Integrated optical detection device

Abstract

The present invention provides an integrated optical detection device, comprising a light source device, a camera device, a light source filter module, a camera filter module, and an image detection device. The light source device provides illumination light to a test object via an illumination optical path. The camera device can selectively switch any one of a plurality of cameras on an imaging optical path to generate an image of the test object. The light source filter module can selectively switch any one of a plurality of light source filters on the illumination optical path to filter the illumination light. The camera filter module can selectively switch any one of a plurality of camera filters on the imaging optical path to filter the illumination light. The image detection device is coupled to the camera to obtain a fluorescence image detection result and / or a monochromatic light image detection result.

Description

Technical Field

[0001] The present invention relates to an optical detection device, and more particularly to an integrated optical detection device. Background Art

[0002] With the development of fully automated industries, Automatic Optical Inspection (AOI) has been widely used in the appearance inspection of circuit board assembly production lines in the electronics industry and replaced the previous manual visual inspection.

[0003] Automatic optical identification system is a common representative method in industrial processes. The main approach is to use a photographic device to capture the surface state of the object to be measured, and then use computer image processing technology to detect defects such as foreign objects or pattern abnormalities. Since non-contact inspection is adopted, it can be used to inspect semi-finished products during the production process.

[0004] In response to the requirements of IC products for low power consumption, high performance, and thin form factors, advanced packaging technologies fully utilize the characteristics of semiconductor IC circuit size miniaturization, homogeneous and heterogeneous integration, and three-dimensional chip stacking. In line with Moore's Law, the continuous miniaturization of logic gate components in advanced packaging is an inevitable trend, which is also a major challenge for automatic optical detection. In response to the requirements of the object to be measured for high-precision detection, general automatic integrated optical detection devices will set up multiple stations according to actual needs to detect various defects and characteristics respectively, resulting in problems of too large overall volume and rising costs of the device. Summary of the Invention

[0005] The main object of the present invention is to provide an integrated optical detection device, including a light source device, a camera device, a light source filter module, a camera filter module, and an image detection device. The light source device provides an illumination light to an object to be measured through an illumination optical path. The camera device can selectively switch any one of multiple cameras on an imaging optical path to capture the object to be measured and generate an image of the object to be measured. The light source filter module can selectively switch any one of multiple light source filters on the illumination optical path to filter the illumination light. The camera filter module can selectively switch any one of multiple camera filters on the imaging optical path to filter the illumination light. The image detection device is coupled to the camera to receive and analyze the image of the object to be measured to obtain an image detection result. Wherein the image detection result includes a fluorescence image detection result or / and a monochromatic light image detection result.

[0006] The present invention integrates platforms for appearance detection, fluorescence detection, and re-inspection detection, which can effectively reduce the volume of the device. In addition, the present invention supports the detection of images with different wavelengths, the detection of fluorescence with different wavelengths, and supports the autofocus function. Moreover, the objective lens magnification of the present invention has a high selectivity and breaks through the sub-micron limit, having an advantageous effect compared with the existing technologies. BRIEF DESCRIPTION OF THE DRAWINGS

[0007] The drawings incorporated in and constituting a part of this specification illustrate embodiments of the present invention and, together with the description thereof, are used to explain the principles of the present invention.

[0008] Figure 1 , which is a block schematic diagram of the integrated optical detection device of the present invention.

[0009] Figure 2 , which is a schematic external view of the integrated optical detection device of the present invention.

[0010] Figure 3 , which is a schematic side view of the integrated optical detection device of the present invention.

[0011] Figure 4 , which is a schematic front view of the integrated optical detection device of the present invention.

[0012] Figure 5 , which is a schematic sectional view of the integrated optical detection device of the present invention.

[0013] Figure 6 , which is a schematic diagram (I) of the switching operation of the camera.

[0014] Figure 7 , which is a schematic diagram (II) of the switching operation of the camera.

[0015] Figure 8 , which is a schematic diagram of the switching operation of the camera filter module.

[0016] Figure 9 , which is a schematic diagram of the switching operation of the light source filter module.

[0017] Figure 10 , which is a schematic diagram of the switching operation of the objective lens.

