the interior portion 124 of the photomask housing 100. When the photomask housing 100 is assembled, the base plate 106 is supported by the housing door 104. The base plate 106 typically forms the lower portion of the interior portion 124 of the photomask housing 100. The base plate 106 can be configured such that a photomask can rest on the base plate 106. The base plate 106 can be made of metal or alloy. In an embodiment, the base plate 106 comprises aluminum. In an embodiment, the base plate 106 may include a photomask contact having a height less than the height of the movable photomask contact 110 when it extends.

[0066] The movable photomask contact 110 is movably connected to the base plate 106. The movable connection may be via a resilient material. Non-limiting examples of the movable connection include a metal spring formed in the base plate 106, a spring separate from but connected to the base plate 106, a polymer (e.g., rubber) bonded to the movable photomask, or any other such movable connection. The movable photomask contact 110 is configured to move in a direction having a component perpendicular to the plane of the base plate 106. In an embodiment, the movable photomask contact is configured to move in a direction perpendicular to the plane of the base plate 106. When the base plate 106 and the cover 108 are combined, movement of the movable photomask contact 110 causes the movable photomask contact to move toward or away from the cover 108. The movable photomask contact 110 may contain a material compatible with the photomask material. Compatible materials include materials that provide minimal or no particle generation when in contact with the photomask material and cannot scratch or otherwise damage the photomask material. In this embodiment, the compatible material is a polymer material. In this embodiment, the entire movable photomask contact 110 is made of the compatible material. In this embodiment, the movable photomask contact includes contact points containing the compatible material. Non-limiting examples of compatible materials include polyetheretherketone (PEEK), polyaryletherketone (PAEK), polyamide-imide (PAI), polyetherimide (PEI), and conductive polymers.

[0067] Cover 108 is another part of the interior portion 124 of the photomask housing 100. When the interior portion 124 is assembled from the base plate 106 and cover 108, cover 108 forms the upper portion of the interior portion 124 of the photomask housing 100. Cover 108 is configured to, for example, be coupled to the base plate 106 by having mating or mechanically compatible features. When cover 108 is coupled to the base plate 106, cover 108 and base plate 106 define an interior space configured to accommodate the photomask. Cover 108 may be made of metal or alloy (e.g., aluminum). Cover 108 may include one or more cover photomask contacts 112. In an embodiment, when the interior portion 124 of the photomask housing is placed within the housing dome 102 and the housing door 104, and the housing door 104 is coupled to the housing dome 102, cover 108 is contacted by the housing dome 102.

[0068] The cover photomask contact 112 is a contact of the cover 108, which is coupled to the inner portion 124 of the photomask housing 100. In an embodiment, the cover photomask contact 112 is secured to the inside of the cover such that it faces the base plate 106 when the inner portion 124 of the photomask housing 100 is assembled. In an embodiment, the cover photomask contact 112 is secured in place. Non-limiting examples of securing the cover photomask contact 112 include pressing, mechanical fastening, or as an integral part of the cover 108 (e.g., directly machined into the cover 108). In an embodiment, the cover photomask contact 112 is movable, for example, held by a resilient member similar to the movable photomask contact 110 coupled to the base plate 106. The cover photomask contact 112 can be positioned such that when the base plate and the cover are assembled, each cover photomask contact is opposite one of the movable photomask contacts 110. In an embodiment, the cover photomask contact 112 may be positioned such that it is offset from the movable photomask contact 110; that is, the cover photomask contact and the movable photomask contact 110 are not opposite each other. When the movable photomask contact 110 and the cover photomask contact 112 are offset from each other and the substrate and cover are assembled together, the cover photomask contact 112 is not above the movable photomask contact 110. In an embodiment, the photomask housing 100 includes at least three cover photomask contacts 112. In an embodiment, the photomask housing 100 includes four cover photomask contacts 112. In an embodiment, the photomask housing 100 includes eight cover photomask contacts 112. The cover photomask contact 112 includes a material compatible with the photomask material. The compatible material includes a material that provides minimal particle generation or no particle generation when in contact with the photomask material and cannot scratch or otherwise damage the photomask material. In an embodiment, the compatible material is a polymer material. The cover photomask contact 112 may include compatible material at least at contact points configured to contact the photomask when assembling the photomask housing 100. In embodiments, the cover photomask contact 112 is made entirely of a polymeric material suitable for contacting the photomask. Non-limiting examples of compatible materials include polyetheretherketone (PEEK), polyaryletherketone (PAEK), polyamide-imide (PAI), polyetherimide (PEI), and conductive polymers.

[0069] Movable posts 114 are one or more posts positioned on the housing door, configured to contact movable photomask contacts 110 when the photomask housing 100 is assembled and the housing door 104 is secured to the housing dome 102 via latch 118. At least when the housing door 104 is secured to the housing dome 102 via latch 118, the movable posts 114 protrude from the surface of the housing door 104 facing the base plate 106. When the housing door 104 is not secured to the housing dome 102, the movable posts 114 may be flush with the housing door 104, recessed into the housing door 104, or protrude from the housing door 104 by a smaller distance. When the photomask housing 100 is assembled, the movable posts 114 may move in a direction having a component in the vertical direction relative to the surface of the housing door 104 facing the base plate 106. In an embodiment, when the photomask housing 100 is assembled, the movable posts 114 may move in a vertical direction relative to the surface of the housing door 104 facing the base plate 106. The number of movable columns 114 can be the same as the number of movable photomask contacts 110.

