A diameter gauge suitable for semiconductor components

Abstract

The present invention discloses a diameter gauge for semiconductor components, belonging to the technical field of lower electrode measurement, including an inspection platform, a boss formed on one side of the inspection platform, a measuring component arranged in the boss, and a push mounting seat arranged on the other side of the inspection platform. A V-shaped groove is provided on the side of the boss facing the push mounting seat, and the opening size of the V-shaped groove is adapted to the lower electrode. The push mounting seat is used to planarly support the lower electrode and move it into the V-shaped groove; the measuring component includes an inspection column, a lever, and a first table-type measuring tool. The device of the present invention can effectively prevent the outer circular edge of the lower electrode from contacting the gauge during the measurement process, ensuring that the lower electrode will not be damaged, and the measurement process is more convenient.

Description

Technical Field

[0001] The invention belongs to the technical field of lower electrode measurement, and in particular relates to a diameter measuring tool suitable for semiconductor components. Background Art

[0002] The lower electrode is widely used in dry etching processes such as flat panel display devices and integrated circuits. Some are made of quartz materials. Due to its hard and brittle characteristics, the existing technology often uses a vernier caliper to measure its diameter during its processing. However, when the vernier caliper is used to measure the lower electrode, the outer measuring claws of the vernier caliper are very likely to contact the outer circular edge of the lower electrode, causing damage to the lower electrode and affecting the normal delivery of the product. Summary of the invention

[0003] In view of this, the object of the present invention is to provide a diameter gauge for semiconductor components, which can effectively prevent the outer circular edge of the lower electrode from contacting the gauge during the measurement process, ensure that the lower electrode is not damaged, and make the measurement process more convenient.

[0004] In order to achieve the above object, the present invention provides the following technical solutions:

[0005] The present invention discloses a diameter gauge for semiconductor components, comprising an inspection platform, a boss formed on one side of the inspection platform, a measuring assembly arranged in the boss, and a push mounting seat arranged on the other side of the inspection platform, wherein a V-shaped groove is provided on the side of the boss facing the push mounting seat, the opening size of the V-shaped groove is adapted to a lower electrode, and the push mounting seat is used for planarly supporting the lower electrode and moving it into the V-shaped groove; the measuring assembly comprises an inspection column, a lever, and a first table-type measuring tool, wherein one end of the inspection column extends out of the bottom of the V-shaped groove, the other end of the inspection column is slidably matched with the boss and connected to one end of the lever, the middle part of the lever is rotatably connected to the boss, and the other end of the lever is connected to the first table-type measuring tool.

[0006] The cam is connected to the second end of the guide rail and the second end of the guide rail is connected to the second end of the guide rail, and the cam is connected to the second end of the guide rail by the spring.

[0007] Furthermore, a first limiting groove is provided at the inner end of the first plug column, a first limiting plate is rotatably engaged in the first limiting groove, the first limiting plate is fixedly connected to the first screw, the first screw extends out of the boss and is threadedly engaged with the boss, and a second limiting groove is provided at the inner end of the second plug column, a second limiting groove is rotatably engaged in the second limiting groove, the second limiting plate is fixedly connected to the second screw, the second screw extends out of the boss and is threadedly engaged with the boss.

[0008] Furthermore, a sliding bearing is fixedly installed in the first plug column, and the inner hole of the sliding bearing forms the sliding hole.

[0009] Furthermore, a first trapezoidal block and a second trapezoidal block are arranged on the side of the boss, the first trapezoidal block and the second trapezoidal block are separated to form the V-shaped groove, and the first trapezoidal block and the second trapezoidal block are respectively connected and cooperated with the boss, so that the position of the first trapezoidal block and the second trapezoidal block can be relatively adjusted to change the opening width of the V-shaped groove.