[0018] DESCRIPTION OF THE REFERENCE NUMERALS:

[0019] 100 Integrated optical detection device

[0020] W Object to be measured

[0021] 10 Light source device

[0022] 11 Light source

[0023] 13 Half-reflecting mirror

[0024] 20 Camera device

[0025] 21 Camera

[0026] 21A First camera

[0027] 21B Second camera

[0028] 22 Camera switching device

[0029] 23 Height adjustment mechanism

[0030] A position

[0031] B position

[0032] A1 Shooting position

[0033] A2 - A3 First standby position

[0034] 30 Light source filter module

[0035] 31 Light source filter

[0036] 31A Second UV filter

[0037] 31B Second red light filter

[0038] 31C Second green light filter

[0039] 31D Second blue light filter

[0040] 31E Second white light filter

[0041] 32 Light source filter switching device

[0042] 321 Stepper motor

[0043] 322 Carrier turntable

[0044] 323 Setting hole

[0045] C1 Shooting position

[0046] C2 - C5 Third standby position

[0047] Ar2 Arrow

[0048] 40 Camera filter module

[0049] 41 Camera filter

[0050] 41A First excitation light filter

[0051] 41B First red light filter

[0052] 41C First green light filter

[0053] 41D First blue light filter

[0054] 41E First white light filter

[0055] 42 Camera filter switching device

[0056] 421 Stepper motor

[0057] 422 Carrying turntable

[0058] 423 Setting hole

[0059] B1 Shooting position

[0060] B2 - B5 Second preparation positions

[0061] 50 Objective lens device

[0062] 51 Objective lens

[0063] 51A 1x objective lens

[0064] 51B 4x objective lens

[0065] 51C 10x objective lens

[0066] 51D 40x objective lens

[0067] 51E 100x objective lens

[0068] 52 Rotating disk

[0069] 521 Setting hole

[0070] 53 Focusing module

[0071] 54 Moving stage

[0072] D1 Shooting position

[0073] D2 - D5 Fourth preparation positions

[0074] 60 Image detection device

[0075] 70 Display device

[0076] 80 Dark field ring light

[0077] SP Equipment bracket

[0078] R Imaging optical path

[0079] P Illumination optical path. Detailed implementation mode

[0080] A detailed description and technical content of the present invention will be described below in conjunction with the accompanying drawings. Furthermore, for the convenience of illustration, the scales of the drawings in the present invention are not necessarily drawn according to the actual scales and there are exaggerated cases. These drawings and their scales are not used to limit the scope of the present invention.

[0081] In addition, the features and components in the drawings are not drawn according to the actual scale. The drawing method is only to present the specific features and components related to the present invention in the best way. In addition, the same or similar component symbols are used to refer to the same or similar components and parts in different drawings.

[0082] In this document, unless the context otherwise states, "comprising", "including", "having" or "containing" are inclusive or open-ended and do not exclude other unstated elements or method steps.

[0083] In this document, terms such as "in", "on", "under", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., which are used to describe the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or component referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be construed as a limitation on the present invention.

[0084] In this document, terms such as "set", "installed", "connected", "joined", "fixed", etc. should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, a mechanical connection, a direct connection, an indirect connection through an intermediate medium, etc. For those with ordinary knowledge in the field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0085] The following describes one embodiment of the present invention. Please first refer to Figure 1 , which is a block diagram of the integrated optical detection device in the present invention, as shown in the figure.

[0086] This embodiment discloses an integrated optical detection device 100. The integrated optical detection device 100 is used to photograph a test object W on a platform, obtain an image of the test object W through photographing the test object W, and obtain an image detection result through analyzing the test object image. After the image detection device 60 obtains the image of the test object W, it generates an image detection result based on the image of the test object W. In one embodiment, the test object W includes a semiconductor device, a semiconductor wafer, a semiconductor chip, a circuit board, a display panel, or other objects containing organic matter, etc., which are not limited in the present invention.

[0087] The integrated optical detection device 100 includes a light source device 10, a camera device 20, a light source filter module 30, a camera filter module 40, an objective lens device 50, an image detection device 60, and a display device 70.

