Molecular pump flipping device and molecular pump testing platform

Abstract

This invention provides a molecular pump flipping device and a molecular pump testing platform. The flipping device includes a base, a mounting frame, a first lifting member, and a second lifting member. The base has multiple parallel slides. The mounting frame is used to mount and fix the molecular pump. A first hinge shaft and a second hinge shaft are fixedly mounted on the mounting frame. Both the first and second hinge shafts are horizontally arranged and parallel to each other. The bottom of the first lifting member is slidably connected to the slides, and the top of the first lifting member can move up and down and is hinged to the first hinge shaft. The bottom of the second lifting member is slidably connected to the slides, and the top of the second lifting member can move up and down and is hinged to the second hinge shaft. By controlling the movement of the first and second lifting members, the relative positions of the first and second hinge shafts can be controlled, thereby stably and flexibly driving the molecular pump to flip and move up and down, ensuring the safety of the molecular pump during the flipping process.

Description

Technical Field

[0001] This invention relates to the technical field of grease-lubricated molecular pump testing equipment, specifically to a molecular pump flipping device and a molecular pump testing platform. Background Technology

[0002] A molecular pump is a commonly used vacuum generating device. It has a chamber inside, in which a high-speed motor is installed. When working, the high-speed rotating rotor compresses the gas molecules in the chamber and gives them a directional velocity to be discharged through the exhaust port. In recent years, molecular pumps have been widely used in the industrial field.

[0003] In the production process of molecular pumps, molecular pump testing is a critical step in all processes and an important means of ensuring product quality. Because grease-lubricated molecular pumps can be installed at any angle during use, their position needs to be adjusted by flipping them during testing.

[0004] In existing technologies, the rotation of molecular pumps is typically achieved through motor drive. However, molecular pumps generally weigh around 50 kg, which is quite heavy, necessitating the use of high-torque, high-performance, and expensive motors. Furthermore, when the tested molecular pump stops at a certain angle, the motor shaft experiences significant stress, compromising the stability of the pump during testing and posing a safety hazard. Summary of the Invention

[0005] Therefore, in order to achieve more flexible and stable flipping during the testing of molecular pumps, reduce costs, and improve safety during the testing process, this invention provides a molecular pump flipping device and a molecular pump testing platform.

[0006] In a first aspect, the present invention provides a molecular pump reversal device, comprising:

[0007] The base has multiple parallel sliding tracks on it;

[0008] A mounting bracket is disposed above the base for mounting and fixing the molecular pump. A first hinge shaft and a second hinge shaft are fixedly disposed on the mounting bracket. The first hinge shaft and the second hinge shaft are both horizontally disposed and parallel to each other. The projections of the first hinge shaft and the second hinge shaft on the base are perpendicular to the extension direction of the slide.

[0009] The first lifting component has at least two parts located on both sides of the mounting bracket. The bottom of the first lifting component is slidably connected to the slide rail, and the top of the first lifting component can perform lifting and lowering actions and is hinged to the first hinge shaft.

[0010] The second lifting component is provided in at least two and located on both sides of the mounting bracket. The bottom of the second lifting component is slidably connected to the slide rail, and the top of the second lifting component can be lifted and is hinged to the second hinge shaft.

[0011] Optionally, both the first lifting component and the second lifting component are hydraulic cylinders.

[0012] Optionally, the slide rails are provided in four sections, with the first lifting member and the second lifting member located on different slide rails.

[0013] Optionally, the flipping device further includes a fixing plate connected between the first hinge shaft and the second hinge shaft.

[0014] Optionally, a first driving member is provided between the first lifting member and the base, and the first driving member is used to drive the first lifting member to move along the slide; a second driving member is provided between the second lifting member and the base, and the second driving member is used to drive the second lifting member to move along the slide.

[0015] Optionally, the first driving component includes: a first lead screw rotatably connected to the base, a first slider threadedly connected to the first lead screw, and a first motor driving the first lead screw to rotate, with the bottom of the first lifting component connected to the first slider; and / or, the second driving component includes: a second lead screw rotatably connected to the base, a second slider threadedly connected to the second lead screw, and a second motor driving the second lead screw to rotate, with the bottom of the second lifting component connected to the second slider.

