Detection Device and Detection Method for a Motion Mechanism

Abstract

An embodiment of the present invention discloses a detection device and a detection method for a motion mechanism; the detection device includes a test fixture and a distance detection component. The test fixture includes a substrate and a test piece located on the substrate. The test piece includes a test surface that is inclined with respect to the substrate. The distance detection component is disposed at at least one moving end of the motion mechanism and is used to detect the distance parameter between the moving end and the test surface. The signal emitted by the distance detection component is disposed non-perpendicularly to the test surface. In the present invention, through the distance detection component and the inclined test surface, the distance detection component at the moving end of the motion mechanism moves along the test surface with a predetermined parameter to obtain the distance parameter, and the moving positioning accuracy of the motion mechanism is determined according to the distance parameter. If the distance parameter deviation is large, the moving positioning accuracy is low; if the distance parameter deviation is small, the moving positioning accuracy is high. This facilitates the daily inspection of the motion mechanism, is conducive to improving the inspection efficiency, and reducing the inspection cost.

Description

Technical Field

[0001] The present invention relates to the field of displays, and particularly to a detection device and a detection method for a motion mechanism. Background Art

[0002] In recent years, the end accuracy of machine operation is an important influencing factor in the production of display devices. In the production mechanisms of related display devices, such as dispensing and laser equipment, the end effector mechanisms are mainly divided into two types: XY two-axis linkage equipment and XYZ three-axis linkage equipment. The existing methods for checking the end accuracy mainly include the following two: 1. Using a laser interferometer to separately test the single-axis positioning accuracy and repeat positioning accuracy of the X-axis, Y-axis, or Z-axis, and then retrogressing the theoretical end comprehensive accuracy. This method requires the use of a variety of precision instruments, and there is no obstruction for the equipment in the moving direction. This method is suitable for accuracy verification during the initial assembly of the equipment and does not meet the conditions for mass production spot checks; 2. Using a laser tracker and related components such as a retroreflector to measure the end comprehensive motion accuracy. This method uses an expensive laser tracker and requires professional technical personnel to operate, with high service costs, and does not meet the conditions for daily accuracy verification.

[0003] Therefore, there is an urgent need for a detection device and a detection method for a motion mechanism to solve the above technical problems. Summary of the Invention

[0004] The present invention provides a detection device and a detection method for a motion mechanism, which can alleviate the technical problems of complex structure, complex operation, and high cost of the current detection device.

[0005] The present invention provides a detection device for a motion mechanism, the motion mechanism includes at least one moving end, and the detection device includes:

[0006] A test fixture, including a substrate and a test piece located on the substrate, the test piece includes a test surface inclined with respect to the substrate;

[0007] A distance detection component, arranged at at least one of the moving ends of the motion mechanism, for detecting a distance parameter between the moving end and the test surface;

[0008] Wherein, the signal emitted by the distance detection component is not perpendicular to the test surface.

[0009] Preferably, the detection device further includes a control component, the control component is respectively connected to the motion mechanism and the distance detection component; wherein, the control component is used to control the moving end to move along the trajectory of the test surface above the test surface, and determine the moving positioning accuracy of the motion mechanism according to the distance parameter.

[0010] Preferably, the detection device further includes a processor, which is electrically connected to the distance detection component and the control component to read and analyze the corresponding distance parameter between the distance detection component and the test fixture.

[0011] Preferably, the test surface at least includes a first inclined plane and a second inclined plane connected to the first inclined plane; wherein, the extending direction of the first inclined plane is different from that of the second inclined plane.

[0012] Preferably, the test surface further includes a third inclined plane at one end of the second inclined plane away from the first inclined plane, a fourth inclined plane at one end of the third inclined plane away from the second inclined plane, a fifth inclined plane at one end of the fourth inclined plane away from the third inclined plane, a sixth inclined plane at one end of the fifth inclined plane away from the fourth inclined plane, a seventh inclined plane at one end of the sixth inclined plane away from the fifth inclined plane, and an eighth inclined plane at one end of the seventh inclined plane away from the sixth inclined plane; wherein, the acute angles between the first inclined plane, the second inclined plane, the third inclined plane, the fourth inclined plane, the fifth inclined plane, the sixth inclined plane, the seventh inclined plane, and the eighth inclined plane and the substrate are all equal, the eighth inclined plane is connected to the first inclined plane, the extending direction of the first inclined plane is parallel to that of the fifth inclined plane, and the extending direction of the third inclined plane is parallel to that of the seventh inclined plane.

