Coaxial valve body of limited volume

Abstract

A compact valve body for chemical containers, wherein the coaxial valve body has a housing that can accommodate three valve control mechanisms, thus allowing for fast, efficient purging without the need for additional external conduits, valves, and coaxial syringes. The advantage is that the amount of wetted surface area within the valve body is greatly reduced, resulting in a significant reduction in the time spent purging the system, thus allowing for faster replacement of chemical containers.

Description

[0001] Cross Reference to Related Applications

[0002] This patent application claims priority to U.S. Provisional Patent Application No. 62 / 987,128, filed March 9, 2020, and U.S. Provisional Patent Application No. 63 / 055,869, filed July 23, 2020. TECHNICAL FIELD

[0003] The present invention relates to valve bodies. BACKGROUND

[0005] The semiconductor manufacturing industry requires various types of chemicals and processes, while at the same time, the pure chemicals need to be supplied continuously as per the requirements of the semiconductor equipment. These requirements necessitate a method for periodic and safe chemical container replacement within the chemical delivery system.

[0006] The dead legs present in the operation and design of large conduits increase the purging time required for safe replacement of these chemical containers, while at the same time reducing the purging efficiency. Dead legs are sections of the chemical delivery system design where the purging gas does not reach effectively, thus reducing the purging efficiency and safety of the system during chemical container replacement and system maintenance.

[0007] The presence of chemicals with lower vapor pressure and high purity, such as tetra(dimethylamino) titanium (TDMAT), amplifies these deficiencies in the chemical delivery system design. Chemicals of this type have historically been purged using solvent chemicals, as disclosed in U.S. Patent No. 5,964,230 and U.S. Patent No. 6,138,691.

[0008] The use of low volume block valves, as described below, eliminates the need for solvent purging and instead uses high pressure, high velocity purging gas and inline co-axial lines. The block valve design also includes the use of vacuum suction and purging gas evacuation. This low volume block valve effectively eliminates any dead legs in the purging conduit design, thus allowing for increased purging efficiency during chemical container replacement. SUMMARY

[0009] In one aspect, disclosed herein is a valve body comprising: a housing (114) having a first side (116) and a second side (126) opposite the first side (116), wherein the first side (116) includes a first cylindrical recess (118) for housing a valve control mechanism, wherein the first cylindrical recess (118) includes a surface (120) and a first opening (122) and a second opening (124) in the surface (120), each of which is a terminal end of a conduit, wherein the first opening is in fluid communication with a T-shaped connection (146) that is in fluid communication with a second conduit (148) having a first portion (150) and a second portion (152), wherein the second opening (124) is in fluid communication with a bleed port (178) on the second side (126) of the housing (114); a third side (128) adjacent the first side (116) and a fourth side (138) opposite the third side (128), wherein the third side (128) includes a second cylindrical recess (130) for housing a valve control mechanism, wherein the second cylindrical recess (130) includes a surface (132) and a first opening (134) and a second opening (136) in the surface, each of which is a terminal end of a conduit, wherein the first opening (134) is in fluid communication with the first portion (150) of the second conduit (148) and the second opening (136) is in fluid communication with an opening (204) on the fourth side (138) of the housing (114); a fifth side (140) and a sixth side (142) opposite the fifth side (140), wherein the second portion (152) of the second conduit (148) is in fluid communication through a conduit with an opening (166) on the fifth side (140) of the housing (114) via a first bend (162); and an angled seventh side (158) adjacent the first side (116) and the fourth side (138), wherein the angled seventh side (158) includes a third cylindrical recess (154) for housing a valve control mechanism, wherein the third cylindrical recess (154) includes a surface (184) and a first opening (174) and a second opening (176) in the surface (184), each of which is a terminal end of a conduit, wherein the first opening (174) is in fluid communication with an opening (208) via a first conduit portion (194) through a second bend (196) on the fifth side (140) of the housing (114), the second opening (176) is in fluid communication with an opening (206) on the second side (126) of the housing (114) via a third bend (190) and a second conduit portion (188) through a conduit (186).

[0010] In another aspect, disclosed herein is a system comprising: a valve body comprising: a housing (114) having a first side (116) and a second side (126) opposite the first side (116), wherein the first side (116) includes a first cylindrical recess (118) for housing a valve control mechanism, wherein the first cylindrical recess (118) includes a surface (120) and a first opening (122) and a second opening (124) in the surface (120), each of which is a terminal end of a conduit, wherein the first opening is in fluid communication with a T-shaped connection (146) that is in fluid communication with a second conduit (148) having a first portion (150) and a second portion (152), wherein the second opening (124) is in fluid communication with a bleed port (178) on the second side (126) of the housing (114); a first valve control mechanism located in the first cylindrical recess (118) of the first side (116); a third side (128) adjacent to the first side (116) and a fourth side (138) opposite the third side (128), wherein the third side (128) includes a second cylindrical recess (130) for housing a valve control mechanism, wherein the second cylindrical recess (130) includes a surface (132) and a first opening (134) and a second opening (136) in the surface (132), each of which is a terminal end of a conduit, wherein the first opening (134) is in fluid communication with the first portion (150) of the second conduit (148) and the second opening (136) is in fluid communication with an opening (204) on the fourth side (138) of the housing (114); a second valve control mechanism located in the second cylindrical recess (130) of the third side (128); a fifth side (140) and a sixth side (142) opposite the fifth side (140), wherein the first portion (150) of the second conduit (148) is in fluid communication with an opening (166) on the fifth side (140) of the housing (114) via a first bend (162);an angled seventh side (158) adjacent to the first side (116) and the fourth side (138), wherein the angled seventh side (158) includes a third cylindrical recess (154) for housing a valve control mechanism, wherein the third cylindrical recess (154) includes a surface (184) and a first opening (174) and a second opening (176) in the surface (184), each of which is an end of a conduit, wherein the first opening (174) is in fluid communication with an opening (208) on the fifth side (140) of the housing (114) via a second bend (196) through a first conduit portion (194), the second opening (176) is in fluid communication with an opening (206) on the second side (126) of the housing (114) via a third bend (190) and a second conduit portion (188) through a conduit (186); and a third valve control mechanism located in the third cylindrical recess (154) of the angled seventh side (158).

