A stator dustproof component for a turbomolecular pump

Abstract

The present invention discloses a stator dustproof component for a turbomolecular pump, which specifically relates to the field of semiconductors. The component comprises a pump casing, wherein the interior of the pump casing has a cavity, a protective net is fixedly installed on the top of the pump casing, the bottom end of the pump casing is connected to a bottom cover by a thread, the top end of the bottom cover is fixedly installed with a stator, the surface of the stator is fixedly connected to a fixed base, the periphery of the fixed base is rotatably connected to a rotor, and a plurality of groups of moving blades are fixedly installed on the surface of the rotor at equal intervals from top to bottom. The technical key points are as follows: a rigid sleeve component is provided between the rotor and the fixed base, the rigid sleeve component includes a rigid sleeve body and a sleeve guide groove, the sleeve guide groove is threadedly rotated downward, and the rotation direction of the sleeve guide groove is consistent with the deflection direction of the moving blade, when the rotor rotates, the airflow is driven to rotate downward and enter along the notch of the sleeve guide groove, while the airflow is not affected and the backflow of the airflow is prevented, thereby achieving the dustproof effect.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductors, and more particularly to a stator dustproof component for a turbomolecular pump. Background Art

[0002] A turbomolecular pump is a vacuum pump that uses a high-speed rotating rotor to transfer momentum to gas molecules, causing them to acquire a directional velocity, thereby being compressed and driven toward the exhaust port to be drawn away by the front stage.

[0003] The turbomolecular pump is a high-speed rotating machine. It is a vacuum pump that uses a high-speed rotating impeller to transfer momentum to gas molecules, causing the gas to flow in a directional manner and extract air. The airflow of the molecular pump is driven by the rotation of the impeller to flow out of the outlet. However, due to the air pressure, part of the external airflow will surge back, driving external dust into the interior of the molecular pump and then attaching. The molecular pump has a complex structure and is not easy to disassemble. Secondly, in the molecular pump, since the power supply part included in the control unit has a boost circuit, a conversion circuit, an inverter circuit, etc. as a heat source, it is necessary to dissipate heat inside the molecular pump to prevent the electrical equipment from being deformed due to long-term high temperature conditions. Summary of the Invention

[0004] Technical problems solved

[0005] In order to overcome the above-mentioned defects of the prior art, an embodiment of the present invention provides a stator dustproof assembly for a turbomolecular pump, in which a rigid sleeve assembly is arranged between the rotor and the fixed base, and the rigid sleeve assembly includes a rigid sleeve body and a sleeve guide groove. The sleeve guide groove is threaded and rotated downward, and the rotation direction of the sleeve guide groove is consistent with the deflection direction of the moving blade. When the rotor rotates, it drives the airflow to rotate downward and enter along the notch of the sleeve guide groove, without affecting the flow of the airflow, preventing the airflow from surging back, thereby achieving a dustproof effect to solve the problems raised in the above-mentioned background technology.

[0006] Technical Solution

[0007] To achieve the above-mentioned object, the present invention provides the following technical solution: a stator dustproof component for a turbomolecular pump, comprising a pump casing, the interior of the pump casing having a cavity, a protective net fixedly mounted on the top of the pump casing, a bottom cover connected to the bottom end of the pump casing by a thread, a stator fixedly mounted on the top of the bottom cover, a fixed base fixedly connected to the surface of the stator, a rotor rotatably connected to the periphery of the fixed base, a plurality of moving blade groups fixedly mounted on the surface of the rotor at equal intervals from top to bottom, each of the moving blade groups including a plurality of moving blades, each group of the moving blades including a plurality of moving blades, and the plurality of moving blades are axially symmetrically distributed about the vertical center line of the rotor, the moving blades are arranged at 30° to the horizontal center line of the rotor, and the rotor and the stator are magnetically suspended;

[0008] A gap is left between the rotor and the fixed base, and a rigid sleeve assembly is arranged inside the gap. The rigid sleeve assembly is fixedly connected to the surface of the fixed base. The rigid sleeve assembly includes a rigid sleeve body and a sleeve guide groove fixedly installed on the surface of the rigid sleeve body. The sleeve guide groove is threaded and rotated downward, and the rotation direction of the sleeve guide groove is consistent with the deflection direction of the moving blade.

