Permanent magnet centripetal excitation cubic electromagnetic drive device with integrated guidance and drive

Abstract

The present invention relates to the field of vibration measurement technology, and in particular to a centripetal excitation cubic electromagnetic drive device with permanent magnets integrated with guidance and driving, comprising an electromagnetic drive component and a moving component; the electromagnetic drive component comprises a square barrel-shaped lower magnetic yoke, and a permanent magnet in the shape of a Chinese character "Yu" arranged inside the lower magnetic yoke; the inner side of the lower magnetic yoke and the inner side and lower side of the permanent magnet enclose a moving cavity; a central magnetic yoke is installed on the lower magnetic yoke and located inside the moving cavity; an air gap is arranged between the central magnetic yoke and the permanent magnet; the moving component comprises a work surface located on the upper side of the central magnetic yoke, a coil frame is arranged on a side of the work surface close to the central magnetic yoke, and the coil frame is slidably sleeved on the outer side of the central magnetic yoke; the outer wall of the coil frame is wound with a DC coil and an excitation coil. By adopting the above scheme, the difficulty of assembling the moving component is reduced to the greatest extent, the dead weight of the moving component is reduced, and the assembly accuracy and driving ability of the electromagnetic drive device are effectively improved.

Description

Technical Field

[0001] The invention relates to the technical field of vibration measurement, in particular to a centripetal excitation cubic electromagnetic driving device of a permanent magnet with integrated guidance and driving. Background Art

[0002] Accelerometers are used to measure low-frequency vibration signals in space microgravity vibration isolation devices and large / ultra-large air-floating vibration isolation platforms. The ultra-low frequency standard vibration table is the core equipment of the zero-frequency accelerometer calibration system. It is usually composed of an electromagnetic drive component and a precision guide structure. Traditionally, the two are separated. The electromagnetic drive component includes a permanent magnet, a yoke, a coil frame and a working coil. The permanent magnet generates uniformly distributed magnetic lines in the air gap through the yoke. The working coil is wound on the coil frame and placed in the air gap. According to the Ampere force principle, the current in the working coil is controlled to achieve a controllable electromagnetic driving force; the guide mechanism includes a slider and a guide rail. The coil frame is rigidly connected to the slider, and the guide rail is fixed to the vibration table base along the main axis. In order to improve the signal-to-noise ratio of low-frequency / ultra-low-frequency vibration, the stroke of the electromagnetic drive device should be as large as possible. However, due to the amplification effect of the large stroke, the small angles between the movement direction of the working coil and the guide rail, and between the guide rails, will cause large non-parallelism, increase the lateral vibration ratio of the working coil, and distort the vibration waveform. Therefore, achieving high assembly accuracy of large-stroke electromagnetic drive devices in a reliable way is an important part of improving vibration calibration accuracy.

[0003] Patent No. CN201510236217.7 discloses a long permanent magnet tube centripetal excitation cylindrical low-frequency vibration calibration platform with magnetic field tracking compensation. It is proposed to coaxially assemble the permanent magnet tube inside the long cylindrical outer magnetic yoke by bonding for excitation. The polarity of the magnetic poles on the inner surface of the permanent magnet tube is the same. The magnetic yoke forms a closed magnetic circuit to generate a highly uniform magnetic field distribution in the air gap. The central magnetic yoke is evenly wound with compensation coils to form a compensation magnetic field to synchronously track and compensate the influence of the armature reaction, and the static pressure air floating guide technology is used to ensure the motion guidance accuracy.

[0004] Patent No. CN201811332560.1 discloses a vibration table. It generates a magnetic field through a magnetic circuit device, and fixes an air bearing on the periphery of the dynamic coil frame to reduce lateral disturbances. The DC coil and the excitation coil are radially wound around the outer peripheral wall of the dynamic coil frame. The DC coil is located in the linear magnetic field area. The DC excitation is used to position the dynamic coil at a position where the DC Ampere force is equal to its gravity to offset the gravity and determine the zero position. The excitation coil is located in the uniform magnetic field area and is excited by AC to generate standard vibration.

