A high stability insulating bracket for magnetron sputtering coating equipment

Abstract

The present invention relates to the technical field of brackets, and discloses a high-stability insulating bracket for magnetron sputtering coating equipment, which solves the problem that the current magnetron sputtering coating equipment is prone to cause the bracket to vibrate when adjusting its height. The insulating bracket comprises a support plate, an insulating bracket body is arranged above the support plate, a bracket buffer mechanism is connected between the support plate and the insulating bracket body, and a right top rod is rotatably connected to the bottom of the support plate near the left side. The present invention buffers the force through the elastic action of a fourth spring, thereby buffering the insulating bracket body, and through the cooperation between the insulating bracket body, the upper connecting shaft and the upper limit rod, the bottom end of the upper limit rod drives the upper movable block to move along the upper cross column, thereby causing the fifth spring to expand and contract, and at the same time, the force is buffered through the elastic action of the fifth spring, thereby buffering the insulating bracket body, thereby reducing the vibration of the insulating bracket body in the vertical direction.

Description

Technical Field

[0001] The invention belongs to the technical field of brackets, and in particular relates to a high-stability insulating bracket for magnetron sputtering coating equipment. Background Art

[0002] Among the existing coating technologies, magnetron sputtering coating equipment is a very widely used vacuum coating equipment, which is widely used in the fields of plating arts and crafts, decorations, toys, etc. The coating technology is mainly used to plate metal films and imitation gold films on the surfaces of pre-treated plastics, ceramics and other products, so as to obtain bright, beautiful and inexpensive plastic and ceramic surface metallized products.

[0003] Most of the existing magnetron sputtering coating equipment is supported by a bracket, and the height of the magnetron sputtering coating equipment is often adjusted during use. At the same time, when the magnetron sputtering coating equipment is raised or lowered, the bracket often vibrates, which affects the life of the bracket during long-term use and is not conducive to the continuous operation of the magnetron sputtering coating equipment. Summary of the invention

[0004] In view of the above situation, in order to overcome the defects of the prior art, the present invention provides a high-stability insulating bracket for magnetron sputtering coating equipment, which effectively solves the problem that the bracket is prone to vibration when the height of the current magnetron sputtering coating equipment is adjusted.

[0005] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: a high-stability insulating bracket for magnetron sputtering coating equipment, comprising a support plate, an insulating bracket body is arranged above the support plate, a bracket buffer mechanism is connected between the support plate and the insulating bracket body, a right top rod is rotatably connected to the bottom of the support plate near the left side, a right bottom rod is movably sleeved on the outer side of the right top rod, a left top rod is rotatably connected to the bottom of the support plate near the right side, a left bottom rod is movably sleeved on the outer side of the left top rod, the bottom ends of the left bottom rod and the right bottom rod are rotatably connected to support blocks, a guide groove is provided in the middle of the right top rod, the guide groove is movably engaged with the left top rod, a smooth transmission mechanism is provided below the support plate, a placement groove is provided in the middle of the top of the support plate, and a limiting groove is provided inside the placement groove.

[0006] Preferably, the smooth transmission mechanism includes a cross bar fixedly connected to the support block, there are two cross bars, a support bar is fixedly connected between the two cross bars, a rotating unit is movably connected inside the support bar, two sliding bars are movably connected between the two cross bars, the tops of the two sliding bars are rotatably connected to movable plates, the tops of the two movable plates are rotatably connected to the bottom of the support plate, a connecting rod is fixedly connected between the two support blocks on both sides, and slots are provided at equal angles on the sides of the two connecting rods that are away from each other.

[0007] Preferably, the rotating unit includes a transmission shaft movably connected to the support rod, external threads are provided on both sides of the transmission shaft, the two external threads are arranged in opposite ways, the transmission shaft is threadedly connected with a threaded sleeve through the external thread, the two threaded sleeves are located between the two sliding rods, both ends of the transmission shaft are movably connected with rotating rods, the two rotating rods are fixedly connected with rotating disks on the sides away from each other, the two rotating disks are located on both sides of the two connecting rods, and the rotating rods are movably connected to the connecting rods.

