Temperature control method and semiconductor apparatus

Abstract

The application discloses a temperature control method and a semiconductor device. The temperature control area of the semiconductor device is divided into multiple temperature control sections. The application can distinguish whether the abnormal situation of the temperature detection value belongs to the jump type abnormality according to the abnormal duration period of the temperature detection value of the temperature control section. When the abnormal duration period of the temperature detection value is less than a preset period, it is considered that the abnormal situation of the temperature detection value belongs to the jump type abnormality. When the abnormal duration period of the temperature detection value is not less than the preset period, it is considered that the abnormal situation of the temperature detection value does not belong to the jump type abnormality and belongs to the obvious abnormal situation. The application does not process the obvious abnormal situation of the temperature detection value and only processes the jump abnormality situation of the temperature detection value, that is, filters out the jump abnormal points. On the one hand, the problem of the jump of the temperature detection value in the process is solved, and the influence of the temperature abnormal fluctuation on the process result is avoided. On the other hand, the judgment of the obvious abnormal situation of the temperature detection value is not affected.

Description

Technical Field

[0001] This application relates to the field of semiconductor processes, and more particularly to a temperature control method and semiconductor equipment. Background Technology

[0002] In semiconductor equipment (such as vertical semiconductor furnaces), the uniformity and stability of furnace temperature directly determine the process quality. Currently, the furnace temperature control scheme for semiconductor equipment is as follows: in each temperature control cycle, the furnace temperature is detected by a temperature sensor, and the heating power of the furnace is controlled based on the detected furnace temperature to stabilize the furnace temperature at a preset target temperature value.

[0003] Specifically, in the furnace temperature control process of semiconductor equipment, the furnace temperature value sampled by the temperature sensor is read once in each temperature control cycle. However, sometimes the furnace temperature sampling value may jump, that is, the furnace temperature sampling value suddenly becomes abnormal. This abnormal value only appears in one or a few temperature control cycles, and the furnace temperature sampling value automatically returns to normal in subsequent temperature control cycles. The cause of the abnormality is unknown. However, this abnormal value will participate in the furnace temperature control, causing abnormal fluctuations in the furnace temperature and affecting the process results. Summary of the Invention

[0004] The purpose of this application is to provide a temperature control method and semiconductor device that does not handle obvious abnormalities in temperature detection values, but only handles abnormal fluctuations in temperature detection values. This is to solve the problem of temperature detection value fluctuations during the process, thereby avoiding the impact of abnormal temperature fluctuations on the process results; and to ensure that the judgment of obvious abnormalities in temperature detection values ​​is not affected.

[0005] To address the aforementioned technical problems, this application provides a temperature control method applied to a semiconductor device. The temperature control area of ​​the semiconductor device is divided into multiple temperature control segments, each of which is correspondingly equipped with a first temperature sensor and a power controller. The temperature control method includes:

[0006] Based on the first target temperature sensor corresponding to the target temperature control zone, the temperature detection value of the target temperature control zone under the current temperature control cycle is determined; wherein, the target temperature control zone is any of the temperature control zones;

[0007] When the first target temperature sensor is in normal detection state and the target temperature control zone meets the preset jump anomaly handling conditions, the temperature detection value under the current temperature control cycle is determined to be abnormal according to the preset anomaly judgment strategy.

[0008] If so, when the abnormal duration period of the temperature detection value is less than the preset number of periods, the temperature control power value corresponding to the temperature detection value in the previous temperature control period is calculated based on the first temperature control mode corresponding to the first target temperature sensor; when the abnormal duration period is not less than the preset number of periods, the temperature control power value corresponding to the temperature detection value in the current temperature control period is calculated based on the first temperature control mode.

[0009] If not, then based on the first temperature control mode, calculate the temperature control power value corresponding to the temperature detection value under the current temperature control cycle;

[0010] The calculated temperature control power value is sent to the target power controller corresponding to the target temperature control section, so that the target power controller can control the temperature of the target temperature control section based on the temperature control power value.

[0011] Optionally, determining the temperature detection value of the target temperature control zone in the current temperature control cycle based on the first target temperature sensor corresponding to the target temperature control zone includes:

[0012] Within each temperature control cycle, the temperature sampling value of the first target temperature sensor is read every preset first time interval to read a preset number of temperature sampling values;

[0013] Calculate the average value of a preset number of temperature sampling values ​​within the current temperature control cycle, and use the average value as the temperature detection value of the target temperature control segment under the current temperature control cycle.

[0014] Optionally, before the first target temperature sensor is in normal detection mode, the temperature control method further includes:

[0015] Read the decoupling alarm information corresponding to the first target temperature sensor;

[0016] Based on the decoupling alarm information, determine whether the first target temperature sensor is decoupled;

[0017] If the first target temperature sensor does not have a disconnection issue, then the first target temperature sensor is determined to be in a normal detection state.

[0018] Optionally, determining whether the temperature detection value under the current temperature control cycle is abnormal according to a preset anomaly determination strategy includes:

[0019] Obtain the temperature detection value x of the target temperature control zone in the nth temperature control cycle. n And calculate the average value of the temperature detection values ​​of the target temperature control zone over the first m temperature control cycles. and standard deviation σ; wherein, the first m temperature control cycles are from the (n-m+1)th temperature control cycle to the nth temperature control cycle, and m is a preset cycle threshold;

[0020] According to the temperature detection value x n The average value And the critical value for calculating the standard deviation σ;

[0021] Find the reference critical value corresponding to the nth temperature control cycle under the pre-selected confidence interval from the preset Globus critical value table, and determine whether the critical value is greater than the reference critical value and whether the standard deviation is greater than the preset standard deviation threshold; wherein, the preset Globus critical value table represents the correspondence between the number of temperature control cycles and the reference critical value under different confidence intervals;

[0022] If the critical value is greater than the reference critical value and the standard deviation is greater than the preset standard deviation threshold, then it is determined that the temperature detection value under the nth temperature control cycle is abnormal.