[0088] The light source device 10 provides illumination light to the object to be measured via an illumination optical path. In one embodiment, the light source device 10 includes a laser light source that provides illumination light to the object to be measured via the illumination optical path P. The laser light source can be designed to be within the excitation band of the object to be measured W to excite the object to be measured W to generate fluorescence. In another embodiment, the light source device 10 includes a monochromatic light source that provides illumination light to the object to be measured via the illumination optical path P. The monochromatic light source can be, for example, white light, red light, blue light, green light, etc., and is not limited in the present invention. In one embodiment, the integrated optical detection device 100 further includes a dark field ring light 80 disposed around the outer peripheral side of the object to be measured W.

[0089] The camera device 20 can selectively switch any one of a plurality of cameras on the imaging optical path R to photograph the object to be measured W and generate an image of the object to be measured. In one embodiment, the cameras can include, for example, but are not limited to, a line scan camera and / or an area scan camera, and are not limited in the present invention.

[0090] The light source filter module 30 can selectively switch any one of a plurality of light source filters on the illumination optical path P to filter the illumination light. In one embodiment, the light source filter module 30 includes a plurality of light source filters and a light source filter switching device. The light source filter switching device can selectively switch any one of the plurality of light source filters on the illumination optical path P. In one embodiment, the plurality of light source filters can include, for example, but are not limited to, a first excitation light filter, a second red light filter, a second green light filter, a second blue light filter, and a second white light filter, and are not limited in the present invention.

[0091] The camera filter module 40 can selectively switch any one of a plurality of camera filters on the imaging optical path R to filter the illumination light. In one embodiment, the camera filter module 40 includes a plurality of camera filters and a camera filter switching device. The camera filter switching device can selectively switch any one of the plurality of camera filters on the imaging optical path R. In one embodiment, the plurality of camera filters includes a first excitation light filter, a first red light filter, a first green light filter, a first blue light filter, and a first white light filter.

[0092] The objective lens device 50 described above can selectively switch any one of a plurality of objective lenses onto the imaging optical path R. In one embodiment, the magnification of each of these objective lenses ranges between 1x and 100x, such as 1x, 4x, 10x, 40x, 100x, etc., which are not limited in the present invention.

[0093] The image detection device 60 described above is coupled to the camera of the camera device 20 to receive and analyze the image of the object to be measured, so as to obtain an image detection result. The image detection device 60 can be, for example, any device including a processor. The processor can be, for example, a central processing unit (CPU), a microprocessor, a digital signal processor (DSP), a programmable controller, a programmable logic device (PLD), or other similar devices or a combination of these devices, which are not limited in the present invention. The image detection result can be, for example, the detection of defects of the object to be measured W, the type of defects of the object to be measured W, the measurement of the structural dimensions of the object to be measured W, the characteristic analysis of the object to be measured W, or the restoration of the structural features of the object to be measured W, which are not limited in the present invention. The method of image detection can be, for example, a traditional image algorithm or detection performed via a neural network (including machine learning, deep learning, etc.). Since the detection technology is not within the scope of what the present invention intends to limit, no redundant description of the algorithm for performing image detection will be given here. The image detection result includes a fluorescence image detection result or / and a monochromatic light image detection result.

[0094] The display device 70 described above is connected to the area scan camera of the camera device 20 to display the image of the object to be measured captured by the area scan camera. Specifically, the display device 70 can be used as a re-inspection device for the re-inspection personnel to visually inspect or re-inspect the object to be measured W through the display device 70. In one embodiment, the integrated optical detection device 100 of the present invention can first detect the image of the object to be measured W captured by the line scan camera, and then capture the object to be measured through the area scan camera for re-inspection.

[0095] In one embodiment, the integrated optical detection device 100 switches to the excitation light filter through the light source filter module 30 to filter the illumination light on the illumination optical path P, so that the excitation light wavelength component of the illumination light passes through to the object to be measured W, causing the object to be measured W to generate fluorescence. On the other hand, the integrated optical detection device 100 switches to the fluorescence filter through the camera filter module 40. The fluorescence filter filters the fluorescence on the imaging optical path R, allowing the wavelength component of the fluorescence to pass through, thereby generating a fluorescence image through the camera device 20.

