Sensor mounting structure and dicing machine

Abstract

The present invention discloses a sensor mounting structure and a dicing machine. The sensor mounting structure includes a first fixing block and a second fixing block. The first fixing block has a supporting surface facing the second fixing block, and the angle between the supporting surface and the horizontal plane is between 30° and 75°. The extending direction of the intersection line between the supporting surface and the horizontal plane is defined as the first direction. A frame assembly for mounting a sensor is provided on the supporting surface, and the frame assembly is fixed on the supporting surface by a quick compressor provided on the second fixing block. Matching limiting structures are provided on the second fixing block and the frame assembly. The limiting structures enable the frame assembly to move relative to the second fixing block with a fixed position along a second direction and not move along the first direction. The second direction is parallel to the supporting surface and perpendicular to the first direction. The present invention can quickly disassemble and assemble the sensor, is convenient for adjusting the position of the sensor, and at the same time, the position of the frame assembly is stable, and the risk of the sensor shaking during operation and affecting the detection accuracy is small.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor devices, in particular to a sensor mounting structure and a dicing machine. Background Art

[0002] A dicing machine is an important device for wafer processing. When the dicing machine is working, it is necessary to detect the wear condition of the blade. The conventional detection method is to detect through an opposed sensor. Specifically, the opposed sensor is arranged on a mounting and adjusting block having two mounting rods, and then the mounting and adjusting block is fixed at a set position of the dicing machine. At this time, the transmitter and the receiver of the opposed sensor are distributed on both sides of the blade, and the corresponding detection is realized by detecting the change in the amount of received light of the receiver.

[0003] When fixing the mounting and adjusting block at the set position, the conventional fixing method is to directly fix it with bolts.

[0004] However, this method is inconvenient for disassembly and assembly, and it is not convenient to adjust the mounting position of the mounting and adjusting block to adapt to the wear of the blade. Summary of the Invention

[0005] The purpose of the present invention is to solve the above problems existing in the prior art, and to provide a sensor mounting structure and a dicing machine.

[0006] The purpose of the present invention is achieved by the following technical solutions:

[0007] The sensor mounting structure includes a first fixing block and a second fixing block. The first fixing block has a supporting surface facing the second fixing block. The included angle between the supporting surface and the horizontal plane is between 30° and 75°. Define the extending direction of the intersection line of the supporting surface and the horizontal plane as the first direction. A frame assembly for mounting a sensor is arranged on the supporting surface. The frame assembly is fixed on the supporting surface by a quick compressor arranged on the second fixing block. Matching limiting structures are arranged on the second fixing block and the frame assembly. The limiting structures enable the frame assembly to move along a second direction relative to the second fixing block with a fixed position and not to move along the first direction. The second direction is parallel to the supporting surface and perpendicular to the first direction.

[0008] Preferably, the frame assembly includes a guiding block and a mounting and adjusting block for mounting a sensor. The mounting and adjusting block is located between the guiding block and the first fixing block. A driving bolt for driving the mounting and adjusting block to move relative to the guiding block along the second direction is arranged on the guiding block.

[0009] Preferably, the driving bolt is threadedly connected to the boss at the upper end of the guiding block. The driving bolt is located at the middle position of the guiding block, and an anti-creeper spring is sleeved thereon. One end of the anti-creeper spring is connected to the upper end of the installation and adjustment block, and the other end of the anti-creeper spring is connected to the boss.

[0010] Preferably, the guiding block is connected to the first fixing block by a locking bolt. The axis of the locking bolt is perpendicular to the supporting surface. The locking bolt is located at the gap between the two mounting rods of the installation and adjustment block, or a strip-shaped hole for the locking bolt to pass through is formed on the installation and adjustment block, and the strip-shaped hole extends along the second direction.

[0011] Preferably, the installation and adjustment block and the guiding block are connected by a locking bolt. An adjustment hole for the locking bolt to pass through is provided on the guiding block, and the adjustment hole extends along the second direction.

[0012] Preferably, a limiting member is provided on the second fixing block. The axis of the limiting member extends along the first direction and extends to the outside of the second fixing block. The limiting member is opposite to the locking bolt.

