Single-ended side-excitation cubic electromagnetic actuator with integrated guidance and drive

Abstract

The present invention relates to the field of vibration measurement technology, and in particular to a single-end side-excitation cubic electromagnetic actuator with integrated guidance and drive, comprising an electromagnetic drive component and a moving component; the electromagnetic drive component comprises a lower magnetic yoke, a permanent magnet in the shape of a Chinese character "Yu" arranged on the upper side of the lower magnetic yoke, and an upper magnetic yoke in the shape of a Chinese character "Yu" arranged on the upper side of the permanent magnet; a moving cavity is formed inside the lower magnetic yoke, the permanent magnet and the upper magnetic yoke; a central magnetic yoke is installed on the lower magnetic yoke and inside the moving cavity; an air gap is arranged between the central magnetic yoke and the upper magnetic yoke; the moving component comprises a work surface located on the upper side of the central magnetic yoke, a coil frame is arranged on one side of the work surface close to the central magnetic yoke, and the coil frame is slidably sleeved on the outer side of the central magnetic yoke; a DC coil and an excitation coil are wound around the outer wall of the coil frame. By adopting the above scheme, the difficulty of assembling the moving component is reduced to the greatest extent, the dead weight of the moving component is reduced, and the assembly accuracy and driving ability of the electromagnetic actuator are effectively improved.

Description

Technical Field

[0001] The invention relates to the technical field of vibration measurement, and in particular to a single-end side-excitation cubic electromagnetic actuator with integrated guidance and driving. Background Art

[0002] Traditional electromagnetic actuators have separate drive and guide mechanisms, with large assembly errors, which cause distortion to the electromagnetic drive waveform and generate lateral vibration. In addition, the separate drive and guide mechanisms require larger moving parts, and large moving parts have large mass, which will reduce the electromagnetic drive load capacity and increase the size of the equipment. Therefore, the high assembly accuracy of electromagnetic actuators and the light mass of moving parts are the key to improving their performance.

[0003] Patent No. CN201510236282.X discloses a four-magnetic-circuit symmetrically excited rectangular low-frequency vibration calibration platform with magnetic field tracking compensation. A rectangular open magnetic field magnetic circuit structure is proposed, in which four permanent magnets are symmetrically installed at both ends of two outer magnetic yokes and arranged with the same magnetic poles opposite to each other. The magnetic yokes form four symmetrical closed magnetic circuits, and a highly uniform strong magnetic field distribution is generated in the air gap. The surface of the magnetic yoke adjacent to the air gap is provided with an array microstructure in the form of deep grooves to suppress eddy current losses. A compensation coil is provided on the central magnetic yoke to form a compensation magnetic field to synchronously track and compensate for the influence of the armature reaction, and static pressure air floating guidance technology is used to ensure the motion guidance accuracy.

[0004] Patent No. CN201811332560.1 discloses a vibration table. It generates a magnetic field through a magnetic circuit device, and fixes an air bearing on the periphery of the dynamic coil frame to reduce lateral disturbances. The DC coil and the excitation coil are radially wound around the outer peripheral wall of the dynamic coil frame. The DC coil is located in the linear magnetic field area. The DC excitation is used to position the dynamic coil at a position where the DC Ampere force is equal to its gravity to offset the gravity and determine the zero position. The excitation coil is located in the uniform magnetic field area and is excited by AC to generate standard vibration.

[0005] The characteristics of the above scheme are: it is difficult to ensure the axial parallel relationship between the electromagnetic drive structure and the guide device, which causes serious distortion of the vibration waveform and relatively high lateral vibration; it is necessary to design a mechanical structure to connect and separate the guide and drive mechanisms, which increases the size and mass of the equipment and greatly reduces the load capacity of the electromagnetic actuator. Large load capacity is an important indicator of low-frequency electromagnetic vibration tables that often perform large-scale vibration sensor calibration work; and patent CN201811332560.1 places the DC coil in a linear magnetic field region that is approximately linear, and its nonlinearity will cause harmonic distortion to the vibration waveform.

