Non-metallic slewing ring device
By adopting a non-metallic rotary ring device with stepped holes, boss structure, and threaded connection, the jamming problem caused by the mismatch between the rotation and lifting motion of the process spray motion mechanism in semiconductor wet process equipment was solved, thus achieving stable operation and sealing of the equipment.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- SHENGHUA SUBSTRATE (TIANJIN) TECH CO LTD
- Filing Date
- 2022-09-02
- Publication Date
- 2026-06-02
AI Technical Summary
In existing semiconductor wet process equipment, the protective device of the process spray motion mechanism is prone to jamming during rotation and lifting movements due to mismatch between the sealing ring and the mounting groove or failure to maintain concentricity when the sleeves cross.
The first, second, and third rotating bodies are made of non-metallic materials and are connected by stepped holes, boss structures, and threads. Combined with threaded anti-loosening structures and static seals, rotational motion protection is achieved.
The stability and sealing of the process spray motion mechanism during rotation and lifting movements were achieved, avoiding jamming and ensuring the normal operation of the equipment.
Smart Images
Figure CN115382697B_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of semiconductor wet process equipment technology, and in particular to a non-metallic rotary ring device. Background Technology
[0002] In modern semiconductor wet process equipment, the process spray motion mechanism often requires protective devices. Because the process spray motion mechanism often performs a combination of rotation and lifting motion, the protective device must be compatible with both motion modes.
[0003] Existing technologies generally employ a sleeve reciprocating motion and a dynamic sealing ring (used to provide a sealing function during rotation); the above devices are prone to jamming due to mismatch between the sealing ring and the mounting groove or failure of the sleeves to maintain concentricity at all times during the cross motion. Summary of the Invention
[0004] In order to effectively solve the problems in the background art, the present invention proposes a non-metallic rotary ring device.
[0005] The specific technical solution is as follows:
[0006] A non-metallic rotating ring device includes a first rotating body, a second rotating body, and a third rotating body made of non-metallic material; the inner side of the first rotating body has a stepped hole, the outer ring of the first rotating body has a boss structure, the third rotating body is fitted onto the boss structure, the outer ring of the second rotating body has a stepped platform, and the stepped platform and the stepped hole are fixed together by a threaded connection and a threaded anti-loosening structure.
[0007] Preferably, the outermost diameter of the second rotating body is larger than the outer diameter of the boss structure, thus blocking the third rotating body between the first and second rotating bodies.
[0008] Preferably, the first rotating body has evenly distributed circular grooves around its circumference, and the third rotating body corresponding to the circular grooves has through holes.
[0009] Compared with the prior art, the beneficial effects of the present invention are: the present invention adopts a rotating body structure, which can not only be fixedly installed on a certain base surface, but also be combined with other protective structures that provide rotational power sources through threaded connection and static sealing elements set on the connection surface, thereby achieving rotational motion protection. Attached Figure Description
[0010] Figure 1 This is the front view of the present invention;
[0011] Figure 2 yes Figure 1 Sectional view at point AA;
[0012] Figure 3 yes Figure 2 A schematic diagram of direction B in the middle. Detailed Implementation
[0013] For ease of description, spatial relative terms such as "above," "on top of," "on the upper surface of," "above," etc., are used herein to describe the spatial positional relationship of a device or feature as shown in the figures to other devices or features. It should be understood that spatial relative terms are intended to encompass different orientations in use or operation beyond the orientation of the device as described in the figures. For example, if the device in the figures were inverted, a device described as "above" or "on top of" other devices or structures would subsequently be positioned as "below" or "under" other devices or structures. Thus, the exemplary term "above" can include both "above" and "below." The device may also be positioned in other different ways, rotated 90 degrees, or in other orientations, and the spatial relative descriptions used herein will be interpreted accordingly.
[0014] The specific embodiments of the present invention will now be described in detail with reference to the accompanying drawings and preferred embodiments.
[0015] like Figure 1-3 As shown, a non-metallic rotating ring device includes a first rotating body 1, a second rotating body 2, and a third rotating body 3 made of non-metallic material. The inner side of the first rotating body has a stepped hole 4, and the outer ring of the first rotating body has a boss structure 5. The third rotating body is fitted onto the boss structure. The outer ring of the second rotating body has a stepped platform 6. The stepped platform and the stepped hole are fixed together by a threaded connection and a threaded anti-loosening structure. The first rotating body 1 can be connected to a driving power source to achieve rotation; the third rotating body 3 is used for installation on a fixed base.
[0016] The outermost diameter of the second rotating body is larger than the outer diameter of the boss structure, thus blocking the third rotating body between the first and second rotating bodies.
[0017] The first rotating body has semi-circular grooves 7 evenly distributed around its circumference, and the third rotating body corresponding to the semi-circular grooves has through holes 8. The circular grooves on the first rotating body 1 are used for fasteners (screws, bolts) to pass through the third rotating body 3 and fix it to the base or seat; the third rotating body 3 has countersunk holes for fixing it to the base or seat; the size of the circular grooves on the first rotating body 1 is the same as the maximum diameter of the countersunk holes on the third rotating body 3.
[0018] Principle explanation:
[0019] The first rotating body 1 and the second rotating body 2 are integrated by a threaded connection and a threaded anti-loosening structure; the third rotating body 3 is not connected to the first rotating body 1 and the second rotating body 2 and is located between them, but the three are concentric; in use, the third rotating body 3 is installed on a base or pedestal; the end face is sealed by pressing a sealing element between the third rotating body 3 and the mounting surface of the base or pedestal; similarly, the end face of the first rotating body 1 can also be provided with a threaded hole and a sealing element to achieve rotational motion and end face sealing when connected to a rotary power input source.
[0020] The above description is only a preferred embodiment of the present invention. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the principle of the present invention, and these improvements and modifications should also be considered within the scope of protection of the present invention.
Claims
1. A non-metallic rotary ring device, characterized in that: The device includes a first rotating body, a second rotating body, and a third rotating body made of non-metallic materials. The first rotating body has a stepped hole on its inner side and a boss structure on its outer ring. The third rotating body is fitted onto the boss structure. The second rotating body has a stepped platform on its outer ring. The stepped platform and the stepped hole are fixed together by a threaded connection and a threaded anti-loosening structure. The outermost diameter of the second rotating body is larger than the outer diameter of the boss structure, thus blocking the third rotating body between the first and second rotating bodies. Semicircular grooves are evenly distributed around the circumference of the first rotating body, and a through hole is provided on the third rotating body corresponding to the semicircular groove.