[0011] In yet another aspect, disclosed herein is a method of performing a purge step in a valve body after the valve body undergoes a fluid flow step, wherein the valve body is in fluid communication with a vessel, the valve body comprising: a housing (114) having a first side (116) and a second side (126) opposite the first side (116), wherein the first side (116) includes a first cylindrical recess (118) for housing a valve control mechanism, wherein the first cylindrical recess (118) includes a surface (120) and a first opening (122) and a second opening (124) in the surface (120), each of which is a terminal end of a conduit, wherein the first opening is in fluid communication with a T-shaped connection (146) that is in fluid communication with a second conduit (148) having a first portion (150) and a second portion (152), wherein the second opening (124) is in fluid communication with a vent (178) on the second side (126) of the housing (114); a first valve control mechanism located in the first cylindrical recess (118) of the first side (116); a third side (128) adjacent to the first side (116) and a fourth side (138) opposite the third side (128), wherein the third side (128) includes a second cylindrical recess (130) for housing a valve control mechanism, wherein the second cylindrical recess (130) includes a surface (132) and a first opening (134) and a second opening (136) in the surface (132), each of which is a terminal end of a conduit, wherein the first opening (134) is in fluid communication with the first portion (150) of the second conduit (148) and the second opening (136) is in fluid communication with an opening (204) on the fourth side (138) of the housing (114); a second valve control mechanism located in the second cylindrical recess (130) of the third side (128); a fifth side (140) and a sixth side (142) opposite the fifth side (140), wherein the first portion (150) of the second conduit (148) is in fluid communication with an opening (166) on the fifth side (140) of the housing (114) via a first bend (162);a seventh angled side (158) adjacent to the first side (116) and the fourth side (138), wherein the seventh angled side (158) includes a third cylindrical recess (154) for housing a valve control mechanism, wherein the third cylindrical recess (154) includes a surface (184) and a first opening (174) and a second opening (176) in the surface (184), each of which is an end of a conduit, wherein the first opening (174) is in fluid communication with an opening (208) on the fifth side (140) of the housing (114) via a second bend (196) through a first conduit portion (194), the second opening (176) is in fluid communication with an opening (206) on the second side (126) of the housing (114) via a third bend (190) and a second conduit portion (188) through a conduit (186), wherein the opening (206) on the second side (126) of the housing (114) is in fluid communication with a purge gas source (159); and a third valve control mechanism in the third cylindrical recess (154) of the seventh angled side (158); the method comprising the steps of: replacing a container; engaging the second valve control mechanism to close the first opening (134) in the surface (132) of the second cylindrical recess (130) of the third side (128) and isolate the second opening (136) in the surface (132) of the second cylindrical recess (130) of the third side (128); disengaging the first valve control mechanism to open the first opening (122) in the surface (120) of the first cylindrical recess (118) of the first side (116) and open the second opening (124) in the surface (120) of the first cylindrical recess (118) of the first side (116); disengaging the third valve control mechanism to open the first opening (174) in the surface (184) of the third cylindrical recess (154) of the seventh angled side (158) and open the second opening (176) in the surface (184) of the third cylindrical recess (154) of the seventh angled side (158);and flowing a high pressure purge gas through the opening (206) on the second side (126) of the housing (114) such that the purge gas flows through the second opening (176) in the surface (184) of the third cylindrical recess (154) of the angled seventh side (158), then through the first opening (174) in the surface (184) of the third cylindrical recess (154) of the angled seventh side (158) to exit the inner coaxial portion (183) of the coaxial conduit and through the first opening (122) in the surface (120) of the first cylindrical recess (118) of the first side (116) to the outer coaxial portion of the coaxial conduit and into the second opening (124) in the surface (120) of the first cylindrical recess (118) of the first side (116) to the bleed (178) on the second side (126) of the housing (114).

[0012] Embodiments of the present invention can be used individually or in combination with each other. BRIEF DESCRIPTION OF DRAWINGS

[0013] FIG. 1 A prior art solvent purge system is shown which includes a solvent purge manifold to a main vessel manifold system which includes two independent valves and a coaxial syringe connection;

[0014] FIG. 2 A prior art high pressure purge manifold to a main vessel manifold system is shown which includes two independent valves and a coaxial syringe connection consisting of three independent valve control mechanisms;

[0015] FIG. 3 Yet another prior art system is shown which includes a valve body with a dual valve control mechanism;

[0016] FIG. 4 A valve body of the present invention is shown;

[0017] FIG. 5 An axial view of the valve body shown; FIG. 4

[0018] A view of the valve body shown taken along line A-A; FIG. 6 FIG. 5 A view of the valve body shown taken along line B-B;

[0019] FIG. 7 FIG. 6 A view of the valve body shown taken along line B-B;

[0020] FIG. 8 Another view of the valve body shown; FIG. 4 ​​​

[0021] FIG. 9 Fig. 1 shows a perspective view of a valve body according to the present invention; FIG. 8 Fig. 2 shows a view of the valve body of Fig. 1 along the line C-C;

[0022] FIG. 10 Fig. 3 shows a view of the valve body of Fig. 1 along the line D-D; FIG. 8 Fig. 4 shows a view of the valve body of Fig. 1 along the line E-E;

[0023] FIG. 11 Fig. 5 shows a schematic view of the valve body of the present invention with respect to its mounting point on a container, which is located below a chimering. DETAILED DESCRIPTION

[0024] The following detailed description is provided to provide a more complete understanding of the preferred exemplary embodiments of the application, and is not intended to limit the scope, applicability or configuration of the application. Rather, the following detailed description of the preferred exemplary embodiments of the application is provided for the purpose of illustrating preferred exemplary embodiments of the application. Various changes can be made in the function and arrangement of elements without departing from the spirit and scope of the application as set forth in the appended claims.