[0023] If the critical value is not greater than the reference critical value, and / or the standard deviation is not greater than the preset standard deviation threshold, then it is determined that the temperature detection value under the nth temperature control cycle is not abnormal.

[0024] Optionally, the temperature control method further includes:

[0025] When the duration of the anomaly is less than the preset number of periods, an anomaly is recorded.

[0026] An alarm is triggered when the duration of the anomaly is not less than the preset number of periods.

[0027] Optionally, before the target temperature control zone meets the preset abnormal change handling conditions, the temperature control method further includes:

[0028] Determine whether the current temperature control cycle of the target temperature control zone belongs to the first m temperature control cycles before the target temperature control zone started temperature control, and whether the target temperature control zone has any abnormal alarms within a preset second time period; where m is a preset cycle threshold.

[0029] If the current temperature control cycle does not belong to the first m temperature control cycles after the start of temperature control, and the target temperature control segment does not have any abnormal alarms within the preset second time period, then the target temperature control segment is determined to meet the preset jump abnormal handling conditions.

[0030] Optionally, the temperature control method further includes:

[0031] When the first target temperature sensor is in normal detection state and the target temperature control section does not meet the preset jump abnormality handling conditions, the temperature control power value corresponding to the temperature detection value in the current temperature control cycle is calculated based on the first temperature control mode, so as to use the calculated temperature control power value as the temperature control power value sent to the target power controller in the current temperature control cycle.

[0032] Optionally, each of the temperature control zones is also provided with a second temperature sensor;

[0033] The temperature control method further includes:

[0034] When the first target temperature sensor is not in normal detection state, the actual temperature value of the target temperature control segment under the current temperature control cycle is determined based on the second target temperature sensor corresponding to the target temperature control segment, and the temperature control power value corresponding to the actual temperature value under the current temperature control cycle is calculated based on the second temperature control mode corresponding to the second target temperature sensor, so as to use the calculated temperature control power value as the temperature control power value sent to the target power controller under the current temperature control cycle.

[0035] Optionally, each of the second temperature sensors includes a main temperature sensor and a backup temperature sensor;

[0036] The step of determining the actual temperature value of the target temperature control zone under the current temperature control cycle based on the second target temperature sensor corresponding to the target temperature control zone includes:

[0037] Determine whether the main temperature sensor in the second target temperature sensor is in a normal detection state;

[0038] If so, then based on the main temperature sensor in the second target temperature sensor, the actual temperature value of the target temperature control zone under the current temperature control cycle is determined;

[0039] If not, the actual temperature value of the target temperature control zone under the current temperature control cycle is determined based on the backup temperature sensor in the second target temperature sensor.

[0040] To address the aforementioned technical problems, this application also provides a semiconductor device, comprising:

[0041] Furnace body; the temperature control area of ​​the furnace body is divided into multiple temperature control zones, and each temperature control zone is equipped with a first temperature sensor and a power controller.

[0042] A temperature controller is used to control the temperature of the temperature control area using any of the above-mentioned temperature control methods.

[0043] This application provides a temperature control method applied to semiconductor equipment. The temperature control area of ​​the semiconductor equipment is divided into multiple temperature control segments, each of which is equipped with a first temperature sensor and a power controller. The temperature control method includes: determining the temperature detection value of the target temperature control segment in the current temperature control cycle based on the first target temperature sensor corresponding to the target temperature control segment; when the first target temperature sensor is in a normal detection state and the target temperature control segment meets the preset jump anomaly handling conditions, determining whether the temperature detection value in the current temperature control cycle is abnormal according to a preset anomaly judgment strategy; if so, then... When the normal duration period is less than the preset number of periods, the temperature control power value corresponding to the temperature detection value in the previous temperature control period is calculated based on the first temperature control mode corresponding to the first target temperature sensor. When the abnormal duration period is not less than the preset number of periods, the temperature control power value corresponding to the temperature detection value in the current temperature control period is calculated based on the first temperature control mode. Otherwise, the temperature control power value corresponding to the temperature detection value in the current temperature control period is calculated based on the first temperature control mode. The calculated temperature control power value is sent to the target power controller corresponding to the target temperature control section, so that the target power controller can perform temperature control on the target temperature control section based on the temperature control power value.

[0044] Therefore, this application can distinguish whether the abnormal temperature detection value belongs to the jump type anomaly based on the abnormal duration period of the temperature detection value in the temperature control zone. That is, when the abnormal duration period of the temperature detection value is less than a preset number of periods, the abnormal temperature detection value is considered to be a jump type anomaly; when the abnormal duration period of the temperature detection value is not less than the preset number of periods, the abnormal temperature detection value is considered not to be a jump type anomaly, but to be a clear anomaly. This application does not process the clear anomaly of the temperature detection value, but only processes the jump anomaly of the temperature detection value, that is, it filters out the jump anomaly points. On the one hand, this is to solve the problem of temperature detection value jumps in the process, thereby avoiding the impact of abnormal temperature fluctuations on the process results; on the other hand, it is to not affect the judgment of the clear anomaly of the temperature detection value.