[0009] In a preferred embodiment, a static blade group is interspersed between every two of the moving blade groups, each of the static blade groups includes multiple static blades, the number of static blades in each group is equal to the number of moving blades, and the positions of the static blades and the moving blades correspond to each other up and down, and the static blades are set at 150° to the horizontal center line of the rotor, and each of the static blades is fixedly connected to the pump casing.

[0010] In a preferred embodiment, the surface of the protective net is penetrated by multiple groups of through holes, the bottom end of the protective net is rotatably connected to the stator, and a rigid ball for rotation is provided at the connection between the stator and the protective net.

[0011] In a preferred embodiment, a magnetic levitation motor is installed on the top of the bottom cover, the magnetic levitation motor is fixedly connected to the pump housing, and an exhaust port is opened on one side of the pump housing.

[0012] In a preferred embodiment, a central fixing rod and four groups of fixed connecting straight rods are fixedly connected to the surface of the bottom cover. The fixed connecting straight rods are arranged in an axially symmetrical distribution about the vertical center line of the central fixing rod, and the bottom ends of the central fixing rod and the fixed connecting straight rods are flush with the bottom end of the pump casing.

[0013] In a preferred embodiment, a cross hole plug is provided between the central fixing rod and the bottom cover, and the cross hole plug and the central fixing rod, and the cross hole plug and the fixed connecting straight rod are arranged in a sliding state. Four groups of heat dissipation holes are opened on the surface of the bottom cover, and the positions of the heat dissipation holes correspond to the positions of the four end corners of the cross hole plug in the upper and lower directions.

[0014] In a preferred embodiment, the bottom end of the bottom cover is higher than the bottom end of the pump housing, and a plurality of guide holes are provided on the surface of the pump housing.

[0015] Technical effects and advantages of the present invention:

[0016] 1. The present invention provides a rigid sleeve assembly between the rotor and the fixed base. The rigid sleeve assembly includes a rigid sleeve body and a sleeve guide groove. The sleeve guide groove is threaded downward, and the rotation direction of the sleeve guide groove is consistent with the deflection direction of the moving blades. When the rotor rotates, the airflow rotates downward and enters along the notch of the sleeve guide groove, preventing the airflow from backflow without affecting the flow of the airflow, thereby achieving a dust-proof effect.

[0017] 2. The present invention has a bottom cover connected to the bottom end of the pump housing through a thread, and the bottom cover and the bottom end of the pump housing are set at different heights. When the molecular pump is working, the external air pressure squeezes the cross hole plug to slide up, blocking the heat dissipation holes, and the temperature inside the molecular pump accumulates. When the molecular pump stops working, the air pressure inside and outside the molecular pump is consistent, and the cross hole plug falls due to its own gravity. The heat dissipation holes are used to conduct heat inside the pump housing. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] To more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present invention. Those skilled in the art can also derive other drawings based on these drawings without inventive effort.

[0019] Figure 1 A full cross-sectional view of the overall structure of a molecular pump stator dustproof assembly provided by one embodiment of the present invention.

[0020] Figure 2 This is an enlarged view of the structure of section A in the stator dust-proof assembly of a molecular pump provided by one embodiment of the present invention.

[0021] Figure 3 A schematic diagram of the overall structure of a molecular pump stator dustproof assembly provided by one embodiment of the present invention.

[0022] Figure 4 A schematic diagram of the overall structure of a rigid sleeve assembly in a molecular pump stator dustproof assembly provided by one embodiment of the present invention.

