A detection device for the bonding state of silicon wafers in a graphite boat and its usage method

Abstract

The present invention discloses a device for detecting the bonding state of silicon wafers in a graphite boat and its usage method, which includes a bracket and a rotatable conveyor belt. A graphite boat is arranged on the conveyor belt, and silicon wafers are arranged inside the graphite boat; the bracket is slidably connected with a second movable plate, and a laser emitter and a laser receiver are respectively connected to both ends of the second movable plate. The laser emitter and the laser receiver are arranged on both sides of the graphite boat; the bracket is rotatably connected with a first lead screw, the first lead screw is connected with a first motor, the first motor is fixedly connected with the bracket, the first lead screw is provided with a first nut in cooperation, and the first nut is fixedly connected with the second movable plate. The present invention can detect abnormalities such as deformation of the wafers in the graphite boat, shortage of wafers during loading, warping of wafers, warping of wafers during unloading, and dropping of wafers. After detecting the abnormalities, manual intervention can be carried out in time or the silicon wafers can be clamped to avoid the generation of defects, improve the yield rate of the production line, and reduce the production cost.

Description

Technical Field

[0001] The present invention relates to the technical field of photovoltaic equipment, and particularly relates to a device for detecting the fitting state of silicon wafers in a graphite boat and a using method thereof. Background Art

[0002] In the current manufacturing process of crystalline silicon solar cells, for the growth of aluminum oxide / silicon nitride films, most use a graphite boat as a carrier and grow in a tube PECVD manner. The silicon wafer and the graphite boat generally adopt a vertical clamping contact method. The general contact method is 3-point clamping contact, namely one clamping point at the bottom, one clamping point at the lower part of the left side, and one clamping point at the upper part of the right side. The state of the silicon wafer fitting the graphite boat piece affects the radio frequency state during the coating process. If there are situations such as wafer dropping or fragmentation, it will cause electrode conduction and high-frequency alarms, thus affecting production capacity and film formation quality. During the wafer unloading process, abnormal fitting of the silicon wafers in the boat and the graphite boat pieces will cause abnormalities such as fragmentation and scratching. During the wafer loading and unloading process, missed suction or insertion will cause silicon wafer process abnormalities, resulting in rework.

[0003] Currently, normal production lines all adopt the method of manual inspection, and the quality confirmed manually is greatly affected by personnel fluctuations. Before manual inspection, the graphite boat needs to be taken out, and after the inspection is completed, the graphite boat needs to be put back in place, which is time-consuming and laborious, and is likely to cause damage and contamination to the graphite boat and silicon wafers; the reliability and timeliness of manual inspection are poor; when detecting during the entry and exit of the boat, if there are warped wafers, the graphite boat needs to be completely withdrawn again for processing, which affects the rhythm, the inspection process is time-consuming, affects the normal production rhythm, and affects production capacity. Summary of the Invention

[0004] In order to solve the problems existing in the above-mentioned prior art, a device for detecting the fitting state of silicon wafers in a graphite boat and a using method thereof are provided.

[0005] The technical solution adopted by the present invention to solve its technical problems is:

[0006] The present invention provides a device for detecting the bonding state of silicon wafers in a graphite boat, which includes a bracket and a rotatable conveyor belt. A graphite boat is arranged on the conveyor belt, and silicon wafers are arranged in the graphite boat. The bracket is slidably connected with a second movable plate. Laser emitters and laser receivers are respectively connected to both ends of the second movable plate, and the laser emitters and the laser receivers are arranged on both sides of the graphite boat. The bracket is rotatably connected with a first lead screw, the first lead screw is connected with a first motor, the first motor is fixedly connected with the bracket, the first lead screw is provided with a first nut in cooperation, and the first nut is fixedly connected with the second movable plate. The second movable plate is rotatably connected with a third lead screw, the third lead screw is connected with a third motor, the third motor is fixedly connected with the second movable plate, the third lead screw is provided with a third nut in cooperation, and the third nut is fixedly connected with a fixed seat. The second movable plate is slidably connected with the fixed seat, a laser rangefinder is connected to the fixed seat, and the laser rangefinder is arranged above the graphite boat. The laser emitters, the laser receivers, the conveyor belt, the first motor, the third motor and the laser rangefinder are connected to a controller.

[0007] Preferably, first guide rails are fixedly connected to both ends of the bracket, and both ends of the second movable plate are slidably connected with the first guide rails. A long hole is formed in the second movable plate, the fixed seat is slidably connected with the long hole, and the laser rangefinder is connected after the fixed seat passes through the long hole.

