A SCARA robot arm with End effect

Abstract

The present invention relates to a SCARA robot arm with an end effect, comprising a suction cup body, a suction cup seat, a compressed air pipe joint, and a vacuum air pipe joint; one end of the suction cup seat is fixedly connected to the suction cup body, and the other end of the suction cup seat is fixedly connected to the compressed air pipe joint and the vacuum air pipe joint; the suction cup body is internally provided with a compression flow channel and a vacuum flow channel; the suction cup body is provided with a plurality of compression holes connected to the compression flow channel, and the suction cup body is also provided with a negative pressure hole connected to the vacuum flow channel; the SCARA robot arm is internally provided with a compressed gas air pipe circuit, which is connected to an external device blowing device and a negative pressure device through the compressed gas air pipe circuit; a vacuum pressure sensor is installed in the pipeline between the negative pressure device and the vacuum air pipe joint for detecting the negative pressure in the vacuum flow channel. The advantage is that the end effector of the robot arm greatly reduces the probability of wafer damage during handling and improves the efficiency of wafer handling.

Description

Technical Field

[0001] The present invention relates to the technical field of wafer handling, and more particularly to a SCARA robot arm with end effect. Background Art

[0002] Bernoulli's principle is a fundamental principle of hydraulics, established before the development of the continuum theory equations for fluid mechanics. Its essence is the conservation of mechanical energy in a fluid. Specifically, kinetic energy + gravitational potential energy + pressure potential energy = a constant. Its most famous corollary is that for constant-altitude flow, greater velocity results in lower pressure. For example, when air is rapidly expelled from a small orifice, the pressure near the orifice is lower, while the pressure above the orifice is higher.

[0003] A transport mechanism is required when transferring a single wafer or other sheet material. As the wafer becomes thinner, the warping of the wafer surface becomes greater, so using conventional vacuum adsorption to transport the wafer is likely to cause damage to the wafer.

[0004] The preceding description is intended to provide general background information and does not necessarily constitute prior art. Summary of the Invention

[0005] The object of the present invention is to provide a SCARA robot arm with End effect, which greatly reduces the probability of wafer thinning, handling failure and damage during transportation, and improves the efficiency of wafer transportation.

[0006] The present invention provides a SCARA robot arm with end effect, comprising a SCARA robot arm, a suction cup body, a suction cup seat, a compressed air pipe joint, and a vacuum air pipe joint; one end of the suction cup seat is fixedly connected to the suction cup body, and the other end of the suction cup seat is fixedly connected to the compressed air pipe joint and the vacuum air pipe joint; a compression flow channel and a vacuum flow channel are provided inside the suction cup body, the compression flow channel is communicated with the compressed air pipe joint, and the vacuum flow channel is communicated with the vacuum air pipe joint; a plurality of compression holes connected to the compression flow channel are provided on the suction cup body, and the opening direction of the compression holes is parallel to the plane where the suction cup body is located; a negative pressure hole connected to the vacuum flow channel is also provided on the suction cup body, and the opening direction of the negative pressure hole is perpendicular to the opening direction of the compression hole; the suction cup seat is fixed on the SCARA robot arm, and a compressed gas air pipe air path is provided inside the SCARA robot arm, which is connected to an air blowing device and a negative pressure device of an external device through the compressed gas air pipe air path;

[0007] The blowing device is connected to the compressed air pipe joint through the compressed gas trachea air path, and the negative pressure device is connected to the vacuum air pipe joint through the compressed gas trachea air path. The vacuum pressure sensor is installed on the pipeline between the negative pressure device and the vacuum air pipe joint for detecting the negative pressure in the vacuum flow channel.

[0008] Furthermore, the suction cup body includes a Bernoulli suction cup and a suction cup cover; the surface of the Bernoulli suction cup is provided with the compression flow channel, the vacuum flow channel, the compression hole and the negative pressure hole, the suction cup cover is consistent in shape with the Bernoulli suction cup, and the suction cup cover covers the compression flow channel and the vacuum flow channel to form a closed channel.