[0045] This application also provides a semiconductor device that has the same beneficial effects as the temperature control method described above. Attached Figure Description

[0046] To more clearly illustrate the technical solutions in this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0047] Figure 1 A schematic diagram illustrating the configuration of a temperature sensor on a semiconductor device, provided as an embodiment of this application;

[0048] Figure 2 A flowchart illustrating a temperature control method provided in an embodiment of this application;

[0049] Figure 3 This is a flowchart illustrating a temperature control method provided in an embodiment of this application. Detailed Implementation

[0050] The core of this application is to provide a temperature control method and semiconductor device that does not handle obvious abnormalities in temperature detection values, but only handles abnormal fluctuations in temperature detection values. This is to solve the problem of temperature detection value fluctuations during the process, thereby avoiding the impact of abnormal temperature fluctuations on the process results; and to ensure that the judgment of obvious abnormalities in temperature detection values ​​is not affected.

[0051] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0052] Please refer to Figure 1 , Figure 1 This is a schematic diagram illustrating the configuration of a temperature sensor on a semiconductor device, as provided in an embodiment of this application. Figure 1 As shown, the temperature control area (referring to the area covered by the heating wire in the furnace body) of the semiconductor equipment (such as a vertical semiconductor furnace) is divided into 5 temperature control zones, namely Zone 1 to Zone 5 (it can also be divided into other numbers of temperature control zones (including the case where the entire temperature control area has only one temperature control zone), depending on the actual situation); each temperature control zone has an independent power controller for temperature control; the furnace body is equipped with three sets of temperature sensors (other temperature sensors can also be set, depending on the actual situation; thermocouples can be selected as temperature sensors), namely ProfileTC, InnerTC, and OuterTC. The terTC (ProfileTC) consists of five temperature sensors, each corresponding to one of five temperature control zones, used to detect the temperature of the corresponding zone. The ProfileTC is installed inside the inner tube of the semiconductor equipment, as close as possible to the silicon wafer mounting location (the ProfileTC may not be installed). The InnerTC is installed inside the process tube of the semiconductor equipment or between the inner and outer tubes of a double-layer tube, primarily used for temperature control in actual processes. The OuterTC is installed near the furnace heating wire, used to detect the temperature in the furnace heating wire area, and also for backup temperature control in actual processes.

[0053] The existing furnace temperature control scheme for semiconductor equipment involves reading the furnace temperature value sampled by a temperature sensor (InnerTC) once per temperature control cycle, and controlling the furnace heating power based on this value to stabilize the furnace temperature at a preset target value. However, sometimes the furnace temperature sampling value may jump, meaning the furnace temperature sampling value suddenly becomes abnormal. This abnormal value only appears in one or a few temperature control cycles, and the furnace temperature sampling value automatically returns to normal in subsequent temperature control cycles. The cause of the abnormality is unknown, but this abnormal value will participate in the furnace temperature control, causing abnormal fluctuations in the furnace temperature and affecting the process results.

[0054] To address the aforementioned technical problems, this application provides a novel temperature control method. Please refer to... Figure 2 , Figure 2 This is a flowchart illustrating a temperature control method provided in an embodiment of this application. Figure 2 As shown, this temperature control method is applied to semiconductor devices and includes the following steps:

[0055] Step S1: Based on the first target temperature sensor corresponding to the target temperature control zone, determine the temperature detection value of the target temperature control zone under the current temperature control cycle.

[0056] In this embodiment, the temperature control area of ​​the semiconductor device is divided into multiple temperature control segments (or the entire temperature control area may have only one temperature control segment). Each temperature control segment is equipped with a first temperature sensor (such as InnerTC) and a power controller. The target temperature control segment is any temperature control segment, and the first target temperature sensor is the first temperature sensor corresponding to the target temperature control segment. The temperature control period can be set to 2 seconds, or other times.

[0057] Step S2: When the first target temperature sensor is in normal detection state and the target temperature control zone meets the preset jump anomaly handling conditions, determine whether the temperature detection value under the current temperature control cycle is abnormal according to the preset anomaly judgment strategy; if yes, proceed to step S3; if no, proceed to step S4.

[0058] Step S3: When the abnormal duration period of the temperature detection value is less than the preset number of periods, calculate the temperature control power value corresponding to the temperature detection value in the previous temperature control period based on the first temperature control mode corresponding to the first target temperature sensor; when the abnormal duration period is not less than the preset number of periods, calculate the temperature control power value corresponding to the temperature detection value in the current temperature control period based on the first temperature control mode.

[0059] Step S4: Based on the first temperature control mode, calculate the temperature control power value corresponding to the temperature detection value under the current temperature control cycle.

[0060] In this embodiment, each temperature sensor has its own corresponding temperature control mode, such as InnerTC corresponding to the InnerCas temperature control mode and OuterTC corresponding to the MixRatio0 temperature control mode. The temperature control logic in each temperature control mode is as follows: based on the target temperature value (the temperature value that the furnace body needs to reach), calculate the temperature control power value corresponding to the temperature currently detected by the temperature sensor. The temperature control power value is used as the heating power of the furnace body to control the furnace body temperature at the target temperature value.