[0008] Preferably, the laser emitter emits a laser ray, the laser ray passes through the middle position of the silicon wafer, and the height of the laser ray is 0.3-1.0 mm higher than the surface of the silicon wafer.

[0009] Preferably, the bracket is connected with a clamping jaw through a moving mechanism. The clamping jaw includes a clamping jaw body. A plurality of horizontally arranged slide rails are fixedly connected to the clamping jaw body, and guiding sliders are slidably connected in the slide rails. The guiding sliders are fixedly connected with movable clamping jaws.

[0010] Preferably, a vertically arranged sliding block is slidably connected to the clamping jaw body. A connecting rod is hinged to the sliding block, and the other end of the connecting rod is hinged to the guiding slider. An electric push rod is fixedly connected to the clamping jaw body, and the electric push rod is connected to the sliding block. Two movable clamping jaws are provided and symmetrically arranged on both sides of the sliding block. The electric push rod is connected to the controller.

[0011] Preferably, the moving mechanism includes second guide rails fixedly connected to both ends of the bracket. A first movable plate is slidably connected between the second guide rails. The bracket is rotatably connected to a second lead screw, and a second lead nut is arranged in cooperation with the second lead screw. The second lead nut is fixedly connected to the first movable plate; the second lead screw is connected to a second motor, and the second motor is fixedly connected to the bracket; the second motor is connected to the controller.

[0012] Preferably, the first movable plate is rotatably connected to a fourth lead screw and a limiting rod. A fourth lead nut is arranged in cooperation with the fourth lead screw, and the fourth lead nut is slidably connected to the limiting rod; the fourth lead screw is connected to a fourth motor, and the fourth motor is fixedly connected to the first movable plate. The fourth lead nut is fixedly connected to a support plate; the fourth motor is connected to the controller.

[0013] Preferably, the support plate is rotatably connected to a nut, and a screw rod is threadedly connected to the nut. The support frame is provided with a through hole for the screw rod to pass through. After the screw rod passes through the through hole, it is connected to a jaw body. The jaw body is fixedly connected to a guide rod, and the guide rod is slidably connected to the support plate; the support plate is fixedly connected to a vertical motor, the vertical motor is connected to a driving wheel, and the nut is fixedly sleeved with a driven wheel. A synchronous belt is hung between the driving wheel and the driven wheel; the vertical motor is connected to the controller.

[0014] The present invention also proposes a use method of a silicon wafer bonding state detection device in a graphite boat, adopting the above-mentioned silicon wafer bonding state detection device in a graphite boat, including the following steps:

[0015] S1: The controller controls the conveyor belt to stop working, and then the controller controls the first motor to work. The first motor drives the first lead screw to rotate, and then drives the second movable plate to move along the first guide rail through the first lead nut, so that the laser emitter and the laser receiver move to one side of the graphite boat to be inspected;

[0016] S2: The controller controls the laser emitter and the laser receiver to work. The laser emitter emits a laser ray. When first detecting the placement position of the graphite boat, if the laser receiver cannot receive the laser ray, the controller controls the third motor to work. The third motor controls the third lead screw to rotate, and the third lead screw drives the laser rangefinder to move through the third lead nut. The deformation degree of the graphite boat is detected by the laser rangefinder. If the deformation degree exceeds the threshold, a corresponding signal is transmitted to the controller for manual replacement;

[0017] S3: If the laser receiver receives the laser ray, it means that the placement position of the graphite boat meets the requirements at this time. Then the controller controls the first motor to move, and at the same time the laser emitter emits a laser ray. If the laser receiver receives the laser ray, it means that the placement position of the silicon wafer meets the requirements at this time;

[0018] S4: If the laser receiver cannot receive the laser beam, it indicates that the silicon wafer is warped, chipped, or tilted at this time. Then, the controller controls the third motor to operate, and the third motor controls the third lead screw to rotate. The laser rangefinder is driven by the third nut to move to one side of the problematic silicon wafer. The deformation degree of the silicon wafer is detected by the laser rangefinder. If the deformation degree exceeds the threshold, a corresponding signal is transmitted to the controller.

[0019] S5: The controller controls the moving mechanism to operate. The moving mechanism drives the gripper to move above the silicon wafer. The controller controls the electric push rod to operate, and the electric push rod drives the sliding block to work. The sliding block drives the guiding slider to move along the slide rail through the connecting rod. The guiding slider drives the movable gripper to clamp the silicon wafer. After all the silicon wafers are detected, the controller controls the conveyor belt to continue moving.

