Sample fixing mechanism for nanoprobe test, test device and sample test method

Abstract

The application discloses a sample fixing mechanism for nano probe testing, a nano probe testing device and a sample testing method. The sample fixing mechanism comprises a base provided with a first assembly surface; a fixer provided with a second assembly surface matched with the first assembly surface, and further provided with a fixing surface opposite to the second assembly surface, the fixing surface being used for bonding and fixing the sample; and a locking structure provided with a locked state and an unlocked state, the locking structure being capable of relatively fixing the fixer with the base in the locked state, and the fixer being capable of being removed from the base in the unlocked state. The sample is firmly pasted with the fixer after the glue is melted by high-temperature heating, then the second assembly surface of the fixer is matched with the first assembly surface of the base, the fixer is relatively fixed with the base by the locking structure, then the sample is put into a nano probe machine, nano probe testing is carried out, and testing data of the sample is obtained.

Description

Technical Field

[0001] This invention relates to the field of semiconductor manufacturing technology, and specifically to a sample fixing mechanism, a nanoprobe testing device, and a sample testing method for nanoprobe testing. Background Technology

[0002] For failure analysis of microstructural defects and soft faults in devices, such as abnormal output characteristics of MOSFETs and FETs, higher-resolution electrical testing methods are required, such as nano-probes, for more precise electrical testing and defect localization. A nano-probe instrument is a nano-probe system integrated with a scanning electron microscope (SEM). In nano-probe sample testing, the stability of the sample's adhesion to the sample holder directly affects the accuracy of the test data and the time required.

[0003] In nano-probe sample testing, the sample needs to be firmly attached to the sample holder so that the probe can be securely positioned at the test location, yielding near-ideal electrical data. Current technology typically uses copper or carbon tape to attach the sample to the holder. However, when the sample enters the scanning electron microscope (SEM) system, insecure attachment often results in sample misalignment under the SEM lens, preventing probe insertion and thus necessitating sample reinstallation, reattachment, and rerun of the probe insertion procedure – a very time-consuming process. Summary of the Invention

[0004] (I) Purpose of the Invention

[0005] The purpose of this invention is to provide a sample fixing mechanism, a nanoprobe testing device, and a sample testing method for nanoprobe testing. The method involves melting the adhesive through high-temperature heating to firmly adhere the sample to the fixing device. Then, the second mounting surface of the fixing device mates with the first mounting surface of the base, and a locking structure secures the fixing device and base relative to each other. The sample is then placed into the nanoprobe testing machine for nanoprobe testing to obtain test data. This method ensures that the sample does not shift under a scanning electron microscope lens, allowing for accurate probe testing without the need for sample reinstallation, repeated pasting, or re-running the probe procedure. This saves working time, improves work efficiency, and simultaneously enhances the accuracy and timeliness of test data.

[0006] (II) Technical Solution

[0007] To address the aforementioned problems, according to a first aspect of the present invention, a fixation mechanism for nanoprobe testing is provided, comprising: a base having a first mounting surface; a fixator having a second mounting surface cooperating with the first mounting surface, the fixator further having a fixing surface opposite to the second mounting surface, the fixing surface being used for bonding and fixing to a sample; and a locking structure having a locked state and an unlocked state; in the locked state, the locking structure is capable of fixing the fixator relative to the base; and in the unlocked state, the fixator is capable of being removed from the base.

[0008] Optionally, the second mounting surface has a protruding positioning block, and the first mounting surface has a first groove, the positioning block cooperating with the first groove.

[0009] Optionally, the locking structure includes a first connecting part and a second connecting part. The first connecting part is disposed on the base, and the second connecting part is an elastic member. One end of the elastic member is connected to the second mounting surface, and the other end of the elastic member is engaged in the first connecting part, so that the retainer and the base are in the locked state; the other end of the elastic member is squeezed and deformed to pop out of the first connecting part, so that the retainer and the base are in the unlocked state.