[0061] In practical applications, after determining the temperature detection value of the target temperature control segment in the current temperature control cycle based on the first target temperature sensor corresponding to the target temperature control segment, this application determines whether the first target temperature sensor is in a normal detection state. If the first target temperature sensor is in a normal detection state, it determines whether the target temperature control segment meets the preset jump anomaly handling conditions. If the target temperature control segment meets the preset jump anomaly handling conditions, it indicates that it is necessary to perform jump anomaly detection and jump anomaly handling of the temperature detection value. Then, according to the preset anomaly judgment strategy, it is determined whether the temperature detection value of the target temperature control segment in the current temperature control cycle is abnormal. If the temperature detection value of the target temperature control segment in the current temperature control cycle is abnormal, it is determined whether the abnormal duration period of the temperature detection value is less than a preset number of cycles (e.g., 3 cycles, or other values ​​can be used). If the abnormal duration period of the temperature detection value is less than the preset number of cycles, it is considered that the temperature detection value... If the abnormal situation is classified as a jump anomaly, then based on the temperature control mode corresponding to the first target temperature sensor (referred to as the first temperature control mode), the temperature control power value corresponding to the temperature detection value of the target temperature control segment in the previous temperature control cycle is calculated, thus filtering out the jump anomaly to resolve the issue of temperature detection value jumps. If the duration of the abnormal temperature detection value is not less than a preset number of cycles, the abnormal temperature detection value is considered not to be a jump anomaly but a clear anomaly. In this case, based on the first temperature control mode, the temperature control power value corresponding to the temperature detection value of the target temperature control segment in the current temperature control cycle is calculated, meaning the anomaly is not filtered out to avoid affecting the judgment of a clear anomaly in the temperature detection value. If the temperature detection value of the target temperature control segment in the current temperature control cycle is not abnormal, it indicates that no abnormal temperature detection value processing is required. In this case, based on the first temperature control mode, the temperature control power value corresponding to the temperature detection value of the target temperature control segment in the current temperature control cycle is calculated.

[0062] Step S5: Send the calculated temperature control power value to the target power controller corresponding to the target temperature control zone, so that the target power controller can control the temperature of the target temperature control zone based on the temperature control power value.

[0063] In practical applications, this application sends the temperature control power value corresponding to the target temperature control segment calculated in each temperature control cycle to the power controller (referred to as the target power controller) corresponding to the target temperature control segment. The target power controller can then perform temperature control on the target temperature control segment based on the received temperature control power value, so that the temperature of the target temperature control segment is stabilized at the target temperature value, thereby stabilizing the temperature of the entire temperature control area of ​​the semiconductor device at the target temperature value.

[0064] The temperature control method provided in this application can distinguish whether the abnormality of the temperature detection value belongs to the jump type based on the abnormal duration period of the temperature detection value in the temperature control zone. That is, when the abnormal duration period of the temperature detection value is less than a preset number of periods, the abnormality of the temperature detection value is considered to be a jump type; when the abnormal duration period of the temperature detection value is not less than the preset number of periods, the abnormality of the temperature detection value is considered not to be a jump type, but to be a clear abnormality. This application does not process the clear abnormality of the temperature detection value, but only processes the jump abnormality of the temperature detection value, that is, it filters out the jump abnormality points. On the one hand, this is to solve the problem of temperature detection value jumps in the process, thereby avoiding the impact of abnormal temperature fluctuations on the process results; on the other hand, it is to not affect the judgment of the clear abnormality of the temperature detection value.

[0065] Based on the above embodiments:

[0066] As an optional embodiment, step S1, "determining the temperature detection value of the target temperature control section in the current temperature control cycle based on the first target temperature sensor corresponding to the target temperature control section," includes the following steps:

[0067] Within each temperature control cycle, the temperature sampling value of the first target temperature sensor is read every preset first time interval to read a preset number of temperature sampling values;

[0068] Calculate the average value of a preset number of temperature samples within the current temperature control cycle, and use the average value as the temperature detection value of the target temperature control section under the current temperature control cycle.

[0069] In specific applications, taking the target temperature control cycle (any temperature control cycle) as an example, when the target temperature control cycle is reached, this application reads the temperature sampling value of the first target temperature sensor, and after a preset first time interval (e.g., 200ms), determines whether the number of temperature sampling values ​​of the first target temperature sensor read within the target temperature control cycle has reached a preset number (e.g., 10). If the preset number has not been reached, the process returns to reading the temperature sampling value of the first target temperature sensor. If the preset number has been reached, the average value of the preset number of temperature sampling values ​​of the first target temperature sensor within the target temperature control cycle is calculated, and the average value calculated in this stage is used as the temperature detection value of the target temperature control segment under the target temperature control cycle. The temperature detection value obtained in this way is more accurate, and once the temperature detection value jumps, the average value processing can reduce the impact on temperature control.

[0070] As an optional embodiment, before the first target temperature sensor is in normal detection state, the temperature control method further includes:

[0071] Read the decoupling alarm information corresponding to the first target temperature sensor;

[0072] Determine whether the first target temperature sensor is disconnected based on the disconnection alarm information;

[0073] If the first target temperature sensor does not have a disconnection issue, then the first target temperature sensor is determined to be in normal detection mode.

[0074] In practical applications, the logic for determining whether the first target temperature sensor is in a normal detection state is as follows: based on the decoupling alarm information corresponding to the first target temperature sensor, determine whether the first target temperature sensor is in a decoupling state; if the first target temperature sensor is not in a decoupling state, determine that the first target temperature sensor is in a normal detection state; if the first target temperature sensor is in a decoupling state, determine that the first target temperature sensor is not in a normal detection state.