[0013] Preferably, the extending direction of the second inclined plane is parallel to that of the sixth inclined plane, and the extending direction of the fourth inclined plane is parallel to that of the eighth inclined plane.

[0014] Preferably, the acute angle between the test surface and the substrate is 20° to 40°.

[0015] The present invention also provides a detection method for a detection device of a motion mechanism. Provide a detection device as described above. The detection method of the detection device includes the following steps:

[0016] Control the corresponding moving end of the motion mechanism to move along the trajectory of the test surface above the test surface;

[0017] Through the distance detection component, obtain the distance parameter between the moving end and the test surface;

[0018] Determine the moving positioning accuracy of the motion mechanism according to the distance parameter.

[0019] Preferably, controlling the corresponding moving end of the motion mechanism to move along the trajectory of the test surface above the test surface includes: controlling the corresponding moving end of the motion mechanism to move along the trajectory of the test surface above the test surface with a first preset parameter, where the first preset parameter includes a preset distance, a preset speed, and a preset moving distance; the step of obtaining the distance parameter between the moving end and the test surface through the distance detection component includes: obtaining the distance parameter and the moving time parameter between the moving end and the test surface through the distance detection component; the step of determining the moving positioning accuracy of the motion mechanism according to the distance parameter includes: determining the moving positioning accuracy of the motion mechanism according to the distance parameter and the preset distance, and determining the speed following accuracy of the motion mechanism according to the preset moving distance and the moving time parameter.

[0020] Preferably, the step of controlling the corresponding moving end of the motion mechanism to move along the trajectory of the test surface above the test surface includes: controlling the corresponding moving end of the motion mechanism to move along the trajectory of the test surface above the test surface with a first preset parameter, where the first preset parameter includes moving at least one circle clockwise and at least one circle counterclockwise.

[0021] Advantages of the present invention: Through the distance detection component and the inclined test surface, the present invention uses the distance detection component at the moving end of the motion mechanism to move along the test surface with a predetermined parameter to obtain the distance parameter, and determines the moving positioning accuracy of the motion mechanism according to the distance parameter. If the distance parameter deviation is large, the moving positioning accuracy is low; if the distance parameter deviation is small, the moving positioning accuracy is high. It facilitates the daily inspection of the motion mechanism, is beneficial to improving the inspection efficiency, and reducing the inspection cost. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following will briefly introduce the drawings required for the description of the embodiments. Obviously, the following drawings are only some embodiments of the present invention. For those skilled in the art, without creative efforts, other drawings can be obtained based on these drawings.

[0023] Figure 1 is a schematic structural diagram of a detection device for a motion mechanism provided by an embodiment of the present invention;

[0024] Figure 2 is a top view schematic diagram of a test fixture of a detection device for a motion mechanism provided by an embodiment of the present invention;

[0025] Figure 3 is Figure 2 a schematic cross-sectional structure along A1 - A2;

[0026] Figure 4 It is a flowchart of the steps of the detection method of the detection device for the motion mechanism provided by the embodiments of the present invention. Detailed implementation manners

[0027] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without making creative efforts belong to the scope of protection of the present invention. In addition, it should be understood that the specific implementation manners described herein are only used to illustrate and explain the present invention, and are not used to limit the present invention. In the present invention, unless otherwise stated, the orientation words such as "upper" and "lower" generally refer to the upper and lower in the actual use or working state of the device, specifically the drawing direction in the accompanying drawings; and "inner" and "outer" refer to the outline of the device.

[0028] In recent years, the end accuracy of machine operation is an important influencing factor in the production of display devices. In the production mechanisms of related display devices, such as dispensing and laser equipment, the end effector is mainly divided into two types: XY two-axis linkage equipment and XYZ three-axis linkage equipment. The existing end accuracy inspection methods mainly include the following two: 1. Use a laser interferometer to separately test the single-axis positioning accuracy and repeat positioning accuracy of the X-axis, Y-axis, or Z-axis, and then reverse the theoretical end comprehensive accuracy. This method requires the use of a variety of precision instruments, and there is no obstruction in the moving direction of the equipment. This method is suitable for the accuracy verification during the initial assembly of the equipment and does not meet the conditions for mass production inspection; 2. Use a laser tracker and related components such as a retroreflector to measure the end comprehensive motion accuracy. The laser tracker used in this method is expensive, and requires professional technical personnel to operate, and the service cost is high, and it does not meet the conditions for daily accuracy verification.