[0009] Furthermore, the Bernoulli suction cup includes a suction cup and a handle, the suction cup and the handle are integrally formed and connected, and the other end of the handle is fixedly connected to the suction cup seat; the compression flow channel includes an arc-shaped compression flow channel and a linear compression flow channel, and the arc-shaped compression flow channel is connected to the linear compression flow channel; the suction cup is C-shaped, and the C-shaped suction cup is provided with two arc-shaped compression flow channels symmetrical about the opening of the C-shaped suction cup, and the handle is provided with two linear compression flow channels respectively connected to the arc-shaped compression flow channels, and the other end of the linear compression flow channel is connected to the compression air pipe joint; the compression hole and the negative pressure hole are both provided on the C-shaped suction cup, and the compression holes on both sides of the opening of the C-shaped suction cup are symmetrically provided.

[0010] Furthermore, the negative pressure holes are located on the symmetry line of the compression holes on both sides of the C-shaped suction cup.

[0011] Furthermore, the suction cup seat is provided with two compressed air ducts and one vacuum air duct, and the suction cup cover is provided with two compression holes and one vacuum hole. One end of the suction cup cover is fixed on the suction cup seat, and the two compression holes are respectively connected to one end of the compressed air duct, and the other end of the compressed air duct is connected to the compressed air pipe joint; the vacuum hole is connected to one end of the vacuum air duct, and the other end of the vacuum air duct is connected to the vacuum air pipe joint; the compression hole and the vacuum hole on the suction cup cover are respectively connected to the compression flow channel and the vacuum flow channel on the Bernoulli suction cup.

[0012] Furthermore, sealing rings are provided at the connections between the vacuum hole and the vacuum air passage, and between the compression hole and the compression air passage.

[0013] Furthermore, a vacuum suction cup is provided on the surface of the suction cup body, the vacuum suction cup is θ-shaped, and the negative pressure hole is provided at the bottom of the vacuum suction cup.

[0014] Furthermore, a plurality of air outlet gaps are provided at the edge of the suction cup body, and the air outlet gaps are connected to the compression holes; a plurality of negative pressure suction cups are also provided on the surface of the suction cup body, and the negative pressure suction cups are in a circular shape, and the negative pressure suction cups are connected to the air outlet gaps, and the compression holes are located below the negative pressure suction cups.

[0015] Furthermore, the middle part of the compression flow channel is surrounded by an annular block, the annular block is provided with a plurality of air holes, and the air hole is provided with two centrally symmetrical compression holes; a cyclone suction cup is covered above the compression hole, and the cyclone suction cup is provided with a cyclone suction cup exhaust groove corresponding to the compression hole.

[0016] Furthermore, there are six cyclone suction cups, which are divided into three cyclone suction cups on the left and three cyclone suction cups on the right. The exhaust directions of the three cyclone suction cups on the left and the three cyclone suction cups on the right are opposite.

[0017] The SCARA robot arm with end effect provided by the present invention opens the blowing device and the negative pressure device through the SCARA robot arm; the air flow formed by the blowing device enters the compression flow channel through the compression air pipe joint, and then flows out at high speed from the compression hole whose opening direction is parallel to the plane where the suction cup body is located, thereby generating negative pressure perpendicular to the surface of the suction cup body at the compression hole; at this time, the suction cup body moves to the bottom of the wafer with the SCARA robot arm, and absorbs the wafer to the surface of the suction cup body. When the wafer is absorbed to the surface of the suction cup body, the negative pressure hole on the surface of the suction cup body is blocked. At this time, when the negative pressure device continues to perform negative pressure suction, the air flow cannot be sucked out from the vacuum flow channel, thereby forming a vacuum state. At this time, the vacuum pressure sensor installed on the pipeline between the negative pressure device and the vacuum air pipe joint will monitor the pressure change in the pipe, and then transmit the signal to the SCARA robot arm. The SCARA robot arm will recognize that the wafer has been successfully removed; the suction cup body adsorbs the wafer and moves the wafer from one position to another as the SCARA robot arm moves. The solenoid valve controls the on and off of the blowing device and the negative pressure device. When the negative pressure at the compression hole disappears, the adsorption force between the wafer and the surface of the suction cup body disappears, and the suction cup body separates from the wafer as the SCARA robot arm moves, and the wafer is successfully placed; the probability of wafer damage during transportation is greatly reduced, and the efficiency of wafer transportation is improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 This is a planar schematic diagram of a SCARA robot arm with end effect provided in Example 1 of the present invention.

