An apparatus for maintenance of spare parts of an LCD dry plasma etching apparatus

Abstract

The application discloses LCD dry plasma etching equipment spare parts maintenance equipment, belongs to the field of spare parts processing, including collection mechanism, a plurality of bearing assemblies, a plurality of functional components, a plurality of feeding mechanisms, manipulator, fixed mechanism, polishing head, intelligent controller and pneumatic controller.The LCD dry plasma etching equipment spare parts maintenance equipment has the advantages of automatic polishing and sandpaper replacement, solves the problem that polishing equipment and sandpaper of various specifications are usually needed in the process of maintaining plasma etching equipment spare parts, and in the current process, the spare parts are usually polished by manually holding the polishing equipment, so that the polishing efficiency is low, the polishing stability is poor, the spare parts are easily damaged, and the specifications of sandpaper need to be replaced before and after polishing, further affecting the polishing efficiency of the spare parts.

Description

TECHNICAL FIELD

[0001] The application belongs to the field of spare parts processing and treatment, and particularly relates to a LCD dry plasma etching equipment spare part maintenance device. BACKGROUND

[0002] The plasma etching machine is also called a plasma etching machine, a plasma plane etching machine, a plasma etching machine, a plasma surface treatment instrument, a plasma cleaning system, etc. The plasma etching is the most common form in dry etching, and its principle is that the gas exposed in the electron region forms a plasma, and the ionized gas and the released high-energy electrons form a gas, so as to form the plasma or ions. When the ionized gas atoms are accelerated by the electric field, they will release enough power and surface driving force to tightly adhere to the material or etch the surface.

[0003] In the process of maintaining the plasma etching equipment spare parts, polishing equipment and various specifications of sandpaper are usually needed, and in the current process, the polishing equipment is usually held manually to polish the spare parts. The manual polishing method is not only low in efficiency and poor in polishing stability, but also easy to damage the spare parts. Moreover, the specifications of the sandpaper need to be replaced before and after polishing, which further affects the efficiency of polishing the spare parts. Therefore, the LCD dry plasma etching equipment spare part maintenance device is proposed to solve the above problems. SUMMARY

[0004] In view of one or more of the above defects or improvement needs of the prior art, the application provides an LCD dry plasma etching equipment spare part maintenance device, which has the advantages of automatic polishing and sandpaper replacement.

[0005] To achieve the above purpose, the application provides an LCD dry plasma etching equipment spare part maintenance device, which comprises a collecting mechanism, a plurality of bearing assemblies, a plurality of function assemblies, a plurality of feeding mechanisms, a manipulator, a fixing mechanism, a polishing head, an intelligent controller and a pneumatic controller, the number of the bearing assemblies, the function assemblies and the feeding mechanisms is equal;

[0006] The collecting mechanism comprises a collecting box, each bearing assembly, function assembly and feeding mechanism is arranged on the collecting box, the feeding mechanism is connected to the lower part of the outer wall of the bearing assembly, the function assembly is arranged on the lower end face of the bearing assembly, the bearing assembly is used for fixing the replaced polishing head, the function assembly is used for feeding and discharging the sandpaper, and the feeding mechanism is used for preparing the sandpaper and conveying it to the function assembly;

[0007] The fixing mechanism is arranged on the output end of the manipulator and is used for clamping and fixing the polishing head;

[0008] The intelligent controller and the pneumatic controller are electrically connected and fixed outside the collecting box, the intelligent controller is electrically connected with the collecting mechanism, the functional assembly, the feeding mechanism, the mechanical arm and the fixing mechanism, so as to control the collecting mechanism, the functional assembly, the feeding mechanism, the mechanical arm and the fixing mechanism, and the pneumatic controller is connected with the bearing assembly and the functional assembly, so as to realize pneumatic control of the bearing assembly and the functional assembly.

[0009] As a further improvement of the application, the bearing assembly comprises a bearing cylinder and an annular air pipe, a plurality of air holes are arranged on the upper end surface of the bearing cylinder in a ring shape at equal intervals, and the air holes extend to the outer circumferential surface of the bearing cylinder at one end, the annular air pipe is sleeved on the outer circumferential surface of the bearing cylinder and communicates with each air hole, and the annular air pipe communicates with the pneumatic controller through the air pipe.

