A cavity surface treatment system and method for ultra-high purity chemical container

Abstract

The present invention discloses a cavity surface treatment system and method for an ultra-high purity chemical container, belonging to the field of chemical cleaning and drying, comprising a container turning system, a degreasing liquid system, a deionized initial washing liquid system, a polishing liquid system, a passivation liquid system, a chelating agent system, a pure water system, an ultra-pure anhydrous ethanol system, a drying system, a recovery system and a PLC control program; the present application automatically controls each system through the PLC control program, so that a high-pressure nozzle sprays corresponding liquids according to the needs of the surface treatment and cleaning process, eliminating manual operation, and the recovery system can recycle various surface treatment liquids separately, reducing the loss of the surface treatment liquid, and solving the problems in the prior art of performing surface treatment and cleaning on the cavity of an ultra-high purity chemical container by a purely manual method, which is low in efficiency and serious waste of treatment liquid.

Description

Technical Field

[0001] The invention relates to the field of chemical cleaning and drying, and in particular to a cavity surface treatment system and method for an ultra-high purity chemical container. Background Art

[0002] Ultra-high purity ALD / CVD precursor products are one of the core raw materials of the entire electronic industry system. They are widely used in many aspects of the manufacturing of electronic devices such as computer chips, solar cells, mobile communications, satellite navigation, spacecraft, etc., and play a huge role in aerospace, new solar cells, electronic products and other fields.

[0003] For some high-purity and ultra-pure precursor chemicals that react violently with air, ultra-high-purity packaging containers are used for production, manufacturing, storage and packaging. After the processing of high-purity and ultra-pure containers, the surface treatment and surface cleaning of the cavity are required to ensure the cleanliness of the cavity. The surface treatment method and device of the container cavity directly affect the economic benefits, production capacity, quality and even safety of the enterprise. Therefore, reliable, efficient and stable cavity surface treatment, surface cleaning system and process of the container have become the bottleneck that the company and even the industry urgently need to break through.

[0004] Existing surface treatment and cleaning methods are all fully manual operations. Traditional methods are particularly disadvantageous for cleaning large-volume containers, with extremely low efficiency, serious waste of water resources and surface treatment fluid, and the inability to accurately control the process conditions of surface treatment.

[0005] For example, the "Method for Surface Treatment of Petroleum Machinery Parts" disclosed in Chinese patent documents, with the announcement number CN106521497A, uses a cleaning liquid to clean and degrease the surface of petroleum machinery parts at a temperature of 35-50°C; puts it into a liquid after nitriding salt melts, maintains the temperature at 400-550°C, and the time is 0.5-5h; then immerses it in a liquid after oxidizing salt melts, maintains the temperature at 300-420°C, and the time is 50-80min; after naturally cooling to room temperature, polishes it with a polishing liquid, and treats it at a temperature of 15-35°C for 0.8-3h; then uses a passivation liquid to passivate its surface, and treats it at a temperature of 15-35°C for 1.5-4h. The invention has a good effect of removing oil, and after nitriding, oxidation, polishing, and passivation, the surface of petroleum machinery parts has strong corrosion resistance, and the surface hardness reaches more than 30HRC, which prolongs the service life. The treatment method of the present invention has low cost and is harmless to the environment. It can be widely used for surface treatment of large-volume petroleum machinery parts. However, the disadvantage of this patent is that the surface treatment is carried out by immersion, which takes a long time and has low efficiency. Summary of the invention

[0006] The present invention aims to overcome the problems in the prior art of low efficiency and serious waste of treatment liquid in the process of surface treatment and cleaning of the cavity of an ultra-high purity chemical container by purely manual methods, and provides a cavity surface treatment system and method for an ultra-high purity chemical container, which can efficiently and automatically perform surface treatment and cleaning on the cavity of an ultra-high purity chemical container, thereby reducing labor costs, improving efficiency, and reducing waste of treatment liquid.

[0007] In order to achieve the above object, the present invention adopts the following technical solutions:

[0008] The present invention discloses a cavity surface treatment system for an ultra-high purity chemical container, the cavity surface treatment system comprising: a container flipping system, a degreasing liquid system, a deionized initial washing liquid system, a polishing liquid system, a passivation liquid system, a chelating agent system, a pure water system, an ultra-pure anhydrous ethanol system, a drying system, a recovery system and a PLC control program; after the PLC program sets parameters, each functional system performs actions according to the set process, the container flipping system clamps, lifts and flips the container; the degreasing liquid system performs a degreasing cleaning operation and completes the recovery operation of the degreasing liquid in combination with the recovery system; the deionized initial washing liquid system performs a metal ion cleaning operation and completes the recovery operation of the deionized initial washing liquid in combination with the recovery system; the polishing liquid system performs a polishing operation and completes the recovery operation of the polishing liquid in combination with the recovery system; The passivation liquid system performs the passivation operation and completes the passivation liquid recovery operation in conjunction with the recovery system; the chelating agent system performs the chelating operation and completes the chelating agent recovery operation in conjunction with the recovery system; the pure water system performs quantitative and timed flushing operations and discharges wastewater into the sewage treatment system pipeline; the ultrapure anhydrous ethanol system performs water removal operations and completes the recovery, water removal and purification operations of ethanol in conjunction with the recovery system; the drying system heats the working gas at a set temperature and regularly dries the containers that have completed the cleaning operation; the recovery system includes a recovery tank and a recovery liquid level gauge installed in the recovery tank, the recovery tank is connected to a vent solenoid valve and a recovery pipeline, a recovery pump is provided on the recovery pipeline, and a degreasing liquid recovery valve, a deionized initial wash liquid recovery valve, a polishing liquid recovery valve, a passivation liquid recovery valve, a chelating agent recovery valve, and an ethanol recovery valve are provided on the recovery pipeline.

[0009] The present application automatically controls each system through a PLC control program, so that the high-pressure nozzle sprays the corresponding liquid according to the needs of the surface treatment and cleaning processes, eliminating manual operation, and by replacing the immersion method with high-pressure liquid spraying, the surface treatment efficiency is higher, and the recovery system can separately recover various surface treatment liquids to reduce the loss of surface treatment liquid.