[0005] The technical features of the above technical solution are: the guide device is separated from the drive structure, and it is difficult to ensure that the axial direction of the electromagnetic drive structure and the guide device are parallel during the assembly process, the assembly accuracy is low, the vibration waveform is distorted, and lateral vibration is generated; the separation of the guide and drive mechanisms hinders the miniaturization and light weight of the moving parts, and seriously restricts the performance improvement of the electromagnetic drive device. For low-frequency electromagnetic vibration tables that often calibrate large vibration sensors, load capacity is particularly important; and patent CN201811332560.1 places the DC coil in a linear magnetic field region that is only approximately linear, and its nonlinearity will bring harmonic distortion to the vibration waveform.

[0006] In summary, through the structural and principle innovation of the electromagnetic vibration calibration platform, a permanent magnet centripetal excitation cubic electromagnetic drive device with integrated guidance and drive is provided. Summary of the invention

[0007] 1. Technical issues to be solved

[0008] In view of the deficiencies in the prior art, the present invention provides a permanent magnet centripetal excitation cubic electromagnetic drive device with integrated guidance and drive, which greatly reduces the difficulty of assembling moving parts, reduces the dead weight of moving parts, and effectively improves the assembly accuracy and load capacity of the electromagnetic drive device.

[0009] (II) Technical solution

[0010] To achieve the above-mentioned purpose, an embodiment of the present application provides a centripetal excitation cubic electromagnetic drive device with permanent magnets that integrates guidance and driving, comprising an electromagnetic drive component and a moving component; the electromagnetic drive component comprises a square barrel-shaped lower magnetic yoke and a permanent magnet in the shape of a Chinese character “U” arranged on the inner side of the lower magnetic yoke; the inner side of the lower magnetic yoke and the lower side of the permanent magnet enclose a moving cavity; a central magnetic yoke is installed on the lower magnetic yoke and located on the inner side of the moving cavity; an air gap is arranged between the central magnetic yoke and the permanent magnet; the moving component comprises a work table located on the upper side of the central magnetic yoke, a coil frame is arranged on a side of the work table close to the central magnetic yoke, the coil frame is in the shape of a Chinese character “U” and is slidably sleeved on the outer side of the central magnetic yoke; a DC coil and an excitation coil are wound around the outer wall of the coil frame, a fixed DC current is passed into the DC coil to generate an Ampere force opposite to the gravity direction of the moving component; a controllable driving current is passed into the excitation coil to generate an electromagnetic driving force.

[0011] Preferably, a static pressure air floating structure is provided on the coil frame, and the static pressure air floating structure controls the formation of a static pressure air film between the coil frame and the central magnetic yoke.

[0012] Preferably, the static pressure air flotation structure includes an air path opened in the coil frame, and the air path includes four vertical air paths opened at the junctions of the coil frame walls and transverse air paths opened along the four coil frame walls, which are connected to each other; an air outlet is opened on a side of the coil frame close to the center magnetic yoke, the air outlet is connected to the air path, and the air outlet is evenly distributed on the inner surface of the coil frame; an air inlet is opened on the outer surface of the coil frame away from the center magnetic yoke, the air inlet is connected to the air path, and the air inlet is connected to an air supply source.

[0013] Preferably, the central axes of the lower magnetic yoke, the permanent magnet and the central magnetic yoke are in a straight line; and the central magnetic yoke is located at the center of the lower magnetic yoke.

[0014] Preferably, the outer side surface of the permanent magnet abuts the inner surface of the lower magnetic yoke; four mounting frames are arranged in the motion cavity to fix the central magnetic yoke and support the permanent magnet; the mounting frame is in the shape of a U-shaped letter "U", and a mounting groove is provided on the mounting frame; a mounting hole is provided on the mounting frame and at the bottom of the mounting groove; the inner side walls of the four mounting frames abut the four side surfaces of the central magnetic yoke, the upper side surface abuts the permanent magnet, and the lower side of the mounting frame is detachably connected to the lower magnetic yoke.

[0015] Preferably, a sliding guide rail or a rolling guide rail is provided between the coil frame and the central magnetic yoke.

[0016] Preferably, the permanent magnet includes one permanent magnet or a plurality of permanent magnets bonded to each other.

[0017] Preferably, the DC coil and the excitation coil are located in the air gap and in a region where the magnetic field is uniformly distributed; the DC coil and the excitation coil can be connected to each other.