[0010] As a further improvement of the application, the functional assembly comprises a mounting frame, an electric push rod, an air head and a plurality of flexible air nozzles, one end of the mounting frame is fixed to the lower end surface of the bearing cylinder and the other end is fixed to the upper end surface of the collecting box, the electric push rod is fixed inside the mounting frame and the output end extends into the mounting frame and is slidingly connected with the mounting frame, the air head is fixed on the output end of the electric push rod and the flexible air nozzles are connected to the top of the air head, the air head communicates with the pneumatic controller through the air pipe, and the electric push rod is electrically connected with the intelligent controller.

[0011] As a further improvement of the application, the feeding mechanism comprises a feeding frame, two rotating shafts, a transmission belt, a first rotating motor and a glue dispenser, the feeding frame is designed in an upwardly extending L shape and communicates with the outer circumferential surface of the bearing cylinder, the two rotating shafts are rotatably arranged in the horizontal part of the feeding frame, the two rotating shafts are drivingly connected through the transmission belt, the first rotating motor is fixed outside the feeding frame and fixed with one of the rotating shafts, and the glue dispenser is arranged in the horizontal part of the feeding frame from top to bottom, and the first rotating motor and the glue dispenser are electrically connected with the intelligent controller.

[0012] As a further improvement of the application, the fixing mechanism comprises a mounting frame, a second rotating motor, a rotating disc, a guide frame, a plurality of clamping jaws, a plurality of hinged seats and a plurality of connecting rods, the number of the hinged seats, connecting rods and clamping jaws is equal, the mounting frame is fixedly arranged on the output end of the manipulator, and the second rotating motor is arranged in the mounting frame, the output end of the second rotating motor penetrates to the end of the mounting frame away from the manipulator, and the rotating disc is fixedly arranged on the output end of the second rotating motor, the guide frame is fixedly arranged on the end face of the mounting frame away from the manipulator and covers the outer side of the rotating disc, the plurality of clamping jaws are arranged in the guide frame in a ring shape and are slidably arranged in the guide frame, the plurality of hinged seats are arranged on the outer side of the rotating disc, the opposite sides of the plurality of guide frames are hinged buckles, the hinged seats and the hinged buckles are hingedly connected through the connecting rods, and the second rotating motor is electrically connected with the intelligent controller.

[0013] As a further improvement of the application, the collecting mechanism further comprises a fan, a multi-way pipe, a connecting pipe and two door plates, the fan is fixedly arranged on the upper end face of the collecting box and is electrically connected with the intelligent controller, the multi-way pipe is respectively communicated with each bearing cylinder and the other end is communicated with the top of the collecting box, the inside of the collecting box has a slot, the output end of the fan has a downward extending inclined portion through the connecting pipe, and the inclined portion is communicated with the multi-way pipe, and the two door plates are communicated with one side face of the collecting box through hinges.

[0014] As a further improvement of the application, the inside of the bearing cylinder is fixedly provided with two bearing plates in a fan shape and is in the same horizontal plane with the transmission belt, the two bearing plates are symmetrically arranged and form a gap, and the width of the gap is greater than the width of the air head.

[0015] As a further improvement of the application, one side face of the bearing cylinder is provided with a groove for sliding of the air pipe on the air head.

[0016] Overall, compared with the prior art, the above technical scheme conceived by the application has the beneficial effects including:

[0017] (1) The LCD dry plasma etching equipment spare part maintenance equipment, in the using process, when the fixing mechanism clamps and fixes the polishing head and the sandpaper adheres to the polishing head, the manipulator can drive the fixing mechanism and the polishing head to rotate in sequence, when the sandpaper contacts the workpiece, the surface of the workpiece can be automatically polished, compared with the manual polishing method, the polishing stability and efficiency are greatly improved.