[0070] In an alternative embodiment, the movable post 114 may have a length such that it extends through the base plate when the photomask housing 100 is assembled and the latch 118 is closed. In this embodiment, an aperture is formed in the base plate 106, for example, at the location of the movable photomask contact 110. The aperture may be an opening in which the movable photomask contact 110 is disposed in the base plate 106. In this embodiment, the movable post may contain a material compatible with the photomask material. The compatible material contains a material that provides minimal or no particle generation when in contact with the photomask material and cannot scratch or otherwise damage the photomask material. In an embodiment, the compatible material is a polymer material. In an embodiment, the movable post 114 is made of the compatible material. In an embodiment, the movable post 114 includes contact points containing the compatible material. Non-limiting examples of compatible materials include polyetheretherketone (PEEK), polyaryletherketone (PAEK), polyamide-imide (PAI), polyetherimide (PEI), and conductive polymers. In this embodiment, the aperture in the base plate 106 may include a seal configured to form a seal around the movable post 114 as it extends through the aperture. The seal may be, for example, an O-ring.

[0071] Actuation mechanism 116 includes one or more components positioned within door 104 and configured to drive a movable column based on movement of latch 118. Actuation mechanism 116 is any one or more mechanisms that convert movement of latch 118 into movement of movable column 114. In an embodiment, actuation mechanism 116 includes one or more sliding surfaces formed on latch 118. In an embodiment, actuation mechanism 116 includes one or more rocker arms. In an embodiment, actuation mechanism 116 includes one or more cam surfaces configured to contact latch 118 such that movement of latch 118 causes the actuation mechanism to slide, rock, or cam-move relative to movable column 114.

[0072] Latch 118 is a latch that secures the box door 104 to the box dome 102. Latch 118 may include a latch pin 120 configured to engage the box dome 102 in an extended position to secure the box door 104. In an embodiment, latch 118 further includes a rotary actuator (not shown) configured to extend and retract the latch pin 120. In an embodiment, the rotary actuator includes a cam, for example, Figure 3 The latch cam 308 is shown in the diagram and discussed below. In an embodiment, operation of a rotary actuator drives one or more movable pins 114. In an embodiment, operation of the rotary actuator can raise at least a portion of each latch pin. In the retracted position, the latch 118 can be fully contained within the housing door 104. The latch 118 may include one or more sliding surfaces that act as an actuation mechanism 116. The latch 118 may include one or more engagement features configured to interact with the actuation mechanism 116, such as one or more surfaces configured to contact a rocker arm, one or more cams or cam surfaces configured to contact a cam surface of the actuation mechanism 118, or other suitable features for contacting the actuation mechanism 116. The engagement features of the latch 118 can contact the actuation mechanism 116 when the latch 118 is in the extended position. In an embodiment, the housing door 104 includes a knob, switch, toggle, or other suitable control for moving the latch between the extended and retracted states. In one embodiment, the latch 118 is configured to unfold when the box door 104 is pressed against the box dome 102.

[0073] Figure 2 A plan view of a base plate 200 of a photomask housing according to an embodiment is shown. The base plate 200 includes a space 202 for a photomask 208 and movable photomask contacts 204. Each of the movable photomask contacts 204 is held via a flexible member 206. The photomask contacts 204 are positioned to correspond to a corner of the photomask when the photomask 208 is placed within the photomask space 202.

[0074] The space 202 of the photomask is the portion of the base plate in which the photomask can be placed. The photomask 208 is illustrated to show how the photomask 208 is fitted within the space 202 of the photomask. In an embodiment, the space 202 of the photomask may be defined by sidewalls 210. In an embodiment, the space 202 of the photomask may be the portion of the surface of the base plate surrounded by the cover when the cover is attached to the base plate 200. The shape of the space 202 of the photomask may be configured to conform to the shape of the photomask 208, for example, it is square for a square photomask or circular for a circular photomask. The space 202 of the photomask may be sized such that it is slightly larger than the photomask 208 to be placed therein.