[0096] In one embodiment, the integrated optical detection device 100 switches to the first red filter, the first green filter, the first blue filter, or the first white filter through the light source filter module 30, filters the illumination light through the illumination optical path P, and allows the red, green, blue, or white wavelength components of the illumination light to pass onto the object under test W. On the other hand, the integrated optical detection device 100 switches to the second red filter, the second green filter, the second blue filter, or the second white filter through the camera filter module 40, filters the illumination light through the imaging optical path R, and allows the red, green, blue, or white wavelength components of the illumination light to pass through, thereby generating a non-fluorescent image.

[0097] The following gives a specific embodiment of the integrated optical detection device of the present invention for a more detailed description. Please refer to Figure 2 、 Figure 3 、 Figure 4 and Figure 5 , which are the external view schematic diagram, side view schematic diagram, front view schematic diagram, and cross-sectional schematic diagram of the integrated optical imaging device in the present invention, as shown in the figure.

[0098] The integrated optical detection device 100 in this embodiment mainly includes a device support SP and a light source device 10, a camera device 20, a light source filter module 30, a camera filter module 40, an objective device 50, and an image detection device 60 disposed on the device support SP.

[0099] The device support SP can be, for example, the support on any detection platform or processing machine tool, such as a side support, a gantry, a cantilever, a vertical frame, etc., which is not limited in the present invention. It should be noted that in the drawings of this embodiment, although the light source device 10, the camera device 20, the light source filter module 30, the camera filter module 40, and the objective device 50 are shown disposed on the same support, in practice, these devices can also be respectively disposed on different device supports, and finally, a plurality of device supports are arranged in sequence to form the integrated optical detection device 100. The variations of this embodiment are all within the scope of protection of the present invention. In this embodiment, the devices are arranged from top to bottom as the camera device 20, the camera filter module 40, the light source device 10, the light source filter module 30, and the objective device 50 (the light source device 10 and the light source filter module 30 can be arranged on the same layer).

[0100] The described camera device 20 is provided on the device bracket SP. The camera device 20 includes a plurality of cameras 21 and a camera switching device 22 for arranging the plurality of cameras 21. The camera switching device 22 switches the cameras 21 at the shooting positions corresponding to the imaging optical paths R and at least one first standby position. In an application embodiment, for example, high-precision detection can be performed by a line-scanning camera, and then a re-inspection procedure can be performed by a surface-scanning camera, so as to implement the functions of image detection and image re-inspection on the same device. In an embodiment, the camera switching device 22 is a linear moving stage for carrying the plurality of cameras 21, or any other carrier, such as an XY stage, a robotic arm, a cylinder, etc., which is not limited in the present invention. In an embodiment, the camera device 20 includes a height adjustment mechanism 23 correspondingly arranged between the linear moving stage (camera switching device 22) and the cameras 21. The height of the cameras 21 can be manually adjusted through the height adjustment mechanism 23, such as a manual slide table, to adjust an appropriate focal length; in another embodiment, the height adjustment mechanism 23 can also adjust the lifting of the cameras 21 through a servo motor or other similar driving devices, such as an automatic slide table, which is not limited in the present invention.

[0101] In the imaging optical path described in the present invention, it refers to the optical axis direction in which the camera 21 faces the object to be measured W when the camera 21 moves to the shooting position. In addition, in this embodiment, although the imaging optical path R between the object to be measured W and the camera 21 is a straight line, in other embodiments, the imaging optical path R can also be bent through a reflector or a semi-reflector. The variations of the above embodiments all fall within the scope to be protected by the present invention, which is hereby described in advance.