[0075] As an optional embodiment, step S2, "determining whether the temperature detection value under the current temperature control cycle is abnormal according to the preset anomaly determination strategy," includes the following steps:

[0076] Obtain the temperature detection value x of the target temperature control zone in the nth temperature control cycle. n It also calculates the average temperature readings of the target temperature control zone over the first m temperature control cycles. and standard deviation σ; where the first m temperature control cycles are from the (n-m+1)th temperature control cycle to the nth temperature control cycle, and m is the preset cycle threshold;

[0077] according to Calculate the critical value G nWhere abs represents taking the absolute value;

[0078] Find the reference critical value corresponding to the nth temperature control cycle within the pre-selected confidence interval from the preset Globus critical value table, and determine the critical value G. n Whether it is greater than the reference critical value, and whether the standard deviation σ is greater than the preset standard deviation threshold; whereby the preset Glubbs critical value table shows the correspondence between the number of temperature control cycles and the reference critical value under different confidence intervals;

[0079] If the critical value G n If the temperature reading is greater than the reference critical value and the standard deviation σ is greater than the preset standard deviation threshold, then the temperature reading in the nth temperature control cycle is determined to be abnormal.

[0080] If the critical value G n If the temperature reading is not greater than the reference critical value and / or the standard deviation σ is not greater than the preset standard deviation threshold, then the temperature detection value in the nth temperature control cycle is determined to be normal.

[0081] In this embodiment, the preset Glubbs critical value table is pre-set, which shows the correspondence between the number of temperature control cycles and the reference critical value under different confidence intervals, as shown in Table 1 below:

[0082] Table 1

[0083]

[0084]

[0085] In practical applications, the anomaly detection logic of the preset anomaly detection strategy is as follows (taking the target temperature control section as an example): 1) Obtain the temperature detection value x of the target temperature control section in the nth temperature control cycle. n It also calculates the average temperature readings of the target temperature control zone over the first m temperature control cycles. And the standard deviation σ of the temperature detection values ​​of the target temperature control zone in the first m temperature control cycles (here, the first m temperature control cycles refer to the (n-m+1)th temperature control cycle to the nth temperature control cycle; if m is 5, then in the 6th temperature control cycle, the first m temperature control cycles are the 2nd to the 6th temperature control cycles); 2) According to the preset Globus calculation formula Calculate the critical value G of the target temperature control zone in the nth temperature control cycle. n And find the reference critical value GR corresponding to the nth temperature control cycle under the pre-selected confidence interval from the preset GRUB critical value table. n (As shown in Table 1 above, if the pre-selected confidence interval is 99.00%, then in the 6th temperature control cycle, the reference critical value GR6 = 1.944); 3) Determine the critical value G corresponding to the target temperature control segment in the nth temperature control cycle. nIs it greater than the reference critical value GR? n If it is not greater than the reference critical value G ns If the temperature detection value of the target temperature control zone in the nth temperature control cycle is not abnormal, it is determined that there is no abnormality; if it is greater than the reference critical value GR n If the standard deviation σ of the temperature detection values ​​of the target temperature control section in the first m temperature control cycles is greater than the preset standard deviation threshold (based on the changing trend of the temperature detection values ​​during the temperature control process, a standard deviation threshold of 4 can be used to assist the Grobbs method in screening abnormal temperature detection values, or other values ​​can be selected according to the data characteristics of the temperature detection values ​​during the temperature control process), if it is not greater than the preset standard deviation threshold, it is determined that the temperature detection values ​​of the target temperature control section in the nth temperature control cycle are not abnormal; if it is greater than the preset standard deviation threshold, it is determined that the temperature detection values ​​of the target temperature control section in the nth temperature control cycle are abnormal.

[0086] It is evident that the preset anomaly detection strategy includes both the Globus method and the standard deviation method as anomaly detection conditions. This is because, during the experiment, it was found that while the Globus method can effectively detect outliers, it can also misclassify normal values ​​as outliers. As shown in the last column of Table 2, there are instances of misjudging normal values. (Table 2 presents temperature detection data for a certain temperature control segment across 7 sets of data over 5 temperature control cycles. 3 sets of data showed anomalies in the 5th temperature control cycle, while the remaining 4 sets showed no anomalies in any of the 5 temperature control cycles. Table 2 also provides the average temperature detection values ​​for this temperature control segment over the first m temperature control cycles (where m is 5, referring to the 1st to 5th temperature control cycles).) The standard deviation σ and the reference critical value GR5 = 1.75 corresponding to the 5th temperature control cycle are calculated according to the preset GRUBS formula. Calculate the critical value G5 = 2 corresponding to the data in the last column of Table 2. If only the Globus method is used to determine whether the temperature detection value in the 5th temperature control cycle is abnormal, since the critical value G5 is greater than the reference critical value GR5, the conclusion is that the temperature detection value in the 5th temperature control cycle is abnormal. However, in reality, the temperature detection value in the 5th temperature control cycle is not abnormal, i.e., the Globus method misjudges normal values. To avoid the Globus method misjudges normal values, the standard deviation is added when judging outliers. According to the experiment, the standard deviation corresponding to normal data is very small. Therefore, when the Globus method judges... After identifying outliers, an additional step is added to determine whether the standard deviation is greater than a preset standard deviation threshold. This makes the outliers more reliable (e.g., if the preset standard deviation threshold is 4, the standard deviation of the data in the last column of Table 2 below is 0.08. Since the standard deviation is less than the preset standard deviation threshold, the conclusion of the judgment by combining the Grobbs method and the standard deviation method is that there are no outliers in the temperature detection values ​​under the 5th temperature control cycle, which is consistent with the actual situation). In other words, the method of combining the Grobbs method and the standard deviation method can not only accurately identify outliers in the temperature detection values, but also avoid misjudging normal temperature detection values ​​when using the Grobbs method alone.