[0075] Movable photomask contacts 204 are distributed along the substrate 200 within the space 202 of the photomask. In an embodiment, the movable photomask contacts are positioned in regions 212 of the space 202 of the photomask corresponding to the corners of the photomask 208. When the photomask 208 is placed within the space 202 of the photomask, it rests on the movable photomask contacts 204. The movable photomask contacts 204 may be made of a material suitable for contacting and holding the photomask 208 in place (e.g., a polymer material). The material of the movable photomask contacts 204 may be compatible with the material of the photomask 208 such that contact between them does not generate particles or cause any scratches or damage to the photomask 208. In an embodiment, the movable photomask contacts include polymer material at least at the points where they are configured to contact the photomask 208. When assembling a photomask housing including the substrate 200, the photomask 208 may be placed on the movable photomask contacts 204. The movable photomask contact 204 may have a standard position and a holding position, wherein the movable photomask contact 204 is configured to clamp the photomask 208 to another feature (e.g., a photomask contact on the lid of a photomask housing containing the base plate 200). The standard position can be obtained by the movable photomask contact 204 when the housing door is not secured to the dome of the photomask housing containing the base plate 200. In the standard position, when the photomask 208 is placed in the photomask space 202, the photomask 208 can rest on the movable photomask contact 204. In the standard position, when the housing door is not secured to the dome, a gap may exist between the upper surface of the photomask 208 and all features of the lid containing any photomask contacts on the lid.

[0076] The flexible component 206 holds the movable photomask contact 204 to the substrate 200. The flexible component 206 may, for example, be a metal spring, an elastic polymer material, or another suitable connection that binds the photomask contact 204 to the substrate 200, allowing the movable photomask contact 204 to move relative to the substrate 200. Figure 2As shown, the flexible component 206 may be a metal spring integrally formed with the base plate 200, such as a metal spring that defines, by removing material, a connection point (e.g., a groove or hole) in which a portion of the movable photomask contact 204 can be inserted. The flexible component 206 may comprise an elastic polymer, such as rubber. The flexible component 206 may comprise an elastic polymer integrally formed with the movable photomask contact 204, such as a post, tongue, or ring of elastic polymer extending from the movable photomask contact 204 to one or more fastening points on the base plate 200. The flexible component 206 may be elastic, such that it moves the movable photomask contact or holds the movable photomask contact in a standard position without other forces, and allows the movable photomask contact 204 to move into a holding position when a force is applied to the movable photomask contact 204 or the flexible component 206.

[0077] One or both of the movable photomask contact 204 or the flexible component 206 are included in the... Figure 2 The visible surfaces are those on the sides of the substrate 200 facing each other. This surface of one or both of the movable photomask contacts 204 or flexible members 206 can be contacted by movable posts included on the door of the photomask housing containing the substrate 200. Contact with the movable posts allows the movable photomask contact 204 to move in a direction having a component perpendicular to the plane of the substrate 200, such that the movable photomask contact 204 is moved toward the cover placed on the substrate. Movement of the movable photomask contact 204 causes the photomask 208 to be clamped between the photomask contacts on the cover. This clamping of the photomask 208 secures its position to limit or prevent photomask movement when the photomask housing containing the substrate 200 is fully assembled and the housing dome is secured to the housing door. The securing of the housing dome to the housing door can be via one or more latches in the housing door. These one or more latches can actuate the movable posts and drive them to contact one or both of the movable photomask contacts 204 or the flexible members 206. Thus, one or more latches can move the movable photomask contacts 204 between a standard position and a holding position.

[0078] Figure 3A cross-sectional view of a photomask housing according to an embodiment is shown. The photomask housing 300 includes an outer portion 302, which includes a housing dome 304 and a housing door 306. The housing door 306 includes a latch cam 308 and a latch arm 310. The latch arm 310 includes a contact point 312 that contacts the latch cam 308. The latch arm 310 also contacts a movable post 314 at an end 316 of the movable post 314. The movable post 314 contacts a movable photomask contact 318. The movable photomask contact 318 extends through a base plate 320. The base plate 320 and a cover 322 form an inner portion 324 of the photomask housing 300. The cover 322 includes a cover photomask contact 326. When the photomask housing 300 is assembled, the cover photomask contact 326 and the movable photomask contact 318 are configured to clamp the photomask 328 within the inner portion 324 of the photomask housing 300.

[0079] The dome 304 is part of the outer portion 302 of the photomask housing 300. The dome 304 defines an internal space capable of accommodating the inner portion 324 of the photomask housing 300. The door 306 is configured to engage with the dome 304 to form the outer portion 302 and completely define the internal space capable of accommodating the inner portion 324. The door 306 can be latched to the dome 304 by means of a latch including a latch cam 308 and two or more latch arms 310.

[0080] A latch cam 308 is a cam configured to actuate a latch arm 310 when the latch cam 308 rotates. The latch cam 308 may be coupled to a handle that allows a user to drive rotation of the latch cam 308. The latch cam 308 may include one or more cam surfaces 330 configured to engage contact points 312 formed on the latch arm 310 to move the latch arm 310. In an embodiment, the cam surface 330 drives the end of the latch arm 310 having the contact point 312 upward when it drives the latch arm 310 to an extended position.

[0081] The latch arm 310 is an arm configured to engage with the housing dome 304 when in the extended position to secure the housing door 306 to the housing dome 304. The latch arm 310 can also be in a retracted position, in which it is not engaged with the housing dome 304. The latch arm 310 can be driven to both the retracted and extended positions by operation of the latch cam 308. The contact point 312 is a point on the latch arm 310 that engages with the latch cam 308. The contact point 312 may be integrally formed with the latch arm 310, for example, from a protrusion of the latch arm 310. Engagement of the contact point 312 with the latch cam 308 can drive the latch arm 310 to move between the extended and retracted positions. The engagement of contact point 312 with latch cam 308 can further tilt latch arm 310, for example, by raising the end of latch arm 310 containing contact point 312 when latch cam 308 drives latch arm 310 to the extended position. Figure 3 As can be seen in the text.