[0025] For the purposes of this specification and the appended claims, the term "high speed purge" refers to a purging step using a purge gas delivered at a rate of 100 liters / minute or greater.

[0026] For the purposes of this specification and the appended claims, the term "conduit" refers to one or more structures through which fluid can be transported between two or more components of a system. For example, a conduit can include pipes, tubes, manifolds, and combinations thereof that transport liquids and / or gases at different pressures throughout a system.

[0027] For the purposes of this specification and the appended claims, the term "fluid flow communication" refers to a property of connection between two or more components that allows liquids and / or gases to be transported between the components in a controlled manner. Coupling two or more components so that they are in fluid flow communication with each other can include any suitable means known in the art, such as using flanged conduits, gaskets, and / or bolts.

[0028] For the purposes of this specification and the appended claims, the term "coax" or "coaxial" refers to an arrangement of tubes having an inner tube located inside an outer tube in a concentric manner.

[0029] The use of the terms "a" and "an" and "the" in the context of describing the invention (especially in the context of the following claims) are to be construed to cover both the singular and the plural, unless otherwise indicated herein or clearly contradicted by context. The terms "comprising," "having," "including," and "containing" are to be construed as open-ended terms (i.e., meaning "including, but not limited to,") unless otherwise noted. Recitation of ranges of values herein are merely intended to serve as a shorthand method of referring individually to each separate value falling within the range, unless otherwise indicated herein, and each separate value is incorporated in the specification as if it were individually recited herein. All methods described herein can be performed in any suitable order unless otherwise indicated herein or otherwise clearly contradicted by context. The use of any and all examples, or exemplary language (e.g., "such as") provided herein, is intended merely to better illuminate the application and does not pose a limitation on the scope of the application unless otherwise claimed. No language in the specification should be construed as indicating any non-claimed element as essential to the practice of the application.

[0030] Embodiments are described herein, including the best mode known to the inventors for practicing the application. Aspects of such embodiments can be modified in various ways and still fall within the scope of the application. Applications described herein include all such modifications. These and other modifications are within the scope of the application as set forth in the claims. The application is not limited to the embodiments described above, but by the claims below determined only. Accordingly, many modifications can be made by those skilled in the art without departing from the scope of the application. Therefore, the scope of the application is to be interpreted only in conjunction with the appended claims and their legal equivalents.

[0031] As used herein, "about" is intended to correspond to ±5% of the stated value.

[0032] An improved valve body design and system thereof is disclosed herein, which can be used to improve the purging efficiency for all wetted surfaces connected between a chemical vessel and a manifold or between pairs of manifolds. The improved valve body design includes several features that can be used to significantly shorten the time required for purging all wetted surfaces within the purging system. The valve body design will eliminate dead legs or introduce only minimal dead legs, and provide full impingement on any minimal dead legs. It also allows for a significant reduction in the length of the venting path and, therefore, a significant reduction in the total amount of conduit surface area wetted by liquid chemicals.

[0033] A valve body disclosed herein includes a housing (114) having a first side (116) and a second side (126) opposite the first side (116), wherein the first side (116) includes a first cylindrical recess (118) for housing a valve control mechanism, wherein the first cylindrical recess (118) includes a surface (120) and a first opening (122) and a second opening (124) in the surface (120), each of which is a terminal end of a conduit, wherein the first opening is in fluid communication with a T-shaped connection (146) that is in fluid communication with a second conduit (148) having a first portion (150) and a second portion (152), wherein the second opening (124) is in fluid communication with a bleed port (178) on the second side (126) of the housing (114); a third side (128) adjacent the first side (116) and a fourth side (138) opposite the third side (128), wherein the third side (128) includes a second cylindrical recess (130) for housing a valve control mechanism, wherein the second cylindrical recess (130) includes a surface (132) and a first opening (134) and a second opening (136) in the surface (132), each of which is a terminal end of a conduit, wherein the first opening (134) is in fluid communication with the first portion (150) of the second conduit (148) and the second opening (136) is in fluid communication with an opening (204) on the fourth side (138) of the housing (114); a fifth side (140) and a sixth side (142) opposite the fifth side (140), wherein the second portion (152) of the second conduit (148) is in fluid communication through a conduit with an opening (166) on the fifth side (140) of the housing (114) via a first bend (162); and an angled seventh side (158) adjacent the first side (116) and the fourth side (138), wherein the angled seventh side (158) includes a third cylindrical recess (154) for housing a valve control mechanism, wherein the third cylindrical recess (154) includes a surface (184) and a first opening (174) and a second opening (176) in the surface (184), each of which is a terminal end of a conduit, wherein the first opening (174) is in fluid communication with an opening (208) on the fifth side (140) of the housing (114) via a second bend (196) through a first conduit portion (194), the second opening (176) is in fluid communication with an opening (206) on the second side (126) of the housing (114) via a third bend (190) and a second conduit portion (188) through a conduit (186).

[0034] The valve body according to the embodiments disclosed herein achieves these improvements by having a set of three valves located within a single valve body or housing, with two valve seats oriented 90 degrees apart from each other (e.g., on adjacent surfaces of a housing in the shape of a rectangular prism), and a third valve seat independently located on another side face. When used in a system in which the valve body is connected to a main vessel, the presence of this set of three valves ensures that all dead legs are completely impacted during the purging step, thereby allowing a more efficient purging process. Specifically, the conduit through which the purging gas enters the system is coaxially aligned with the port opening (which is in fluid flow communication with the vessel). Because this port opening is closed during the purging process, the very small dead leg located coaxially with this port opening will be completely impacted by the purging gas when the port opening is closed. As a result, less purging gas can be used, the purging process can occur more quickly, and energy savings can be realized. This is in contrast to known prior art systems in which the valve seats are located away from the vessel opening (see FIG. 1 and 2 ). In addition, locating the valves in a single valve body allows the liquid (bleed) path to be kept very short, thereby greatly reducing the amount of conduit surface area that is wetted and thus must be dried. This is in contrast to known prior art systems having a liquid (bleed) path (which must be dried) that is much longer (see FIG. 2 ).