[0010] Furthermore, the first trapezoidal block and the second trapezoidal block are symmetrical to each other, a receiving cavity is provided in the first trapezoidal block, a plurality of rubber balls and fur balls are filled in the receiving cavity, the receiving cavity is connected to the fan through a channel, and a plurality of openings arranged in parallel are provided on the receiving cavity.

[0011] Furthermore, a support plate is provided on one side of the pushing mounting seat, at least three positioning pins are provided on the support plate, a mounting plate is fixedly provided on the pushing mounting seat, and a plurality of second table-type measuring tools are installed in parallel on the mounting plate, and the measuring heads of the second table-type measuring tools face the side where the inspection column is located and are symmetrically arranged on both sides of the inspection column relative to the axis of the inspection column.

[0012] Furthermore, a third slide groove is provided on the pushing mounting seat, and the third slide groove points to and extends to the lower electrode. A rotating shaft is slidably installed in the third slide groove, and the rotating shaft is driven to rotate by a motor. The rotating shaft is connected to a friction wheel, and the rotating shaft is simultaneously rotatably connected to the output end of a telescopic device, and can slide along the third slide groove through the telescopic device.

[0013] Furthermore, a first mounting seat is provided on the upper surface of the first trapezoidal block, the first mounting seat is hinged to one end of the first bracket, a first rolling pressure cylinder is provided in the middle of the first bracket, and the other end of the first bracket is slidably inserted into a sleeve, a second mounting seat is provided on the upper surface of the second trapezoidal block, the second mounting seat is hinged to one end of the second bracket, a second rolling pressure cylinder is provided in the middle of the second bracket, and the other end of the second bracket is slidably inserted into the sleeve, a spring is connected between the first bracket and the second bracket, and elastic reset devices are provided between the first mounting seat and the first bracket, and between the second mounting seat and the second bracket.

[0014] The beneficial effects of the present invention are:

[0015] The present invention is a diameter gauge for semiconductor components. The inspection platform provides a horizontal inspection plane. The push mounting seat only needs to support the lower electrode in a plane and move it into the V-groove. No extra device is needed to clamp it stably, thus avoiding damage to the lower electrode caused by clamping. And because the opening size of the V-groove is adapted to the lower electrode, the lower electrode can be smoothly entered into the V-groove. The edge of the V-groove is even rounded, which can further reduce the occurrence of bumps at the corners.

[0016] In the device of the present invention, the two ends of the lever are respectively connected to the first table-type measuring tool and the inspection column. After the lower electrode is abutted by the surface of the V-shaped groove, the compression amount of the inspection column is linearly correlated with the diameter of the lower electrode. When the inspection column is compressed, the displacement can be transmitted to the first table-type measuring tool through the lever, so as to obtain the reading, and the diameter of the lower electrode can be accurately measured, which cleverly solves the technical problem of the difficulty of measuring the V-shaped groove, can prevent bumps, and can directly measure, and the measurement reading is more accurate.

[0017] Other advantages, objectives and features of the present invention will be described in the following description and will be apparent to those skilled in the art to some extent, or those skilled in the art may be taught from the practice of the present invention. The objectives and other advantages of the present invention may be realized and obtained through the following description. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to make the purpose, technical solution and beneficial effects of the present invention clearer, the present invention provides the following drawings for illustration:

[0019] Figure 1 It is a structural schematic diagram of the device of the present invention;

[0020] Figure 2 for Figure 1 A magnified view at point A;

[0021] Figure 3 for Figure 1 Enlarged view at B;

[0022] Figure 4 for Figure 1 Enlarged view at C;

[0023] Figure 5 It is a schematic diagram of the structure of the push mounting seat;

[0024] Figure 6 Schematic diagram of the structure of the first trapezoidal block.