[0082] Movable posts 314 are one or more posts positioned on the housing door, configured to contact movable photomask contacts 318 when the photomask housing 300 is assembled and the housing door 304 is secured to the housing dome 306 via a latch including a latch cam 308 and a latch arm 310. At least when the housing door 306 is secured to the housing dome 304 via a latch including a latch cam 308 and a latch arm 310, the movable posts 314 protrude from the surface of the housing door 306 facing the base plate 320. When the housing door 306 is not secured to the housing dome 304, the movable posts 314 may be flush with the housing door 306, recessed into the housing door 306, or protrude a smaller distance from the housing door 306. When the photomask housing 300 is assembled, the movable posts 314 may move in a direction having a component in the vertical direction relative to the surface of the housing door 306 facing the base plate 320. In this embodiment, when assembling the photomask housing 300, the movable posts 314 can move in a vertical direction relative to the surface of the housing door 306 facing the substrate 320. The number of movable posts 314 may be the same as the number of movable photomask contacts 318. In this embodiment, the vertical direction is perpendicular to the plane of the housing door 306.

[0083] The movable post 314 includes an end 316 opposite to the movable photomask contact 318. End 316 is contactable with the latch arm 310 such that at least a component of movement of the latch arm 310 is transmitted to the movable post 314. In an embodiment, the component of movement of the latch arm 310 transmitted to the movable post 314 is a component perpendicular to the plane of the door 306. When the latch cam 308 rotates to extend the latch arm 310 and subsequently raise the end of the latch arm including the contact point 312, the contact between end 316 and the latch arm 310 can drive the movable post 314 to change position based on the position of the latch arm 310, for example, driving the movable post toward the base plate 320.

[0084] A movable photomask contact 318 is movably connected to a substrate 320. The movable connection may be via a resilient material. Non-limiting examples of the movable connection include a metal spring formed in the substrate 320, a spring separate from but connected to the substrate 320, a polymer (e.g., rubber) bonded to the movable photomask, or any other such movable connection. The movable photomask contact 318 is configured to move in a direction having a component perpendicular to the plane of the substrate 320. In an embodiment, the movable photomask contact is configured to move in a direction perpendicular to the plane of the substrate 320. When the substrate 320 and the cover 322 are combined, movement of the movable photomask contact 318 causes the movable photomask contact to move toward or away from the cover 322. The movable photomask contact 318 may contain a material compatible with the photomask material. Compatible materials include materials that provide minimal or no particle generation when in contact with the photomask material and cannot scratch or otherwise damage the photomask material. In this embodiment, the compatible material is a polymer material. In this embodiment, the entire movable photomask contact 318 is made of the compatible material. In this embodiment, the movable photomask contact includes contact points containing the compatible material. Non-limiting examples of compatible materials include polyetheretherketone (PEEK), polyaryletherketone (PAEK), polyamide-imide (PAI), polyetherimide (PEI), and conductive polymers.

[0085] The base plate 320 is part of the interior portion 324 of the photomask housing 300. When the photomask housing 300 is assembled, the base plate 320 can be supported by the door 306. The base plate 320 typically forms the lower portion of the interior portion 324 of the photomask housing 300. The base plate 320 can be configured such that a photomask 328 can rest on the base plate 320. The base plate 320 can be made of metal or alloy. In an embodiment, the base plate 320 comprises aluminum. In an embodiment, the base plate 320 may include a photomask contact having a height less than the height of the movable photomask contact 318 when it extends.

[0086] Cover 322 is another part of the interior portion 324 of the photomask housing 300. When the interior portion 324 is assembled from the base plate 320 and cover 322, cover 322 forms the upper portion of the interior portion 324 of the photomask housing 300. Cover 322 is configured to, for example, be coupled to the base plate 320 by having mating or mechanically compatible features. When cover 322 is coupled to the base plate 320, cover 322 and base plate 320 define an interior space configured to accommodate photomask 328. Cover 322 may be made of metal or alloy (e.g., aluminum). Cover 322 may include one or more cover photomask contacts 326. In an embodiment, when the interior portion 324 of the photomask housing 300 is placed within the housing dome 304 and the housing door 306, and the housing door 306 is coupled to the housing dome 304, cover 322 is contacted by the housing dome 304.