[0008] Preferably, grooves are provided at both ends of the transmission shaft, the grooves are movably engaged with the rotating rod, a first spring is fixedly connected inside the groove, one end of the first spring is fixedly connected to the rotating rod, sliding grooves are provided on both sides of the inner cavity of the groove, a slider is movably engaged inside the sliding groove, the slider is fixedly connected to the rotating rod, and blocks are fixedly connected on both sides of the rotating rod, and the blocks are adapted to the grooves.

[0009] Preferably, two side grooves are provided on the sides where the two cross bars are close to each other, a fixing rod is fixedly connected inside the side groove, the threaded sleeve and the sliding rod are movably connected to the fixing rod, and the threaded sleeve and the sliding rod are movably engaged with the side groove, and a second spring is fixedly connected to the sides where the two threaded sleeves are away from each other, the second spring is movably engaged with the fixing rod, rollers are fixedly installed on both sides of the bottom of the two sliding rods, the rollers are located inside the side grooves, and the bottom of the rollers fits with the bottom of the inner cavity of the side grooves.

[0010] Preferably, the bracket buffer mechanism includes two side blocks fixedly connected to the support plate, the interior of the two side blocks is provided with mounting blocks fixedly installed equidistantly on the outside of the movable block, one side of the mounting block is rotatably connected to a short rod, the outside of the short rod is movably sleeved with a sleeve rod, one end of the sleeve rod is rotatably connected to the inner wall of the side block, one side of the movable block is rotatably connected to a second connecting block, one side of the second connecting block is rotatably connected to a movable rod, both sides of the support plate are rotatably connected to the first connecting blocks, and the top of the movable rod is rotatably connected to the first connecting block.

[0011] Preferably, a fourth spring is fixedly connected inside the sleeve rod, one end of the fourth spring is fixedly connected to the short rod, and the number of the short rod, the fourth spring and the sleeve rod are six each, and are symmetrically distributed inside the two side blocks.

[0012] Preferably, the bottom of the support plate is fixedly connected with a sleeve, the inside of the sleeve is movably sleeved with a column, the bottom of the sleeve is fixedly connected with a third spring, the third spring is movably sleeved with the column, the bottom end of the column is fixedly connected with a disc, the bottom of the disc is fixedly installed with a universal wheel, the outer side of the disc is fixedly sleeved with an annular plate, the disc and the universal wheel are both located inside the placement groove, the bottom of the universal wheel fits with the bottom of the inner cavity of the placement groove, the annular plate is movably clamped with the limiting groove, and the outer diameter value of the annular plate is smaller than the inner diameter value of the limiting groove, and the outer diameter value of the disc is smaller than the inner diameter value of the placement groove.

[0013] Preferably, side plates are fixedly installed on both sides of the support plate, an upper cross column is fixedly installed on the top of the side plate, and two upper movable blocks are movably sleeved on the outer sides of the upper cross column, and the sides of the two upper movable blocks away from each other are fixedly connected with a fifth spring, the fifth spring is movably sleeved on the upper cross column, the top of the upper movable block is rotatably connected to an upper limit rod, the top of the upper limit rod is rotatably connected to an upper connecting shaft, the upper connecting shaft is fixedly connected to the insulating bracket body, the bottom of the side plate is fixedly connected to a lower cross column, and two lower movable blocks are movably sleeved on the outer sides of the lower cross column, the tops of the two lower movable blocks are both fitted with the side plates, the bottom ends of the two lower movable blocks are rotatably connected to the lower limit rods, and the bottom ends of the two lower limit rods are rotatably connected to the lower connecting shaft, the lower connecting shaft located on the left side is fixedly connected to the support block located on the left side, and the lower connecting shaft located on the right side is fixedly connected to the support block located on the right side.