[0020] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0021] 1. In the present invention, a laser receiver and a laser emitter are provided. When the laser beam emitted by the laser emitter cannot be received by the laser receiver, it indicates that the graphite boat or the silicon wafer is deformed at this time. Then, the deformation conditions of the graphite boat and the silicon wafer are measured by the laser rangefinder. When the deformation amount exceeds the threshold, the graphite boat is replaced manually, or the silicon wafer is clamped by the gripper, and the non-conforming silicon wafer is clamped. Then, the controller controls the conveyor belt to continue rotating to not affect the subsequent processes, thereby improving production efficiency, avoiding defects, increasing the yield rate of the production line, and reducing production costs.

[0022] 2. An electric push rod is also provided in the present invention. The electric push rod drives the sliding block to move in the vertical direction. The sliding block drives the guiding slider to slide along the slide rail through the connecting rod, so that the movable gripper moves closer inward, thereby realizing the clamping work of the silicon wafer. Then, the gripper can be controlled to move in space through the moving mechanism, so as to put the non-conforming silicon wafer into the storage box. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] The above and / or additional aspects and advantages of the present invention will become apparent and be readily understood from the following description of the embodiments in conjunction with the accompanying drawings, where:

[0024] Figure 1 is the overall front view of the present invention;

[0025] Figure 2 is the overall side view of the present invention;

[0026] Figure 3 is Figure 2 the front view of the partial structure of the gripper in

[0027] Figure 4 isFigure 2 Side view of the structure of the middle jaw part;

[0028] Figure 5 It is the detection schematic in the present invention Figure 1 ;

[0029] Figure 6 It is the detection schematic in the present invention Figure 2 ;

[0030] Figure 7 It is the detection schematic in the present invention Figure 3 .

[0031] Description of reference numerals:

[0032] 1 conveyor belt; 2 support; 3 carrier; 4 silicon wafer; 5 graphite boat; 6 first lead screw; 7 first guide rail; 8 electric push rod; 9 second guide rail; 10 screw; 101 guide rod; 11 first movable plate; 12 jaw; 13 second lead screw; 14 second motor; 15 third motor; 16 first nut; 17 first motor; 18 laser receiver; 19 laser emitter; 20 laser rangefinder; 21 fixed seat; 22 second movable plate; 23 third lead screw; 24 limit rod; 25 driving wheel; 26 vertical motor; 27 synchronous belt; 28 nut; 29 fourth lead screw; 30 fourth motor; 31 storage box; 32 support plate; 121 jaw body; 122 guide slider; 123 movable jaw; 124 flexible pad; 125 sliding block; 126 connecting rod; 127 push rod. Detailed implementation manners

[0033] The embodiments of the present invention will be described in detail below. Examples of the embodiments are shown in the drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the drawings are exemplary and are only used to explain the present invention and should not be construed as a limitation of the present invention.

[0034] Referring to the attached Figures 1-7 , this embodiment provides a device for detecting the fitting state of silicon wafers in a graphite boat, including a support 2 and a rotatable conveyor belt 1. The conveyor belt 1 passes through the support 2, and the conveyor belt 1 is connected to an independent motor for driving the conveyor belt 1 to rotate. A carrier 3 is connected to the conveyor belt 1, and a graphite boat 5 is placed in the carrier 3. The shape of the carrier 3 is adapted to that of the graphite boat 5, so as to facilitate the placement of the graphite boat 5 in the carrier 3. A silicon wafer 4 is arranged in the graphite boat 5, and the silicon wafer 4 is engaged with the graphite boat 5, thereby realizing the relative fixation of the position of the silicon wafer 4.

[0035] The bracket 2 is slidably connected with a second movable plate 22. Two independent fixing rods are respectively connected to both ends of the second movable plate 22. A laser emitter 19 and a laser receiver 18 are respectively arranged on the two fixing rods. The laser emitter 19 and the laser receiver 18 are arranged on both sides of the graphite boat 5. A plurality of groups of the laser emitter 19 and the laser receiver 18 are provided in total. Two fixing rods are provided in total. One fixing rod is connected with a plurality of laser emitters 19, and the other fixing rod is connected with a plurality of laser receivers 18. Each laser emitter 19 has a corresponding laser receiver 18.

[0036] Both ends of the bracket 2 are fixedly connected with a first guide rail 7. Both ends of the second movable plate 22 are slidably connected with the first guide rail 7. The conveyor belt 1 is located between the two first guide rails 7. The second movable plate 22 is always slidably connected with the first guide rail 7. The first guide rail 7 plays a role in limiting and guiding the movement of the second movable plate 22. The second movable plate 22 can only slide along the length direction of the first guide rail 7. The length of the first guide rail 7 is long enough to provide enough moving space for the movement of the second movable plate 22.