[0018] (2) The LCD dry plasma etching equipment spare part maintenance equipment of the application, when the sandpaper needs to be replaced, the manipulator is bent at multiple angles and inserts the polishing head into the bearing assembly, the bearing assembly fixes the polishing head, then the fixing mechanism cancels the fixation of the polishing head, moves to above another polishing head with sandpaper of other size through the driving of the manipulator and fixes it, so that the replacement of the polishing head is automatically completed, avoiding the need for manual replacement of the polishing head in actual use, and further improving the efficiency of the equipment in use.

[0019] (3) The LCD dry plasma etching equipment spare part maintenance equipment of the application, after the replacement of the polishing head is completed, the functional assembly adsorbs and removes the used sandpaper on the polishing head, the collection mechanism can adsorb and transport the waste sandpaper to the collection box for collection, then the feeding mechanism sprays glue on the new sandpaper and transports the sandpaper to the functional assembly for adhesion on the polishing head, so that the replacement of the sandpaper is automatically completed, avoiding the need for manual replacement of the sandpaper in actual use, and further improving the efficiency of the equipment in use. BRIEF DESCRIPTION OF DRAWINGS

[0020] Figure 1 It is a schematic diagram of the device structure of the application;

[0021] Figure 2 It is a schematic diagram of the side view structure of the device of the application;

[0022] Figure 3 It is a schematic diagram of the cross-sectional structure of the bearing assembly and the feeding mechanism of the application;

[0023] Figure 4 It is a schematic diagram of the fixing mechanism structure of the application;

[0024] Figure 5 It is an exploded schematic diagram of the fixing mechanism of the application.

[0025] In all the drawings, the same reference signs represent the same technical features, specifically: 1, collection mechanism; 11, collection box; 12, fan; 13, multi-way pipe; 14, connecting pipe; 15, door plate; 2, bearing assembly; 21, bearing cylinder; 22, annular air pipe; 23, air hole; 3, functional assembly; 31, mounting frame; 32, electric push rod; 33, air head; 34, flexible air nozzle; 4, feeding mechanism; 41, discharging rack; 42, rotating shaft; 43, transmission belt; 44, first rotating motor; 45, glue dispenser; 5, manipulator; 6, fixing mechanism; 61, mounting rack; 62, second rotating motor; 63, rotating disc; 64, guide rack; 65, clamping jaw; 66, hinged seat; 67, connecting rod; 7, polishing head; 8, intelligent controller; 9, pneumatic controller; 10, bearing plate. DETAILED DESCRIPTION

[0026] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by a person of ordinary skill in the art without creative effort belong to the scope of protection of the present application.

[0027] Embodiment

[0028] By Figure 1 The application discloses a spare part maintenance equipment for an LCD dry plasma etching device, which comprises a collecting mechanism 1, a plurality of bearing assemblies 2, a plurality of function assemblies 3, a plurality of feeding mechanisms 4, a manipulator 5, a fixing mechanism 6, a polishing head 7, an intelligent controller 8 and a pneumatic controller 9.

[0029] The collecting mechanism 1 comprises a collecting box 11, each of the bearing assemblies 2, the function assemblies 3 and the feeding mechanisms 4 is arranged on the collecting box 11, the feeding mechanisms 4 are arranged on the lower end surface of the bearing assemblies 2, the function assemblies 3 are arranged on one side surface of the bearing assemblies 2, the bearing assemblies 2 are used for fixing the replaced polishing heads 7, the function assemblies 3 are used for feeding and discharging sandpaper, and the plurality of feeding mechanisms 4 are respectively used for preparing sandpaper of different sizes and conveying the sandpaper to the function assemblies 3 connected with the feeding mechanisms 4.

[0030] The fixing mechanism 6 is arranged on the output end of the manipulator 5 and is used for clamping and fixing the polishing head 7, and the polishing head 7 is used for adhering sandpaper.