[0087] Table 2

[0088]

[0089]

[0090] As an optional embodiment, the temperature control method further includes the following steps:

[0091] When the duration of an anomaly is less than a preset number of periods, an anomaly is recorded.

[0092] An alarm will be triggered if the duration of the abnormality is not less than a preset number of periods.

[0093] In practical applications, when the abnormal duration period of the temperature detection value corresponding to the target temperature control zone is less than the preset number of periods, this application records relevant abnormalities, such as recording the abnormal value of the temperature detection value and the abnormal duration period of the temperature detection value.

[0094] This application will issue a relevant abnormal alarm when the abnormal duration of the temperature detection value corresponding to the target temperature control zone is not less than a preset number of cycles, so as to remind the machine operator to handle the relevant abnormality.

[0095] As an optional embodiment, before the preset abnormal temperature change handling conditions are met in the target temperature control zone, the temperature control method further includes the following steps:

[0096] Determine whether the current temperature control cycle of the target temperature control zone belongs to the first m temperature control cycles before the target temperature control zone started temperature control, and whether there is any abnormal alarm in the target temperature control zone within the preset second time period; where m is the preset cycle threshold.

[0097] If the current temperature control cycle does not belong to the first m temperature control cycles after the start of temperature control, and there is no abnormal alarm in the target temperature control section within the preset second time period, then the target temperature control section is determined to meet the preset jump abnormal handling conditions.

[0098] In practical applications, the logic for determining whether the target temperature control zone meets the preset jump anomaly handling conditions is as follows: First, determine if the current temperature control cycle of the target temperature control zone belongs to the first m temperature control cycles after the target temperature control zone has started (the first m temperature control cycles here are consistent with the values ​​of the first m temperature control cycles in the above-mentioned "calculating the average and standard deviation of the temperature detection values ​​of the target temperature control zone under the first m temperature control cycles"). If it belongs to the first m temperature control cycles after the target temperature control zone has started, it means that the temperature control program has just started, there is no historical data, and the initial parameters are all 0. Therefore, judging jump anomalies at this time is meaningless, and no jump anomaly handling is performed. Thus, the target temperature control zone is determined not to meet the preset jump anomaly handling conditions. If it does not belong to the first m temperature control cycles after the target temperature control zone has started, then determine if there is an abnormal alarm in the target temperature control zone within a preset second time period (e.g., 1 minute). If there is an abnormal alarm, then the target temperature control zone is determined not to meet the preset jump anomaly handling conditions. If there is no abnormal alarm, then the target temperature control zone meets the preset jump anomaly handling conditions.

[0099] As an optional embodiment, the temperature control method further includes the following steps:

[0100] When the first target temperature sensor is in normal detection state and the target temperature control section does not meet the preset jump abnormality handling conditions, the temperature control power value corresponding to the temperature detection value under the current temperature control cycle is calculated based on the first temperature control mode, so as to use the calculated temperature control power value as the temperature control power value sent to the target power controller under the current temperature control cycle.

[0101] In specific applications, after determining the temperature detection value of the target temperature control segment in the current temperature control cycle based on the first target temperature sensor corresponding to the target temperature control segment, this application determines whether the first target temperature sensor is in a normal detection state. If the first target temperature sensor is in a normal detection state (the first target temperature sensor does not have a disconnection situation), it determines whether the target temperature control segment meets the preset jump abnormality handling conditions. If the target temperature control segment does not meet the preset jump abnormality handling conditions (the current temperature control cycle of the target temperature control segment belongs to the first m temperature control cycles of the beginning of temperature control, and / or the target temperature control segment has an abnormal alarm within a preset second time period), it calculates the temperature control power value corresponding to the temperature detection value of the target temperature control segment in the current temperature control cycle based on the first temperature control mode.

[0102] As an optional embodiment, a second temperature sensor is also provided for each temperature control zone;

[0103] The temperature control method also includes the following steps:

[0104] When the first target temperature sensor is not in normal detection state, the actual temperature value of the target temperature control section in the current temperature control cycle is determined based on the second target temperature sensor corresponding to the target temperature control section. Based on the second temperature control mode corresponding to the second target temperature sensor, the temperature control power value corresponding to the actual temperature value in the current temperature control cycle is calculated, and the calculated temperature control power value is used as the temperature control power value sent to the target power controller in the current temperature control cycle.

[0105] In this embodiment of the application, each temperature control zone of the semiconductor device is also provided with a second temperature sensor (such as OuterTC), and the second target temperature sensor is the second temperature sensor provided for the target temperature control zone.

[0106] In specific applications, after determining the temperature detection value of the target temperature control section in the current temperature control cycle based on the first target temperature sensor corresponding to the target temperature control section, this application determines whether the first target temperature sensor is in a normal detection state. If the first target temperature sensor is not in a normal detection state (the first target temperature sensor is disconnected), the actual temperature value of the target temperature control section in the current temperature control cycle is determined based on the second target temperature sensor, and the temperature control power value corresponding to the actual temperature value of the target temperature control section in the current temperature control cycle is calculated based on the temperature control mode corresponding to the second target temperature sensor (referred to as the second temperature control mode).

[0107] As an optional embodiment, each second temperature sensor includes a main temperature sensor and a backup temperature sensor;

[0108] Based on the second target temperature sensor corresponding to the target temperature control zone, the actual temperature value of the target temperature control zone under the current temperature control cycle is determined, including the following steps:

[0109] Determine whether the main temperature sensor in the second target temperature sensor is in a normal detection state;

[0110] If so, the actual temperature value of the target temperature control zone under the current temperature control cycle is determined based on the main temperature sensor in the second target temperature sensor.