[0010] Optionally, the first connecting part includes a second groove, a slot, and a third groove connected sequentially from top to bottom. The width of the slot in the horizontal direction is smaller than the width of the second groove and the width of the third groove. A protrusion is formed between the second groove and the third groove. The second connecting part includes a fixing body, an elastic body, and a pressing body connected sequentially from top to bottom. The pressing body is a hollow inverted triangle. The elastic body is connected to two sides of the pressing body and is symmetrically arranged. The elastic body has a concave surface, and the protrusion engages with the concave surface. The fixing body is connected to the second mounting surface and is located in the second groove. The elastic body engages with the slot, and the pressing body is located in the third groove. When the second connecting part is inserted into the first connecting part from top to bottom, the pressing body aligns with the slot and presses down on the fixing body. The pressing body is squeezed by the protrusions on both sides, causing the pressing body to drive the elastic body to contract and deform inward in the horizontal direction until the pressing body is embedded in the third groove. The elastic body has elastic tension due to contraction and deformation, causing the concave surface to clamp the protrusion.

[0011] Optionally, the positioning block includes at least two opposing inclined surfaces, the distance between the two inclined surfaces gradually decreasing from the second mounting surface in the direction away from the retainer.

[0012] Optionally, the retainer includes a gasket having the second mounting surface and the retaining surface.

[0013] Optionally, the sample may be a wafer or a chip.

[0014] According to a second aspect of the present invention, a nanoprobe testing device is provided, comprising the aforementioned sample fixation mechanism.

[0015] According to a third aspect of the present invention, a sample testing method based on nanoprobe testing is provided, comprising: attaching a sample to the fixing surface of a fixator using adhesive; engaging a second mounting surface of the fixator with a first mounting surface of a base, thereby fixing the fixator and the base relative to each other by a locking structure; and performing nanoprobe testing on the sample to obtain test data of the sample.

[0016] Optionally, the sample testing method further includes: unlocking the locking structure and removing the retainer from the base; placing the retainer on a heating table for heating to melt the adhesive into a liquid state, and after the liquid adhesive solidifies, the sample and the retainer are firmly bonded together.

[0017] Optionally, the adhesive is a hot melt adhesive, AB adhesive, or silver adhesive.

[0018] Optionally, the fixator is placed on a heating table for heating to melt the adhesive into a liquid state. After the liquid adhesive cools and solidifies, the sample is firmly bonded to the fixator. This includes heating to 165-175°C for about 20 minutes.

[0019] Optionally, after performing nanoprobe testing on the sample and obtaining the test data, the method further includes: unlocking the locking structure and removing the retainer from the base; grinding the sample at the next test location; aligning the second mounting surface of the retainer with the first mounting surface of the base again, and fixing the retainer to the base relative to each other through the locking structure; and then performing the next nanoprobe test on the sample to obtain the next test data.

[0020] (III) Beneficial Effects

[0021] The above-described technical solution of the present invention has the following beneficial technical effects:

[0022] 1. In this embodiment of the invention, the adhesive is melted by high-temperature heating to firmly bond the sample to the fixture. Then, the second mounting surface of the fixture is mated with the first mounting surface of the base, and the fixture and base are fixed relative to each other by a locking structure. The sample is then placed into the nanoprobe instrument for nanoprobe testing to obtain the sample test data. In this way, the sample will not be deviated when viewed under the scanning electron microscope lens, and the probe test can be accurately performed on the sample without reinstalling the sample or repeatedly pasting and re-running the probe program. This saves working time, improves work efficiency, and can simultaneously improve the accuracy and timeliness of test data.

[0023] 2. The present invention features a detachable connection between the fixture and the base, which facilitates the removal of the fixture from the base. This allows for direct grinding of the sample at the next test location without removing the sample, thus saving working time and improving work efficiency. Attached Figure Description

[0024] Figure 1 This is a schematic diagram of the structure of the fixing mechanism for nanoprobe testing according to an embodiment of the present invention;

[0025] Figure 2 This is a schematic diagram of the structure of the fixing mechanism for nanoprobe testing according to another embodiment of the present invention;

[0026] Figure 3 for Figure 2 The enlarged view of point I shown;

[0027] Figure 4 This is a flowchart of a sample testing method based on nanoprobe testing according to another embodiment of the present invention.