[0035] FIG. 1 is a visual representation of a prior art system 10 that includes a solvent source 66 in fluid flow communication with a conduit 40 that is in fluid flow communication with a valve 38. Valve 38 is in fluid flow communication with conduit 17 via connection 16 that is in fluid flow communication with conduit 15 via bend 26. Conduit 15 is in fluid flow communication with an inner coaxial portion of coaxial syringe 36 and is in fluid flow communication with vessel 30 via conduit 29.

[0036] Fluid flow outlet 60 is in fluid flow communication with conduit 59 that is in fluid flow communication with valve 68. Valve 68 is in fluid flow communication with conduit 47 via connection 45. Conduit 47 is in fluid flow communication with an outer coaxial portion of coaxial syringe 36 and is in fluid flow communication with vessel 30 via conduit 29.

[0037] FIG. 2 is a visual representation of a prior art system 70 that includes a purge source 101 in fluid flow communication with conduit 97 that is in fluid flow communication with valve 84 via bend 92. Valve 84 is in fluid flow communication with conduit 79 and is in fluid flow communication with an inner coaxial portion of coaxial syringe 88 and is in fluid flow communication with vessel 90 via conduit 89.

[0038] Fluid flow outlet 98 is in fluid flow communication with conduit 74 which is in fluid flow communication with valve 72 via connection 83. Valve 72 is dual actuated to control single port connections 82, 83 by actuators 99, 100. During this operation, actuator 99 is open and 100 is closed to allow fluid flow communication to connection 75 and in fluid flow communication with conduit 93. Conduit 93 is in fluid flow communication with the outer coaxial portion of coaxial syringe 88 and via conduit 89 with container 90.

[0039] Drain 96 is in fluid flow communication with conduit 95 which is in fluid flow communication with valve 72 via connection 82. Valve 72 is dual actuated to control single port connections 82, 83 by actuators 99, 100. During this operation, actuator 99 is open and 100 is closed to allow fluid flow communication to connection 75 and in fluid flow communication with conduit 93. Conduit 93 is in fluid flow communication with the outer coaxial portion of coaxial syringe 88 and via conduit 89 with container 90.

[0040] Prior art FIG. 3 The valve body shown in prior art FIG. 3 is a refill manifold to the main container manifold system 110 which includes a valve body 112 according to the improvements of the present invention which will now be described in detail.

[0041] Valve body 112 according to the present invention includes a housing 114 which is approximately a rectangular prism shape, although other housing shapes are possible within the scope of the present invention, typically including a cube, sphere or oval or irregular shape. In this embodiment, the housing 114 includes a first side 116 which includes a valve seat 117 which includes a first cylindrical recess 118. The first cylindrical recess 118 includes a surface 120 where openings 122, 124 terminate and a second side 126 which is opposite the first side 116. The first cylindrical recess 118 is adapted to seat a valve control mechanism (not shown) therein. The valve control mechanism allows selective opening and closing of opening 122 via a septum which is fully engageable with opening 122.

[0042] The opening 122 is connected in fluid flow communication to a conduit portion 144, which is connected in fluid flow communication to a T-connection 146. The T-connection 146 is also connected in fluid flow communication to a conduit portion 148 comprising a first portion 150 and a second portion 152. The valve body 112 further comprises a third side 128 (the third side 128 includes a valve seat 129 comprising a second cylindrical recess 130. The second cylindrical recess 130 includes a surface 132 at which openings 134, 136 terminate), a fourth side 138 opposite the third side 128, a fifth side 140, and a sixth side 142 opposite the fifth side 140. The second cylindrical recess 130 is adapted to seat a second valve control mechanism (not shown) therein. The second valve control mechanism is used to selectively open and close the opening 134 via a diaphragm that can fully engage the opening 134. The opening 134 is in fluid flow communication with the first portion 150 of the conduit portion 148, and the opening 136 is in fluid flow communication with a conduit portion 160. In this embodiment, the first cylindrical recess 118, the second cylindrical recess 130 of the valve seats 117, 129 adapted for valve control mechanism attachment are located on adjacent sides of the housing 114 (i.e., the first side 116 and the third side 128), and the openings 134, 154 are axially aligned, i.e., the center points of the openings 134, 154 are aligned along the same linear axis (via a line that can be drawn through the center of volume of the conduit portion 148).

[0043] The second portion 152 of the conduit portion 148 is in fluid flow communication with an opening 154 on the fourth side 138 of the valve body 112, and the opening 154 is in fluid flow communication with both a refill manifold 158 and a purge gas source 159 via a connection 156. A conduit portion 160 is in fluid flow communication with a conduit portion 164 via a first bend 162, and the conduit portion 164 is in fluid flow communication with an opening 166 on the second side 126 of the housing 114. The opening 166 is in fluid flow communication with a container 170 via a connection 168. The opening 124 on the surface 120 of the first cylindrical recess 118 is in fluid flow communication with a conduit portion 172, which is in fluid flow communication with a conduit portion 176 via a bend 174. The conduit portion 176 is in fluid flow communication with an opening 178 on the fifth side 140 of the housing 114, and the opening 178 is in fluid flow communication with a vent 182 via a connection 180. In this embodiment, the T-shaped connection 146 and the first bends 162, 174 are oriented at a 90-degree angle to the respective connected conduit portions. It will be appreciated that in alternative embodiments, the T-shaped connection 146 and / or the first bends 162, 174 need not be oriented at a 90-degree angle to the respective connected conduit portions, but can be oriented at any angle from 30 to 135 degrees to the respective connected conduit portions.

