Quartz pendulum plate structure and its processing method

Abstract

The present invention provides a quartz pendulum structure and a processing method thereof. The structure includes a support ring, two elliptical flexible beams, a pendulum tongue, a conductive gold area, and a plurality of convex platforms. The support ring has a positioning circular notch. The two elliptical flexible beams are symmetrically arranged with respect to the axis of symmetry of the quartz pendulum structure. The cross-section of any one of the elliptical shapes is formed by connecting a first straight segment, a first arc segment, a second straight segment, and a second arc segment end to end. The width of the cross-section of any one of the elliptical shapes decreases sequentially from the first straight segment to the second straight segment. The ends of the two elliptical flexible beams composed of the first straight segments are both connected to the support ring. The pendulum tongue is connected to the ends of the two flexible beams composed of the second straight segments. The plurality of convex platforms are arranged on the support ring at intervals and protrude towards the pendulum tongue. Applying the technical solution of the present invention can solve the technical problem in the prior art that the pendulum piece of the sensitive part is easily damaged by external forces, resulting in difficulty in improving the accuracy of the accelerometer.

Description

Technical Field

[0001] The present invention relates to the technical field of quartz flexible accelerometers, and particularly relates to a quartz pendulum structure and a processing method thereof. Background Art

[0002] Quartz flexible accelerometers (hereinafter referred to as accelerometers), as important instruments for inertial measurement, are widely used in various modern inertial systems. They have the advantages of high reliability and being suitable for acceleration measurement, and have been widely used in many fields such as aerospace, aviation, navigation, and petroleum. The core component of a quartz flexible accelerometer is the pendulum. Due to the high processing difficulty of the sensitive component, the pendulum, and its susceptibility to damage by external forces, it is difficult to improve the accuracy of the accelerometer, or the product qualification rate is relatively low. Therefore, as a key factor affecting the accuracy of the accelerometer, both the structural design and the processing process of the pendulum have a direct impact on the accuracy of the accelerometer. Summary of the Invention

[0003] The present invention provides a quartz pendulum structure and a processing method thereof, which can solve the technical problem in the prior art that the sensitive component, the pendulum, is easily damaged by external forces, resulting in difficulty in improving the accuracy of the accelerometer.

[0004] According to one aspect of the present invention, there is provided a quartz pendulum structure, which includes: a support ring having a positioning circular notch; two tapered flexible beams symmetrically arranged with respect to the pendulum axis of the quartz pendulum structure. The cross-section of any one tapered shape is formed by connecting a first straight line segment, a first arc segment, a second straight line segment, and a second arc segment end to end. The width of the cross-section of any one tapered shape decreases sequentially from the first straight line segment to the second straight line segment. The ends of the two tapered flexible beams formed by the first straight line segments are both connected to the support ring; a pendulum tongue connected to the ends of the two flexible beams formed by the second straight line segments; conductive gold regions respectively provided on the pendulum tongue, the tapered flexible beams, and the support ring; and a plurality of bosses spaced apart on the support ring and protruding towards the pendulum tongue.

[0005] Further, the quartz pendulum structure further includes a viscous friction film covering the surfaces of the plurality of bosses.

[0006] Further, the material of the viscous friction film includes polyacrylamide, polyethylene glycol, or hydroxypropyl cellulose.

[0007] Further, the gap range between any one boss and the pendulum tongue is 0.08 mm to 0.1 mm.

[0008] Further, the distance between the center position of the first arc segment or the second arc segment of any one tapered shape and the output axis in the direction parallel to the output axis is 4.4 mm to 6.1 mm, and the radius of the first arc segment or the second arc segment is 1.7 mm to 2.4 mm.

[0009] According to another aspect of the present invention, a method for processing a quartz pendulum structure is provided, and the method for processing the quartz pendulum structure is used to process the quartz pendulum structure as described above.

[0010] Further, the method for processing the quartz pendulum structure includes: performing a hollowing process on a set area of quartz glass by means of sandblasting blanking or laser cutting to produce a pendulum tongue, an initial elliptical flexible beam, and a support ring; chemically etching the initial elliptical flexible beam with an etching solution to obtain a final elliptical flexible beam; processing the support ring with the etching solution to generate a boss; obtaining a narrow slit between the pendulum tongue and the boss by means of picosecond laser processing; respectively plating conductive gold regions on the pendulum tongue, the elliptical flexible beam, and the support ring by means of magnetron sputtering coating; and preparing a viscous friction film on the surface of the boss.