[0013] Preferably, the limiting structure includes a matching limiting convex block and a limiting groove. The limiting convex block extends along the first direction. One of the limiting convex block and the limiting groove is provided on the first surface of the guiding block facing the second fixing block, and the other is provided on the second surface of the second fixing block facing the guiding block. The first surface and the second surface are both parallel to the supporting surface.

[0014] Preferably, the limiting convex block is wedge-shaped, and the limiting groove is a corresponding wedge-shaped groove.

[0015] Preferably, an arc-shaped convex portion protruding upward and outward is provided on at least one side surface of the limiting convex block, and the upper port of the limiting groove matches the arc-shaped convex portion.

[0016] A dicing machine, comprising the sensor mounting structure according to any one of the above.

[0017] The advantages of the technical solution of the present invention are mainly reflected in:

[0018] In the present invention, the frame assembly is pressed against the supporting surface by a quick locking device. The quick locking device can realize the quick fixing and unlocking of the frame assembly, thereby facilitating the quick disassembly and assembly of the sensor. The frame assembly can move along the second direction through the limiting structure, which can facilitate the adjustment of the position of the sensor. Moreover, the limiting structure makes the frame assembly immovable along the first direction, which can ensure the stable position of the frame assembly and reduce the risk that the sensor shakes during operation and affects the detection accuracy.

[0019] The frame component of the present invention adopts mating mounting adjustment blocks and guide blocks, and a driving bolt is provided on the mounting adjustment block, which can further adjust the mounting adjustment block on the basis of the adjustment of the mounting adjustment block, increasing the flexibility and range of adjustment, and the adjustment operation is convenient.

[0020] By providing an anti-creeper bolt, the present invention can effectively ensure the stability of the mounting adjustment block, reduce the risk of the mounting adjustment block creeping, and ensure the detection accuracy.

[0021] By providing a locking bolt, the present invention can fasten the guide block and the mounting adjustment block into one body, effectively avoiding relative movement between them and ensuring the position accuracy. At the same time, the locking bolt can cooperate with the limiting member on the second fixing block to limit the adjustment stroke of the mounting adjustment block, thus ensuring the safety of the sensor.

[0022] The present invention can fix the frame component on the first fixing block through the locking bolt, thus effectively ensuring the firmness of the fixation of the frame component and avoiding the influence of the sensor creeping on the detection accuracy.

[0023] The pressing and limiting member of the present invention is connected with a limiting component. After the limiting component is fixed in position, the position of the pressing and limiting member can be effectively limited. A fastening bolt can be used to connect the pressing and limiting member and the first fixing block, which is convenient for adjustment operation, and can effectively prevent the position deviation of the pressing and limiting member from causing a position change of the opposed sensor, ensuring the position accuracy. At the same time, this structure facilitates the overall disassembly and assembly of the pressing and limiting member and the mounting adjustment block.

[0024] The present invention makes the limiting convex block and the limiting groove be a matching wedge-shaped structure and have an arc convex part, which increases the contact area, enhances the fixing property, and is relatively simple to disassemble, and can effectively prevent the guide block of the frame component from shaking relative to the first fixing block along the second direction. Description of the Drawings

[0025] Figure 1 is a perspective view of the first view angle of the sensor mounting structure of the present invention;

[0026] Figure 2 is a perspective view of the sensor mounting structure of the present invention with the quick compressor hidden, and the mounting adjustment block is hidden in the figure;

[0027] Figure 3 is a perspective view of the second view angle of the sensor mounting structure of the present invention;

[0028] Figure 4 is a perspective view of the part of the second fixing block and the guide block in the sensor mounting structure of the present invention;

[0029] Figure 5It is a three-dimensional view of the second fixing block, guiding block, quick compactor and driving bolt parts in the sensor mounting structure of the present invention;

[0030] Figure 6 It is a front view of the area of the first fixing block and the mounting adjustment block in the sensor mounting structure of the present invention;

[0031] Figure 7 It is a schematic diagram of the position where the gas ejected from the first spray hole or the second spray hole on the first fixing block of the present invention can reach. Specific embodiments

[0032] The objectives, advantages and features of the present invention will be illustrated and explained by the non-restrictive description of the following preferred embodiments. These embodiments are only typical examples of applying the technical solutions of the present invention, and all technical solutions formed by equivalent substitution or equivalent transformation fall within the scope of protection required by the present invention.