[0014] Compared with the prior art, the present invention has the following beneficial effects:

[0015] (1) According to the present invention, when the magnetron sputtering coating device is raised or lowered and the insulating support body is subjected to vertical vibration, the sleeve moves up and down, and the third spring is extended and retracted due to the cooperation between the sleeve and the column. The force is buffered by the elasticity of the third spring, thereby reducing the vibration of the insulating support body. The insulating support body moves up and down, driving the first connecting block to move up and down, driving the movable rod to move, and then driving the second connecting block to move, and through the cooperation between the insulating support body and the first connecting block and the movable rod and the second connecting block. The cooperation between the connecting block and the movable block drives the movable block to move inside the side block, and at the same time, when the movable block moves, the short rod is driven to move, and then the fourth spring is driven to expand and contract inside the sleeve rod, and then the force is buffered by the elastic action of the fourth spring, thereby buffering the insulating support body, and through the cooperation between the insulating support body, the upper connecting shaft and the upper limit rod, the bottom end of the upper limit rod drives the upper movable block to move along the upper cross column, and then the fifth spring is expanded and contracted, and at the same time, the force is buffered by the elastic action of the fifth spring, thereby buffering the insulating support body, thereby reducing the vibration of the insulating support body in the vertical direction;

[0016] (2) The present invention achieves a configuration in which the insulating support body, the first connecting block, the movable rod and the second connecting block cooperate with each other. When the magnetron sputtering coating device is raised or lowered, causing the insulating support body to be subjected to horizontal vibration, the insulating support body moves left and right, driving the first connecting block to move left and right, driving the movable rods on both sides to move, and driving the second connecting block to move. Through the coordination between the second connecting block and the movable block, the movable block is driven to move inside the side block. Through the coordination between the movable block and the mounting block, the short rod, the fourth spring and the sleeve rod, the movement of the short rod is driven by the mounting block, and the expansion and contraction of the fourth spring is driven. The force is then buffered by the elastic action of the fourth spring, and the insulating support body is then buffered. Through the coordination between the insulating support body, the upper connecting shaft and the upper limit rod, the bottom end of the upper limit rod drives the upper movable block to move along the upper horizontal column, causing the fifth spring to expand and contract, and the force is buffered by the elastic action of the fifth spring, thereby buffering the insulating support body, thereby reducing the vibration of the insulating support body in the horizontal direction.

[0017] (3) The invention uses the cooperation between the groove and the rotating rod and between the slider and the slide groove. When the two rotating disks are pulled toward the outside of the transmission shaft, the two rotating rods are driven to move toward the outside of the transmission shaft, and the slider is driven to slide inside the slide groove. At the same time, the first spring is stretched, and through the cooperation between the block, the rotating rod and the connecting rod, the rotating rod drives the movement of the block until the block is separated from the slot. Then the rotating disks on both sides can be rotated at the same time, which drives the rotation of the rotating rod and the transmission shaft. At the same time, through the cooperation between the external thread and the threaded sleeve, the two threaded sleeves can be driven to move. At this time, the two threaded sleeves move away from each other, and through the cooperation between the fixed rod, the slide rod and the second spring, the two slide rods are driven to move and move away from each other. At this time, the second spring is compressed, and at the same time, through the slide rod, the movable plate and the insulating support The cooperation between the frame bodies then drives the bottom ends of the movable plates on both sides away from each other, at this time driving the support plate to move downward, and then driving the insulating support body to move downward. When the control of the rotating disks on both sides is released, the first spring resets and drives the rotating rod to move toward the inner direction of the groove until the blocks on both sides are stuck in the corresponding card slots. At this time, the rotating rod and the connecting rod are fixed, that is, the position of the insulating support body is fixed, and when the rotating disks on both sides are pulled and rotated in the opposite direction, the two support rods are driven to move and approach each other. At the same time, the second springs on both sides are reset and drive the movement of the sliding rod, and then the sliding rods on both sides are approached to each other, at this time driving the bottom ends of the movable plates on both sides close to each other, and at the same time driving the support plate to move upward, and at this time driving the insulating support body to move upward, so that the position height of the insulating support body can be adjusted. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] The accompanying drawings are used to provide further understanding of the present invention and constitute a part of the specification. They are used to explain the present invention together with the embodiments of the present invention and do not constitute a limitation of the present invention.