[0010] Preferably, the container turning system includes a container turning machine, a clamping device, a foot fork, a spraying lifting limit guide rail, and a container lifting guide rail; the automatic lifting and turning of the container can be achieved through the above structure.

[0011] Preferably, the degreasing liquid system includes degreasing liquid inlet and outlet solenoid valves, a degreasing liquid booster pump, a degreasing liquid pressure gauge, a flow regulating valve, a degreasing liquid heating rod, a degreasing liquid temperature sensor, and a degreasing liquid storage tank level gauge; the degreasing liquid inlet and outlet solenoid valves can control the on and off of the degreasing liquid to the high-pressure nozzle, the degreasing liquid booster pump can increase the pressure of its spraying, the degreasing liquid pressure gauge can monitor the degreasing liquid pressure, the degreasing liquid heating rod and the degreasing liquid temperature sensor can detect and control the temperature, and after the pressure and temperature reach the indicators, the degreasing liquid is sprayed out through the high-pressure nozzle.

[0012] Preferably, the deionized initial wash liquid system includes deionized initial wash liquid inlet and outlet solenoid valves, a deionized initial wash liquid booster pump, a deionized initial wash liquid pressure gauge, a flow regulating valve, a deionized initial wash liquid heating rod, a deionized initial wash liquid temperature sensor, and a deionized initial wash liquid storage tank level gauge; the deionized initial wash liquid inlet and outlet solenoid valves can control the on and off of the deionized initial wash liquid to the high-pressure nozzle, the deionized initial wash liquid booster pump can increase the pressure of its spraying, the deionized initial wash liquid pressure gauge can monitor the pressure of the deionized initial wash liquid, the deionized initial wash liquid heating rod and the deionized initial wash liquid temperature sensor can detect and control the temperature, and after the pressure and temperature reach the indicators, the deionized initial wash liquid is sprayed out through the high-pressure nozzle.

[0013] Preferably, the polishing liquid system includes polishing liquid inlet and outlet solenoid valves, a polishing liquid booster pump, a polishing liquid pressure gauge, a flow regulating valve, a polishing liquid heating rod, a polishing liquid temperature sensor, and a polishing liquid tank level gauge; the polishing liquid inlet and outlet solenoid valves can control the on and off of the polishing liquid to the high-pressure nozzle, the polishing liquid booster pump can increase the pressure of its spraying, the polishing liquid pressure gauge can monitor the polishing liquid pressure, the polishing liquid heating rod and the polishing liquid temperature sensor can detect and control the temperature. After the pressure and temperature reach the indicators, the polishing liquid is sprayed out through the high-pressure nozzle.

[0014] Preferably, the passivation liquid system includes a passivation liquid inlet and outlet solenoid valves, a passivation liquid booster pump, a passivation liquid pressure gauge, a flow regulating valve, a passivation liquid heating rod, a passivation liquid temperature sensor, and a passivation liquid storage tank level gauge; the passivation liquid inlet and outlet solenoid valves can control the on-off of the passivation liquid to the high-pressure nozzle, the passivation liquid booster pump can increase the pressure of its spraying, the passivation liquid pressure gauge can monitor the passivation liquid pressure, the passivation liquid heating rod and the passivation liquid temperature sensor can detect and control the temperature, and after the pressure and temperature reach the indicators, the passivation liquid is sprayed out through the high-pressure nozzle.

[0015] Preferably, the chelating agent system includes chelating agent inlet and outlet solenoid valves, a chelating agent booster pump, a chelating agent pressure gauge, a flow regulating valve, a chelating agent heating rod, a chelating agent temperature sensor, and a chelating agent tank level gauge; the chelating agent inlet and outlet solenoid valves can control the on-off of the chelating agent to the high-pressure nozzle, the chelating agent booster pump can increase the pressure of its spraying, the chelating agent pressure gauge can monitor the chelating agent pressure, the chelating agent heating rod and the chelating agent temperature sensor can detect and control the temperature, and after the pressure and temperature reach the indicators, the chelating agent is sprayed out through the high-pressure nozzle.

[0016] Preferably, the pure water system includes a pure water solenoid valve, a pure water booster pump, a pure water pressure gauge and a flow regulating valve; the pure water solenoid valve can control the output of pure water, the pure water booster pump is used to increase the pressure of its spraying, and the pure water pressure gauge can detect the pressure of pure water.

[0017] Preferably, the ultrapure anhydrous ethanol system includes ultrapure anhydrous ethanol inlet and outlet solenoid valves, an ultrapure anhydrous ethanol flow regulating valve, an ultrapure anhydrous ethanol storage tank level gauge, an ethanol addition solenoid valve, a nitrogen pressurization solenoid valve, an ethanol storage tank exhaust valve, an ethanol purifier, and an ethanol receiving tank.

[0018] A method for treating the surface of a cavity of an ultra-high purity chemical container is completed using the above system and includes the following processes:

[0019] ① The PLC program starts the heating functions of the degreasing liquid heating rod, the deionized initial washing liquid heating rod, the polishing liquid heating rod, the passivation liquid heating rod, and the chelating agent heating rod according to the set temperature, and automatically controls the temperature according to the signal feedback from the degreasing liquid temperature sensor, the deionized initial washing liquid temperature sensor, the polishing liquid temperature sensor, the passivation liquid temperature sensor, and the chelating agent temperature sensor;

[0020] ②PLC realizes the automatic operation of container clamping, lifting and flipping through the container flipping system;

[0021] ③When the container is turned over, the PLC turns on the degreasing liquid booster pump, the degreasing liquid inlet and outlet solenoid valves, and starts timing;

[0022] When the recovery system level gauge shows an over-liquid level, the PLC turns on the recovery pump and recovery solenoid valve to recover the degreased liquid to a low level, and then turns off the recovery pump and recovery solenoid valve;

[0023] ④ When the degreasing liquid spraying is completed, the PLC closes the degreasing liquid booster pump and the inlet and outlet solenoid valves, the degreasing liquid heating rod, and the degreasing liquid temperature sensor, and opens the recovery pump and the recovery solenoid valve to recover the degreasing liquid. When the liquid level meter displays "0", the PLC closes the recovery pump and the recovery solenoid valve, opens the deionized initial wash liquid booster pump and the inlet and outlet solenoid valves, and starts timing;