[0033] In the description of the solution, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "front", "rear", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of description and simplification of the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation of the present invention. In addition, the terms "first", "second", "third" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance. And, in the description of the solution, with the operator as a reference, the direction close to the operator is the proximal end, and the direction away from the operator is the distal end.

[0034] Embodiment 1

[0035] The sensor mounting structure disclosed by the present invention will be described below with reference to the accompanying drawings. The sensor mounting structure is used to mount a sensor, and the sensor is used to detect the wear state of the outer circle of a blade or a grinding disc. The sensor is usually an opposed-type sensor, and more preferably an opposed-type fiber optic sensor.

[0036] As shown in the attached Figure 1 - attached Figure 4As shown, the sensor mounting structure includes a first fixing block 1 and a second fixing block 2. The first fixing block 1 has a supporting surface 11 facing the second fixing block 2. The angle between the supporting surface 11 and the horizontal plane is between 30° and 75°, more preferably between 45° and 60°. Define the extending direction of the intersection line of the supporting surface 11 and the horizontal plane as the first direction X. A frame assembly 4 for mounting a sensor is provided on the supporting surface 11. The frame assembly 4 is fixed on the supporting surface 11 by a quick compressor 3 provided on the second fixing block 2. Matching limiting structures 5 are provided on the second fixing block 2 and the frame assembly 4. The limiting structure 5 enables the frame assembly 4 to move relative to the second fixing block 2 with a fixed position along the second direction D and not move along the first direction X. The second direction D is parallel to the supporting surface 11 and perpendicular to the first direction X.

[0037] In this structure, the quick fixing and unlocking of the frame assembly 4 can be achieved through the quick locking device, and the limiting structure 5 enables the frame assembly 4 to move along the second direction D, which can facilitate the adjustment of the position of the sensor. Moreover, the limiting structure 5 enables the frame assembly 4 not to move along the first direction X, which can ensure the stability of the frame assembly 4 and reduce the risk of the sensor shaking during operation and affecting the detection accuracy.

[0038] As shown in the appendix Figure 1 and the appendix Figure 2 As shown, a set of fixing through holes 12 for connecting an external mechanism are provided on the first fixing block 1. The axis of the fixing through hole 12 extends along the first direction X. At least one of the fixing through holes 12 is a long hole, and the long hole extends along the longitudinal direction Z (the extending direction of a straight line perpendicular to the horizontal plane). The fixing through hole 12 is a counterbore. A set of connection through holes 21 for connecting an external mechanism are also provided on the second fixing block 2. The axis of the connection through hole 21 extends along the first direction X.

[0039] As shown in the appendix Figure 1 and the appendix Figure 2 As shown, the frame assembly 4 includes a guiding block 41 and a mounting and adjusting block 42 for mounting a sensor. The mounting and adjusting block 42 is located between the guiding block 41 and the first fixing block 1. The mounting and adjusting block 42 includes two mounting rods 422 arranged with a gap. The transmitter and receiver of the sensor are mounted on the two mounting rods 422. At the same time, the mounting and adjusting block 42 cannot move relative to the guiding block 41 along the first direction X. A driving bolt 43 for driving the mounting and adjusting block 42 to move relative to the guiding block 41 along the second direction D is provided on the guiding block 41.

[0040] As shown in the appendix Figure 4As shown, the guiding block 41 includes an inclined plate 411. On the lower surface of the inclined plate 411 facing the installation and adjustment block 42, there are two parallel limiting strips 412 located on both sides of the inclined plate 411. The limiting strips 412 extend along the second direction D. On the installation and adjustment block 42, there are bayonets 421 respectively corresponding to the two limiting strips 412. After the guiding block 41 is fixed, the two limiting strips 412 of the guiding block 41 are respectively located at the bayonets 421, so that the two limiting strips 412 limit the position of the installation and adjustment block 42 in the first direction X. At the same time, the installation and adjustment block 42 can slide along the limiting strips 412 to adjust the position of the sensor installed thereon.

