Schottky diodes and their fabrication methods
By using silver-free materials and electroless nickel-gold plating to fabricate the front electrode in a Schottky diode, the problem of silver ion migration under high-frequency conditions was solved, extending the service life and reducing costs.
CN115376916BActive Publication Date: 2026-03-10BEIHAI HUIKE SEMICON TECH CO LTD
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Patent Information
- Application Number
- CN202211063121.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2022-08-29
- Publication Date
- 2026-03-10
- Estimated Expiration
- 2042-08-29
AI Technical Summary
Technical Problem
Schottky diodes are prone to silver ion migration on the front electrode under high-frequency conditions, leading to failure.
Method used
The front electrode of the Schottky diode is prepared using a material that does not contain metallic silver. Nickel and gold metal layers are formed by electroless nickel plating and electroless gold plating to avoid silver ion migration.
Benefits of technology
This extends the lifespan of Schottky diodes, reduces manufacturing costs, and improves corrosion resistance and abrasion resistance.
✦ Generated by Eureka AI based on patent content.
Abstract
This application discloses a Schottky diode and its fabrication method, relating to the field of semiconductor chip manufacturing technology. The Schottky diode fabrication method first provides a Schottky diode chip with a barrier layer. Then, a front electrode is formed on the side of the Schottky diode chip with the barrier layer, the front electrode comprising a first metal layer, a nickel metal layer, and a gold metal layer; a second metal layer is formed on the side of the Schottky diode chip without the barrier layer as a back electrode. The first metal layer does not include silver. Thus, the front electrode of the fabricated Schottky diode does not contain silver ions, thereby avoiding the problem of silver ion migration and extending the lifespan of the Schottky diode.
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