[0024] ⑤ When the liquid level gauge of the recovery system shows that the liquid level is over, the PLC turns on the recovery pump and the recovery solenoid valve to complete the recovery of the deionized initial wash liquid to the low liquid level, and then turns off the recovery pump and the recovery solenoid valve;

[0025] ⑥ When the deionized initial wash liquid spraying is completed, the PLC turns off the deionized initial wash liquid booster pump and inlet and outlet solenoid valves, the deionized initial wash liquid heating rod, and the deionized initial wash liquid temperature sensor. When the liquid level meter displays "0", the PLC turns off the recovery pump and recovery solenoid valve, turns on the polishing liquid booster pump and the polishing liquid inlet and outlet solenoid valves, and starts timing;

[0026] ⑦ When the liquid level gauge of the recovery system shows that the liquid level is over, the PLC turns on the recovery pump and the recovery solenoid valve to complete the recovery of the polishing liquid to the low liquid level, and then turns off the recovery pump and the recovery solenoid valve;

[0027] ⑧When the polishing liquid spraying time is over, the PLC turns off the passivation liquid booster pump, the passivation liquid inlet and outlet solenoid valves, the passivation liquid heating rod, and the passivation liquid temperature sensor. When the liquid level meter displays "0", the PLC turns off the recovery pump and the recovery solenoid valve, turns on the passivation liquid booster pump and the passivation liquid inlet and outlet solenoid valves, and starts timing;

[0028] ⑨When the liquid level gauge of the recovery system shows that the liquid level is over, the PLC turns on the recovery pump and the passivation liquid recovery solenoid valve to complete the recovery of the passivation liquid to the low liquid level, and then turns off the recovery pump and the recovery solenoid valve;

[0029] ⑩ When the passivation liquid spraying time is over, the PLC turns off the passivation liquid booster pump, the passivation liquid inlet and outlet solenoid valves, the passivation liquid heating rod, and the passivation liquid temperature sensor. When the liquid level meter displays "0", the PLC turns off the recovery pump and recovery solenoid valve, turns on the chelating agent booster pump and the chelating agent inlet and outlet solenoid valves, and starts timing;

[0030] ⑪When the recovery system level gauge shows an over-liquid level, the PLC turns on the recovery pump and recovery solenoid valve to complete the recovery of the chelating agent to a low liquid level, and then turns off the recovery pump and recovery solenoid valve;

[0031] ⑫ When the chelating agent spraying is completed, the PLC turns off the chelating agent booster pump, the chelating agent inlet and outlet solenoid valves, the chelating agent heating rod, and the chelating agent temperature sensor. When the liquid level meter displays "0", the PLC turns off the recovery pump and recovery solenoid valve, turns on the pure water booster pump, the pure water inlet and outlet solenoid valves, and the venting solenoid valve, and starts timing;

[0032] ⑬ When the pure water spraying time ends and the liquid level meter displays "0", the PLC closes the vent valve, pure water booster pump, pure water inlet and outlet solenoid valves, opens the ultra-pure anhydrous ethanol inlet and outlet solenoid valves and nitrogen booster valve, and the PLC starts timing;

[0033] ⑭ When the recovery system level gauge shows an over-liquid level, the PLC turns on the recovery pump, recovery solenoid valve, and purifier exhaust solenoid valve to recover to a low liquid level, and then turns off the recovery pump, recovery solenoid valve, and purifier exhaust solenoid valve;

[0034] ⑮When the ultrapure anhydrous ethanol spraying is completed, the PLC closes the ultrapure anhydrous ethanol inlet and outlet solenoid valves and the nitrogen booster valve, and opens the recovery pump, recovery solenoid valve, purifier exhaust solenoid valve, ultrapure anhydrous ethanol inlet and outlet solenoid valves and nitrogen booster valve. When the liquid level meter displays "0", the PLC controls the closure of the recovery pump, recovery solenoid valve, purifier exhaust solenoid valve, ultrapure anhydrous ethanol inlet and outlet solenoid valves and nitrogen booster valve;

[0035] ⑯ When the ultrapure anhydrous ethanol spraying time is completed, the PLC turns on the working gas solenoid valve and the gas heater, and the PLC starts timing;

[0036] ⑰When the drying time is completed, the PLC turns off the gas heater, and after 1 hour, the PLC turns off the working gas solenoid valve;

[0037] ⑱When the working gas solenoid valve is closed, the PLC controls the turning machine and electrical reset.

[0038] Therefore, the present invention has the following beneficial effects: (1) The system and method described in the present invention can omit the steps of adding liquid to and pouring liquid from the container. By inverting the container and spraying high-pressure liquid, automatic cleaning can be achieved, thereby reducing labor costs, avoiding process errors, and solving the problem that heavier particles cannot be washed out; (2) High-pressure flushing is used instead of immersion treatment to improve treatment efficiency; (3) The system described in the present invention has the function of recovering the surface treatment liquid and realizes the circulation spraying of the cleaning liquid, thus breaking the dependence on the cleaning liquid storage tank and greatly reducing the use of the site. BRIEF DESCRIPTION OF THE DRAWINGS

[0039] Figure 1 It is a structural schematic diagram of the present invention.

[0040] Figure 2 The present invention Figure 1 An enlarged view of the left part of .

[0041] Figure 3 The present invention Figure 1 An enlarged view of the right part of .

[0042] Figure 4 It is a structural schematic diagram of the container turning system of the present invention.

[0043] Figure 5 It is a structural schematic diagram of the recovery system of the second embodiment of the present invention.