[0041] As shown in the attached Figure 4 and the attached Figure 5 As shown, at the upper end of the inclined plate 411, there is a boss 413 protruding towards the installation and adjustment block 42. The driving bolt 43 is threadedly connected to the boss 413. The lower end of the driving bolt 43 is connected to the upper end of the installation and adjustment block 42 and the driving bolt 43 can rotate relative to the installation and adjustment block 42. For example, the driving bolt 43 can be connected to the upper end of the installation and adjustment block 42 through a bearing. Of course, the driving bolt 43 can also adopt other feasible structures to be connected to the installation and adjustment block 42, which is not limited here. Of course, since usually only the installation and adjustment block 42 needs to be moved downward during adjustment, the driving bolt 43 can also be abutted against the upper end of the installation and adjustment block 42 without being fixedly connected together.

[0042] The driving bolt 43 is located at the middle position of the guiding block 41 and there is an anti-creeper spring (not shown in the figure) sleeved on it. One end of the anti-creeper spring is connected to the upper end of the installation and adjustment block 42, and the other end of the anti-creeper spring is connected to the boss 413. The anti-creeper spring can keep the installation and adjustment block 42 stable and avoid the problem that the installation and adjustment block 42 creeps during work, resulting in the sensor shaking and affecting the detection accuracy.

[0043] As shown in the attached Figure 1 and the attached Figure 2As shown, in order to better avoid the wobbling of the installation adjustment block 42, the installation adjustment block 42 and the guide block 41 are connected by a locking bolt 44. The axis of the locking bolt 44 is perpendicular to the support surface 11. A threaded hole (not shown in the figure) for connecting with the locking bolt 44 is formed on the installation adjustment block 42. Moreover, the locking bolt 44 includes a coaxial stud, a cylinder 441 and a knob 442. The diameter of the cylinder 441 is greater than that of the stud, and the diameter of the knob 442 is greater than that of the cylinder 441. An adjustment hole 414 for the locking bolt 44 to pass through is provided on the guide block 41. The adjustment hole 414 extends along the second direction D. The width of the adjustment hole 414 is equivalent to the diameter of the stud and less than the diameter of the cylinder 441. Such a structure of the locking bolt 44 facilitates the operation of the locking bolt 44 by hand.

[0044] When the locking bolt 44 locks the installation adjustment block 42 and the guide block 41, the installation adjustment block 42 cannot be driven to move by the driving bolt 43. When the locking bolt 44 is loosened, the installation adjustment block 42 can move relative to the guide block 41. At the same time, the adjustment hole 414 can guide the installation adjustment block 42 through the driving bolt 43.

[0045] As shown in the appendix Figure 4 and the appendix Figure 5 As shown, in order to avoid the collision between the sensor and the thicker area of the blade caused by the excessive adjustment of the position of the sensor, a limiting member 6 is provided on the second fixing block 2. The limiting member 6 can be a bolt, which is threadedly connected to the second fixing block 2. The axis of the limiting member 6 extends along the first direction X and extends to the outside of the second fixing block. The limiting member 6 faces the locking bolt 44 and is directly opposite to the locking bolt 44. When the fixing block is adjusted downward, the locking bolt 44 moves synchronously. When the locking bolt 44 abuts against the limiting member 6, the locking bolt 44 is limited, so that the fixing block is limited and cannot be adjusted continuously.

[0046] As shown in the appendix Figure 5 As shown, the quick compressor 3 includes a pressing plate 31 pivotally connected to the middle of the second fixing block 2. Under the action of a spring and / or a torsion spring, the pressing plate 31 normally presses on the guide block 41, thereby pressing the guide block 41 and the installation adjustment block 42 on the installation inclined plane. When it is necessary to release the fixation of the guide block 41 and the installation adjustment block 42, press down the upturned end of the pressing plate 31 to make the other end of the pressing plate 31 upturn.

[0047] Of course, the quick compressor 3 may also be the structure disclosed in Chinese utility model patents with application numbers 201521119706.6, 201620736328.4, 202123317500.2, etc., which will not be elaborated here.