[0028] Figure label:

[0029] 11-Base; 12-Fixer; 13-Locking structure; 14-Sample; 15-Positioning block; 16-First groove; 17-Second groove; 18-Slot; 19-Third groove; 20-Elastic element;

[0030] 201-Fixed body; 202-Elastomer; 203-Extruded body. Detailed Implementation

[0031] To make the objectives, technical solutions, and advantages of this invention clearer, the invention will be further described in detail below with reference to specific embodiments and the accompanying drawings. It should be understood that these descriptions are merely exemplary and not intended to limit the scope of the invention. Furthermore, descriptions of well-known structures and techniques are omitted in the following description to avoid unnecessarily obscuring the concept of the invention.

[0032] According to specific embodiments of the present invention, a first aspect provides a fixing mechanism for nanoprobe testing, such as... Figures 1-3As shown, the device includes: a base 11, a retainer 12, and a locking structure 13. The base 11 has a first mounting surface. The retainer 12 has a second mounting surface that mates with the first mounting surface, and the retainer 12 also has a fixing surface opposite to the second mounting surface, the fixing surface being used for bonding and fixing to the sample 14. The locking structure 13 has a locked state and an unlocked state; in the locked state, the locking structure 13 can fix the retainer 12 relative to the base 11; in the unlocked state, the retainer 12 can be removed from the base 11. The fixing surface and sample 14 can be fixed together with adhesive. When performing Nano-probe testing on sample 14, sample 14 can be adhered to the fixture 12 using silver paste, hot melt adhesive, or AB glue (composed of oxidized resin and curing agent). Silver paste requires high-temperature drying after adhesion to sample 14. Hot melt adhesive requires heating from a solid to a liquid state for a firm bond. All of these adhesives require high-temperature heating to firmly adhere sample 14 to the fixture 12, preventing sample 14 from shifting during Nano-probe testing. The problem is that the existing base 11 cannot be directly placed on the heating table for heating. If heated, the bonding joints on the base 11 will be damaged and fall off, and the solder will melt. In addition, there are plastic materials on the base 11 that cannot be heated. By using the retainer 12 to detachably connect to the base 11, the retainer 12 can be removed from the base 11 and placed on the heating table for heating separately. There is no need to heat the sample 14 together with the base 11, thus avoiding the damage and fall off of the bonding joints, the melting of the solder, and the deformation of the plastic material caused by the heat on the base 11. Because the adhesive is melted by high-temperature heating to firmly bond the sample 14 to the fixture 12, and then the second mounting surface of the fixture 12 is mated with the first mounting surface of the base 11, the fixture 12 and the base 11 are fixed relative to each other by the locking structure 13; then the sample 14 is put into the nanoprobe instrument for nanoprobe testing to obtain the test data of the sample 14. In this way, the sample 14 will not be deviated when viewed under the scanning electron microscope (SEM) lens, and the probe test on the sample 14 can be accurately performed without reinstalling the sample 14 and repeatedly pasting and re-running the probe test program, saving working time, improving work efficiency, and improving the accuracy and timeliness of test data at the same time.

[0033] In some embodiments, the second mounting surface has a protruding positioning block 15, and the first mounting surface has a first groove 16, with the positioning block 15 engaging with the first groove 16. The engagement of the positioning block 15 with the first groove 16 ensures a more accurate relative position between the retainer 12 and the base 11, and prevents any shift in the relative position of the retainer 12 and the base 11 during movement, thus preventing any deviation in the sample 14 as seen under the SEM lens.

[0034] In some embodiments, the locking structure 13 may be a snap-fit ​​structure, which may include a first connecting part and a second connecting part. One of the first connecting part and the second connecting part may be disposed on the base 11, and the other may be disposed on the retainer 12. Specifically, the first connecting part may be a plug-in, and the second connecting part may have a socket. After the plug-in is inserted into the socket, it is locked and fixed by the locking component, so that the retainer 12 and the base 11 are in a locked state; pressing the locking component will pop the plug-in out of the socket, so that the retainer 12 and the base 11 are in an unlocked state.

