A diaphragm tensioning and welding fixture for thin film vacuum gauge with pre-tightening force

Abstract

The present invention discloses a diaphragm tensioning and welding fixture for thin-film vacuum gauges with a preload, in the field of measuring instrument technology. The fixture comprises a fixed frame for supporting the fixture, with coaxial left and right rotating shafts disposed on the left and right sides of the fixed frame. The left rotating shaft passes through the left end face of the fixed frame and is connected to a left chuck. The left chuck is connected to a left claw for tensioning the diaphragm via a left claw groove. The right rotating shaft passes through the right end face of the fixed frame and is connected to a right chuck. The right chuck is connected to a right claw for clamping the diaphragm for welding to a housing via a right claw groove. Threaded mechanisms for driving the left and right claws are disposed within the left and right chucks, respectively. A secondary diaphragm tensioning and ejection mechanism is also disposed within the left rotating shaft. This fixture ensures uniform diaphragm tensioning, provides a good preload effect, and allows simultaneous preload and welding. This prevents diaphragm springback after preload, resulting in stable welding quality. The fixture is suitable for use in diaphragm processing tools requiring high welding precision.

Description

Technical Field

[0001] The present invention relates to the technical field of measuring instrument devices, in particular to a tensioning and welding fixture for a capacitance thin film vacuum gauge diaphragm. Background Art

[0002] Capacitance diaphragm vacuum gauge is a vacuum gauge for absolute pressure and total pressure measurement, with the characteristics of high accuracy, good linearity, output repeatability and good long-term stability.

[0003] The principle of a capacitance diaphragm vacuum gauge is to use changes in pressure applied to a capacitor diaphragm to generate displacement changes in the diaphragm, thereby generating changes in capacitance. A frequency discriminator then converts this capacitance change into a change in current or voltage, which forms the output signal. The central diaphragm of a capacitance diaphragm vacuum gauge is thin, flexible, and easy to bend. As a key component of the capacitance diaphragm vacuum gauge, its surface integrity and mechanical consistency directly impact the accuracy and precision of the entire capacitance diaphragm vacuum gauge.

[0004] The key technologies for the center diaphragm lie in the diaphragm material, diaphragm tensioning, and diaphragm welding. While the diaphragm material can be determined based on the specific process application, diaphragm tensioning and welding are crucial for ensuring the performance of the thin-film vacuum gauge. The center diaphragm must be tensioned to a predetermined force before welding. This not only tightens the film, preventing surface damage, but also ensures more stable performance. Welding is then performed under a certain prestressed state.

[0005] In the prior art, the pre-tensioning of the central diaphragm generally has the possibility of uneven tensioning effect and surface damage. For example, a capacitance film vacuum gauge diaphragm tensioning mechanism, system, method and device are published in the China National Patent Database, with publication number: CN113442459A, publication date: September 28, 2021, including a clamping mechanism for clamping the outer periphery of the central diaphragm to fix the central diaphragm, and a multi-point ejection mechanism arranged below the clamping mechanism. The multi-point ejection mechanism is provided with a push rod group for tensioning and fixing the central diaphragm fixed on the clamping mechanism by ejection; a positioning mechanism is also provided between the clamping mechanism and the multi-point ejection mechanism for aligning and adjusting the clamping mechanism and the multi-point ejection mechanism. The push rod group includes several push rods that are hydraulically driven to extend and retract. The tensioning mechanism tensions the central diaphragm by ejecting the push rod group of the multi-point ejection mechanism, so that the central diaphragm reaches a predetermined tensioning force, and has the advantages of controllable tensioning degree and uniform tensioning effect in each area of ​​the central diaphragm. However, during the tensioning process of this device, the center diaphragm is tensioned by a hydraulically driven, retractable, multi-point ejection mechanism. This creates a noticeable indentation at the contact point between the ejector head and the center diaphragm, damaging the center diaphragm. Furthermore, the tensioning deformation of the center diaphragm is greatest at the contact point, resulting in inconsistent deformation. Furthermore, conventional techniques typically perform tensioning and welding of the center diaphragm in separate steps. This causes the tensioned diaphragm to rebound, thus failing to achieve the desired tensioning effect. This results in low welding precision and unstable welding quality. Summary of the Invention

[0006] The purpose of the present invention is to overcome the defects in the prior art and provide a diaphragm tensioning and welding fixture for a thin film vacuum gauge with pre-tightening force, so that the diaphragm is tensioned evenly. Through the adjustable secondary tensioning, the precise control of the film tensioning stress is better guaranteed, the film deformation is uniform and consistent, and the tensioning effect is good. At the same time, pre-tightening and welding can be carried out simultaneously. The diaphragm in the pre-tightened state is more suitable for welding, avoiding rebound of the diaphragm after pre-tightening, and the welding quality is stable.