[0111] If not, the actual temperature value of the target temperature control zone under the current temperature control cycle is determined based on the backup temperature sensor in the second target temperature sensor.

[0112] In this embodiment, each second temperature sensor includes a main temperature sensor and a backup temperature sensor. When using the second temperature sensor, the main temperature sensor is used first, and the backup temperature sensor is used only when the main temperature sensor is faulty.

[0113] Based on the above temperature control method, the specific temperature control process of this application is as follows (refer to...). Figure 3 ):

[0114] 1) During this temperature control cycle, read the temperature sampling value from the first target temperature sensor;

[0115] 2) Delay 200ms;

[0116] 3) Determine if the loop has repeated 10 times; if yes, proceed to step 4); otherwise, return to step 1.

[0117] 4) Calculate the average value of the 10 temperature samples;

[0118] 5) Use the calculated average value as the temperature detection value of the target temperature control zone during this temperature control cycle;

[0119] 6) Read the decoupling alarm information corresponding to the first target temperature sensor;

[0120] 7) Determine if there is a disconnection in the first target temperature sensor; if not, proceed to step 8); if yes, proceed to step 18).

[0121] 8) Determine if this is the first m temperature control cycles since the start of temperature control; if not, proceed to step 9); if yes, proceed to step 17.

[0122] 9) Determine if there is any abnormal alarm in the target temperature control zone within 1 minute; if not, proceed to step 10); if yes, proceed to step 17.

[0123] 10) Calculate the average temperature reading of the target temperature control zone over the first m temperature control cycles. and standard deviation σ;

[0124] 11) Judgment Is it greater than the reference critical value GR? n If yes, proceed to step 12); if no, proceed to step 17.

[0125] 12) Determine if the standard deviation σ is greater than 4; if yes, proceed to step 13); if no, proceed to step 17.

[0126] 13) Determine x n An anomaly is detected, and it is determined whether the duration of the anomaly is less than 3 cycles; if yes, proceed to step 14); if no, proceed to step 16.

[0127] 14) Record any anomalies;

[0128] 15) Use the temperature detection value of the target temperature control zone in the previous temperature control cycle as the temperature value used to calculate the temperature control power value;

[0129] 16) Issue an abnormal alarm;

[0130] 17) Use the temperature detection value of the target temperature control zone during the current temperature control cycle as the temperature value used to calculate the temperature control power value;

[0131] 18) Determine the actual temperature value of the target temperature control zone in this temperature control cycle based on the second target temperature sensor, and use this actual temperature value as the temperature value used to calculate the temperature control power value;

[0132] 19) Calculate the temperature control power value according to the corresponding temperature control mode;

[0133] 20) Send the calculated temperature control power value to the target power controller so that the target power controller can control the temperature of the target temperature control zone.

[0134] This application also provides a semiconductor device, including:

[0135] Furnace body; The temperature control area of ​​the furnace body is divided into multiple temperature control zones, and each temperature control zone is equipped with a first temperature sensor and a power controller.

[0136] A temperature controller is used to control the temperature of a controlled area using any of the above-mentioned temperature control methods.

[0137] For a description of the semiconductor device provided in this application, please refer to the embodiments of the temperature control method described above; further details will not be repeated here.

[0138] The terms "first," "second," etc., used in the specification and claims of this application are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such terms are interchangeable where appropriate; this is merely a way of distinguishing objects with the same attributes in the embodiments of this application. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion, so that a process, method, system, product, or apparatus that comprises a series of elements is not necessarily limited to those elements, but may include other elements not explicitly listed or inherent to those processes, methods, products, or apparatuses.

[0139] The device embodiments described above are merely illustrative. The units described as separate components may or may not be physically separate, and the components shown as units may or may not be physical units; that is, they may be located in one place or distributed across multiple network units. Some or all of the modules can be selected to achieve the purpose of this embodiment according to actual needs. Those skilled in the art can understand and implement this without any creative effort.

[0140] Through the above description of the embodiments, those skilled in the art can clearly understand that each embodiment can be implemented by means of software plus necessary general-purpose hardware platforms, and of course, it can also be implemented by hardware. Based on this understanding, the above technical solutions, in essence or the part that contributes to the prior art, can be embodied in the form of a software product. This computer software product can be stored in a computer-readable storage medium, such as ROM / RAM, magnetic disk, optical disk, etc., including several instructions to cause a computer device (which may be a personal computer, server, or network device, etc.) to execute the methods of various embodiments or some parts of embodiments.

[0141] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this application.

Claims

1. A temperature control method, characterized in that, Applied to semiconductor equipment, the temperature control area of ​​the semiconductor equipment is divided into multiple temperature control zones, each of which is equipped with a first temperature sensor and a power controller. The temperature control method includes: Based on the first target temperature sensor corresponding to the target temperature control zone, the temperature detection value of the target temperature control zone under the current temperature control cycle is determined; wherein, the target temperature control zone is any of the temperature control zones; When the first target temperature sensor is in normal detection state and the target temperature control zone meets the preset jump anomaly handling conditions, the temperature detection value under the current temperature control cycle is determined to be abnormal according to the preset anomaly judgment strategy. If so, when the abnormal duration period of the temperature detection value is less than the preset number of periods, the temperature control power value corresponding to the temperature detection value in the previous temperature control period is calculated based on the first temperature control mode corresponding to the first target temperature sensor; when the abnormal duration period is not less than the preset number of periods, the temperature control power value corresponding to the temperature detection value in the current temperature control period is calculated based on the first temperature control mode. If not, then based on the first temperature control mode, calculate the temperature control power value corresponding to the temperature detection value under the current temperature control cycle; The calculated temperature control power value is sent to the target power controller corresponding to the target temperature control section, so that the target power controller can control the temperature of the target temperature control section based on the temperature control power value.