[0006] In summary, the present invention provides a single-ended side-excitation cubic electromagnetic actuator with integrated guidance and drive through structural and principle innovations. Summary of the invention

[0007] 1. Technical issues to be solved

[0008] In view of the deficiencies in the prior art, the present invention provides a single-end side-excitation cubic electromagnetic actuator with integrated guidance and drive, which reduces the difficulty of assembling moving parts, reduces the mass of moving parts, and effectively improves the assembly accuracy and driving ability of the electromagnetic actuator.

[0009] (II) Technical solution

[0010] To achieve the above-mentioned purpose, the embodiment of the present application provides a single-end side-excitation cubic electromagnetic actuator with integrated guidance and drive, including an electromagnetic driving component and a moving component; the electromagnetic driving component includes a lower magnetic yoke, a permanent magnet in the shape of a Chinese character "U" arranged on the upper side of the lower magnetic yoke, and an upper magnetic yoke in the shape of a Chinese character "U" arranged on the upper side of the permanent magnet; the lower magnetic yoke, the permanent magnet and the inner side of the upper magnetic yoke form a moving cavity; a central magnetic yoke is installed on the lower magnetic yoke and located on the inner side of the moving cavity; an air gap is arranged between the central magnetic yoke and the upper magnetic yoke; the moving component includes a work table located on the upper side of the central magnetic yoke, and a coil frame is arranged on a side of the work table close to the central magnetic yoke, the coil frame is in the shape of a Chinese character "U" and is slidably sleeved on the outer side of the central magnetic yoke; a DC coil and an excitation coil are wound around the outer wall of the coil frame, a fixed DC current is passed into the DC coil to generate an Ampere force opposite to the gravity direction of the moving component; a controllable driving current is passed into the excitation coil to generate an electromagnetic driving force.

[0011] Preferably, a static pressure air floating structure is provided on the coil frame, and the static pressure air floating structure controls the formation of a static pressure air film between the coil frame and the central magnetic yoke.

[0012] Preferably, the static pressure air flotation structure includes an air path opened in the coil frame, and the air path includes four vertical air paths opened at the junctions of the coil frame walls and transverse air paths opened along the four coil frame walls, which are connected to each other; an air outlet is opened on a side of the coil frame close to the center magnetic yoke, the air outlet is connected to the air path, and the air outlet is evenly distributed on the inner surface of the coil frame; an air inlet is opened on the outer surface of the coil frame away from the center magnetic yoke, the air inlet is connected to the air path, and the air inlet is connected to an air supply source.

[0013] Preferably, the axes of the lower magnetic yoke, the permanent magnet, the upper magnetic yoke and the central magnetic yoke are in a straight line; and the central magnetic yoke is located at the center of the lower magnetic yoke.

[0014] Preferably, a mounting assembly is provided between the lower magnetic yoke and the upper magnetic yoke for fixing the permanent magnet and supporting the space where the permanent magnet is located.

[0015] Preferably, the mounting assembly includes an inner mounting frame and an outer mounting frame; a mounting groove is provided on the inner mounting frame, and a mounting hole is provided on the inner mounting frame and at the bottom of the mounting groove; the inner walls of the four inner mounting frames abut the four side surfaces of the central magnetic yoke, and the outer walls abut the permanent magnet, the lower side of the mounting frame is detachably connected to the lower magnetic yoke, and the upper side of the mounting frame abuts the upper magnetic yoke; the outer mounting frame is in the shape of a U-shaped letter "U" and covers the permanent magnet, the upper side of the outer mounting frame is detachably and fixedly connected to the upper magnetic yoke, and the lower side of the outer mounting frame is detachably and fixedly connected to the lower magnetic yoke; the inner side of the outer mounting frame abuts the permanent magnet.

[0016] Preferably, a sliding guide rail or a rolling guide rail is provided between the coil frame and the central magnetic yoke.

[0017] Preferably, the permanent magnet includes one permanent magnet or a plurality of permanent magnets bonded to each other.