[0044] However, the valve body disclosed in U.S. Patent No. 10,663,072 still suffers from the drawback of only being able to move liquids or gases through three ports controlled by two actuators. The present invention, on the other hand, can move liquids or gases through four ports controlled by three separate actuators. In addition to improved port control, the present invention can supply purge gas directly to the container connection, fluid flow path, and vent due to the use of coaxial tubing within the valve body. The smaller tubing within the coaxial portion of the valve concentrates the purge gas pressure to a higher pressure, which allows for faster purging of the valve body. The present invention builds upon the disclosure of U.S. Patent No. 10,663,072.

[0045] Referring now to FIG. 4 to 10 The detailed description includes a purge manifold 110 connected to a main container manifold system according to the improved valve body 112 of the present invention.

[0046] The valve body 112 according to the present application comprises a housing 114 that is a multi-sided object, although other housing shapes are possible within the scope of the present application, typically including a cube, a sphere, or an oval or irregular shape. In this embodiment, the housing 114 comprises a first side 116 that includes a valve seat 117 that comprises a first cylindrical recess 118. The first cylindrical recess 118 comprises a surface 120 at which openings 122, 124 terminate, and a second side 126 that is opposite the first side 116. The first cylindrical recess 118 is adapted to house a valve control mechanism (not shown) therein. The valve control mechanism allows selective opening and closing of the opening 122 via a diaphragm that can fully engage the opening 122.

[0047] The opening 122 is connected in fluid flow communication to a conduit portion 144 that is connected in fluid flow communication to a T-connection 146. The T-connection 146 is also connected in fluid flow communication with a conduit portion 148 that comprises a first portion 150 and a second portion 152. The valve body 112 also comprises a third side 128 that includes a valve seat 129 that comprises a second cylindrical recess 130 that comprises a surface 132 at which openings 134, 136 terminate, a fourth side 138 that is opposite the third side 128, a fifth side 140, and a sixth side 142 that is opposite the fifth side 140. The second cylindrical recess 130 is adapted to house a second valve control mechanism (not shown) therein. The second valve control mechanism is used to selectively open and close the opening 134, for example, with a diaphragm. The opening 134 is in fluid flow communication with the first portion 150 of the conduit portion 148, and the opening 136 is in fluid flow communication with a conduit portion 198. The conduit portion 198 is in fluid flow communication with an opening 204 located on the fourth side 138 of the housing 114, and the opening 204 is in fluid flow communication with a fluid flow outlet 202 via a connection 200. In this embodiment, the first cylindrical recess 118, the second cylindrical recess 130 of the valve seats 117, 129 that are adapted for attachment of the valve control mechanisms are located on adjacent sides (i.e., the first side 116 and the third side 128) of the housing of the valve body, rather than on opposite sides (as shown in the prior art embodiment of FIG. 2

[0048] ​Conduit portion 148 is in fluid flow communication with conduit portion 164 via first bend 162, and conduit portion 164 is in fluid flow communication with opening 166 on the fifth side 140 of the housing 114. Opening 166 is in fluid flow communication with face seal fitting 187 via reducing conduit 189, and with coaxial conduit 185, which is in fluid flow communication with opening 208. Opening 208 is in fluid flow communication with vessel 170 via connection 168. Opening 124 on surface 120 of first cylindrical recess 118 is in fluid flow communication with conduit portion 172. Conduit portion 172 is in fluid flow communication with opening 178 on the second side 126 of the housing 114, and opening 178 is in fluid flow communication with vent 182 via connection 180.

[0049] Further, the valve body 112 includes angled seventh side 158 containing valve seat 131, which includes third cylindrical recess 154. The third cylindrical recess 154 includes surface 184 where openings 174, 176 terminate, the second side 126 opposite the first side 116. The third cylindrical recess 154 accommodates a third valve control mechanism (not shown) disposed therein. The third valve control mechanism is used to selectively open and close opening 174. Opening 174 is in fluid flow communication with conduit portion 192. Conduit portion 192 is in fluid flow communication with first conduit portion 194 via second bend 196. First conduit portion 194 is in fluid flow communication with inner coaxial portion 183 (inner portion) inside face seal fitting 187 to outer coaxial conduit portion (outer portion) and conduit portion 168 to vessel 170 via opening 176, and conduit portion 186. Conduit portion 186 is in fluid flow communication with second conduit portion 188 via third bend 190, and second conduit portion 188 is in fluid flow communication with opening 206 on the second side 126 of the housing 114, and in fluid flow communication with purge gas source 159 via connection 156.

[0050] In the system 110, during normal fluid flow operation, the valve control mechanism (not shown) in the second cylindrical recess 130 is open. This allows fluid to flow from vessel 170 via conduit 168 and via opening 208 into coaxial conduit 185. Coaxial conduit 185 is the outer coaxial portion of face seal fitting 187, which allows fluid to flow through opening 166 and into conduits 164 and 148. With the valve control mechanism open (not shown), fluid can flow through opening 134 and into opening 136, and thus it can flow out of opening 204 via conduits 198 and 200 to fluid flow outlet 202. FIG. 4 to 10 ​

[0051] When the container 170 is empty and needs to be replaced, the valve control mechanism (not shown) in the second cylindrical recess 130 (third side) is closed. This closes the opening 134 and isolates the wetted system from the area to be purged. The valve control mechanisms (not shown) in the third cylindrical recess 154 and the first cylindrical recess 118 are both open, allowing the purge cycle to begin. The purge gas source 159 supplies purge gas through the opening 206 via conduit 156 and through the second conduit portion 188 and conduit 186. With the valve control mechanisms open (not shown), fluid can flow through the opening 174 and into the opening 176, thus it travels through the conduit 192 and the second bend 196 to exit the inner coaxial portion 183. The valve control mechanism (not shown) on the container will be closed and this purge step forces the high pressure purge gas to blow the fluid molecules from the connection of the opening 208 and forces it back through the coaxial conduit 185. The coaxial conduit 185 is the outer coaxial portion of the face seal 187 which allows the purge gas and fluid particles to flow through the opening 166 and into the conduits 164 and 148. With the valve control mechanism of the first cylindrical recess 118 open (not shown), the purge gas and fluid particles can flow through the opening 122 and into the opening 124, thus it can flow from the opening 178 through the conduits 172 and 180 to the vent 182.