[0037] The bracket 2 is rotatably connected with a first lead screw 6. Both ends of the first lead screw 6 are rotatably connected with the bracket 2. One end of the first lead screw 6 passes through the bracket 2 and is connected with a first motor 17. The first motor 17 is fixedly connected with the bracket 2. The first lead screw 6 is provided with a first nut 16 in cooperation. The first nut 16 is fixedly connected with the second movable plate 22.

[0038] The first motor 17 can drive the first lead screw 6 to rotate. Since the second movable plate 22 cannot rotate and can only move along the length direction of the first guide rail 7, the rotation of the first lead screw 6 can drive the first nut 16 to move in the horizontal direction, and then drive the second movable plate 22 to move along the length direction of the conveyor belt 1, so as to perform corresponding detection work on the graphite boat 5 on the conveyor belt 1.

[0039] The second movable plate 22 is rotatably connected with a third lead screw 23. The third lead screw 23 is connected with a third motor 15. The third motor 15 is fixedly connected with the second movable plate 22. The third lead screw 23 is provided with a third nut in cooperation. The third nut is fixedly connected with a fixed seat 21.

[0040] Both ends of the second movable plate 22 are fixedly connected with bearing seats. Both ends of the third lead screw 23 are rotatably connected with the bearing seats. One end of the third link 23 passes through the bearing seat and is connected with the third motor 15. Therefore, when the third motor 15 works, it can drive the third lead screw 23 to rotate, so as to drive the third nut to move.

[0041] The second movable plate 22 is slidably connected to the fixed seat 21. The fixed seat 21 is connected with a laser rangefinder 20, and the laser rangefinder 20 is arranged above the graphite boat 5. The second movable plate 22 is provided with a long hole, and the fixed seat 21 is slidably connected with the long hole. After the fixed seat 21 passes through the long hole, it is connected with a laser rangefinder 20.

[0042] This long hole plays a role in limiting and guiding the movement of the fixed seat 21. Under the action of this long hole, the fixed seat 21 cannot rotate and can only slide along the length direction of the long hole. The length of the long hole is adapted to the width of the conveyor belt 1, so as to drive the laser rangefinder 20 to move along the width direction of the conveyor belt 1.

[0043] The laser emitter 19, the laser receiver 18, the conveyor belt 1, the first motor 17, the third motor 15 and the laser rangefinder 20 are connected to a controller.

[0044] The laser emitter 19 emits a laser ray, and the laser ray passes through the middle position of the silicon wafer 4. The height of the laser ray is 0.3 - 1.0 mm higher than the surface of the silicon wafer 4. If the silicon wafer 4 is warped or fragmented and inclined, at this time, the laser receiver 18 cannot receive the corresponding signal, and thus transmits the corresponding signal to the controller.

[0045] The laser rangefinder 20 is used to detect the distance from the laser rangefinder 20 to the graphite boat 5 or the silicon wafer 4. Through the change of this distance, it transmits the corresponding signal to the controller, and the controller thereby analyzes and judges the deformation condition of the graphite boat 5 or the silicon wafer 4.

[0046] The bracket 2 is connected with a clamping jaw 12 through a moving mechanism. The moving mechanism is used to drive the clamping jaw 12 to move in space. The clamping jaw 12 includes a clamping jaw body 121. The clamping jaw body 121 is fixedly connected with a number of slide rails arranged horizontally. A guiding slider 122 is slidably connected in the slide rail, and the guiding slider 122 is fixedly connected with a movable clamping jaw 123.

[0047] The clamping jaw body 121 is slidably connected with a sliding block 125 arranged vertically. The sliding block 125 is hinged with a connecting rod 126, and the other end of the connecting rod 126 is hinged with the guiding slider 122. The clamping jaw body 121 is fixedly connected with an electric push rod 8, and the electric push rod 8 is connected with the sliding block 125; There are two movable clamping jaws 123 in total and they are symmetrically arranged on both sides of the sliding block 125; The electric push rod 8 is connected with the controller.

[0048] There are four slide rails in total, four guiding sliders 122 in total, four connecting rods 126 in total, and two movable clamping jaws 123 in total. The four slide rails, the four guiding sliders 122 and the four connecting rods 126 are all symmetrically arranged along the sliding block 125.

[0049] Since the slide rail is arranged horizontally, the guiding slider 122 can only slide horizontally, while the sliding block 125 can only move vertically. Therefore, when the sliding block 125 moves, it can drive the guiding slider 122 to move along the slide rail through the connecting rod 126, and then drive the two movable jaws 123 to approach or move away from each other.