[0019] In the attached picture:

[0020] Figure 1 It is a schematic diagram of the structure of the present invention;

[0021] Figure 2 This is a schematic diagram of the connection structure between the support plate and the support block of the present invention;

[0022] Figure 3 It is a schematic diagram of the structure of the stable transmission mechanism of the present invention;

[0023] Figure 4 It is a schematic diagram of the structure of the rotating unit of the present invention;

[0024] Figure 5 This is a schematic diagram of the connection structure between the cross bar and the slide bar of the present invention;

[0025] Figure 6 This is a schematic diagram of the structure of the buffer mechanism of the bracket of the present invention;

[0026] Figure 7 It is a schematic diagram of the side block structure of the present invention;

[0027] Figure 8 It is a schematic diagram of the exploded structure of the sleeve rod of the present invention;

[0028] In the figure: 1, support plate; 2, insulating bracket body; 3, left top rod; 4, right top rod; 5, right bottom rod; 6, stable transmission mechanism; 601, cross bar; 602, rotating unit; 6021, transmission shaft; 6022, external thread; 6023, slide groove; 6024, rotating rod; 6025, rotating disk; 6026, block; 6027, slider; 6028, first spring; 6029, groove; 603, support rod; 604, threaded sleeve; 605, movable plate; 606, slide rod; 607, connecting rod; 608, slot; 609, side groove; 6010, fixed rod; 6011, second spring; 6012, roller; 7, support block; 8, left bottom rod; 9. Bracket buffer mechanism; 901. Side block; 902. Third spring; 903. Annular plate; 904. Universal wheel; 905. Disc; 906. Column; 907. Movable rod; 908. First connecting block; 909. Sleeve; 9010. Short rod; 9011. Fourth spring; 9012. Second connecting block; 9013. Mounting block; 9014. Sleeve rod; 9015. Movable block; 10. Placement slot; 11. Limiting slot; 12. Guide slot; 13. Side plate; 14. Upper movable block; 15. Upper connecting shaft; 16. Upper limiting rod; 17. Lower cross column; 18. Fifth spring; 19. Lower movable block; 20. Lower connecting shaft; 21. Lower limiting rod; 22. Upper cross column. DETAILED DESCRIPTION

[0029] The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments; based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention.

[0030] Embodiment 1, by Figure 1-Figure 8 The present invention includes a support plate 1, an insulating bracket body 2 is provided above the support plate 1, a bracket buffer mechanism 9 is connected between the support plate 1 and the insulating bracket body 2, a right top rod 4 is rotatably connected to the bottom of the support plate 1 near the left side, a right bottom rod 5 is movably sleeved on the outer side of the right top rod 4, a left top rod 3 is rotatably connected to the bottom of the support plate 1 near the right side, a left bottom rod 8 is movably sleeved on the outer side of the left top rod 3, the bottom ends of the left bottom rod 8 and the right bottom rod 5 are rotatably connected to a support block 7, a guide groove 12 is provided in the middle of the right top rod 4, the guide groove 12 is movably engaged with the left top rod 3, a smooth transmission mechanism 6 is provided below the support plate 1, a placement groove 10 is provided in the middle of the top of the support plate 1, and a limiting groove 11 is provided inside the placement groove 10.