[0025] The markings in the accompanying drawings are as follows: inspection platform 1, boss 2, push mounting seat 3, V-shaped groove 4, inspection column 5, lever 6, first table measuring tool 7, first plug column 8, second plug column 9, first slide bar 10, second slide bar 11, first plug hole 12, second plug hole 13, ejector pin 14, first slide groove 15, second slide groove 16, mounting hole 17, first limiting groove 18, first limiting plate 19, first screw rod 20, second limiting groove 21, second limiting plate 22, second screw 2 3. Sliding bearing 24, first trapezoidal block 25, second trapezoidal block 26, accommodating chamber 27, channel 28, fan 29, opening 30, support plate 31, locating pin 32, mounting plate 33, second table measuring tool 34, third slide groove 35, rotating shaft 36, friction wheel 37, telescopic device 38, first mounting seat 39, first bracket 40, first rolling pressure cylinder 41, sleeve 42, second mounting seat 43, second bracket 44, second rolling pressure cylinder 45, spring 46. DETAILED DESCRIPTION

[0026] like Figures 1 to 6 As shown, the present invention is a diameter gauge suitable for semiconductor components. Figure 1 It is a schematic diagram of the structure of the device from a top view. The device includes an inspection platform 1, a boss 2 formed on one side of the inspection platform 1, a measuring component arranged in the boss 2, and a push mounting seat 3 arranged on the other side of the inspection platform 1. The boss 2 has a protrusion on one side of the surface of the inspection platform 1 to form a step, and the push mounting seat 3 is located on the surface of the lower side of the inspection platform 1. Normally, the push mounting seat 3 and the inspection platform 1 are connected magnetically, and the inspection platform 1 can realize the magnetic connection conversion by electrical switching. When the push mounting seat 3 needs to be moved, the power is turned off. When it needs to be fixed, it can be connected by power. This technology belongs to the prior art and should be understood by those skilled in the art.

[0027] In the device of the present invention, a V-shaped groove 4 is provided on the side of the boss 2 facing the push mounting seat 3. The size of the opening 30 of the V-shaped groove 4 is adapted to the lower electrode, so that the lower electrode can be conveniently inserted into the V-shaped groove 4. The push mounting seat 3 is used to planarly support the lower electrode and move it into the V-shaped groove 4. The measuring assembly includes a test column 5, a lever 6, and a first table-type measuring tool 7. The test column 5 is in the shape of a vertical cylinder. One end of the test column 5 extends out of the bottom of the V-shaped groove 4, and the end is supported by the outer circle of the lower electrode. The other end of the test column 5 is slidably matched with the boss 2 and connected to one end of the lever 6. The middle part of the lever 6 is rotatably connected to the boss 2, and the other end of the lever 6 is connected to the first table-type measuring tool 7. When the test column 5 is compressed, the displacement can be transmitted to the first table-type measuring tool 7 through the lever 6, so as to obtain a reading.

[0028] In this embodiment, the measuring component also includes a first plug column 8, a second plug column 9, a first slide bar 10 and a second slide bar 11. The side surface of the boss 2 facing the push mounting seat 3 is provided with a first plug hole 12 and a second plug hole 13 for installing the first plug column 8 and the second plug column 9 respectively. The first plug column 8 and the second plug column 9 are fixed in the first plug hole 12 and the second plug hole 13 in a manner that they can be moved axially and then locked. A sliding hole that slides with the inspection column 5 is formed on the outer end surface of the first plug column 8. The inner end of the inspection column 5 is fixedly connected with a ejector pin 14. The inner end of the sliding hole is provided with a first slide groove 15 on the first plug column 8. The first slide bar 10 slides The first slide bar 10 is arranged in the first slide groove 15, the lower end of the first slide bar 10 is connected to the ejector pin 14, the upper end of the first slide bar 10 is extended out of the first slide groove 15 and then hinged to one end of the lever 6, the middle part of the lever 6 is rotatably connected to the boss 2, the other end of the lever 6 is hinged to the second slide bar 11, the second plug post 9 is provided with a second slide groove 16, the second slide bar 11 is slidably arranged in the second slide groove 16, the lower end of the second slide bar 11 is connected to the measuring head of the first dial measuring tool 7, the second plug post 9 is provided with a mounting hole 17 for mounting the first dial measuring tool 7, the first dial measuring tool 7 adopts a micrometer, and its dial is exposed from the boss 2 for easy reading. In the device of the present invention, each dial measuring tool needs to be calibrated before use to facilitate more accurate reading.