[0011] Further, the etching solution is prepared by mixing hydrofluoric acid and ammonium fluoride in a ratio of 2:1, and the etching temperature of the etching solution is 32 °C to 36 °C.

[0012] Further, the picosecond laser processing frequency is 400 kHz to 480 kHz, and the processing power is 4 W to 8 W.

[0013] Further, the viscous friction film is obtained by means of heating and casting, heating and laminating, normal-temperature laminating, or extrusion curing and forming.

[0014] Applying the technical solution of the present invention, a quartz pendulum structure is provided. The structure of the flexible beam of the quartz pendulum structure is designed such that the large end portion composed of the first straight line segment of the flexible beam is connected to the support ring, increasing the support strength of the flexible beam; the small end portion composed of the second straight line segment of the flexible beam is connected to the pendulum tongue, increasing the self-adjusting ability of the beam when the pendulum tongue is interfered by an external force, minimizing the damage caused by accidental torsional strain; in addition, by providing a positioning circular notch on the quartz pendulum structure, during the assembly process, it can be directly aligned with other fittings through this axis, and the quartz pendulum structure can rotate around the center of this positioning circular notch to compensate for the offset of the axis of other structures. Therefore, compared with the prior art, the quartz pendulum structure provided by the present invention can minimize the damage caused by accidental torsional strain, improve the assembly accuracy, and ensure the reliability of assembly and application. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] The accompanying drawings included are used to provide a further understanding of the embodiments of the present invention, which form a part of the specification, are used to illustrate the embodiments of the present invention, and together with the written description are used to explain the principles of the present invention. Obviously, the accompanying drawings in the following description are only some embodiments of the present invention, and those of ordinary skill in the art can also obtain other drawings based on these drawings without creative efforts.

[0016] Figure 1 The structural schematic diagram of a quartz pendulum sheet structure provided according to a specific embodiment of the present invention is shown.

[0017] Among them, the above-mentioned drawings include the following reference numerals:

[0018] 10. Support ring; 10a. Positioning circular notch; 20. Elliptical flexible beam; 21. First straight segment; 22. First arc segment; 23. Second straight segment; 24. Second arc segment; 30. Pendulum tongue; 40. Conductive gold area; 50. Boss; 60. Viscous friction film. Detailed implementation manners

[0019] It should be noted that, without conflict, the embodiments in the present application and the features in the embodiments may be combined with each other. The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. The following description of at least one exemplary embodiment is actually only illustrative and in no way limits the present invention and its application or use. Based on the embodiments in the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0020] It should be noted that the terms used herein are only for describing specific implementation manners and are not intended to limit the exemplary implementation manners according to the present application. As used herein, unless otherwise clearly specified in the context, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "include" and / or "comprise" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof.

[0021] Unless otherwise specifically stated, the relative arrangements, numerical expressions, and numerical values of the components and steps set forth in these embodiments do not limit the scope of the present invention. At the same time, it should be understood that, for the convenience of description, the sizes of the various parts shown in the drawings are not drawn according to the actual proportional relationship. Technologies, methods, and devices known to those of ordinary skill in the relevant art may not be discussed in detail, but where appropriate, the technologies, methods, and devices should be regarded as part of the authorized specification. In all the examples shown and discussed herein, any specific value should be construed as merely exemplary and not as a limitation. Therefore, other examples of the exemplary embodiments may have different values. It should be noted that: like reference numerals and letters denote like items in the following drawings, and therefore, once an item is defined in one drawing, it does not need to be further discussed in subsequent drawings.

[0022] AsFigure 1 As shown, according to a specific embodiment of the present invention, a quartz pendulum structure is provided. The quartz pendulum structure includes a support ring 10, two elliptical flexible beams 20, a pendulum tongue 30, a conductive gold area 40, and a plurality of bosses 50. The support ring 10 has a positioning circular notch 10a. The two elliptical flexible beams 20 are symmetrically arranged with respect to the axis of the quartz pendulum structure. The cross-section of any one of the ellipses is formed by connecting a first straight segment 21, a first arc segment 22, a second straight segment 23, and a second arc segment 24 end to end. The width of the cross-section of any one of the ellipses gradually decreases from the first straight segment 21 to the second straight segment 23. The ends of the two elliptical flexible beams 20 formed by the first straight segments 21 are both connected to the support ring 10, and the pendulum tongue 30 is connected to the ends of the two flexible beams formed by the second straight segments 23. The conductive gold areas 40 are respectively arranged on the pendulum tongue 30, the elliptical flexible beams 20, and the support ring 10. The plurality of bosses 50 are arranged at intervals on the support ring 10 and protrude towards the pendulum tongue 30.