[0044] In the figure: 1. Gas heater 2. Deionized primary wash liquid storage tank 3. Degrease liquid storage tank 4. Deionized primary wash liquid inlet solenoid valve 5. Deionized primary wash liquid flow regulating valve 6. Deionized primary wash liquid booster pump 7. Deionized primary wash liquid pressure gauge 8. Deionized primary wash liquid outlet solenoid valve 9. Degrease liquid inlet solenoid valve 10. Degrease liquid flow regulating valve 11. Degrease liquid booster pump 12. Degrease liquid pressure gauge 13. Degrease liquid outlet solenoid valve 14. Working gas solenoid valve 15. Working gas flow regulating valve 16. Pure water flow regulating valve 17. Container turning system 17-1. Clamping device 17-2. Foot fork 17-3. Spray lifting limit rail 17.4 container lifting rail 18. High-pressure nozzle 19. Pure water solenoid valve 20. PLC control box 21. Movable recovery tank 22. Liquid level meter 23. Drain solenoid valve 24. Recovery solenoid valve 25. Recovery pump 26. Deionized initial wash liquid recovery solenoid valve 27. Degrease recovery solenoid valve 28. Pure water booster pump 29. Pure water pressure gauge 30. Pure water outlet solenoid valve 31. Container turning machine 32. Polishing liquid storage tank 33. Polishing liquid inlet solenoid valve 34. Polishing liquid flow control valve 35. Polishing liquid booster pump 36. Polishing liquid pressure 37. Polishing liquid outlet solenoid valve 38. Passivation liquid storage tank 39. Passivation liquid inlet solenoid valve 40. Passivation liquid flow control valve 41. Passivation liquid booster pump 42. Passivation liquid pressure gauge 43. Passivation liquid outlet solenoid valve 44. Chelating agent storage tank 45. Chelating agent inlet solenoid valve 46. Chelating agent flow control valve 47. Chelating agent booster pump 48. Chelating agent pressure gauge 49. Chelating agent outlet solenoid valve 50. Polishing liquid recovery solenoid valve 51. Passivation liquid recovery solenoid valve 52. Chelating agent recovery solenoid valve 53. Passivation liquid heating rod 54. Passivation liquid temperature sensor 55. Light liquid heating rod 56. Polishing liquid temperature sensor 57. Deionized initial wash liquid heating rod 58. Deionized initial wash liquid temperature sensor 59. Degreasing liquid heating rod 60. Degreasing liquid temperature sensor 61. Chelating agent heating rod 62. Chelating agent temperature sensor 63. Chelating agent tank level gauge 64. Passivation liquid tank level gauge 65. Polishing liquid tank level gauge 66. Deionized initial wash liquid tank level gauge 67. Degreasing liquid tank level gauge 68. Ultrapure anhydrous ethanol tank 69. Ethanol inlet solenoid valve 70. Ethanol flow control valve 71. Ethanol outlet solenoid valve 72. Ethanol storage tank exhaust valve 73. Nitrogen pressurization solenoid valve 74. Ethanol addition solenoid valve 75. Ultra-pure anhydrous wine ethanol level gauge 76. Ethanol purifier 77. Ethanol distillation kettle level gauge 78. Ethanol distillation kettle exhaust solenoid valve 79. Ethanol receiving tank 80. Nitrogen pressurization solenoid valve 81. Ethanol receiving tank exhaust solenoid valve 82. Ethanol receiving tank pressure solenoid valve 83. Ethanol receiving solenoid valve 84. Ethanol distillation kettle vent valve 85. Ethanol recovery solenoid valve 86. Pure water temporary storage valve 87. Ethanol temporary storage valve 88. Pure water temporary storage box 89. Ethanol temporary storage box 90. Flushing nozzle. DETAILED DESCRIPTION

[0045] The present invention is further described below in conjunction with the accompanying drawings and specific embodiments.

[0046] Embodiment 1, as Figure 1-4 As shown, a cavity surface treatment system for an ultra-high purity chemical container comprises:

[0047] Container turning system 17: The container turning system includes a container turning machine 31, a clamping device 17-1, a foot fork 17-2, a spraying lifting limit guide rail 17-3, and a container lifting guide rail 17-4.

[0048] Degreasing liquid system: The degreasing liquid storage tank 3 is used for storing the degreasing liquid. The degreasing liquid inlet solenoid valve 9 and the degreasing liquid outlet solenoid valve 13 are switched to control the on and off of the degreasing liquid. The degreasing liquid flow regulating valve 10 can realize the degreasing liquid flow regulation. The degreasing liquid booster pump 11 is used to pressurize the degreasing liquid. The degreasing liquid pressure gauge 12 can monitor the degreasing liquid pressure. Finally, the high-pressure nozzle 18 sprays the inner wall of the container. During the spraying process, the degreasing liquid is recovered by opening the degreasing liquid recovery solenoid valve 27. The degreasing liquid heating rod 59 and the degreasing liquid temperature sensor 60 can realize the heating and temperature monitoring of the degreasing liquid. The degreasing liquid storage tank level gauge 67 can realize the monitoring of the liquid level.

[0049] Deionized initial wash liquid system: The deionized initial wash liquid storage tank 2 is used for storing deionized initial wash liquid. The switches of the deionized initial wash liquid inlet solenoid valve 4 and the deionized initial wash liquid outlet solenoid valve 8 control the on and off of the deionized initial wash liquid. The deionized initial wash liquid flow regulating valve 5 can realize the flow regulation of the deionized initial wash liquid. The deionized initial wash liquid booster pump 6 is used to boost the pressure of the deionized initial wash liquid. The deionized initial wash liquid pressure gauge 7 can monitor the pressure of the deionized initial wash liquid. Finally, the high-pressure nozzle 18 sprays the inner wall of the container. During the spraying process, the deionized initial wash liquid is recovered by opening the deionized initial wash liquid recovery solenoid valve 26. The deionized initial wash liquid heating rod 57 and the deionized initial wash liquid temperature sensor 58 can realize the heating and temperature monitoring of the deionized initial wash liquid. The deionized initial wash liquid storage tank level meter 66 can realize the liquid level monitoring.

[0050] Polishing liquid system: The polishing liquid storage tank 32 is used to store the polishing liquid. The switches of the polishing liquid inlet solenoid valve 33 and the polishing liquid outlet solenoid valve 37 control the on and off of the polishing liquid. The polishing liquid flow regulating valve 34 can realize the polishing liquid flow regulation. The polishing liquid booster pump 35 is used to pressurize the polishing liquid. The polishing liquid pressure gauge 36 can monitor the polishing liquid pressure. Finally, the high-pressure nozzle 18 sprays the inner wall of the container. During the spraying process, the polishing liquid is recovered by opening the polishing liquid recovery solenoid valve 50. The polishing liquid heating rod 55 and the polishing liquid temperature sensor 56 can realize the heating and temperature monitoring of the polishing liquid. The polishing liquid storage tank level meter 65 can realize the liquid level monitoring.

