Conductor and test socket apparatus for testing semiconductor devices

Abstract

The present invention relates to a conductor for testing semiconductor devices and a socket device, and the conductor is a spring conductor which is integrally formed by blanking and bending a metal plate, and includes an elastic portion formed of a plurality of strips in a certain pattern and tip portions respectively provided at both ends of the elastic portion, and preferably has excellent durability and electrical characteristics by filling a filler having electrical conductivity and elasticity in an inner space of the conductor. Also, the test socket of the present invention is a rubber type socket using the above conductor, and has an effect of being suitable for testing devices with a micro gap.

Description

[0001] This application is a divisional application of Chinese patent application filed on June 23, 2017, with application number 201780091218.4, entitled "Conductor and Test Socket Apparatus for Testing Semiconductor Devices", and entered the Chinese national phase on November 25, 2019. Technical Field

[0002] This invention relates to conductor and socket devices for testing semiconductor devices, and more specifically, to conductor and socket devices for electrical connections between contacts and terminals, built into test sockets for testing ICs (integrated circuits), for electrically connecting IC leads to PCB pads, or for electrically connecting the PCB of personal computers (PCs), mobile phones, and other electronic products to ICs such as CPUs (central processing units). Background Technology

[0003] Test sockets are components used in semiconductor post-processing steps to inspect defective semiconductor devices. Test sockets are components used to contact the device at the first terminal and transmit signals transmitted through the test device and test board to the device during the test process.

[0004] The test socket requires stable mechanical contact characteristics to ensure that individual components move to the correct position and make accurate contact with the test board; at the same time, it requires stable electrical contact characteristics to ensure that the contact points can transmit signals without distortion.

[0005] These test sockets are consumable parts. Due to repeated testing processes, their mechanical and electrical characteristics will deteriorate. Therefore, there is an urgent need to extend the lifespan of the test sockets and increase the number of times they can be used, in order to save on testing costs.

[0006] In addition, there are two main reasons that determine the lifespan of a socket. The first is that unstable contact in the mechanical parts can cause socket damage, and the second is that continuous contact can lead to contamination of the contact points, resulting in increased contact resistance and unstable electrical characteristics.

[0007] Test sockets are typically classified into pin type and rubber type based on the shape of the conductive mechanism that connects semiconductor devices and test equipment.

[0008] Figure 1 (a) and Figure 1 (b) are cross-sectional views of a typical pin-type and a rubber-type test socket, respectively.

[0009] refer to Figure 1(a) The pin-type test socket 10 includes a socket body 11 with a plurality of flexible and bent conductor pins 12, a cover 13 on the upper part of the socket body 11 that can move up and down, and a latch 14 rotatably assembled to the socket body 11 and linked with the up and down movement of the cover 13 to fix or release the device 20.

[0010] The conductor pin 12 is elastic in the vertical direction and serves as the terminal of the electrical connection device and the pad of the test device. There are various conductor pins depending on the material and shape of the terminal of the device and the pad of the test device, such as spring pins composed of pistons, cylinders and springs.

[0011] The latch 14 has a guide groove 14a, on which a guide pin 15a is attached. One end of the guide pin 15a is fixed to a drive linkage 15 that is hinged to the cover 13. The cover 13 is elastically supported by a helical spring 16.

[0012] When the cover 13 is pressed down, the latch 14 of the pin-type test socket 10 configured as described above unfolds outward so that the device 20 can be loaded. When the cover 13 is released, the latch 14 presses down on the upper part of the device 20 to fix it due to the elastic restoring force of the coil spring 16.

[0013] However, in this type of pin-type test socket, the conductor pin 12 has a spiral or curved structure to achieve flexibility, which increases the current path and causes signal loss. Furthermore, the spiral or curved structure is not conducive to the ultra-high frequency band. In addition, the manufacturing process of the housing structure for accommodating the conductor pin 12 in the micro-pitch test socket is complex and the cost is significantly increased.

[0014] Afterwards, refer to Figure 1 (b) The rubber-type test socket 30 includes: a connector body 31 having an insulating silicone powder that is elastic after curing; and a conductive silicone portion 32 formed vertically through the connector body 31 and corresponding to the solder ball (terminal) 21 of the device 20. The conductive silicone portion 32 has a generally cylindrical shape and extends vertically through the connector body 31.

[0015] In the manufacturing method of this rubber-type test socket, when insulating powder and conductive powder are mixed in a specified ratio to form a silicone mixture, placed in a mold and melted, and then electricity is applied to the position where the conductive silicone part 32 is formed, the conductive powder of the silicone mixture gathers at the energized position, and finally the molten silicone mixture is solidified to obtain the test socket 30 with the conductive silicone part 32 formed.

[0016] The test device is located at the lower part of the test socket 30 as described above. The lower end of the conductive silicone part 32 is in contact with the solder pad, and the upper end of the conductive silicone part 32 is in electrical contact with the solder ball 21 when a specified pressure is applied to the device 20 from the upper end.

[0017] Because this rubber-type test socket 30 is made of a flexible material and has elasticity, the upper surface of the conductive silicone part 32 makes stable electrical contact while surrounding the solder ball 21, at which time the central part of the conductive silicone part 32 expands and bulges.

[0018] However, this type of rubber test socket 30 has the disadvantage of losing elasticity during repeated testing, which significantly reduces its service life, resulting in a short number of uses and related replacement costs.

[0019] In particular, rubber-type test sockets are prone to short circuits because it is difficult to ensure sufficient insulation distance L between adjacent conductive silicone parts 32 in micro-pitch devices.

