Method, device and storage medium for automatically determining the duration of water spraying on a grinding wheel

By storing the correspondence between the user identification information and the water spraying time calculation model in the preset database, and determining the water spraying time based on the user information or the fitted mathematical model, the problem of inflexible cleaning time in the prior art is solved, and flexible cleaning is achieved according to the degree of grinding, avoiding excessive cleaning and improving cleanliness.

CN115114380BActive Publication Date: 2025-08-15BEIJING SEMICORE MICROELECTRONICS EQUIPMENT CO LTD
View PDF 2 Cites 0 Cited by

Patent Information

Application Number
CN202210470873.3
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2022-04-28
Publication Date
2025-08-15
Estimated Expiration
2042-04-28

AI Technical Summary

Technical Problem

The prior art lacks a technical solution to flexibly determine the cleaning time according to the actual grinding process, resulting in insufficient cleaning and may form micro or macro scratches.

Method used

By storing the correspondence between the user identification information and the water spraying time calculation model in the preset database, determining the water spraying time based on the user information and cleaning, or flexibly determining the cleaning time by fitting the water spraying time mathematical model.

Benefits of technology

It realizes flexible determination of the spraying time according to the degree of grinding, ensures thorough cleaning, avoids excessive cleaning, and improves the cleanliness after grinding.

✦ Generated by Eureka AI based on patent content.

Smart Images

  • Figure CN115114380B_ABST
    Figure CN115114380B_ABST
Patent Text Reader

Abstract

An embodiment of the present application provides a method, device and storage medium for determining the water spraying time of a grinding wheel. When the correspondence between the preset data volume and the identification information is not stored in the preset database, a warning message is sent. After receiving the warning message, the user can automatically set the water spraying time calculation model, mainly including setting the highest power of the grinding time in the water spraying time calculation model and the coefficients of each term in the polynomial. If the user needs to set different water spraying time calculation models according to the range of grinding time, the background will simultaneously push request information including the grinding time range, so that the user can set the water spraying time calculation model according to demand.
Need to check novelty before this filing date? Find Prior Art

Description

Technical Field

[0001] The present invention relates to a method, device and storage medium for automatically determining the water spraying time of a grinding wheel, and particularly to the technical field of determining the cleaning time after grinding in a semiconductor process. Background Art

[0002] With the advancement of semiconductor chip manufacturing technology, the role and requirements of chemical mechanical planarization (CMP) for wafers 200mm and larger are becoming increasingly important in chip production. This in turn places increasingly stringent performance requirements on CMP polishing machines, including requirements for wafer thickness uniformity and defect reduction.

[0003] Defects that plague CMP wafer polishing currently include macroscratches, microscratch damage, and surface particles. Defect control during CMP polishing has become a challenging issue facing and addressing. Currently, CMP defect control typically requires additional wet cleaning, including DIW (diluted oxygen) washing, brush cleaning, or acid cleaning, in addition to the CMP tool itself.

[0004] These CMP defects are typically caused by external intrusion, lost consumables falling into the grinding or cleaning process, and crystallization of grinding byproducts. To maintain process cleanliness during grinding, the polishing pad is typically cleaned after wafer grinding. However, existing technical solutions typically use a fixed cleaning program control. This fixed cleaning control program uses a uniform cleaning time and length for wafers requiring different cleaning levels. This results in insufficient cleanliness for some products that require long grinding times, resulting in micro or macro scratches.

[0005] Therefore, the prior art lacks a technical solution for flexibly determining the cleaning time according to the actual grinding process. Summary of the Invention

[0006] The embodiments of the present application provide a method, device and storage medium for automatically determining the water spraying time of a grinding wheel to solve the technical problem that "the prior art lacks a technical solution for flexibly determining the cleaning time according to the actual grinding process."

[0007] In a first aspect, according to an embodiment of the present application, a method for automatically determining the water spraying duration of a grinding wheel is provided, comprising the following steps:

[0008] receiving user information, and determining user identification information based on the user information;

[0009] If the user identification information is stored in a preset database, a pre-trained water spray duration calculation model is selected from the preset database according to the user identification information; for the target user identification information, a correspondence between the user identification information and the water spray duration calculation model in the preset database is determined;

[0010] A first fitting water spraying duration is determined based on the selected water spraying duration calculation model, and the grinding wheel is cleaned based on the fitting water spraying duration; the cleaning includes acid cleaning and water cleaning.

[0011] In one embodiment, the method further includes:

[0012] If the correspondence between the user identification information and the pre-trained water spraying duration calculation model is not stored in the preset database, a preset warning message is sent, and a preset number of grinding duration-required water spraying duration data sets are received;

[0013] A model is obtained by fitting the first target water spraying duration based on the preset number of grinding duration-required water spraying duration data groups.

[0014] In one embodiment, fitting the first water spraying duration mathematical model based on the preset number of grinding duration-required water spraying duration data sets includes:

[0015] The grinding time in the preset number of grinding time-required water spraying time data groups is stored in the first data group, and the corresponding required water spraying time is stored in the second data group;

[0016] Each grinding time in the first data set is brought into each pre-stored mathematical model to obtain a corresponding water spraying time data set; each water spraying time data set stores the grinding time in the first data set and a first fitting water spraying time calculated based on the grinding time in the first data set and the corresponding mathematical model;

[0017] Calculate the mean square error of the first fitting water spraying duration in each water spraying duration data group and the required water spraying duration in the second data group;

[0018] Determine the pre-stored mathematical model corresponding to the minimum mean square error. If the minimum mean square error is less than the preset variance threshold, determine that the pre-stored mathematical model corresponding to the minimum mean square error is the first target water spraying duration mathematical model obtained by fitting based on the preset number of grinding time information-required water spraying duration information data groups.

