Method and apparatus for virtual focal point size detection for objective lens group mounts

Abstract

The application provides a method and device for virtual focal point size detection of an objective lens group mounting seat, which comprises the following steps: constructing a three-dimensional orthogonal reference surface through a three-coordinate device according to the measured machining and installation reference of the objective lens group mounting seat, and establishing a Cartesian coordinate system based on the three-dimensional orthogonal reference surface; measuring three-dimensional size data of two objective lens mounting holes on the objective lens group mounting seat through the three-coordinate device, and constructing two axis lines corresponding to the two objective lens mounting holes respectively according to the three-dimensional size data; constructing a focal plane, wherein the focal plane is parallel to a Top surface in the three-dimensional orthogonal reference surface; judging whether the two intersection points formed between the two axis lines and the focal plane are located in a virtual small ball with a center being a point where the focal plane and the axis line of the Cartesian coordinate system intersect, and determining that the objective lens group mounting seat is qualified if yes. The application is helpful to use the qualified objective lens group mounting seat to an optical system.

Description

Technical Field

[0001] This application relates to the fields of wafer thin film measurement in the semiconductor industry and optical non-destructive testing, and in particular to a technical solution for detecting the virtual focal size of an objective lens assembly mount for paired objective lenses. Background Technology

[0002] Thin film inspection of semiconductor wafers is a crucial step in the semiconductor manufacturing process, and its importance is undeniable. Thin film thickness inspection utilizes elliptically polarized light, a non-destructive optical inspection method for wafer surfaces. In the optical inspection system, the incident and exit objectives are mounted in pairs for polarized light incident on. After focusing, the light is reflected from the wafer, and the reflected light passes through the exit objective, becoming parallel light that is then sent to the signal receiver after passing through a depolarizer. The objective lens assembly is typically installed, adjusted, and its optical path calibrated separately. However, some objective lens assemblies are mounted on a single mechanical component, the objective lens mount. Whether the dimensions of the holes on the objective lens mount meet the design tolerances is a crucial criterion for determining the quality of the objective lens mount.

[0003] When objectives are used in pairs, with extremely small tolerances between the two objectives and their mounts, in addition to checking the form and position tolerances of individual objective mounting holes on the objective mount, the most important thing is to determine the positional relationship between the two objective mounting holes on the objective mount. The key indicator reflecting this positional relationship is the virtual spatial focus of the objective determined by the two holes. However, in existing conventional inspection methods, there is a lack of direct measurement methods for high-precision virtual spatial focus. Conventional inspection methods require judging multiple dimensions separately and cannot directly determine whether the accuracy of the part meets the design requirements. Summary of the Invention

[0004] The purpose of this application is to provide a technical solution for detecting the virtual focal length of an objective lens mount. By using coordinate measuring machine (CMM) technology to determine the size of the virtual focal length of the objective lens mount in space, it helps to identify a qualified objective lens mount for use in the optical system, thereby improving the performance of the optical system and the success rate of assembly.

[0005] According to one aspect of this application, a method for detecting the virtual focal size of an objective lens assembly mount is provided, wherein the method includes:

[0006] Based on the measured machining and installation references of the objective lens mount, a three-dimensional orthogonal reference plane is constructed using a coordinate measuring machine, and a Cartesian coordinate system is established based on the three-dimensional orthogonal reference plane;

[0007] The three-dimensional dimensions of the two objective lens mounting holes on the objective lens assembly mount are measured using the coordinate measuring machine. Based on the three-dimensional dimensions, two axes corresponding to the two objective lens mounting holes are constructed respectively.

[0008] Construct a focal plane, wherein the focal plane is parallel to the Top plane in the three-dimensional orthogonal reference plane;

[0009] Determine whether the two intersection points formed between the two axes and the focal plane are both located within a virtual sphere centered on the point where the focal plane and the Cartesian coordinate system axis intersect. If so, determine that the objective lens assembly mount is qualified.

[0010] According to another aspect of this application, an apparatus for detecting the virtual focal size of an objective lens assembly mount is provided, wherein the apparatus includes:

[0011] The first module is used to construct a three-dimensional orthogonal reference plane using a coordinate measuring machine based on the measured machining and installation reference of the objective lens assembly mount, and to establish a Cartesian coordinate system based on the three-dimensional orthogonal reference plane.

[0012] The second module is used to measure the three-dimensional dimensions of the two objective lens mounting holes on the objective lens assembly mount using the coordinate measuring machine, and to construct two axes corresponding to the two objective lens mounting holes respectively based on the three-dimensional dimensions.

[0013] The third module is used to construct the focal plane, wherein the focal plane is parallel to the Top plane in the three-dimensional orthogonal reference plane;

[0014] The fourth module determines whether the two intersection points formed between the two axes and the focal plane are both located within a virtual sphere centered on the point where the focal plane and the Cartesian coordinate system axis intersect. If so, the objective lens assembly mount is deemed qualified.

[0015] According to another aspect of this application, a computer device is provided, wherein the computer device comprises:

[0016] Memory, used to store one or more programs;

[0017] One or more processors are connected to the memory.

[0018] When the one or more programs are executed by the one or more processors, the one or more processors perform the method for virtual focal size detection for objective lens mounts as described in this application.

[0019] According to another aspect of this application, a computer-readable storage medium is provided having a computer program stored thereon, the computer program being executable by a processor to perform the method for virtual focal size detection for an objective lens mount as described in this application.