[0031] The intelligent controller 8 and the pneumatic controller 9 are electrically connected and are fixed outside the collecting box 11, the intelligent controller 8 is electrically connected with the collecting mechanism 1, the function assemblies 3, the feeding mechanisms 4, the manipulator 5 and the fixing mechanism 6, so as to control the collecting mechanism 1, the function assemblies 3, the feeding mechanisms 4, the manipulator 5 and the fixing mechanism 6, and the pneumatic controller 9 is connected with the bearing assemblies 2, the function assemblies 3 and an external air pipe, so as to realize pneumatic control of the bearing assemblies 2 and the function assemblies 3.

[0032] In the embodiment, when the fixing mechanism 6 clamps and fixes the polishing head 7 and the polishing head 7 adheres sandpaper, the manipulator 5 can drive the fixing mechanism 6 and the polishing head 7 to rotate in sequence, and when the sandpaper contacts a workpiece, the surface of the workpiece can be automatically polished, so that the polishing stability and efficiency are greatly improved compared with a manual polishing mode.

[0033] When the sandpaper needs to be replaced, the manipulator 5 is bent at multiple angles and inserts the polishing head 7 into the bearing assembly 2, and after the bearing assembly 2 fixes the polishing head 7, the fixing mechanism 6 cancels the fixation of the polishing head 7 and is driven by the manipulator 5 to move above another polishing head 7 adhered with sandpaper of other sizes and is connected and fixed, so that the replacement of the polishing head 7 is automatically completed, the manual replacement of the polishing head 7 in actual use is avoided, and the efficiency of the device in use is further improved.

[0034] After the replacement is completed, the functional assembly 3 adsorbs and removes the used sandpaper on the polishing head 7, the collection mechanism 1 can adsorb and transport the waste sandpaper to the collection box 11 for collection after removal, and then the feeding mechanism 4 sprays glue on the new sandpaper and transports the sandpaper to the functional assembly 3 and adheres the sandpaper on the polishing head 7, so that the replacement of the sandpaper is automatically completed, the manual replacement of the sandpaper in actual use is avoided, and the efficiency of the device in use is further improved.

[0035] Specifically, referring to Figures 2-3 , the bearing assembly 2 includes a bearing cylinder 21 and an annular air pipe 22, a plurality of air holes 23 are arranged in a ring shape at equal distances on the upper end face of the bearing cylinder 21, one end of the air hole 23 extends to the outer circumferential surface of the bearing cylinder 21, the annular air pipe 22 is sleeved on the outer circumferential surface of the bearing cylinder 21 and communicates with each air hole 23, and the annular air pipe 22 communicates with the pneumatic controller 9 through the air pipe.

[0036] In this embodiment, when the polishing head 7 is inserted into the bearing cylinder 21 and adheres to the top of the bearing cylinder 21, the pneumatic controller 9 extracts the gas in the air pipe, the annular air pipe 22 and the air hole 23 under the control of the intelligent controller 8, and the polishing head 7 is adsorbed and fixed through the negative pressure formed.

[0037] Specifically, referring to Figures 2-3 , the functional assembly 3 includes a mounting frame 31, an electric push rod 32, an air head 33 and a plurality of flexible air nozzles 34, one end of the mounting frame 31 is fixedly arranged on the lower end face of the bearing cylinder 21 and the other end is fixedly arranged on the upper end face of the collection box 11, the electric push rod 32 is fixedly arranged in the mounting frame 31 and the output end extends into the mounting frame 31 and is slidably connected with the mounting frame 31, the air head 33 is fixedly arranged on the output end of the electric push rod 32 and the flexible air nozzles 34 are communicated with the top of the air head 33, the air head 33 is communicated with the pneumatic controller 9 through the air pipe, and the electric push rod 32 is electrically connected with the intelligent controller 8.

[0038] In this embodiment, when the polishing head 7 is fixed, the pneumatic controller 9 draws out the air in the air pipe, the air head 33 and the flexible air nozzle 34 under the control of the intelligent controller 8, and then the electric push rod 32 is extended under the control of the intelligent controller 8 to drive the air head 33 to rise and make the flexible air nozzle 34 contact with the surface of the sandpaper. The sandpaper can be adsorbed and taken out through the negative pressure formed. When the old sandpaper is sucked out and the new sandpaper is transported to the bearing plate 10, the electric push rod 32 is powered on again to extend and continuously push the new sandpaper until the new sandpaper contacts with the polishing head 7, so that the new sandpaper can be adhered to the polishing head 7, and the replacement of the sandpaper is automatically completed.