[0007] The objective of the present invention is achieved as follows: a diaphragm tensioning and welding fixture for a thin film vacuum gauge with a pre-tightening force, comprising a fixing frame for supporting the fixture, wherein a coaxial left rotating shaft and a right rotating shaft are provided on the left and right sides of the fixing frame, the left rotating shaft and the right rotating shaft are respectively driven to rotate by a motor, the left rotating shaft passes through the left end face of the fixing frame and is connected to a left chuck, and the left chuck is connected to a left claw for tensioning the diaphragm through a left claw groove; the right rotating shaft passes through the right end face of the fixing frame and is connected to a right chuck, and the right chuck is connected to a right claw for clamping the diaphragm welding shell through a right claw groove; precision threaded mechanisms for driving the left and right claws to move are respectively provided inside the left chuck and the right chuck, and a precisely adjustable diaphragm secondary tensioning and ejection mechanism is also provided inside the left rotating shaft.

[0008] When the present invention is working, the diaphragm is tensioned by the left clamping jaw, and the diaphragm is clamped by the right clamping jaw to weld the shell. The left clamping jaw and the right clamping jaw are respectively concentrically arranged on the left rotating shaft and the right rotating shaft, so that the right clamping jaw and the right clamping jaw can be precisely aligned. The diaphragm is pre-tightened and welded at the same time, which can effectively avoid the problem of the diaphragm rebounding after welding, ensure the welding accuracy, and improve the welding quality.

[0009] Compared with the prior art, the beneficial effects of the present invention are: first, the left clamping jaw of the present invention has a stable structure, is clamped on the outer periphery of the diaphragm to fix the diaphragm, has a large clamping area, and the surface of the clamping jaw is flat, with high clamping precision, which can ensure that the pressure acting on the diaphragm is evenly distributed, and the precision thread mechanism can ensure that the left clamping jaw moves simultaneously to pre-tighten the diaphragm; second, the pre-tightened diaphragm is tensioned again by the diaphragm secondary tensioning and ejecting mechanism to obtain the prestress required for welding, and the head of the ejecting mechanism is connected with a hollow ring that is compatible with the welding shell of the diaphragm clamped by the right clamping jaw, ensuring that all the films inside the ring are evenly tensioned without any indentations, with good pre-tightening effect and uniform stress; third, the pre-tightening and welding of the diaphragm can be carried out simultaneously, effectively avoiding rebound after the diaphragm is pre-tightened, and the left clamping jaw and the right clamping jaw have high precision centering and coaxiality, which can ensure stable welding quality and improve welding precision; fourth, the method of using the weldment to move at a uniform speed instead of the welding rod movement in the prior art reduces the welding difficulty, facilitates operation and ensures welding precision.

[0010] Furthermore, the fixing frame is in a U-shaped structure with front and rear openings upward, and the left chuck and the right chuck are arranged in the U-shaped cavity of the fixing frame.

[0011] Furthermore, in order to accurately and adjustably control the ejection movement distance of the ejection mechanism, the diaphragm secondary tensioning and ejection mechanism includes an ejection pin sleeved inside the left rotating shaft, the head of the ejection pin is provided with a hollow ring that is adapted to the diaphragm welding shell and can rotate around the ejection pin, the tail of the ejection pin is connected to the electric push rod arranged on the left side of the fixed frame, the electric push rod pushes the ejection shaft pin through the rotation of the nut screw, the electric push rod is fixed on the fixed frame and is transmission-connected to the output shaft end of the stepping motor, a micro grating ruler is also provided along the propulsion direction of the electric push rod for precisely measuring the extension length of the electric push rod, and forming a closed-loop measurement circuit with the electric push rod, so that the diaphragm after the initial tensioning is further pushed out for tensioning, and at the same time, by controlling the extension length of the electric push rod, the secondary tensioning prestress required for the film is generated, so that the diaphragm is evenly stressed and not easy to break.

[0012] Furthermore, the precision thread mechanism includes a spiral cone plate, one side of which is axially provided with multiple concentric planar threads, and the other side is radially provided with conical teeth, three open helical tooth positioning rings are engaged on the conical teeth, and the open helical tooth positioning rings are rotatably connected to the inside of the left chuck and the right chuck.