[0018] Preferably, the DC coil and the excitation coil are located in the air gap and in a region where the magnetic field is uniformly distributed; the DC coil and the excitation coil can be connected to each other.

[0019] Preferably, the fixed-size direct current is calculated by the following formula: DC =mg / (BL); in the formula, I DC is the magnitude of the DC current passed through the DC coil, m is the mass of the moving parts and related components fixed on the work surface, g is the acceleration of gravity, B is the average magnetic induction intensity distributed in the air gap, and L is the length of the DC coil.

[0020] (III) Beneficial effects

[0021] The present invention provides a single-ended side-excitation cubic electromagnetic actuator with integrated guidance and drive. By arranging a lower yoke, a permanent magnet, an upper yoke and a mounting assembly, the lower yoke, the permanent magnet and the upper yoke can be quickly installed on the same central axis. At the same time, by arranging a static pressure air floating structure and an integrated design of the central yoke, the difficulty of assembling moving parts is reduced to the greatest extent, the dead weight of the moving parts is reduced, and the assembly accuracy and driving ability of the electromagnetic actuator can be effectively improved. In addition, the DC coil is located in the area with uniform magnetic field distribution, thereby avoiding the introduction of interference.

[0022] The specific beneficial effects are as follows:

[0023] (1) The magnetic circuit structure of the permanent magnet single-end side excitation adopted by the present invention can produce a relatively uniform magnetic induction intensity in the air gap, and the air gap edge effect has little influence, which is suitable for occasions with high motion accuracy requirements. The permanent magnet is located on the side of the magnetic circuit, and its size matches the magnetic circuit structure, making assembly easier. The use of axially magnetized U-shaped permanent magnets is easy to manufacture and has low production costs. The cubic yoke is easy to manufacture, which is conducive to improving processing accuracy and reducing production costs.

[0024] (2) The coil frame proposed in the present invention is in the shape of a U-shaped letter "U", and the central magnetic yoke constituting the guide shaft is in the shape of a cube. After ventilation, a static pressure air film will be generated between the four inner surfaces of the coil frame and the corresponding side surfaces of the central magnetic yoke, that is, it has a restraining force in four directions, which can greatly reduce lateral vibration.

[0025] (3) The channel-type air path opened in the coil frame of the present invention is easier to process than the cavity-type air chamber. Usually, the wall thickness of the coil frame is small, and it is easier to open the channel-type air path by punching.

[0026] (4) The present invention uses the central magnetic yoke as the guide shaft and the coil frame as the sliding mechanism to complete the design of the electromagnetic actuator with combined guidance and drive. By improving the assembly accuracy, the high motion accuracy of the electromagnetic actuator is achieved. The moving part is mounted on the guide shaft formed by the central magnetic yoke as a sliding mechanism. Through the static pressure air floating structure, sliding guide rail form or rolling guide rail form, the combination of guidance and drive is achieved, ensuring that the axial direction of the moving part and the electromagnetic drive structure are completely parallel, avoiding lateral vibration caused by assembly errors, and effectively improving the waveform accuracy.

[0027] (5) The electromagnetic actuator proposed by the present invention has a compact structure and a large load. The composite structure of guidance and drive eliminates the need for an additional guidance mechanism, making the overall size of the device smaller and facilitating equipment installation and transportation. The small-sized moving parts have a smaller mass, which can significantly improve the load capacity of the electromagnetic actuator.