[0052] Accordingly, disclosed herein is a system comprising: a valve body comprising: a housing (114) having a first side (116) and a second side (126) opposite the first side (116), wherein the first side (116) includes a first cylindrical recess (118) for housing a valve control mechanism, wherein the first cylindrical recess (118) includes a surface (120) and a first opening (122) and a second opening (124) in the surface (120), each of which is a terminal end of a conduit, wherein the first opening is in fluid communication with a T-shaped connection (146) that is in fluid communication with a second conduit (148) having a first portion (150) and a second portion (152), wherein the second opening (124) is in fluid communication with a bleed port (178) on the second side (126) of the housing (114); a first valve control mechanism located in the first cylindrical recess (118) of the first side (116); a third side (128) adjacent the first side (116) and a fourth side (138) opposite the third side (128), wherein the third side (128) includes a second cylindrical recess (130) for housing a valve control mechanism, wherein the second cylindrical recess (130) includes a surface (132) and a first opening (134) and a second opening (136) in the surface (132), each of which is a terminal end of a conduit, wherein the first opening (134) is in fluid communication with the first portion (150) of the second conduit (148) and the second opening (136) is in fluid communication with an opening (204) on the fourth side (138) of the housing (114); a second valve control mechanism located in the second cylindrical recess (130) of the third side (128); a fifth side (140) and a sixth side (142) opposite the fifth side (140), wherein the first portion (150) of the second conduit (148) is in fluid communication with an opening (166) on the fifth side (140) of the housing (114) via a first bend (162);an angled seventh side (158) adjacent to the first side (116) and the fourth side (138), wherein the angled seventh side (158) includes a third cylindrical recess (154) for housing a valve control mechanism, wherein the third cylindrical recess (154) includes a surface (184) and a first opening (174) and a second opening (176) in the surface (184), each of which is an end of a conduit, wherein the first opening (174) is in fluid communication with an opening (208) on the fifth side (140) of the housing (114) via a second bend (196) through a first conduit portion (194), the second opening (176) is in fluid communication with an opening (206) on the second side (126) of the housing (114) via a third bend (190) and a second conduit portion (188) through a conduit (186); and a third valve control mechanism located in the third cylindrical recess (154) of the angled seventh side (158).

[0053] Accordingly, also disclosed herein is a method of performing a purge step in a valve body after the valve body undergoes a fluid flow step, wherein the valve body is in fluid communication with a vessel, the valve body comprising: a housing (114) having a first side (116) and a second side (126) opposite the first side (116), wherein the first side (116) includes a first cylindrical recess (118) for housing a valve control mechanism, wherein the first cylindrical recess (118) includes a surface (120) and a first opening (122) and a second opening (124) in the surface (120), each of which is a terminal end of a conduit, wherein the first opening is in fluid communication with a T-shaped connection (146) that is in fluid communication with a second conduit (148) having a first portion (150) and a second portion (152), wherein the second opening (124) is in fluid communication with a vent (178) on the second side (126) of the housing (114); a first valve control mechanism located in the first cylindrical recess (118) of the first side (116); a third side (128) adjacent the first side (116) and a fourth side (138) opposite the third side (128), wherein the third side (128) includes a second cylindrical recess (130) for housing a valve control mechanism, wherein the second cylindrical recess (130) includes a surface (132) and a first opening (134) and a second opening (136) in the surface (132), each of which is a terminal end of a conduit, wherein the first opening (134) is in fluid communication with the first portion (150) of the second conduit (148) and the second opening (136) is in fluid communication with an opening (204) on the fourth side (138) of the housing (114); a second valve control mechanism located in the second cylindrical recess (130) of the third side (128); a fifth side (140) and a sixth side (142) opposite the fifth side (140), wherein the first portion (150) of the second conduit (148) is in fluid communication with an opening (166) on the fifth side (140) of the housing (114) via a first bend (162);a seventh angled side (158) adjacent to the first side (116) and the fourth side (138), wherein the seventh angled side (158) includes a third cylindrical recess (154) for housing a valve control mechanism, wherein the third cylindrical recess (154) includes a surface (184) and a first opening (174) and a second opening (176) in the surface (184), each of which is an end of a conduit, wherein the first opening (174) is in fluid communication with an opening (208) on the fifth side (140) of the housing (114) via a second bend (196) through a first conduit portion (194), the second opening (176) is in fluid communication with an opening (206) on the second side (126) of the housing (114) via a third bend (190) and a second conduit portion (188) through a conduit (186), wherein the opening (206) on the second side (126) of the housing (114) is in fluid communication with a purge gas source (159); and a third valve control mechanism in the third cylindrical recess (154) of the seventh angled side (158); the method comprising the steps of: replacing a container; engaging the second valve control mechanism to close the first opening (134) in the surface (132) of the second cylindrical recess (130) of the third side (128) and isolate the second opening (136) in the surface (132) of the second cylindrical recess (130) of the third side (128); disengaging the first valve control mechanism to open the first opening (122) in the surface (120) of the first cylindrical recess (118) of the first side (116) and open the second opening (124) in the surface (120) of the first cylindrical recess (118) of the first side (116); disengaging the third valve control mechanism to open the first opening (174) in the surface (184) of the third cylindrical recess (154) of the seventh angled side (158) and open the second opening (176) in the surface (184) of the third cylindrical recess (154) of the seventh angled side (158);and flowing a high pressure purge gas through the opening (206) on the second side (126) of the housing (114) such that the purge gas flows through the second opening (176) in the surface (184) of the third cylindrical recess (154) of the angled seventh side (158), then through the first opening (174) in the surface (184) of the third cylindrical recess (154) of the angled seventh side (158) to exit the inner coaxial portion (183) of the coaxial conduit and through the first opening (122) in the surface (120) of the first cylindrical recess (118) of the first side (116) to the outer coaxial portion of the coaxial conduit (185) and into the second opening (124) in the surface (120) of the first cylindrical recess (118) of the first side (116) to the vent (178) on the second side (126) of the housing (114).