[0016] Optionally, the bottom of the first lifting member is provided with a first slide platform, the first slide platform is slidably connected to the slide rail, and the first slider is fixedly connected to the first slide platform; the bottom of the second lifting member is provided with a second slide platform, the second slide platform is slidably connected to the slide rail, and the second slider is fixedly connected to the second slide platform.

[0017] Optionally, the mounting bracket is an annular shape with dimensions adapted to the molecular pump interface, and the mounting bracket has connection holes that mate with bolt holes at the end of the molecular pump interface.

[0018] Optionally, the end of the base is provided with a slope, and the end of the slope away from the base is inclined downward.

[0019] On the other hand, the present invention also provides a molecular pump testing platform, which includes:

[0020] The aforementioned flipping device;

[0021] The test shroud is connected to the mounting bracket and communicates with the molecular pump via the mounting bracket.

[0022] A vacuum gauge is used to detect the vacuum level inside the test chamber.

[0023] A flow meter is used to detect the airflow rate through the test chamber;

[0024] Temperature sensor used to detect the temperature of the molecular pump during operation;

[0025] Displacement sensors are used to detect the tilt angle and height of the molecular pump.

[0026] The technical solution of this invention has the following advantages:

[0027] 1. The molecular pump flipping device provided by the present invention can control the relative height of the first hinge shaft and the second hinge shaft by controlling the extension and retraction of the top of the first lifting member and the second lifting member. Since the distance between the first hinge shaft and the second hinge shaft is fixed, the first lifting member or the second lifting member will slide on the base accordingly. After the molecular pump is fixed on the mounting frame, the lifting and retraction of the top of the first lifting member or the second lifting member can drive the mounting frame and the molecular pump to flip. Furthermore, controlling the synchronous extension and retraction of the first lifting member and the second lifting member can also drive the molecular pump to lift and retract, thereby enabling the molecular pump to flip more flexibly. The weight of the molecular pump is distributed on the first lifting member and the second lifting member, resulting in better stability and ensuring safety during the flipping process.

[0028] 2. The molecular pump flipping device provided by the present invention has a fixed plate that can strengthen the structural strength of the first hinge shaft and the second hinge shaft, disperse the molecular pump gravity on the first hinge shaft and the second hinge shaft, and make the first hinge shaft and the second hinge shaft less likely to bend due to long-term bearing of gravity.

[0029] 3. The molecular pump flipping device provided by the present invention, through the setting of the first driving member and the second driving member, can independently drive the first lifting member and the second lifting member to slide, ensuring the smooth sliding of the first lifting member and the second lifting member on the base, and is not prone to the phenomenon of mechanism jamming.

[0030] 4. The molecular pump testing platform provided by this invention can flexibly place the molecular pump at different angles for testing by using a flipping device. By integrating a vacuum gauge, flow meter, temperature sensor and displacement sensor, it can simultaneously collect key operating indicators such as temperature, flow rate and vacuum degree of the molecular pump at different angles, thereby improving the testing efficiency of the molecular pump. Attached Figure Description

[0031] To more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0032] Figure 1 This is a schematic diagram of the structure of the flipping device provided in the first embodiment of the present invention;

[0033] Figure 2 This is a schematic diagram illustrating the structure of the molecular pump after it has been flipped.

[0034] Figure 3 A partial view showing the connection relationship between the first lifting member and the first driving member, and between the second lifting member and the second driving member;

[0035] Figure 4 This is a partial cross-sectional view showing the structure of the first drive component;

[0036] Figure 5 This is a schematic diagram of the test platform provided in the second embodiment of the present invention.