[0048] As shown in the Figure 3 and Figure 5 accompanying drawings, the limiting structure 5 includes a matching limiting convex block 51 and a limiting groove 52. The limiting convex block 51 extends along the first direction X. One of the limiting convex block 51 and the limiting groove 52 is arranged at the first surface 415 of the guiding block 41 facing the second fixing block 2, and the other is arranged at the second surface 22 of the second fixing block 2 facing the guiding block 41. Both the first surface 415 and the second surface 22 are parallel to the supporting surface 11.

[0049] As shown in the Figure 3 accompanying drawings, the limiting convex block 51 is arranged at the first surface 415, and the limiting groove 52 is arranged at the second surface 22. Moreover, the limiting convex block 51 is wedge-shaped, and the limiting groove 52 is a corresponding wedge-shaped groove.

[0050] As shown in the Figure 3 and Figure 5 accompanying drawings, at least one side surface of the limiting convex block 51 is provided with an arc-shaped convex portion 53 that protrudes upward and outward. Preferably, arc-shaped convex portions 53 are formed on both sides of the limiting convex block 51. The upper port of the limiting groove 52 matches the arc-shaped convex portion 53. The design of the arc-shaped convex portion 53 can effectively increase the contact area between the limiting convex block and the second fixing block 2, so that during the contact of the wedge-shaped structure, the problem of shaking between the second fixing block 2 and the guiding block 41 due to gaps can be completely avoided, effectively ensuring the stable detection of the sensor.

[0051] When installing the sensor, first install the sensor on the mounting rod of the mounting and adjusting block 42, then fix the first fixing block 1 and the second fixing block 2 at the set positions of the dicing machine. Manually open the pressing member of the quick compressor 3, insert the frame assembly 4 into the gap between the first fixing block 1 and the second fixing block 2, and align the limiting convex block 51 with the limiting groove 52. When the frame assembly 4 is in the appropriate position, manually use the pressing member of the quick compressor 3 to press the frame assembly 4 against the supporting surface 11. Then, adjust the mounting and adjusting block 42 through the driving bolt 43 so that the sensor on the mounting and adjusting block 42 is at an appropriate position below the supporting surface 11. Subsequently, lock it by tightening the locking bolt 44.

[0052] When it is necessary to adjust the position of the sensor, just loosen the locking bolt 44. When it is necessary to remove the frame assembly 4 for maintenance, just open the pressure inspection machine of the quick compressor 3 and remove the frame assembly 4.

[0053] Embodiment 2

[0054] In this embodiment, the overall structure is similar to that of the above Embodiment 1, the difference being that: the guide block 41 is connected to the first fixed block 1 through a locking bolt 44, the axis of the locking bolt 44 is perpendicular to the support surface 11, the locking bolt 44 is located at the gap between the two mounting rods of the mounting and adjusting block 42 or a strip-shaped hole for the locking bolt 44 to pass through is formed on the mounting and adjusting block 42, the strip-shaped hole extends along the second direction D. At this time, the hole on the guide block 41 for the locking bolt 44 to pass through only needs to be a round hole.

[0055] In this embodiment, when it is necessary to adjust the mounting and adjusting block 42, after loosening the locking bolt 44, drive the mounting and adjusting block 42 to move through the drive bolt 43. After adjustment in place, lock the locking bolt 44. At this time, the locking bolt 44 also fixes the guide block 41 on the first fixed block 1, better ensuring the fixing stability of the guide block 41.

[0056] When it is necessary to remove the frame assembly 4 from between the first fixed seat and the second fixed seat, the locking bolt 44 can be first loosened until it is separated from the first fixed seat, and then the quick compressor 3 is opened, and the frame assembly 4 can be taken out.

[0057] Embodiment 3

[0058] This embodiment is further improved on the basis of the above embodiment as follows:

[0059] A spray hole for spraying gas between the transmitter and the receiver of the sensor and / or for spraying gas at the first end of the transmitter and the second end of the receiver is formed on the first fixed block 1. The first end and the second end are the opposite ends of the transmitter and the receiver, and usually the first end and the second end are coaxially arranged.