[0020] Compared with the prior art, this application has the following advantages: After constructing a three-dimensional orthogonal reference plane using a coordinate measuring machine and establishing a Cartesian coordinate system based on the three-dimensional orthogonal reference plane, the three-dimensional dimensions of the objective lens mounting holes on the objective lens mount are further measured using a coordinate measuring machine, and two axes corresponding to the two objective lens mounting holes are constructed respectively. Then, a focal plane is constructed (the focal plane is translated when necessary), and it is determined whether the two intersection points formed between the two axes and the focal plane are both located within a virtual sphere centered on the point where the focal plane intersects with the axis of the Cartesian coordinate system. This determines whether the objective lens mount is qualified. By using coordinate measuring machine technology to determine the size of the virtual focal point in space, it is possible to use a qualified objective lens mount in the optical system, thereby improving the performance and assembly success rate of the optical system. Attached Figure Description

[0021] Figure 1 A flowchart illustrating a method for detecting the virtual focal size of an objective lens mount according to an embodiment of this application is shown.

[0022] Figure 2 A schematic diagram illustrating virtual focal size detection for an objective lens mount, as shown in this application, is provided.

[0023] Figure 3 A schematic diagram illustrating a focal plane translation of an example of this application is shown;

[0024] Figure 4 A schematic diagram of a device for detecting the virtual focal size of an objective lens assembly mount according to an embodiment of this application is shown.

[0025] Figure 5 Exemplary systems that can be used to implement the various embodiments described in this application are shown.

[0026] The same or similar reference numerals in the accompanying drawings represent the same or similar parts. Detailed Implementation

[0027] Before discussing the exemplary embodiments in more detail, it should be noted that some exemplary embodiments are described as processes or methods depicted as flowcharts. Although the flowcharts describe the operations as sequential processes, many of these operations can be performed in parallel, concurrently, or simultaneously. Furthermore, the order of the operations can be rearranged. The process can be terminated when its operation is completed, but may also have additional steps not included in the figures. The process can correspond to a method, function, procedure, subroutine, subroutine, etc.

[0028] In this context, "device" refers to an intelligent electronic device that can perform predetermined processing procedures such as numerical calculations and / or logical calculations by running predetermined programs or instructions. It may include a processor and a memory. The processor executes program instructions pre-stored in the memory to perform the predetermined processing procedures, or the predetermined processing procedures are performed by hardware such as application-specific integrated circuits (ASICs), field-programmable gate arrays (FPGAs), and digital signal processors (DSPs), or by a combination of the above.

[0029] The technical solution of this application is mainly implemented by computer equipment. This computer equipment includes network equipment and user equipment. The network equipment includes, but is not limited to, a single network server, a server group consisting of multiple network servers, or a cloud based on cloud computing, which is a type of distributed computing consisting of a super virtual computer composed of a group of loosely coupled computers. The user equipment includes, but is not limited to, PCs, tablets, smartphones, IPTV, PDAs, etc. The computer equipment can operate independently to implement this application, or it can connect to a network and implement this application through interaction with other computer equipment in the network. The network in which the computer equipment is located includes, but is not limited to, the Internet, wide area networks (WANs), metropolitan area networks (MANs), local area networks (LANs), VPN networks, and ad hoc wireless networks.

[0030] It should be noted that the above-mentioned computer equipment is only an example. Other existing or future computer equipment that is applicable to this application should also be included within the scope of protection of this application and is incorporated herein by reference.

[0031] The methods discussed later in this document (some of which are illustrated by flowcharts) can be implemented using hardware, software, firmware, middleware, microcode, hardware description languages, or any combination thereof. When implemented using software, firmware, middleware, or microcode, the program code or code segments used to perform the necessary tasks can be stored in a machine or computer-readable medium (such as a storage medium). One or more processors can perform the necessary tasks.

[0032] The specific structural and functional details disclosed herein are merely representative and are intended to describe exemplary embodiments of this application. However, this application may be implemented in many alternative forms and should not be construed as being limited solely to the embodiments set forth herein.

[0033] It should be understood that although the terms "first," "second," etc., may be used herein to describe various units, these units should not be limited by these terms. These terms are used merely to distinguish one unit from another. For example, without departing from the scope of the exemplary embodiments, a first unit may be referred to as a second unit, and similarly, a second unit may be referred to as a first unit. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.

[0034] The terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the exemplary embodiments. Unless the context clearly indicates otherwise, the singular forms “a” and “an” as used herein are also intended to include the plural. It should also be understood that the terms “comprising” and / or “including” as used herein specify the presence of the stated features, integers, steps, operations, units, and / or components, without excluding the presence or addition of one or more other features, integers, steps, operations, units, components, and / or combinations thereof.

[0035] It should also be mentioned that in some alternative implementations, the functions / actions mentioned may occur in a different order than those shown in the figures. For example, depending on the functions / actions involved, the two figures shown successively may actually be executed substantially simultaneously or sometimes in reverse order.

[0036] The present application will now be described in further detail with reference to the accompanying drawings.

[0037] Figure 1This document illustrates a flowchart of a method for detecting the virtual focal size of an objective lens mount according to an embodiment of this application. The method of this embodiment is primarily implemented by a computer device and includes steps S1, S2, S3, and S4. In step S1, the computer device constructs a three-dimensional orthogonal reference plane using a coordinate measuring machine (CMM) based on the measured machining and installation references of the objective lens mount, and establishes a Cartesian coordinate system based on the three-dimensional orthogonal reference plane. In step S2, the computer device measures the three-dimensional dimensions of the two objective lens mounting holes on the objective lens mount using the CMM, and constructs two axes corresponding to the two objective lens mounting holes based on the three-dimensional dimension data. In step S3, the computer device constructs a focal plane, wherein the focal plane is parallel to the Top plane in the three-dimensional orthogonal reference plane. In step S4, the computer device determines whether the two intersection points formed between the two axes and the focal plane are both located within a virtual sphere centered on the point where the focal plane intersects the Cartesian coordinate system axis; if so, the objective lens mount is deemed qualified.