[0051] Passivation liquid system: The passivation liquid storage tank 38 is used to store the passivation liquid. The switches of the passivation liquid inlet solenoid valve 39 and the passivation liquid outlet solenoid valve 43 control the on-off of the passivation liquid. The passivation liquid flow regulating valve 40 can realize the passivation liquid flow regulation. The passivation liquid booster pump 41 is used to pressurize the passivation liquid. The passivation liquid pressure gauge 42 can monitor the passivation liquid pressure. Finally, the high-pressure nozzle 18 sprays the inner wall of the container. During the spraying process, the passivation liquid is recovered by opening the passivation liquid recovery solenoid valve 51. The passivation liquid heating rod 53 and the passivation liquid temperature sensor 54 can realize the heating and temperature monitoring of the passivation liquid. The passivation liquid storage tank level gauge 64 can realize the monitoring of the liquid level.

[0052] Chelating agent system: the chelating agent storage tank 44 is used for storing the chelating agent, the chelating agent inlet solenoid valve 45 and the chelating agent outlet solenoid valve 49 are switched to control the on and off of the chelating agent, the chelating agent flow regulating valve 46 can realize the chelating agent flow regulation, the chelating agent booster pump 47 is used to pressurize the chelating agent, the chelating agent pressure gauge 48 can monitor the chelating agent pressure, and finally the high-pressure nozzle 18 sprays the inner wall of the container. During the spraying process, the chelating agent is recovered by opening the chelating agent recovery solenoid valve 52, the chelating agent heating rod 61 and the chelating agent temperature sensor 62 can realize the heating and temperature monitoring of the chelating agent, and the chelating agent storage tank liquid level meter 63 can realize the monitoring of the liquid level.

[0053] Pure water system: The pure water solenoid valve 19 and the pure water outlet solenoid valve 30 control the on and off of pure water, the flow regulating valve 16 can adjust the flow of pure water, the pure water booster pump 28 is used to boost the pressure of pure water, and the pure water pressure gauge 29 monitors the pressure of pure water. Finally, the high-pressure nozzle 18 sprays the inner wall of the container. During the spraying process, the pure water is drained by opening the pure water drain solenoid valve 23.

[0054] Ultrapure anhydrous ethanol system: Ultrapure anhydrous ethanol storage tank 68 is used to store ultrapure anhydrous ethanol. The switch of ultrapure anhydrous ethanol inlet solenoid valve 69 and ultrapure anhydrous ethanol outlet solenoid valve 71 controls the on and off of ultrapure anhydrous ethanol. Ultrapure anhydrous ethanol flow regulating valve 70 can realize the flow regulation of ultrapure anhydrous ethanol. Finally, the inner wall of the container is sprayed by high-pressure nozzle 18. During the spraying process, ultrapure anhydrous ethanol is recovered by opening ethanol recovery solenoid valve 85. Ultrapure anhydrous ethanol storage tank liquid level gauge 63 can realize liquid level monitoring. Ultrapure anhydrous ethanol storage tank 68 is provided with ethanol storage tank exhaust valve 72 and nitrogen pressurization Solenoid valve 73, ethanol adding solenoid valve 74, ultrapure anhydrous wine ethanol level gauge 75; the ethanol recovery solenoid valve is connected to the ethanol purifier 76, and ethanol is distilled and purified in the ethanol purifier. The ethanol purifier is equipped with an ethanol still level gauge 77 and an ethanol still exhaust solenoid valve 78. The discharged ethanol distillation gas is passed into an ethanol receiving tank 79. The ethanol receiving tank is equipped with a nitrogen pressurization solenoid valve 80, an ethanol receiving tank exhaust solenoid valve 81, an ethanol receiving tank extrusion solenoid valve 82, and an ethanol receiving solenoid valve 83. An ethanol still vent valve 84 for discharging residual liquid is also installed at the bottom of the ethanol purifier.

[0055] Drying system: The working gas solenoid valve 14 is used to control the on and off of the working gas. The flow rate of the working gas can be adjusted through the flow control valve 15. The gas heater 1 is used to heat the working gas and dry the inner wall of the container through the high-pressure nozzle 18.

[0056] Recovery system: Liquid is recovered by the movable recovery tank 21, and the liquid level is monitored by the liquid level meter 22. The recovery solenoid valve 24 and the corresponding liquid recovery solenoid valve are opened to recover the liquid using the recovery pump 25. The pure water used to rinse the inner wall of the container is drained by opening the drain solenoid valve 23. In order to achieve complete recovery of the cleaning liquid in the movable recovery tank, the preferred solution of the present application adopts an inclined surface at the bottom of the movable recovery tank.

[0057] PLC control system 20: Through the set control program, the opening and closing of the valves in each system realizes the automatic spraying of the degreasing liquid in the container.

[0058] The system is suitable for container surface treatment and cleaning in various industries, especially for the cleaning of electronic-grade and semiconductor-grade chemical packaging containers, and especially for high-purity chemical containers with a purity of 5N or above and storage tanks and reactors for products above that.

[0059] A method for treating the surface of a cavity of an ultra-high purity chemical container, taking the cleaning of a tetraethoxysilane (TEOS) cylinder as an example, comprises the following steps:

[0060] Manually fork the base of the tetraethoxysilane (TEOS) cylinder onto the container invertor foot fork of the container invertor system.

[0061] Press the PLC start button, the PLC turns on the degreasing liquid heating rod, the degreasing liquid temperature sensor, the deionized initial wash liquid heating rod, the deionized initial wash liquid temperature sensor, the polishing liquid heating rod, the polishing liquid temperature sensor, the passivation liquid heating rod, the passivation liquid temperature sensor, the chelating agent heating rod, and the chelating agent temperature sensor; after the container lifting rail rises to the height limit point, the container turning machine turns 180° and stands upside down.