[0054] Unlike FIG. 1 the prior art system 10 shown, FIG. 4 The system 110 does not require the use of a hazardous solvent source when changing containers. The use of a high pressure purge gas is used to accomplish the same task, reducing the change of hazardous chemical exposure in the system and reducing the waste stream of hazardous chemical disposal.

[0055] In addition, unlike FIG. 2 the prior art system 70 shown, FIG. 4 to FIG. 10 The system 110 of does not require additional conduits, valves and a separate coaxial syringe. FIG. 4 to FIG. 10 The system 110 of uses all of these independent components and combines them into one small valve body. The benefit of this is that the amount of wetted surfaces within the valve body is greatly reduced. This significantly reduces the purge time and increases the speed of changing containers.

[0056] In addition, unlike FIG. 3 the prior art system 110 shown, FIG. 4 to 10 The system 110 of when changing containers, the coaxial syringe portion 187 can be used to flush the connection between the valve body 112 and the container 170 with high pressure purge gas. This allows the same valve to vent gas in one step and deliver fluid in another step after the tank change is complete. This is accomplished by combining three independent valve control mechanisms (not shown) into a single valve body while utilizing a coaxial high pressure purge device.

Claims

1. A valve body comprising: a housing (114) having a first side (116) and a second side (126) opposite the first side (116), wherein the first side (116) includes a first cylindrical recess (118) for housing a valve control mechanism, wherein the first cylindrical recess (118) includes a surface (120) and a first opening (122) and a second opening (124) in the surface (120), each of which is a terminal end of a conduit, wherein the first opening is in fluid communication with a T-shaped connection (146) that is in fluid communication with a second conduit (148) having a first portion (150) and a second portion (152), wherein the second opening (124) is in fluid communication with a bleed port (178) located on the second side (126) of the housing (114); a third side (128) adjacent the first side (116) and a fourth side (138) opposite the third side (128), wherein the third side (128) includes a second cylindrical recess (130) for housing a valve control mechanism, wherein the second cylindrical recess (130) includes a surface (132) and a first opening (134) and a second opening (136) in the surface (132), each of which is a terminal end of a conduit, wherein the first opening (134) is in fluid communication with the first portion (150) of the second conduit (148) and the second opening (136) is in fluid communication with an opening (204) located on the fourth side (138) of the housing (114); a fifth side (140) and a sixth side (142) opposite the fifth side (140), wherein the second portion (152) of the second conduit (148) is in fluid communication through a conduit with an opening (166) located on the fifth side (140) of the housing (114) via a first bend (162); and an angled seventh side (158) adjacent the first side (116) and the fourth side (138), wherein the angled seventh side (158) includes a third cylindrical recess (154) for housing a valve control mechanism, wherein the third cylindrical recess (154) includes a surface (184) and a first opening (174) and a second opening (176) in the surface (184), each of which is a terminal end of a conduit, wherein the first opening (174) is in fluid communication with an opening (208) located on the fifth side (140) of the housing (114) via a second bend (196) through a first conduit portion (194), the second opening (176) is in fluid communication with an opening (206) located on the second side (126) of the housing (114) via a third bend (190) and a second conduit portion (188) through a conduit (186).

2. The valve body of claim 1, wherein the opening (204) in the fourth side (138) of the housing (114) is in fluid communication with a fluid flow outlet (202) via a connection (200).

3. The valve body of claim 2, wherein the opening (166) on the fifth side (140) is in fluid communication with a face seal fitting (187) via a reduced diameter conduit (189) and with a coaxial conduit (185) that is in fluid communication with the opening (208) on the fifth side (140) of the housing (114).

4. The valve body of claim 3, wherein the opening (208) on the fifth side (140) of the housing (114) is in fluid communication with a vessel (170) via a connection (168).

5. The valve body of claim 1, wherein the opening (206) on the second side (126) of the housing (114) is in fluid communication with a purge gas source (159).

6. The valve body of claim 1, wherein the T-connection comprises a 90° angle.

7. The valve body of claim 1, wherein the T-connection comprises an angle from 30° to 135°.

8. A system comprising: a valve body comprising: a housing (114) having a first side (116) and a second side (126) opposite the first side (116), wherein the first side (116) comprises a first cylindrical recess (118) for housing a valve control mechanism, wherein the first cylindrical recess (118) comprises a surface (120) and a first opening (122) and a second opening (124) in the surface (120) each being an end of a conduit, wherein the first opening is in fluid communication with a T-connection (146) that is in fluid communication with a second conduit (148) having a first portion (150) and a second portion (152), wherein the second opening (124) is in fluid communication with a bleed port (178) on the second side (126) of the housing (114); a first valve control mechanism on the first cylindrical recess (118) of the first side (116); a third side (128) adjacent the first side (116) and a fourth side (138) opposite the third side (128), wherein the third side (128) comprises a second cylindrical recess (130) for housing a valve control mechanism, wherein the second cylindrical recess (130) comprises a surface (132) and a first opening (134) and a second opening (136) in the surface (132) each being an end of a conduit, wherein the first opening (134) is in fluid communication with the first portion (150) of the second conduit (148) and the second opening (136) is in fluid communication with an opening (204) on the fourth side (138) of the housing (114); a second valve control mechanism located in the third cylindrical recess (130) of the third side (128); a fifth side (140) and a sixth side (142) opposite the fifth side (140), wherein the first portion (150) of the second conduit (148) is in fluid communication with an opening (166) on the fifth side (140) of the housing (114) via a first bend (162); an angled seventh side (158) adjacent to the first side (116) and the fourth side (138), wherein the angled seventh side (158) includes a third cylindrical recess (154) for housing a valve control mechanism, wherein the third cylindrical recess (154) includes a surface (184) and a first opening (174) and a second opening (176) in the surface (184), each of which is an end of a conduit, wherein the first opening (174) is in fluid communication with an opening (208) on the fifth side (140) of the housing (114) via a second bend (196) through a first conduit portion (194), the second opening (176) is in fluid communication with an opening (206) on the second side (126) of the housing (114) via a third bend (190) and a second conduit portion (188) through a conduit (186); and a third valve control mechanism located in the third cylindrical recess (154) of the angled seventh side (158).