2. The temperature control method as described in claim 1, characterized in that, The step of determining the temperature detection value of the target temperature control zone in the current temperature control cycle based on the first target temperature sensor corresponding to the target temperature control zone includes: Within each temperature control cycle, the temperature sampling value of the first target temperature sensor is read every preset first time interval to read a preset number of temperature sampling values; Calculate the average value of a preset number of temperature sampling values ​​within the current temperature control cycle, and use the average value as the temperature detection value of the target temperature control segment under the current temperature control cycle.

3. The temperature control method as described in claim 1, characterized in that, Before the first target temperature sensor is in normal detection state, the temperature control method further includes: Read the decoupling alarm information corresponding to the first target temperature sensor; Based on the decoupling alarm information, determine whether the first target temperature sensor is decoupled; If the first target temperature sensor does not have a disconnection issue, then the first target temperature sensor is determined to be in a normal detection state.

4. The temperature control method as described in claim 1, characterized in that, The step of determining whether the temperature detection value under the current temperature control cycle is abnormal according to a preset anomaly determination strategy includes: Obtain the temperature detection value x of the target temperature control zone in the nth temperature control cycle. n And calculate the average value of the temperature detection values ​​of the target temperature control zone over the first m temperature control cycles. and standard deviation σ; wherein, the first m temperature control cycles are from the (n-m+1)th temperature control cycle to the nth temperature control cycle, and m is a preset cycle threshold; According to the temperature detection value x n The average value And the critical value for calculating the standard deviation σ; Find the reference critical value corresponding to the nth temperature control cycle under the pre-selected confidence interval from the preset Globus critical value table, and determine whether the critical value is greater than the reference critical value and whether the standard deviation is greater than the preset standard deviation threshold; wherein, the preset Globus critical value table represents the correspondence between the number of temperature control cycles and the reference critical value under different confidence intervals; If the critical value is greater than the reference critical value and the standard deviation is greater than the preset standard deviation threshold, then it is determined that the temperature detection value under the nth temperature control cycle is abnormal. If the critical value is not greater than the reference critical value, and / or the standard deviation is not greater than the preset standard deviation threshold, then it is determined that the temperature detection value under the nth temperature control cycle is not abnormal.

5. The temperature control method as described in claim 1, characterized in that, The temperature control method further includes: When the duration of the anomaly is less than the preset number of periods, an anomaly is recorded. An alarm is triggered when the duration of the anomaly is not less than the preset number of periods.

6. The temperature control method as described in claim 5, characterized in that, Before the target temperature control zone meets the preset abnormal change handling conditions, the temperature control method further includes: Determine whether the current temperature control cycle of the target temperature control zone belongs to the first m temperature control cycles before the target temperature control zone started temperature control, and whether the target temperature control zone has any abnormal alarms within a preset second time period; where m is a preset cycle threshold. If the current temperature control cycle does not belong to the first m temperature control cycles after the start of temperature control, and the target temperature control segment does not have any abnormal alarms within the preset second time period, then the target temperature control segment is determined to meet the preset jump abnormal handling conditions.

7. The temperature control method as described in claim 1, characterized in that, The temperature control method further includes: When the first target temperature sensor is in normal detection state and the target temperature control section does not meet the preset jump abnormality handling conditions, the temperature control power value corresponding to the temperature detection value in the current temperature control cycle is calculated based on the first temperature control mode, so as to use the calculated temperature control power value as the temperature control power value sent to the target power controller in the current temperature control cycle.

8. The temperature control method according to any one of claims 1-7, characterized in that, Each of the temperature control zones is also equipped with a second temperature sensor; The temperature control method further includes: When the first target temperature sensor is not in normal detection state, the actual temperature value of the target temperature control segment under the current temperature control cycle is determined based on the second target temperature sensor corresponding to the target temperature control segment, and the temperature control power value corresponding to the actual temperature value under the current temperature control cycle is calculated based on the second temperature control mode corresponding to the second target temperature sensor, so as to use the calculated temperature control power value as the temperature control power value sent to the target power controller under the current temperature control cycle.

9. The temperature control method as described in claim 8, characterized in that, Each of the second temperature sensors includes a main temperature sensor and a backup temperature sensor; The step of determining the actual temperature value of the target temperature control zone under the current temperature control cycle based on the second target temperature sensor corresponding to the target temperature control zone includes: Determine whether the main temperature sensor in the second target temperature sensor is in a normal detection state; If so, then based on the main temperature sensor in the second target temperature sensor, the actual temperature value of the target temperature control zone under the current temperature control cycle is determined; If not, the actual temperature value of the target temperature control zone under the current temperature control cycle is determined based on the backup temperature sensor in the second target temperature sensor.

10. A semiconductor device, characterized in that, include: Furnace body; the temperature control area of ​​the furnace body is divided into multiple temperature control zones, and each temperature control zone is equipped with a first temperature sensor and a power controller. A temperature controller for controlling the temperature of the temperature-controlled area using the temperature control method as described in any one of claims 1-9.

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