[0050] A flexible pad 124 is arranged inside the jaw body 121. The flexible pad 124 facilitates the clamping of the silicon wafer 4 and at the same time prevents the silicon wafer 4 from being damaged due to excessive clamping force. The electric push rod 8 includes a push rod 127, and the push rod 127 is connected to the sliding block 125. The electric push rod 8 can drive the sliding block 125 to move vertically through the push rod 127.

[0051] A storage box 31 is also arranged on one side of the bracket 2. The moving mechanism can drive the jaws 12 to move, so that the silicon wafer 4 clamped by the jaws 12 is placed in the storage box 31.

[0052] The moving mechanism includes a second guide rail 9 fixedly connected to both ends of the bracket 2. A first movable plate 11 is slidably connected between the second guide rails 9. A second lead screw 13 is rotatably connected to the bracket 2. A second lead nut is arranged in cooperation with the second lead screw 13, and the second lead nut is fixedly connected to the first movable plate 11; the second lead screw 13 is connected to a second motor 14, and the second motor 14 is fixedly connected to the bracket 2; the second motor 14 is connected to the controller.

[0053] There are two second guide rails 9 in total. The conveyor belt 1 is located between the two second guide rails 9. Both ends of the first movable plate 11 are always slidably connected to the second guide rails 9. The second guide rails 9 play a role in limiting and guiding the movement of the first movable plate 11. The first movable plate 11 can only slide along the length direction of the second guide rail 9. The length of the second guide rail 9 is long enough to provide enough moving space for the movement of the first movable plate 11.

[0054] The first movable plate 11 is rotatably connected with a fourth lead screw 29 and a limiting rod 24. A fourth lead nut is arranged in cooperation with the fourth lead screw 29, and the fourth lead nut is slidably connected to the limiting rod 24; the fourth lead screw 29 is connected to a fourth motor 30, and the fourth motor 30 is fixedly connected to the first movable plate 11. The fourth lead nut is fixedly connected to a support plate 32; the fourth motor 30 is connected to the controller.

[0055] The limiting rod 24 is arranged above the fourth lead screw 29. Bearing seats are arranged at both ends of the first movable plate 11. Both ends of the fourth lead screw 29 and the limiting rod 24 are rotatably connected to the bearing seats. One end of the fourth lead screw 29 penetrates through the bearing seat and is connected to the fourth motor 30. The fourth motor 30 is used to drive the fourth lead screw 29 to rotate. The limiting rod 24 plays a role in limiting and guiding the movement of the fourth lead nut. Under the action of the limiting rod 24, the fourth lead nut is prevented from rotating, so that when the fourth lead screw 29 rotates, the fourth lead nut drives the support plate 32 to move along the length direction of the limiting rod 24.

[0056] The support plate 32 is rotatably connected with a nut 28, the nut 28 is internally threaded with a screw rod 10, the support frame 32 is provided with a through hole for the screw rod 10 to pass through, the lower end of the nut 28 is arranged in the through hole, and the lower end of the nut 28 is rotatably connected with the support plate 32 through a bearing. The nut 28 is always in a rotatable connection state with the support plate 32. The screw rod 10 penetrates through the nut 28, and after passing through the through hole, the screw rod 10 is connected with a jaw body 121.

[0057] The upper end of the jaw body 121 is fixedly connected with a guide rod 101, and the guide rod 101 is slidably connected with the support plate 32. Under the action of the guide rod 101, the rotation of the jaw body 121 can be prevented. Therefore, when the nut 28 rotates, the screw rod 10 can be driven to move in the vertical direction, thereby driving the jaw body 121 to move in the vertical direction.

[0058] The support plate 32 is fixedly connected with a vertical motor 26, the vertical motor 26 is connected with a driving wheel 25, the nut 28 is fixedly sleeved with a driven wheel, and a synchronous belt 27 is hung between the driving wheel 25 and the driven wheel; the vertical motor 26 is connected with the controller. When the vertical motor 26 rotates, the driving wheel 25 can be driven to rotate, and then the driven wheel and the nut 28 are driven to rotate through the synchronous belt 27.