9. The system of claim 8, wherein the opening (204) in the fourth side (138) of the housing (114) is in fluid communication with a fluid flow outlet (202) via a connection (200).

10. The system of claim 9, wherein the opening (166) on the fifth side (140) is in fluid communication with a face seal fitting (187) via a reduced diameter conduit (189) and in fluid communication with a coaxial conduit (185) that is in fluid communication with the opening (208) on the fifth side (140) of the housing (114).

11. The system of claim 10, wherein the opening (208) on the fifth side (140) of the housing (114) is in fluid communication with a vessel (170) via a connection (168).

12. The system of claim 8, wherein the opening (206) on the second side (126) of the housing (114) is in fluid communication with a purge gas source (159).

13. The system of claim 8, wherein the T-connection comprises a 90° angle.

14. The system of claim 8, wherein the T-connection comprises an angle of 30° to 135°.

15. A method of performing a purge step in a valve body after the valve body undergoes a fluid flow step, wherein the valve body is in fluid communication with a vessel, the valve body comprising: a housing (114) having a first side (116) and a second side (126) opposite the first side (116), wherein the first side (116) includes a first cylindrical recess (118) for housing a valve control mechanism, wherein the first cylindrical recess (118) includes a surface (120) and a first opening (122) and a second opening (124) in the surface (120), each of which is a terminal end of a conduit, wherein the first opening is in fluid communication with a T-shaped connection (146) that is in fluid communication with a second conduit (148) having a first portion (150) and a second portion (152), wherein the second opening (124) is in fluid communication with a vent (178) on the second side (126) of the housing (114); a first valve control mechanism located in the first cylindrical recess (118) of the first side (116); a third side (128) adjacent the first side (116) and a fourth side (138) opposite the third side (128), wherein the third side (128) includes a second cylindrical recess (130) for housing a valve control mechanism, wherein the second cylindrical recess (130) includes a surface (132) and a first opening (134) and a second opening (136) in the surface, each of which is a terminal end of a conduit, wherein the first opening (134) is in fluid communication with the first portion (150) of the second conduit (148) and the second opening (136) is in fluid communication with an opening (204) on the fourth side (138) of the housing (114); a second valve control mechanism located in the second cylindrical recess (130) of the third side (128); a fifth side (140) and a sixth side (142) opposite the fifth side (140), wherein the first portion (150) of the second conduit (148) is in fluid communication with an opening (166) on the fifth side (140) of the housing (114) via a first bend (162); a sixth side (142) opposite the fifth side (140), wherein the first portion (150) of the second conduit (148) is in fluid communication with an opening (166) on the fifth side (140) of the housing (114) via a first bend (162); a seventh angled side (158) adjacent to the first side (116) and the fourth side (138), wherein the seventh angled side (158) includes a third cylindrical recess (154) for housing a valve control mechanism, wherein the third cylindrical recess (154) includes a surface (184) and a first opening (174) and a second opening (176) in the surface (184), each of which is an end of a conduit, wherein the first opening (174) is in fluid communication with an opening (208) on the fifth side (140) of the housing (114) via a second bend (196) through a first conduit portion (194), the second opening (176) is in fluid communication with an opening (206) on the second side (126) of the housing (114) via a third bend (190) and a second conduit portion (188) through a conduit (186), wherein the opening (206) on the second side (126) of the housing (114) is in fluid communication with a purge gas source (159); and a third valve control mechanism in the third cylindrical recess (154) of the seventh angled side (158); the method comprising the steps of: replacing the container; engaging the second valve control mechanism to close the first opening (134) in the surface (132) of the second cylindrical recess (130) in the third side (128) and isolate the second opening (136) in the surface (132) of the second cylindrical recess (130) in the third side (128); disengaging the first valve control mechanism to open the first opening (122) in the surface (120) of the first cylindrical recess (118) in the first side (116) and open the second opening (124) in the surface (120) of the first cylindrical recess (118) in the first side (116); disengaging the third valve control mechanism to open the first opening (174) in the surface (184) of the third cylindrical recess (154) in the seventh angled side (158) and open the second opening (176) in the surface (184) of the third cylindrical recess (154) in the seventh angled side (158); and passing through the second opening (176) in the surface (184) of the third cylindrical recess (154) in the angled seventh side (158), then through the first opening (174) in the surface (184) of the third cylindrical recess (154) in the angled seventh side (158) to exit the inner coaxial portion (183) of the coaxial conduit and pass through the first opening (122) in the surface (120) of the first cylindrical recess (118) in the first side (116) to the outer coaxial portion of the coaxial conduit and into the second opening (124) in the surface (120) of the first cylindrical recess (118) in the first side (116) to the bleed port (178) on the second side (126) of the housing (114).

16. The method of claim 15, wherein the opening (204) in the fourth side (138) of the housing (114) is in fluid communication with a fluid flow outlet (202) via a connection (200).

17. The method of claim 16, wherein the opening (166) in the fifth side (140) is in fluid communication with a face seal fitting (187) via a reduced diameter conduit (189) and with the coaxial conduit (185) which is in fluid communication with the opening (208) on the fifth side (140) of the housing (114).

18. The method of claim 17, wherein the opening (208) on the fifth side (140) of the housing (114) is in fluid communication with a vessel (170) via a connection (168).

19. The method of claim 15, wherein the opening (206) on the second side (126) of the housing (114) is in fluid communication with a purge gas source (159).

20. The method of claim 15, wherein the T-connection comprises a 90° angle.

21. The method of claim 15, wherein the T-connection comprises an angle of 30° to 135°.

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