[0013] Furthermore, the left claw grooves are provided with three and are evenly arranged on the surface of the left chuck, and the left claw is correspondingly arranged in the left claw groove. The left claw includes a lower pressing plate and an upper pressing plate fixedly connected by bolts, one end of the lower pressing plate is rectangular, and the other end is in a large arc shape and contacts the surface of the diaphragm secondary tensioning and ejecting mechanism, one end of the upper pressing plate is rectangular, and the other end is in a small arc shape, a diaphragm is clamped between the lower pressing plate and the upper pressing plate, and the outer edge of the diaphragm is clamped between the large arc and the small arc; the left side surface of the lower pressing plate is provided with a flat texture adapted to the flat thread, and when the spiral cone plate rotates, the three left claws can be driven to move inward or outward at the same time, thereby tensioning or relaxing the diaphragm.

[0014] Furthermore, there are three right jaw grooves that are evenly arranged on the surface of the right chuck. The right jaw is correspondingly arranged in the right jaw groove. One end of the right jaw is rectangular and the other end is semi-cylindrical. The semi-cylindrical end faces of the three right jaws jointly clamp the diaphragm welding shell. The right side surface of the right jaw is provided with a flat texture that is compatible with the flat thread. When the spiral cone plate rotates, it can drive the three right jaws to clamp the welding shell and abut against the right end face of the diaphragm secondary tensioning and ejection mechanism.

[0015] Furthermore, the interior of the diaphragm welding shell is a hollow chamber for forming vacuum welding.

[0016] The present invention also provides a method for tensioning and welding a diaphragm of a thin film vacuum gauge with a pre-tightening force, which is characterized by comprising the following steps:

[0017] Step 1: Control the left clamping jaw to pre-tension the diaphragm;

[0018] Step 2: Control the right jaw to align with the left jaw, and the left jaw performs secondary tensioning on the diaphragm;

[0019] Step 3: Control the right clamping jaw to hold the diaphragm welding shell and move it toward the diaphragm until it is in complete and close contact to perform welding. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a schematic diagram of the three-dimensional structure of the present invention.

[0021] Figure 2 for Figure 1 Schematic diagram of the structure of the middle left chuck.

[0022] Figure 3 for Figure 1 Schematic diagram of the structure of the middle right chuck.

[0023] Figure 4 It is a schematic diagram of the internal structure of the present invention.

[0024] Figure 5 It is a structural schematic diagram of the diaphragm secondary tensioning and ejecting mechanism in the present invention.

[0025] In the above figure, 1 is the fixed frame, 2 is the left rotating shaft, 3 is the right rotating shaft, 4 is the nut screw, 5 is the electric push rod, 6 is the ejector pin, 7 is the left chuck, 8 is the left clamping jaw, 9 is the right chuck, 10 is the right clamping jaw, 11 is the diaphragm, 12 is the diaphragm welding shell, 13 is the spiral cone plate, 14 is the flat thread, 15 is the conical tooth pattern, 16 is the open helical tooth positioning ring, 17 is the lower pressure plate, 18 is the upper pressure plate, 19 is the flat texture, 20 is the hollow ring, 21 is the grating ruler. DETAILED DESCRIPTION

[0026] like Figures 1 to 5 The shown embodiment is a diaphragm tensioning and welding fixture for a thin film vacuum gauge with a pre-tightening force, comprising a fixing frame 1 for supporting the fixture, with coaxial left rotating shaft 2 and right rotating shaft 3 provided on the left and right sides of the fixing frame 1, the left rotating shaft 2 and the right rotating shaft 3 being driven to rotate by motors respectively, the left rotating shaft 2 passing through the left end face of the fixing frame 1 being connected to a left chuck 7, the left chuck 7 being connected to a left claw 8 for tensioning the diaphragm through a left claw groove; the right rotating shaft 3 passing through the right end face of the fixing frame 1 being connected to a right chuck 9, the right chuck 9 being connected to a right claw 10 for clamping a diaphragm welding shell 12 through a right claw groove; precision threaded mechanisms for driving the left claw 8 and the right claw 10 to move are provided inside the left chuck 7 and the right chuck 9 respectively, and a secondary diaphragm tensioning and ejecting mechanism for ejecting the diaphragm is also provided inside the left rotating shaft 2.

[0027] The fixing frame 1 is in a U-shaped structure with front and rear openings upward, and the left chuck 7 and the right chuck 9 are arranged in the U-shaped cavity of the fixing frame 1 .