[0059] The present invention also proposes a use method of a silicon wafer bonding state detection device in a graphite boat. Using the silicon wafer bonding state detection device described in this embodiment, it includes the following steps:

[0060] S1: The controller controls the conveyor belt 1 to stop working, and then the controller controls the first motor 17 to work. The first motor 17 drives the first lead screw 6 to rotate, and then drives the second movable plate 22 to move along the first guide rail 7 through the first lead nut 16, so that the laser emitter 19 and the laser receiver 18 move to one side of the graphite boat 5 to be inspected;

[0061] S2: The controller controls the laser emitter 19 and the laser receiver 18 to work. The laser emitter 19 emits a laser ray. When first detecting the placement position of the graphite boat 5, if the laser receiver 18 cannot receive the laser ray, the controller controls the third motor 15 to work. The third motor 15 controls the third lead screw 23 to rotate, and the third lead screw 23 drives the laser rangefinder 20 to move through the third lead nut, and the deformation degree of the graphite boat 5 is detected by the laser rangefinder 20. If the deformation degree exceeds the threshold, a corresponding signal is transmitted to the controller for manual replacement;

[0062] S3: If the laser receiver 18 receives the laser ray, it indicates that the placement position of the graphite boat 5 meets the requirements at this time. Then the controller controls the first motor 17 to move, and at the same time the laser emitter 19 emits a laser ray. If the laser receiver 18 receives the laser ray, it indicates that the placement position of the silicon wafer 4 meets the requirements at this time;

[0063] S4: If the laser receiver 18 fails to receive the laser beam, it indicates that the silicon wafer 4 is warped, chipped, or tilted at this time. Then, the controller controls the third motor 15 to operate, and the third motor 15 controls the third lead screw 23 to rotate, driving the laser rangefinder 20 to move to one side of the problematic silicon wafer 4 through the third nut. The deformation degree of the silicon wafer 4 is detected by the laser rangefinder 20. If the deformation degree exceeds the threshold, a corresponding signal is transmitted to the controller.

[0064] S5: The controller controls the moving mechanism to operate. The moving mechanism drives the jaw 12 to move above the silicon wafer 4. The controller controls the electric push rod 8 to operate, and the electric push rod 8 drives the sliding block 125 to work. The sliding block 125 drives the guiding slider 122 to move along the slide rail through the connecting rod 126. The guiding slider 122 drives the movable jaw 123 to clamp the silicon wafer 4. After all the silicon wafers 4 are detected, the controller controls the conveyor belt 1 to continue moving.

[0065] It should be noted that when the laser receiver 18 fails to receive the corresponding signal from the laser beam emitted by the laser emitter 19, it indicates that the susceptor 5 or the silicon wafer 4 is deformed at this time. Then, the deformation conditions of the susceptor 5 and the silicon wafer 4 are measured by the laser rangefinder 20. When the deformation amount exceeds the threshold, the susceptor 5 is replaced manually, or the silicon wafer 4 is clamped by the jaw 12, and the non-conforming silicon wafer 4 is picked up. Then, the conveyor belt 1 is controlled to continue rotating to ensure that the subsequent processes are not affected, thereby improving production efficiency, avoiding defects, increasing the yield rate of the production line, and reducing production costs.

[0066] In addition, the electric push rod 8 drives the sliding block 125 to move in the vertical direction. The sliding block 125 drives the guiding slider 122 to slide along the slide rail through the connecting rod 126, so that the movable jaw 123 moves inward, thereby realizing the clamping of the silicon wafer 4. Then, the jaw 12 can be controlled to move in space through the moving mechanism, and the non-conforming silicon wafer 4 is placed into the storage box 31.

[0067] When detecting the susceptor, as Figures 5-7 shown, the susceptor 5 is placed on the carrier 3 and moves to the area to be detected through the conveyor belt 1; the first motor 17 operates to drive the first lead screw 6 to rotate, and then drives the second movable plate 22 to move towards each row of susceptors 5 through the first nut.

[0068] Since the storage position of the susceptor 5 is fixed and its external dimensions are fixed, when the second movable plate 22 drives the laser emitter 19 and the laser receiver 18 to move together to 1 mm in front of the storage location of the susceptor 5 and slowly move to 1 mm behind, within this area, that is, from 1 mm in front to the susceptor body and from the susceptor body to 1 mm behind.

[0069] There are several groups of laser emitters 19 and laser receivers 18 arranged vertically. Some of these groups are used to detect the graphite boat 5, and some are used to detect the silicon wafers 4.

[0070] When the graphite boat 5 is deformed, the signal emitted by the laser emitter 19 is blocked by the graphite boat 5, making it difficult for the laser receiver 18 to receive the signal. At this time, the third motor 17 rotates in reverse, causing the second movable plate 22 to return to a position 3 mm in front of the graphite boat 5 and stop. Then, the second motor 14 rotates to drive the second lead screw 13 to rotate, moving the laser rangefinder 21.

[0071] The first motor 17 and the second motor 14 cooperate with each other to achieve the corresponding measurement work of the laser rangefinder 21. The laser rangefinder 21 only needs to measure the deformed graphite boat 5 or silicon wafer 4.