[0037] Explanation of reference numerals in the attached figures:

[0038] 1. Base; 2. Mounting bracket; 3. First hinge shaft; 4. Second hinge shaft; 5. First lifting component; 6. Second lifting component; 7. First driving component; 8. Second driving component; 9. Connecting hole; 10. Fixing plate; 11. First slide table; 12. Second slide table; 13. Fixing bracket; 14. Guide rail; 15. First lead screw; 16. First slider; 17. First motor; 18. Slope; 19. Test cover; 20. Molecular pump. Detailed Implementation

[0039] The technical solution of the present invention will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0040] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing the invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0041] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0042] Furthermore, the technical features involved in the different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0043] Example 1

[0044] This embodiment provides a molecular pump flipping device, referring to... Figure 1 It includes: a base 1, a mounting bracket 2, a first lifting component 5, and a second lifting component 6.

[0045] Reference Figure 1 The base 1 has multiple parallel slides. A mounting bracket 2 is located above the base 1 and is used to fix the molecular pump 20. A first hinge shaft 3 and a second hinge shaft 4 are fixedly mounted on the mounting bracket 2. Both the first hinge shaft 3 and the second hinge shaft 4 are horizontally positioned. The axes of the first hinge shaft 3 and the second hinge shaft 4 are parallel to each other and spaced apart on opposite sides of the mounting bracket 2. The projections of the first hinge shaft 3 and the second hinge shaft 4 onto the base 1 are perpendicular to the extension direction of the slides. Two first lifting members 5 are provided, located on opposite sides of the first hinge shaft 3. The bottom of each first lifting member 5 is slidably connected to the slide, and the top of each first lifting member 5 can move up and down and is hinged to the first hinge shaft 3. Two second lifting members 6 are also provided, located on opposite sides of the second hinge shaft 4. The bottom of each second lifting member 6 is also slidably connected to the slide, and the top of each second lifting member 6 can move up and down and is hinged to the second hinge shaft 4.

[0046] Combined Figure 2As shown, the aforementioned flipping device, after fixing the molecular pump 20 to the mounting frame 2, controls the relative height of the tops of the first lifting member 5 and the second lifting member 6, and controls the relative position changes of the first hinge shaft 3 and the second hinge shaft 4 by sliding the first lifting member 5 and the second lifting member 6 on the base 1, thereby achieving the purpose of flipping the molecular pump 20 to different angles. For example, lowering the top height of the first lifting member 5 will cause the first hinge shaft 3 to move downwards. Since the distance between the first hinge shaft 3 and the second hinge shaft 4 is fixed, it will drive the distance between the first lifting member 5 and the second lifting member 6 to shorten, thereby causing the mounting frame 2 and the molecular pump 20 to flip. Conversely, moving the top of the first lifting member 5 upwards will drive the mounting frame 2 and the molecular pump 20 to flip in the other direction. Similarly, keeping the position of the first lifting member 5 fixed and adjusting the top height of the second lifting member 6 can also drive the mounting frame 2 and the molecular pump 20 to flip. Of course, simultaneously adjusting the extension and retraction of the first lifting member 5 and the second lifting member 6 in different directions can also similarly drive the mounting frame 2 and the molecular pump 20 to flip. Compared to using a motor-driven method to rotate the molecular pump 20, the first lifting component 5 and the second lifting component 6 are always subjected to vertical pressure, which makes the rotation process safer, the overall structure simple and reliable, and also has the advantage of low cost.

[0047] Furthermore, by simultaneously controlling the lifting of the first lifting component 5 and the second lifting component 6 in the same direction, the height of the molecular pump 20 can also be adjusted. This not only makes it convenient for operators to adjust the height of the molecular pump 20 according to their needs, but also facilitates the loading and unloading of the mounting frame 2 and the molecular pump 20, thus improving the flexibility of adjusting the position of the molecular pump 20 during the testing process.

[0048] In this embodiment, the arrangement of two first lifting members 5 and two second lifting members 6 provides a more stable and uniform support effect for both sides of the mounting frame 2, thereby improving the load capacity of the flipping device. Of course, the number of first lifting members 5 and second lifting members 6 is not limited to two; more can be set, and the number of first lifting members 5 and second lifting members 6 can also be unequal, as long as the mounting frame 2 and the molecular pump 20 are subjected to uniform force.