[0023] Applying this configuration method, a quartz pendulum structure is provided. The structure of the flexible beam of the quartz pendulum structure is designed such that the large end of the flexible beam formed by the first straight segment is connected to the support ring, which increases the support strength of the flexible beam; the small end of the flexible beam formed by the second straight segment is connected to the pendulum tongue, which increases the self-adjusting ability of the beam when the pendulum tongue is interfered by external forces, minimizing the damage caused by accidental torsional strain; in addition, by providing a positioning circular notch on the quartz pendulum structure, during the assembly process, it can be directly aligned with other assembled parts through this axis, and the quartz pendulum structure can rotate around the center of this positioning circular notch to compensate for the offset of the axis by other structures. Therefore, compared with the prior art, the quartz pendulum structure provided by the present invention can minimize the damage caused by accidental torsional strain, improve the assembly accuracy, and ensure the reliability of assembly and application.

[0024] Furthermore, in the present invention, in order to reduce the stress of the interference torque transmitted to the pendulum sheet, the quartz pendulum structure can be further configured to further include a viscous friction film 60, and the viscous friction film 60 covers the surfaces of the plurality of bosses 50.

[0025] Applying this configuration method, by providing a viscous friction film on the surfaces of the plurality of bosses 50, a viscous connection can be formed between the quartz glass and the assembly surface of the torque device to increase the friction coefficient and reduce the original assembly stress, thereby reducing the stress of the interference torque transmitted to the pendulum sheet and ensuring the reliability of assembly and application. As a specific embodiment of the present invention, the material of the viscous friction film 60 includes polyacrylamide, polyethylene glycol, or hydroxypropyl cellulose.

[0026] In the present invention, in order to further reduce the stress of the interference torque transmitted to the pendulum piece, the clearance range between any boss 50 and the pendulum tongue 30 can be configured to be 0.08 mm to 0.1 mm. By applying this configuration method, after increasing the boss area to configure the clearance range between any boss 50 and the pendulum tongue 30 to be 0.08 mm to 0.1 mm and adding a viscous friction film on the surface of the boss, the pre-tightening force applied to the upper and lower torque motors and the pendulum piece boss during the original accelerometer core assembly is reduced to 60% of the original, that is, the original assembly stress is reduced, thereby reducing the stress of the interference torque transmitted to the pendulum piece and ensuring reliable assembly and application.

[0027] As a specific embodiment of the present invention, as Figure 1 shown, the quartz pendulum piece structure includes a substantially circular ring-shaped support ring 10, two elliptical flexible beams 20, a conductive gold region 40, a freely swinging pendulum tongue 30, and three bosses 50. A positioning circular notch 10a is made at the edge position of the circular ring-shaped support ring along the pendulum axis direction. The tapered roots of the two flexible beams are connected to the support ring 10 and are symmetric with respect to the pendulum axis position, that is, symmetric with respect to the positioning circular notch. The pendulum tongue 30 is connected to the circular ring-shaped support ring 10 through the tips of the elliptical flexible beams. There are three wedge-shaped mounting and positioning bosses 50 on the circular ring-shaped support ring 10, and the three mounting and positioning bosses 50 are symmetrically distributed along the pendulum axis. There is a molecular material film with high viscosity on the surface of the boss. The positioning circular notch 10a is semicircular or U-shaped, located at the outer edge of the pendulum piece mounting support ring and on the axis of the overall pendulum axis. Therefore, in the assembly process, it can be directly aligned with other fittings along this axis, and the pendulum piece can rotate around the center of this positioning circular notch to compensate for the offset of other structures from the axis.

[0028] The edge part of the flexible beam is arc-shaped, and the design principle of its center position and radius: the distance between the center position of any first arc segment 22 or second arc segment 24 of the elliptical cone and the output axis along the direction parallel to the output axis is 4.4 mm to 6.1 mm, and the radius of the first arc segment 22 or the second arc segment 24 is 1.7 mm to 2.4 mm. This method can reduce the interference torque and has high precision. The tapered root of the flexible beam is connected to the circular ring-shaped support ring and is free from the part where the thickness of the support ring and the flexible beam changes, reducing the deviation between the product implementation process and the design, and increasing the support strength of the flexible beam; the tip of the tapered flexible beam is connected to the pendulum tongue, which is the thinnest part of the flexible beam, thereby increasing the self-adjusting ability of the beam when the pendulum tongue is interfered by external forces and reducing the damage caused by possible torsional strain.