[0028] (6) The present invention can avoid the situation where the DC coil is subjected to nonlinear electromagnetic force outside the air gap and generates vibration harmonics. The DC coil always runs in the area where the air gap magnetic field is evenly distributed, and a fixed DC current is passed through it so that it is subjected to an Ampere force equal to the gravity of the moving parts, and a control amount based on displacement feedback is superimposed on the excitation coil to achieve active positive stiffness support, thereby avoiding harmonic interference caused by nonlinear electromagnetic force. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1 The schematic diagram of the structure of a single-end side-excitation cubic electromagnetic actuator with integrated guidance and drive;

[0030] Figure 2 A cross-sectional view of a single-ended side-excitation cubic electromagnetic actuator with integrated guidance and drive;

[0031] Figure 3 A cross-sectional view of a protruding mounting component in a single-ended side-excited cubic electromagnetic actuator with integrated guide and drive;

[0032] Figure 4 A schematic diagram of a protruding inner mounting frame in a single-ended side-excited cubic electromagnetic actuator with integrated guide and drive;

[0033] Figure 5 A schematic diagram of a protruding outer mounting frame in a single-end side-excitation cubic electromagnetic actuator with integrated guidance and drive;

[0034] Figure 6 A schematic diagram of the magnetic pole distribution and magnetic circuit in a single-end side-excitation cubic electromagnetic actuator with integrated guidance and drive;

[0035] Figure 7 A cross-sectional view of the protruding moving parts in a single-end side-excitation cubic electromagnetic actuator with integrated guide and drive;

[0036] Figure 8 A schematic diagram of a protruding static pressure air-floating structure in a single-end side-excitation cubic electromagnetic actuator with integrated guidance and drive;

[0037] Fig. 9 Schematic diagram of the protruding air inlet position in a single-ended side-excited cubic electromagnetic actuator with integrated guidance and drive.

[0038] Markings in the accompanying drawings:

[0039] 100, electromagnetic drive component; 110, lower magnetic yoke; 120, permanent magnet; 130, upper magnetic yoke; 140, motion cavity; 150, center magnetic yoke; 160, air gap; 170, mounting assembly; 171, inner mounting frame; 171a, mounting groove; 171b, mounting hole; 172, outer mounting frame;

[0040] 200, moving parts; 210, work surface; 220, coil frame; 230, DC coil; 240, excitation coil; 250, static pressure air floating structure; 251, air path; 252, air outlet; 253, air inlet. DETAILED DESCRIPTION

[0041] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0042] Example

[0043] The present invention provides a single-end side-excitation cubic electromagnetic actuator with integrated guidance and drive, see Figure 1-Figure 9 , including an electromagnetic driving component 100 and a moving component 200.

[0044] The electromagnetic drive component 100 includes a lower magnetic yoke 110, a permanent magnet 120 in the shape of a Chinese character "Yu" arranged on the upper side of the lower magnetic yoke 110, and an upper magnetic yoke 130 in the shape of a Chinese character "Yu" arranged on the upper side of the permanent magnet 120; a moving cavity 140 is formed inside the lower magnetic yoke 110, the permanent magnet 120, and the upper magnetic yoke 130; a central magnetic yoke 150 is installed on the lower magnetic yoke 110 and inside the moving cavity 140; an air gap 160 is arranged between the central magnetic yoke 150 and the upper magnetic yoke 130. In this embodiment, the width of the air gap 160 is 10 mm, and a highly uniform magnetic induction intensity distribution is formed therein.

[0045] Furthermore, the axes of the lower magnetic yoke 110 , the permanent magnet 120 , the upper magnetic yoke 130 , and the central magnetic yoke 150 are on a straight line; and the central magnetic yoke 150 is located at the center of the lower magnetic yoke 110 .

[0046] An installation assembly 170 is disposed between the lower magnetic yoke 110 and the upper magnetic yoke 130 to fix the permanent magnet 120 and to support the space where the permanent magnet 120 is located.

[0047] The mounting assembly 170 includes an inner mounting frame 171 and an outer mounting frame 172. Among them, a mounting groove 171a is provided on the inner mounting frame 171, and a mounting hole 171b is provided on the inner mounting frame 171 and located at the bottom of the mounting groove 171a; during installation, the inner mounting frame 171 can be connected and fixed to the lower magnetic yoke 110 by passing a bolt through the mounting hole 171b. The inner walls of the four inner mounting frames 171 abut against the four side surfaces of the central magnetic yoke 150, and the outer walls abut against the permanent magnet 120. The lower side of the mounting frame can be detachably connected to the lower magnetic yoke 110, and the upper side of the mounting frame abuts against the upper magnetic yoke 130. By setting the inner mounting frame 171, the upper magnetic yoke 130 on the upper side can be supported, and it can be ensured that the permanent magnet 120 is not affected by the gravity of the upper magnetic yoke 130.