[0039] Specifically, referring to Figures 2-3 The feeding mechanism 4 includes a feeding frame 41, two rotating shafts 42, a transmission belt 43, a first rotating motor 44 and a glue dispenser 45. The feeding frame 41 is designed in an upward extending L shape and is communicated to the outer circumferential surface of the bearing cylinder 21. The two rotating shafts 42 are rotatably arranged in the horizontal part of the feeding frame 41. The two rotating shafts 42 are drivingly connected through the transmission belt 43. The first rotating motor 44 is fixedly arranged on the outside of the feeding frame 41 and is fixed to one of the rotating shafts 42. The glue dispenser 45 is arranged in the horizontal part of the feeding frame 41 from top to bottom. The first rotating motor 44 and the glue dispenser 45 are electrically connected with the intelligent controller 8. A baffle is arranged in the feeding frame 41, and a gap is formed between the baffle and the transmission belt 43.

[0040] In this embodiment, the vertical part of the feeding frame 41 is used for stacking and placing new sandpaper sheets. The baffle is used for blocking the second sandpaper below to avoid moving and transporting with the transmission belt 43. When the old sandpaper is taken out, the first rotating motor 44 is powered on under the control of the intelligent controller 8 to drive the rotating shaft 42 and the transmission belt 43 to rotate in sequence. The lowermost sandpaper is continuously transported to the bearing plate 10 under the driving of the transmission belt 43. In this process, the glue dispenser 45 sprays glue on the new sandpaper. Finally, the new sandpaper is transported to the bearing plate 10, and the feeding of the sandpaper is automatically completed.

[0041] Specifically, referring to Figures 4-5The fixing mechanism 6 comprises a mounting frame 61, a second rotating motor 62, a rotating disc 63, a guide frame 64, a plurality of clamping claws 65, a plurality of hinged seats 66 and a plurality of connecting rods 67, the number of the hinged seats 66, the connecting rods 67 and the clamping claws 65 is equal, the mounting frame 61 is fixedly arranged on the output end of the manipulator 5, the second rotating motor 62 is arranged in the mounting frame 61, the output end of the second rotating motor 62 penetrates to the end of the mounting frame 61 away from the manipulator 5, the rotating disc 63 is fixedly arranged on the output end of the second rotating motor 62, the guide frame 64 is fixedly arranged on the end face of the mounting frame 61 away from the manipulator 5 and covers the outer side of the rotating disc 63, the plurality of clamping claws 65 are arranged in the guide frame 64 in a ring shape and can slide, the plurality of hinged seats 66 are arranged on the outer side of the rotating disc 63, the opposite side of the plurality of guide frames 64 is a hinged buckle, the hinged seat 66 and the hinged buckle are hinged through the connecting rod 67, and the second rotating motor 62 is electrically connected with the intelligent controller 8.

[0042] In the embodiment, when the second rotating motor 62 is powered on, the rotating disc 63 rotates and drives the plurality of clamping claws 65 to expand or shrink through the cooperation between the hinged seat 66 and the connecting rod 67, when the clamping claw 65 shrinks and inserts into the polishing head 7, the polishing head 7 can be clamped and fixed, and vice versa.

[0043] Specifically, referring to Figure 2 The collecting mechanism 1 further comprises a fan 12, a multi-way pipe 13, a connecting pipe 14 and two door plates 15, the fan 12 is fixedly arranged on the upper end face of the collecting box 11 and is electrically connected with the intelligent controller 8, the multi-way pipe 13 is communicated with each bearing cylinder 21 respectively and the other end is communicated with the top of the collecting box 11, the inside of the collecting box 11 has a notch, the output end of the fan 12 has an inclined part extending downward through the connecting pipe 14, the inclined part is communicated with the multi-way pipe 13, and the two door plates 15 are communicated with one side face of the collecting box 11 through hinges.