[0038] In step S1, the computer device constructs a three-dimensional orthogonal reference plane using a coordinate measuring machine based on the measured machining and installation reference of the objective lens mounting base, and establishes a Cartesian coordinate system based on the three-dimensional orthogonal reference plane.

[0039] In some embodiments, the computer device may receive the measured machining and installation reference of the objective lens mount sent by other devices, or it may obtain the measured machining and installation reference of the objective lens mount input by the user, or the computer device may measure the machining and installation reference of the objective lens mount. It should be noted that this application does not limit the implementation method of measuring and obtaining the machining and installation reference of the objective lens mount.

[0040] In some embodiments, the coordinate measuring machine (CMM) refers to an instrument capable of calculating various geometric shapes, dimensions, and other measurements based on point data returned by the probe within a three-dimensional measurable space using a CMM software system. It can also be called a "coordinate measuring machine" or "coordinate measuring instrument." In some preferred embodiments, the CMM uses a ruby ​​ball as its probe and has a measurement accuracy on the sub-micron level. It should be noted that this application does not limit the type of CMM used; for example, other probes may be used. Any CMM capable of achieving the functions required by this application should be included within the scope of protection of this application.

[0041] In some embodiments, based on the machining and installation reference of the objective lens mount, the Front, Right, and Top planes (i.e., three-dimensional orthogonal reference planes) are first printed using a coordinate measuring machine. Then, a Cartesian coordinate system is established in the software based on the Front, Right, and Top planes. All subsequent measurement, construction, and judgment operations are based on this Cartesian coordinate system.

[0042] In step S2, the computer device measures the three-dimensional dimensions of the two objective lens mounting holes on the objective lens assembly mount using the coordinate measuring machine, and constructs two axes corresponding to the two objective lens mounting holes based on the three-dimensional dimensions.

[0043] In some embodiments, three-dimensional dimensional data (with sub-micron accuracy) corresponding to two objective lens mounting holes are generated by marking points with a ruby ​​ball of a coordinate measuring machine. Then, software is used to construct the axes corresponding to the two objective lens mounting holes based on the three-dimensional dimensional data. For example, the two objective lens mounting holes are denoted as hole A and hole B, respectively. The three-dimensional dimensional data corresponding to hole A and hole B are obtained by marking points with a ruby ​​ball of a coordinate measuring machine. Then, the axis "reference axis 1" corresponding to hole A and the axis "reference axis 2" corresponding to hole B are constructed in the software based on the measured three-dimensional dimensional data.

[0044] In step S3, the computer device constructs a focal plane, wherein the focal plane is parallel to the Top plane in the three-dimensional orthogonal reference plane.

[0045] In some embodiments, the design value of the focal plane has a certain tolerance range, which is derived based on the actual application of the optical system. In some embodiments, the focal plane can be translated within its tolerance range.

[0046] In some embodiments, the two axes corresponding to the two objective lens mounting holes intersect the focal plane, forming two intersection points. These two intersection points do not coincide microscopically due to machining errors (the intersection points of the Right and Front planes with the focal plane do not coincide microscopically). For example, the two axes corresponding to the two objective lens mounting holes, constructed in the software, are denoted as "Reference Axis 1" and "Reference Axis 2". "Reference Axis 1" intersects the focal plane at intersection point P1, and "Reference Axis 2" intersects the focal plane at intersection point P2. P1 and P2 do not coincide microscopically. In some embodiments, after translating the focal plane, the two axes corresponding to the two objective lens mounting holes will form two new intersection points with the translated focal plane.

[0047] In some embodiments, step S3 further includes: determining whether the angles between the two axes and the three-dimensional orthogonal reference plane meet the design requirements; if they do, constructing the focal plane; otherwise, determining that the objective lens mount is unqualified and ending the inspection. In some embodiments, before constructing the focal plane, it is first determined whether the angles between the two axes and the Front and Right planes are within the design range; if they do, the focal plane is constructed and subsequent judgment operations are performed; if they do not, the objective lens mount can be directly determined to be unqualified and the inspection can be ended.

[0048] In step S4, the computer device determines whether the two intersection points formed between the two axes and the focal plane are both located within a virtual sphere centered on the point where the focal plane and the Cartesian coordinate system axis intersect. If so, the objective lens assembly mount is determined to be qualified.

[0049] In some embodiments, if the objective lens mount is qualified, it means that the two objective lens mounting holes on the objective lens mount can meet the usage requirements. If the objective lens mount is unqualified, it means that the two objective lens mounting holes on the objective lens mount do not meet the usage requirements and the objective lens mount needs to be repaired or scrapped. Thus, computer software can determine whether the positional relationship between the two intersection points formed by the projection of the two microscopic non-intersecting axes corresponding to the two objective lens mounting holes onto the virtual (design value) focal plane meets the drawing requirements. If it meets the drawing requirements, it is considered that the two objective lens mounting holes on the objective lens mount can meet the usage requirements; otherwise, the objective lens mount needs to be repaired or scrapped.