[0048] The outer mounting frame 172 is in a U-shape and covers the permanent magnet 120. The upper side of the outer mounting frame 172 is detachably fixedly connected to the upper magnetic yoke 130, the lower side of the outer mounting frame 172 is detachably fixedly connected to the lower magnetic yoke 110, and the inner side of the outer mounting frame 172 abuts against the permanent magnet 120. The above-mentioned detachable connection and fixation can be fixed by bolt connection or other connection methods, which are not limited here.

[0049] It should be noted that, in this embodiment, the outer mounting frame 172 and the inner mounting frame 171 are made of non-magnetic conductive materials, such as aluminum alloy.

[0050] The permanent magnet 120 includes one permanent magnet 120 or a plurality of permanent magnets 120 bonded to each other.

[0051] Specifically, the permanent magnet 120 can be made of a strong magnetic permanent magnet made of NdFeB, and the residual magnetic strength of the NdFeB material used is 1.17T, and the coercive force is 890kA / m. The lower yoke 110, the center yoke 150, and the upper yoke 130 are all made of high magnetic permeability electrical pure iron material DT4C, with a maximum relative magnetic permeability of 12000 and a saturation magnetic flux of 2.5T.

[0052] The path of the magnetic lines of force formed by the permanent magnet 120 excitation to form the main magnetic circuit is as follows: Figure 6 As shown, it starts from the N pole of the permanent magnet 120, passes through the lower yoke 110, the center yoke 150, the air gap 160, the upper yoke 130 in sequence, and then returns to the S pole of the permanent magnet 120 to form a closed magnetic circuit.

[0053] The material of the moving part 200 is ceramic, aluminum alloy or beryllium. Specifically, it includes a work surface 210 located on the upper side of the central magnetic yoke 150, and a coil frame 220 is arranged on the side of the work surface 210 close to the central magnetic yoke 150. The coil frame 220 is in a U-shaped shape and is slidably sleeved on the outer side of the central magnetic yoke 150; a DC coil 230 and an excitation coil 240 are wound around the outer wall of the coil frame 220, and a fixed DC current is passed into the DC coil 230 to generate an Ampere force opposite to the gravity direction of the moving part 200; and a controllable driving current is passed into the excitation coil 240 to generate an electromagnetic driving force.

[0054] The moving component 200 is made of aluminum alloy and is in a square barrel shape as a whole.

[0055] The DC coil 230 and the excitation coil 240 are formed by winding the insulated copper enameled wire on the outer surface of the coil frame 220, with a cross section of a square shape and a thickness of 3mm. The maximum current density is 5A / mm 2 After the magnetic circuit structure of the electromagnetic vibration table is assembled, the DC coil 230 , the excitation coil 240 and the coil frame 220 are located in the air gap 160 .

[0056] The fixed DC current is calculated by the following formula: DC =mg / (BL). In the formula, I DC is the magnitude of the DC current passed through the DC coil 230, m is the mass of the moving part 200 and the related components fixed on the work surface 210, g is the acceleration of gravity, B is the average magnetic induction intensity distributed in the air gap 160, and L is the length of the DC coil 230.

[0057] The DC coil 230 and the excitation coil 240 are located in the air gap 160 and in the area where the magnetic field is uniformly distributed; when the DC coil 230 does not need to offset the gravity of the moving part 200, the DC coil 230 and the excitation coil 240 can be connected to each other and a driving current can be passed to achieve a large electromagnetic driving force.