[0029] Please refer to Figures 1 to 3 , the embodiments of the present invention provide a detection device 100 for a motion mechanism 200, the motion mechanism 200 includes at least one moving end, and the detection device 100 includes:

[0030] A test fixture 300, including a substrate 310 and a test piece 320 located on the substrate 310, the test piece 320 includes a test surface 330 inclined with respect to the substrate 310;

[0031] A distance detection component 400, disposed at at least one of the moving ends of the motion mechanism 200, for detecting the distance parameter between the moving end and the test surface 330;

[0032] Among them, the signal emitted by the distance detection component 400 is not perpendicular to the test surface 330.

[0033] In the present invention, through the distance detection component and the inclined test surface, the distance detection component at the moving end of the moving mechanism is moved along the test surface with predetermined parameters to obtain distance parameters. According to the distance parameters, the moving positioning accuracy of the moving mechanism is determined. If the deviation of the distance parameters is large, the moving positioning accuracy is low; if the deviation of the distance parameters is small, the moving positioning accuracy is high. This facilitates the daily inspection of the moving mechanism, is beneficial to improving the inspection efficiency, and reducing the inspection cost.

[0034] The technical solution of the present invention will be described in combination with specific embodiments.

[0035] In some embodiments, please refer to Figures 1 to 3 , the detection device 100 further includes a control component 500, and the control component 500 is respectively connected to the moving mechanism 200 and the distance detection component 400; among them, the control component 500 is used to control the moving end to move along the trajectory of the test surface 330 above the test surface 330, and determine the moving positioning accuracy of the moving mechanism 200 according to the distance parameters.

[0036] The control component 500 can input preset motion parameter information to the moving mechanism 200 to make the moving mechanism 200 move. The moving mechanism 200 includes at least one moving arm 210, and a moving arm 210 has a moving end. The moving mechanism 200 further includes a servo driver 220 and a motion control card 230. The control component 500 inputs the preset motion parameter information to the motion control card 230, and the control card inputs the driving information to the servo driver 220, and the servo driver 220 directly controls the movement of the moving arm 210.

[0037] In some embodiments, please refer to Figures 1 to 3 , the detection device 100 further includes a processor 600, and the processor 600 is electrically connected to the distance detection component 400 and the control component 500 to read and analyze the corresponding distance parameters between the distance detection component 400 and the test fixture 300.

[0038] The control component 500 transmits the preset motion parameter information to the motion mechanism 200, causing the motion mechanism 200 to move along the test surface 330 according to a preset trajectory. The distance detection component 400 records the distance parameter between the corresponding moving end of the motion mechanism 200 and the test surface 330 and the time parameter corresponding to the measurement position. According to the change of the distance parameter, the moving positioning deviation of the motion mechanism 200 is calculated, so as to obtain the moving positioning accuracy; according to the displacement parameter in the preset motion parameter information and the corresponding obtained time parameter, the moving speed of the moving end is calculated, and then the moving speed deviation of the motion mechanism 200 is calculated, so as to obtain the moving speed accuracy.

[0039] In some embodiments, please refer to Figures 1 to 3 , the test surface 330 at least includes a first inclined plane 331 and a second inclined plane 332 connected to the first inclined plane 331; wherein, the extending direction of the first inclined plane 331 is different from the extending direction of the second inclined plane 332.

[0040] The first inclined plane 331 and the second inclined plane 332 can form two test directions in different directions, so that the moving arm 210 moves in different directions to complete the test.

[0041] In some embodiments, please refer to Figures 1 to 3 , the test surface 330 further includes a third inclined plane 333 at one end of the second inclined plane 332 away from the first inclined plane 331, a fourth inclined plane 334 at one end of the third inclined plane 333 away from the second inclined plane 332, a fifth inclined plane 335 at one end of the fourth inclined plane 334 away from the third inclined plane 333, a sixth inclined plane 336 at one end of the fifth inclined plane 335 away from the fourth inclined plane 334, a seventh inclined plane 337 at one end of the sixth inclined plane 336 away from the fifth inclined plane 335, and an eighth inclined plane 338 at one end of the seventh inclined plane 337 away from the sixth inclined plane 336.

