A mandrel surface quality automatic adjustment detection system and working method thereof

Abstract

A system for automatically adjusting and detecting the surface quality of a mandrel and a working method thereof belong to the field of ultra-precision measurement technology. A motion module and an industrial camera imaging system are provided on the base, an automatic leveling mechanism and a sensor detection system are provided on the motion module, a loading platform is provided on the automatic leveling mechanism, and a mandrel and an automatic centering mechanism are provided on the loading platform; the automatic leveling mechanism and the automatic centering mechanism are both arranged in coordination with the sensor detection system and the data transmission of the industrial camera imaging system. The method is as follows: preliminarily determine the tilt angle error through the industrial camera imaging system and preliminarily adjust it through the leveling legs; the mandrel rotates and cooperates with the probe to calculate the tilt angle error and then precisely level it; the mandrel is placed according to a circular line; a preliminary concentric adjustment is made through the industrial camera imaging system; the mandrel rotates and cooperates with the probe to calculate the eccentricity error and then precisely adjusts it; adjusts the camera use angle, and measures the mandrel in coordination with the sensor detection system. The present invention improves the efficiency and accuracy of mandrel measurement.

Description

Technical Field

[0001] The invention relates to a core shaft surface quality automatic adjustment detection system and a working method thereof, belonging to the technical field of ultra-precision measurement. Background Art

[0002] The Wolter-I type grazing incidence imaging system is an important focusing imaging system. Currently, the Wolter-I type imaging system is widely used in optical collectors in X-ray astronomical telescopes, X-ray water window microscopes, and extreme ultraviolet (EUV) lithography systems. It is a grazing incidence imaging system based on a quadratic rotationally symmetric surface. Since the effective area of ​​a single-layer Wolter-I type focusing mirror is very limited, most imaging systems use a multi-layer nested structure to increase the effective light collection area.

[0003] The processing and inspection of the high-precision concave combined grazing incidence imaging aspheric surface of the Wolter-I type grazing incidence imaging system is very difficult. In order to reduce the processing difficulty, a replication process is often used for manufacturing.

[0004] First, the convex surface of the mandrel is manufactured using traditional and ultra-precision machining methods to match the shape and precision requirements of the concave surface. Then, the reflective surface of the focusing mirror is replicated using the atmospheric deposition method. The focusing mirror is then manufactured through electroforming and demolding processes. Since the surface quality of the mandrel is as high as the quality of the replicated reflective surface, the performance indicators such as dimensional error, surface roughness, waviness and shape error need to be accurately measured multiple times during the manufacturing process of the mandrel in order to provide accurate and reliable reference data for the subsequent replication process.

[0005] There are two methods for detecting the mandrel surface: contact and non-contact.

[0006] Non-contact mainly refers to optical detection methods. Optical measurement methods can provide very high resolution (sub-nanometer level), but the measurement range is limited and is often used to measure micro-roughness with a small spatial frequency scale. If the measurement range is to be extended, it is usually at the expense of accuracy. For the measurement of shape errors with a large spatial frequency scale, the sub-aperture splicing method is often used. The splicing error is a key factor affecting the measurement accuracy. When the size of the workpiece increases, the number of sub-apertures also increases, which will lead to long measurement time, complex data processing, and error transmission and accumulation.

[0007] Contact measurement is suitable for surface measurement during the processing process. Common contact measurement instruments include coordinate measuring machines (CMMs) and profilometers. CMMs are often used to measure workpiece dimensions, with a large measurement range and a resolution of sub-micron. Profilometers are commonly used instruments for measuring the two-dimensional dimensions, surface contours, waviness and roughness of workpieces. They have the advantages of high resolution (sub-nanometer) and a large vertical measurement range.

[0008] However, the commonly used contact and non-contact measuring instruments currently mainly manually adjust the positional relationship between the workpiece and the measuring sensor before formal measurement in order to obtain accurate measurement results. This manual adjustment requires the operator to have rich practical experience, and the adjustment process needs to be repeated many times. It takes a long time to complete a measurement, which reduces the detection efficiency.