[0023] Among them, the figure marks are explained as follows: 1. Pump casing; 2. Protective net; 3. Rotor; 4. Stationary blades; 5. Stator; 6. Exhaust port; 7. Bottom cover; 8. Magnetic levitation motor; 9. Fixed base; 10. Rigid sleeve assembly; 1001. Rigid sleeve body; 1002. Sleeve guide groove; 11. Heat dissipation hole; 12. Moving blades; 13. Rigid ball bearing; 14. Guide hole; 15. Center fixing rod; 16. Fixed connecting straight rod; 17. Cross hole plug. DETAILED DESCRIPTION

[0024] To make the purpose, technical solutions, and advantages of the embodiments of the present invention more clear, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making any creative efforts shall fall within the scope of protection of the present invention.

[0025] See Figure 1-4 One embodiment of the present invention provides a stator dustproof assembly for a turbomolecular pump, comprising a pump housing 1, as shown in FIG. Figure 1 As shown, the interior of the pump casing 1 has a cavity, and a protective net 2 is fixedly installed on the top of the pump casing 1. The protective net 2 plays a certain protective role while screening out some dust. The bottom end of the pump casing 1 is connected to the bottom cover 7 by a thread, and the top of the bottom cover 7 is fixedly installed with a stator 5. The surface of the stator 5 is fixedly connected to a fixed base 9, and the outer periphery of the fixed base 9 is rotatably connected to the rotor 3. A plurality of moving blade groups are fixedly installed on the surface of the rotor 3 at equal intervals from top to bottom, and each moving blade group includes a plurality of moving blades 12, and the plurality of moving blades 12 are axially symmetrically distributed about the vertical center line of the rotor 3. The moving blades 12 are set at 30° to the horizontal center line of the rotor 3, and the rotor 3 and the stator 5 are magnetically suspended.

[0026] like Figure 1 and Figure 4 As shown, a gap is left between the rotor 3 and the fixed base 9, and a rigid sleeve assembly 10 is arranged inside the gap. The rigid sleeve assembly 10 is fixedly connected to the surface of the fixed base 9. The rigid sleeve assembly 10 includes a rigid sleeve body 1001 and a sleeve guide groove 1002 fixedly installed on the surface of the rigid sleeve body 1001. The sleeve guide groove 1002 is threaded and rotated downward, and the rotation direction of the sleeve guide groove 1002 is consistent with the deflection direction of the moving blade 12.

[0027] During the specific implementation operation, when the rotor 3 rotates, it drives the moving blades 12 to rotate, causing the airflow to rotate downward and flow out through the exhaust port 6, wherein the exhaust port 6 and the outside world circulate with each other, causing part of the airflow to flow back, bringing a small amount of dust into the inner cavity of the pump casing 1, and adhering to the inner wall of the rotor 3 and the outer wall of the fixed base 9. A rigid sleeve assembly 10 is arranged between the fixed base 9 and the rotor 3, wherein the rigid sleeve assembly 10 includes a rigid sleeve body 1001 and a sleeve guide groove 1002, the sleeve guide groove 1002 is threaded and rotated downward, and the rotation direction of the sleeve guide groove 1002 is consistent with the deflection direction of the moving blades 12, and the airflow rotates downward and enters along the notch of the sleeve guide groove 1002. While not affecting the airflow, the sleeve guide groove 1002 is arranged to rotate downward in a threaded manner to prevent the airflow from surging upward, thereby achieving a dust-proof effect.

[0028] In this embodiment, if Figure 1 As shown, a static blade group is interspersed between every two moving blade groups, and each of the static blade groups includes a plurality of static blades 4. The number of static blades 4 in each group is equal to the number of moving blades 12, and the positions of the static blades 4 and the moving blades 12 correspond to each other up and down, and the static blades 4 are set at 150° to the horizontal center line of the rotor 3, and each static blade 4 is fixedly connected to the pump casing 1.