[0029] In this embodiment, a first limiting groove 18 is provided at the inner end of the first plug column 8, and a first limiting plate 19 is rotatably engaged in the first limiting groove 18. The first limiting plate 19 is a circular plate. The first limiting plate 19 extends out of the inner end of the first plug column 8 and is fixedly connected to the first screw 20. The first screw 20 extends out of the boss 2 and is threadedly engaged with the boss 2. When the first screw 20 is rotated, the threaded engagement method enables the first screw 20 to move axially, thereby allowing the first limiting plate 19 to drive the first plug column 8 to move axially, so as to facilitate the adjustment of the position of the first plug column 8, thereby facilitating the calibration of the measuring component or finding the zero point. A second limiting groove 21 is provided at the inner end of the second plug column 9, and a second limiting plate 22 is rotatably engaged in the second limiting groove 21. The second limiting plate 22 is fixedly connected to the second screw 23. The second screw 23 extends out of the boss 2 and is threadedly engaged with the boss 2. The movement method of the second plug column 9 is similar to that of the first plug column 8, which should be understandable to those skilled in the art. Specifically, a sliding bearing 24 is fixedly installed in the first plug column 8, the inner hole of the sliding bearing 24 forms the sliding hole, and the outer side of the sliding bearing 24 is fixed in the sliding hole by interference fit.

[0030] In this embodiment, a first trapezoidal block 25 and a second trapezoidal block 26 are provided on the side of the boss 2, and the first trapezoidal block 25 and the second trapezoidal block 26 are separated to form a V-shaped groove 4. The first trapezoidal block 25 and the second trapezoidal block 26 are respectively connected and cooperated with the boss 2, so that the positions of the first trapezoidal block 25 and the second trapezoidal block 26 can be relatively adjusted to change the width of the opening 30 of the V-shaped groove 4. By setting the movable first trapezoidal block 25 and the second trapezoidal block 26, the width of the V-shaped groove 4 can be controlled to meet the needs of lower electrodes of different specifications. Of course, the width of the V-shaped groove 4 can also be adjusted in time as needed to avoid collision between the lower electrode and the corners of the opening 30 of the V-shaped groove 4 as much as possible.

[0031] In this embodiment, the first trapezoidal block 25 and the second trapezoidal block 26 are symmetrical to each other. The first trapezoidal block 25 is provided with a receiving cavity 27 in parallel. The receiving cavity 27 is filled with a plurality of rubber balls and fur balls. The receiving cavity 27 is connected to the fan 29 through a channel 28. The receiving cavity 27 is provided with openings 30 in parallel. The openings 30 are located on the surface of the first trapezoidal block 25 facing the second trapezoidal block 26. The rubber balls and fur balls can rub against each other to form static electricity when blown by the fan 29, and the tiny impurities on the lower electrode are adsorbed through the openings 30 to reduce the impact on the measurement results. The structure, size and movement of the first trapezoidal block 25 are completely similar to those of the second trapezoidal block 26. Taking the first trapezoidal block 25 as an example, a connecting plate is provided on its side, and a screw is connected to the connecting plate. An opening 30 groove is provided on the corresponding boss 2. The screw can slide in the opening 30 groove, and the first trapezoidal block 25 can be fixed by the screw.