[0050] In some embodiments, the dimensions of the virtual sphere can be obtained from the design drawings. In some embodiments, determining whether two microscopically non-coincident intersection points (i.e., the two intersection points formed between the two axes and the focal plane) are qualified is an important step in determining whether the objective lens mount can be used. The basis for the determination is: by confining the two intersection points within a virtual microsphere (i.e., the "virtual sphere" mentioned in the context) centered on the point where the focal plane (which can move within tolerance) intersects with the Cartesian coordinate system axis, the range of three-dimensional deflection of the two axes in the Cartesian coordinate system is limited, thus ensuring the three-dimensional position of the lens mounting hole. That is, if the two intersection points can be confined within the virtual sphere (i.e., both intersection points are located within the virtual sphere centered on the point where the focal plane and the Cartesian coordinate system axis intersect), then the two intersection points are determined to be qualified; otherwise, the two intersection points are unqualified. It should be noted that if the two intersection points are determined to be acceptable, the objective lens mount can be directly determined to be acceptable. However, if the two intersection points are unacceptable (i.e., the two intersection points are not both located within the virtual sphere), the objective lens mount cannot be directly determined to be acceptable; instead, further judgment is required by translating the focal plane. In some embodiments, if the distance between the origins of the coordinates of the two intersection points is less than the radius of the sphere, it indicates that the two intersection points are acceptable, meaning that the dimensions of the objective lens mount are acceptable.

[0051] In some embodiments, step S4 further includes: obtaining the three-dimensional coordinates of the two intersection points formed between the two axes and the focal plane; taking the point where the focal plane intersects the Cartesian coordinate system axis as the origin, and calculating the distance between each of the two intersection points and the origin based on the three-dimensional coordinates; determining whether the distance between each intersection point and the origin is less than the radius of a virtual sphere centered at the origin, and if so, determining that the objective lens assembly mount is qualified. In some embodiments, if the distance between each of the two intersection points and the origin is less than the radius of the virtual sphere centered at the origin, then the two intersection points are considered to be confined within the virtual sphere and are considered acceptable. In this case, the objective lens mount is acceptable. However, if the distance between each of the two intersection points and the origin is not less than the radius of the virtual sphere, then the two intersection points are considered unacceptable. If the two intersection points are unacceptable, it is necessary to re-evaluate the relationship between the distance between the newly formed two intersection points and the origin and the radius of the virtual sphere by translating the focal plane, until two acceptable intersection points are found or the focal plane is moved within its tolerance range.

[0052] In some embodiments, it may be possible to determine whether the objective mount is qualified without translating the focal plane. For example, if the two intersections formed by the two axes and the focal plane can be confined within a virtual microsphere centered on the point where the focal plane intersects with the Cartesian coordinate system axis based on the initially constructed focal plane, the objective mount can be directly determined to be qualified.

[0053] In some embodiments, if the two intersection points formed based on the initially constructed focal plane are unqualified, it is necessary to translate the focal plane one or more times to determine whether the objective lens mount is qualified. In some embodiments, the method further includes: if the two intersection points are not both located within the virtual sphere, the computer device translates the focal plane within the tolerance range of the focal plane to obtain two new intersection points, and determines whether the two new intersection points are located within the virtual sphere centered on the point where the focal plane intersects the Cartesian coordinate system axis. If so, the objective lens mount is determined to be qualified; otherwise, the above translation operation and determination operation are performed again until the objective lens mount is determined to be qualified or the focal plane is moved within the tolerance range. The implementation method of the above determination operation is the same as that of the determination operation in step S4, and will not be described again here.

[0054] In some embodiments, if the two intersection points formed are not both located within the virtual sphere (e.g., one of the two intersection points is not located within the virtual sphere, or neither intersection point is located within the virtual sphere), then it is necessary to translate the focal plane to form two new intersection points and perform another judgment based on these two new points. In some embodiments, if no two qualified intersection points are found until the focal plane has moved within the tolerance range, i.e., the two intersection points formed after each translation operation cannot be confined within the corresponding virtual sphere (i.e., the two intersection points formed after each translation operation are unqualified), then the objective lens mount can be determined to be unqualified. In some embodiments, the focal plane can be translated based on a certain step size. In some embodiments, the focal plane may be able to obtain the judgment result that the objective lens mount is qualified (also referred to as the two intersection points formed at this time being qualified) at one or more positions. In the actual judgment process, it is only necessary to find one focal plane position that can determine the qualified result to end the virtual focal size detection process, i.e., it is not necessary to find all focal plane positions that can determine the qualified result.

[0055] Figure 2 This application illustrates a schematic diagram of virtual focal size detection for an objective lens mount, as shown in the following example. Figure 2The virtual focal length size inspection process is briefly explained, including: 1) Constructing three-dimensional orthogonal reference planes (Front, Right, and Top planes) based on the machining and installation datum of the objective lens mount, and establishing a Cartesian coordinate system; 2) Measuring the three-dimensional dimensions of the two objective lens mounting holes of the objective lens mount, and constructing the axes corresponding to the two objective lens mounting holes based on the measurement results, denoted as reference axis 1 and reference axis 2 respectively; 3) Measuring whether the angles between reference axis 1 and reference axis 2 and the Front and Right planes are within the design range. If yes, proceed to step 4); otherwise, determine that the objective lens mount is unqualified and end the process; 4) Constructing the focal plane based on the design values. This focal plane is parallel to the Top plane (…). Figure 2 (The focal plane is not shown in the image); 5) Obtain the three-dimensional coordinates of the intersection point of reference axis 1 and the focal plane, and the three-dimensional coordinates of the intersection point of reference axis 2 and the focal plane. Measure the distance between these two intersection points and the origin in the software. Compare the two measured distances with the radius of a virtual sphere (centered at the point where the focal plane and the Cartesian coordinate system axis intersect). If both distances are smaller than the radius of the virtual sphere, the two intersection points are considered qualified, and the objective lens mount is deemed qualified, ending the process. If neither distance is smaller than the radius of the virtual sphere, the two intersection points are considered qualified, and the objective lens mount is deemed qualified. If the radius of the virtual sphere is small, then the two intersection points are unqualified, and proceed to step 6); 6) Translate the focal plane within the tolerance range of the focal plane to obtain another pair of intersection points. Repeat the determination of the relationship between the distance between the newly obtained intersection point and the origin and the radius of the virtual sphere until two qualified intersection points are found or the focal plane moves within its tolerance range. If two qualified intersection points are found, then the objective lens mount is qualified. If two qualified intersection points are not found even after the focal plane moves within its tolerance range, then the objective lens mount is unqualified.