[0020] Specifically, in test sockets for micro-pitch devices, it is extremely important to ensure that there is sufficient insulation distance L between the conductive silicone parts 32 when the distance between them becomes very short.

[0021] As described above, the rubber-type test socket 30 is made by applying a voltage to a silicone mixture of insulating and conductive powders, causing the conductive powder to aggregate along the current path to form a conductive silicone portion 32. Therefore, the conductive powder aggregated along the current path cannot be distributed within a precisely defined size d, resulting in a continuously decreasing density D of the conductive powder within a range δ.

[0022] Therefore, the conductive silicone part 32 of the rubber-type test socket 30 is not precisely defined as the diameter d, but has a certain attenuation range δ. As a result, the insulation distance L between adjacent conductive silicone parts 32 is significantly shortened, which is very disadvantageous for test sockets used for micro-pitch applications.

[0023] Furthermore, in the manufacturing process of rubber-type test sockets, when applying voltage to the silicone molten mixture, a considerable amount of voltage needs to be applied for a long time in order to obtain sufficient conductive powder density along the current path. Therefore, it has the disadvantage of lengthening the manufacturing process.

[0024] To this end, the inventors have developed a novel hybrid conductor and test socket device that overcomes the disadvantages of both pin-type and rubber-type devices in the prior art while combining their advantages, and have filed a patent application.

[0025] Existing technical documents

[0026] Patent documents

[0027] Patent Document 1: Korean Patent Publication No. 10-2006-0062824 (Publication Date: June 12, 2006) Summary of the Invention

[0028] The problem the invention aims to solve

[0029] The present invention aims to solve the problems in the prior art and provides a test socket device for micro-pitch devices, which overcomes the shortcomings of the existing pin-type and rubber-type test socket devices, has excellent electrical characteristics and can extend service life.

[0030] Furthermore, the object of the present invention is to provide a conductor having a structure suitable for a test socket device for such micro-pitch devices.

[0031] means for solving problems

[0032] One aspect of the present invention discloses a conductor integrally formed by punching and rolling a metal sheet into a cylindrical shape, comprising: an upper head, which is cylindrical and has an upwardly protruding upper tip; an elastic portion extending obliquely downward from the upper head and formed by a strip helically bent into a cylindrical shape to be coaxial with the upper head; and a lower head having a lower tip that protrudes downward and extends vertically from the lower front end of the elastic portion to be coaxial with the elastic portion.

[0033] Another aspect of the conductor of the present invention is integrally formed by punching and rolling a metal sheet into a cylindrical shape, comprising: a first elastic portion, which is formed by connecting a plurality of closed loop strips of the same size in series through a first node and the closed loop strips are bent into a cylindrical shape; a second elastic portion, which is formed by connecting a plurality of closed loop strips of the same size as the closed loop strips of the first elastic portion in series through a second node and the closed loop strips are bent into a cylindrical shape; a bending node, which has a width and length longer than the first node and the second node and connects the lowermost and uppermost closed loop strips of the first elastic portion and the second elastic portion in series; an upper head, which has an upper pointed portion that protrudes upward and extends from the uppermost end of the first elastic portion and is bent into a cylindrical shape; and a lower head, which has a lower pointed portion that protrudes downward and extends from the lowermost end of the second elastic portion and is bent into a cylindrical shape.

[0034] Another aspect of the present invention discloses a conductor integrally formed by punching and rolling a metal sheet into a cylindrical shape, comprising: a first elastic portion formed by connecting horizontal and vertical unit strips into a serrated shape and bending the unit strips to form a cylindrical shape, wherein the vertical strips extend vertically from one end of the horizontal strips and are shorter than the length of the horizontal strips; a second elastic portion formed by connecting unit strips into a serrated shape and bending the unit strips to form a cylindrical shape, wherein the unit strips have the same structure and dimensions as the first elastic portion; a bending node having a width and length longer than the vertical strips of the first and second elastic portions, and perpendicularly connecting the center of the lowermost horizontal strip of the first and second elastic portions and the center of the uppermost horizontal strip of each; an upper head having an upper pointed portion that protrudes upward and extends from the uppermost end of the first elastic portion, and the upper head is bent into a cylindrical shape; and a lower head having a lower pointed portion that protrudes downward and extends from the lowermost end of the second elastic portion, and the lower head is bent into a cylindrical shape.

[0035] Preferably, it further includes a filler that fills at least the coil portion area between the upper head and the lower head, and is filled in a cylindrical shape, and the filler is a conductive and elastic filler.

[0036] Furthermore, the test socket of the present invention is a test socket including the above-mentioned conductor, comprising: an assembly portion having a plurality of through holes corresponding to the terminals of the device, the plurality of through holes being used to accommodate and configure the conductor; and an insulating body portion having elasticity, the insulating body portion fixing the conductor and the assembly portion together.

[0037] Invention Effects

[0038] According to the present invention, the conductor is a spring conductor integrally formed by punching and bending a metal sheet, comprising an elastic part composed of a single or closed loop strip of a certain pattern and pointed parts respectively provided at both ends of the elastic part. Preferably, the cylindrical internal space is filled with a conductive and elastic filler, thus overcoming the disadvantages of the pin-type test socket device and the rubber-type test socket device in the prior art, and has excellent electrical characteristics and can extend service life.

[0039] Furthermore, the test socket of the present invention is a rubber-type test socket using the aforementioned conductor, which can overcome the shortcomings of existing rubber-type test socket devices and is particularly suitable for testing micro-pitch devices. Attached Figure Description

[0040] Figure 1 (a) and Figure 1 (b) are cross-sectional views of a typical pin-type and a rubber-type test socket, respectively.