[0035] In some embodiments, the locking structure 13 includes a first connecting portion and a second connecting portion. The first connecting portion is disposed on the base 11, and the second connecting portion is an elastic member 20. One end of the elastic member 20 is connected to the second mounting surface, and the other end of the elastic member 20 is engaged with the first connecting portion, so that the retainer 12 and the base 11 are in the locked state; the other end of the elastic member 20 is squeezed and deformed to pop out of the first connecting portion, so that the retainer 12 and the base 11 are in the unlocked state.

[0036] In an exemplary embodiment, the first connecting portion includes a second groove 17, a slot 18, and a third groove 19 connected sequentially from top to bottom. The width of the slot 18 in the horizontal direction is smaller than the width of the second groove 17 and the width of the third groove 19. A protrusion is formed between the second groove 17 and the third groove 19. The elastic member 20 includes a fixing body 201, an elastic body 202, and a pressing body 203 connected sequentially from top to bottom. The pressing body 203 is a hollow inverted triangle. The elastic body 202 is connected to two sides of the pressing body 203, and the elastic body 202 is symmetrically arranged. The elastic body 202 has a concave surface, and the protrusion cooperates with the concave surface. The fixing body 201 and the... The second assembly surface is connected, and the fixing body 201 is located in the second groove 17. The elastic body 202 cooperates with the slot 18, and the extrusion body 203 is located in the third groove 19. When the second connecting part is inserted into the first connecting part from top to bottom, the extrusion body 203 is aligned with the slot 18 and presses down on the fixing device 12. The extrusion body 203 is squeezed by the protrusions on both sides, causing the extrusion body 203 to drive the elastic body 202 to contract and deform inward in the horizontal direction until the extrusion body 203 is embedded in the third groove 19. The elastic body 202 has elastic tension of contraction and deformation, which makes the concave surface clamp the protrusion, thereby locking the fixing device 12 and the base 11. When it is necessary to unlock the retainer 12 and the base 11, press the two sides of the extrusion body 203 inward with your fingers at the same time, so that the extrusion body 203 drives the elastic body 202 to contract and deform inward in the horizontal direction. At this time, the concave surface of the elastic body 202 releases the protrusion, and the extrusion body 203 pops upward and disengages from the third groove 19. The retainer 12 and the base 11 are in the unlocked state, and the retainer 12 can be removed from the base 11.

[0037] In some embodiments, the positioning block 15 includes at least two opposing inclined surfaces, the distance between the two inclined surfaces gradually decreasing from the second mounting surface in the direction away from the fixture 12. The positioning block 15 protrudes from the second mounting surface, that is, the positioning block 15 protrudes from the bottom surface of the fixture 12, and the distance between the two inclined surfaces gradually decreases from top to bottom. Since the positioning block 15 mates with the first groove 16, and correspondingly, the first groove 16 also has a mating inclined surface, the inclined surface can guide the fixture 12 to be installed or removed from the base 11, and can also make the position of the fixture 12 on the base 11 more accurate. Moreover, during the movement of the base 11, the relative position of the fixture 12 and the base 11 will not be offset, thus not affecting the offset of the sample 14 seen under the SEM lens. The positioning blocks 15 can be spaced around the perimeter of the fixture 12, which can constrain the fixture 12 in multiple directions and ensure the stability of the sample 14 during the testing process.

[0038] In an exemplary embodiment, the retainer 12 includes a gasket having a second mounting surface and a fixing surface. The gasket may be made of a material that is heat-resistant and easy to bond with silver paste, hot melt adhesive, or AB glue, for example, it may be made of metal, without further limitation here.

[0039] In some embodiments, the sample 14 is a wafer or a chip.