[0032] In this embodiment, a support plate 31 is provided on one side of the push mounting seat 3, and at least three positioning pins 32 are provided on the support plate 31. A mounting plate 33 is fixedly provided on the push mounting seat 3, and a plurality of second measuring tools 34 are installed in parallel on the mounting plate 33. The measuring heads of the second measuring tools 34 face the side where the inspection column 5 is located and are symmetrically arranged on both sides of the inspection column 5 relative to the axis of the inspection column 5. There are at least three second measuring tools 34, the middle one is mainly used for positioning, and the second measuring tools 34 on both sides of the middle are used to measure the position of the lower electrode. After the push mounting seat 3 and the boss 2 are positioned and calibrated in the left and right positions, the second measuring tool 34 in the middle is facing the inspection column 5. When the readings of the second measuring tool 34 on the left and the second measuring tool 34 on the right are unified in a range, it can be ensured that the lower electrode is located at the center of the V-shaped groove 4, so that the measurement result is more accurate.

[0033] In this embodiment, a third slide groove 35 is provided on the push mounting seat 3, and the third slide groove 35 points to and extends to the lower electrode. A rotating shaft 36 is slidably installed in the third slide groove 35, and the rotating shaft 36 is driven to rotate by a motor. The rotating shaft 36 is connected to a friction wheel 37, and the rotating shaft 36 is rotatably connected to the output end of a telescopic device 38 at the same time. The telescopic device 38 can slide along the third slide groove 35, and the friction wheel 37 can drive the lower electrode to rotate through the action of friction force, so that the roundness of the lower electrode can be measured.

[0034] In this embodiment, a first mounting seat 39 is provided on the upper surface of the first trapezoidal block 25, and the first mounting seat 39 is hinged to one end of the first bracket 40. A first rolling pressure cylinder 41 is provided in the middle of the first bracket 40, and the other end of the first bracket 40 is slidably inserted into a sleeve 42. A second mounting seat 43 is provided on the upper surface of the second trapezoidal block 26, and the second mounting seat 43 is hinged to one end of the second bracket 44. A second rolling pressure cylinder 45 is provided in the middle of the second bracket 44, and the other end of the second bracket 44 is slidably inserted into the sleeve 42. A spring 46 is connected between the first bracket 40 and the second bracket 44. Elastic reset devices are provided between the first mounting seat 39 and the first bracket 40 and between the second mounting seat 43 and the second bracket 44. By providing the first rolling pressure cylinder 41 and the second rolling pressure cylinder 45, the elastic reset device is used to provide an elastic pre-tightening force, which can elastically press the upper side surface of the lower electrode to prevent the lower electrode from detaching from the positioning pin 32 during rotation.

[0035] Finally, it should be noted that the above preferred embodiments are only used to illustrate the technical solutions of the present invention rather than to limit it. Although the present invention has been described in detail through the above preferred embodiments, those skilled in the art should understand that various changes can be made in form and details without departing from the scope defined by the claims of the present invention.

Claims

1. A diameter gauge for semiconductor components, characterized in that: The invention comprises an inspection platform, a boss formed on one side of the inspection platform, a measuring component arranged in the boss, and a pushing mounting seat arranged on the other side of the inspection platform, wherein a V-shaped groove is formed on the side of the boss facing the pushing mounting seat, and the opening size of the V-shaped groove is adapted to the lower electrode, and the pushing mounting seat is used to provide planar support for the lower electrode and move it into the V-shaped groove; the measuring component comprises an inspection column, a lever, and a first table-type measuring tool, one end of the inspection column extends out of the bottom of the V-shaped groove, the other end of the inspection column slides with respect to the boss and is connected to one end of the lever, the middle part of the lever is rotatably connected to the boss, and the other end of the lever is connected to the first table-type measuring tool; the measuring component also comprises a first plug column, a second plug column, a first slide bar, and a second slide bar, and the boss faces the pushing mounting seat. The side surface of the first side is provided with a first plug hole and a second plug hole for installing the first plug column and the second plug column respectively, and a sliding hole is formed on the outer end surface of the first plug column to slidably cooperate with the inspection column, and the inner end of the inspection column is fixedly connected with a ejector pin, that is, the inner end of the sliding hole is provided with a first slide groove on the first plug column, the first slide rod is slidably arranged in the first slide groove, the lower end of the first slide rod is connected with the ejector pin, the upper end of the first slide rod is hinged to one end of the lever after extending out of the first slide groove, the middle part of the lever is rotatably connected to the boss, the other end of the lever is hinged to the second slide rod, the second plug column is provided with a second slide groove, the second slide rod is slidably arranged in the second slide groove, the lower end of the second slide rod is connected to the measuring head of the first table measuring tool, and the second plug column is provided with a mounting hole for installing the first table measuring tool.