[0029] The inner diameters of the three mounting boss parts on the support ring 10 are increased, and the gap between the support ring and the swing tongue is 0.08 mm to 0.1 mm. The edges of the enlarged parts are all connected by arcs, so as to increase the support area and reduce the damage caused by assembly stress and impact stress under application conditions. The positioning circular notch, the elliptical flexible beam, and the wedge-shaped boss are all designed as arc structures at the three key parts to reduce stress concentration caused by processing, and are formed by sandblasting blanking and laser cutting.

[0030] According to another aspect of the present invention, there is provided a method for processing a quartz pendulum structure, which is used to process the quartz pendulum structure as described above. The method for processing the quartz pendulum structure includes: performing a hollowing process on a set area of quartz glass by using a sandblasting blanking or laser cutting method to produce a swing tongue 30, an initial elliptical flexible beam 20, and a support ring 10; chemically etching the initial elliptical flexible beam 20 with an etching solution to obtain the final elliptical flexible beam 20; processing the support ring 10 with an etching solution to generate a boss 50; obtaining a narrow slit between the swing tongue 30 and the boss 50 by using a picosecond laser processing method; respectively plating conductive gold regions 40 on the swing tongue 30, the elliptical flexible beam 20, and the support ring 10 by using a magnetron sputtering coating method; and preparing a viscous friction film 60 on the surface of the boss 50.

[0031] By applying this configuration method, there is provided a method for processing a quartz pendulum structure. The structure of the flexible beam is designed such that the large end portion of the flexible beam composed of the first straight line segment is connected to the support ring, increasing the support strength of the flexible beam; the small end portion of the flexible beam composed of the second straight line segment is connected to the swing tongue, increasing the self-adjusting ability of the beam when the swing tongue is interfered by an external force, and reducing the damage caused by accidental torsional strain to the minimum; in addition, by providing a positioning circular notch on the quartz pendulum structure, during the assembly process, it can be directly aligned with other assemblies through this axis, and the quartz pendulum structure can rotate around the center of the positioning circular notch to compensate for the offset of the axis by other structures. Therefore, compared with the prior art, the quartz pendulum structure provided by the present invention can minimize the damage caused by accidental torsional strain, improve the assembly accuracy, and ensure the reliability of assembly and application.

[0032] As a specific embodiment of the present invention, the quartz pendulum structure provided by the present invention can be realized by the following process method.

[0033] The first step: perform a hollowing process on a set area of quartz glass by using a sandblasting blanking or laser cutting method (specifically including: the central hole, the positioning circular notch on the quartz glass, and the windows between the swing tongue, the flexible beam, and the support ring), thereby producing the swing tongue 30, the initial elliptical flexible beam 20, and the support ring 10.

[0034] Step 2: Chemically etch the initial conical flexure beam 20 using a hydrofluoric acid etching solution to obtain the final conical flexure beam 20. The hydrofluoric acid etching solution is prepared by mixing hydrofluoric acid and ammonium fluoride in a ratio of 2:1, and the etching temperature is 32°C to 36°C;

[0035] Step 3: Use a picosecond laser to machine the narrow slit between the pendulum tongue and the boss. The processing frequency of the picosecond laser is 400 kHz to 480 kHz, and the processing power is 4 W to 8 W;

[0036] Step 4: Use a magnetron sputtering coating method to deposit a conductive gold region 40 on the pendulum tongue 30, the conical flexure beam 20, and the support ring 10 respectively;

[0037] Step 5: Prepare the viscous friction film 60 at the boss part. The viscous friction film layer (made of polyacrylamide, high molecular weight polyethylene glycol, or hydroxypropyl cellulose material) on the boss can be obtained by heating and casting, heating and laminating, room temperature laminating, or extrusion curing molding methods.

[0038] For a further understanding of the present invention, the following combines Figure 1 to elaborate in detail on the quartz pendulum structure and its processing method provided by the present invention.