[0044] In the embodiment, when the air head 33 drives the old sandpaper to descend, the fan 12 is powered on under the driving of the intelligent controller 8 and blows the external air into the connecting pipe 14, the multi-way pipe 13 and the collecting box 11 in turn, because the connecting pipe 14 forms a certain included angle with the multi-way pipe 13 through the inclined part, in the process of blowing, the plurality of input ends of the multi-way pipe 13 form negative pressure, the old sandpaper can be adsorbed into the multi-way pipe 13 and transported to the collecting box 11 for collection, when the old sandpaper in the collecting box 11 is full, the old sandpaper can be cleaned by opening the two door plates 15.

[0045] Specifically, referring to Figure 3The inner part of the bearing cylinder 21 is fixedly provided with two bearing plates 10 in a fan-shaped design and at the same level with the transmission belt 43, the two bearing plates 10 are symmetrically arranged and formed with a gap, the width of the gap is greater than the width of the air head 33.

[0046] In this embodiment, the two bearing plates 10 are used to bear new sandpaper.

[0047] Specifically, referring to Figure 3 One side of the bearing cylinder 21 is provided with a groove for the air pipe on the air head 33 to slide.

[0048] Although the embodiments of the present application have been shown and described, it should be understood by those ordinary skilled in the art that various changes, modifications, replacements and variations can be made to these embodiments without departing from the principles and spirits of the present application, the scope of the present application is defined by the appended claims and their equivalents.

Claims

1. An LCD dry plasma etching apparatus spare parts maintenance apparatus, characterized by, The utility model relates to a sanding head automatic replacement device, including collection mechanism (1), a plurality of bearing assembly (2), a plurality of function assembly (3), a plurality of feeding mechanism (4), manipulator (5), fixed mechanism (6), polishing head (7), intelligent controller (8) and pneumatic controller (9), the number of bearing assembly (2), function assembly (3) and feeding mechanism (4) is equal, The collection mechanism (1) includes a collection box (11), each bearing assembly (2), function assembly (3) and feeding mechanism (4) are arranged on the collection box (11), the feeding mechanism (4) is communicated with the lower part of the outer wall of the bearing assembly (2), the function assembly (3) is arranged on the lower end surface of the bearing assembly (2), the bearing assembly (2) is used for fixing the replaced polishing head (7), the function assembly (3) is used for feeding and discharging sandpaper, and the feeding mechanism (4) is used for preparing sandpaper and conveying it to the function assembly (3), The fixed mechanism (6) is arranged on the output end of the manipulator (5) and is used for clamping and fixing the polishing head (7), The intelligent controller (8) and the pneumatic controller (9) are electrically connected and fixed on the outside of the collection box (11), the intelligent controller (8) is electrically connected with the collection mechanism (1), the function assembly (3), the feeding mechanism (4), the manipulator (5) and the fixed mechanism (6) to control the collection mechanism (1), the function assembly (3), the feeding mechanism (4), the manipulator (5) and the fixed mechanism (6), and the pneumatic controller (9) is communicated with the bearing assembly (2) and the function assembly (3) to realize the pneumatic control of the bearing assembly (2) and the function assembly (3).

2. The LCD dry plasma etching apparatus spare parts maintenance apparatus according to claim 1, wherein, The bearing assembly (2) includes a bearing cylinder (21) and an annular air pipe (22), a plurality of annular air holes (23) are arranged on the upper end surface of the bearing cylinder (21) at equal intervals, one end of the air hole (23) extends to the outer circumferential surface of the bearing cylinder (21), the annular air pipe (22) is sleeved on the outer circumferential surface of the bearing cylinder (21) and is communicated with each air hole (23), and the annular air pipe (22) is communicated with the pneumatic controller (9) through the air pipe.