[0087] The cover photomask contact 326 is a contact of the cover 322, which is attached to the inner portion 324 of the photomask housing 300. In an embodiment, the cover photomask contact 326 is secured to the inside of the cover such that it faces the base plate 320 when the inner portion 324 of the photomask housing 300 is assembled. In an embodiment, the cover photomask contact 326 is secured in place. Non-limiting examples of securing the cover photomask contact 326 include pressing, mechanical fastening, or as an integral part of the cover 322 (e.g., directly machined into the cover 322). In an embodiment, the cover photomask contact 326 is movable, for example, held by a resilient member similar to that of the movable photomask contact 326 attached to the base plate 320. The cover photomask contact 326 can be positioned such that when the base plate and the cover are assembled, each cover photomask contact is opposite one of the movable photomask contacts 318. In one embodiment, the cover photomask contact 326 may be positioned such that it is offset from the movable photomask contact 318; that is, the cover photomask contact 326 and the movable photomask contact 318 are not opposite each other. When the movable photomask contact 318 and the cover photomask contact 326 are offset from each other and the substrate and cover are assembled together, the cover photomask contact 326 is not above the movable photomask contact 318. In one embodiment, the photomask housing 300 includes at least three cover photomask contacts 326. In one embodiment, the photomask housing 300 includes four cover photomask contacts 326. In one embodiment, the photomask housing 300 includes eight cover photomask contacts 326. The cover photomask contact 326 comprises a material compatible with the photomask material. The compatible material comprises a material that provides minimal particle generation or no particle generation when in contact with the photomask material and cannot scratch or otherwise damage the photomask material. In one embodiment, the compatible material is a polymer material. The cover photomask contact 326 may include compatible material at least at contact points configured to contact the photomask during assembly of the photomask housing 300. In embodiments, the cover photomask contact 326 is made entirely of a polymer suitable for contacting the photomask. Non-limiting examples of compatible materials include polyetheretherketone (PEEK), polyaryletherketone (PAEK), polyamide-imide (PAI), polyetherimide (PEI), and conductive polymers.

[0088] The base plate 320 and the cover 322 are joined together to form the interior portion 324 of the photomask box 300. The interior portion 324 is completely positioned within the space of the box dome 304 and the box door 306.

[0089] The photomask 328 is a photomask, for example, a photolithographic mask. The photomask 328 can be positioned within the interior space of the interior portion 324 of the photomask housing 300. When the photomask 328 is positioned within the interior portion 324, the interior portion is positioned within the exterior portion 302, and the housing dome 304 and the housing door 306 are fastened to each other by a latch including a latch cam 308 and a latch arm 310.

[0090] Figure 4A flowchart illustrating a method for moving one or more photomask contacts according to an embodiment is provided. Method 400 includes activating one or more latches positioned in a housing door, thereby attaching the housing door to a housing dome 402. Method 400 further includes driving one or more movable posts to extend 404 in a direction having a component perpendicular to the plane of the housing door. Method 400 also includes contacting one or more movable photomask contacts 406 with a substrate via one or more movable posts.

[0091] At 402, one or more latches positioned in the housing door are activated, thereby attaching the housing door to the housing dome. The housing door and housing dome may form the outer portion of the photomask housing. The housing door and housing dome may define the interior space. The housing door and housing dome may be, for example, as described above and Figure 1 The dome 102 and door 104 are shown in the image. At 402, a latch is activated, causing it to move and secure the door to the dome in its unfolded position. The interior portion of the photomask, including a cover and base plate (e.g., cover 106 and base plate 108 or base plate 200), may be contained within the interior space. One or more latches can be automatically activated at 402 by attaching the door to the dome. One or more latches can be activated at 402 manually or mechanically via another device by operating a knob, slider, or other feature. Activation at 402 causes the latches to move. The movement of the latches caused by activation at 402 can create contact between the latches and one or more actuator mechanisms or direct contact with one or more movable posts.

[0092] At 404, one or more movable posts are driven to extend in a direction having a component perpendicular to the plane of the housing door. In an embodiment, the movable posts are driven by the activation of one or more latches at 402. The movable posts may be connected to the housing door. The movable posts may be positioned such that each movable post corresponds to a photomask contact contained in a base plate contained within a photomask housing, the base plate being a portion of the interior portion of the photomask housing within the interior space defined by the housing door and the housing dome. The movable posts may be driven via contact with one or more latches or with one or more actuators. The contact between the movable post and the latch may be at a sliding surface contained in each of the latches and the movable posts respectively. The one or more actuators may include, for example, rocker arms, cam surfaces, or sliding surfaces. In an embodiment, one or more movable posts are driven by contact between the movable posts and a sliding surface contained on the latches. The sliding surface may have a wedge shape. The wedge shape of the sliding surface may drive the movement of the movable posts in a direction having a component perpendicular to the plane of the housing door. The direction having a component perpendicular to the plane of the housing door can be the direction toward the base plate of the inner portion of the photomask housing when it is assembled. In an embodiment, the rocker arm is actuated by a latch, and the rocker arm drives one or more movable posts. In an embodiment, the cam surface of each actuator contacts the latch, wherein movement of the latch causes cam movement, which causes the actuator to move, thereby driving one or more movable posts to extend in a direction having a component perpendicular to the plane of the housing door.