[0062] When the turning machine completes turning, the PLC opens the degreasing liquid inlet and outlet solenoid valves, the degreasing liquid booster pump, and the degreasing liquid outlet solenoid valve, and the PLC starts timing.

[0063] Degreasing liquid recovery: When the recovery system level gauge shows excessive liquid level, the PLC turns on the recovery pump and recovery solenoid valve to recover the degreasing liquid. When the level gauge shows low liquid level, the PLC turns off the recovery pump and recovery solenoid valve. When the degreasing liquid completes spraying, the PLC turns off the degreasing liquid inlet solenoid valve, the degreasing liquid booster pump, the degreasing liquid outlet solenoid valve, the degreasing liquid heating rod, and the degreasing liquid temperature sensor, and turns on the recovery pump and recovery solenoid valve. When the level gauge reads 0, the PLC turns off the recovery pump and recovery solenoid valve.

[0064] When the PLC timing is completed and the level meter reading is 0, the PLC opens the deionized initial wash liquid inlet solenoid valve, the deionized initial wash liquid booster pump, and the deionized initial wash liquid outlet solenoid valve, and the PLC starts timing.

[0065] Recovery of deionized initial wash liquid: When the recovery system level gauge shows that the liquid level is over, the PLC turns on the recovery pump and the recovery solenoid valve to recover the deionized initial wash liquid. When the level gauge shows that the liquid level is low, the PLC turns off the recovery pump and the recovery solenoid valve. When the deionized initial wash liquid has completed spraying, the PLC turns off the deionized initial wash liquid inlet solenoid valve, the deionized initial wash liquid booster pump, the deionized initial wash liquid outlet solenoid valve, the deionized initial wash liquid heating rod, and the deionized initial wash liquid temperature sensor, and turns on the recovery pump and the recovery solenoid valve. When the level gauge reads 0, the PLC turns off the recovery pump and the recovery solenoid valve 26.

[0066] When the PLC timing is completed and the level meter reading is 0, the PLC opens the polishing liquid inlet solenoid valve, the polishing liquid booster pump, and the polishing liquid outlet solenoid valve, and the PLC starts timing.

[0067] Polishing liquid recovery: When the recovery system level gauge shows that the liquid level is over, the PLC turns on the recovery pump and the recovery solenoid valve to recover the polishing liquid. When the level gauge shows a low liquid level, the PLC turns off the recovery pump and the recovery solenoid valve. When the polishing liquid is finished spraying, the PLC turns off the polishing liquid inlet solenoid valve, the polishing liquid booster pump, the polishing liquid outlet solenoid valve, the polishing liquid heating rod, and the polishing liquid temperature sensor, and turns on the recovery pump and the recovery solenoid valve. When the level gauge reads 0, the PLC turns off the recovery pump and the recovery solenoid valve.

[0068] When the PLC timing is completed and the level meter reading is 0, the PLC opens the passivation liquid inlet solenoid valve, the passivation liquid booster pump, and the passivation liquid outlet solenoid valve, and the PLC starts timing.

[0069] Passivation liquid recovery: When the recovery system level gauge shows that the liquid level is over, the PLC turns on the recovery pump and the recovery solenoid valve to recover the passivation liquid. When the level gauge shows that the liquid level is low, the PLC turns off the recovery pump and the recovery solenoid valve. When the passivation liquid is finished spraying, the PLC turns off the passivation liquid inlet solenoid valve, the passivation liquid booster pump, the passivation liquid outlet solenoid valve, the passivation liquid heating rod, and the passivation liquid temperature sensor, and turns on the recovery pump and the recovery solenoid valve. When the level gauge reads 0, the PLC turns off the recovery pump and the recovery solenoid valve.

[0070] When the PLC timing is completed and the level meter reading is 0, the PLC opens the chelating agent inlet solenoid valve, the chelating agent booster pump, and the chelating agent outlet solenoid valve, and the PLC starts timing.

[0071] Chelating agent recovery: When the recovery system level gauge shows excessive liquid level, the PLC turns on the recovery pump and recovery solenoid valve to recover the chelating agent. When the level gauge shows low liquid level, the PLC turns off the recovery pump and recovery solenoid valve. When the chelating agent finishes spraying, the PLC turns off the chelating agent inlet solenoid valve, chelating agent booster pump, chelating agent outlet solenoid valve, chelating agent heating rod, chelating agent temperature sensor, and turns on the recovery pump and recovery solenoid valve. When the level gauge reads 0, the PLC turns off the recovery pump and recovery solenoid valve.

[0072] When the PLC timing is completed and the level meter reading is 0, the PLC opens the pure water inlet solenoid valve, pure water booster pump, pure water outlet solenoid valve, and vent solenoid valve, and the PLC starts timing.

[0073] Pure water draining: When the pure water flushing timing is completed, the PLC closes the pure water inlet solenoid valve, pure water booster pump, and pure water outlet solenoid valve; when the level meter reading is 0, the PLC closes the drain solenoid valve.

[0074] When the level meter reads 0, the PLC opens the ultrapure anhydrous ethanol inlet solenoid valve, the nitrogen pressurization solenoid valve, and the ultrapure anhydrous ethanol outlet solenoid valve, and the PLC starts timing.

[0075] Recovery of ultrapure anhydrous ethanol: When the recovery system level gauge shows excessive liquid level, the PLC turns on the recovery pump, ethanol purifier exhaust solenoid valve and recovery solenoid valve to recover ultrapure anhydrous ethanol. When the level gauge shows low liquid level, the PLC turns off the recovery pump, ethanol purifier exhaust solenoid valve and recovery solenoid valve. When the ultrapure anhydrous ethanol is finished spraying, the PLC turns off the ultrapure anhydrous ethanol inlet solenoid valve, nitrogen pressurization solenoid valve and ultrapure anhydrous ethanol outlet solenoid valve, and turns on the recovery pump and recovery solenoid valve. When the level gauge reads 0, the PLC turns off the recovery pump and recovery solenoid valve.

[0076] When the level meter reads 0, the PLC turns on the gas heater and the working gas solenoid valve, and the PLC starts timing.