[0018] Preferably, the fixed-size direct current is calculated by the following formula: DC =mg / (BL); in the formula, I DC is the magnitude of the DC current passed through the DC coil, m is the mass of the moving parts and related components fixed on the work surface, g is the acceleration of gravity, B is the average magnetic induction intensity distributed in the air gap, and L is the length of the DC coil.

[0019] (III) Beneficial effects

[0020] The present invention provides a centripetal-excitation cubic electromagnetic drive device with permanent magnets that integrates guidance and drive. By arranging a lower yoke, a permanent magnet, an upper yoke and a mounting assembly, the lower yoke, the permanent magnet and the upper yoke can be quickly and coaxially installed. At the same time, by arranging a static pressure air floating structure and an integrated design of a central yoke, the difficulty of assembling moving parts is reduced to the greatest extent, the dead weight of the moving parts is reduced, and the assembly accuracy and driving ability of the electromagnetic drive device can be effectively improved. In addition, the DC coil is located in an area with uniform magnetic field distribution, thereby avoiding the introduction of interference.

[0021] The specific beneficial effects are as follows:

[0022] (1) The magnetic circuit structure of the permanent magnet centripetal excitation adopted by the present invention can generate a stronger magnetic induction intensity in the air gap, which is suitable for occasions with high requirements for electromagnetic driving force. In addition, the cubic yoke is easy to manufacture, which is conducive to improving the processing accuracy and reducing the production cost.

[0023] (2) The coil frame proposed in the present invention is in the shape of a U-shaped letter "U", and the central magnetic yoke constituting the guide shaft is in the shape of a cube. After ventilation, a static pressure air film will be generated between the four inner surfaces of the coil frame and the corresponding side surfaces of the central magnetic yoke, that is, it has a restraining force in four directions, which can greatly reduce lateral vibration.

[0024] (3) The channel-type air path opened in the coil frame of the present invention is easier to process than the cavity-type air chamber. Usually, the wall thickness of the coil frame is small, and it is easier to open the channel-type air path by punching.

[0025] (4) The present invention processes the central magnetic yoke into a guide shaft and the coil skeleton into a sliding mechanism. The two cooperate to realize the integrated design of guidance and drive, thereby improving the assembly accuracy. The moving part is mounted on the guide shaft formed by the central magnetic yoke as a sliding mechanism. Through the static pressure air floating structure, the sliding guide form or the rolling guide form, the combination of guidance and drive is realized, the axial parallelism of the moving part and the electromagnetic drive structure is improved, and high assembly accuracy is achieved, which avoids lateral vibration caused by assembly errors and effectively improves the waveform accuracy of the electromagnetic drive.

[0026] (5) The present invention realizes the miniaturization of the electromagnetic drive device and significantly improves its load capacity. The electromagnetic drive device with integrated guidance and drive has a compact structure and is convenient for installation and transportation of the equipment. The guide mechanism does not take up additional space, greatly reduces the size of the moving parts, realizes the light weight of the moving parts, and effectively improves the load capacity of the electromagnetic drive device.

[0027] (6) The present invention can avoid the problem that the DC coil is affected by nonlinear electromagnetic force outside the air gap, which interferes with the vibration waveform. The DC coil is placed in the area where the air gap magnetic field is evenly distributed, and a fixed amount of DC current is passed through it so that the DC coil is affected by an Ampere force equal to the gravity of the moving part, thereby avoiding the DC coil being affected by nonlinear electromagnetic force outside the air gap. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 A schematic diagram of the structure of a permanent magnet centripetal excitation cubic electromagnetic drive device with integrated guidance and drive;

[0029] Figure 2 A cross-sectional view of a permanent magnet centripetal excitation cubic electromagnetic drive device with integrated guidance and drive;

[0030] Figure 3 A cross-sectional view of a protruding mounting frame in a permanent magnet centripetal excitation cubic electromagnetic drive device with integrated guidance and drive;

[0031] Figure 4 A schematic diagram of a protruding mounting frame in a permanent magnet centripetal excitation cubic electromagnetic drive device with integrated guidance and drive;

[0032] Figure 5 A schematic diagram of the magnetic pole distribution and magnetic circuit in a permanent magnet centripetal excitation cubic electromagnetic drive device integrating guidance and driving;

[0033] Figure 6 A cross-sectional view of a protruding moving part in a permanent magnet centripetal excitation cubic electromagnetic drive device with integrated guidance and drive;

[0034] Figure 7 A schematic diagram of a protruding static pressure air-floating structure in a permanent magnet centripetal excitation cubic electromagnetic drive device integrating guidance and driving;

[0035] Figure 8 A schematic diagram of the position of the protruding air inlet hole in a permanent magnet centripetal excitation cubic electromagnetic drive device with integrated guidance and drive.