[0031] Embodiment 2, on the basis of embodiment 1, the smooth transmission mechanism 6 includes a cross bar 601 fixedly connected to the support block 7, the number of the cross bars 601 is two, a support bar 603 is fixedly connected between the two cross bars 601, the support bar 603 is internally movably connected with a rotating unit 602, two slide bars 606 are movably connected between the two cross bars 601, the tops of the two slide bars 606 are rotatably connected to a movable plate 605, the tops of the two movable plates 605 are rotatably connected to the bottom of the support plate 1, and the two support blocks 7 on both sides are fixedly connected with a connecting rod 607, and the two connecting rods 607 are evenly spaced away from each other. A slot 608 is provided at an angle, and the rotating unit 602 includes a transmission shaft 6021 movably connected to the support rod 603. External threads 6022 are provided on both sides of the transmission shaft 6021. The arrangement of the two external threads 6022 is opposite. The transmission shaft 6021 is threadedly sleeved with a threaded sleeve 604 through the external threads 6022. The two threaded sleeves 604 are located between the two sliding rods 606. Both ends of the transmission shaft 6021 are movably sleeved with rotating rods 6024. The two rotating rods 6024 are fixedly connected with rotating disks 6025 on the sides away from each other. The two rotating disks 6025 are located on both sides of the two connecting rods 607. 24 is movably connected to the connecting rod 607, both ends of the transmission shaft 6021 are provided with grooves 6029, the grooves 6029 are movably engaged with the rotating rod 6024, the interior of the grooves 6029 is fixedly connected with a first spring 6028, one end of the first spring 6028 is fixedly connected with the rotating rod 6024, both sides of the inner cavity of the grooves 6029 are provided with slide grooves 6023, the interior of the slide grooves 6023 is movably engaged with a slider 6027, the slider 6027 is fixedly connected with the rotating rod 6024, both sides of the rotating rod 6024 are fixedly connected with a clamping block 6026, the clamping block 6026 is adapted to the clamping groove 608, and the two cross bars 60 Two side grooves 609 are provided on the sides close to each other, a fixing rod 6010 is fixedly connected inside the side groove 609, the threaded sleeve 604 and the slide rod 606 are movably connected to the fixing rod 6010, and the threaded sleeve 604 and the slide rod 606 are movably engaged with the side groove 609, and the two threaded sleeves 604 are fixedly connected to the sides away from each other with a second spring 6011, the second spring 6011 is movably engaged with the fixing rod 6010, and rollers 6012 are fixedly installed on both sides of the bottom of the two slide rods 606, the rollers 6012 are located inside the side groove 609, and the bottom of the rollers 6012 is in contact with the bottom of the inner cavity of the side groove 609;

[0032] First, pull the two rotating disks 6025 toward the outside of the transmission shaft 6021, and then drive the two rotating rods 6024 to move toward the outside of the transmission shaft 6021, and then drive the slider 6027 to slide inside the slide groove 6023, and at the same time, the first spring 6028 is stretched, and at the same time, the rotating rod 6024 drives the block 6026 to move until the block 6026 is separated from the slot 608, and then rotate the rotating disks 6025 on both sides at the same time, and then drive the rotating rod 6024 to rotate, and at the same time, through the cooperation of the slider 6027 and the slide groove 6023, drive the transmission shaft 6021 to rotate, and at this time, the two threaded sleeves 604 are driven to move through the action of the external thread 6022, and at this time, the two threaded sleeves 604 move away from each other, and at the same time, drive the two sliding rods 606 to move and move away from each other, and at this time, the second spring 6011 is compressed, and at this time, the bottom ends of the movable plates 605 on both sides are driven to move away from each other, and at this time, drive the support The plate 1 moves downward, thereby driving the insulating support body 2 to move downward, and then releasing the control of the rotating disks 6025 on both sides. At this time, the first spring 6028 is reset and drives the rotating rod 6024 to move toward the inside of the groove 6029 until the blocks 6026 on both sides are stuck in the corresponding slots 608. At this time, the rotating rod 6024 is fixed to the connecting rod 607, that is, the position of the insulating support body 2 is fixed. When the rotating disks 6025 on both sides are pulled and rotated in the opposite direction, the two support rods 603 are driven to move and approach each other. At the same time, the second springs 6011 on both sides are reset and drive the sliding rod 606 to move, and then the sliding rods 606 on both sides are approached to each other. At this time, the bottom ends of the movable plates 605 on both sides are driven to approach each other, and at the same time, the support plate 1 is driven to move upward, and the insulating support body 2 is driven to move upward. Finally, the position height of the insulating support body 2 can be adjusted.