[0058] After the control signal is passed into the excitation coil 240 and amplified by the power amplifier, the effective value of the power current is up to tens of amperes. According to the electromagnetic field theory, the excitation coil 240 energized in the magnetic field is subjected to the vertical Ampere force, thereby outputting a precisely controllable electromagnetic driving force. The magnitude and direction of the electromagnetic driving force can be precisely controlled by controlling the magnitude and direction of the current passed. If the control signal adopts a standard sinusoidal electrical signal, the moving part 200 will generate a standard sinusoidal vibration along the axial direction under the action of the electromagnetic driving force.

[0059] In one embodiment, a static pressure air floating structure 250 is provided on the coil frame 220, and the static pressure air floating structure 250 controls the formation of a static pressure air film between the coil frame 220 and the central magnetic yoke 150. The static pressure air floating structure 250 is used to generate vertical standard vibration, and in this embodiment, the maximum stroke is 10mm.

[0060] The static pressure air floating structure 250 includes an air path 251 opened in the coil frame 220, and the air path 251 includes four vertical air paths 251 opened at the intersection of the coil frame 220 walls and four transverse air paths 251 opened along the coil frame 220 walls, which are connected to each other; the coil frame 220 is provided with an air outlet hole 252 on one side close to the central magnetic yoke 150, and the air outlet hole 252 is connected to the air path 251, and the air outlet hole 252 is evenly distributed on the inner surface of the coil frame 220. The outer surface of the coil frame 220 away from the central magnetic yoke 150 is provided with an air inlet hole 253, and the air inlet hole 253 is connected to the air path 251, and the air inlet hole 253 is connected to the air supply source. Specifically, the diameter of the air hole can be 2mm.

[0061] In this embodiment, the lower cross-section of the coil frame 220 is in the shape of a Chinese character "Yu", and the side length is 80 mm. The static pressure air floating structure 250 is mounted on the central magnetic yoke 150 through the coil frame 220, so that the static pressure air floating guide rail and the axial direction of the electromagnetic drive structure are completely parallel, ensuring the assembly accuracy; during the assembly process, the inner surface of the coil frame 220 and the size of the central magnetic yoke 150 are matched, so that the coil frame 220 and the central magnetic yoke 150 can be easily assembled, and the assembly has high reliability.

[0062] In another embodiment, a sliding guide rail or a rolling guide rail may be further provided between the coil frame 220 and the central magnetic yoke 150 .

[0063] The present invention provides a single-end side-excitation cubic electromagnetic actuator with integrated guidance and drive. By arranging a lower yoke 110, a permanent magnet 120, an upper yoke 130, a central yoke 150 and an installation assembly 170, the lower yoke 110, the permanent magnet 120, the upper yoke 130 and the central yoke 150 can be quickly and coaxially installed. At the same time, by arranging a static pressure air floating structure 250 and an integrated design of the central yoke 150, the difficulty of assembling the moving part 200 is reduced to the greatest extent, the dead weight of the moving part 200 is reduced, and the assembly accuracy and driving ability of the electromagnetic actuator can be effectively improved. In addition, the DC coil 230 is located in the area with uniform magnetic field distribution to avoid introducing interference.

[0064] The specific beneficial effects are as follows:

[0065] (1) The magnetic circuit structure of the permanent magnet 120 with single-end side excitation adopted by the present invention can generate a relatively uniform magnetic induction intensity in the air gap 160, and the edge effect of the air gap 160 is small, which is suitable for occasions with high requirements for motion accuracy. The permanent magnet 120 is located on the side of the magnetic circuit, and its size is matched with the magnetic circuit structure, which makes assembly easier. The use of the axially magnetized U-shaped permanent magnet 120 is easy to manufacture and has low production cost. The cubic yoke is easy to manufacture, which is conducive to improving processing accuracy and reducing production costs.

[0066] (2) The coil frame 220 proposed in the present invention is in the shape of a U-shaped Chinese character, and the central magnetic yoke 150 constituting the guide shaft is in the shape of a cube. After ventilation, a static pressure air film will be generated between the four inner surfaces of the coil frame 220 and the corresponding side surfaces of the central magnetic yoke 150, that is, there is a restraining force in four directions, which can greatly reduce lateral vibration.