[0036] Markings in the accompanying drawings:

[0037] 100, electromagnetic drive component; 110, lower magnetic yoke; 120, permanent magnet; 130, center magnetic yoke; 140, motion cavity; 160, air gap; 170, mounting frame; 170a, mounting groove; 170b, mounting hole;

[0038] 200, moving parts; 210, work surface; 220, coil frame; 230, DC coil; 240, excitation coil; 250, static pressure air floating structure; 251, air path; 252, air outlet; 253, air inlet. DETAILED DESCRIPTION

[0039] The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

[0040] Embodiment

[0041] The present invention provides a permanent magnet centripetal excitation cubic electromagnetic driving device integrating guiding and driving. Refer to Figure 1-Figure 8 , which includes an electromagnetic driving component 100 and a moving component 200.

[0042] The electromagnetic driving component 100 includes a square-barrel-shaped lower yoke 110 and a rectangular-ring-shaped permanent magnet 120 arranged inside the lower yoke 110; a moving cavity 140 is formed by enclosing the inner side of the lower yoke 110 and the lower side of the permanent magnet 120; a central yoke 130 is installed on the lower yoke 110 and inside the moving cavity 140; an air gap 160 is provided between the central yoke 130 and the permanent magnet 120. In this embodiment, the width of the air gap 160 is 10 mm, and a high-uniformity magnetic induction intensity distribution is formed therein.

[0043] Furthermore, the central axes of the lower yoke 110, the permanent magnet 120, and the central yoke 130 are on a straight line; the central yoke 130 is located at the central position of the lower yoke 110.

[0044] The outer side surface of the permanent magnet 120 abuts against the inner surface of the lower yoke 110; four mounting frames 170 for fixing the central yoke 130 and supporting the space where the permanent magnet 120 is located are arranged in the moving cavity 140; the mounting frame 170 is rectangular-ring-shaped, and a mounting groove 170a is formed on the mounting frame 170, and a mounting hole 170b is formed at the bottom of the mounting groove 170a; during installation, the mounting frame 170 can be fixedly connected to the lower yoke 110 by bolts passing through the mounting holes 170b. The four side walls of the inner side of the four mounting frames 170 abut against the four side surfaces of the central yoke 130, the upper side surface abuts against the permanent magnet 120, and the lower side of the mounting frame 170 is detachably connected to the lower yoke 110. By arranging the mounting frame 170, the upper permanent magnet 120 can be supported and the central yoke 130 can be fixed. Among them, the above-mentioned detachable connection and fixation can be achieved by bolt connection or other connection methods, which are not limited herein.

[0045] It should be noted that in this embodiment, the mounting frame 170 is made of a non-magnetic material, such as aluminum alloy.

[0046] The permanent magnet 120 includes one permanent magnet 120 or multiple permanent magnets 120 bonded to each other.

[0047] Specifically, the permanent magnet 120 can be made of a strong magnetic permanent magnet made of NdFeB, and the residual magnetic strength of the NdFeB material used is 1.17T and the coercive force is 890kA / m. The lower magnetic yoke 110 and the center magnetic yoke 130 are both made of high magnetic permeability electrical pure iron material DT4C, with a maximum relative magnetic permeability of 12000 and a saturation magnetic flux of 2.5T.

[0048] The path of the magnetic lines of force formed by the permanent magnet 120 excitation to form the main magnetic circuit is as follows: Figure 5 As shown, it starts from the N pole of the permanent magnet 120, passes through the lower magnetic yoke 110, the center magnetic yoke 130, the air gap 160 in sequence, and then returns to the S pole of the permanent magnet 120 to form a closed magnetic circuit.