[0033] Embodiment 3, on the basis of embodiment 1, the support buffer mechanism 9 includes two side blocks 901 fixedly connected to the support plate 1, the inside of the two side blocks 901 are provided with a movable block 9015, and the outer side of the movable block 9015 is equidistantly fixedly installed with a mounting block 9013, one side of the mounting block 9013 is rotatably connected to a short rod 9010, the outer side of the short rod 9010 is movably sleeved with a sleeve rod 9014, one end of the sleeve rod 9014 is rotatably connected to the inner wall of the side block 901, and one side of the movable block 9015 is rotatably connected to a second connecting block 9012, one side of the second connecting block 9012 is rotatably connected to the movable rod 907, both sides of the support plate 1 are rotatably connected to the first connecting block 908, the top of the movable rod 907 is rotatably connected to the first connecting block 908, the inside of the sleeve rod 9014 is fixedly connected to the fourth spring 9011, one end of the fourth spring 9011 is fixedly connected to the short rod 9010, the number of the short rod 9010, the fourth spring 9011 and the sleeve rod 9014 are all six, and are symmetrically distributed inside the two side blocks 901;

[0034] When the insulating support body 2 is subjected to horizontal vibration, the insulating support body 2 moves left and right, and at the same time drives the first connecting block 908 to move left and right, and drives the movement of the movable rods 907 on both sides, and drives the movement of the second connecting block 9012, and then drives the movable block 9015 to move inside the side block 901, and drives the movement of the short rod 9010 through the mounting block 9013, and drives the expansion and contraction of the fourth spring 9011, and then buffers the force through the elastic action of the fourth spring 9011, thereby reducing the vibration of the insulating support body 2 in the horizontal direction.

[0035] Embodiment 4, on the basis of embodiment 1, a sleeve 909 is fixedly connected to the bottom of the support plate 1, a column 906 is movably sleeved inside the sleeve 909, a third spring 902 is fixedly connected to the bottom of the sleeve 909, the third spring 902 is movably sleeved with the column 906, a disc 905 is fixedly connected to the bottom of the column 906, a universal wheel 904 is fixedly installed at the bottom of the disc 905, an annular plate 903 is fixedly sleeved on the outer side of the disc 905, the disc 905 and the universal wheel 904 are both located inside the placement groove 10, the bottom of the universal wheel 904 is fitted with the bottom of the inner cavity of the placement groove 10, the annular plate 903 is movably clamped with the limiting groove 11, and the outer diameter value of the annular plate 903 is smaller than the inner diameter value of the limiting groove 11, and the outer diameter value of the disc 905 is smaller than the inner diameter value of the placement groove 10;

[0036] During use, when the insulating support body 2 is subjected to vertical vibration, the sleeve 909 moves up and down. At the same time, due to the cooperation between the sleeve 909 and the column 906, the third spring 902 is expanded and contracted. At the same time, due to the elastic effect of the third spring 902, the force is buffered, thereby reducing the vibration of the insulating support body 2. At the same time, the up and down movement of the insulating support body 2 drives the first connecting block 908 to move up and down, and drives the movement of the movable rod 907, and then drives the second connecting block 9012 to move, and then drives the movable block 9015 to move inside the side block 901. At the same time, when the movable block 9015 moves, it drives the short rod 9010 to move, and then drives the fourth spring 9011 to expand and contract inside the sleeve rod 9014, and then the elastic effect of the fourth spring 9011 is used to buffer the force, thereby buffering the insulating support body 2, thereby reducing the vertical vibration of the insulating support body 2.

[0037] Embodiment 5, on the basis of embodiment 1, both sides of the support plate 1 are fixedly installed with side plates 13, the top of the side plate 13 is fixedly installed with an upper cross column 22, the outer side of the upper cross column 22 is movably sleeved with two upper movable blocks 14, the two upper movable blocks 14 are fixedly connected to the side away from each other with a fifth spring 18, the fifth spring 18 is movably sleeved with the upper cross column 22, the top of the upper movable block 14 is rotatably connected with an upper limit rod 16, the top of the upper limit rod 16 is rotatably connected with an upper connecting shaft 15, and the upper connecting shaft 15 is connected to the insulating The bracket body 2 is fixedly connected, the bottom of the side plate 13 is fixedly connected with a lower cross column 17, and the outer side of the lower cross column 17 is movably sleeved with two lower movable blocks 19, the tops of the two lower movable blocks 19 are both fitted with the side plate 13, the bottom ends of the two lower movable blocks 19 are rotatably connected with lower limit rods 21, and the bottom ends of the two lower limit rods 21 are rotatably connected with lower connecting shafts 20, the lower connecting shaft 20 on the left side is fixedly connected to the support block 7 on the left side, and the lower connecting shaft 20 on the right side is fixedly connected to the support block 7 on the right side;