[0056] Figure 3 This illustration shows a schematic diagram of a focal plane translation as an example of this application. Figure 2 Taking reference axis 1 and reference axis 2 as examples, the three positions to which the focal plane can be translated are shown (i.e., Figure 3 (The three horizontal lines in the image) At these three positions, the two intersections formed by reference axis 1 and reference axis 2 and the focal plane are both located within the virtual sphere. That is, at these three positions, a judgment of whether the objective lens mount is qualified can be obtained. It should be noted that, although... Figure 3 Three focal plane positions are illustrated exemplarily, but those skilled in the art should understand that the focal plane may only be able to obtain a qualified result of intersection at these three positions, or the focal plane may also obtain a qualified result of intersection at other positions (some parallel plane in between).

[0057] Figure 4A schematic diagram of a device for detecting the virtual focal length of an objective lens mount according to an embodiment of this application is shown. The device (hereinafter referred to as the "size detection device") comprises a first module 1, a second module 2, a third module 3, and a fourth module 4.

[0058] The first module 1 is used to construct a three-dimensional orthogonal reference plane using a coordinate measuring machine based on the measured machining and installation reference of the objective lens assembly mount, and to establish a Cartesian coordinate system based on the three-dimensional orthogonal reference plane.

[0059] In some embodiments, the first module 1 may receive the measured machining and installation reference of the objective lens mount sent by other devices, or it may obtain the measured machining and installation reference of the objective lens mount input by the user, or the machining and installation reference of the objective lens mount may be measured by the computer device. It should be noted that this application does not limit the implementation method of measuring and obtaining the machining and installation reference of the objective lens mount.

[0060] In some embodiments, the coordinate measuring machine (CMM) refers to an instrument capable of calculating various geometric shapes, dimensions, and other measurements based on point data returned by the probe within a three-dimensional measurable space using a CMM software system. It can also be called a "coordinate measuring machine" or "coordinate measuring instrument." In some preferred embodiments, the CMM uses a ruby ​​ball as its probe and has a measurement accuracy on the sub-micron level. It should be noted that this application does not limit the type of CMM used; for example, other probes may also be used. Any CMM capable of achieving the functions required by this application should be included within the scope of protection of this application.

[0061] In some embodiments, based on the machining and installation reference of the objective lens mount, the Front, Right, and Top planes (i.e., three-dimensional orthogonal reference planes) are first printed using a coordinate measuring machine. Then, a Cartesian coordinate system is established in the software based on the Front, Right, and Top planes. All subsequent measurement, construction, and judgment operations are based on this Cartesian coordinate system.

[0062] The second module 2 is used to measure the three-dimensional dimensions of the two objective lens mounting holes on the objective lens assembly mount using the coordinate measuring machine, and to construct two axes corresponding to the two objective lens mounting holes respectively based on the three-dimensional dimensions.

[0063] In some embodiments, three-dimensional dimensional data (with sub-micron accuracy) corresponding to two objective lens mounting holes are generated by marking points with a ruby ​​ball of a coordinate measuring machine. Then, software is used to construct the axes corresponding to the two objective lens mounting holes based on the three-dimensional dimensional data. For example, the two objective lens mounting holes are denoted as hole A and hole B, respectively. The three-dimensional dimensional data corresponding to hole A and hole B are obtained by marking points with a ruby ​​ball of a coordinate measuring machine. Then, the axis "reference axis 1" corresponding to hole A and the axis "reference axis 2" corresponding to hole B are constructed in the software based on the measured three-dimensional dimensional data.

[0064] The third module 3 is used to construct the focal plane, wherein the focal plane is parallel to the Top plane in the three-dimensional orthogonal reference plane.

[0065] In some embodiments, the design value of the focal plane has a certain tolerance range, which is derived based on the actual application of the optical system. In some embodiments, the focal plane can be translated within its tolerance range.

[0066] In some embodiments, the two axes corresponding to the two objective lens mounting holes intersect the focal plane, forming two intersection points. These two intersection points do not coincide microscopically due to machining errors (the intersection points of the Right and Front planes with the focal plane do not coincide microscopically). For example, the two axes corresponding to the two objective lens mounting holes, constructed in the software, are denoted as "Reference Axis 1" and "Reference Axis 2". "Reference Axis 1" intersects the focal plane at intersection point P1, and "Reference Axis 2" intersects the focal plane at intersection point P2. P1 and P2 do not coincide microscopically. In some embodiments, after translating the focal plane, the two axes corresponding to the two objective lens mounting holes will form two new intersection points with the translated focal plane.