[0049] The material of the moving part 200 is ceramic, aluminum alloy or beryllium. Specifically, it includes a work surface 210 located on the upper side of the central magnetic yoke 130, and a coil frame 220 is arranged on the side of the work surface 210 close to the central magnetic yoke 130. The coil frame 220 is in a U-shape and is slidably sleeved on the outer side of the central magnetic yoke 130; a DC coil 230 and an excitation coil 240 are wound around the outer wall of the coil frame 220, and a fixed DC current is passed into the DC coil 230 to generate an Ampere force opposite to the gravity direction of the moving part 200; and a controllable driving current is passed into the excitation coil 240 to generate an electromagnetic driving force.

[0050] The moving component 200 is made of aluminum alloy and is in a square barrel shape as a whole.

[0051] The DC coil 230 and the excitation coil 240 are formed by winding the insulated copper enameled wire on the outer surface of the coil frame 220, with a cross section of a square shape and a thickness of 3mm. The maximum current density is 5A / mm 2 After the magnetic circuit structure of the electromagnetic vibration table is assembled, the DC coil 230 , the excitation coil 240 and the coil frame 220 are located in the air gap 160 .

[0052] The fixed DC current is calculated by the following formula: DC =mg / (BL). In the formula, I DC is the magnitude of the DC current passed through the DC coil 230, m is the mass of the moving part 200 and the related components fixed on the work surface 210, g is the acceleration of gravity, B is the average magnetic induction intensity distributed in the air gap 160, and L is the length of the DC coil 230.

[0053] The DC coil 230 and the excitation coil 240 are located in the air gap 160 and in the area where the magnetic field is uniformly distributed; when the DC coil 230 does not need to offset the gravity of the moving part 200, the DC coil 230 and the excitation coil 240 can be connected to each other and a driving current can be passed to achieve a large electromagnetic driving force.

[0054] After the control signal is passed into the excitation coil 240 and amplified by the power amplifier, the effective value of the power current is up to tens of amperes. According to the electromagnetic field theory, the excitation coil 240 energized in the magnetic field is subjected to the vertical Ampere force, thereby outputting a precisely controllable electromagnetic driving force. The magnitude and direction of the electromagnetic driving force can be precisely controlled by controlling the magnitude and direction of the current passed. If the control signal adopts a standard sinusoidal electrical signal, the moving part 200 will generate a standard sinusoidal vibration along the axial direction under the action of the electromagnetic driving force.

[0055] In one embodiment, a static pressure air floating structure 250 is provided on the coil frame 220, and the static pressure air floating structure 250 controls the formation of a static pressure air film between the coil frame 220 and the central magnetic yoke 130. The static pressure air floating structure 250 is used to generate vertical standard vibration, and in this embodiment, the maximum stroke is 10mm.

[0056] The static pressure air floating structure 250 includes an air path 251 opened in the coil frame 220, and the air path 251 includes four vertical air paths 251 opened at the intersection of the coil frame 220 walls and four transverse air paths 251 opened along the coil frame 220 walls, which are connected to each other; the coil frame 220 is provided with an air outlet 252 on one side close to the center magnetic yoke 130, and the air outlet 252 is connected to the air path 251, and the air outlet 252 is evenly distributed on the inner surface of the coil frame 220. The outer surface of the coil frame 220 away from the center magnetic yoke 130 is provided with an air inlet 253, and the air inlet 253 is connected to the air path 251, and the air inlet 253 is connected to the air supply source. Specifically, the diameter of the air hole can be 2mm.

[0057] In this embodiment, the lower cross-section of the coil frame 220 is in the shape of a Chinese character "Yu", and the side length is 80 mm. The static pressure air floating structure 250 is mounted on the central magnetic yoke 130 through the coil frame 220, so that the static pressure air floating guide rail and the axial direction of the electromagnetic drive structure are parallel, and the assembly accuracy is ensured; during the assembly process, the inner surface of the coil frame 220 and the size of the central magnetic yoke 130 are matched, so that the coil frame 220 and the central magnetic yoke 130 can be easily assembled, and the assembly has high reliability.

[0058] In another embodiment, a sliding guide rail or a rolling guide rail may be further provided between the coil frame 220 and the central magnetic yoke 130 .