[0038] When the magnetron sputtering coating equipment is raised or lowered, causing the insulating support body to be vibrated in the horizontal or vertical direction, the insulating support body 2 moves up and down or left and right, and at the same time drives the upper connecting shaft 15 to move up and down or left and right, and at the same time drives the movement of the upper limit rod 16. At this time, the bottom end of the upper limit rod 16 drives the upper movable block 14 to move along the upper cross column 22, thereby causing the fifth springs 18 on both sides to expand and contract. At the same time, through the elastic effect of the fifth spring 18, the force is buffered, thereby buffering the insulating support body 2, thereby reducing the vibration of the insulating support body 2.

[0039] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0040] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A high-stability insulating support for a magnetron sputtering coating device, comprising a support plate (1), characterized in that: An insulating support body (2) is provided above the support plate (1), a support buffer mechanism (9) is connected between the support plate (1) and the insulating support body (2), a right top rod (4) is rotatably connected to the bottom of the support plate (1) near the left side, a right bottom rod (5) is movably sleeved on the outer side of the right top rod (4), a left top rod (3) is rotatably connected to the bottom of the support plate (1) near the right side, a left bottom rod (8) is movably sleeved on the outer side of the left top rod (3), the bottom ends of the left bottom rod (8) and the right bottom rod (5) are both rotatably connected to a support block (7), a guide groove (12) is provided in the middle of the right top rod (4), the guide groove (12) is movably engaged with the left top rod (3), a stable transmission mechanism (6) is provided below the support plate (1), a placement groove (10) is provided in the middle of the top of the support plate (1), and a limiting groove (11) is provided inside the placement groove (10); The smooth transmission mechanism (6) comprises a cross bar (601) fixedly connected to the support block (7), the number of the cross bars (601) is two, a support bar (603) is fixedly connected between the two cross bars (601), a rotation unit (602) is movably connected inside the support bar (603), two sliding bars (606) are movably connected between the two cross bars (601), the tops of the two sliding bars (606) are rotatably connected to movable plates (605), the tops of the two movable plates (605) are rotatably connected to the bottom of the support plate (1), and connecting rods (607) are fixedly connected between the two support blocks (7) on both sides, and slots (608) are provided at equal angles on the sides of the two connecting rods (607) that are away from each other. The rotating unit (602) comprises a transmission shaft (6021) movably connected to the support rod (603), external threads (6022) are provided on both sides of the transmission shaft (6021), the two external threads (6022) are arranged in opposite ways, the transmission shaft (6021) is threadedly sleeved with a threaded sleeve (604) via the external threads (6022), the two threaded sleeves (604) are located between the two sliding rods (606), both ends of the transmission shaft (6021) are movably sleeved with rotating rods (6024), the two rotating rods (6024) are fixedly connected with rotating disks (6025) on the sides away from each other, the two rotating disks (6025) are located on both sides of the two connecting rods (607), and the rotating rods (6024) are movably connected to the connecting rods (607); Both ends of the transmission shaft (6021) are provided with grooves (6029), the grooves (6029) are movably connected to the rotating rod (6024), a first spring (6028) is fixedly connected inside the groove (6029), one end of the first spring (6028) is fixedly connected to the rotating rod (6024), both sides of the inner cavity of the groove (6029) are provided with slide grooves (6023), a slider (6027) is movably connected inside the slide groove (6023), the slider (6027) is fixedly connected to the rotating rod (6024), and both sides of the rotating rod (6024) are fixedly connected with clamping blocks (6026), and the clamping blocks (6026) are adapted to the clamping grooves (608); Two side grooves (609) are provided on the sides of the two cross bars (601) close to each other, a fixed rod (6010) is fixedly connected inside the side groove (609), the threaded sleeve (604) and the sliding rod (606) are movably connected to the fixed rod (6010), and the threaded sleeve (604) and the sliding rod (606) are movably engaged with the side groove (609), and the two threaded sleeves (604) are fixedly connected to the sides of the two threaded sleeves (604) away from each other, and the second spring (6011) is movably engaged with the fixed rod (6010), and rollers (6012) are fixedly installed on both sides of the bottom of the two sliding rods (606), and the rollers (6012) are located inside the side groove (609), and the bottom of the rollers (6012) fits with the bottom of the inner cavity of the side groove (609); The support buffer mechanism (9) comprises two side blocks (901) fixedly connected to the support plate (1); movable blocks (9015) are provided inside the two side blocks (901), and mounting blocks (9013) are fixedly installed on the outside of the movable blocks (9015) at equal distances; a short rod (9010) is rotatably connected to one side of the mounting block (9013); a sleeve rod (9014) is movably sleeved on the outside of the short rod (9010); one end of the sleeve rod (9014) is rotatably connected to the inner wall of the side block (901); a second connecting block (9012) is rotatably connected to one side of the movable block (9015); a movable rod (907) is rotatably connected to one side of the second connecting block (9012); both sides of the support plate (1) are rotatably connected to the first connecting block (908); and the top end of the movable rod (907) is rotatably connected to the first connecting block (908); A fourth spring (9011) is fixedly connected inside the sleeve rod (9014), one end of the fourth spring (9011) is fixedly connected to the short rod (9010), and the number of the short rod (9010), the fourth spring (9011) and the sleeve rod (9014) are all six, and are symmetrically distributed inside the two side blocks (901); The bottom of the support plate (1) is fixedly connected to a sleeve (909), the interior of the sleeve (909) is movably sleeved with a column (906), the bottom of the sleeve (909) is fixedly connected to a third spring (902), the third spring (902) is movably sleeved with the column (906), the bottom end of the column (906) is fixedly connected to a disk (905), the bottom of the disk (905) is fixedly mounted with a universal wheel (904), and the disk (905) is ), the disc (905) and the universal wheel (904) are both located inside the placement groove (10), the bottom of the universal wheel (904) fits with the bottom of the inner cavity of the placement groove (10), the annular plate (903) is movably engaged with the limiting groove (11), and the outer diameter of the annular plate (903) is smaller than the inner diameter of the limiting groove (11), and the outer diameter of the disc (905) is smaller than the inner diameter of the placement groove (10).