[0077] When the PLC timing is completed, the PLC turns off the gas heater and the PLC starts timing.

[0078] When the PLC timing is completed, the PLC closes the working gas solenoid valve.

[0079] When the working gas solenoid valve is closed, the PLC controls the turning machine and the instrument to reset.

[0080] Embodiment 2, as Figure 5 As shown, the difference between it and the first embodiment is that the ultrapure anhydrous ethanol system does not include an ethanol purifier and an ethanol receiving tank, and the vent solenoid valve is installed on the vent channel, and the vent channel is also connected to a pure water temporary storage channel and an ethanol temporary storage channel. The pure water temporary storage channel is provided with a pure water temporary storage valve 86, and the ethanol temporary storage channel is provided with an ethanol temporary storage valve 87. The pure water temporary storage channel is connected to a pure water temporary storage box 88, and the ethanol temporary storage channel is connected to an ethanol temporary storage box 89. The pure water temporary storage box and the ethanol temporary storage box are simultaneously connected to a flushing nozzle 90 for spraying liquid onto the inner wall of the movable recovery tank 21.

[0081] When the device is performing surface treatment and cleaning, the pure water and ethanol in the movable recovery tank will first fill the pure water storage box and the ethanol storage box before being emptied or passed through the ethanol recovery solenoid valve. After each treatment liquid is used, pure water will be sprayed out of the pure water storage box to clean the inner wall of the movable recovery tank to avoid mixing of the treatment liquids. Before the high-pressure nozzle sprays anhydrous ethanol, the movable recovery tank is first flushed through the ethanol storage box to reduce the remaining water on the inner wall of the movable recovery tank.

[0082] In this embodiment, different treatment liquids are not easy to mix, and a relatively high ethanol concentration can be maintained without the need for continuous purification of the ethanol, thereby reducing the loss generated during the purification of the ethanol and reducing the cost.

Claims

1. A cavity surface treatment system for an ultra-high purity chemical container, characterized in that: The cavity surface treatment system comprises: Container turning system, degreasing liquid system, deionized initial washing liquid system, polishing liquid system, passivation liquid system, chelating agent system, pure water system, ultrapure anhydrous ethanol system, drying system, recovery system and PLC control program; The container turning system clamps, lifts and turns the container, and a high-pressure nozzle is installed on the inside of the container; The degreasing liquid system performs degreasing and cleaning operations and completes the degreasing liquid recovery operation in conjunction with the recovery system; The deionized primary washing liquid system performs the metal ion removal cleaning operation and completes the deionized primary washing liquid recovery operation in conjunction with the recovery system; The polishing liquid system performs the polishing operation and completes the recovery operation of the polishing liquid in conjunction with the recovery system; The passivation liquid system performs the passivation operation and completes the passivation liquid recovery operation in conjunction with the recovery system; The chelating agent system performs the chelating operation and completes the chelating agent recovery operation in conjunction with the recovery system; The pure water system performs quantitative and timed flushing operations and discharges waste water into the sewage treatment system pipeline; The ultrapure anhydrous ethanol system performs water removal operations and combines with the recovery system to complete ethanol recovery, water removal, and purification operations; The drying system heats the working air at a set temperature and regularly dries the containers that have completed the cleaning operation; The recovery system includes a recovery tank and a recovery liquid level meter installed in the recovery tank. The recovery tank is connected to a vent solenoid valve and a recovery pipeline. The recovery pipeline is provided with a recovery pump. The recovery pipeline is provided with a degreasing liquid recovery valve, a deionized initial washing liquid recovery valve, a polishing liquid recovery valve, a passivation liquid recovery valve, a chelating agent recovery valve, and an ethanol recovery valve.

2. The cavity surface treatment system of an ultra-high purity chemical container according to claim 1, characterized in that: The container turning system comprises a container turning machine, a clamping device, a foot fork, a spraying lifting limit guide rail and a container lifting guide rail.

3. The cavity surface treatment system of an ultra-high purity chemical container according to claim 1, characterized in that: The degreasing liquid system includes degreasing liquid inlet and outlet solenoid valves, a degreasing liquid booster pump, a degreasing liquid pressure gauge, a flow regulating valve, a degreasing liquid heating rod, a degreasing liquid temperature sensor, and a degreasing liquid storage tank level gauge.

4. The cavity surface treatment system of an ultra-high purity chemical container according to claim 1, characterized in that: The deionized initial wash liquid system includes deionized initial wash liquid inlet and outlet solenoid valves, a deionized initial wash liquid booster pump, a deionized initial wash liquid pressure gauge, a flow regulating valve, a deionized initial wash liquid heating rod, a deionized initial wash liquid temperature sensor, and a deionized initial wash liquid storage tank level gauge.

5. The cavity surface treatment system of an ultra-high purity chemical container according to claim 1, characterized in that: The polishing liquid system includes polishing liquid inlet and outlet solenoid valves, a polishing liquid booster pump, a polishing liquid pressure gauge, a flow regulating valve, a polishing liquid heating rod, a polishing liquid temperature sensor, and a polishing liquid storage tank level gauge.

6. The cavity surface treatment system of an ultra-high purity chemical container according to claim 1, characterized in that: The passivation liquid system includes passivation liquid inlet and outlet solenoid valves, a passivation liquid booster pump, a passivation liquid pressure gauge, a flow regulating valve, a passivation liquid heating rod, a passivation liquid temperature sensor, and a passivation liquid storage tank level gauge.

7. The cavity surface treatment system of an ultra-high purity chemical container according to claim 1, characterized in that: The chelating agent system includes chelating agent inlet and outlet solenoid valves, a chelating agent booster pump, a chelating agent pressure gauge, a flow regulating valve, a chelating agent heating rod, a chelating agent temperature sensor, and a chelating agent storage tank level gauge.

8. The cavity surface treatment system of an ultra-high purity chemical container according to claim 1, characterized in that: The pure water system includes a pure water solenoid valve, a pure water booster pump, a pure water pressure gauge and a flow regulating valve.