[0067] In some embodiments, the third module 3 is further configured to: determine whether the angles between the two axes and the three-dimensional orthogonal reference plane meet the design requirements; if they do, construct the focal plane; otherwise, determine that the objective lens mount is unqualified and end the inspection. In some embodiments, before constructing the focal plane, it is first determined whether the angles between the two axes and the Front and Right planes are within the design range; if they do, construct the focal plane and perform subsequent judgment operations; if they do not, the objective lens mount can be directly determined to be unqualified and the inspection can be ended.

[0068] The fourth module 4 is used to determine whether the two intersection points formed between the two axes and the focal plane are both located within a virtual sphere centered on the point where the focal plane and the Cartesian coordinate system axis intersect. If so, the objective lens assembly mounting base is determined to be qualified.

[0069] In some embodiments, if the objective lens mount is qualified, it means that the two objective lens mounting holes on the objective lens mount can meet the usage requirements. If the objective lens mount is unqualified, it means that the two objective lens mounting holes on the objective lens mount do not meet the usage requirements and the objective lens mount needs to be repaired or scrapped. Thus, computer software can determine whether the positional relationship between the two intersection points formed by the projection of the two microscopic non-intersecting axes corresponding to the two objective lens mounting holes onto the virtual (design value) focal plane meets the drawing requirements. If it meets the drawing requirements, it is considered that the two objective lens mounting holes on the objective lens mount can meet the usage requirements; otherwise, the objective lens mount needs to be repaired or scrapped.

[0070] In some embodiments, the dimensions of the virtual sphere can be obtained from the design drawings. In some embodiments, determining whether two microscopically non-coincident intersection points (i.e., the two intersection points formed between the two axes and the focal plane) are qualified is an important step in determining whether the objective lens mount can be used. The basis for the determination is: by confining the two intersection points within a virtual microsphere (i.e., the "virtual sphere" mentioned in the context) centered on the point where the focal plane (which can move within tolerance) intersects with the Cartesian coordinate system axis, the range of three-dimensional deflection of the two axes in the Cartesian coordinate system is limited, thus ensuring the three-dimensional position of the lens mounting hole. That is, if the two intersection points can be confined within the virtual sphere (i.e., both intersection points are located within the virtual sphere centered on the point where the focal plane and the Cartesian coordinate system axis intersect), then the two intersection points are determined to be qualified; otherwise, the two intersection points are unqualified. It should be noted that if the two intersection points are determined to be acceptable, the objective lens mount can be directly determined to be acceptable. However, if the two intersection points are unacceptable (i.e., the two intersection points are not both located within the virtual sphere), the objective lens mount cannot be directly determined to be acceptable; instead, further judgment is required by translating the focal plane. In some embodiments, if the distance between the origins of the coordinates of the two intersection points is less than the radius of the sphere, it indicates that the two intersection points are acceptable, meaning that the dimensions of the objective lens mount are acceptable.

[0071] In some embodiments, the fourth module 4 further includes: obtaining the three-dimensional coordinates of two intersection points formed between the two axes and the focal plane; taking the point where the focal plane intersects the Cartesian coordinate system axis as the origin, and calculating the distance between each of the two intersection points and the origin based on the three-dimensional coordinates; determining whether the distance between each intersection point and the origin is less than the radius of a virtual sphere centered at the origin, and if so, determining that the objective lens assembly mount is qualified. In some embodiments, if the distance between each of the two intersection points and the origin is less than the radius of the virtual sphere centered at the origin, then the two intersection points are considered to be confined within the virtual sphere and are considered acceptable. In this case, the objective lens mount is acceptable. However, if the distance between each of the two intersection points and the origin is not less than the radius of the virtual sphere, then the two intersection points are considered unacceptable. If the two intersection points are unacceptable, it is necessary to re-evaluate the relationship between the distance between the newly formed two intersection points and the origin and the radius of the virtual sphere by translating the focal plane, until two acceptable intersection points are found or the focal plane is moved within its tolerance range.

[0072] In some embodiments, it may be possible to determine whether the objective mount is qualified without translating the focal plane. For example, if the two intersections formed by the two axes and the focal plane can be confined within a virtual microsphere centered on the point where the focal plane intersects with the Cartesian coordinate system axis based on the initially constructed focal plane, the objective mount can be directly determined to be qualified.

[0073] In some embodiments, if the two intersection points formed based on the initially constructed focal plane are unqualified, it is necessary to translate the focal plane one or more times to determine whether the objective lens mount is qualified. In some embodiments, the size detection device is further configured to: if the two intersection points are not both located within the virtual sphere, the computer device translates the focal plane within the tolerance range of the focal plane to obtain two new intersection points, and determines whether the two new intersection points are located within the virtual sphere centered on the point where the focal plane intersects the Cartesian coordinate system axis. If so, the objective lens mount is determined to be qualified; otherwise, the above translation operation and judgment operation are performed again until the objective lens mount is determined to be qualified or the focal plane is moved within the tolerance range. The implementation method of the above judgment operation is the same as the implementation method of the judgment operation performed by the fourth module 4, and will not be described again here.