[0049] In this embodiment, both the first lifting component 5 and the second lifting component 6 are hydraulic cylinders. The hydraulic cylinders have a strong load capacity and can withstand the heavy molecular pump 20. By controlling the inlet and outlet flow of each hydraulic cylinder through a solenoid valve, the hydraulic cylinders can stay at different extension and retraction positions, which can keep the molecular pump 20 and the test cover 19 at different tilt angles. Furthermore, the rotational speed of the molecular pump can be adjusted by simply editing the control program to adjust the inlet or outlet flow of the hydraulic cylinder, without the need for structural replacement, thus saving replacement costs.

[0050] As an alternative implementation, the first lifting member 5 and the second lifting member 6 may also be cylinders, servo electric cylinders, fork-type lifting structures, or other devices capable of lifting in the vertical direction.

[0051] In this embodiment, four slides are provided. The first lifting member 5 and the second lifting member 6 are respectively arranged on different slides. The first lifting member 5 and the second lifting member 6 located on the same side are arranged at intervals in the direction perpendicular to the extension of the slide, so that the first lifting member 5 and the second lifting member 6 will not interfere with each other in position during the relative sliding process.

[0052] Specifically, in this embodiment, the slide includes a fixed frame 13 and two guide rails 14 fixed at intervals on the fixed frame 13. The bottom of the first lifting member 5 is provided with a first slide 11, and the bottom of the second lifting member 6 is provided with a second slide 12. The first slide 11 and the second slide 12 are slidably connected to the corresponding guide rails 14 to realize the sliding of the first lifting member 5 and the second lifting member 6.

[0053] As an alternative implementation, the slide can also be formed by creating a groove in the base 1, which can ensure that the first lifting member 5 and the second lifting member 6 can slide smoothly on the base 1.

[0054] Furthermore, referring to Figure 1 The flipping device also includes two fixing plates 10, which are distributed along the axial direction of the first hinge shaft 3 on both sides of the mounting frame 2. The fixing plates 10 are fixed between the first hinge shaft 3 and the second hinge shaft 4. The fixing plates 10 on both sides can strengthen the structural strength of the first hinge shaft 3 and the second hinge shaft 4, and disperse the gravity of the molecular pump 20 borne by the first hinge shaft 3 and the second hinge shaft 4, so that the first hinge shaft 3 and the second hinge shaft 4 are not prone to bending due to long-term bearing of gravity, thus ensuring good overall structural strength of the flipping device.

[0055] Although the extension and retraction of the first lifting member 5 and the second lifting member 6 can drive them to move on the slide rail independently, under heavy loads, the movement of the first lifting member 5 and the second lifting member 6 is prone to becoming uneven or jammed. Therefore, to ensure smooth sliding of the first lifting member 5 and the second lifting member 6, the tilting device also includes a first driving member 7 and a second driving member 8. The first driving member 7 is connected between the first lifting member 5 and the base 1, and is used to drive the first lifting member 5 to slide on the slide rail. The second driving member 8 is connected between the second lifting member 6 and the base 1, and is used to drive the second lifting member 6 to slide on the slide rail.

[0056] Reference Figure 1In this embodiment, a first driving member 7 is provided below each first lifting member 5, and a second driving member 8 is provided below each second lifting member 6. The movement of the two first driving members 7 and the two second lifting members 6 on the same side is controlled by simultaneously controlling the two first driving members 7 and the two second driving members 8.

[0057] As an alternative implementation, the bottoms of the two first lifting members 5 can also be connected to a first driving member 7, and the two second lifting members 6 can also be connected to a second driving member 8. By controlling the first driving member 7 and the second driving member 8 separately, the two first lifting members 5 and the two second lifting members 6 can be driven to slide.

[0058] Reference Figure 4 In this embodiment, the first driving component 7 includes a first lead screw 15, a first slider 16, and a first motor 17. The first lead screw 15 is arranged along a first direction and rotatably connected to the corresponding fixed frame 13. The first motor 17 is installed on the outside of the fixed frame 13 and connected to the first lead screw 15. The first slider 16 is threadedly connected to the first lead screw 15, and the first slide table 11 is fixedly connected to the first slider 16. By driving the first lead screw 15 to rotate through the first motor 17, the first slider 16 and the first slide table 11 can be driven to slide on the first lead screw 15, thereby achieving the purpose of controlling the sliding of the first lifting component 5.