[0067] (3) The channel-type gas path 251 opened in the coil skeleton 220 of the present invention is easier to process than the cavity-type gas chamber. Usually, the wall thickness of the coil skeleton 220 is relatively small, and it is easier to open the channel-type gas path 251 by punching.

[0068] (4) The present invention uses the central magnetic yoke 150 as the guide shaft and the coil frame 220 as the sliding mechanism to complete the design of the electromagnetic actuator with combined guidance and drive, and achieves high motion accuracy of the electromagnetic actuator by improving the assembly accuracy. The moving part 200 is mounted on the guide shaft formed by the central magnetic yoke 150 as a sliding mechanism, and the combination of guidance and drive is achieved through the static pressure air floating structure 250, the sliding guide rail form or the rolling guide rail form, ensuring that the moving part 200 is completely parallel to the axial direction of the electromagnetic drive structure, avoiding lateral vibration caused by assembly errors, and effectively improving the waveform accuracy.

[0069] (5) The electromagnetic actuator proposed by the present invention has a compact structure and a large load. The composite structure of guidance and driving eliminates the need for an additional guidance mechanism, making the overall size of the device smaller and facilitating equipment installation and transportation. The small-sized moving part 200 has a smaller mass, which can significantly improve the load capacity of the electromagnetic actuator.

[0070] (6) The present invention can avoid the situation where the DC coil is subjected to nonlinear electromagnetic force outside the air gap and generates vibration harmonics. The DC coil 230 always runs in the uniform magnetic field distribution area of ​​the air gap 160, and a fixed DC current is passed to make it subject to an Ampere force equal to the gravity of the moving part 200, and a control amount based on displacement feedback is superimposed on the excitation coil 240 to realize active positive stiffness support, thereby avoiding harmonic interference caused by nonlinear electromagnetic force.

[0071] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", "front", "back" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0072] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection, a mechanical connection, an electrical connection, a direct connection, or an indirect connection through an intermediate medium, or the internal connection of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances. In the absence of conflict, the embodiments of the present invention and the features in the embodiments can be combined with each other.

[0073] The above-mentioned embodiments only express the implementation methods of the present invention, and the description thereof is relatively specific and detailed, but it cannot be understood as limiting the scope of the patent of the present invention. It should be pointed out that for ordinary technicians in this field, several modifications and improvements can be made without departing from the concept of the present invention, which all belong to the protection scope of the present invention. Therefore, the protection scope of the patent of the present invention shall be based on the attached claims.

Claims

1. A single-end side-excitation cubic electromagnetic actuator with integrated guidance and drive, Features: It comprises an electromagnetic driving component (100) and a moving component (200); The electromagnetic drive component (100) comprises a lower magnetic yoke (110), a permanent magnet (120) in the shape of a Chinese character "Yu" and arranged on the upper side of the lower magnetic yoke (110), and an upper magnetic yoke (130) in the shape of a Chinese character "Yu" and arranged on the upper side of the permanent magnet (120); the lower magnetic yoke (110), the permanent magnet (120) and the inner side of the upper magnetic yoke (130) enclose a motion cavity (140); a central magnetic yoke (150) is installed on the lower magnetic yoke (110) and located on the inner side of the motion cavity (140); an air gap (160) is provided between the central magnetic yoke (150) and the upper magnetic yoke (130); The moving component (200) comprises a work surface (210) located on the upper side of the central magnetic yoke (150), and a coil frame (220) is arranged on a side of the work surface (210) close to the central magnetic yoke (150), and the coil frame (220) is in a U-shape and is slidably sleeved on the outer side of the central magnetic yoke (150); a DC coil (230) and an excitation coil (240) are wound around the outer wall of the coil frame (220), and a fixed DC current is passed through the DC coil (230) to generate an Ampere force opposite to the gravity direction of the moving component (200); and a controllable driving current is passed through the excitation coil (240) to generate an electromagnetic driving force.