[0009] In addition, commonly used measuring instruments have their own strengths. Some are suitable for large-scale measurement, while others are suitable for small-scale evaluation. As a result, multiple measuring instruments are needed to complete surface quality inspection during the manufacturing process of the mandrel, which involves multiple adjustments, reduces production efficiency, increases the probability of human factors and other uncertain factors during the measurement process, and increases the difficulty of accurately measuring the surface of the Wolter-I mandrel. Summary of the invention

[0010] In order to solve the problems existing in the background technology, the present invention provides a spindle surface quality automatic adjustment detection system and a working method thereof.

[0011] To achieve the above-mentioned purpose, the present invention adopts the following technical scheme: a system for automatically adjusting and detecting the surface quality of a core shaft, comprising a base, a stage, a motion module, an automatic leveling mechanism, an automatic centering mechanism, an industrial camera imaging system and a sensor detection system; the base is provided with a motion module and an industrial camera imaging system, the motion module is provided with an automatic leveling mechanism and a sensor detection system, the automatic leveling mechanism is provided with a stage, a core shaft is placed on the stage, and an automatic centering mechanism is provided on the stage; the automatic leveling mechanism and the automatic centering mechanism are both arranged in coordination with the sensor detection system and the industrial camera imaging system data transmission.

[0012] A working method of a mandrel surface quality automatic adjustment detection system of the present invention comprises the following steps:

[0013] S1: Use the industrial camera imaging system to photograph the cylindrical marker at the center of the stage to preliminarily determine the tilt angle error of the stage; if the tilt angle error of the stage is within the allowable range, proceed to S3, otherwise proceed to S2;

[0014] S2: According to the tilt angle error obtained in S1, the corresponding leveling legs are adjusted respectively to preliminarily adjust the tilt angle error of the stage until the industrial camera imaging system can shoot qualified;

[0015] S3: The spindle motor starts according to the signal transmitted by the industrial camera imaging system, drives the spindle to rotate, and uses the probe to measure data at different cross sections of the spindle to calculate the inclination angle error of the stage, and then adjusts the corresponding leveling legs to achieve precise leveling until the error is within the allowable range;

[0016] S4: Place the mandrel according to the circular line on the stage, and visually check that the mandrel is concentric with the circular line;

[0017] S5: photographing the cylindrical marker on the stage and the end face of the mandrel through an industrial camera imaging system to determine whether the mandrel and the stage are concentric; if the mandrel and the stage are concentric, proceed to S8, otherwise, proceed to S6;

[0018] S6: The micro spindle motor starts according to the signal transmitted by the industrial camera imaging system, drives the threaded rod to move, and makes a preliminary concentric adjustment between the spindle and the stage until the industrial camera imaging system can shoot qualified images;

[0019] S7: The spindle motor starts according to the signal transmitted by the industrial camera imaging system, drives the spindle to rotate, and starts the probe to collect the circumference data of one of the cross sections on the spindle. After calculating the eccentricity error, the spindle and the stage are precisely adjusted to be concentric through the corresponding threaded rod until the error is within the allowable range.

[0020] S8: Adjust the use angle of the camera in the industrial camera imaging system, cooperate with the sensor detection system to accurately measure the micro-roughness and waviness of the mandrel surface, as well as the end face and side surface of the mandrel, to complete the accurate measurement of the mandrel size, shape profile, surface roughness and waviness evaluation indicators.

[0021] Compared with the prior art, the present invention has the following beneficial effects:

[0022] 1. The present invention adopts an automatic leveling mechanism and an automatic centering mechanism, detects position deviation through a sensor detection system and an industrial camera imaging system, and feeds the deviation back to the automatic leveling mechanism and the automatic centering mechanism to complete the automatic adjustment of the mandrel position before measurement, solves the problem of precise position adjustment of the mandrel before formal measurement, and improves measurement efficiency and accuracy.