[0019] In one embodiment, the method further includes:

[0020] deriving a mathematical model for the water spraying duration, and transmitting a second fitting water spraying duration determined by using the mathematical model derived from the first target water spraying duration, and a difference between each grinding duration in the second data set and the corresponding required water spraying duration and the second fitting water spraying duration;

[0021] Sending a prompt message indicating whether to use the fitted first target water spraying duration to obtain a mathematical model for automatic calculation of the water spraying duration;

[0022] If confirmation information for obtaining the mathematical model for the first target water spraying duration is received within a preset time period, the fitted mathematical model for obtaining the first target water spraying duration is bound to the user identification information.

[0023] In one embodiment, the method further includes:

[0024] If no confirmation information for obtaining the mathematical model for the first target water spraying duration is received within a preset time period, a request information for obtaining the highest power of the grinding duration in the mathematical model for the water spraying duration and coefficients of various terms in the mathematical model is sent;

[0025] After receiving the highest power of the grinding time and the coefficients of the various expressions in the mathematical model, the mathematical model for obtaining the second target water spraying time is determined based on the received highest power of the grinding time and the coefficients of the various expressions in the mathematical model, and the determined mathematical model for obtaining the second target water spraying time is bound to the user identification information.

[0026] In one embodiment, the method further includes:

[0027] If the minimum mean square error is not less than a preset variance threshold, sending request information about the highest power of the grinding time in the mathematical model and coefficients of various equations in the mathematical model;

[0028] After receiving the highest power of the grinding time and the coefficients of the various expressions in the mathematical model, the mathematical model for obtaining the third target water spraying time is determined based on the received highest power of the grinding time and the coefficients of the various expressions in the mathematical model, and the determined mathematical model for obtaining the third target water spraying time is bound to the user identification information.

[0029] In a second aspect, an embodiment of the present application provides a device for automatically determining the duration of water spraying on a grinding wheel, characterized in that it includes:

[0030] A receiving module, configured to receive user information and determine user identification information based on the user information;

[0031] a model determination module configured to select a pre-trained water spray duration calculation model from the preset database based on the user identification information if the user identification information is stored in the preset database; and determine a correspondence between the user identification information and the water spray duration calculation model in the preset database for the target user identification information;

[0032] A cleaning module is used to determine a first fitting water spraying duration based on a selected water spraying duration calculation model, and to clean the grinding wheel based on the fitting water spraying duration; the cleaning includes acid cleaning and water cleaning.

[0033] In one embodiment, the device is characterized in that it further comprises:

[0034] a sending and receiving module, configured to send a preset warning message and receive a preset number of grinding time-required water spray time data sets if the correspondence between the user identification information and the pre-trained water spray time calculation model is not stored in the preset database;

[0035] The model fitting module is used to fit the first target water spraying duration to obtain a model based on the preset number of grinding duration-required water spraying duration data groups.

[0036] In a third aspect, according to an embodiment of the present application, a device for automatically determining the water spraying duration of a grinding wheel is provided, the device comprising a processor, a memory, and a computer program stored in the memory and executable on the processor, wherein the computer program is loaded and executed by the processor to implement the steps of any of the above-mentioned methods for automatically determining the water spraying duration of a grinding wheel.

[0037] In a fourth aspect, according to an embodiment of the present application, a computer-readable storage medium is provided, wherein the computer-readable storage medium stores a computer program, wherein when the computer program is executed by a processor, it is used to implement the steps of the method for automatically determining the water spraying duration of the grinding wheel as described in any of the above items.

[0038] The method for determining the water spraying time of the grinding wheel provided in the embodiment of the present application stores the correspondence between the user identification information and the water spraying time calculation model in the preset database. Therefore, the water spraying time calculation model can be determined according to the user identification information, and the water spraying time calculation model is a mapping relationship between the grinding time and the water spraying time. Therefore, the embodiment itself can flexibly determine the water spraying time according to the grinding time, and the grinding time largely characterizes the degree of grinding. Therefore, the method for determining the water spraying time of the grinding wheel in the embodiment of the present application can achieve the purpose of flexibly determining the water spraying time according to the degree of grinding, thereby making the cleaning after grinding thorough and effectively avoiding the phenomenon of over-cleaning.

[0039] In addition, in an embodiment of the present application, when the preset identification information and the pre-trained water spraying time calculation model are not stored in the preset database, a warning message is sent. After receiving the warning message, the user can automatically set the water spraying time calculation model, mainly including setting the highest power of the grinding time in the water spraying time calculation model and the coefficients of each term in the polynomial. If the user needs to set different water spraying time calculation models according to the range of grinding time, the background will simultaneously push request information including the grinding time range, so that the user can set the water spraying time calculation model according to needs. BRIEF DESCRIPTION OF THE DRAWINGS

[0040] In order to more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the specific embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0041] Figure 1-5 They are respectively a flow chart of a method for determining the water spraying duration of a grinding wheel provided in one embodiment of the present application;

[0042] Figure 6 This is a schematic diagram of a device for determining the water spraying duration of a grinding wheel provided in one embodiment of the present application. DETAILED DESCRIPTION

[0043] The technical solution of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the embodiments described are only some embodiments of the present invention, not all embodiments. All other embodiments obtained by ordinary technicians in this field based on the embodiments of the present invention without making any creative efforts shall fall within the scope of protection of the present invention.