[0060] As shown in the attached Figure 6 、attached Figure 7 As shown, the spray holes include three first spray holes 13 and three second spray holes 14. The first spray holes 13 are used for spraying gas at the first end of the transmitter and their axes are parallel, and the gas sprayed from each first spray hole can cover the first end; the second spray holes 14 are used for spraying gas at the second end of the receiver and their axes are parallel, and the gas sprayed from each second spray hole 14 can cover the second end.

[0061] The first spray holes 13 are inclined towards the first end, that is, the lateral distance (distance in the first direction) from the air inlet end of each first spray hole 13 to the first end is greater than the lateral distance from the air outlet end of the first spray hole 13 to the first end, so that the gas blown out by them can be directly sprayed on the first end to effectively clean the first end. The second spray holes 14 are inclined towards the second end, that is, the lateral distance from the air inlet end of each second spray hole 14 to the second end is greater than the lateral distance from the air outlet end of the second spray hole 14 to the second end, so that the gas ejected by them can be directly sprayed on the second end to effectively clean the second end.

[0062] The air outlet ends of a group of the first spray holes 13 are distributed on the first fixing block 1 with a height difference, and the distances from the air outlet ends of a group of the first spray holes 13 to the first end in the first direction X decrease successively from bottom to top; the air outlet ends of a group of the second spray holes 14 are distributed on the first fixing block 1 with a height difference, and the distances from the air outlet ends of a group of the second spray holes 14 to the second end in the first direction X decrease successively from bottom to top. Such a layout design can make the positions where the gas ejected by the three first spray holes 13 or the three second spray holes 14 can be ejected as shown in the appendix Figure 7 shown. Thus, when the position of the sensor is adjusted downward along the second direction D, the gas ejected by the first spray holes 13 and the second spray holes 14 can still blow onto the adjusted first end and second end, so as to ensure that after the transmissive sensor is adjusted, the first end and the second end can still be effectively blown clean.

[0063] As shown in the appendix Figure 4 shown, the air outlet ends of a group of the first spray holes 13 and the second spray holes 14 are located at the air outlet side surface that is connected below the support surface 11, and the air outlet side surface and the support surface 11 form a sharp angle facing the second fixing block 2, and the included angle between the air outlet side surface and the support surface 11 is 60° - 120°.

[0064] As shown in the appendix Figure 6As shown, the first spray hole 13 and the second spray hole 14 are axially symmetrically arranged and are distributed in an inverted V shape. This can avoid the interference of the air outlet of the first spray hole 13 and the second spray hole 14. When the air outlet ends of the first spray hole 13 and the second spray hole are in a plane, the heights of the air outlet ends of the first spray hole 13 and the second spray hole 14 correspond one by one. The included angle a between the second virtual line L1 and the second virtual line L2 passing through the centers of the air outlet ends of the first spray hole 13 and the second spray hole 14 with the same height is between 70° and 75°. The second virtual line L2 passes through the centers of a group of the air outlet ends of the first spray hole 13 or passes through the centers of a group of the air outlet ends of the second spray hole 14. Such a design of the included angle a can effectively ensure that the positions where the gas ejected from the first spray hole 13 and the second spray hole 14 can be ejected match the moving path of the opposed sensor, and avoid the problem that after the opposed sensor is adjusted, the first spray hole and the second spray hole below cannot effectively clean the first end and the second end due to the deviation of the positions where the gas they eject can be ejected from the moving path of the opposed sensor.

[0065] To simplify the air intake structure, the air intake ends of the first spray hole 13 and the second spray hole 14 can be communicated with an air cavity on the first fixing block 1. The air cavity is communicated with the air intake passage, and the air intake passage is connected to a nozzle for connecting an external air supply pipeline. Of course, the first spray hole 13 and the second spray hole 14 can also be supplied with air through other structures, which will not be elaborated here.

[0066] Embodiment 4

[0067] This embodiment discloses a dicing machine, including the sensor mounting structure of the above embodiment. The opposed sensors mounted on the sensor mounting structure are distributed on both sides of the blade of the dicing machine. The other structures of the dicing machine are known technologies and will not be elaborated here.