[0074] In some embodiments, if the two intersection points formed are not both located within the virtual sphere (e.g., one of the two intersection points is not located within the virtual sphere, or neither intersection point is located within the virtual sphere), then it is necessary to translate the focal plane to form two new intersection points and perform another judgment based on these two new points. In some embodiments, if no two qualified intersection points are found until the focal plane has moved within the tolerance range, i.e., the two intersection points formed after each translation operation cannot be confined within the corresponding virtual sphere (i.e., the two intersection points formed after each translation operation are unqualified), then the objective lens mount can be determined to be unqualified. In some embodiments, the focal plane can be translated based on a certain step size. In some embodiments, the focal plane may be able to obtain the judgment result that the objective lens mount is qualified (also referred to as the two intersection points formed at this time being qualified) at one or more positions. In the actual judgment process, it is only necessary to find one focal plane position that can determine the qualified result to end the virtual focal size detection process, i.e., it is not necessary to find all focal plane positions that can determine the qualified result.

[0075] According to the scheme of this application, after constructing a three-dimensional orthogonal reference plane using a coordinate measuring machine and establishing a Cartesian coordinate system based on the three-dimensional orthogonal reference plane, the three-dimensional dimensions of the objective lens mounting holes on the objective lens assembly mount are further measured using a coordinate measuring machine, and two axes corresponding to the two objective lens mounting holes are constructed respectively. Then, a focal plane is constructed (the focal plane is translated if necessary), and it is determined whether the two intersection points formed between the two axes and the focal plane are both located within a virtual sphere centered on the point where the focal plane intersects with the axis of the Cartesian coordinate system. This determines whether the objective lens assembly mount is qualified. By using coordinate measuring machine technology to determine the size of the virtual focal point in space, it is possible to use a qualified objective lens assembly mount in the optical system, thereby improving the performance and assembly success rate of the optical system.

[0076] This application also provides a computer device, wherein the computer device includes: a memory for storing one or more programs; and one or more processors connected to the memory, wherein when the one or more programs are executed by the one or more processors, the one or more processors perform the method for virtual focal size detection for objective lens mounts described in this application.

[0077] This application also provides a computer-readable storage medium having a computer program stored thereon, the computer program being executable by a processor to perform the method for virtual focal size detection for objective lens mounts described in this application.

[0078] This application also provides a computer program product that, when executed by a device, causes the device to perform the virtual focal size detection method for objective lens mount described in this application.

[0079] Figure 5 Exemplary systems that can be used to implement the various embodiments described in this application are shown.

[0080] In some embodiments, system 1000 can function as any of the processing devices described in this application. In some embodiments, system 1000 may include one or more computer-readable media having instructions (e.g., system memory or NVM / storage device 1020) and one or more processors (e.g., one or more processors 1005) coupled to the one or more computer-readable media and configured to execute the instructions to implement the module and thus perform the actions described in this application.

[0081] In one embodiment, the system control module 1010 may include any suitable interface controller to provide any suitable interface to at least one of the processors 1005 and / or any suitable device or component communicating with the system control module 1010.

[0082] The system control module 1010 may include a memory controller module 1030 to provide an interface to the system memory 1015. The memory controller module 1030 may be a hardware module, a software module, and / or a firmware module.

[0083] System memory 1015 may be used, for example, to load and store data and / or instructions for system 1000. In one embodiment, system memory 1015 may include any suitable volatile memory, such as suitable DRAM. In some embodiments, system memory 1015 may include double data rate type quad synchronous dynamic random access memory (DDR4 SDRAM).

[0084] In one embodiment, the system control module 1010 may include one or more input / output (I / O) controllers to provide interfaces to the NVM / storage device 1020 and (one or more) communication interfaces 1025.

[0085] For example, the NVM / storage device 1020 may be used to store data and / or instructions. The NVM / storage device 1020 may include any suitable non-volatile memory (e.g., flash memory) and / or may include any suitable (one or more) non-volatile storage devices (e.g., one or more hard disk drives (HDDs), one or more optical disc drives (CDs), and / or one or more digital universal optical disc (DVD) drives).

[0086] NVM / storage device 1020 may include storage resources that are physically part of a device on which system 1000 is mounted, or that can be accessed by the device without necessarily being part of the device. For example, NVM / storage device 1020 may be accessed via a network through one or more communication interfaces 1025.

[0087] One or more communication interfaces 1025 may provide the system 1000 with an interface to communicate over one or more networks and / or with any other suitable device. The system 1000 may wirelessly communicate with one or more components of a wireless network in accordance with any of one or more wireless network standards and / or protocols.

[0088] In one embodiment, at least one of the processors 1005 may be logically packaged with one or more controllers of the system control module 1010 (e.g., memory controller module 1030). In one embodiment, at least one of the processors 1005 may be logically packaged with one or more controllers of the system control module 1010 to form a system-in-package (SiP). In one embodiment, at least one of the processors 1005 may be integrated with the logic of one or more controllers of the system control module 1010 on the same die. In one embodiment, at least one of the processors 1005 may be integrated with the logic of one or more controllers of the system control module 1010 on the same die to form a system-on-a-chip (SoC).

[0089] In various embodiments, system 1000 may be, but is not limited to, a server, workstation, desktop computing device, or mobile computing device (e.g., laptop computing device, handheld computing device, tablet computer, netbook, etc.). In various embodiments, system 1000 may have more or fewer components and / or different architectures. For example, in some embodiments, system 1000 includes one or more cameras, a keyboard, a liquid crystal display (LCD) screen (including a touchscreen display), a non-volatile memory port, multiple antennas, a graphics chip, an application-specific integrated circuit (ASIC), and a speaker.