[0029] In addition, if Figure 2 As shown, the surface of the guard net 2 is penetrated by multiple groups of through holes, and the bottom end of the guard net 2 is connected to the stator 5 in a rotating manner. The connection between the stator 5 and the guard net 2 is provided with a rigid ball 13 for rotation. Figure 1 As shown, a magnetic levitation motor 8 is installed on the top of the bottom cover 7. The star model of the magnetic levitation motor 8 is F-3000. The magnetic levitation motor 8 is fixedly connected to the pump housing 1. An exhaust port 6 is opened on one side of the pump housing 1.

[0030] In a specific implementation scheme, the main supporting force of the stator 5 comes from the support of the bottom cover 7, but the bottom is also where most of the electrical equipment is installed, which will generate a lot of heat. At the same time, an exhaust port 6 is provided at the bottom for air outlet, and the backflow of air will bring in dust. The stagnant bottom is a gathering place for heat and dust. When it is necessary to screw the bottom cover 7 from the lower end, the rigid ball 13 gives the stator 5 a supporting force to prevent the stator 5 from shifting. At the same time, the rigid ball 13 is rolled and installed between the stator 5 and the protective net 2, and does not hinder the relative rotation of the stator 5 and the protective net 2.

[0031] In this embodiment, if Figure 3 As shown, a central fixing rod 15 and four groups of fixed connecting straight rods 16 are fixedly connected to the surface of the bottom cover 7. The fixed connecting straight rods 16 are arranged in an axially symmetrical distribution about the vertical center line of the central fixing rod 15. The bottom ends of the central fixing rod 15 and the fixed connecting straight rods 16 are flush with the bottom end of the pump casing 1.

[0032] In this embodiment, if Figure 3 As shown, a cross hole plug 17 is provided between the central fixing rod 15 and the bottom cover 7. The cross hole plug 17 and the central fixing rod 15, and the cross hole plug 17 and the fixed connecting straight rod 16 are arranged in a sliding state. Four groups of heat dissipation holes 11 are opened on the surface of the bottom cover 7. The positions of the heat dissipation holes 11 correspond to the positions of the four end corners of the cross hole plug 17 in the upper and lower directions.

[0033] In addition, if Figure 3 As shown, the bottom end of the bottom cover 7 is higher than the bottom end of the pump housing 1, and a plurality of guide holes 14 are opened on the surface of the pump housing 1. Figure 1As shown, the gap thickness between the fixed base 9 and the rotor 3 is set to 10 mm. To ensure the normal operation of the machine, the minimum spacing between the base 9 and the rotor 3 cannot be less than 1.2 mm. Preferably, in this embodiment, the total thickness of the rigid sleeve body 1001 and the sleeve guide groove 1002 is set to less than 8.5 mm. Of course, the size setting here is not unique, as long as the operating conditions are met.

[0034] In a specific implementation scheme, when the molecular pump starts to operate, there is a certain difference in the internal and external air pressure. At the same time, the bottom cover 7 and the bottom end of the pump casing 1 are not set at the same height. The external air pressure squeezes the cross hole plug 17 to slide up, blocking the heat dissipation hole 11 for the molecular pump to work, wherein the center fixing rod 15 and the fixed connecting straight rod 16 guide and fix the up and down movement of the cross hole plug 17. At the same time, the bottom cover 7 can be selected and unscrewed by rotating the cross hole plug 17, thereby cleaning the dust at the bottom end of the pump casing 1. When the molecular pump stops working, the internal and external air pressures are consistent, and the cross hole plug 17 falls due to its own gravity and fits the top end of the center fixing rod 15. At this time, the heat dissipation hole 11 is used to discharge the internal heat of the pump casing 1.