9. The cavity surface treatment system of an ultra-high purity chemical container according to claim 1, characterized in that: The ultrapure anhydrous ethanol system includes ultrapure anhydrous ethanol inlet and outlet solenoid valves, ultrapure anhydrous ethanol flow regulating valve, ultrapure anhydrous ethanol storage tank level gauge, ethanol addition solenoid valve, nitrogen pressurization solenoid valve, ethanol storage tank exhaust valve, ethanol purifier, and ethanol receiving tank.

10. A method for treating the cavity surface of an ultra-high purity electronic chemical container, using the cavity surface treatment system according to any one of claims 1 to 9, characterized in that: The following processes are included: ① The PLC program starts the heating functions of the degreasing liquid heating rod, the deionized initial washing liquid heating rod, the polishing liquid heating rod, the passivation liquid heating rod, and the chelating agent heating rod according to the set temperature, and automatically controls the temperature according to the signal feedback from the degreasing liquid temperature sensor, the deionized initial washing liquid temperature sensor, the polishing liquid temperature sensor, the passivation liquid temperature sensor, and the chelating agent temperature sensor; ②PLC realizes the automatic operation of container clamping, lifting and flipping through the container flipping system; ③When the container is turned over, the PLC turns on the degreasing liquid booster pump, the degreasing liquid inlet and outlet solenoid valves, and starts timing; When the recovery system level gauge shows an over-liquid level, the PLC turns on the recovery pump and recovery solenoid valve to recover the degreased liquid to a low level, and then turns off the recovery pump and recovery solenoid valve; ④ When the degreasing liquid spraying is completed, the PLC closes the degreasing liquid booster pump and the inlet and outlet solenoid valves, the degreasing liquid heating rod, and the degreasing liquid temperature sensor, and opens the recovery pump and the recovery solenoid valve to recover the degreasing liquid. When the recovery system level meter displays "0", the PLC closes the recovery pump and the recovery solenoid valve, opens the deionized initial wash liquid booster pump and the inlet and outlet solenoid valves, and starts timing; ⑤ When the liquid level gauge of the recovery system shows that the liquid level is over, the PLC turns on the recovery pump and the recovery solenoid valve to complete the recovery of the deionized initial wash liquid to the low liquid level, and then turns off the recovery pump and the recovery solenoid valve; ⑥ When the deionized initial wash liquid spraying is completed, the PLC turns off the deionized initial wash liquid booster pump and inlet and outlet solenoid valves, the deionized initial wash liquid heating rod, and the deionized initial wash liquid temperature sensor. When the recovery system level gauge displays "0", the PLC turns off the recovery pump and recovery solenoid valve, turns on the polishing liquid booster pump and the polishing liquid inlet and outlet solenoid valves, and starts timing; ⑦ When the liquid level gauge of the recovery system shows that the liquid level is over, the PLC turns on the recovery pump and the recovery solenoid valve to complete the recovery of the polishing liquid to the low liquid level, and then turns off the recovery pump and the recovery solenoid valve; ⑧When the polishing liquid spraying time is over, the PLC turns off the passivation liquid booster pump, the passivation liquid inlet and outlet solenoid valves, the passivation liquid heating rod, and the passivation liquid temperature sensor. When the recovery system level gauge shows "0", the PLC turns off the recovery pump and recovery solenoid valve, turns on the passivation liquid booster pump and the passivation liquid inlet and outlet solenoid valves, and starts timing; ⑨When the liquid level gauge of the recovery system shows that the liquid level is over, the PLC turns on the recovery pump and the passivation liquid recovery solenoid valve to complete the recovery of the passivation liquid to the low liquid level, and then turns off the recovery pump and the recovery solenoid valve; ⑩When the passivation liquid spraying time is over, the PLC turns off the passivation liquid booster pump, the passivation liquid inlet and outlet solenoid valves, the passivation liquid heating rod, and the passivation liquid temperature sensor. When the recovery system level gauge displays "0", the PLC turns off the recovery pump and recovery solenoid valve, turns on the chelating agent booster pump and the chelating agent inlet and outlet solenoid valves, and starts timing; ⑪When the recovery system level gauge shows an over-liquid level, the PLC turns on the recovery pump and recovery solenoid valve to complete the recovery of the chelating agent to a low liquid level, and then turns off the recovery pump and recovery solenoid valve; ⑫ When the chelating agent spraying is completed, the PLC turns off the chelating agent booster pump, the chelating agent inlet and outlet solenoid valves, the chelating agent heating rod, and the chelating agent temperature sensor. When the recovery system level meter displays "0", the PLC turns off the recovery pump and recovery solenoid valve, turns on the pure water booster pump, the pure water inlet and outlet solenoid valves, and the venting solenoid valve, and starts timing; ⑬ When the pure water spraying time ends and the recovery system liquid level meter displays "0", the PLC closes the vent valve, pure water booster pump, pure water inlet and outlet solenoid valves, opens the ultra-pure anhydrous ethanol inlet and outlet solenoid valves and nitrogen booster valve, and the PLC starts timing; ⑭ When the recovery system level gauge shows an over-liquid level, the PLC turns on the recovery pump, recovery solenoid valve, and purifier exhaust solenoid valve to recover to a low liquid level, and then turns off the recovery pump, recovery solenoid valve, and purifier exhaust solenoid valve; ⑮When the ultrapure anhydrous ethanol spraying is completed, the PLC closes the ultrapure anhydrous ethanol inlet and outlet solenoid valves and the nitrogen booster valve, and opens the recovery pump, recovery solenoid valve, purifier exhaust solenoid valve, ultrapure anhydrous ethanol inlet and outlet solenoid valves and nitrogen booster valve. When the recovery system level gauge displays "0", the PLC controls the closure of the recovery pump, recovery solenoid valve, purifier exhaust solenoid valve, ultrapure anhydrous ethanol inlet and outlet solenoid valves and nitrogen booster valve; ⑯ When the ultrapure anhydrous ethanol spraying time is completed, the PLC turns on the working gas solenoid valve and the gas heater, and the PLC starts timing; ⑰When the drying time is completed, the PLC turns off the gas heater, and after 1 hour, the PLC turns off the working gas solenoid valve; ⑱When the working gas solenoid valve is closed, the PLC controls the turning machine and electrical reset.

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