[0072] Since the size of the graphite boat 5 is fixed and the height of the laser rangefinder 21 is fixed, two sets of standard sizes H1 and H2 are measured. If there is deformation in the length direction along L1…Ln, the combined size of H1 + H2 is measured. After removing the size corresponding to H2 through the controller, the size corresponding to H1 that remains can be used to measure the deformation amount of the graphite boat 5.

[0073] If there is deformation in the height direction along L1…Ln, the combined sizes of H1, H2…Hn can be measured. After removing the standard sizes H1 and H2, the sizes of L3…Ln corresponding to several groups of H3…Hn can be used to measure the deformation width.

[0074] According to the result, if the deformation degree of the graphite boat 5 exceeds the threshold, the size of this graphite boat 5 is unqualified, and the controller gives a warning to remind the operator to replace it manually.

[0075] After the graphite boat 5 is detected as qualified, the detection work of the silicon wafers 4 is carried out.

[0076] If the silicon wafer 4 is deformed, the signal emitted by the laser emitter 19 is blocked by the deformed silicon wafer 4, making it difficult for the laser receiver 18 to receive the signal. At this time, the first motor 17 rotates in reverse, causing the second movable plate 22 to return to a position 3 mm in front of the silicon wafer 4 and stop. Then, the second motor 14 rotates to drive the second lead screw 13 to rotate, moving the laser rangefinder 21.

[0077] When moving along L1…Ln and measuring the height of the silicon wafer 4 in front of the standard size of the silicon wafer 4, it means that the silicon wafer 4 at this position is deformed. After all the silicon wafers 4 carried by several graphite boats 5 have been traversed, if the silicon wafers 4 are not deformed, the signal emitted by the laser emitter 19 at this time enables the laser receiver 18 to receive the signal. If the corresponding signal is not received by the opposite laser receiver 18, it means that the silicon wafer 4 is deformed. At this time, the clamping jaw 12 is driven to move through the moving mechanism, and the deformed silicon wafer 4 is clamped into the storage box 31. After detecting this area, the controller drives the conveyor belt 1 to continue rotating at this time, driving the graphite boat 5 to move to the next process.

[0078] Although embodiments of the present invention have been shown and described, those of ordinary skill in the art can understand that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principles and spirit of the present invention. The scope of the present invention is defined by the claims and their equivalents.

Claims

1. A detection device for the bonding state of silicon wafers in a graphite boat, comprising a bracket (2) and a rotatable conveyor belt (1), characterized in that, a graphite boat (5) is arranged on the conveyor belt (1), and silicon wafers (4) are arranged in the graphite boat (5); the bracket (2) is slidably connected with a second movable plate (22), and a laser emitter (19) and a laser receiver (18) are respectively connected to both ends of the second movable plate (22), and the laser emitter (19) and the laser receiver (18) are arranged on both sides of the graphite boat (5); the bracket (2) is rotatably connected with a first lead screw (6), the first lead screw (6) is connected with a first motor (17), the first motor (17) is fixedly connected with the bracket (2), the first lead screw (6) is provided with a first nut (16) in cooperation, and the first nut (16) is fixedly connected with the second movable plate (22); the second movable plate (22) is rotatably connected with a third lead screw (23), the third lead screw (23) is connected with a third motor (15), the third motor (15) is fixedly connected with the second movable plate (22), the third lead screw (23) is provided with a third nut in cooperation, and the third nut is fixedly connected with a fixed seat (21); the second movable plate (22) is slidably connected with the fixed seat (21), and a laser rangefinder (20) is connected to the fixed seat (21), and the laser rangefinder (20) is arranged above the graphite boat (5); the laser emitter (19), the laser receiver (18), the conveyor belt (1), the first motor (17), the third motor (15) and the laser rangefinder (20) are connected to a controller; both ends of the bracket (2) are fixedly connected with first guide rails (7), and both ends of the second movable plate (22) are slidably connected with the first guide rails (7); the second movable plate (22) is provided with a long hole, the fixed seat (21) is slidably connected with the long hole, and the laser rangefinder (20) is connected after the fixed seat (21) passes through the long hole; the laser emitter (19) emits a laser ray, the laser ray passes through the middle position of the silicon wafer (4), and the height of the laser ray is 0.3-1.0 mm higher than the surface of the silicon wafer (4); the bracket (2) is connected with a clamping jaw (12) through a moving mechanism, the clamping jaw (12) comprises a clamping jaw body (121), a plurality of horizontally arranged slide rails are fixedly connected to the clamping jaw body (121), and a guiding slider (122) is slidably connected in the slide rails, and a movable clamping jaw (123) is fixedly connected to the guiding slider (122); The clamping jaw body (121) is slidably connected with a sliding block (125) arranged in the vertical direction. The sliding block (125) is hinged with a connecting rod (126). The other end of the connecting rod (126) is hinged with the guiding slider (122). The clamping jaw body (121) is fixedly connected with an electric push rod (8), and the electric push rod (8) is connected with the sliding block (125). There are two movable clamping jaws (123) which are symmetrically arranged on both sides of the sliding block (125). The electric push rod (8) is connected with the controller. The moving mechanism includes second guide rails (9) fixedly connected to both ends of the bracket (2). A first movable plate (11) is slidably connected between the second guide rails (9). The bracket (2) is rotatably connected with a second lead screw (13). The second lead screw (13) is provided with a second nut. The second nut is fixedly connected with the first movable plate (11). The second lead screw (13) is connected with a second motor (14), and the second motor (14) is fixedly connected with the bracket (2). The second motor (14) is connected with the controller. The first movable plate (11) is rotatably connected with a fourth lead screw (29) and a limiting rod (24). The fourth lead screw (29) is provided with a fourth nut. The fourth nut is slidably connected with the limiting rod (24). The fourth lead screw (29) is connected with a fourth motor (30), and the fourth motor (30) is fixedly connected with the first movable plate (11). The fourth nut is fixedly connected with a support plate (32). The fourth motor (30) is connected with the controller. The support plate (32) is rotatably connected with a nut (28). The nut (28) is internally threaded with a screw rod (10). The support plate (32) is provided with a through hole for the screw rod (10) to pass through. The screw rod (10) passes through the through hole and then is connected with the clamping jaw body (121). The clamping jaw body (121) is fixedly connected with a guiding rod (101). The guiding rod (101) is slidably connected with the support plate (32). The support plate (32) is fixedly connected with a vertical motor (26). The vertical motor (26) is connected with a driving wheel (25). The nut (28) is fixedly sleeved with a driven wheel. The driving wheel (25) and the driven wheel are hung with a synchronous belt (27). The vertical motor (26) is connected with the controller.