[0035] The advantage of the present invention is that a rigid sleeve assembly is provided between the rotor and the fixed base, the rigid sleeve assembly includes a rigid sleeve body and a sleeve guide groove, the sleeve guide groove is threaded and rotated downward, and the rotation direction of the sleeve guide groove is consistent with the deflection direction of the moving blade, when the rotor rotates, the airflow is driven to rotate downward and enter along the notch of the sleeve guide groove, without affecting the flow of airflow and preventing the airflow from backflow, thereby achieving a dust-proof effect; and, the present invention has a bottom cover connected to the bottom end of the pump casing by a thread, and the bottom cover and the bottom end of the pump casing are set at different heights. When the molecular pump is working, the external air pressure squeezes the cross hole plug to slide up, blocking the heat dissipation holes, and the internal temperature of the molecular pump accumulates. When the molecular pump stops working, the air pressure inside and outside the molecular pump is consistent, and the cross hole plug falls due to its own gravity. The heat dissipation holes are used to discharge the heat inside the pump casing.

[0036] The above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit the same. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements will not cause the essence of the corresponding technical solutions to deviate from the protection scope of the technical solutions of the various embodiments of the present invention.

Claims

1. A stator dustproof assembly for a turbomolecular pump, comprising a pump housing, characterized in that: The interior of the pump housing has a cavity, a protective net is fixedly installed on the top of the pump housing, the bottom end of the pump housing is connected to a bottom cover by a thread, the top of the bottom cover is fixedly installed with a stator, the surface of the stator is fixedly connected to a fixed base, the outer periphery of the fixed base is rotatably connected to a rotor, a plurality of moving blade groups are fixedly installed on the surface of the rotor at equal intervals from top to bottom, each of the moving blade groups includes a plurality of moving blades, and the plurality of moving blades are arranged in an axisymmetric distribution with respect to the vertical center line of the rotor, the moving blades are arranged at 30° to the horizontal center line of the rotor, and the rotor and the stator are connected in a magnetic suspension manner; A gap is left between the rotor and the fixed base, and a rigid sleeve assembly is provided inside the gap. The rigid sleeve assembly is fixedly connected to the surface of the fixed base, and the rigid sleeve assembly includes a rigid sleeve body and a sleeve guide groove fixedly installed on the surface of the rigid sleeve body. The sleeve guide groove is threaded and rotated downward, and the rotation direction of the sleeve guide groove is consistent with the deflection direction of the moving blade; The bottom cover surface is fixedly connected with a central fixing rod and four sets of fixed connecting straight rods, the fixed connecting straight rods are arranged in an axisymmetric distribution with respect to the vertical center line of the central fixing rod, and the bottom ends of the central fixing rod and the fixed connecting straight rods are flush with the bottom end of the pump housing; A cross hole plug is provided between the central fixing rod and the bottom cover. The cross hole plug and the central fixing rod, and the cross hole plug and the fixed connecting straight rod are arranged in a sliding state. Four groups of heat dissipation holes are opened on the surface of the bottom cover. The positions of the heat dissipation holes correspond to the positions of the four end corners of the cross hole plug.

2. A stator dustproof assembly for a turbomolecular pump according to claim 1, characterized in that: A static blade group is interspersed between every two of the moving blade groups, and each of the static blade groups includes multiple static blades. The number of static blades in each group is equal to the number of moving blades, and the positions of the static blades and the moving blades correspond to each other up and down. The static blades are set at 150° to the horizontal center line of the rotor, and each of the static blades is fixedly connected to the pump casing.

3. The stator dustproof assembly for a turbomolecular pump according to claim 1, characterized in that: The surface of the protective net is penetrated by a plurality of through holes. The bottom end of the protective net is rotatably connected to the stator. A rigid ball bearing is provided at the connection between the stator and the protective net.

4. The stator dustproof assembly for a turbomolecular pump according to claim 1, characterized in that: A magnetic levitation motor is installed on the top of the bottom cover. The magnetic levitation motor is fixedly connected to the pump housing. An exhaust port is opened on one side of the pump housing.

5. The stator dustproof assembly for a turbomolecular pump according to claim 1, characterized in that: The bottom end of the bottom cover is higher than the bottom end of the pump housing, and a plurality of guide holes are opened on the surface of the pump housing.

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