[0093] In one embodiment, one or more movable photomask contacts 406 are contacted with the substrate via one or more movable posts. Due to the contact at 406, one or more movable photomask contacts in the substrate can be moved toward a cover, which is part of the interior portion of the photomask housing. When one or more movable contacts are contacted by the movable posts at 406, the movable photomask contacts can be moved toward the cover bonded to the substrate. The movement of the movable photomask contacts can be positioned such that the photomask positioned between the cover and the substrate is clamped between the movable photomask contacts and the photomask contacts on the cover bonded to the substrate. This clamping allows for the securing of the photomask when the cover and substrate are joined, while the combined photomask cover and substrate are positioned within the housing door and housing dome, and the housing door is simultaneously latched to the housing dome. The photomask contacts can be held in this position by the movable posts when the housing door is held fastened to the housing dome via a latch actuated at 402. In one embodiment, the movement of one or more movable photomask contacts can be the movement of each of the movable photomask contacts toward a photomask contact on the cover opposite to each of the one or more movable photomask contacts. In another embodiment, the movement of one or more movable photomask contacts toward the cover, and the photomask contacts included on the cover are offset from the movable photomask contacts on the base plate such that the corresponding photomask contacts on the cover and the base plate are not opposite each other.

[0094] In an embodiment, step 406 can be replaced by extending a movable post through a hole 408 in the base plate. In this embodiment, the base plate includes a hole for each of one or more movable posts. When at 404, one or more movable posts are driven to extend in a direction having a component perpendicular to the plane of the door, the movable posts are driven to pass through the hole. In an embodiment, as the movable post extends through the hole, it can be pushed through a seal configured to form a seal at the hole. As a non-limiting example, the seal may be an O-ring. In an embodiment, the movable post may include a contact surface made of a compatible material.

[0095] aspect:

[0096] It should be understood that any aspect from 1 to 14 can be combined with any aspect from 15 to 22. It should be understood that any aspect from 23 to 34 can be combined with any aspect from 35 to 43.

[0097] Aspect 1. A photomask box, comprising:

[0098] An internal portion comprising a cover and a base plate, wherein the cover includes one or more cover photomask contacts coupled to the cover, and the base plate includes one or more movable photomask contacts, each of which is configured to move in a direction having a component perpendicular to a plane of the base plate; and

[0099] The external portion includes a box dome and a box door, wherein the box door includes one or more movable posts and one or more latches configured to actuate the one or more movable posts.

[0100] When the inner portion is positioned within the outer portion and the box door is fixed to the box dome, the one or more movable pillars contact the one or more movable photomask contacts, causing the one or more movable photomask contacts to be moved toward the cover.

[0101] Aspect 2. The photomask box according to aspect 1, wherein each of the one or more movable photomask contacts is held in the base plate via a flexible member.

[0102] Aspect 3. The photomask box according to aspect 2, wherein when the flexible component is stationary, the movable photomask contact is at a distance greater than the thickness of the photomask to be stored in the photomask box from at least one of the one or more cover photomask contacts.

[0103] Aspect 4. The photomask box according to any one of aspects 1 to 3, wherein each of the one or more latches is movable in a direction in the plane of the box door.

[0104] Aspect 5. The photomask box according to any one of aspects 1 to 4, wherein each of the one or more latches includes a surface that contacts the surface of one or more of the movable posts.

[0105] Aspect 6. The photomask box according to any one of aspects 1 to 5, wherein the one or more movable photomask contacts are each configured to be movable in a direction perpendicular to the plane of the substrate.

[0106] Aspect 7. The photomask box according to any one of aspects 1 to 6, wherein the box dome includes one or more protrusions that are positioned within the outer portion of the inner portion and contact the cover when the box door is fixed to the box dome.

[0107] Aspect 8. The photomask box according to any one of aspects 1 to 7, wherein each of the photomask contacts comprises a polymer material.

[0108] Aspect 9. The photomask box according to any one of aspects 1 to 8, wherein each of the movable photomask contacts comprises a polymer material.

[0109] Aspect 10. The photomask box according to any one of aspects 1 to 9, wherein the one or more movable photomask contacts comprise three or more movable photomask contacts.

[0110] Aspect 11. The photomask box according to any one of aspects 1 to 10, wherein the one or more movable photomask contacts comprise four movable photomask contacts.

[0111] Aspect 12. The photomask box according to any one of aspects 1 to 11, wherein when the cover is engaged with the base plate, each of the one or more movable photomask contacts is opposite to one of the one or more cover photomask contacts.

[0112] Aspect 13. The photomask box according to any one of aspects 1 to 12, wherein when the cover is engaged with the base plate, each of the one or more movable photomask contacts is offset from the one or more cover photomask contacts.

[0113] Aspect 14. The photomask box according to any one of aspects 1 to 13, wherein each of the one or more movable photomask contacts is located at a position corresponding to a corner of the photomask.

[0114] Aspect 15. A method of moving a contact within a box, comprising:

[0115] Activating one or more latches positioned within the box door by attaching the box door to the box dome; and

[0116] One or more movable posts are driven via the one or more latches to extend in a direction having a component perpendicular to the plane of the box door.