[0102] The described camera filter module 40 is disposed on the lower side of the device bracket SP relative to the camera device 20. The camera filter module 40 can selectively switch any one of a plurality of camera filters 41 onto the imaging optical path R to filter the illumination light. The camera filter module 40 includes a plurality of camera filters 41 and a camera filter switching device 42. The camera filter switching device 42 can selectively switch any one of the plurality of camera filters 41 onto the imaging optical path R. The camera filter switching device 42 switches the camera filter 41 on the imaging optical path R and at at least one second standby position. In one embodiment, the plurality of camera filters 41 includes a first UV light filter, a first red light filter, a first green light filter, a first blue light filter, and a first white light filter. Through the camera filter switching device 42, switching can be performed among the above various filters. In one embodiment, the camera filter switching device 42 includes a stepper motor 421 and a carrier turntable 422 disposed at the driving end of the stepper motor 421. The carrier turntable 422 has a plurality of setting holes 423 for respectively setting the camera filters 41. Specifically, the driving end of the stepper motor is the rotation axis at the output position of the stepper motor 421. By rotating the carrier turntable 422 through the stepper motor 421, the corresponding filter is moved onto the imaging optical path R. In this embodiment, when the camera filter 41 is switched to the working position, it directly corresponds to the light inlet hole of the camera 21. The above embodiment is not intended to limit the scope of the present invention. In another embodiment, the stepper motor 421 can also be replaced by other types of motors (such as servo motors), which is not limited in the present invention.

[0103] The described light source device 10 provides illumination light to the object under test W via the illumination optical path P. In the present invention, the described illumination optical path refers to the path through which the output light of the light source device 10 reaches the position of the object under test W. In addition, in this embodiment, although the illumination optical path P between the object under test W and the light source device 10 is bent in an L shape via a half-reflecting mirror, in other embodiments, the direction of the illumination optical path P can also be appropriately adjusted without blocking the camera shooting. The variations of the above embodiments all fall within the scope of protection of the present invention and are hereby described in advance. In this embodiment, the illumination light is provided to the object under test W in the form of coaxial light. Specifically, the types of the light source device 10 include a light source 11 and at least one half-reflecting mirror 13 (such as Figure 5As shown; in one embodiment, the light source 11 may, for example, but is not limited to, include a laser light source, a monochromatic light source, or other similar light sources. The semi-reflective mirror 13 converts the light provided by the light source 11 into coaxial light parallel to the shooting direction. In one embodiment, the laser light source may, for example, include but is not limited to a continuous laser, a pulsed laser, a phase-locked laser, or a pulsed pump, etc., which is not limited in the present invention; the monochromatic light source may, for example, include but is not limited to a white LED spotlight, a halogen lamp, a fluorescent lamp, an RGB lamp, etc. Any lamp that can be used for detection and meets the detection requirements can be set as the light source device 10, which is not limited in the present invention. In one embodiment, to form collimated light, a collimating lens is further provided between the light source 11 and the semi-reflective mirror 13, and the diffused light is converted into collimated light through the collimating lens.

[0104] The described light source filter module 30 is disposed on the equipment bracket SP corresponding to the light-emitting side of the light source device 10. The light source filter module 30 can selectively switch any one of the plurality of light source filters 31 onto the illumination light path P to filter the illumination light. The light source filter module 30 includes a plurality of light source filters 31 and a light source filter switching device 32, and can selectively switch any one of the plurality of light source filters 31 onto the illumination light path P. The light source filter switching device 32 switches the light source filter 31 in the illumination direction of the light source device 10 and at least one third standby position. In one embodiment, the plurality of light source filters 31 include a second UV light filter, a second red light filter, a second green light filter, a second blue light filter, and a second white light filter. Through the light source filter switching device 32, switching can be performed among the above various light source filters 31. In one embodiment, the light source filter switching device 32 includes a stepping motor 321 disposed on any equipment bracket SP and a carrier turntable 322 disposed on the driving end of the stepping motor 321. The carrier turntable 322 has a plurality of setting holes 323 for respectively setting the light source filters 31. Specifically, the driving end of the stepping motor 321 is the rotation axis at the output position of the stepping motor 321. By rotating the carrier turntable 322 through the stepping motor 321, the corresponding light source filter 31 can be moved to the shooting direction of the camera 21. In another embodiment, the stepping motor 321 can also be replaced by other types of motors (such as a servo motor), which is not limited in the present invention.

[0105] In one embodiment, the integrated optical detection device 100 includes a dark-field ring light 80 disposed on the equipment bracket SP. The dark-field ring light 80 is disposed around the outer periphery of the object to be measured W, and the brightness of the micro-structure edge is enhanced through the dark-field ring light 80 to increase the contrast. In one embodiment, the dark-field ring light 80 is disposed around the object to be measured W in a horizontal radial manner, and the illumination direction is substantially parallel to the surface of the object to be measured W to form a sharp-edge display effect.