2. A method for using a silicon wafer bonding state detection device in a graphite boat Characterized in that Using the silicon wafer bonding state detection device in a graphite boat according to claim 1, including the following steps: S1: The controller controls the conveyor belt (1) to stop working. Then the controller controls the first motor (17) to work. The first motor (17) drives the first lead screw (6) to rotate, and then drives the second movable plate (22) to move along the first guide rail (7) through the first nut (16), so that the laser emitter (19) and the laser receiver (18) move to one side of the graphite boat (5) to be detected. S2: The controller controls the laser emitter (19) and the laser receiver (18) to work. The laser emitter (19) emits a laser ray. When first detecting the placement position of the graphite boat (5), if the laser receiver (18) cannot receive the laser ray, the controller controls the third motor (15) to work. The third motor (15) controls the third lead screw (23) to rotate. The third lead screw (23) drives the laser rangefinder (20) to move through the third nut. The deformation degree of the graphite boat (5) is detected by the laser rangefinder (20). If the deformation degree exceeds the threshold, a corresponding signal is transmitted to the controller for manual replacement. S3: If the laser receiver (18) receives the laser ray, it indicates that the placement position of the graphite boat (5) meets the requirements at this time. Then the controller controls the first motor (17) to move, and at the same time the laser emitter (19) emits a laser ray. If the laser receiver (18) receives the laser ray, it indicates that the placement position of the silicon wafer (4) meets the requirements at this time. S4: If the laser receiver (18) cannot receive the laser ray, it indicates that the silicon wafer (4) is warped or fragmented or tilted at this time. Then, the controller controls the third motor (15) to work. The third motor (15) controls the third lead screw (23) to rotate, and drives the laser rangefinder (20) to move to the side of the problematic silicon wafer (4) through the third nut. The deformation degree of the silicon wafer (4) is detected by the laser rangefinder (20). If the deformation degree exceeds the threshold, a corresponding signal is transmitted to the controller. S5: The controller controls the moving mechanism to work. The moving mechanism drives the gripper (12) to move above the silicon wafer (4). The controller controls the electric push rod (8) to work. The electric push rod (8) drives the sliding block (125) to work. The sliding block (125) drives the guiding slider (122) to move along the slide rail through the connecting rod (126). The guiding slider (122) drives the movable gripper (123) to clamp away the silicon wafer (4). After all the silicon wafers (4) are detected, the controller controls the conveyor belt (1) to continue moving.

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