[0059] Similarly, combined Figure 3 As shown, the second driving component 8 includes a second lead screw, a second slider, and a second motor. The connection method is the same as that of the first driving component 7, and will not be described in detail here.

[0060] As an alternative implementation, the first driving member 7 and the second driving member 8 can also be hydraulic cylinders, air cylinders, or other linear drive mechanisms, all of which can achieve the purpose of driving the first lifting member 5 and the second lifting member 6 to slide.

[0061] Reference Figure 1 and Figure 2 The mounting bracket 2 has a ring-shaped structure, and its dimensions are adapted to the flange dimensions at the interface of the molecular pump 20. The mounting bracket 2 has multiple connecting holes 9 arranged in a ring along its axis, which are adapted to the bolt holes on the flange of the molecular pump 20. When installing the molecular pump 20, simply place the interface of the molecular pump 20 against the bottom of the mounting bracket 2, and then use bolts to fix the molecular pump 20 to the mounting bracket 2. The connection method is simple and reliable.

[0062] Additionally, refer to Figure 1 The base 1 is also provided with slopes 18 on both sides opposite to each other along the first direction. The end of the slope 18 away from the base 1 is inclined downward so that the operator can push the molecular pump 20 onto the base 1, thereby improving the convenience of the operator when using it.

[0063] Example 2

[0064] This embodiment provides a molecular pump testing platform, referring to... Figure 5 It includes a test hood 19, a vacuum gauge, a flow meter, a temperature sensor, a position sensor, and the aforementioned flipping device.

[0065] The test shroud 19 is fixed to the top of the mounting bracket 2 and is connected to the molecular pump 20 through the mounting bracket 2, enabling the molecular pump 20 to extract air from the test shroud 19, creating a vacuum inside the test shroud 19. A vacuum gauge, flow meter, temperature sensor, and position sensor are all mounted on the test shroud 19. The vacuum gauge is used to detect the vacuum level inside the test shroud 19, the flow meter is used to detect the airflow rate when the molecular pump 20 extracts air from the test shroud 19, the temperature sensor is used to detect the temperature of the molecular pump 20 during the test, and the position sensor is used to detect the current height and tilt angle of the molecular pump 20.

[0066] Vacuum gauge, flow meter, temperature sensor and position sensor are all connected to industrial control computer. The industrial control computer can automatically collect data on key indicators such as running time, running position, flow rate, temperature and vacuum degree of molecular pump 20. With the addition of the flipping device to flexibly adjust the angle of molecular pump 20, the purpose of automatic testing of molecular pump 20 can be achieved. The operation is simple and the testing efficiency of molecular pump 20 is higher.

[0067] Furthermore, since the molecular pump typically weighs around 50 kg, using a traditional motor-driven gear system would require significant torque. Moreover, the large weight difference between the molecular pump 20 and the test housing 19 shifts the center of gravity of the entire assembly closer to the molecular pump than to the motor's rotation axis, resulting in a large torque on the motor shaft. Ordinary servo motors or stepper motors with gearboxes cannot be used for extended periods, necessitating higher-performance motors to control both the molecular pump's rotation and its stopping at specific angles. However, such high-performance motors are quite expensive (each typically costs over 50,000 RMB). By employing the aforementioned flipping device, not only can the molecular pump be driven to rotate, but it can also be easily stopped at different angles. The structure is simple and reliable, and the overall cost is low (four hydraulic cylinders plus a matching hydraulic pump and other hydraulic systems, as well as guide rails and lead screws, totaling only about 18,000 RMB), significantly reducing costs. Furthermore, the speed and rotation angle of the molecular pump can be controlled simply by editing the control program to adjust the inlet or outlet flow of the hydraulic cylinder. Also, if components such as the hydraulic cylinder malfunction, they are readily available and easy to repair or replace, as they are standard parts. Using a high-performance motor, however, not only results in high replacement costs, but also a limited number of manufacturers that produce motors that meet the performance requirements of a tilting molecular pump, leading to greater dependence on motor manufacturers and potentially creating technological constraints that hinder future technological updates and applications.