[0041] Figure 2 and Figure 3 This is a schematic diagram illustrating a conductor according to a first embodiment of the present invention;

[0042] Figure 4 and Figure 5 This is a schematic diagram illustrating a conductor according to a second embodiment of the present invention;

[0043] Figure 6 and Figure 7 This is a schematic diagram illustrating a conductor according to a third embodiment of the present invention;

[0044] Figure 8 and Figure 9 This is a schematic diagram illustrating a conductor according to a fourth embodiment of the present invention;

[0045] Figure 10 and Figure 11 This is a schematic diagram illustrating a conductor according to a fifth embodiment of the present invention;

[0046] Figure 12 and Figure 13 This is a schematic diagram illustrating a conductor according to a sixth embodiment of the present invention;

[0047] Figure 14 and Figure 15 This is a schematic diagram illustrating a conductor according to the seventh embodiment of the present invention;

[0048] Figure 16 and Figure 17 This is a schematic diagram illustrating a conductor according to the eighth embodiment of the present invention;

[0049] Figure 18 and Figure 19 This is a schematic diagram illustrating a conductor according to the ninth embodiment of the present invention;

[0050] Figure 20 and Figure 21 This is a schematic diagram illustrating a conductor according to the tenth embodiment of the present invention;

[0051] Figure 22 This is a schematic diagram illustrating a test socket according to a first embodiment of the present invention;

[0052] Figure 23 This is a schematic diagram illustrating a test socket according to a second embodiment of the present invention. Detailed Implementation

[0053] First, the terms or words used in this specification and the scope of the claims shall not be limited to their general or dictionary meanings, but shall be based on the concepts that the inventors may appropriately define in order to best describe their invention, in accordance with the meaning and concept of the technical idea of ​​the invention.

[0054] Therefore, the embodiments described in this specification and the configurations shown in the figures are only one preferred embodiment of the present invention and do not represent all the technical ideas of the present invention. Therefore, it should be understood that there may be many equivalents and modifications that can replace these.

[0055] The technical feature of the present invention is a hybrid conductor, which includes a conductor formed by rolling a strip of stamped metal sheet into a cylindrical shape to form a single conductor, and a conductive elastic filler portion filled into the cylindrical structure with the conductor as a substrate.

[0056] Hereinafter, the conductor of a preferred embodiment of the present invention will be described in detail with reference to the accompanying drawings.

[0057] First Embodiment

[0058] Figure 2 and Figure 3 This is a schematic diagram illustrating a conductor according to a first embodiment of the present invention. Figure 2 (a) shows the left and top views of the unfolded plate-shaped pattern from the left side. Figure 2 (b) shows the top and front views of the rolled conductor, starting from the top. Figure 3 (a) is a three-dimensional view of a conductor that has undergone rolling. Figure 3 (b) is a top view and front view of a hybrid conductor filled with filler, starting from the top.

[0059] refer to Figure 2 (a) and Figure 2 (b) and Figure 3 (a) The plate-shaped patterned conductor 100 of this embodiment includes: an upper head 110 having an upwardly protruding upper tip 111; an elastic portion 120 made of strips extending obliquely downward from the upper head 110; and a lower head 130 having a downwardly protruding lower tip 131 extending from the lower front end of the elastic portion 120.

[0060] For conductors, they can be manufactured by punching out sheets of materials such as beryllium copper (BeCu), copper alloys or stainless steel (SUS) according to a certain pattern and bending them into a cylindrical shape. They can be plated with gold, palladium (Pd), palladium nickel (PdNi), palladium nickel (PdNi) or palladium cobalt (PdCo).

[0061] The upper head 110 is formed by rolling a plate-shaped pattern into a cylindrical shape. At this time, the upper tip 111 can be composed of multiple teeth that protrude upward along the edge of the upper head 110.

[0062] The elastic portion 120 is a strip with a predetermined width, spirally bent into a cylindrical shape so as to be coaxial with the upper head 110 on C. In this embodiment, the extension section of the elastic portion 120 has a bending node 123, where the bending node 123 is a section of strips connected in different directions. This bending node 123 is located in a portion of the strip with an increasing or decreasing width, and serves as a rolling center point when the roll is processed into a cylindrical shape.

[0063] In this embodiment, the elastic portion 120 includes a first elastic portion 121 extending from the upper head 110 with reference to the bending node 123, and a second elastic portion 122 extending from the lower head 130 with reference to the bending node 123. The first elastic portion 121 and the second elastic portion 122 are symmetrical about the bending node 123 and extend in opposite directions, and the curling directions of the first elastic portion 121 and the second elastic portion 122 are opposite to each other.

[0064] The lower head 130 and the upper head 110 are located on the same axis C, so that the upper head 110, the elastic part 120 and the lower head 130 are located on the same axis C.

[0065] Then as Figure 3 As illustrated in (b), the cylindrical shape of the conductor 100 constructed as described above can be filled with a conductive and elastic filler 140. For reference, in this invention, the filler-filled conductor is specifically referred to as a hybrid conductor.

[0066] In this embodiment, the filler 140 can be an insulating component mixed with conductive particles. For example, a mixture of conductive powder and insulating silicon powder can be filled into a cylindrical conductor, melted and solidified to obtain a mixed conductor with conductive and elastic filler 140.

[0067] In addition, molds can be used during the melting and solidification process of the mixture. A bent conductor can be inserted into a mold with a receiving hole, the mixture can be placed into the receiving hole with the conductor inserted, and after melting and solidification, it can be separated from the mold to obtain the mixed conductor.

[0068] The conductive particles can be metallic particles, or particles coated with gold, silver, palladium (Pd), palladium nickel (PdNi), or palladium cobalt (PdCo) on the surface of metallic or non-metallic particles, or they can be mixed with carbon nanotubes, etc.