[0106] The objective lens device 50 described above can selectively switch any one of a plurality of objective lenses 51 onto the imaging optical path R. The objective lens device 50 is disposed on the equipment support SP on the lower side compared to the light source device 10 and corresponds to the upper side of the platform for the object to be measured W. The objective lens device 50 includes a plurality of objective lenses 51 and a rotating disk 52 for arranging the plurality of objective lenses 51. A plurality of setting holes 521 are provided on the rotating disk 52 for respectively arranging these objective lenses 51. The objective lens device 50 switches the objective lens 51 on the imaging optical path R of the camera 21 and at least one fourth standby position. In one embodiment, the magnification of each of the plurality of objective lenses 51 is between 1 times and 100 times. Specifically, the objective lens 51 can be, for example, a 1x objective lens, a 4x objective lens, a 10x objective lens, a 40x objective lens, a 100x objective lens, etc. The number of the objective lenses 51 and the magnification of the objective lens 51 are not limited by the present invention and can be changed according to actual needs. In one embodiment, the objective lens device 50 can be a rotating disk 52 carrying a plurality of objective lenses 51. The rotating disk 52 can switch the objective lens 51, for example, by manual rotation or automatic rotation to adjust the magnification, which is not limited in the present invention. In the embodiment of automatic rotation, the rotation of the rotating disk 52 can be controlled by a stepper motor, a servo motor or other similar devices in cooperation with a linkage mechanism (such as a gear).

[0107] In order to achieve the function of autofocus, in one embodiment, the integrated optical detection device 100 includes a focusing module 53 disposed on the equipment support SP and a moving stage 54 disposed on the equipment support SP for controlling the lifting of the objective lens device 50. The moving stage 54 adjusts the distance between the objective lens 51 and the object to be measured W on the imaging optical path R according to the signal of the focusing module 53. In one embodiment, the moving stage 54 is a linear stage. In other embodiments, the moving stage 54 can achieve the function of adjusting the lifting of the objective lens device 50 through the cooperation of a gear and a rack. The implementation manner of the moving stage 54 can be changed according to actual needs and is not limited in the present invention.

[0108] In this embodiment, the switching between each device (such as a camera, a filter) can be performed by providing control instructions to a linear motor, a stepper motor, a servo motor, a robotic arm or a cylinder, etc. via a computer, a server or a programmable logic controller (PLC), and after being calculated by a processor, the corresponding switching is performed according to the user's control instructions (such as via a human-machine interface) or according to a pre-programmed program.

[0109] Regarding the camera switching method of the camera device 20, please refer to Figure 6 and Figure 7 , which are the switching action schematic diagrams (one) and (two) of the camera, as shown in the figure.

[0110] In this embodiment, the camera device 20 mainly includes two types of cameras. According to the different number of cameras, the number of stations where the camera switching device 22 stays will be adjusted accordingly. This part can be confirmed by the feedback motor rotation stroke or encoder, and is not limited in the present invention. When the camera switching device 22 jointly carries the linear moving stage (such as Figure 2 shown) of the first camera 21A (such as a line scan camera) and the second camera 21B (such as a surface scan camera) at position A, at this time, the first camera 21A is aligned with the shooting position A1 (the first end of the imaging optical path R), and the second camera 21B is aligned with the first preparation position A2; when the camera switching device 22 receives a switching instruction and moves the linear moving stage to position B, at this time, the second camera 21B is aligned with the shooting position A1, and the first camera 21A is aligned with the first preparation position A3.

[0111] Regarding the filter switching method of the camera filter module 40, please refer to Figure 8 , which is a schematic diagram of the switching operation of the camera filter module, as shown in the figure.