[0019] Figure 2 for Figure 1Schematic diagram of the structure of the SCARA robot arm with End effect.

[0020] Figure 3 for Figure 2 Enlarged view of part A in .

[0021] Figure 4 for Figure 1 Schematic diagram of the Bernoulli suction cup structure of the SCARA robot arm with End effect.

[0022] Figure 5 for Figure 1 Schematic diagram of the structure of the Bernoulli suction cup of the SCARA robot arm with End effect from another perspective.

[0023] Figure 6 for Figure 1 Schematic diagram of the suction cup holder of the SCARA robot arm with End effect.

[0024] Figure 7 for Figure 1 Exploded view of the SCARA robot arm with End effect.

[0025] Figure 8 for Figure 1 Schematic diagram of the structure of the SCARA robot arm with End effect from another perspective.

[0026] Figure 9 for Figure 1 Schematic diagram of the use of the SCARA robot arm with End effect.

[0027] Figure 10 This is a planar schematic diagram of a SCARA robot arm with end effect provided in Example 2 of the present invention.

[0028] Figure 11 for Figure 10 Enlarged view of part A in .

[0029] Figure 12 for Figure 10 A partial schematic diagram of the SCARA robot arm with End effect.

[0030] The reference numerals and components in the drawings are as follows:

[0031] 1. SCARA robot arm 11. Air blowing device 12. Negative pressure device

[0032] 13. Vacuum pressure sensor 2, suction cup body 21, compression flow channel

[0033] 211, arc compression flow channel 212, straight compression flow channel 22, vacuum flow channel

[0034] 23. Compression hole 24. Negative pressure hole 25. Bernoulli suction cup

[0035] 251, suction cup 252, handle 253, opening

[0036] 26. Suction cup cover 261, compression hole 262, vacuum hole

[0037] 27. Vacuum suction cup 28. Air outlet 29. Negative pressure suction cup

[0038] 3. Suction cup seat 31, compressed air channel 32, vacuum air channel

[0039] 4. Compressed air pipe joint 5. Vacuum air pipe joint 6. Sealing ring

[0040] 7. Wafer 8. Ring block 81. Air hole

[0041] 9. Cyclone suction cup 91. Cyclone suction cup exhaust slot DETAILED DESCRIPTION

[0042] The following embodiments of the present invention are described in further detail with reference to the accompanying drawings and examples. The following examples are used to illustrate the present invention but are not intended to limit the scope of the present invention.

[0043] The terms "first", "second", "third", "fourth", etc. in the description and claims of the present invention are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence.

[0044] Example 1

[0045] Figure 1 A schematic plan view of a SCARA robot arm with an end effect provided in Example 1 of the present invention. Figure 2 for Figure 1 The structural diagram of the SCARA robot arm with End effect, Figure 3 for Figure 2 Please refer to the enlarged view of part A in Figure 1 、 Figure 2 、 Figure 3The SCARA robot arm with an end effector provided by an embodiment of the present invention includes a SCARA robot arm 1, a suction cup body 2, a suction cup seat 3, a compressed air pipe joint 4, and a vacuum air pipe joint 5; one end of the suction cup seat 3 is fixedly connected to the suction cup body 2, and the other end of the suction cup seat 3 is fixedly connected to the compressed air pipe joint 4 and the vacuum air pipe joint 5; a compression flow channel 21 and a vacuum flow channel 22 are provided inside the suction cup body 2, the compression flow channel 21 is connected to the compressed air pipe joint 4, and the vacuum flow channel 22 is connected to the vacuum air pipe joint 5; a plurality of compression holes 23 (compression holes) connected to the compression flow channel 21 are provided on the suction cup body 2. The diameter of the reduction hole 23 is much smaller than the inner diameter of the compression flow channel 21), and the opening direction of the compression hole 23 is parallel to the plane where the suction cup body 2 is located; the suction cup body 2 is also provided with a negative pressure hole 24 connected to the vacuum flow channel 22, and the opening direction of the negative pressure hole 24 is perpendicular to the opening direction of the compression hole 23; the suction cup seat 3 is fixed on the SCARA robot arm 1, and the SCARA robot arm 1 is provided with a compressed gas air pipe and air path, which is connected to the external equipment blowing device 11 (for example, a fan, an air pump, etc.) and the negative pressure device 12 (for example, a vacuum pump) through the compressed gas air pipe and air path;