[0028] In order to accurately and adjustably control the ejection movement distance of the ejection mechanism, the diaphragm secondary tensioning and ejection mechanism includes an ejection pin 6 sleeved inside the left rotating shaft 2, and the head of the ejection pin 6 is provided with a hollow ring 20 that is adapted to the diaphragm welding housing 12 and can rotate around the ejection pin 6. The tail of the ejection pin 6 is connected to the electric push rod 5 arranged on the left side of the fixed frame 1. The electric push rod 5 pushes the ejection shaft pin 6 by rotating the nut screw. The electric push rod 5 is fixed on the fixed frame 1 and is connected to the output shaft end of the stepping motor. A micro grating ruler 21 is also provided along the advancing direction of the electric push rod 5 for precisely measuring the extension length of the electric push rod, and forming a closed-loop measurement circuit with the electric push rod 5 to further push out the initially tensioned diaphragm 11 for tensioning. At the same time, by controlling the extension length of the electric push rod 5, the secondary tensioning prestress required for the film 11 is generated, so that the diaphragm 11 is evenly stressed and not easily broken.

[0029] The precision thread mechanism includes a spiral cone plate 13, on one side of which a plurality of concentric planar threads 14 are axially provided, and on the other side a conical tooth pattern 15 is radially provided. Three open helical tooth positioning rings 16 are engaged on the conical tooth pattern 15, and the open helical tooth positioning rings 16 are rotatably connected to the inside of the left chuck 7 and the right chuck 9.

[0030] There are three left claw grooves and they are evenly arranged on the surface of the left chuck 7. The left claw 8 is correspondingly arranged in the left claw groove. The left claw 8 includes a lower pressing plate 17 and an upper pressing plate 18 fixedly connected by bolts. One end of the lower pressing plate 17 is rectangular, and the other end is in the shape of a large arc and contacts the surface of the diaphragm secondary tensioning and ejecting mechanism. One end of the upper pressing plate 18 is rectangular, and the other end is in the shape of a small arc. The diaphragm 11 is clamped between the lower pressing plate 17 and the upper pressing plate 18, and the outer edge of the diaphragm 11 is clamped between the large arc and the small arc; the left side surface of the lower pressing plate 17 is provided with a flat texture 19 adapted to the flat thread 14. When the spiral cone plate 13 rotates, the three left claws 8 can be driven to move inward or outward at the same time, thereby tensioning or relaxing the diaphragm.

[0031] There are three right claw grooves and they are evenly arranged on the surface of the right chuck 9. The right claw 10 is correspondingly arranged in the right claw groove. One end of the right claw 10 is rectangular and the other end is semi-cylindrical. The semi-cylindrical end faces of the three right claws 10 jointly clamp the diaphragm welding shell 12. The right side surface of the right claw 10 is provided with a flat texture 19 that is adapted to the flat thread 14. When the spiral cone plate 13 rotates, it can drive the three right claws 10 to clamp the diaphragm welding shell 12 and abut against the right end face of the diaphragm secondary tensioning and ejection mechanism.

[0032] The interior of the diaphragm welding housing 12 is a hollow chamber for forming vacuum welding.

[0033] A method for tensioning and welding a diaphragm of a thin film vacuum gauge with pre-tightening force comprises the following steps:

[0034] Step 1: Control the left clamping jaw to pre-tension the diaphragm;

[0035] Step 2: Control the right jaw to align with the left jaw, and the left jaw performs secondary tensioning on the diaphragm;

[0036] Step 3: Control the right clamping jaw to hold the diaphragm welding shell and move it toward the diaphragm until it is in complete and close contact to perform welding.