[0042] Wherein, the acute angle θ between the first inclined plane 331, the second inclined plane 332, the third inclined plane 333, the fourth inclined plane 334, the fifth inclined plane 335, the sixth inclined plane 336, the seventh inclined plane 337, and the eighth inclined plane 338 and the substrate 310 are all equal. The eighth inclined plane 338 is connected to the first inclined plane 331. The extending direction of the first inclined plane 331 is parallel to the extending direction of the fifth inclined plane 335, and the extending direction of the third inclined plane 333 is parallel to the extending direction of the seventh inclined plane 337.

[0043] Described with the extending direction of the first inclined plane 331 as the X-axis direction and the extending direction of the third inclined plane 333 as the Y-axis direction. Among them, when the moving arm 210 moves counterclockwise along the test surface 330, when passing through the first inclined plane 331, the second inclined plane 332, the third inclined plane 333, the fourth inclined plane 334, the fifth inclined plane 335, the sixth inclined plane 336, the seventh inclined plane 337, and the eighth inclined plane 338, the moving directions of the moving ends of the moving arm 210 are successively X﹢, (X﹢&Y﹢), Y﹢, (X-&Y﹢), X-, (X-&Y-), Y-, (X﹢&Y-). Among them, “﹢” represents the positive direction along the coordinate axis, “-” represents the negative direction along the coordinate axis, and “&” represents the combined direction. All kinds of motion situations are included, which is beneficial to reducing the influence of the manufacturing precision of the test fixture 300 on the detection.

[0044] In some embodiments, please refer to Figures 1 to 3 , the extending direction of the second inclined plane 332 is parallel to the extending direction of the sixth inclined plane 336, and the extending direction of the fourth inclined plane 334 is parallel to the extending direction of the eighth inclined plane 338.

[0045] The directions of the oblique movements are parallel. It can test that when in different movement directions, the changes in the test conditions of the moving positioning accuracy and the speed following accuracy are small, and the performance parameters of the movement mechanism 200 can be adjusted more pertinently to reach the optimal state.

[0046] In some embodiments, please refer to Figures 1 to 3 , the acute angle θ between the test surface 330 and the substrate 310 is 20° to 40°. An excessive angle or a too small angle will affect the test accuracy of the distance detection component 400 and the final obtained accuracy result.

[0047] Preferably, the acute angle θ between the test surface 330 and the substrate 310 is 30°. It can not only obtain a good detection effect, but also reduce the manufacturing difficulty of the test fixture 300 and reduce the cost.

[0048] In some embodiments, please refer to Figures 1 to 3 , the distance detection component 400 includes a laser ranging unit, and the test surface 330 is a matte surface. The distance detection component 400 is a laser ranging device, which can use laser for ranging. At the same time, the test surface 330 is matte-treated to reduce the influence on laser measurement and improve the measurement accuracy.

[0049] In some embodiments, please refer to Figure 3The test piece 320 further includes a connection unit 340, and the connection unit 340 connects the test surface 330 and the substrate 310.

[0050] In some embodiments, the machining accuracy of the test fixture 300 is less than or equal to 0.01 mm, which can ensure the detection accuracy and avoid measurement accuracy deviation caused by the test fixture 300.

[0051] In some embodiments, the motion mechanism 200 can be a dispensing device, a laser device, such as a laser cutting device, etc. This is only an example and not a specific limitation.

[0052] In the present invention, through the distance detection component and the inclined test surface, the distance detection component at the moving end of the motion mechanism is moved along the test surface with predetermined parameters to obtain distance parameters. According to the distance parameters, the moving positioning accuracy of the motion mechanism is determined. If the distance parameter deviation is large, the moving positioning accuracy is low; if the distance parameter deviation is small, the moving positioning accuracy is high. This facilitates the daily inspection of the motion mechanism, is beneficial to improving the inspection efficiency, and reduces the inspection cost.

[0053] Please refer to Figure 4 The embodiment of the present invention further provides a detection method for a detection device 100 of a motion mechanism. Provide the detection device 100 as described above in any one of the embodiments. The detection method of the detection device 100 includes the following steps:

[0054] S100. Control the corresponding moving end of the motion mechanism 200 to move along the trajectory of the test surface 330 above the test surface 330;

[0055] S200. Obtain the distance parameter between the moving end and the test surface 330 through the distance detection component 400;

[0056] S300. Determine the moving positioning accuracy of the motion mechanism 200 according to the distance parameter.