[0044] In the description of the present invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings and are intended solely to facilitate and simplify the description of the present invention. They are not intended to indicate or imply that the devices or components referred to must have, be constructed, or operate in a specific orientation, and therefore should not be construed as limitations on the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0045] In the description of the present invention, it should be noted that, unless otherwise expressly specified or limited, the terms "installed," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; mechanical connections or electrical connections; direct connections or indirect connections through an intermediate medium; internal connections between two components; wireless connections or wired connections. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on specific circumstances.

[0046] In addition, the technical features involved in the different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0047] Example 1

[0048] According to an embodiment of the present application, a method for automatically determining the water spraying time of a grinding wheel is provided. Figure 1 As shown, the method comprises the following steps:

[0049] Step S12: receiving user information and determining user identification information based on the user information;

[0050] In an embodiment of the present application, the corresponding water spraying time determination model is stored based on the user identification information in the user information, and the user information may include the user's identification information, user name, user password, etc. The correspondence between the user name and the user identification information may be pre-stored. Of course, the user identification information may also be a user name, or a string of characters generated based on the user name using a preset algorithm rule.

[0051] Step S14: If the user identification information is stored in a preset database, a pre-trained water spray duration calculation model is selected from the preset database according to the user identification information; and a correspondence between the user identification information and the water spray duration calculation model in the preset database is determined for the target user identification information;

[0052] In an embodiment of the present application, the correspondence between user identification information and the water spraying time calculation model is stored in a preset database. Therefore, after determining the user identification information based on the determined user information, the preset database is searched for whether there is a water spraying time calculation model corresponding to the user identification information. If so, the water spraying time calculation model selected according to the user identification information is naturally used to calculate the water spraying time corresponding to the first grinding time. It is pointed out here that water spraying is a descriptive term used in the field of cleaning, which can be water washing or acidic solution cleaning. Therefore, water spraying here can be understood as spraying neutral water, neutral aqueous solution or acidic aqueous solution according to actual needs, and is not limited to spraying neutral water.

[0053] In the embodiment of the present application, the correspondence between the user identification information in the preset database and the water spraying duration calculation model can be seen in Table 1:

[0054] User identification information Water spraying duration calculation model SID1 A1 SID2 A2 SID3 A3

[0055] As another embodiment of the present application, for the same user identification information, a mathematical model can be obtained by respectively corresponding to the corresponding water spraying duration according to the interval range divided by the grinding duration, as shown in Table 2:

[0056]

[0057] As shown in Table 2, for the same user identification information, different mathematical models can be obtained for different water spraying durations for different grinding time intervals. For example, in Table 2, for a user identified as BID1, when the grinding time ≤ n1, the grinding time-water spraying duration mathematical model used is B11, and when the grinding time > n1, the grinding time-water spraying duration mathematical model used is B12; for a user identified as BID2, when the grinding time ≤ n2, the grinding time-water spraying duration mathematical model used is B21, and when the grinding time > n2, the grinding time-water spraying duration mathematical model used is B22. For ease of description, the subsequent embodiments of the present application are described using the example of one grinding time-water spraying duration mathematical model for each user identification information, which is not a specific limitation that each user identification information corresponds to only one grinding time-water spraying duration mathematical model.

[0058] Step S16: determining a first fitting water spraying duration based on the selected water spraying duration calculation model, and cleaning the grinding wheel based on the first fitting water spraying duration; the cleaning includes acid cleaning and water cleaning.

[0059] In the embodiment of the present application, after determining a corresponding water spray duration calculation model based on the user identification information, the water spray duration calculation model is used to determine a corresponding first fitting water spray duration based on the first grinding duration information, and automatic water spray cleaning is performed based on the determined first fitting water spray duration. As described above, automatic water spraying generally refers to automatically spraying an aqueous solution for cleaning, specifically, an acidic aqueous solution or a neutral aqueous solution, and is not limited to spraying only tap water.

[0060] The method for determining the water spraying time of the grinding wheel provided in the embodiment of the present application stores the correspondence between the user identification information and the water spraying time calculation model in the preset database. Therefore, the water spraying time calculation model can be determined according to the user identification information, and the water spraying time calculation model is a mapping relationship between the grinding time and the water spraying time. Therefore, the embodiment of the present application can flexibly determine the water spraying time according to the grinding time, and the grinding time largely characterizes the degree of grinding. Therefore, the method for determining the water spraying time of the grinding wheel in the embodiment of the present application can achieve the purpose of flexibly determining the water spraying time according to the degree of grinding, thereby making the cleaning after grinding thorough and effectively avoiding the phenomenon of excessive cleaning.