[0023] 2. The present invention adopts a combination of a non-contact industrial camera imaging system and a contact sensor detection system. Large-range or large-size detection is achieved by a contact sensor detection system, and small-range or micro-scale detection is achieved by an industrial camera imaging system. The detection of medium scales or ranges such as waviness can be achieved by combining the two systems in combination with actual conditions. This solves the problem of multiple indicators and multiple precise measurements of the Wolter-I type mandrel in the processing and manufacturing process, improves the detection efficiency of the mandrel, reduces the probability of human factors and other uncertain factors in the measurement process, and can better achieve fast and accurate measurement of the surface of the Wolter-I type mandrel. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 13 is a schematic diagram of the structure of the present invention; wherein: 3 is an X-axis motor, 4 is an X-axis slider, 5 is a Y-axis motor, and 13 is a Z-axis motor;

[0025] Figure 2 It is an exploded diagram of the connection relationship between the stage, the automatic leveling mechanism and the automatic centering mechanism;

[0026] Figure 3 It is a schematic diagram of the connection relationship between the stage and the mandrel;

[0027] Figure 4 It is a schematic diagram of the connection relationship between the stage and the automatic centering mechanism. DETAILED DESCRIPTION

[0028] The technical solution of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the invention, rather than all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention.

[0029] A system for automatically adjusting and detecting the surface quality of a mandrel comprises a base 1, a stage 9, a motion module, an automatic leveling mechanism, an automatic centering mechanism, an industrial camera imaging system and a sensor detection system; the base 1 is provided with a motion module and an industrial camera imaging system, the motion module is provided with an automatic leveling mechanism and a sensor detection system, the automatic leveling mechanism is provided with a stage 9, the stage 9 is preferably a disc structure, a mandrel 10 is placed on the stage 9, and the stage 9 is provided with an automatic centering mechanism; the automatic leveling mechanism and the automatic centering mechanism are both arranged in coordination with the sensor detection system and the industrial camera imaging system data transmission.

[0030] The base 1 is preferably made of granite, supported at three points, and has a plurality of threaded mounting holes 2 arranged on the upper surface for installation and connection with other equipment on top of it. It is mainly used for stably supporting the automatic leveling mechanism, the automatic centering mechanism and the sensor detection system.

[0031] The motion module is an XYZ motion module based on a Cartesian coordinate system, preferably a DNS-HS150 fully sealed linear slide module, which can be customized. One motion axis uses one set of linear motion modules, and three axes XYZ are assembled using three sets of linear motion modules. The motion module mainly realizes the automatic adjustment of the position of the mandrel 10 along the X and Y directions during the measurement process, and the precise positioning of the probe 14 of the sensor detection system along the Z direction.

[0032] The industrial camera imaging system includes a camera bracket 12 and a camera 11. The camera bracket 12 is fixed on the base 1. The industrial camera imaging system is preferably a WP-GE2000 Sony CMOS miniature industrial camera. The camera 11 shoots the cylindrical marker 24 at the center of the stage to preliminarily determine the stage tilt angle error, and the camera shoots the positional relationship between the cylindrical marker 24 at the center of the stage and the end face of the mandrel 10 to preliminarily determine the centering error; then the error data is transmitted to the control system of the automatic leveling mechanism or the automatic centering mechanism for adjustment; in addition, the industrial camera imaging system can also accurately measure evaluation indicators such as the micro-roughness and waviness of the mandrel surface.

[0033] The sensor detection system includes a probe 14 and a measuring system 15. The sensor detection system is arranged on the Z axis of the motion module and is mainly used to realize contact measurement of the core shaft surface; preferably, it is a RENISHAW-OMP60 machine tool.

[0034] The automatic leveling mechanism includes a bracket 1 7, a bracket 2 8, a plurality of leveling legs 16 and a spindle motor 17; the lower end of the bracket 1 7 is fixedly connected to the Y-axis slider 6 of the motion module by bolts, and the Y-axis movement of the sample carrier 9 is realized by the Y-axis of the motion module; the upper end of the bracket 1 7 is adjustably connected to the bracket 2 8 by a plurality of leveling legs 16, and the plurality of leveling legs 16 are connected to the bracket 1 7 by threads, and the plurality of leveling legs 16 are evenly distributed along the circumference of the bracket 1 7, and a plurality of leveling legs 16 are provided at the lower end of the bracket 2 8, which are arranged one by one in correspondence with the leveling legs 16. The blind holes are arranged in the workbench 8, and the upper end surfaces of the multiple leveling legs 16 are in contact connection with the bottom surface of the blind holes of the bracket 8, so that the multiple leveling legs 16 can be telescopically adjusted to adjust the bracket 8, thereby making the workbench 9 and the spindle 10 level; the upper end of the bracket 8 is fixedly provided with a vertically arranged spindle motor 17, and the output shaft of the spindle motor 17 is coaxially fixedly connected to the workbench 9 for controlling the rotation of the workbench 9 and the spindle 10; and the workbench 9 is rotatably connected to the bracket 8 through a bearing 18, and the bearing 18 ensures the relative rotational movement between the bracket 8 and the workbench 9.