[0039] As Figure 1 shown, according to a specific embodiment of the present invention, a quartz pendulum structure is provided. The quartz pendulum structure includes a substantially circular ring-shaped support ring 10, two conical flexure beams 20, a conductive gold region 40, a freely swinging pendulum tongue 30, and three bosses 50. A positioning circular notch 10a is made at the edge position of the circular ring-shaped support ring along the pendulum axis direction. The roots of the conical parts of the two flexure beams are connected to the support ring 10 and are symmetric with respect to the pendulum axis, that is, symmetric with respect to the positioning circular notch. The pendulum tongue 30 is connected to the circular ring-shaped support ring 10 through the tips of the conical flexure beams. There are three wedge-shaped mounting and positioning bosses 50 on the circular ring-shaped support ring 10, and the three mounting and positioning bosses 50 are symmetrically distributed along the pendulum axis. The surface of the boss has a high-viscosity molecular material film. The positioning circular notch 10a is semi-circular or U-shaped, located at the outer edge of the support ring for mounting the pendulum sheet and on the axis of the overall pendulum axis. Therefore, in the assembly process, it can be directly aligned with other assemblies along this axis, and the pendulum sheet can rotate around the center of this positioning circular notch to compensate for the offset of the axis by other structures.

[0040] The edge part of the flexure beam is circular arc-shaped. The center position is 5.1 mm away from the output axis along the direction parallel to the output axis, and the radius R is 1.9 mm. The root of the conical flexure beam is connected to the circular ring-shaped support ring, and the tip of the conical flexure beam is connected to the pendulum tongue. The gap between the three mounting bosses on the support ring and the pendulum tongue is 0.08 mm, and the edges are all connected by circular arcs. The surface of the boss is prepared with a high-viscosity polymer material polyacrylamide film.

[0041] The structure of the quartz pendulum piece is realized by the following technological methods.

[0042] The first step: Use the laser cutting method to perform hollowing treatment on the set area of the quartz glass (specifically including: the central hole, positioning circular groove, and the windows between the pendulum tongue, flexible beam, and support ring on the quartz glass), thereby manufacturing the pendulum tongue 30, the initial conical flexible beam 20, and the support ring 10.

[0043] The second step: Chemically etch the initial conical flexible beam 20 with a hydrofluoric acid etching solution to obtain the final conical flexible beam 20. The hydrofluoric acid etching solution is prepared by mixing hydrofluoric acid and ammonium fluoride in a ratio of 2:1, and the etching temperature is 32 °C;

[0044] The third step: Use picosecond laser to machine the narrow slit between the pendulum tongue and the boss. The processing frequency of the picosecond laser is 400 kHz, and the processing power is 7 W;

[0045] The fourth step: Use the magnetron sputtering coating method to deposit the conductive gold area 40 on the pendulum tongue 30, the conical flexible beam 20, and the support ring 10 respectively;

[0046] The fifth step: Prepare the viscous friction film 60 at the boss part. The viscous friction film layer (polyacrylamide, high molecular weight polyethylene glycol, or hydroxypropyl cellulose material) on the boss is obtained by the method of heating and pressing the film.

[0047] In summary, the present invention provides a structure of a quartz pendulum piece and its processing method. Compared with the prior art, the structure of the quartz pendulum piece has the following advantages.

[0048] First, increase the area of the boss, make the gap between the boss and the pendulum tongue be 0.08 mm to 0.1 mm, and after adding the new viscous friction film, the pre-tightening force applied to the upper and lower torque motors and the pendulum piece boss during the original accelerometer core assembly is reduced to 60% of the original. That is, the original assembly stress is reduced, thereby reducing the stress of the interference torque transmitted to the pendulum piece and ensuring reliable assembly and application.

[0049] Second, the root of the conical flexible beam is connected to the circular support ring, increasing the support strength of the flexible beam; the tip of the conical flexible beam is connected to the pendulum tongue, increasing the self-adjusting ability of the beam when the pendulum tongue is interfered by external forces, and reducing the damage caused by accidental torsional strain to the minimum.

[0050] Third, the positioning circular groove on the quartz pendulum piece structure of the present invention enables direct alignment with other fittings through this axis during the assembly process, and the pendulum piece can rotate around the center of this positioning circular groove to compensate for the offset of the axis by other structures.