[0069] The main substrate constituting the filler 140 can be an insulating elastic polymer material, typically silicon, but not limited to it.

[0070] Furthermore, in this embodiment, the filler 140 is shown to be filled into a cylindrical shape from the upper tip 111 to the lower tip 131, but it can be filled into a cylindrical shape as needed in the coil portion 120 area where relatively large resistance occurs, except for the area between the upper head 110 and the lower head 130.

[0071] Second Embodiment

[0072] Figure 4 and Figure 5 This is a diagram illustrating a conductor according to a second embodiment of the present invention. Figure 4 (a) shows the left and top views of the unfolded plate-shaped pattern from the left side. Figure 4 (b) shows the top and front views of the rolled conductor, starting from the top. Figure 5 Starting from the top, these are the top and front views of a hybrid conductor filled with filler.

[0073] refer to Figure 4 (a) and Figure 4 (b) The plate-shaped conductor 200 of this embodiment includes: an upper head 210 having an upwardly protruding upper tip 211; an elastic portion 220 made of strips extending obliquely downward from the upper head 210; and a lower head 230 having a downwardly protruding lower tip 231 and extending from the lower front end of the elastic portion 220.

[0074] The upper head 210 is formed by rolling a plate-shaped pattern into a cylindrical shape, and an upper tip 211 consisting of multiple teeth is formed by protruding upward along the edge of the upper head 210.

[0075] The elastic portion 220 is a strip with a predetermined width, spirally bent into a cylindrical shape so as to be coaxial with the upper head 210 on C. In particular, in this embodiment, the extension section of the elastic portion 220 has a connecting node 223, which is located in a portion of the strip with an increasing or decreasing width, and acts as an action point when the roll is processed into a cylindrical shape.

[0076] In this embodiment, the elastic portion 220 includes a first elastic portion 221 extending from the upper head 210 with reference to the connecting node 223 and a second elastic portion 222 extending from the lower head 230 with reference to the connecting node 223. The first elastic portion 221 and the second elastic portion 222 extend at the same tilt angle, so the curling direction of the first elastic portion 221 and the second elastic portion 222 is the same.

[0077] The lower head 230 and the upper head 210 are located on the same axis C, so that the upper head 210, the elastic part 220 and the lower head 230 are located on the same axis C.

[0078] Then as Figure 5 For example, a hybrid conductor can be obtained by filling the cylindrical shape of the conductor 200 constructed as described above with a conductive and elastic filler 240.

[0079] The filler 240 can be prepared by filling a mixture of conductive powder and insulating silicon powder into the conductor 200 and curing it, as described in the first embodiment above. In the embodiments of the present invention, the materials of the conductor and the filler and the filling range are the same as those in the first embodiment above, so repeated descriptions are omitted below.

[0080] Third Embodiment

[0081] Figure 6 and Figure 7 This is a schematic diagram illustrating a conductor according to a third embodiment of the present invention. Figure 6 (a) shows the top and left views of the plate-like pattern from the left. Figure 6 (b) is a rolled conductor from the top. Figure 7 Starting from the top, these are the front and top views of a hybrid conductor filled with filler.

[0082] refer to Figure 6 (a) and Figure 6 (b) The plate-shaped patterned conductor 300 of this embodiment includes: an upper head 310 having an upwardly protruding upper tip 311; an elastic portion 320 made of strips extending obliquely downward from the upper head 310; and a lower head 330 having a downwardly protruding lower tip 331 and extending from the lower front end of the elastic portion 320.

[0083] The upper head 310 is formed by rolling a plate-like pattern into a cylindrical shape, and the upper tip 311 is composed of multiple teeth and protrudes upward along the edge of the upper head 310.

[0084] The elastic part 320 is a strip with a predetermined width, which is spirally bent into a cylindrical shape coaxial with the upper head 310. That is, the upper head 310 and the elastic part 320 are provided on the coaxial C, and the upper head 310 and the elastic part 320 are cylindrical shapes with the same size.

[0085] In addition, such as Figure 6 Example (b) shows that in this embodiment, the upper head 310 and the elastic part 320, which are bent into a cylindrical shape, are cylindrical in shape of the same size, but the upper head 310 and the elastic part 320 may also have different sizes.

[0086] In this embodiment, the elastic part 320 may differ from the above embodiment, that is, it may extend with a predetermined width and tilt angle and be rolled into a spiral shape in one direction without any additional nodes.

[0087] The lower head 330 and the upper head 310 are located on the same axis C, so that the upper head 310, the elastic part 320 and the lower head 330 are located on the same axis C.

[0088] In particular, in this embodiment, the lower head 330 may be different from the above embodiment, that is, it may be plate-shaped instead of cylindrical. In this case, the width of the lower head 330 is set to be slightly larger than the width of the elastic part 320, so that the lower head 330 acts as the action point when the elastic part roll with plate pattern is processed into a cylindrical shape.

[0089] like Figure 7 For example, a hybrid conductor can be obtained by filling the cylindrical shape of the conductor 300 as described above with a conductive and elastic filler 340. Preferably, the lower end of the filler 340 is located at the same height as the lower tip 331, and similarly, the upper end of the filler 340 is located at the same height as the upper tip, so that the filler 340 is filled in the internal space defined by the conductor 300.

[0090] Fourth embodiment

[0091] Figure 8 and Figure 9 This is a schematic diagram illustrating a conductor according to a fourth embodiment of the present invention. Figure 8 (a) is the top view and left view of the plate-shaped pattern. Figure 8 (b) shows the top and front views of the rolled conductor, starting from the top. Figure 9 (a) is a three-dimensional view of a conductor that has undergone rolling. Figure 9 (b) is a front view and top view of a hybrid conductor filled with filler, starting from the top.