[0035] The automatic centering mechanism includes a pressure block 19, a threaded rod 20 and a micro-mandrel motor 21; a plurality of radially arranged slide grooves 22 are evenly distributed along the circumference of the outer edge of the upper surface of the worktable 9, and a pressure block 19 is slidably inserted in each of the slide grooves 22. The upper end of each pressure block 19 is threadedly connected to the corresponding parallel threaded rod 20, and the outer end of each threaded rod 20 is driven to rotate by the corresponding micro-mandrel motor 21, and each of the micro-mandrel motors 21 is fixed on the corresponding worktable 9.

[0036] A working method of a mandrel surface quality automatic adjustment detection system of the present invention comprises the following steps:

[0037] S1: photograph the cylindrical marker 24 at the center of the stage 9 through the industrial camera imaging system to preliminarily determine the tilt angle error of the stage 9; if the tilt angle error of the stage 9 is within the allowable range, proceed to S3, otherwise proceed to S2;

[0038] S2: According to the tilt angle error obtained in S1, the corresponding leveling legs 16 are adjusted respectively to preliminarily adjust the tilt angle error of the stage 9 until the industrial camera imaging system can shoot qualified;

[0039] S3: The spindle motor 17 starts according to the signal transmitted by the industrial camera imaging system, drives the spindle 10 to rotate, and uses the probe 14 to measure data at different cross sections of the spindle 10 to calculate the inclination angle error of the stage 9, and then adjusts the corresponding leveling legs 16 to achieve precise leveling until the error is within the allowable range;

[0040] S4: placing the mandrel 10 according to the circular line 23 on the stage 9, visually checking that the mandrel 10 is as concentric with the circular line 23 as possible;

[0041] S5: photographing the cylindrical marker 24 on the stage 9 and the end surface of the mandrel 10 through an industrial camera imaging system to determine whether the mandrel 10 is concentric with the stage 9; if the mandrel 10 is concentric with the stage 9, proceed to S8, otherwise, proceed to S6;

[0042] S6: The micro spindle motor 21 starts according to the signal transmitted by the industrial camera imaging system, and drives the threaded rod 20 to move, and performs preliminary concentric adjustment on the spindle 10 and the stage 9 until the industrial camera imaging system can take pictures properly;

[0043] S7: The spindle motor 17 is started according to the signal transmitted by the industrial camera imaging system, and drives the spindle 10 to rotate. At the same time, the probe 14 is started to collect the circumferential data of one of the cross sections on the spindle 10. After the eccentricity error is calculated, the spindle 10 and the stage 9 are precisely concentrically adjusted through the corresponding threaded rod 20 until the error is within the allowable range.

[0044] S8: Adjust the use angle of the camera 11 in the industrial camera imaging system, cooperate with the sensor detection system to accurately measure the micro-roughness and waviness of the surface of the mandrel 10, and measure the end face and side surface of the mandrel 10, so as to complete the accurate measurement of the mandrel size, shape profile, surface roughness and waviness evaluation indicators.

[0045] It will be apparent to those skilled in the art that the invention is not limited to the details of the exemplary embodiments described above and that the invention can be implemented in other forms without departing from the spirit or essential features of the invention. Therefore, the embodiments should be considered in all respects as exemplary and non-limiting, and the scope of the invention is defined by the appended claims rather than the foregoing description, and it is intended that all variations within the meaning and range of equivalents of the claims be included in the invention. Any reference numeral in a claim should not be considered as limiting the claim to which it relates.

[0046] In addition, it should be understood that although the present specification is described according to implementation modes, not every implementation mode contains only one independent technical solution. This description of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment may also be appropriately combined to form other implementation modes that can be understood by those skilled in the art.