[0051] For ease of description, spatial relative terms such as "above", "over", "on the upper surface", "upper" etc. can be used here to describe the spatial positional relationship of a device or feature shown in the figure with other devices or features. It should be understood that the spatial relative terms are intended to encompass different orientations in use or operation in addition to the orientation depicted in the figure. For example, if the device in the attached drawing is inverted, the device described as "above" or "over" other devices or structures will then be positioned "below" or "under" other devices or structures. Thus, the exemplary term "above" can include both the orientations of "above" and "below". The device can also be positioned in other different ways (rotated 90 degrees or in other orientations), and the corresponding interpretations of the spatial relative descriptions used here should be made accordingly.

[0052] In addition, it should be noted that using words such as "first", "second" etc. to define components is only for the convenience of differentiating the corresponding components. Without additional declaration, the above words have no special meaning, so it cannot be understood as a limitation on the protection scope of the present invention.

[0053] The above are only the preferred embodiments of the present invention and are not used to limit the present invention. For those skilled in the art, the present invention can have various changes and modifications. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention should be included within the protection scope of the present invention.

Claims

1. A quartz pendulum piece, characterized in that, The quartz pendulum piece includes: A support ring (10), the support ring (10) having a positioning circular notch (10a); Two elliptical flexible beams (20), the two elliptical flexible beams (20) being symmetrically arranged with respect to the pendulum axis of the quartz pendulum piece. The cross-section of any one of the elliptical flexible beams (20) is formed by connecting a first straight segment (21), a first arc segment (22), a second straight segment (23), and a second arc segment (24) end to end. The width of the cross-section of any one of the elliptical flexible beams (20) gradually decreases from the first straight segment (21) to the second straight segment (23). The ends of the two elliptical flexible beams (20) formed by the first straight segments (21) are both connected to the support ring (10); A pendulum tongue (30), the pendulum tongue (30) being connected to the ends of the two flexible beams formed by the second straight segments (23); Conductive gold regions (40), the conductive gold regions (40) being respectively arranged on the pendulum tongue (30), the elliptical flexible beams (20), and the support ring (10); Multiple bosses (50), the multiple bosses (50) being spaced apart on the support ring (10) and protruding towards the pendulum tongue (30).

2. The quartz pendulum piece according to claim 1, characterized in that, The quartz pendulum piece further includes a viscous friction film (60), the viscous friction film (60) covering the surfaces of the multiple bosses (50).

3. The quartz pendulum sheet according to claim 2, characterized in that, The material of the viscous friction film (60) includes polyacrylamide, polyethylene glycol, or hydroxypropyl cellulose.

4. The quartz pendulum piece according to any one of claims 1 to 3, characterized in that, The gap range between any one of the bosses (50) and the pendulum tongue (30) is 0.08 mm to 0.1 mm.

5. The quartz pendulum piece according to claim 4, characterized in that, The distance between the center position of the first arc segment (22) or the second arc segment (24) of any one of the elliptical flexible beams (20) and the output axis along the direction parallel to the output axis is 4.4 mm to 6.1 mm, and the radius of the first arc segment (22) or the second arc segment (24) is 1.7 mm to 2.4 mm.

6. A method for processing a quartz pendulum piece, characterized in that The quartz pendulum piece processing method is used to process the quartz pendulum piece according to any one of claims 1 to 5.

7. The method for processing a quartz pendulum sheet according to claim 6, wherein The quartz pendulum piece processing method includes: Performing a hollowing process on a set area of quartz glass by means of sandblasting blanking or laser cutting to produce the pendulum tongue (30), initial elliptical flexible beams (20), and support ring (10); Chemically etching the initial elliptical flexible beams (20) with an etching solution to obtain the final elliptical flexible beams (20); processing the support ring (10) with the etching solution to generate bosses (50); Obtaining a narrow slit between the pendulum tongue (30) and the bosses (50) by means of a picosecond laser processing method; Depositing conductive gold regions (40) on the pendulum tongue (30), the elliptical flexible beams (20), and the support ring (10) respectively by means of a magnetron sputtering coating method; Preparing a viscous friction film (60) on the surface of the bosses (50).

8. The quartz pendulum processing method according to claim 7, characterized in that The etching solution is prepared by mixing hydrofluoric acid and ammonium fluoride in a ratio of 2:1, and the etching temperature of the etching solution is 32°C to 36°C.

9. The quartz pendulum processing method according to claim 7, characterized in that, The picosecond laser processing frequency is 400 kHz to 480 kHz, and the processing power is 4 W to 8 W.

10. The quartz pendulum processing method according to claim 7, characterized in that, The viscous friction film (60) is obtained by means of hot casting, hot film pressing, normal temperature film pressing or extrusion curing.

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