[0092] refer to Figure 8 (a) and Figure 8 (b) and Figure 9 (a) The plate-shaped patterned conductor 400 of this embodiment includes: an upper head 410 having an upwardly protruding upper tip 411; an elastic portion 420 formed of strips extending from the upper head 410 into a serrated shape; and a lower head 430 having a downwardly protruding lower tip 431 and extending from the lower front end of the elastic portion 420.

[0093] The upper head 410 is formed by rolling a plate-like pattern into a cylindrical shape, and the upper tip 411 is composed of multiple teeth and protrudes upward along the edge of the upper head 410.

[0094] In this embodiment, the elastic portion 420 is a strip that extends from the upper head 410 into a serrated shape, including a first elastic portion 411 that extends obliquely downward from the upper head 410, a second elastic portion 412 that extends obliquely from the front end of the first elastic portion 411 and is symmetrical vertically, a third elastic portion 413 and a fourth elastic portion 414 that extend from the second elastic portion 412 through a bending node 415 and are configured to be symmetrical vertically with the second elastic portion 412 and the first elastic portion 411.

[0095] Preferably, the first elastic part 411 and the second elastic part 412 are connected by a first curved node 416a, and the third elastic part 413 and the fourth elastic part 414 are also connected by a second curved node 416b.

[0096] Therefore, in the elastic portion 420 that is bent into a cylindrical shape, the first elastic portion 411 and the third elastic portion 413 curl in the same direction, and the second elastic portion 412 and the fourth elastic portion 414 also curl in the same direction. At the same time, the curling directions of the first elastic portion 411 and the third elastic portion 413 are opposite to those of the second elastic portion 412 and the fourth elastic portion 414.

[0097] For reference, in the present invention, nodes of various shapes can be formed in the interval of the strip-shaped elastic part. According to the shape of the node, a node that bends at a locally continuously changing angle in the interval of the strip is called a "bending node", a node that bends at a discontinuously changing angle in the interval of the strip is called a "bending node", and a node that has a predetermined height difference in the interval of the strip extending in the same direction and has a width difference along the length direction of the strip is called a "connecting node".

[0098] As described above, this type of node can have a width difference along the length of the strip. It can function as a point of contact when the elastic portion of the sheet metal patterned roll is processed into a cylindrical shape, or it can change the curling direction of the elastic portion adjacent to the node, or it can set a spacing variation within the elastic portion interval of a coil shape. Therefore, in this invention, the elastic portion can achieve various deformations through this node, thereby enabling the realization of various spring (string) characteristics required of the conductor.

[0099] The lower head 430 and the upper head 410 are located on the same axis C, so that the upper head 410, the elastic part 420 and the lower head 430 are located on the same axis C.

[0100] like Figure 9 As shown in (b), a hybrid conductor can be obtained by filling the cylindrical interior of the conductor 400 constructed as above with a conductive and elastic filler 440.

[0101] Fifth embodiment

[0102] Figure 10 and Figure 11 This is a schematic diagram illustrating a conductor according to a fifth embodiment of the present invention. Figure 10 (a) shows the top and left views of the plate-like pattern from the left. Figure 10 (b) shows the top and front views of the rolled conductor, starting from the top. Figure 11 These are the front and top views of a hybrid conductor filled with filler.

[0103] refer to Figure 10 (a) and Figure 10 (b) The conductor 500 of the plate pattern in this embodiment includes: an upper head 510 having an upwardly protruding upper tip 511; an elastic portion 520 formed of strips extending from the upper head 510 in a serrated shape; and a lower head 530 having a downwardly protruding lower tip 531 and extending from the lower front end of the elastic portion 520.

[0104] In particular, in this embodiment, the straight section of the elastic part 520 includes connecting nodes 521a of different widths. These connecting nodes 521a enable the coil-shaped elastic part 520 to have intervals with different pitches (a1≠a2) when it is bent into a cylindrical shape, thereby enabling a variety of spring characteristics.

[0105] Furthermore, as described in the above embodiments, the elastic part 520 may have a bending node 522 in the interval where the direction of the extended strip changes.

[0106] The lower head 530 and the upper head 510 are located on the same axis C, so that the upper head 510, the elastic part 520 and the lower head 530 are located on the same axis C.

[0107] like Figure 11 For example, a hybrid conductor can be obtained by filling the interior of the cylindrical shape of the conductor 500 constructed as described above with a conductive and elastic filler 540.

[0108] Sixth Embodiment

[0109] Figure 12 and Figure 13 The accompanying drawing shows a conductor according to the sixth embodiment of the present invention. Figure 12 (a) shows the left and top views of the unfolded plate-shaped pattern from the left side. Figure 12 (b) shows the top view, front view, and bottom view of the rolled conductor, starting from the top. Figure 13 Starting from the top, the views are the top, front, and bottom views of a hybrid conductor filled with filler.

[0110] refer to Figure 12 (a) and Figure 12(b) The plate-shaped patterned conductor 600 of this embodiment includes: an upper head 610 having an upwardly protruding upper tip 611; an elastic portion 620 made of strips extending obliquely downward from the upper head 610; and a lower head 630 having a downwardly protruding lower tip 631 and extending from the lower front end of the elastic portion 620.

[0111] The upper head 610 is formed by rolling a plate-shaped pattern into a cylindrical shape, wherein the upper tip 611 is composed of multiple parts and protrudes upward along the edge of the upper head 610.