2. The single-end side-excitation cubic electromagnetic actuator with integrated guidance and drive according to claim 1, Features: A static pressure air floating structure (250) is provided on the coil frame (220), and the static pressure air floating structure (250) controls the formation of a static pressure air film between the coil frame (220) and the central magnetic yoke (150).

3. The single-end side-excitation cubic electromagnetic actuator with integrated guidance and drive according to claim 2, Features: The static pressure air floating structure (250) comprises an air path (251) opened in the coil frame (220), and the air path (251) comprises four vertical air paths (251) opened at the intersections of the coil frame (220) walls and four transverse air paths (251) opened along the four coil frame (220) walls, which are connected to each other; an air outlet hole (252) is opened on a side surface of the coil frame (220) close to the central magnetic yoke (150), and the air outlet hole (252) is connected to the air path (251), and the air outlet holes (252) are evenly distributed on the inner surface of the coil frame (220); An air inlet hole (253) is provided on the outer surface of the coil frame (220) away from the central magnetic yoke (150), and the air inlet hole (253) is connected to the air path (251), and the air inlet hole (253) is connected to an air supply source.

4. The single-end side-excitation cubic electromagnetic actuator with integrated guidance and drive according to claim 1, Features: The axes of the lower magnetic yoke (110), the permanent magnet (120), the upper magnetic yoke (130), and the central magnetic yoke (150) are on a straight line; and the central magnetic yoke (150) is located at the center of the lower magnetic yoke (110).

5. The single-end side-excitation cubic electromagnetic actuator with integrated guidance and drive according to claim 4, Features: An installation component (170) is provided between the lower magnetic yoke (110) and the upper magnetic yoke (130) for fixing the permanent magnet (120) and supporting the space where the permanent magnet (120) is located.

6. The single-end side-excitation cubic electromagnetic actuator with integrated guidance and drive according to claim 5, Features: The mounting assembly (170) comprises an inner mounting frame (171) and an outer mounting frame (172); The inner mounting frame (171) is provided with a mounting groove (171a), and a mounting hole (171b) is provided on the inner mounting frame (171) and located at the bottom of the mounting groove (171a); the inner side walls of the four inner mounting frames (171) abut against the four side surfaces of the central magnetic yoke (150), and the outer side walls abut against the permanent magnet (120); the lower side of the inner mounting frame (171) is detachably connected to the lower magnetic yoke (110), and the upper side of the inner mounting frame (171) abuts against the upper magnetic yoke (130); The outer mounting frame (172) is in the shape of a Chinese character “Yu” and covers the permanent magnet (120); the upper side of the outer mounting frame (172) is detachably fixedly connected to the upper magnetic yoke (130); the lower side of the outer mounting frame (172) is detachably fixedly connected to the lower magnetic yoke (110); and the inner side of the outer mounting frame (172) is in contact with the permanent magnet (120).

7. The single-end side-excitation cubic electromagnetic actuator with integrated guidance and drive according to claim 1, Features: A sliding guide rail or a rolling guide rail is provided between the coil frame (220) and the central magnetic yoke (150).

8. The single-end side-excitation cubic electromagnetic actuator with integrated guidance and drive according to claim 1, Features: The permanent magnet (120) includes one permanent magnet (120) or a plurality of permanent magnets (120) bonded to each other.

9. The single-end side-excitation cubic electromagnetic actuator with integrated guidance and drive according to claim 1, Features: The DC coil (230) and the excitation coil (240) are located in the air gap (160) and in a region where the magnetic field is evenly distributed; and the DC coil (230) and the excitation coil (240) are connectable to each other.

10. The single-end side-excitation cubic electromagnetic actuator with integrated guidance and driving according to claim 1, Features: The fixed DC current is calculated by the following formula: DC =mg / (BL); in the formula, I DC is the magnitude of the direct current passed through the DC coil (230), m is the mass of the moving part (200) and related components fixed on the work surface (210), g is the acceleration of gravity, B is the average magnetic induction intensity distributed in the air gap (160), and L is the length of the DC coil (230).

Images