[0090] It will be apparent to those skilled in the art that this application is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this application. Therefore, the embodiments should be considered exemplary and non-limiting in all respects, and the scope of this application is defined by the appended claims rather than the foregoing description. Thus, all variations falling within the meaning and scope of equivalents of the claims are intended to be embraced within this application. No reference numerals in the claims should be construed as limiting the scope of the claims. Furthermore, it is clear that the word "comprising" does not exclude other units or steps, and the singular does not exclude the plural. Multiple units or devices recited in the system claims may also be implemented by a single unit or device in software or hardware. The terms "first," "second," etc., are used to indicate names and do not indicate any particular order.

Claims

1. A method for detecting the virtual focal size of an objective lens assembly mount, wherein, The method includes: Based on the measured machining and installation references of the objective lens mount, a three-dimensional orthogonal reference plane is constructed using a coordinate measuring machine, and a Cartesian coordinate system is established based on the three-dimensional orthogonal reference plane; The three-dimensional dimensions of the two objective lens mounting holes on the objective lens assembly mount are measured using the coordinate measuring machine. Based on the three-dimensional dimensions, two axes corresponding to the two objective lens mounting holes are constructed respectively. Construct a focal plane, wherein the focal plane is parallel to the Top plane in the three-dimensional orthogonal reference plane; Determine whether the two intersection points formed between the two axes and the focal plane are both located within a virtual sphere centered on the point where the focal plane and the Cartesian coordinate system axis intersect. If so, determine that the objective lens assembly mount is qualified. If the two intersection points are not both located within the virtual sphere, the focal plane is translated within the tolerance range of the focal plane to obtain two new intersection points. It is then determined whether the two new intersection points are located within the virtual sphere centered at the point where the focal plane intersects the axis of the Cartesian coordinate system. If so, the objective lens mount is deemed qualified; otherwise, the above translation and judgment operations are performed again until the objective lens mount is deemed qualified or the focal plane is moved within the tolerance range.

2. The method according to claim 1, wherein, The step of determining whether the two intersection points formed between the two axes and the focal plane are both located within a virtual sphere centered on the point where the focal plane intersects the Cartesian coordinate system axes, and if so, determining that the objective lens assembly mount is qualified, includes: Obtain the three-dimensional coordinates of the two intersection points formed between the two axes and the focal plane; The point where the focal plane intersects the Cartesian coordinate system axis is taken as the origin, and the distance between each of the two intersection points and the origin is calculated based on the three-dimensional coordinates. Determine whether the distance between each intersection point and the origin of the coordinate system is less than the radius of the virtual sphere centered at the origin of the coordinate system. If so, determine that the objective lens assembly mount is qualified.

3. The method according to claim 1, wherein, The construction of the focal plane includes: Determine whether the included angle between the two axes and the three-dimensional orthogonal reference plane meets the design requirements. If it does, construct the focal plane; otherwise, determine that the objective lens assembly mount is unqualified and end the test.

4. The method according to any one of claims 1 to 3, wherein, The probe of the coordinate measuring machine is a ruby ​​ball and the measurement accuracy is in the submicron range.

5. A device for detecting the virtual focal size of an objective lens assembly mount, wherein, The device includes: The first module is used to construct a three-dimensional orthogonal reference plane using a coordinate measuring machine based on the measured machining and installation reference of the objective lens assembly mount, and to establish a Cartesian coordinate system based on the three-dimensional orthogonal reference plane. The second module is used to measure the three-dimensional dimensions of the two objective lens mounting holes on the objective lens assembly mount using the coordinate measuring machine, and to construct two axes corresponding to the two objective lens mounting holes respectively based on the three-dimensional dimensions. The third module is used to construct the focal plane, wherein the focal plane is parallel to the Top plane in the three-dimensional orthogonal reference plane; The fourth module determines whether the two intersection points formed between the two axes and the focal plane are both located within a virtual sphere centered on the point where the focal plane and the Cartesian coordinate system axis intersect. If so, the objective lens assembly mount is deemed qualified. The device is also used for: If the two intersection points are not both located within the virtual sphere, the focal plane is translated within the tolerance range of the focal plane to obtain two new intersection points. It is then determined whether the two new intersection points are located within the virtual sphere centered at the point where the focal plane intersects the axis of the Cartesian coordinate system. If so, the objective lens mount is deemed qualified; otherwise, the above translation and judgment operations are performed again until the objective lens mount is deemed qualified or the focal plane is moved within the tolerance range.

6. The apparatus according to claim 5, wherein, The fourth module is used for: Obtain the three-dimensional coordinates of the two intersection points formed between the two axes and the focal plane; The point where the focal plane intersects the Cartesian coordinate system axis is taken as the origin, and the distance between each of the two intersection points and the origin is calculated based on the three-dimensional coordinates. Determine whether the distance between each intersection point and the origin of the coordinate system is less than the radius of the virtual sphere centered at the origin of the coordinate system. If so, determine that the objective lens assembly mount is qualified.

7. The apparatus according to claim 5, wherein, The third module is used for: Determine whether the included angle between the two axes and the three-dimensional orthogonal reference plane meets the design requirements. If it does, construct the focal plane; otherwise, determine that the objective lens assembly mount is unqualified and end the test.

8. The apparatus according to any one of claims 5 to 7, wherein, The probe of the coordinate measuring machine is a ruby ​​ball and the measurement accuracy is in the submicron range.

9. A computer device, wherein, The computer device includes: Memory, used to store one or more programs; One or more processors are connected to the memory. When the one or more programs are executed by the one or more processors, the one or more processors perform the method as described in any one of claims 1 to 4.

10. A computer-readable storage medium having a computer program stored thereon, the computer program being executable by a processor according to any one of claims 1 to 4.

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