[0061] In one embodiment of the present application, see Figure 2 As shown, the method further includes:

[0062] Step S13: If the correspondence between the user identification information and the pre-trained water spraying duration calculation model is not stored in the preset database, a preset warning message is sent, and a preset number of grinding time-required water spraying duration data sets are received;

[0063] Step S15: fitting a first target water spraying duration to obtain a model based on the preset number of grinding duration-required water spraying duration data sets.

[0064] In the embodiment of the present application, the situation described in which the correspondence between the user identification information and the water spraying duration calculation model is not stored in the preset database includes: the user identification information does not exist in the preset database at all, or the user identification information exists in the preset database, but the water spraying duration calculation model corresponding to the user identification information is not stored.

[0065] After determining that the correspondence between the user identification information and the water spraying time calculation model is not stored in the preset database, a preset warning message is sent. The purpose of sending the preset warning message is to remind the front-end user. After receiving the warning message, the front-end user can send a preset number of grinding time-required water spraying time data, and then fit it according to the sent grinding time-required water spraying time data to fit the water spraying time calculation model.

[0066] After receiving a preset number of grinding time-required water spray time data sets, a water spray time calculation model can be fitted based on the received grinding time-required water spray time data sets. As a real-time method, several mathematical models are stored in a preset database, such as a linear model, a quadratic model, and a cubic model for calculating water spray time based on grinding time. It should be noted that the so-called linear model, quadratic model, and cubic model here refer to the highest power of grinding time in the water spray time calculation model.

[0067] In an embodiment of the present application, when the preset database does not store the correspondence between the identification information and the pre-trained water spraying time calculation model, a warning message is sent. After receiving the warning message, the user can automatically set the water spraying time calculation model, mainly including setting the highest power of the grinding time in the water spraying time calculation model and the coefficients of each term in the polynomial. If the user needs to set different water spraying time calculation models according to the range of grinding time, the background will simultaneously push request information including the grinding time range, so that the user can set the water spraying time calculation model according to demand.

[0068] Further, see Figure 3 As shown, in step S15, fitting the grinding time-water spraying time mathematical model based on the preset number of grinding time-required water spraying time data groups includes:

[0069] Step S151, storing the grinding time in a preset number of grinding time-required water spraying time data groups into a first data group, and storing the corresponding required water spraying time into a second data group;

[0070] Based on common habits, when users input a preset number of grinding time-required water spraying time data groups, they tend to input a grinding time, and then input the required water spraying time corresponding to the grinding time; then they input the next grinding time, and continue to input the next required water spraying time corresponding to the next grinding time. Therefore, before fitting the water spraying time calculation model, this application first groups the preset number of grinding time-required water spraying time data groups input by the user. The principle is to put the grinding time in the first data group and the required water spraying time in the second data group; specifically, the grinding time stored in the first data group is [Y1, Y2, Y3, Y4, Y5, Y6], and the grinding time stored in the second data group is [P1, P2, P3, P4, P5, P6].

[0071] Step S152: Substitute each grinding time in the first data set into each pre-stored mathematical model to obtain a corresponding water spraying time data set; each water spraying time data set stores the grinding time in the first data set and a first fitted water spraying time calculated based on the grinding time in the first data set and the corresponding mathematical model;

[0072] In an embodiment of the present application, the grinding times [Y1, Y2, Y3, Y4, Y5, Y6] stored in the first data group are brought into a pre-stored mathematical model in a preset order. The preset order here does not refer to the order of the grinding times stored in the first data group, but the order of the pre-stored mathematical models, such as bringing the data in the first data group into the first water spraying time calculation mathematical model, the second water spraying time calculation mathematical model and the third water spraying time calculation mathematical model in sequence, or bringing the data in the third water spraying time calculation mathematical model, the second water spraying time calculation mathematical model and the first water spraying time calculation mathematical model in sequence.

[0073] Take the three preset mathematical models in the database as an example to illustrate:

[0074] After the grinding time [Y1, Y2, Y3, Y4, Y5, Y6] stored in the first data group is substituted into the first water spraying time calculation mathematical model, the third data group [X1, X2, X3, X4, X5, X6] is obtained; after the grinding time [Y1, Y2, Y3, Y4, Y5, Y6] stored in the first data group is substituted into the second water spraying time calculation mathematical model, the fourth data group [Z1, Z2, Z3, Z4, Z5, Z6] is obtained; after the grinding time [Y1, Y2, Y3, Y4, Y5, Y6] stored in the first data group is substituted into the third water spraying time calculation mathematical model, the fifth data group [W1, W2, W3, W4, W5, W6] is obtained.

[0075] Step S153, calculating the mean square error of the first fitting water spraying duration in each water spraying duration data group and the required water spraying duration in the second data group;

[0076] In the embodiment of the present application, after determining the fitted water spraying time data set in each grinding time data set, an optimal water spraying time data set is selected from the water spraying time data sets fitted based on multiple mathematical models. The specific selection method is: for each obtained water spraying time data set, the mean square error between it and the required water spraying time in the second data set is calculated. The water spraying time data set corresponding to the minimum mean square error may be the mathematical model obtained by fitting the water spraying time. Specifically, taking the three water spraying time calculation mathematical models as an example:

[0077] The model for the mean square error δ1 between the water spraying duration in the third data group and the required water spraying duration in the second data group is:

[0078]

[0079] The model for the mean square error δ2 between the spraying duration in the fourth data group and the required spraying duration in the second data group is:

[0080]

[0081] The model for the mean square error δ3 between the water spraying duration in the fifth data group and the required water spraying duration in the second data group is:

[0082]

[0083] Step S154, determining the pre-stored mathematical model corresponding to the minimum mean square error; if the minimum mean square error is less than the preset variance threshold, determining that the pre-stored mathematical model corresponding to the minimum mean square error is the first target water spraying duration mathematical model obtained by fitting the preset number of grinding duration information-required water spraying duration information data groups.