[0117] Each of the one or more movable pillars contacts a movable photomask contact located on a base plate within the box door and the box dome, such that the movable photomask contact moves in a direction having a component perpendicular to the plane of the base plate and toward a cover located within the box door and the box dome.

[0118] Aspect 16. The method according to aspect 15, wherein activating the one or more latches includes moving the one or more latches in one or more directions parallel to the plane of the box door.

[0119] Aspect 17. The method according to any one of aspects 15 to 16, wherein driving the movable post via the one or more latches includes contacting one of the one or more movable posts with a cam surface on each of the one or more latches.

[0120] Aspect 18. The method according to any one of aspects 15 to 17, further comprising: placing a photomask on a base plate of the box; attaching the base plate of the box to a cover of the box; and placing the attached base plate and cover in a space within the dome of the box.

[0121] Aspect 19. The method according to aspect 18, wherein the coupled base plate and cover contact one or more protrusions from the box dome when placed inside the box dome.

[0122] Aspect 20. The method according to any one of aspects 15 to 19, wherein at least three movable posts are driven via the one or more latches.

[0123] Aspect 21. The method according to any one of aspects 15 to 20, wherein the cover comprises one or more cover photomask contacts, each of the cover photomask contacts being opposite to one of the movable photomask contacts.

[0124] Aspect 22. The method according to any one of aspects 15 to 21, wherein the cover comprises one or more cover photomask contacts, each of which is offset from the movable photomask contact.

[0125] Aspect 23. A photomask box, comprising:

[0126] The internal portion includes a cover and a base plate, wherein the cover includes one or more cover photomask contacts coupled to the cover and the base plate includes one or more apertures; and

[0127] The external portion includes a box dome and a box door, wherein the box door includes one or more movable posts and one or more latches configured to actuate the one or more movable posts.

[0128] When the inner portion is positioned within the outer portion and the box door is fixed to the box dome, the one or more movable columns extend through the one or more openings into the inner portion.

[0129] Aspect 24. The photomask box according to aspect 23, wherein each of the one or more latches is movable in a direction in the plane of the box door.

[0130] Aspect 25. The photomask box according to any one of aspects 23 to 24, wherein each of the one or more latches includes a sliding surface, rocker arm, or cam surface that contacts the surface of one or more movable posts.

[0131] Aspect 26. The photomask box according to any one of aspects 23 to 25, wherein the box dome includes one or more protrusions that are positioned within the outer portion of the inner portion and contact the cover when the box door is fixed to the box dome.

[0132] Aspect 27. The photomask box according to any one of aspects 23 to 26, wherein each of the cover photomask contacts comprises a polymer material.

[0133] Aspect 28. The photomask box according to any one of aspects 23 to 27, wherein each of the movable columns comprises a polymer material.

[0134] Aspect 29. The photomask box according to any one of aspects 23 to 28, wherein the one or more movable pillars comprises three or more movable pillars.

[0135] Aspect 30. The photomask box according to any one of aspects 23 to 29, wherein the one or more movable pillars comprises four movable pillars.

[0136] Aspect 31. The photomask box according to any one of aspects 23 to 30, wherein when the cover and the base plate are connected to each other, each of the one or more apertures is opposite to one of the one or more cover photomask contacts.

[0137] Aspect 32. The photomask box according to any one of aspects 23 to 31, wherein when the cover and the base plate are connected to each other, each of the one or more apertures is offset from the one or more cover photomask contacts.

[0138] Aspect 33. The photomask box according to any one of aspects 23 to 32, wherein each of the one or more apertures is located at a position corresponding to a corner of the photomask.

[0139] Aspect 34. The photomask box according to any one of aspects 23 to 33, further comprising a seal disposed in each of the apertures.

[0140] Aspect 35. A method of providing a contact within a box, comprising:

[0141] One or more latches positioned within the box door are activated by attaching the box door to the box dome using a cam; and

[0142] One or more movable columns are driven via the one or more latches or the cam to extend in a direction having a component perpendicular to the plane of the box door.

[0143] When driven by the one or more latches or the cam, each of the one or more movable columns extends through the base plate into the interior portion of the box.

[0144] Aspect 36. The method according to aspect 35, wherein activating the one or more latches includes moving the one or more latches in one or more directions parallel to the plane of the box door.

[0145] Aspect 37. The method according to any one of aspects 35 to 36, wherein driving the movable post via the one or more latches includes contacting one of the one or more movable posts with a cam surface on each of the one or more latches.

[0146] Aspect 38. The method according to any one of aspects 35 to 37, further comprising: placing a photomask on a base plate of the box; attaching the base plate of the box to a cover of the box; and placing the attached base plate and cover in a space within the dome of the box.

[0147] Aspect 39. The method according to aspect 38, wherein the coupled base plate and cover contact one or more protrusions from the box dome when placed inside the box dome.

[0148] Aspect 40. The method according to any one of aspects 35 to 39, wherein at least three movable posts are driven via the one or more latches.

[0149] Aspect 41. The method according to any one of aspects 35 to 40, wherein the cover comprises one or more cover photomask contacts, each of the cover photomask contacts being opposite one of the movable posts.