3. The LCD dry plasma etching apparatus spare parts maintenance apparatus according to claim 2, wherein, The function assembly (3) includes a mounting frame (31), an electric push rod (32), an air head (33) and a plurality of flexible air nozzles (34), one end of the mounting frame (31) is fixedly arranged on the lower end surface of the bearing cylinder (21), the other end is fixedly arranged on the upper end surface of the collection box (11), the electric push rod (32) is fixedly arranged in the mounting frame (31), the output end of the electric push rod (32) extends to the inside of the mounting frame (31) and is slidably connected with the mounting frame (31), the air head (33) is fixedly arranged on the output end of the electric push rod (32), the flexible air nozzle (34) is communicated with the top of the air head (33), the air head (33) is communicated with the pneumatic controller (9) through the air pipe, and the electric push rod (32) is electrically connected with the intelligent controller (8).

4. The LCD dry plasma etching apparatus spare parts maintenance apparatus according to claim 2, wherein The feeding mechanism (4) comprises a feeding frame (41), two rotating shafts (42), a transmission belt (43), a first rotating motor (44) and a glue dispenser (45), the feeding frame (41) is designed in an upwardly extending L shape and is communicated with the outer circumferential surface of the bearing cylinder (21), the two rotating shafts (42) are rotatably arranged in the horizontal part of the feeding frame (41), the two rotating shafts (42) are drivingly connected through the transmission belt (43), the first rotating motor (44) is fixedly arranged on the outer side of the feeding frame (41) and is fixed with one of the rotating shafts (42), the glue dispenser (45) is arranged in the horizontal part of the feeding frame (41) from top to bottom, the first rotating motor (44) and the glue dispenser (45) are electrically connected with the intelligent controller (8), and the feeding frame (41) is internally provided with a baffle, and a gap is formed between the baffle and the transmission belt (43).

5. The LCD dry plasma etching apparatus spare parts maintenance apparatus according to claim 1, wherein, The fixing mechanism (6) comprises a mounting frame (61), a second rotating motor (62), a rotating disc (63), a guide frame (64), a plurality of clamping jaws (65), a plurality of hinged seats (66) and a plurality of connecting rods (67), the number of the hinged seats (66), the connecting rods (67) and the clamping jaws (65) is equal, the mounting frame (61) is fixedly arranged on the output end of the mechanical arm (5), and the second rotating motor (62) is arranged in the mounting frame (61), the output end of the second rotating motor (62) penetrates to the end of the mounting frame (61) away from the mechanical arm (5), and the rotating disc (63) is fixedly arranged on the output end of the second rotating motor (62), the guide frame (64) is fixedly arranged on the end face of the mounting frame (61) away from the mechanical arm (5) and covers the outer side of the rotating disc (63), the plurality of clamping jaws (65) are arranged in the guide frame (64) in an annular distribution and are slidably arranged in the guide frame (64), the plurality of hinged seats (66) are arranged on the outer side of the rotating disc (63), the opposite sides of the plurality of guide frames (64) are hinged buckles, the hinged seat (66) and the hinged buckle are hingedly connected through the connecting rod (67), and the second rotating motor (62) is electrically connected with the intelligent controller (8).

6. The LCD dry plasma etching apparatus spare parts maintenance apparatus according to claim 2, wherein The collecting mechanism (1) further comprises a fan (12), a multi-way pipe (13), a connecting pipe (14) and two door plates (15), the fan (12) is fixedly arranged on the upper end face of the collecting box (11) and is electrically connected with the intelligent controller (8), the multi-way pipe (13) is respectively communicated with each bearing cylinder (21) and the other end is communicated with the top of the collecting box (11), the collecting box (11) has a notch in the inside, the output end of the fan (12) has a downwardly extending inclined part through the connecting pipe (14), and the inclined part is communicated with the multi-way pipe (13), and the two door plates (15) are communicated with one side of the collecting box (11) through hinges.

7. The LCD dry plasma etching apparatus spare parts maintenance apparatus according to claim 2, wherein The inside of the bearing cylinder (21) is fixed with two bearing plates (10) in a fan shape and in the same horizontal plane with the transmission belt (43), the two bearing plates (10) are symmetrically arranged and form a gap, the width of the gap is greater than the width of the air head (33).

8. The LCD dry plasma etching apparatus spare parts maintenance apparatus according to claim 2, wherein, A groove is arranged on one side of the bearing cylinder (21) for the air pipe on the air head (33) to slide.

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