[0046] The blowing device 11 is connected to the compressed gas trachea air path and the compressed gas pipe joint 4, the negative pressure device 12 is connected to the vacuum air pipe joint 5 through the compressed gas trachea air path, and the vacuum pressure sensor 13 is installed on the pipeline between the negative pressure device 12 and the vacuum air pipe joint 5, and is used to detect the negative pressure in the vacuum flow channel 22.

[0047] Figure 9 for Figure 1 Schematic diagram of the use of SCARA robot arm with End effect. Figure 1 、 Figure 9 It should be noted that the SCARA robot arm 1 is similar in principle to the SCARA of the prior art (a robot arm used for plane handling operations). When the wafer 7 needs to be handled by the robot arm of the present invention, the blowing device 11 and the negative pressure device 12 are first opened by the SCARA robot arm 1. The airflow generated by the blowing device 11 enters the compression flow channel 21 through the compression air pipe connector 4, and then flows out at high speed from the compression hole 23 whose opening direction is parallel to the plane where the suction cup body 2 is located, thereby generating a negative pressure perpendicular to the surface of the suction cup body 2 at the compression hole 23 (Bernoulli principle).

[0048] At this time, the suction cup body 2 moves with the SCARA robot arm 1 to the bottom of the wafer 7 and adsorbs the wafer 7 to the surface of the suction cup body 2. When the wafer 7 is adsorbed to the surface of the suction cup body 2, the negative pressure hole 24 on the surface of the suction cup body 2 is blocked. At this time, when the negative pressure device 12 continues to perform negative pressure suction, the air flow cannot be sucked out from the vacuum flow channel 22, thereby forming a vacuum state. At this time, the vacuum pressure sensor 13 installed on the pipeline between the negative pressure device 12 and the vacuum air pipe joint 5 will monitor the pressure change in the pipe, and then transmit the signal to the SCARA robot arm 1, and the SCARA robot arm 1 will recognize that the wafer 7 is successfully taken out; the suction cup body 2 adsorbs the wafer 7 and moves the wafer 7 from one position to another as the SCARA robot arm 1 moves, and the blowing device 11 and the negative pressure device 12 are controlled by the on and off of the solenoid valve. When the negative pressure at the compression hole 23 disappears, the adsorption force between the wafer 7 and the surface of the suction cup body 2 disappears, and the suction cup body 2 is separated from the wafer 7 as the SCARA robot arm 1 moves, and the wafer is successfully placed;

[0049] It should be noted that the SCARA robot arm with End effect of the present invention has a suction cup body 2 of different sizes, so it is not limited to processing 8-inch wafers. After size scaling, it can also process 6- and 12-inch wafers; at the same time, it is particularly suitable for processing but not limited to thin slices, taiko slices, and thick slices; the robot arm greatly reduces the probability of wafer damage during transportation, thereby improving the efficiency of wafer transportation.

[0050] Figure 4 for Figure 1 Schematic diagram of the Bernoulli suction cup structure of the SCARA robot arm with End effect, Figure 5 for Figure 1 Another perspective of the Bernoulli suction cup structure of the SCARA robot arm with end effect. Figure 4 、 Figure 5 The suction cup body 2 of the present invention includes a Bernoulli suction cup 25 and a suction cup cover 26; the surface of the Bernoulli suction cup 25 is provided with a compression flow channel 21, a vacuum flow channel 22, a compression hole 23 and a negative pressure hole 24, and the suction cup cover 26 is consistent in shape with the Bernoulli suction cup 25, and the suction cup cover 26 covers the compression flow channel 21 and the vacuum flow channel 22 to form a closed channel.