[0057] In the present invention, through the distance detection component and the inclined test surface, the distance detection component at the moving end of the motion mechanism is moved along the test surface with predetermined parameters to obtain distance parameters. According to the distance parameters, the moving positioning accuracy of the motion mechanism is determined. If the distance parameter deviation is large, the moving positioning accuracy is low; if the distance parameter deviation is small, the moving positioning accuracy is high. This facilitates the daily inspection of the motion mechanism, is beneficial to improving the inspection efficiency, and reduces the inspection cost.

[0058] Now, the technical solution of the present invention will be described in combination with specific embodiments.

[0059] In this embodiment, the detection method of the detection device 100 includes:

[0060] S100. Control the corresponding moving end of the motion mechanism 200 to move along the trajectory of the test surface 330 above the test surface 330.

[0061] In some embodiments, referring to Figures 1 to 3 , the detection device 100 further includes a control component 500, and the control component 500 is respectively connected to the motion mechanism 200 and the distance detection component 400; wherein, the control component 500 is configured to control the moving end to move along the trajectory of the test surface 330 above the test surface 330, and determine the moving positioning accuracy of the motion mechanism 200 according to the distance parameter.

[0062] In some embodiments, step S100 includes:

[0063] S110. Control the corresponding moving end of the motion mechanism 200 to move along the trajectory of the test surface 330 above the test surface 330 with a first preset parameter.

[0064] In some embodiments, referring to Figures 1 to 3 , the first preset parameter includes a preset distance M, a preset speed V, and a preset moving distance S. Since the stability and accuracy of the motion mechanism 200 during operation, as well as the resonance frequency, are directly affected by the operating speed, different speeds are used during step S110, for example, the speeds are respectively tested as: 10 mm / s, 20 mm / s, 40 mm / s, 60 mm / s, 80 mm / s. By comparing the moving positioning accuracy and speed following accuracy at different speeds, the optimal speed range for the overall operation of the motion mechanism 200 is evaluated, so as to match other parameters of the motion structure, such as the glue output of the glue valve and the laser energy.

[0065] In some embodiments, the first preset parameter includes at least one clockwise movement around and at least one counterclockwise movement around.

[0066] Obtain the moving positioning accuracy and speed following accuracy of the moving end during clockwise and counterclockwise operations respectively, obtain the tuning state of the servo driver 220, and perform corresponding optimization adjustments. Ideally, the moving positioning accuracy and speed following accuracy in the clockwise and counterclockwise directions are roughly the same and of the same order of magnitude.

[0067] Preferably, perform 3 clockwise and 3 counterclockwise operations. For example, it can be continuously operated in the order of clockwise - counterclockwise - clockwise - counterclockwise - clockwise - counterclockwise to improve the measurement accuracy.

[0068] S200. Obtain the distance parameter between the moving end and the test surface 330 through the distance detection component 400.

[0069] In some embodiments, step S200 includes:

[0070] S210. Obtain the distance parameter and the movement time parameter between the moving end and the test surface 330 through the distance detection component 400.

[0071] In some embodiments, the distance parameter is the distance between the moving end and the test surface 330, that is, the distance from the signal emitted by the distance detection component 400 to the test surface 330. For example, obtain the distance parameter M1 at the first point and the distance parameter M2 at the second point.

[0072] In some embodiments, the time parameter corresponds to the preset movement distance S. For example, the preset movement distance includes the coordinates of the first point and the second point. Obtain the preset movement distance S1 between the first point and the second point. The time for the distance detection component 400 to move to the first point is the first time t1, and the time for the distance detection component 400 to move to the second point is the second time t2. The time for the distance detection component 400 to move from the first point to the second point is t2 - t1. Similarly, the preset movement distance S2 between the second point and the third point can be obtained. The time for the distance detection component 400 to move to the second point is the second time t2, and the time for the distance detection component 400 to move to the third point is the third time t3. The time for the distance detection component 400 to move from the second point to the third point is t3 - t2.

[0073] S300. Determine the moving positioning accuracy of the motion mechanism 200 according to the distance parameter.

[0074] In some embodiments, step S300 includes:

[0075] S310. Determine the moving positioning accuracy of the motion mechanism 200 according to the distance parameter, and determine the speed following accuracy of the motion mechanism 200 according to the preset movement distance and the movement time parameter.