2. The diameter gauge for semiconductor components according to claim 1, characterized in that: A first limiting groove is provided at the inner end of the first plug column, a first limiting plate is rotatably engaged in the first limiting groove, the first limiting plate is fixedly connected to the first screw, the first screw extends out of the boss and is threadedly engaged with the boss, a second limiting groove is provided at the inner end of the second plug column, a second limiting groove is rotatably engaged in the second limiting groove, the second limiting plate is fixedly connected to the second screw, the second screw extends out of the boss and is threadedly engaged with the boss.

3. The diameter gauge for semiconductor components according to claim 2, characterized in that: A sliding bearing is fixedly installed in the first plug column, and the inner hole of the sliding bearing forms the sliding hole.

4. The diameter gauge for semiconductor components according to any one of claims 1 to 3, characterized in that: A first trapezoidal block and a second trapezoidal block are arranged on the side of the boss, the first trapezoidal block and the second trapezoidal block are separated to form the V-shaped groove, and the first trapezoidal block and the second trapezoidal block are respectively connected and cooperated with the boss, so that the position of the first trapezoidal block and the second trapezoidal block can be relatively adjusted to change the opening width of the V-shaped groove.

5. The diameter gauge for semiconductor components according to claim 4, characterized in that: The first trapezoidal block and the second trapezoidal block are symmetrical to each other. A receiving cavity is provided in the first trapezoidal block. The receiving cavity is filled with a plurality of rubber balls and fur balls. The receiving cavity is connected to the fan through a channel. The receiving cavity is provided with a plurality of openings arranged in parallel.

6. The diameter gauge for semiconductor components according to claim 5, characterized in that: A support plate is provided on one side of the push mounting seat, and at least three positioning pins are provided on the support plate. A mounting plate is fixedly provided on the push mounting seat, and a plurality of second table-type measuring tools are installed in parallel on the mounting plate. The measuring heads of the second table-type measuring tools face the side where the inspection column is located and are symmetrically arranged on both sides of the inspection column relative to the axis of the inspection column.

7. The diameter gauge for semiconductor components according to claim 6, characterized in that: A third slide groove is provided on the pushing mounting seat, and the third slide groove points to and extends to the lower electrode. A rotating shaft is slidably installed in the third slide groove, and the rotating shaft is driven to rotate by a motor. The rotating shaft is connected to a friction wheel, and the rotating shaft is simultaneously rotatably connected to the output end of a telescopic device, and can slide along the third slide groove through the telescopic device.

8. The diameter gauge for semiconductor components according to claim 7, characterized in that: A first mounting seat is arranged on the upper surface of the first trapezoidal block, the first mounting seat is hinged to one end of the first bracket, a first rolling pressure cylinder is arranged in the middle of the first bracket, and the other end of the first bracket is slidably inserted into a sleeve, a second mounting seat is arranged on the upper surface of the second trapezoidal block, the second mounting seat is hinged to one end of the second bracket, a second rolling pressure cylinder is arranged in the middle of the second bracket, and the other end of the second bracket is slidably inserted into the sleeve, a spring is connected between the first bracket and the second bracket, and elastic reset devices are arranged between the first mounting seat and the first bracket, and between the second mounting seat and the second bracket.

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