[0084] In an embodiment of the present application, after determining the mathematical model for obtaining the water spraying time corresponding to the minimum mean square deviation, it is further determined whether the minimum mean square deviation meets the preset requirements, that is, whether it is less than the preset variance threshold. If so, it is determined that the mathematical model for obtaining the water spraying time corresponding to the minimum mean square deviation is the mathematical model for obtaining the target water spraying time obtained by fitting the preset number of grinding time-required water spraying time data groups.

[0085] Further, in the examples of this application, see Figure 4 As shown, the method further includes:

[0086] Step S171: deriving a mathematical model for the water spraying duration, sending a second fitting water spraying duration determined by using the mathematical model derived from the first target water spraying duration, and the difference between each grinding duration in the second data set and the corresponding required water spraying duration and the second fitting water spraying duration;

[0087] In an embodiment of the present application, after fitting a mathematical model for obtaining the target water spraying time based on a preset number of received grinding time-required water spraying time data groups, the difference between the water spraying time corresponding to each fitted grinding time obtained by calculating the mathematical model for obtaining the target water spraying time and the required water spraying time can be used. After all, there may be some deviation between the water spraying time corresponding to each grinding time obtained by using the fitted mathematical model for obtaining the target water spraying time and the required water spraying time input by the user. This deviation is sent to the user to see whether the user can accept this deviation.

[0088] Step S172: Sending a prompt message indicating whether to use the fitted first target water spraying duration to obtain a mathematical model for automatic calculation of the water spraying duration;

[0089] In an embodiment of the present application, at the same time as or after sending the deviation between the water spraying time corresponding to each grinding time obtained according to the mathematical model for obtaining the target water spraying time and the required water spraying time input by the user, a prompt message is sent to indicate whether to use the fitted mathematical model for obtaining the target water spraying time to automatically calculate the water spraying time, and then determine whether to bind the fitted mathematical model for obtaining the target water spraying time to the user identification information based on the user's operation within a preset time period.

[0090] Step S173: If confirmation information for obtaining a mathematical model for the first target water spraying duration is received within a preset time period, the fitted mathematical model for obtaining the first target water spraying duration is bound to the user identification information.

[0091] In an embodiment of the present application, if the above-mentioned deviation is within the user-combinable range, the user will send a confirmation message for adopting the mathematical model for obtaining the target water spraying duration within a preset time period after receiving the prompt message. Therefore, upon receiving the confirmation message for obtaining the mathematical model for the fitted target water spraying duration within the preset time period, the fitted mathematical model for obtaining the target water spraying duration will be bound to the user identification information.

[0092] In the examples of this application, see Figure 5 As shown, the method further includes:

[0093] Step S1741: If no confirmation information for obtaining a mathematical model for the first target water spraying duration is received within a preset time period, a request information is sent for obtaining the highest power of the grinding duration in the mathematical model for the water spraying duration and the coefficients of various terms in the mathematical model;

[0094] In an embodiment of the present application, if confirmation information for obtaining a mathematical model for the fitted target water spraying time is not received within a preset time period, the user can set the mathematical model according to actual needs. The user sets the mathematical model by himself mainly to set the highest power of the grinding time and the coefficients of the various expressions in the mathematical model. Therefore, if confirmation information for obtaining a mathematical model for the fitted target water spraying time is not received within a preset time period, an embodiment of the present application sends a request information for the highest power of the grinding time and the coefficients of the various expressions in the mathematical model in the water spraying time to receive the mathematical model for obtaining the target water spraying time set by the user.

[0095] Step S1742: After receiving the highest power of the grinding time and the coefficients of the various expressions in the mathematical model, determine the mathematical model for obtaining the second target water spraying time based on the received highest power of the grinding time and the coefficients of the various expressions in the mathematical model, and bind the determined mathematical model for obtaining the second target water spraying time to the user identification information.

[0096] In an embodiment of the present application, after receiving the highest power number of the grinding time and the coefficients of the polynomials in the mathematical model input by the user, the mathematical model for obtaining the second target water spraying time is determined based on the highest power number of the grinding time and the coefficients of the polynomials in the mathematical model input by the user, and the determined mathematical model for obtaining the second target water spraying time is bound to the user information.

[0097] It should be noted that if different mathematical models are used for different grinding time intervals for each user identification information, then the grinding time interval information must also be sent when requesting the highest power of the grinding time and the coefficients of the various equations in the mathematical model for obtaining the water spraying duration. Similarly, while receiving the highest power of the grinding time and the coefficients of the various equations in the mathematical model, the maximum and minimum grinding times for setting the grinding time interval are also received. Based on the received highest power of the grinding time, the coefficients of the various equations in the mathematical model, and the maximum and minimum grinding times for the grinding time interval, a second target water spraying duration mathematical model is determined, and the determined second target water spraying duration mathematical model is bound to the user information.