[0076] In some embodiments, please refer to Figures 1 to 3, in the figure, the distance detection component 400 represented by the dashed line and the distance detection component 400 represented by the solid line show the schematic of the actual and preset displacement deviation at the same point. The actually measured distance parameter at a certain point is compared with the preset distance M to obtain the distance deviation ΔM of the moving arm 210, and according to the acute angle θ between the test surface 330 and the substrate 310 and the trigonometric function relationship, the moving positioning deviation ΔN is obtained; M1 and M2 are respectively compared with the preset distance M to obtain ΔM1 = M1 - M, ΔM2 = M2 - M, and so on. By comparing the distance deviations at multiple points, the maximum distance deviation ΔMmax and the minimum distance deviation ΔMmin can be obtained. At the same time, according to the acute angle θ between the test surface 330 and the substrate 310 and the trigonometric function relationship, the maximum moving positioning deviation ΔNmax = ΔMmax / tanθ and the minimum moving positioning deviation ΔNmin = ΔMmin / tanθ are obtained, which will be used as a reference for the moving positioning accuracy.

[0077] For example, the maximum moving positioning deviation ΔNmax can be directly used as an absolute value to divide the moving positioning accuracy.

[0078] For another example, the maximum moving positioning deviation ΔNmax and the minimum moving positioning deviation ΔNmin are operated to obtain the relative maximum moving positioning deviation τN = ΔNmax - ΔNmin. When τV is greater than 0.1 mm, it is unqualified accuracy, and when it is less than or equal to 0.1 mm, it is qualified accuracy. Among them, when τN is between 0.01 mm and 0.1 mm, it is good accuracy, and when τN is less than 0.1 mm, it is excellent accuracy.

[0079] In some embodiments, the average speed of the distance detection component 400 moving from the first point to the second point is V1 = S1 / (t2 - t1), and the average speed of the distance detection component 400 moving from the second point to the third point is V2 = S2 / (t3 - t2). V1 and V2 are respectively compared with the preset speed V to obtain the speed deviation ΔV1 = V1 - V, ΔV2 = V2 - V, and so on. By comparing the speed deviations at multiple points, the maximum speed deviation ΔVmax and the minimum speed deviation ΔVmin can be obtained, which are used as a reference for the speed following accuracy.

[0080] For example, the maximum speed deviation ΔVmax can be directly used as an absolute value to divide the speed following accuracy. For example, when the maximum speed deviation ΔVmax is greater than 1 mm / s, it is unqualified accuracy, and when it is less than or equal to 1 mm / s, it is qualified accuracy.

[0081] For another example, the maximum speed deviation ΔVmax can be operated with the preset speed V to obtain the relative maximum speed deviation τV = ΔVmax / V. When τV is greater than 20%, it is unqualified accuracy, and when it is less than or equal to 20%, it is qualified accuracy.

[0082] In some embodiments, for example, in the dispensing or laser processing process, the precise speed response directly determines the width of the glue or the laser energy, which has a significant impact on the process result. The speed following accuracy tested by this method can directly reflect the speed stability of the motion mechanism 200 during operation.

[0083] In the present invention, through the distance detection component and the inclined test surface, the distance detection component at the moving end of the motion mechanism is moved along the test surface with predetermined parameters to obtain distance parameters, and the moving positioning accuracy of the motion mechanism is determined according to the distance parameters. If the deviation of the distance parameters is large, the moving positioning accuracy is low; if the deviation of the distance parameters is small, the moving positioning accuracy is high. This facilitates the daily inspection of the motion mechanism, helps improve the inspection efficiency, and reduces the inspection cost.

[0084] An embodiment of the present invention discloses a detection device and a detection method for a motion mechanism; the detection device includes a test fixture and a distance detection component. The test fixture includes a substrate and a test piece located on the substrate. The test piece includes a test surface inclined with respect to the substrate. The distance detection component is arranged at at least one moving end of the motion mechanism for detecting the distance parameter between the moving end and the test surface, and the signal emitted by the distance detection component is arranged non-perpendicularly to the test surface; in the present invention, through the distance detection component and the inclined test surface, the distance detection component at the moving end of the motion mechanism is moved along the test surface with predetermined parameters to obtain distance parameters, and the moving positioning accuracy of the motion mechanism is determined according to the distance parameters. If the deviation of the distance parameters is large, the moving positioning accuracy is low; if the deviation of the distance parameters is small, the moving positioning accuracy is high. This facilitates the daily inspection of the motion mechanism, helps improve the inspection efficiency, and reduces the inspection cost.