[0112] The elastic part 620 is a bar with a predetermined width, which is spirally bent into a cylindrical shape so as to be coaxial with the upper head 610 on C.

[0113] In particular, this embodiment is characterized in that the lower head 630 is inclined at a predetermined angle θ1 relative to the plane P of the plate-shaped pattern, and is bent at the cylindrical center to form a conical shape for the lower head 630.

[0114] refer to Figure 13 The cylindrical shape of the conductor 600 constructed as described above can be filled with a conductive and elastic filler 640.

[0115] Seventh Embodiment

[0116] Figure 14 and Figure 15 This is a schematic diagram illustrating a conductor according to the seventh embodiment of the present invention. Figure 14 (a) shows the left and top views of the unfolded plate-shaped pattern from the left side. Figure 14 (b) shows the top and front views of the rolled conductor, starting from the top. Figure 15 Starting from the top, these are the top and front views of a hybrid conductor filled with filler.

[0117] refer to Figure 14 (a) and Figure 14 (b) The plate-shaped patterned conductor 700 of this embodiment includes: an upper head 710 having an upwardly protruding upper tip 711; an elastic portion 720 made of strips extending obliquely downward from the upper head 710; and a lower head 730 having a downwardly protruding lower tip 731 and extending from the lower front end of the elastic portion 720.

[0118] In particular, in this embodiment, the upper tip 711 is composed of multiple teeth and has a predetermined tilt angle θ2 relative to the plane P of the plate-like pattern, thus bending into a conical shape with the cylindrical shape as the center. Furthermore, the lower tip 731 is also formed of multiple teeth and has a predetermined tilt angle θ3 relative to the plane P of the plate-like pattern, bending into a conical shape with the cylindrical shape as the center.

[0119] refer to Figure 15 The cylindrical shape of the conductor 700 constructed as described above can be filled with a conductive and elastic filler 740.

[0120] Eighth embodiment

[0121] Figure 16 and Figure 17 This is a schematic diagram showing the conductor according to the eighth embodiment of the present invention. Figure 16 (a) shows the left and top views of the unfolded plate-shaped pattern from the left side. Figure 16 (b) shows the top and front views of the rolled conductor, starting from the top. Figure 17 (a) is a three-dimensional view of a hybrid conductor filled with filler. Figure 17 (b) shows the top view and the front view sequentially from the top.

[0122] refer to Figure 16 (a) and Figure 16 (b) and Figure 17 (a) The plate-shaped patterned conductor 800 of this embodiment includes: an upper head 810 having an upwardly protruding upper tip 811; an elastic portion 820 made of strips extending obliquely downward from the upper head 810; and a lower head 830 having a downwardly protruding lower tip 831 and extending from the lower front end of the elastic portion 820.

[0123] In particular, in this embodiment, the upper tip 811 and the lower tip 831 are composed of multiple teeth. At this time, the upper head 810 and the lower head 830 are curled more than one turn to form a spiral, so that in the top view, the upper tip 811 and the lower tip 831 have a structure of being curled into a spiral.

[0124] refer to Figure 17 The cylindrical shape of the conductor 800 as described above can be filled with a conductive and elastic filler 840.

[0125] Ninth Embodiment

[0126] Figure 18 and Figure 19 This is a schematic diagram showing a conductor according to the ninth embodiment of the present invention. Figure 18 (a) shows the left and top views of the unfolded plate-shaped pattern from the left side. Figure 18 (b) shows the top and front views of the rolled conductor from the top. Figure 19 The top and front views of the hybrid conductor filled with filler are shown from the top.

[0127] refer to Figure 18 (a) and Figure 18 (b) The plate-shaped pattern of the conductor 900 in this embodiment includes a first elastic portion 910 with multiple closed loop bars 911 of the same size connected in series by a first node 912, a second elastic portion 920 with multiple closed loop bars 921 of the same size as the closed loop bars 911 connected in series by a second node 922, a bending node 930 with a width and length longer than the first node 912 and the second node 922 and connecting the lowermost and uppermost ends of the closed loop bars of the first elastic portion 910 and the second elastic portion 920 in series, an upper head 942 with an upwardly protruding upper tip 941 and extending from the uppermost end of the first elastic portion 910 and bent into a cylindrical shape, and a lower head 952 with a downwardly protruding lower tip 951 and extending from the lowermost end of the second elastic portion 920 and bent into a cylindrical shape.

[0128] In this embodiment, the closed-loop bars 911 and 921 constituting the first elastic part 910 and the second elastic part 920 are of the same size and have a roughly rectangular shape. Adjacent closed-loop bars 911 and 921 are connected in series by single nodes 912 and 922. In this embodiment, the first node 912 and the second node 922 are shown to have the same length and width, but their length and width may also be different from each other.

[0129] Furthermore, in this embodiment, the number of closed loops constituting the first elastic part 910 and the second elastic part 920 is the same and the structure is symmetrical about the bending node 930, but the number of closed loops constituting each elastic part may be different.

[0130] In this embodiment, the upper head 942 and the lower head 952 are shown to have the same unit strip (closed-loop strip) structure as the elastic parts 910 and 920, but they are not limited to this. Their shape can be a variety of shapes such as a non-closed-loop strip or a four-corner strip.

[0131] The upper tip 941 and the lower tip 951 can be composed of multiple teeth, and the multiple teeth of the upper tip and the lower tip can be conical (sixth embodiment, see reference). Figure 12 ).

[0132] The first elastic portion 910 and the second elastic portion 920 are bent into a cylindrical shape with the bending node 930 as the reference point. At this time, the upper head 942 and the lower head 952 can be longer than the width of the elastic portions 910 and 920 and be curled more than one turn to form a spiral winding structure (eighth embodiment, see reference). Figure 16 ).