[0098] In the embodiment of the present application, if in step S154, after determining the water spraying duration corresponding to the minimum mean square error to obtain the model, if the judgment result is that the minimum mean square error is not less than the preset variance threshold, the method further includes:

[0099] If the minimum mean square error is not less than a preset variance threshold, sending request information about the highest power of the grinding time in the mathematical model and coefficients of various equations in the mathematical model;

[0100] After receiving the highest power of the grinding time and the coefficients of the various expressions in the mathematical model, the mathematical model for obtaining the third target water spraying time is determined based on the received highest power of the grinding time and the coefficients of the various expressions in the mathematical model, and the determined mathematical model for obtaining the third target water spraying time is bound to the user identification information.

[0101] That is to say, when it is determined that the minimum variance is not less than the preset variance threshold, the method of obtaining the model by setting the water spraying duration according to the actual needs of the user is also executed.

[0102] In an embodiment of the present application, when the minimum mean square error between the water spraying duration data group obtained by the fitted water spraying duration obtaining model and the required water spraying duration in the second data group is not less than the preset variance threshold, the mathematical model for obtaining the second target water spraying duration is also executed according to user needs.

[0103] As an optional embodiment of the present application, the first mathematical model may be:

[0104] M1=aN+b;

[0105] Wherein, M1 is the water spraying time obtained by using the first mathematical model; a is the coefficient of the first power of the grinding time N in the linear equation, and b is the intercept in the linear equation;

[0106] The second mathematical model can be:

[0107] M2=cN 2 +dN+e;

[0108] Wherein, M2 is the water spraying time obtained by the second mathematical model; c is the coefficient of the second power of the grinding time N in the quadratic formula, d is the coefficient of the first power of the grinding time N in the quadratic formula; e is the intercept in the quadratic formula;

[0109] The third mathematical model can be:

[0110] M3=fN 3 +gN 2 +hN+i;

[0111] Wherein, M3 is the water spraying time obtained by using the second mathematical model; f is the coefficient of the grinding time N raised to the power of the cubic formula, g is the coefficient of the grinding time N raised to the power of the cubic formula, h is the coefficient of the grinding time N raised to the power of the cubic formula; i is the intercept in the cubic formula;

[0112] The embodiments of the present application are described using the first mathematical model as a linear form of the grinding time N, the second mathematical model as a quadratic form of the grinding time N, and the third mathematical model as a cubic form of the grinding time N as examples. This does not specifically limit the number of pre-stored mathematical models or each specific mathematical model.

[0113] In the second aspect, according to an embodiment of the present application, a device for automatically determining the water spraying time of a grinding wheel is provided, see Figure 6 As shown, including:

[0114] The receiving module 61 is configured to receive the first grinding time information and user information, wherein the user information includes user identification information;

[0115] a model determination module 62 configured to select a pre-trained grinding time-water spraying time mathematical model from the preset database based on the user identification information and the first grinding time information if the user identification information is stored in the preset database; and a correspondence between the grinding time information and the grinding time-water spraying time mathematical model is stored in the preset database for the same user identification information;

[0116] The cleaning module 63 determines a first fitting water spraying duration based on the selected water spraying duration calculation model, and cleans the grinding wheel based on the first fitting water spraying duration; the cleaning includes acid cleaning and water cleaning.

[0117] In an embodiment of the present application, the device further includes:

[0118] a sending and receiving module, configured to send a preset warning message and receive a preset number of grinding time-required water spray time data sets if the correspondence between the user identification information and the pre-trained water spray time calculation model is not stored in the preset database;

[0119] The model fitting module is used to fit the first target water spraying duration to obtain a model based on the preset number of grinding duration-required water spraying duration data groups.

[0120] In an embodiment of the present application, when the correspondence between the user identification information and the pre-trained water spraying time calculation model is not stored in the preset database, a warning message is sent. After receiving the warning message, the user can automatically set the water spraying time calculation model, mainly including setting the highest power of the grinding time in the water spraying time calculation model and the coefficients of each term in the polynomial. If the user needs to set different water spraying time calculation models according to the range of grinding time, the background will simultaneously push request information including the grinding time range, so that the user can set the water spraying time calculation model according to demand.

[0121] In an embodiment of the present application, if confirmation information for obtaining a mathematical model for the fitted target water spraying time is not received within a preset time period, the user can set the mathematical model according to actual needs. The user sets the mathematical model by himself mainly to set the highest power of the grinding time and the coefficients of the various expressions in the mathematical model. Therefore, if confirmation information for obtaining a mathematical model for the fitted target water spraying time is not received within a preset time period, an embodiment of the present application sends a request information for the highest power of the grinding time and the coefficients of the various expressions in the mathematical model in the water spraying time to receive the mathematical model for obtaining the target water spraying time set by the user.

[0122] The device for automatically determining the duration of water spraying on a grinding wheel described in this embodiment can be a microcomputer processing device that can be mounted on a grinding machine or can be connected to and transmit signals from the grinding machine. This device can include, but is not limited to, a processor and a memory. The device for automatically determining the duration of water spraying on a grinding wheel described in this embodiment includes at least a processor and a memory. The memory stores a computer program that can be executed on the processor. When the processor executes the computer program, it implements the steps of the embodiment of the method for automatically determining the duration of water spraying on a grinding wheel. Alternatively, when the processor executes the computer program, it implements the functions of the various modules of the device for automatically determining the duration of water spraying on a grinding wheel described in the above-mentioned embodiment.