[0085] The above has introduced in detail a detection device and a detection method for a motion mechanism provided by an embodiment of the present invention. Specific examples are used herein to elaborate on the principle and implementation manner of the present invention. The description of the above embodiments is only used to help understand the method and its core idea of the present invention; at the same time, for those skilled in the art, according to the idea of the present invention, there will be changes in the specific implementation manner and application scope. In summary, the content of this specification should not be construed as a limitation to the present invention.

Claims

1. A detection device for a motion mechanism, characterized in that, The motion mechanism includes at least one moving end, and the detection device includes: A test fixture, including a substrate and a test piece located on the substrate, and the test piece includes a test surface inclined with respect to the substrate; A distance detection component, arranged at at least one of the moving ends of the motion mechanism, for detecting the distance parameter between the moving end and the test surface; Wherein, the signal emitted by the distance detection component is not perpendicular to the test surface, and the test surface at least includes a first inclined plane and a second inclined plane connected to the first inclined plane, and the extending direction of the first inclined plane is different from that of the second inclined plane; The test surface further includes a third inclined plane at one end of the second inclined plane away from the first inclined plane, a fourth inclined plane at one end of the third inclined plane away from the second inclined plane, a fifth inclined plane at one end of the fourth inclined plane away from the third inclined plane, a sixth inclined plane at one end of the fifth inclined plane away from the fourth inclined plane, a seventh inclined plane at one end of the sixth inclined plane away from the fifth inclined plane, and an eighth inclined plane at one end of the seventh inclined plane away from the sixth inclined plane; The acute angle between the first inclined plane, the second inclined plane, the third inclined plane, the fourth inclined plane, the fifth inclined plane, the sixth inclined plane, the seventh inclined plane, and the eighth inclined plane and the substrate are all equal, the eighth inclined plane is connected to the first inclined plane, the extending direction of the first inclined plane is parallel to that of the fifth inclined plane, and the extending direction of the third inclined plane is parallel to that of the seventh inclined plane.

2. The detection device according to claim 1, wherein The detection device further includes a control component, and the control component is respectively connected to the motion mechanism and the distance detection component; Wherein, the control component is used to control the moving end to move along the trajectory of the test surface above the test surface, and determine the moving positioning accuracy of the motion mechanism according to the distance parameter.

3. The detection device according to claim 2, wherein The detection device further includes a processor, and the processor is electrically connected to the distance detection component and the control component to read and analyze the corresponding distance parameter between the distance detection component and the test fixture.

4. The detection device according to claim 1, wherein The extending direction of the second inclined plane is parallel to that of the sixth inclined plane, and the extending direction of the fourth inclined plane is parallel to that of the eighth inclined plane.

5. The detection device according to claim 1, wherein The acute angle between the test surface and the substrate is 20° to 40°.

6. A detection method for a detection device of a motion mechanism, characterized in that, Provided is the detection device according to any one of claims 1 to 5, and the detection method of the detection device includes the following steps: Controlling the corresponding moving end of the motion mechanism to move along the trajectory of the test surface above the test surface; Obtaining the distance parameter between the moving end and the test surface through the distance detection component; Determining the moving positioning accuracy of the motion mechanism according to the distance parameter.

7. The detection method of the detection device according to claim 6, characterized in that, The controlling the corresponding moving end of the motion mechanism to move along the trajectory of the test surface above the test surface includes: Controlling the corresponding moving end of the motion mechanism to move along the trajectory of the test surface above the test surface with a first preset parameter, where the first preset parameter includes a preset distance, a preset speed, and a preset moving distance; The step of obtaining the distance parameter between the moving end and the test surface through the distance detection component includes: Obtaining the distance parameter and the moving time parameter between the moving end and the test surface through the distance detection component; The step of determining the moving positioning accuracy of the motion mechanism according to the distance parameter includes: Determining the moving positioning accuracy of the motion mechanism according to the distance parameter and the preset distance, and determining the speed following accuracy of the motion mechanism according to the preset moving distance and the moving time parameter.

8. The detection method of the detection device according to claim 6, characterized in that, The step of controlling the corresponding moving end of the motion mechanism to move along the trajectory of the test surface above the test surface includes: Controlling the corresponding moving end of the motion mechanism to move along the trajectory of the test surface above the test surface with a first preset parameter, where the first preset parameter includes moving at least one circle clockwise and at least one circle counterclockwise.

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