[0133] refer to Figure 19 The cylindrical shape of the conductor 900 as described above can be filled with a conductive and elastic filler 960.

[0134] Tenth Embodiment

[0135] Figure 20 and Figure 21 This is a schematic diagram illustrating a conductor according to the tenth embodiment of the present invention. Figure 20 (a) shows the left and top views of the unfolded plate-shaped pattern from the left side. Figure 20 (b) shows the top and front views of the rolled conductor, starting from the top. Figure 21 The top and front views of the hybrid conductor filled with filler are shown from the top.

[0136] refer to Figure 20 (a) and Figure 20 (b) In this embodiment, the plate-shaped conductor 1100 includes a first elastic portion 1110 formed by serrated unit strips 1111 and 1112 connected by horizontal strips 1111 and vertical strips 1112; a second elastic portion 1120 formed by serrated unit strips 1121 and 1122 connected by serrated unit strips 1121 and 1122 having the same structure and size as the first elastic portion 1110; and a width and length longer than the vertical strips 1112 and 1122 forming the first elastic portion 1110 and the second elastic portion 1120. The bending node 1130 is located at the center of the horizontal strip at the bottom end of the first elastic part 1110 and the second elastic part 1120, and at the center of the horizontal strip at the top end of the first elastic part 1110 and the second elastic part 1120, respectively. The upper head 1142 has an upwardly protruding upper tip 1141 and extends from the top end of the first elastic part 1110 and is bent into a cylindrical shape. The lower head 1152 has a downwardly protruding lower tip 1151 and extends from the bottom end of the second elastic part 1120 and is bent into a cylindrical shape.

[0137] The first elastic part 1110 includes unit strips 1111 and 1112, which are composed of a horizontal strip 1111 and a vertical strip 1112 that extends vertically from one end of the horizontal strip 1111 and is shorter than the horizontal strip 1111. The multiple unit strips 1111 and 1112 are connected in a serrated shape.

[0138] The second elastic part 1120 also has the same structure and size as the first elastic part 1110 and has a serrated shape.

[0139] The bending node 1130 has a width and length that are longer than the vertical strips 1112 and 1122 that constitute the first elastic part 1110 and the second elastic part 1120, and vertically connects the center of the horizontal strips at the bottommost and topmost ends of the first elastic part 1110 and the second elastic part 1120, respectively. This bending node 1130 serves as a reference point during the rolling process of the elastic parts 1110 and 1120.

[0140] In this embodiment, the upper head 1142 and the lower head 1152 and the horizontal bars 1111 and 1121 of the elastic parts 1110 and 1120 are the same, but it is not limited to this, and the width and length may be different.

[0141] The upper tip 941 and the lower tip 951 may be composed of multiple teeth, and the multiple teeth of the upper tip and the lower tip may be conical (sixth embodiment, see reference). Figure 12 ).

[0142] The first elastic portion 1110 and the second elastic portion 1120 are bent into a cylindrical shape with the bending node 1130 as the reference point. At this time, the upper head 1142 and the lower head 1152 can be longer than the width of the elastic portions 1110 and 1120 and be curled more than once to form a spiral winding structure (eighth embodiment, see reference). Figure 16 )

[0143] refer to Figure 20 The cylindrical shape of the conductor 1100 constructed as described above can be filled with a conductive and elastic filler 1160.

[0144] The following is a detailed description of the test socket that uses this type of conductor.

[0145] First Embodiment

[0146] Figure 22 This is a schematic diagram illustrating a test socket according to a first embodiment of the present invention. Figure 22 (a) is a top view. Figure 22 (b) is a cross-sectional view of line AA.

[0147] refer to Figure 22 The test socket 2100 of this embodiment includes an assembly portion 2120 having a plurality of through holes 2121 for receiving and accommodating a conductor 2110 corresponding to the terminal 21 of the device 20, and an elastic insulating body portion 2130 for fixing the conductor 2110 and the assembly portion 2120 together.

[0148] The assembly part 2120 is an insulating plate having a plurality of through holes 2121 corresponding to the terminals 21 of the device 20 for inserting a portion of the lower end of the conductor 2110. The upper surface of the assembly part 2120 has an insulating body part 2130.

[0149] Reference numeral 2122 in the attached drawing is a guide hole, which serves to guide the assembly position of the test socket. Reference numeral 2123 in the attached drawing is a screw hole for installing the test socket.

[0150] In this embodiment, conductor 2110 is a conductor integrally formed by rolling into a cylindrical shape as illustrated above.

[0151] The insulating body part 2130 is an elastic insulating component that fixes the conductor 2110 and the assembly part 2120 together and places the device 20 on it.

[0152] This insulating body part 2130 can be provided by an insulating rubber liquid. For example, the conductor 2110 can be assembled into the through hole 2121 of the assembly part 2120. The rubber liquid is poured into the mold using a mold for molding the insulating body part 2130, hardened, and the mold is removed to obtain the insulating body part 2130 that fixes the assembly part 2120 and the conductor 2110 together.

[0153] Preferably, a certain length b1 of the lower tip of the conductor 2110 protrudes to the outside of the through hole 2121, thereby improving the contact with the pads of the test device. Alternatively, the upper tip of the conductor 2110 may also protrude a certain length to the outside of the upper surface of the insulating body portion 2130 facing the device 20 to improve the contact with the terminal 21 of the device 20.

[0154] Second Embodiment

[0155] Figure 23 This is a schematic diagram illustrating a test socket according to a second embodiment of the present invention. Figure 23 (a) is a top view. Figure 23 (b) is a cross-sectional view of the BB line.