Claims

1. A working method of a spindle surface quality automatic adjustment detection system, the method is completed based on the detection system, the detection system comprises a base (1), a stage (9), a motion module, an automatic leveling mechanism, an automatic centering mechanism, an industrial camera imaging system and a sensor detection system; the base (1) is provided with a motion module and an industrial camera imaging system, the motion module is provided with an automatic leveling mechanism and a sensor detection system, the automatic leveling mechanism is provided with a stage (9), a spindle (10) is placed on the stage (9), and the stage (9) is provided with an automatic centering mechanism; the automatic leveling mechanism and the automatic centering mechanism are both arranged in coordination with the sensor detection system and the industrial camera imaging system data transmission; the characteristics are: The method comprises the following steps: S1: photographing the cylindrical marker (24) at the center of the stage (9) through an industrial camera imaging system to preliminarily determine the tilt angle error of the stage (9); if the tilt angle error of the stage (9) is within the allowable range, proceed to S3; otherwise, proceed to S2; S2: According to the tilt angle error obtained in S1, the corresponding leveling legs (16) are adjusted respectively to preliminarily adjust the tilt angle error of the stage (9) until the industrial camera imaging system can capture the image properly; S3: The spindle motor (17) is started according to the signal transmitted by the industrial camera imaging system, and drives the spindle (10) to rotate. The probe (14) measures the data of different cross sections of the spindle (10), and calculates the tilt angle error of the stage (9). Then, the corresponding leveling legs (16) are adjusted to achieve precise leveling until the error is within the allowable range. S4: placing the mandrel (10) along the annular line (23) on the stage (9), and visually checking that the mandrel (10) and the annular line (23) are concentric; S5: photographing the cylindrical marker (24) on the stage (9) and the end surface of the mandrel (10) through an industrial camera imaging system to determine whether the mandrel (10) and the stage (9) are concentric; if the mandrel (10) and the stage (9) are concentric, proceed to S8; otherwise, proceed to S6; S6: The micro spindle motor (21) is started according to the signal transmitted by the industrial camera imaging system, and then drives the threaded rod (20) to move, and performs preliminary concentric adjustment on the spindle (10) and the stage (9) until the industrial camera imaging system can take pictures properly; S7: The spindle motor (17) is started according to the signal transmitted by the industrial camera imaging system, and drives the spindle (10) to rotate. At the same time, the probe (14) is started to collect the circumferential data of one of the cross sections on the spindle (10). After the eccentricity error is calculated, the spindle (10) and the stage (9) are precisely adjusted concentrically through the corresponding threaded rod (20) until the error is within the allowable range; S8: Adjust the use angle of the camera (11) in the industrial camera imaging system, cooperate with the sensor detection system to accurately measure the micro-roughness and waviness of the surface of the core shaft (10), measure the end face and side surface of the core shaft (10), and complete the accurate measurement of the core shaft size, shape profile, surface roughness and waviness evaluation indicators.

2. The working method of the automatic adjustment and detection system for the mandrel surface quality according to claim 1 is characterized in that: The automatic leveling mechanism comprises a bracket one (7), a bracket two (8), a plurality of leveling legs (16) and a spindle motor (17); the lower end of the bracket one (7) is connected to the Y-axis slider (6) of the motion module, the upper end of the bracket one (7) is adjustably connected to the bracket two (8) via the plurality of leveling legs (16), the upper end of the bracket two (8) is fixedly provided with a vertically arranged spindle motor (17), the output shaft of the spindle motor (17) is coaxially fixedly connected to the stage (9), and the stage (9) is rotatably connected to the bracket two (8) via a bearing (18).

3. The working method of the automatic adjustment and detection system for the mandrel surface quality according to claim 2 is characterized in that: The automatic centering mechanism comprises a pressure block (19), a threaded rod (20) and a micro spindle motor (21); a plurality of radially arranged slide grooves (22) are evenly distributed along the circumference of the upper surface of the worktable (9); a pressure block (19) is slidably inserted into each of the slide grooves (22); the upper end of each pressure block (19) is respectively threadedly connected to a corresponding parallel threaded rod (20); the outer end of each threaded rod (20) is respectively driven to rotate by a corresponding micro spindle motor (21); and each micro spindle motor (21) is respectively fixed on the corresponding worktable (9).

Images