[0040] According to a specific embodiment of the present invention, a second aspect provides a nanoprobe testing device, including the sample 14 fixing mechanism described above. The sample 14 is glued to the fixing surface of the fixator 12; the fixator 12 is placed on a heating stage and heated until the glue melts, firmly bonding the sample 14 to the fixator 12; then, the second mounting surface of the fixator 12 mates with the first mounting surface of the base 11, and the fixator 12 and the base 11 are fixed relative to each other by a locking structure 13; then, the base 11 is fixed on a nanoprobe testing stage, and nanoprobe testing is performed under a scanning electron microscope (SEM) lens to obtain test data for the sample 14.

[0041] According to specific embodiments of the present invention, a third aspect provides a sample testing method based on nanoprobe testing, such as... Figure 4 As shown, it includes the following steps:

[0042] Step S10: Attach the sample to the fixing surface of the fixture using adhesive. The adhesive can be a hot melt adhesive, AB glue, or silver glue.

[0043] Step S20: Unlock the locking structure and remove the retainer from the base; place the retainer on a heating table for heating to melt the adhesive into a liquid state. After the liquid adhesive cools and solidifies, the sample and the retainer are firmly bonded. Heating can be performed at 165-175℃, optionally, at 170℃ for about 20 minutes. Specifically, after the silver adhesive is bonded to the retainer 12, it needs to be baked at a high temperature to melt it into a liquid state. After the liquid adhesive cools and solidifies, the sample 14 is firmly bonded to the retainer 12. The detachable connection between the retainer 12 and the base 11 facilitates the removal of the retainer 12 from the base 11; it eliminates the need to heat the base 11 and sample 14 together, avoiding damage or detachment of the bonding joints, melting of the solder, and deformation of the plastic material due to heat. Because the adhesive is melted by high-temperature heating, and after the liquid adhesive cools and solidifies, the sample 14 is firmly bonded to the fixture 12. Then, the second mounting surface of the fixture 12 is mated with the first mounting surface of the base 11, and the fixture 12 and the base 11 are fixed relative to each other by the locking structure 13. Then, the sample 14 is put into the nanoprobe instrument for nanoprobe testing to obtain the test data of the sample 14. In this way, the sample 14 will not be deviated when viewed under the scanning electron microscope (SEM) lens, and the probe test on the sample 14 can be accurately performed. There is no need to reinstall the sample 14 and repeatedly stick it, and run the probe test program again, which saves working time, improves work efficiency, and can simultaneously improve the accuracy and timeliness of test data.

[0044] Step S30: The second mounting surface of the fastener is engaged with the first mounting surface of the base, and the fastener and the base are fixed relative to each other by a locking structure.

[0045] Step S40: Perform nanoprobe testing on the sample to obtain test data. Fix the base 11 of the sample 14 fixing mechanism, which has completed step S30 above, onto the nanoprobe stage, and perform nanoprobe testing under the lens of a scanning electron microscope (SEM) to obtain test data for sample 14.

[0046] A sample 14 testing method based on nanoprobe testing may further include the following steps after step S40: unlocking the locking structure 13 and removing the retainer 12 from the base 11; grinding the sample 14 to the next test address; engaging the second mounting surface of the retainer 12 with the first mounting surface of the base 11 again, and fixing the retainer 12 to the base 11 relative to each other through the locking structure 13; then performing the next nanoprobe test on the sample 14 to obtain the next test data for the sample 14. The detachable connection between the retainer 12 and the base 11 facilitates the removal of the retainer 12 from the base 11, allowing direct grinding of the sample 14 to the next test address without removing the sample 14, thus saving time and improving efficiency.

[0047] It should be understood that the specific embodiments described above are merely illustrative or explanatory of the principles of the invention and do not constitute a limitation thereof. Therefore, any modifications, equivalent substitutions, improvements, etc., made without departing from the spirit and scope of the invention should be included within the protection scope of the invention. Furthermore, the appended claims are intended to cover all variations and modifications falling within the scope and boundaries of the appended claims, or equivalent forms of such scope and boundaries.