[0112] In this embodiment, the camera filter module 40 includes five camera-end filters, namely the first UV light filter 41A, the first red light filter 41B, the first green light filter 41C, the first blue light filter 41D, and the first white light filter 41E. In the attached figure, the first UV light filter 41A is aligned with the shooting position B1 (imaging optical path R), and the first red light filter 41B, the first green light filter 41C, the first blue light filter 41D, and the first white light filter 41E are respectively aligned with the second preparation positions B2 - B5. When the carrying turntable 422 rotates (such as the direction indicated by the arrow Ar1), the positions of the respective filters will be switched. For example, if the movement switching instruction is one stroke, the first UV light filter 41A will move from the shooting position B1 to the second preparation position B2, the first red light filter 41B will move from the second preparation position B2 to the second preparation position B3, the first green light filter 41C will move from the second preparation position B3 to the second preparation position B4, the first blue light filter 41D will move from the second preparation position B4 to the second preparation position B5, and the first white light filter 41E will move from the second preparation position B5 to the shooting position B1; in the case of two strokes, it will move two pitches, and so on. In addition to the above embodiments, the rotation direction of the carrying turntable 422 can also be the direction opposite to the arrow Ar1, which is not limited in the present invention.

[0113] Regarding the filter switching method of the light source filter module 30, please refer to Figure 9 , which is a schematic diagram of the switching operation of the light source filter module, as shown in the figure.

[0114] In this embodiment, the light source filter module 30 includes five incident light end filters, namely a second UV filter 31A, a second red light filter 31B, a second green light filter 31C, a second blue light filter 31D, and a second white light filter 31E. In the attached drawings, the second UV filter 31A is aligned with the shooting position C1, and the second red light filter 31B, the second green light filter 31C, the second blue light filter 31D, and the second white light filter 31E are respectively aligned with the third preparation positions C2 - C5. When the carrying turntable 322 rotates (for example, in the direction indicated by the arrow Ar2), the positions of the respective filters will be switched. For example, if the movement switching instruction is for one stroke, the second UV filter 31A will move from the shooting position C1 to the third preparation position C2, the second red light filter 31B will move from the third preparation position C2 to the third preparation position C3, the second green light filter 31C will move from the third preparation position C3 to the third preparation position C4, the second blue light filter 31D will move from the third preparation position C4 to the third preparation position C5, and the second white light filter 31E will move from the third preparation position C5 to the shooting direction C1; in the case of two strokes, it will move two pitches, and so on. In addition to the above embodiments, the rotation direction of the carrying turntable 322 can also be the direction opposite to the arrow Ar2, which is not limited in the present invention.

[0115] Regarding the objective lens switching method of the objective lens device 50, please refer to Figure 10 , which is a schematic diagram of the switching operation of the objective lens, as shown in the figure.

[0116] In this embodiment, the objective lens device 50 includes five objective lenses, namely a 1x objective lens 51A, a 4x objective lens 51B, a 10x objective lens 51C, a 40x objective lens 51D, and a 100x objective lens 51E. In the attached drawings, the 4x objective lens 51B is aligned with the shooting position D1, and the 1x objective lens 51A, the 10x objective lens 51C, the 40x objective lens 51D, and the 100x objective lens 51E are respectively aligned with the fourth preparation positions D5, D2 - D4. When the rotating disk 52 rotates (for example, in the direction indicated by the arrow Ar3), the positions of the respective objective lenses will be switched. For example, when the rotating disk 52 rotates counterclockwise for one stroke, the 4x objective lens 51B will move from the shooting position D1 to the fourth preparation position D2, the 10x objective lens 51C will move from the fourth preparation position D2 to the fourth preparation position D3, the 40x objective lens 51D will move from the fourth preparation position D3 to the fourth preparation position D4, the 100x objective lens 51E will move from the fourth preparation position D4 to the fourth preparation position D5, and the 1x objective lens 51A will move from the fourth preparation position D5 to the shooting direction D1; in the case of two strokes, it will move two pitches, and so on. In addition to the above embodiments, the rotation direction of the rotating disk 52 can also be the direction opposite to the arrow Ar3, which is not limited in the present invention.

[0117] In summary, the present invention integrates the platforms of appearance detection, fluorescence detection, and re-inspection detection, which can effectively reduce the volume of the device. In addition, the present invention supports the detection of images with different wavelengths and the detection of fluorescence with different wavelengths, and supports the autofocus function. Moreover, the objective lens magnification of the present invention has a high selectivity and breaks through the sub-micron limit, having an advantageous effect compared with the existing technologies.