[0059] The present invention provides a centripetal-excitation cubic electromagnetic drive device with permanent magnets that integrate guidance and drive. By setting a lower magnetic yoke 110, a permanent magnet 120, a central magnetic yoke 130 and a mounting frame 170, the lower magnetic yoke 110, the permanent magnet 120 and the central magnetic yoke 130 can be quickly and coaxially installed. At the same time, by setting a static pressure air floating structure 250 and an integrated design of the central magnetic yoke 130, the difficulty of assembling the moving part 200 is reduced to the greatest extent, the dead weight of the moving part 200 is reduced, and the assembly accuracy and driving ability of the electromagnetic drive device can be effectively improved. In addition, the DC coil 230 is located in an area with uniform magnetic field distribution to avoid introducing interference.

[0060] The specific beneficial effects are as follows:

[0061] (1) The centripetal excitation magnetic circuit structure of the permanent magnet 120 used in the present invention can generate a stronger magnetic induction intensity in the air gap 160, which is suitable for occasions with high requirements for electromagnetic driving force. In addition, the cubic yoke is easy to manufacture, which is conducive to improving the processing accuracy and reducing the production cost.

[0062] (2) The coil frame 220 proposed in the present invention is in the shape of a U-shaped Chinese character, and the central magnetic yoke 130 constituting the guide shaft is in the shape of a cube. After ventilation, a static pressure air film will be generated between the four inner surfaces of the coil frame 220 and the corresponding side surfaces of the central magnetic yoke 130, that is, there is a restraining force in four directions, which can greatly reduce lateral vibration.

[0063] (3) The channel-type gas path 251 opened in the coil skeleton 220 of the present invention is easier to process than the cavity-type gas chamber. Usually, the wall thickness of the coil skeleton 220 is relatively small, and it is easier to open the channel-type gas path 251 by punching.

[0064] (4) The present invention processes the central magnetic yoke 130 into a guide shaft and the coil frame 220 into a sliding mechanism. The two cooperate to realize an integrated design of guidance and drive, thereby improving assembly accuracy. The moving component 200 is mounted on the guide shaft formed by the central magnetic yoke 130 as a sliding mechanism. Through the static pressure air floating structure 250, the sliding guide rail form or the rolling guide rail form, the combination of guidance and drive is realized, the axial parallelism between the moving component 200 and the electromagnetic drive structure is improved, and high assembly accuracy is achieved, lateral vibration caused by assembly error is avoided, and the waveform accuracy of the electromagnetic drive is effectively improved.

[0065] (5) The present invention realizes the miniaturization of the electromagnetic drive device and significantly improves its load capacity. The electromagnetic drive device with integrated guidance and driving has a compact structure and is convenient for installation and transportation of the device. The guide mechanism does not take up additional space, greatly reduces the size of the moving part 200, realizes the light weight of the moving part 200, and effectively improves the load capacity of the electromagnetic drive device.

[0066] (6) The present invention can avoid the problem that the DC coil 230 is affected by nonlinear electromagnetic force outside the air gap 160, which interferes with the vibration waveform. The DC coil 230 is placed in the uniform magnetic field distribution area of ​​the air gap 160, and a fixed amount of DC power is passed through the DC coil 230 so that the DC coil 230 is affected by an Ampere force equal to the gravity of the moving part 200, thereby avoiding the DC coil 230 being affected by nonlinear electromagnetic force outside the air gap.

[0067] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", "front", "back" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0068] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection, a mechanical connection, an electrical connection, a direct connection, or an indirect connection through an intermediate medium, or the internal connection of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances. In the absence of conflict, the embodiments of the present invention and the features in the embodiments can be combined with each other.

[0069] The above-mentioned embodiments only express the implementation methods of the present invention, and the description thereof is relatively specific and detailed, but it cannot be understood as limiting the scope of the patent of the present invention. It should be pointed out that for ordinary technicians in this field, several modifications and improvements can be made without departing from the concept of the present invention, which all belong to the protection scope of the present invention. Therefore, the protection scope of the patent of the present invention shall be based on the attached claims.