Claims

1. A fixing mechanism for nanoprobe testing, characterized in that, include: A base having a first mounting surface, the base having a non-heatable material; The fixture has a second mounting surface that mates with the first mounting surface, and the fixture also has a fixing surface opposite to the second mounting surface. The fixing surface is used to bond and fix the sample. The sample is bonded firmly to the fixture after the adhesive is melted by heating at high temperature. A locking structure that has a locked state and an unlocked state; In the locked state, the locking structure can fix the retainer relative to the base; In the unlocked state, the retainer can be removed from the base; The second mounting surface has a protruding positioning block, and the first mounting surface has a first groove. The positioning block cooperates with the first groove, and the positioning block is spaced apart around the perimeter of the fixture. The locking structure includes a first connecting part and a second connecting part. The first connecting part is disposed on the base, and the second connecting part is an elastic element. One end of the elastic element is connected to the second mounting surface, and the other end of the elastic element is engaged with the first connecting part, so that the retainer and the base are in the locked state. The other end of the elastic element is compressed and deformed, popping out of the first connecting part, so that the retainer and the base are in the unlocked state.

2. The fixing mechanism according to claim 1, characterized in that, The first connecting part includes a second groove, a slot and a third groove connected sequentially from top to bottom. The width of the slot in the horizontal direction is smaller than the width of the second groove and the width of the third groove. A protrusion is formed between the second groove and the third groove. The second connecting part includes a fixed body, an elastic body, and a pressing body connected sequentially from top to bottom. The pressing body is a hollow inverted triangle. The elastic body is connected to two sides of the pressing body and is symmetrically arranged. The elastic body has a concave surface, and the protrusion engages with the concave surface. The fixing body is connected to the second mounting surface and is located in the second groove; the elastic body is engaged with the slot; and the extrusion body is located in the third groove. When the second connecting part is inserted into the first connecting part from top to bottom, the extrusion body aligns with the slot and presses down on the retainer. The extrusion body is squeezed by the protrusions on both sides, causing the extrusion body to drive the elastic body to contract and deform inward in the horizontal direction until the extrusion body is embedded in the third groove. The elastic body has elastic tension of contraction and deformation, causing the concave surface to clamp the protrusion.

3. The fixing mechanism according to claim 1, characterized in that, The positioning block includes at least two opposing inclined surfaces, and the distance between the two inclined surfaces gradually decreases from the second mounting surface in the direction away from the retainer.

4. The fixing mechanism according to claim 1, characterized in that, The retainer includes a gasket having the second mounting surface and the retaining surface.

5. The fixing mechanism according to claim 1, characterized in that, The sample is a wafer or a chip.

6. A nanoprobe testing device, characterized in that, Includes the fixing mechanism described in any one of claims 1-5.

7. A sample testing method based on nanoprobe testing, wherein the testing method employs the nanoprobe testing device as described in claim 6, characterized in that, include: The sample is glued to the fixing surface of the fixture; The second mounting surface of the fastener mates with the first mounting surface of the base, and the fastener and the base are fixed relative to each other by a locking structure. The sample was tested using a nanoprobe to obtain test data.

8. The sample testing method according to claim 7, characterized in that, Also includes: Unlock the locking structure and remove the retainer from the base; The fixator is placed on a heating table and heated to melt the adhesive into a liquid state. After the liquid adhesive cools and solidifies, the sample is firmly bonded to the fixator.

9. The sample testing method according to claim 8, characterized in that, The adhesive is a hot melt adhesive, AB adhesive, or silver adhesive.

10. The sample testing method according to claim 9, characterized in that, The fixator is placed on a heating table and heated to melt the adhesive into a liquid state. After the liquid adhesive cools and solidifies, the sample is firmly bonded to the fixator, including: Heat to 165-175℃ for 20 minutes.

11. The sample testing method according to claim 8, characterized in that, After obtaining the test data by performing nanoprobe testing on the sample, the following steps are also included: Unlock the locking structure and remove the retainer from the base, then grind the sample at the next test location; The second mounting surface of the fastener is then engaged with the first mounting surface of the base, and the fastener and the base are fixed relative to each other by a locking structure. The sample is then subjected to another nanoprobe test to obtain the next test data.

12. The sample testing method according to claim 8, characterized in that, The sample is a wafer or a chip.

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