[0123] Exemplarily, the computer program can be divided into one or more modules, which are stored in the memory and executed by the processor to implement the present invention. The one or more modules can be a series of computer program instruction segments capable of performing specific functions, and the instruction segments are used to describe the execution process of the computer program in the device for automatically determining the duration of water spraying on the grinding wheel. For example, the computer program can be divided into a fisheye image acquisition module and a feature point and feature vector extraction module. The specific functions of each module are as follows:

[0124] A receiving module, configured to receive first grinding time information and user information, wherein the user information includes user identification information;

[0125] a model determination module configured to select a pre-trained grinding time-water spraying time mathematical model from the preset database based on the user identification information and the first grinding time information if the user identification information is stored in the preset database; and store a correspondence between the grinding time information and the grinding time-water spraying time mathematical model for the same user identification information in the preset database;

[0126] The cleaning module determines a first water spraying duration based on a selected water spraying duration calculation model, and cleans the grinding wheel based on the first water spraying duration; the cleaning includes acid cleaning and water cleaning.

[0127] The processor may include one or more processing cores, such as a 4-core processor, a 6-core processor, etc. The processor may be implemented in at least one hardware form of DSP (Digital Signal Processing), FPGA (Field-Programmable Gate Array), or PLA (Programmable Logic Array). The processor may also include a main processor and a coprocessor. The main processor is a processor for processing data in the awake state, also known as a CPU (Central Processing Unit); the coprocessor is a low-power processor for processing data in the standby state. In some embodiments, the processor may also include an AI (Artificial Intelligence) processor, which is used to process computing operations related to machine learning. The processor is the control center of the device for automatically determining the water spraying time of the grinding wheel, and uses various interfaces and lines to connect the various parts of the device for automatically determining the water spraying time of the grinding wheel.

[0128] The memory can be used to store the computer programs and / or modules. The processor implements the various functions of the device for automatically determining the duration of water spraying on the grinding wheel by running or executing the computer programs and / or modules stored in the memory and accessing the data stored in the memory. The memory can primarily include a program storage area and a data storage area. The program storage area can store an operating system, at least one application required for a function, and the data storage area can store data generated based on the use of the mobile phone (such as audio data, a phone book, etc.). Furthermore, the memory can include high-speed random access memory (RAM) and non-volatile memory, such as a hard disk, internal memory, a plug-in hard disk, a smart media card (SMC), a secure digital (SD) card, a flash card, at least one disk storage device, a memory device, or other volatile solid-state storage device.

[0129] Those skilled in the art will understand that the device described in this embodiment is merely an example of a device for automatically determining the duration of water spraying on a grinding wheel, and does not constitute a limitation on the device. In other implementations, the device may include more or fewer components, or a combination of certain components, or different components. For example, the device for automatically determining the duration of water spraying on a grinding wheel may also include input and output devices, network access devices, buses, and the like. The processor, memory, and peripheral device interface may be connected via a bus or signal lines. Each peripheral device may be connected to the peripheral device interface via a bus, signal lines, or circuit boards. Schematically, peripheral devices include, but are not limited to, radio frequency circuits, touch screen displays, audio circuits, and power supplies.

[0130] Of course, the device for automatically determining the duration of water spraying on the grinding wheel may also include fewer or more components, which is not limited in this embodiment.

[0131] Optionally, the present application also provides a computer-readable storage medium, which stores a computer program. When the computer program is executed by a processor, it is used to implement the steps of the above-mentioned method for automatically determining the water spraying time of the grinding wheel.

[0132] Optionally, the present application also provides a computer product, which includes a computer-readable storage medium, in which a program is stored. The program is loaded and executed by a processor to implement the steps of the above-mentioned embodiment of the method for automatically determining the water spraying duration of the grinding wheel.

[0133] The technical features of the above-mentioned embodiments can be combined arbitrarily. In order to make the description concise, not all possible combinations of the technical features in the above-mentioned embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0134] The above-described embodiments merely represent several implementation methods of the present application. While the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the present invention. It should be noted that a person skilled in the art could make various modifications and improvements without departing from the spirit of the present application, all of which fall within the scope of protection of the present application. Therefore, the scope of protection of the present patent application shall be determined by the appended claims.

[0135] Obviously, the above embodiments are merely examples for clarity of explanation and are not intended to limit the implementation methods. Those skilled in the art will readily appreciate that other variations or modifications based on the above descriptions are possible. It is not necessary and impossible to enumerate all implementation methods here. Obvious variations or modifications arising therefrom remain within the scope of protection of the present invention.