2. The high-stability insulating bracket for magnetron sputtering coating equipment according to claim 1, characterized in that: The support plate (1) is fixedly mounted with side plates (13) on both sides, an upper cross column (22) is fixedly mounted on the top of the side plate (13), two upper movable blocks (14) are movably sleeved on the outer sides of the upper cross column (22), a fifth spring (18) is fixedly connected to the sides of the two upper movable blocks (14) away from each other, the fifth spring (18) is movably sleeved with the upper cross column (22), the top of the upper movable block (14) is rotatably connected to an upper limit rod (16), the top of the upper limit rod (16) is rotatably connected to an upper connecting shaft (15), and the upper connecting shaft (15) is connected to the insulating support body (2 ), the bottom of the side plate (13) is fixedly connected with a lower cross column (17), the outer side of the lower cross column (17) is movably sleeved with two lower movable blocks (19), the tops of the two lower movable blocks (19) are both in contact with the side plate (13), the bottom ends of the two lower movable blocks (19) are rotatably connected with lower limit rods (21), the bottom ends of the two lower limit rods (21) are rotatably connected with lower connecting shafts (20), the lower connecting shaft (20) located on the left side is fixedly connected with the support block (7) located on the left side, and the lower connecting shaft (20) located on the right side is fixedly connected with the support block (7) located on the right side.

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