[0068] There are still various implementation manners of the present invention. All technical solutions formed by using equivalent transformations or equivalent substitutions fall within the protection scope of the present invention.

Claims

1. Sensor mounting structure, characterized in that: It includes a first fixing block and a second fixing block. The first fixing block has a supporting surface facing the second fixing block. The angle between the supporting surface and the horizontal plane is between 30° and 75°. The extending direction of the intersection line between the supporting surface and the horizontal plane is defined as the first direction. A frame assembly for installing a sensor is arranged on the supporting surface. The frame assembly is fixed on the supporting surface by a quick compressor arranged on the second fixing block. Matching limiting structures are arranged on the second fixing block and the frame assembly. The limiting structures enable the frame assembly to move relative to the second fixing block with a fixed position along the second direction and not move along the first direction. The second direction is parallel to the supporting surface and perpendicular to the first direction. On the first fixing block, a group of first spray holes for jetting air to the first end of the transmitter of the sensor and a group of second spray holes for jetting air to the second end of the receiver of the sensor are respectively formed. The first end and the second end are the opposite ends of the transmitter and the receiver. The axes of the first spray holes are parallel, the axes of the second spray holes are parallel. The first spray holes are inclined towards the first end direction, and the second spray holes are inclined towards the second end direction. The air outlet ends of a group of the first spray holes are distributed on the first fixing block with a height difference, and the distances between the air outlet ends of a group of the first spray holes and the first end in the first direction decrease sequentially from bottom to top. The air outlet ends of a group of the second spray holes are distributed on the first fixing block with a height difference, and the distances between the air outlet ends of a group of the second spray holes and the second end in the first direction decrease sequentially from bottom to top.

2. The sensor mounting structure according to claim 1, characterized in that: The frame assembly includes a guiding block and an installation and adjustment block for installing a sensor. The installation and adjustment block is located between the guiding block and the first fixing block. A driving bolt for driving the installation and adjustment block to move relative to the guiding block along the second direction is arranged on the guiding block.

3. The sensor mounting structure according to claim 2, characterized in that: The driving bolt is threadedly connected to the boss at the upper end of the guiding block. The driving bolt is located at the middle position of the guiding block, and an anti-creeper spring is sleeved on it. One end of the anti-creeper spring is connected to the upper end of the installation and adjustment block, and the other end of the anti-creeper spring is connected to the boss.

4. The sensor mounting structure according to claim 2, characterized in that: The guiding block is connected to the first fixing block by a locking bolt. The axis of the locking bolt is perpendicular to the supporting surface. The locking bolt is located at the gap between the two installation rods of the installation and adjustment block or a strip hole for the locking bolt to pass through is formed on the installation and adjustment block. The strip hole extends along the second direction.

5. The sensor mounting structure according to claim 2, characterized in that: The installation and adjustment block is connected to the guiding block by a locking bolt. An adjustment hole for the locking bolt to pass through is arranged on the guiding block. The adjustment hole extends along the second direction.

6. The sensor mounting structure according to claim 5, characterized in that: A limiting member is arranged on the second fixing block. The axis of the limiting member extends along the first direction and extends to the outside of the second fixing block. The limiting member is opposite to the locking bolt.

7. The sensor mounting structure according to any one of claims 2-6, characterized in that: The limiting structure includes a matching limiting bump and a limiting groove. The limiting bump extends along the first direction. One of the limiting bump and the limiting groove is disposed on the first surface of the guiding block facing the second fixing block, and the other is disposed on the second surface of the second fixing block facing the guiding block. The first surface and the second surface are both parallel to the supporting surface.

8. The sensor mounting structure according to claim 7, characterized in that: The limiting bump is wedge-shaped, and the limiting groove is a corresponding wedge-shaped groove.

9. The sensor mounting structure according to claim 8, characterized in that: At least one side surface of the limiting bump is provided with an arc-shaped convex portion that protrudes upward and outward, and the upper port of the limiting groove matches the arc-shaped convex portion.

10. Dicing saw, characterized in that: It includes the sensor mounting structure according to any one of claims 1-9.

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