[0118] The present invention has been described in detail above. However, what is described above is only a preferred embodiment of the present invention, and it should not be used to limit the scope of implementation of the present invention. That is, all equivalent changes and modifications made according to the scope of the patent application of the present invention should still fall within the scope covered by the patent of the present invention.

Claims

1. An integrated optical detection device, characterized in that, Comprising: A light source device that provides illumination light to a test object via an illumination optical path; A camera device that can selectively switch any one of multiple cameras on an imaging optical path to capture the test object, generate a test object image, and perform an appearance inspection procedure or a re-inspection procedure; the device is capable of performing appearance inspection, fluorescence inspection, and re-inspection, and the re-inspection procedure is for a re-inspection personnel to visually inspect or re-inspect the test object; A light source filter module that can selectively switch any one of multiple light source filters on the illumination optical path to filter the illumination light; A camera filter module that can selectively switch any one of multiple camera filters on the imaging optical path to filter the illumination light; and An image detection device coupled to the camera to receive and analyze the test object image to obtain an image detection result; Wherein the image detection result includes a fluorescence image detection result or / and a monochromatic light image detection result.

2. The optical detection device according to claim 1, characterized in that The test object includes a semiconductor device, a semiconductor wafer, a semiconductor chip, a circuit board, a display panel, or other objects containing organic substances.

3. The optical detection device according to claim 1, wherein The light source device includes a laser light source that provides the illumination light to the test object via the illumination optical path.

4. The integrated optical detection device according to claim 1, wherein The cameras include a line scan camera and / or a area scan camera.

5. The integrated optical detection device according to claim 4, wherein, Further comprising: A linear moving stage for carrying and moving the camera device; and A display device connected to the area scan camera to display the test object image captured by the area scan camera.

6. The integrated optical detection device according to claim 5, wherein The camera device includes a height adjustment mechanism correspondingly arranged between the linear moving stage and the cameras.

7. The integrated optical detection device according to claim 1, wherein The light source filter module includes: Multiple of the light source filters; and A light source filter switching device that can selectively switch any one of multiple of the light source filters on the illumination optical path.

8. The integrated optical detection device according to claim 1, wherein, The camera filter module includes: Multiple camera filters; and A camera filter switching device that can selectively switch any one of multiple of the camera filters on the imaging optical path.

9. The integrated optical detection device according to claim 7 or 8, characterized in that The light source filter includes an excitation light filter that filters the illumination light on the illumination optical path, allows the excitation light wavelength component of the illumination light to pass through to the test object, and causes the test object to generate fluorescence; and Wherein the camera filter includes a fluorescence filter that filters the fluorescence on the imaging optical path, allows the wavelength component of the fluorescence to pass through, and thereby the camera device generates a fluorescence image.

10. The integrated optical detection device according to claim 7 or 8, characterized in that, The light source filter includes a first red light filter, a first green light filter, or a first blue light filter that filters the illumination light via the illumination optical path, allows the red, green, blue, or white light wavelength component of the illumination light to pass through to the test object; Wherein the camera filter includes a second red light filter, a second green light filter, or a second blue light filter that filters the illumination light via the imaging optical path, allows the red, green, blue, or white light wavelength component of the illumination light to pass through, and thereby generates a non-fluorescence image.

11. The integrated optical detection device according to claim 1, wherein, The light source device includes a monochromatic light source that provides the illumination light to the test object via the illumination optical path.

12. The integrated optical detection device according to claim 1, wherein Further comprising an objective lens device that can selectively switch any one of multiple objective lenses on the imaging optical path.

13. The integrated optical detection device according to claim 12, wherein Further comprising: A focusing module; and A moving stage that adjusts the distance between the objective lens and the object to be measured on the imaging optical path according to the signal of the focusing module.

14. The integrated optical detection device according to claim 12, wherein The magnification of each of these objective lenses is between 1x and 100x.

15. The integrated optical detection device according to claim 1, wherein It further includes: A dark field annular lamp that is disposed around the outer periphery of the object to be measured.

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