[0068] Obviously, the above embodiments are merely illustrative examples for clear explanation and are not intended to limit the implementation. Those skilled in the art will recognize that other variations or modifications can be made based on the above description. It is neither necessary nor possible to exhaustively list all possible implementations here. However, obvious variations or modifications derived therefrom are still within the scope of protection of this invention.

Claims

1. A molecular pump testing platform, characterized in that, include: Molecular pump inversion device; The molecular pump flipping device includes: a base (1) on which multiple parallel slides are provided; a mounting frame (2) disposed above the base (1) for mounting and fixing the molecular pump (20), wherein a first hinge shaft (3) and a second hinge shaft (4) are fixedly disposed on the mounting frame (2), the first hinge shaft (3) and the second hinge shaft (4) are both horizontally disposed and parallelly spaced apart, and the projections of the first hinge shaft (3) and the second hinge shaft (4) on the base (1) are perpendicular to the extension direction of the slides; and a first lifting member (5) provided at least two and located on the mounting frame (1). On both sides of the mounting bracket (2), the bottom of the first lifting member (5) is slidably connected to the slide rail, and the top of the first lifting member (5) can perform a lifting action and is hinged to the first hinge shaft (3); there are at least two second lifting members (6) located on both sides of the mounting bracket (2), the bottom of the second lifting member (6) is slidably connected to the slide rail, and the top of the second lifting member (6) can perform a lifting action and is hinged to the second hinge shaft (4); there are four slide rails, and the first lifting member (5) and the second lifting member (6) are located on different slide rails respectively; The test cover (19) is connected to the mounting bracket (2) and communicates with the molecular pump (20) through the mounting bracket (2); A vacuum gauge is used to detect the vacuum level inside the test chamber (19); A flow meter is used to detect the airflow through the test hood (19); A temperature sensor is used to detect the temperature of the molecular pump (20) during operation; A displacement sensor is used to detect the flip angle and height of the molecular pump (20).

2. The molecular pump testing platform according to claim 1, characterized in that, Both the first lifting component (5) and the second lifting component (6) are hydraulic cylinders.

3. The molecular pump testing platform according to claim 1, characterized in that, The flipping device further includes a fixing plate (10), which is connected between the first hinge shaft (3) and the second hinge shaft (4).

4. The molecular pump testing platform according to claim 1, characterized in that, A first driving member (7) is provided between the first lifting member (5) and the base (1), and the first driving member (7) is used to drive the first lifting member (5) to move along the slide. A second driving member (8) is provided between the second lifting member (6) and the base (1). The second driving member (8) is used to drive the second lifting member (6) to move along the slide.

5. The molecular pump testing platform according to claim 4, characterized in that, The first driving component (7) includes: a first lead screw (15) rotatably connected to the base (1), a first slider (16) threadedly connected to the first lead screw (15), and a first motor (17) that drives the first lead screw (15) to rotate. The bottom of the first lifting component (5) is connected to the first slider (16). And / or, the second drive member (8) includes: a second lead screw rotatably connected to the base (1), a second slider threadedly connected to the second lead screw, and a second motor that drives the second lead screw to rotate, and the bottom of the second lifting member (6) is connected to the second slider.

6. The molecular pump testing platform according to claim 5, characterized in that, The bottom of the first lifting member (5) is provided with a first slide (11), the first slide (11) is slidably connected to the slide rail, and the first slider (16) is fixedly connected to the first slide (11); The bottom of the second lifting member (6) is provided with a second slide (12), the second slide (12) is slidably connected to the slide rail, and the second slider is fixedly connected to the second slide (12).

7. The molecular pump testing platform according to claim 1, characterized in that, The mounting bracket (2) is an annular shape with dimensions that are compatible with the interface dimensions of the molecular pump (20). The mounting bracket (2) has a connection hole (9) that matches the bolt hole at the end of the interface of the molecular pump (20).

8. The molecular pump testing platform according to claim 1, characterized in that, The base (1) has a slope (18) at one end, and the slope (18) is inclined downward at the end away from the base (1).

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