[0051] Further references Figure 4 、 Figure 5The Bernoulli suction cup 25 includes a suction cup 251 and a handle 252, which are integrally formed and connected to the handle 252, and the other end of the handle 252 is fixedly connected to the suction cup seat 3; the compression flow channel 21 includes an arc-shaped compression flow channel 211 and a linear compression flow channel 212, and the arc-shaped compression flow channel 211 and the linear compression flow channel 212 are connected; the suction cup 251 is C-shaped, and the C-shaped suction cup 251 is provided with two arc-shaped compression flow channels 211 symmetrical about the opening 253 of the C-shaped suction cup 251, and the handle 252 is provided with two linear compression flow channels 212 respectively connected to the arc-shaped compression flow channels 211, and the other end of the linear compression flow channel 212 is connected to the compression air pipe connector 4; the compression hole 23 and the negative pressure hole 24 are both provided on the C-shaped suction cup 251, and the compression holes 23 on both sides of the opening 253 on the C-shaped suction cup 251 are symmetrically arranged.

[0052] It should be noted that the C-shaped design of the suction cup 251 is more suitable for grasping wafers. In addition, the two arc-shaped compression flow channels 211 on the C-shaped suction cup 251 are symmetrical about the opening 253 of the C-shaped suction cup 251, and the compression holes 23 on both sides of the opening 253 on the C-shaped suction cup 251 are symmetrically arranged; so that when the suction cup body 2 grasps the wafer, the suction force is balanced on the left and right, thereby improving the stability of wafer grasping.

[0053] Furthermore, the negative pressure holes 24 are located on the symmetry line of the compression holes 23 on both sides of the C-shaped suction cup 251. Therefore, when the negative pressure holes 24 adsorb the wafer, the wafer adsorbed on the suction cup body 2 will not be deflected by the force, further improving the stability of wafer grasping.

[0054] Figure 6 for Figure 1 Schematic diagram of the suction cup holder of the SCARA robot arm with End effect. Figure 7 for Figure 1 Exploded view of the SCARA robot arm with End effect. Figure 8 for Figure 1 Another perspective of the SCARA robot arm with End effect. Figure 6 、 Figure 7 , Figure 8The suction cup seat 3 of the present invention is provided with two compressed air passages 31 and one vacuum air passage 32, and the suction cup cover plate 26 is provided with two compression holes 261 and one vacuum hole 262. One end of the suction cup cover plate 26 is fixed to the suction cup seat 3. The two compression holes 261 are respectively connected to one end of the compressed air passage 31, and the other end of the compressed air passage 31 is connected to the compressed air pipe connector 4; the vacuum hole 262 is connected to one end of the vacuum air passage 32, and the other end of the vacuum air passage 32 is connected to the vacuum air pipe connector 5; the compression hole 261 and the vacuum hole 262 on the suction cup cover plate 26 are respectively connected to the compressed flow channel 21 and the vacuum flow channel 22 on the Bernoulli suction cup 25. Sealing rings 6 are provided at the connection between the vacuum hole 262 and the vacuum air passage 32, and the compression hole 261 and the compressed air passage 31, further improving the airtightness of the connection.

[0055] Further references Figure 3 A vacuum cup 27 is provided on the surface of the cup body 2. The vacuum cup 27 is θ-shaped, and the negative pressure hole 24 is provided at the bottom of the vacuum cup 27. It should be noted that the design of the vacuum cup 27 prevents the negative pressure hole 24 from directly contacting the wafer. The vacuum cup 27 increases the area of ​​negative pressure on the wafer, further reducing damage caused by the negative pressure hole 24 when the wafer is adsorbed.

[0056] Further references Figure 3 The edge of the suction cup body 2 is provided with multiple air outlet notches 28, which are connected to the compression holes 23. The surface of the suction cup body 2 is also provided with multiple negative pressure suction cups 29. The negative pressure suction cups 29 are in the shape of a ring and are connected to the air outlet notches 28. The compression holes 23 are located below the negative pressure suction cups 29. It should be noted that when the air blowing device 11 is turned on, a certain amount of gas convection is formed between the negative pressure suction cups 29 and the air outlet notches 28, which quickly exhausts the compressed air, reduces the air pressure in the tank, and enables wafer suction.

[0057] Example 2

[0058] The SCARA robot arm with End effect provided in this embodiment is basically the same as the SCARA robot arm with End effect provided in Example 1, except for the cyclone suction cup (9).