[0156] refer to Figure 23 The test socket 2200 of this embodiment includes an assembly portion 2220 having a plurality of through holes 2221 for receiving and arranging a hybrid conductor 2210 corresponding to the terminal 21 of the device 20, and an elastic insulating body portion 2230 for fixing the hybrid conductor 2210 and the assembly portion 2220 together.

[0157] The assembly part 2220 is an insulating plate with a plurality of through holes 2221 corresponding to the terminals 21 of the device 20 and for inserting a portion of the lower end of the hybrid conductor 2210. The upper surface of the assembly part 2220 has an insulating body part 2230.

[0158] In particular, this embodiment is characterized in that the hybrid conductor 2210 used is a conductor that is rolled into a cylindrical shape and integrally formed as illustrated above and filled with a filler that has conductivity and elasticity.

[0159] The insulating body part 2230 is an elastic insulating component that fixes the hybrid conductor 2210 and the assembly part 2220 together and places the device 20 on it.

[0160] As described in the above embodiments, the insulating body 2230 is hardened from an insulating rubber liquid to fix the assembly 2220 and the hybrid conductor 2210 together.

[0161] Preferably, a certain length b1 of the lower tip of the conductor 2110 protrudes to the outside of the through hole 2121, thereby improving the contact with the pads of the test device. Alternatively, the upper tip of the conductor 2110 may also protrude a certain length to the outside of the upper surface of the insulating body portion 2130 facing the device 20 to improve the contact with the terminal 21 of the device 20.

[0162] As described above, although the present invention has been illustrated by limiting embodiments and accompanying drawings, the present invention is not limited thereto. Those skilled in the art to which this invention pertains can make various modifications and variations within the equivalent scope of the technical concept of the present invention and the appended claims.

[0163] Explanation of reference numerals in the attached figures

[0164] 100, 200, 300, 400, 500, 600, 700, 800, 900, 1100, 2110: Conductors

[0165] 110, 210, 310, 410, 510, 610, 710, 810: Upper head

[0166] 120, 220, 320, 420, 520, 620, 720, 820, 910, 920, 1110, 1120: Elastic part

[0167] 130, 230, 330, 430, 530, 630, 730, 830: Lower head

[0168] 111, 211, 311, 411, 511, 611, 711, 811, 941, 1141: Upper tip

[0169] 131, 231, 331, 431, 531, 631, 731, 831, 951, 1151: Lower tip

[0170] 123, 415, 522, 930, 1130: Bending nodes

[0171] 2100, 2200: Test sockets; 2210: Mixed conductor.

[0172] 2120, 2220: Assembly section; 2130, 2230: Insulation body section

Claims

1. A conductor configured in one body by blanking and rolling a metal sheet into a cylindrical shape, comprising: an upper head portion in a cylindrical shape and having an upper tip portion projecting upward; an elastic portion extending obliquely downward from the upper head portion and configured by a strip spirally curved into a cylindrical shape coaxial with the upper head portion; a lower head portion having a lower tip portion projecting downward and extending perpendicularly from a lower end of the elastic portion coaxial with the elastic portion; and a filler filling at least an interval of the coil portion between the upper head portion and the lower head portion and into a cylindrical shape, and having electrical conductivity and elasticity, the filler including a main base material and electrically conductive particles, the main base material using an elastic polymer substance having insulating properties; wherein the elastic portion has one or more bending portions at the extension thereof, the elastic portion includes a first elastic portion extending from a lower end of the upper head portion to the bending portion and a second elastic portion extending from an upper end of the lower head portion to the bending portion, the first elastic portion and the second elastic portion extend in directions opposite to each other so that the curling directions of the first elastic portion and the second elastic portion are opposite to each other, the upper tip portion is a plurality of teeth formed by projecting upward, the upper tip portion projects upward along an edge of the upper head portion, and an upper end of the filler is located at the same height as the upper tip portion. the elastic portion includes a bending node that is bent at an angle that changes locally discontinuously in an interval of the strip, and the bending node has a different width along the length direction of the strip. the elastic portion includes a bending node that is bent at an angle that changes locally continuously in an interval of the strip. the elastic portion includes a connection node that has a height difference in an interval in which the strip extends in the same direction and has a width difference along the length direction of the strip. the lower head portion is in a cylindrical shape integrally extended from the lower end of the elastic portion. the plurality of teeth of the upper tip portion are conical. the upper tip portion is in a cylindrical shape spirally curled more than one turn. the lower tip portion is a plurality of teeth formed by projecting downward. the plurality of teeth of the lower tip portion are conical. the lower tip portion is in a cylindrical shape spirally curled more than one turn.

11. A test socket including the conductor of any one of claims 1 to 10, further comprising: a fitting portion formed with a plurality of through holes corresponding to terminals of a device, the plurality of through holes for receiving the conductor arranged therein; and an insulating body portion having elasticity, the insulating body portion fixing the conductor and the fitting portion in one body. the lower tip portion of the conductor projects outside the through hole, and the upper tip portion projects outside an upper surface of the insulating body portion facing the device. ​ ​ ​ ​ ​ ​ ​ 2. The conductor of claim 1, wherein ​ 3. The conductor of claim 1, wherein ​ 4. The conductor of claim 1, wherein ​ 5. The conductor of claim 1, wherein ​ 6. The conductor of claim 1, wherein ​ 7. The conductor of claim 1, wherein ​ 8. The conductor of claim 5, wherein, ​ 9. The conductor of claim 8, wherein, ​ 10. The conductor of claim 9, wherein, ​ ​ ​ ​ 12. The test socket of claim 11, wherein, ​

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