Claims

1. A permanent magnet centripetal excitation cubic electromagnetic drive device with integrated guidance and drive, Features: It comprises an electromagnetic driving component (100) and a moving component (200); The electromagnetic drive component (100) comprises a square barrel-shaped lower magnetic yoke (110), and a U-shaped permanent magnet (120) arranged inside the lower magnetic yoke (110); the inner side of the lower magnetic yoke (110) and the lower side of the permanent magnet (120) enclose a motion cavity (140); a central magnetic yoke (130) is installed on the lower magnetic yoke (110) and located inside the motion cavity (140); an air gap (160) is arranged between the central magnetic yoke (130) and the permanent magnet (120); The moving component (200) comprises a work surface (210) located on the upper side of the central magnetic yoke (130); a coil frame (220) is arranged on a side of the work surface (210) close to the central magnetic yoke (130); the coil frame (220) is in a U-shape and is slidably sleeved on the outer side of the central magnetic yoke (130); a DC coil (230) and an excitation coil (240) are wound around the outer wall of the coil frame (220); a fixed DC current is passed through the DC coil (230) to generate an Ampere force opposite to the gravity direction of the moving component (200); and a controllable driving current is passed through the excitation coil (240) to generate an electromagnetic driving force; A static pressure air floating structure (250) is provided on the coil frame (220), and the static pressure air floating structure (250) controls the formation of a static pressure air film between the coil frame (220) and the central magnetic yoke (130); The static pressure air floating structure (250) comprises an air path (251) opened in the coil frame (220), and the air path (251) comprises four vertical air paths (251) opened at the intersections of the coil frame (220) walls and four transverse air paths (251) opened along the four coil frame (220) walls, which are interconnected; an air outlet hole (252) is opened on a side surface of the coil frame (220) close to the central magnetic yoke (130), and the air outlet hole (252) is connected to the air path (251), and the air outlet holes (252) are evenly distributed on the inner surface of the coil frame (220); An air inlet hole (253) is provided on the outer surface of the coil frame (220) away from the central magnetic yoke (130), and the air inlet hole (253) is connected to the air path (251), and the air inlet hole (253) is connected to an air supply source.

2. The centripetal excitation cubic electromagnetic drive device with permanent magnets and integrated guidance and driving according to claim 1, Features: The central axes of the lower magnetic yoke (110), the permanent magnet (120) and the central magnetic yoke (130) are on a straight line; and the central magnetic yoke (130) is located at the center of the lower magnetic yoke (110).

3. The centripetal excitation cubic electromagnetic drive device with permanent magnets and integrated guidance and driving according to claim 1, Features: The outer side surface of the permanent magnet (120) abuts against the inner surface of the lower magnetic yoke (110); The motion cavity (140) is provided with a mounting frame (170) for fixing the central magnetic yoke (130) and supporting the permanent magnet (120); the mounting frame (170) is in the shape of a Chinese character "Yu", and a mounting groove (170a) is provided on the mounting frame (170); a mounting hole (170b) is provided on the mounting frame (170) and located at the bottom of the mounting groove (170a); the inner side walls of the four mounting frames (170) respectively abut against the four side surfaces of the central magnetic yoke (130), the upper side surface abuts against the permanent magnet (120), and the lower side of the mounting frame (170) is detachably connected to the lower magnetic yoke (110).

4. The centripetal excitation cubic electromagnetic drive device with permanent magnets and integrated guidance and driving according to claim 1, Features: A sliding guide rail or a rolling guide rail is provided between the coil frame (220) and the central magnetic yoke (130).

5. The centripetal excitation cubic electromagnetic drive device with permanent magnets and integrated guidance and driving according to claim 1, Features: The permanent magnet (120) includes one permanent magnet (120) or a plurality of permanent magnets (120) bonded to each other.

6. The centripetal excitation cubic electromagnetic drive device with permanent magnets and integrated guidance and driving according to claim 1, Features: The DC coil (230) and the excitation coil (240) are located in the air gap (160) and in a region where the magnetic field is evenly distributed; The DC coil (230) and the excitation coil (240) are connected to each other or not connected to each other.

7. The centripetal excitation cubic electromagnetic drive device with permanent magnets and integrated guidance and driving according to claim 1, Features: The fixed DC current is calculated by the following formula: DC =mg / (BL); in the formula, I DC is the magnitude of the direct current passed through the DC coil (230), m is the mass of the moving part (200) and related components fixed on the work surface (210), g is the acceleration of gravity, B is the average magnetic induction intensity distributed in the air gap (160), and L is the length of the DC coil (230).

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