[0059] Figure 10 A schematic plan view of a SCARA robot arm with an end effect provided in Example 2 of the present invention. Figure 11 for Figure 10 The enlarged view of part A in Figure 12 for Figure 10 A partial diagram of a SCARA robot arm with an End effect. Figure 10-12The middle part of the compression flow channel 21 provided in this embodiment is surrounded by an annular block 8, and a plurality of air holes 81 are provided on the annular block 8. Two compression holes 23 are provided on the air holes 81 in a centrally symmetrical manner; a cyclone suction cup 9 is covered above the compression holes 23, and the cyclone suction cup 9 is provided with a cyclone suction cup exhaust groove 91 corresponding to the compression holes 23.

[0060] Furthermore, there are six cyclone suction cups 9, which are divided into three cyclone suction cups 9 on the left and three cyclone suction cups 9 on the right. The exhaust directions of the three cyclone suction cups 9 on the left are opposite to those of the three cyclone suction cups 9 on the right.

[0061] It should be noted that when the suction cup body 2 is ready to take the wafer, the blowing device 11 and the negative pressure device 12 are turned on; each cyclone suction cup 9 has two exhaust ports in opposite directions on the inner ring of the suction cup, and the gas is discharged at high speed from the two exhaust ports, forming a cyclone-like airflow discharge direction, and a negative pressure area is formed in the center of the cyclone suction cup 9 to adsorb the wafer; when the suction cup body 2 is located a certain distance above the wafer for wafer adsorption, the exhaust directions of the three cyclone suction cups on the left side of the clamp and the three cyclone suction cups on the right side are opposite to each other, preventing the wafer position from being offset due to the airflow discharge direction during the process of the suction cup body 2 adsorbing the wafer; after the wafer is successfully adsorbed, the back of the wafer contacts the step on the cyclone suction cup 9, and the air is discharged from the cyclone suction cup exhaust slot 91, keeping the negative pressure in the center of the cyclone suction cup (9) stable; in addition, when the negative When the pressure device 12 continues to perform negative pressure suction, the air flow cannot be sucked out from the vacuum flow channel 22, thereby forming a vacuum state. At this time, the vacuum pressure sensor 13 installed on the pipeline between the negative pressure device 12 and the vacuum air pipe joint 5 will monitor the pressure change in the pipe, and then transmit the signal to the SCARA robot arm 1. The SCARA robot arm 1 will recognize that the wafer is successfully taken out; the suction cup body 2 adsorbs the wafer and moves the wafer from one position to another as the SCARA robot arm 1 moves; the blowing device 11 and the negative pressure device 12 are closed, the negative pressure at the compression hole 23 disappears, and the adsorption force between the wafer and the surface of the suction cup body 2 disappears. The suction cup body 2 separates from the wafer as the SCARA robot arm 1 moves, and the wafer is successfully placed.

[0062] Furthermore, the SCARA robot arm with End effect of the present invention has a suction cup body 2 of different sizes, so it is not limited to processing 8-inch wafers. After size scaling, it can also process 6- and 12-inch wafers; at the same time, it is particularly suitable for processing but not limited to thin slices, taiko slices, and thick slices; the robot arm greatly reduces the probability of wafer damage during transportation and improves the efficiency of wafer transportation.

[0063] Based on the above description, it can be seen that the advantages of the present invention are:

[0064] 1. The SCARA robot arm with End effect provided by the present invention opens the blowing device 11 and the negative pressure device 12 through the SCARA robot arm 1; the air flow formed by the blowing device 11 will enter the compression flow channel 21 through the compressed air pipe joint 4, and then flow out at high speed from the compression hole 23 whose opening direction is parallel to the plane where the suction cup body 2 is located, thereby generating a negative pressure perpendicular to the surface of the suction cup body 2 at the compression hole 23; at this time, the suction cup body 2 moves to the bottom of the wafer 7 with the SCARA robot arm 1, and will adsorb the wafer 7 to the surface of the suction cup body 2. When the wafer 7 is adsorbed to the surface of the suction cup body 2, the negative pressure hole 24 on the surface of the suction cup body 2 will be blocked. At this time, when the negative pressure device 12 continues to perform negative pressure suction, the air flow cannot be sucked out from the vacuum flow channel 22, thereby A vacuum state is formed. At this time, the vacuum pressure sensor 13 installed on the pipeline between the negative pressure device 12 and the vacuum air pipe joint 5 will monitor the pressure change in the pipe, and then transmit the signal to the SCARA robot arm 1. The SCARA robot arm 1 will recognize that the wafer 7 has been successfully taken out; the suction cup body 2 adsorbs the wafer 7 and moves the wafer 7 from one position to another as the SCARA robot arm 1 moves, and the blowing device 11 and the negative pressure device 12 are closed. The negative pressure at the compression hole 23 disappears, and the adsorption force between the wafer 7 and the surface of the suction cup body 2 disappears. The suction cup body 2 separates from the wafer 7 as the SCARA robot arm 1 moves, and the wafer is successfully placed; the probability of damage to the wafer 7 during transportation is greatly reduced, and the efficiency of transporting the wafer 7 is improved.

[0065] 2. The SCARA robot arm with End effect provided by the present invention is suitable for grasping thin wafers and greatly improves the success rate of grasping wafers.

[0066] 3. The SCARA robot arm with end effect provided by the present invention can be adapted to 6-, 8-, and 12-inch wafers, etc., by changing its size.

[0067] 4. The SCARA robot arm with end effect provided by the present invention can remove wafers at a certain distance above the wafer, preventing the wafer from being damaged by pressing down on the wafer to remove the wafer.

[0068] The above description is merely a specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any modifications or substitutions that can be easily conceived by a person skilled in the art within the technical scope disclosed in the present invention should be included in the scope of protection of the present invention. Therefore, the scope of protection of the present invention should be based on the scope of protection of the claims.

Claims

1. A SCARA robot arm with End effect, characterized in that: It includes a SCARA robot arm (1), a suction cup body (2), a suction cup seat (3), a compressed air pipe joint (4), and a vacuum air pipe joint (5); One end of the suction cup seat (3) is fixedly connected to the suction cup body (2), and the other end of the suction cup seat (3) is fixedly connected to the compressed air pipe joint (4) and the vacuum air pipe joint (5); A compression flow channel (21) and a vacuum flow channel (22) are provided inside the suction cup body (2); the compression flow channel (21) is in communication with the compression air pipe joint (4), and the vacuum flow channel (22) is in communication with the vacuum air pipe joint (5); The suction cup body (2) is provided with a plurality of compression holes (23) in communication with the compression flow channel (21), and the opening direction of the compression holes (23) is parallel to the plane where the suction cup body (2) is located; the suction cup body (2) is also provided with negative pressure holes (24) in communication with the vacuum flow channel (22), and the opening direction of the negative pressure holes (24) is perpendicular to the opening direction of the compression holes (23); The suction cup seat (3) is fixed on the SCARA robot arm (1); a compressed gas trachea airway is provided inside the SCARA robot arm (1), and is connected to an external device blowing device (11) and a negative pressure device (12) via the compressed gas trachea airway; The blowing device (11) is connected to the compressed air pipe joint (4) through a compressed air pipe air path, the negative pressure device (12) is connected to the vacuum air pipe joint (5) through a compressed air pipe air path, and a vacuum pressure sensor (13) is installed on the pipeline between the negative pressure device (12) and the vacuum air pipe joint (5) for detecting the negative pressure in the vacuum flow channel (22); A plurality of air outlet notches (28) are provided at the edge of the suction cup body (2), and the air outlet notches (28) are in communication with the compression holes (23); A plurality of negative pressure suction cups (29) are further provided on the surface of the suction cup body (2), wherein the negative pressure suction cups (29) are in an annular shape, the negative pressure suction cups (29) are in communication with the air outlet notch (28), and the compression hole (23) is located below the negative pressure suction cups (29); The air outlet notch (28) has two opposite side walls that are gradually opened along the air outlet direction, and one of the side walls extends straight, and the other side wall includes a connected curved section and a straight section, the curved section is arranged near the compression hole (23), and the curved section bends toward the opposite side wall; or, The middle of the compression flow channel (21) is surrounded by an annular block (8), and the annular block (8) is provided with a plurality of air holes (81), and the air holes (81) are provided with two compression holes (23) that are centrally symmetrical; a cyclone suction cup (9) is covered above the compression hole (23), and the cyclone suction cup (9) is provided with a cyclone suction cup exhaust groove (91) corresponding to the compression hole (23); The compression hole (23) connecting the compression flow channel (21) and the air hole (81) has two opposite side walls that are gradually contracted along the air inlet direction, and both side walls are curved surfaces; the cyclone suction cup exhaust slot (91) has two opposite side walls that are gradually opened along the air outlet direction, and both side walls extend straight.