[0150] Aspect 42. The method according to any one of aspects 35 to 40, wherein the cover comprises one or more cover photomask contacts, each of which is offset from the movable post.

[0151] Aspect 43. The method according to any one of aspects 35 to 42, further comprising forming a seal between the base plate and the one or more movable posts.

[0152] The examples disclosed in this application are to be regarded as illustrative rather than limiting in all respects. The scope of the invention is indicated by the appended claims rather than by the foregoing description; and all changes in the meaning and scope of the equivalents of the claims are intended to be covered therein.

Claims

1. A photomask box, comprising: The internal portion includes a cover and a base plate, wherein the cover includes one or more cover photomask contacts coupled to the cover, and the base plate includes one or more movable photomask contacts, each of which is configured to move in a direction having a component perpendicular to the plane of the base plate; and The external portion includes a box dome and a box door, wherein the box door includes one or more movable posts and one or more latches configured to actuate the one or more movable posts. When the inner portion is positioned within the outer portion and the box door is fixed to the box dome, the one or more movable pillars contact the one or more movable photomask contacts, causing the one or more movable photomask contacts to move toward the cover. The one or more cover photomask contacts and the one or more movable photomask contacts securely position the photomask in the photomask housing.

2. The photomask box according to claim 1, wherein each of the one or more movable photomask contacts is held in the base plate via a flexible member.

3. The photomask box according to claim 2, wherein when the flexible component is stationary, the movable photomask contact is at a distance greater than the thickness of the photomask to be stored in the photomask box from at least one of the one or more cover photomask contacts.

4. The photomask box according to claim 1, wherein each of the one or more latches is movable in a direction in the plane of the box door.

5. The photomask box of claim 1, wherein each of the one or more latches includes a surface that contacts the surface of one of the one or more movable posts.

6. The photomask housing according to claim 1, wherein each of the one or more movable photomask contacts is configured to move in a direction perpendicular to the plane of the substrate.

7. The photomask box according to claim 1, wherein the box dome includes one or more protrusions, the one or more protrusions contacting the cover when the inner portion is positioned within the outer portion and the box door is fixed to the box dome.

8. The photomask housing of claim 1, wherein each of the cover photomask contacts and each of the movable photomask contacts comprises a polymer material.

9. The photomask box according to claim 1, wherein the one or more movable photomask contacts comprise four movable photomask contacts.

10. The photomask box of claim 1, wherein when the cover engages the substrate, each of the one or more movable photomask contacts is opposite to one of the one or more cover photomask contacts.

11. The photomask box of claim 1, wherein each of the one or more movable photomask contacts is offset from the one or more cover photomask contacts when the cover engages the substrate.

12. A method for moving a contact within a box, comprising: One or more latches positioned in the box door are activated by attaching the box door to the box dome. and One or more movable posts are driven via the one or more latches to extend in a direction having a component perpendicular to the plane of the box door. Each of the one or more movable pillars contacts a movable photomask contact member positioned within the box door and the box dome, such that the movable photomask contact member moves in a direction toward a cover positioned within the box door and the box dome. The movable photomask contact securely positions the photomask within the photomask housing.

13. The method of claim 12, wherein activating the one or more latches comprises moving the one or more latches in one or more directions parallel to the plane of the door.

14. The method of claim 12, wherein driving the movable post via the one or more latches includes contacting one of the one or more movable posts with a cam surface on each of the one or more latches.

15. The method of claim 12, further comprising: Place the photomask on the base plate of the box; The base plate of the box is attached to the lid of the box; The combined base plate and cover are placed in the space inside the dome of the box.

16. The method of claim 15, wherein the coupled base plate and cover contact one or more protrusions from the box dome when placed inside the box dome.

17. The method of claim 12, wherein at least three movable posts are driven via the one or more latches.

18. The method of claim 12, wherein the cover comprises one or more cover photomask contacts, each of the cover photomask contacts being opposite to one of the movable photomask contacts.

19. The method of claim 12, wherein the cover comprises one or more cover photomask contacts, each of which is offset from the movable photomask contact.

20. A photomask box, comprising: The internal portion includes a cover and a base plate, wherein the cover includes one or more cover photomask contacts coupled to the cover and the base plate includes one or more apertures; and The external portion includes a box dome and a box door, wherein the box door includes one or more movable posts and one or more latches configured to actuate the one or more movable posts. When the inner portion is positioned within the outer portion and the box door is fixed to the box dome, the one or more movable posts extend through the one or more openings into the inner portion. The one or more cover contact members securely position the photomask in the photomask housing.

21. The photomask box of claim 20, further comprising a seal disposed in each of the apertures.

22. A method of providing a contact within a housing, comprising: One or more latches positioned in the box door are activated by attaching the box door to the box dome using a cam. and One or more movable columns are driven via the one or more latches or the cam to extend in a direction having a component perpendicular to the plane of the box door. When driven via the one or more latches or the cam, each of the one or more movable columns extends through the base plate into the interior portion of the box. The contact element securely positions the photomask in the photomask housing.

Images