Claims

1. A method for automatically determining the duration of water spraying on a grinding wheel, characterized in that: The steps include: receiving user information, and determining user identification information based on the user information; If the user identification information is stored in a preset database, a pre-trained water spray duration calculation model is selected from the preset database according to the user identification information; for the target user identification information, a correspondence between the user identification information and the water spray duration calculation model in the preset database is determined; Determining a first fitting water spraying duration based on the selected water spraying duration calculation model, and cleaning the grinding wheel based on the first fitting water spraying duration; the cleaning includes acid cleaning and water cleaning; If the correspondence between the user identification information and the pre-trained water spraying duration calculation model is not stored in the preset database, a preset warning message is sent, and a preset number of grinding time-required water spraying duration data sets are received; Fitting a first target water spraying duration to obtain a model based on the preset number of grinding duration-required water spraying duration data sets; wherein, the model includes: The grinding time in the preset number of grinding time-required water spraying time data groups is stored in the first data group, and the corresponding required water spraying time is stored in the second data group; Each grinding time in the first data set is brought into each pre-stored mathematical model to obtain a corresponding water spraying time data set; each water spraying time data set stores the grinding time in the first data set and a first fitting water spraying time calculated based on the grinding time in the first data set and the corresponding mathematical model; Calculate the mean square error of the first fitting water spraying duration in each water spraying duration data group and the required water spraying duration in the second data group; Determine the pre-stored mathematical model corresponding to the minimum mean square error. If the minimum mean square error is less than the preset variance threshold, determine that the pre-stored mathematical model corresponding to the minimum mean square error is the first target water spraying duration mathematical model obtained by fitting based on the preset number of grinding time information-required water spraying duration information data groups.

2. The method according to claim 1, characterized in that The method further comprises: Obtaining a mathematical model for the water spraying duration, transmitting a second fitting water spraying duration determined by using the mathematical model for obtaining the first target water spraying duration, and a difference between each grinding duration in the second data set and the corresponding required water spraying duration and the second fitting water spraying duration; Sending a prompt message indicating whether to use the fitted first target water spraying duration to obtain a mathematical model for automatic calculation of the water spraying duration; If confirmation information for obtaining the mathematical model for the first target water spraying duration is received within a preset time period, the fitted mathematical model for obtaining the first target water spraying duration is bound to the user identification information.

3. The method according to claim 2, characterized in that The method further comprises: If no confirmation information for obtaining the mathematical model for the first target water spraying duration is received within a preset time period, a request information for obtaining the highest power of the grinding duration in the mathematical model for the water spraying duration and coefficients of various terms in the mathematical model is sent; After receiving the highest power of the grinding time and the coefficients of the various expressions in the mathematical model, the mathematical model for obtaining the second target water spraying time is determined based on the received highest power of the grinding time and the coefficients of the various expressions in the mathematical model, and the determined mathematical model for obtaining the second target water spraying time is bound to the user identification information.

4. The method according to claim 1, wherein The method further comprises: If the minimum mean square error is not less than a preset variance threshold, sending request information about the highest power of the grinding time in the mathematical model and coefficients of various equations in the mathematical model; After receiving the highest power of the grinding time and the coefficients of the various expressions in the mathematical model, the mathematical model for obtaining the third target water spraying time is determined based on the received highest power of the grinding time and the coefficients of the various expressions in the mathematical model, and the determined mathematical model for obtaining the third target water spraying time is bound to the user identification information.

5. A device for automatically determining the duration of water spraying on a grinding wheel, characterized in that: include: A receiving module, configured to receive user information and determine user identification information based on the user information; a model determination module, configured to select a pre-trained water spray duration calculation model from a preset database according to the user identification information if the user identification information is stored in the preset database; For the target user identification information, the corresponding relationship between the user identification information and the water spraying duration calculation model in the preset database; a cleaning module, configured to determine a first fitting water spraying duration based on a selected water spraying duration calculation model, and clean the grinding wheel based on the fitting water spraying duration; the cleaning includes acid cleaning and water cleaning; a sending and receiving module, configured to send a preset warning message and receive a preset number of grinding time-required water spray time data sets if the correspondence between the user identification information and the pre-trained water spray time calculation model is not stored in the preset database; A model fitting module is used to fit the first target water spraying duration to obtain a model based on the preset number of grinding duration-required water spraying duration data sets; wherein, it includes: The grinding time in the preset number of grinding time-required water spraying time data groups is stored in the first data group, and the corresponding required water spraying time is stored in the second data group; Each grinding time in the first data set is brought into each pre-stored mathematical model to obtain a corresponding water spraying time data set; each water spraying time data set stores the grinding time in the first data set and a first fitting water spraying time calculated based on the grinding time in the first data set and the corresponding mathematical model; Calculate the mean square error of the first fitting water spraying duration in each water spraying duration data group and the required water spraying duration in the second data group; Determine the pre-stored mathematical model corresponding to the minimum mean square error. If the minimum mean square error is less than the preset variance threshold, determine that the pre-stored mathematical model corresponding to the minimum mean square error is the first target water spraying duration mathematical model obtained by fitting based on the preset number of grinding time information-required water spraying duration information data groups.

6. A device for automatically determining the duration of water spraying on a grinding wheel, the device comprising a processor, a memory, and a computer program stored in the memory and executable on the processor, wherein: The computer program is loaded and executed by the processor to implement the steps of the method for automatically determining the water spraying duration of the grinding wheel according to any one of claims 1 to 4.

7. A computer-readable storage medium storing a computer program, characterized in that: When the computer program is executed by a processor, it is used to implement the steps of the method for automatically determining the water spraying duration of the grinding wheel as claimed in any one of claims 1 to 4.

Citation Information

Patent Citations

  • Extraction system for water injection duration

    CN109528335A

  • Data prediction method and device, computer equipment and storage medium

    CN112256760A