2. The SCARA robot arm with end effect according to claim 1, characterized in that: The suction cup body (2) comprises a Bernoulli suction cup (25) and a suction cup cover plate (26); the surface of the Bernoulli suction cup (25) is provided with the compression flow channel (21), the vacuum flow channel (22), the compression small hole (23) and the negative pressure small hole (24); the suction cup cover plate (26) and the Bernoulli suction cup (25) are of the same shape, and the suction cup cover plate (26) covers the compression flow channel (21) and the vacuum flow channel (22) to form a closed channel.

3. The SCARA robot arm with end effect according to claim 2, characterized in that: The Bernoulli suction cup (25) comprises a suction cup (251) and a handle (252), wherein the suction cup (251) and the handle (252) are integrally formed and connected, and the other end of the handle (252) is fixedly connected to the suction cup seat (3); The compression flow channel (21) comprises an arc-shaped compression flow channel (211) and a linear compression flow channel (212), and the arc-shaped compression flow channel (211) and the linear compression flow channel (212) are in communication; The suction cup (251) is C-shaped, and the C-shaped suction cup (251) is provided with two arc-shaped compression flow channels (211) symmetrically about the opening (253) of the C-shaped suction cup (251). The handle (252) is provided with two linear compression flow channels (212) respectively connected to the arc-shaped compression flow channels (211), and the other end of the linear compression flow channel (212) is connected to the compression air pipe connector (4); The compression holes (23) and the negative pressure holes (24) are both arranged on the C-shaped suction cup (251), and the compression holes (23) on both sides of the opening (253) on the C-shaped suction cup (251) are symmetrically arranged.

4. The SCARA robot arm with end effect according to claim 3, characterized in that: The negative pressure holes (24) are located on the symmetry lines of the compression holes (23) on both sides of the C-shaped suction cup (251).

5. The SCARA robot arm with end effect according to claim 3, characterized in that: The suction cup seat (3) is provided with two compressed air passages (31) and one vacuum air passage (32); the suction cup cover plate (26) is provided with two compression holes (261) and one vacuum hole (262); one end of the suction cup cover plate (26) is fixed to the suction cup seat (3); the two compression holes (261) are respectively communicated with one end of the compressed air passage (31); and the other end of the compressed air passage (31) is communicated with the compressed air pipe joint (4); The vacuum hole (262) is in communication with one end of the vacuum air passage (32), and the other end of the vacuum air passage (32) is in communication with the vacuum air pipe joint (5); The compression hole (261) and the vacuum hole (262) on the suction cup cover plate (26) are respectively connected to the compression flow channel (21) and the vacuum flow channel (22) on the Bernoulli suction cup (25).

6. The SCARA robot arm with end effect according to claim 5, characterized in that: Sealing rings (6) are provided at the connection points between the vacuum hole (262) and the vacuum air passage (32) and between the compression hole (261) and the compression air passage (31).

7. The SCARA robot arm with end effect according to claim 1, characterized in that: A vacuum suction cup (27) is provided on the surface of the suction cup body (2), the vacuum suction cup (27) is θ-shaped, and the negative pressure hole (24) is provided at the bottom of the vacuum suction cup (27).

8. The SCARA robot arm with end effect according to claim 1, characterized in that: There are six cyclone suction cups (9), and the six cyclone suction cups (9) are divided into three cyclone suction cups (9) on the left side and three cyclone suction cups (9) on the right side. The exhaust directions of the three cyclone suction cups (9) on the left side and the three cyclone suction cups (9) on the right side are opposite.

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