[0037] The specific operation steps are as follows: the fixed frame 1 is used as the supporting body of the clamp, and a hole is opened at each end. The axis of the two holes is at the same height, and the left rotating shaft 2 and the right rotating shaft 3 are installed respectively. A ejector pin 6 is sleeved in the left rotating shaft 2. The left end of the ejector pin 6 abuts against the electric push rod 5 at the left end of the fixed frame 1. The electric push rod 5 pushes the ejector pin 6 through the nut screw 4. The left rotating shaft 2 and the right rotating shaft 3 are respectively connected to the left chuck 7 and the right chuck 9. The left chuck 7 is connected to the left chuck 7 through the left claw. The groove connects the left clamping jaw 8, and the left chuck 7 and the right chuck 9 are both disc-shaped. The left clamping jaw 8 is evenly distributed on the surface of the left chuck 7, and the left clamping jaw 8 can realize synchronous rotation with the left rotating shaft 2; one end of the lower pressing piece 17 of the left clamping jaw 8 is in a large arc shape and abuts against the outer periphery of the ejector pin 6, and the arc-shaped end faces of the three left clamping jaws 8 can be used in conjunction to form a hollow disc, and the inner surface of the hollow disc abuts against the outer circumference of the ejector pin 6, and one end of the upper pressing piece 18 of the left clamping jaw 8 is in a small arc shape and abuts against the lower The large arc of the pressing piece 17 remains concentric, and the diaphragm 11 is clamped between the lower pressing piece 17 and the upper pressing piece 18, and the outer edge of the diaphragm 11 is clamped between the large arc of the lower pressing piece 17 and the small arc of the upper pressing piece 18 under the clamping of the left clamping claw 8; when the ejection pin 6 is pushed by the electric push rod 5, the middle part of the diaphragm 11 abuts against the hollow ring 20 connected to the head of the ejection pin 6, which can further tighten the diaphragm 11. The design of the left clamping claw 8 with one end rectangular and the other end circular can increase the tension. The large contact area between the left jaw 8 and the diaphragm 11 ensures the pre-tightening effect of the diaphragm 11, and since the left jaw 8 is evenly arranged on the left chuck 7, the tensioning force on the diaphragm 11 in the circumferential direction is balanced, which can ensure that the diaphragm 11 is not torn; the precision spiral cone plate 13 arranged in the left chuck 7 has a flat thread 14 on one side that matches the flat texture 19 on the lower pressure plate 17 of the left jaw 8, and the conical tooth pattern 15 on the other side engages with the open helical tooth positioning ring 16 arranged in the left chuck 7.When pre-tightening the diaphragm 11, the diaphragm 11 is first clamped between the lower pressing plate 17 and the upper pressing plate 18 by means of bolts, and the precision spiral cone plate 13 in the left chuck 7 is driven to rotate by twisting the open helical tooth positioning ring 16. The three left claws 8 can automatically and precisely align the diaphragm 11, and at the same time, synchronously drive the three left claws 8 to move a small distance outward, so that the diaphragm 11 is tensioned and prestressed. Then, the electric push rod 5 is driven by a stepping motor to move the ejection shaft pin 6 axially, and the diaphragm is tensioned and ejected for the second time. The micro grating ruler 21 arranged next to the electric push rod can accurately measure the extension length of the electric push rod 5, and form a closed-loop measurement circuit with the electric push rod 5, so as to control the movement distance of the ejection shaft pin 6, and further push out the initially tensioned diaphragm 11 to avoid damage caused by breaking the diaphragm 11. wound; then the precision spiral cone plate 13 in the right chuck 9 rotates, and at the same time, the three right jaws 10 are synchronously driven to clamp the diaphragm welding shell 12 with a vacuum chamber inside and automatically align it in the direction of the left jaw 8, thereby realizing synchronous automatic centering with the left jaw 8 until the end face of the diaphragm welding shell 12 is in close and complete contact with the diaphragm 11. The diaphragm welding shell 12 is replaced by the welding rod moving welding in the prior art, which reduces the welding difficulty, facilitates the operation and ensures the welding accuracy; the synchronous rotation of the left jaw 8 and the right jaw 10 is realized by the left rotating shaft 2 and the right rotating shaft 3 under the control of the stepper motor. During welding, as the left rotating shaft 2 and the right rotating shaft 3 rotate, first, the welding position is quickly spot welded in the circumferential direction, and then full welding is performed until the welding operation is completed.

[0038] The left clamping jaw of the present invention has a stable structure and is clamped on the outer periphery of the diaphragm to fix the diaphragm. It has a large clamping area, and the surface of the clamping jaw is flat and the clamping precision is high, which can ensure that the pressure acting on the diaphragm is evenly distributed. The precise threaded mechanism can ensure that the left clamping jaw moves at the same time to pre-tighten the diaphragm; the pre-tightened diaphragm is tensioned again by the diaphragm secondary tensioning and ejecting mechanism to obtain the prestress required for welding, with uniform tensioning and enhanced pre-tightening effect; the pre-tightening and welding of the diaphragm can be carried out simultaneously, effectively avoiding rebound after pre-tightening of the diaphragm, and the left clamping jaw and the right clamping jaw have high precision centering and coaxiality, which can ensure stable welding quality and improve welding precision; the method of using the weldment to move at a uniform speed instead of the welding rod movement in the prior art reduces the welding difficulty, facilitates operation and ensures welding precision, and is suitable for use in diaphragm processing tools requiring high welding precision.

[0039] The present invention is not limited to the above-mentioned embodiments. On the basis of the technical solutions disclosed in the present invention, those skilled in the art can make some substitutions and modifications to some of the technical features therein according to the disclosed technical content without creative labor, and these substitutions and modifications are all within the protection scope of the present invention.

Claims

1. A diaphragm tensioning and welding fixture for a thin film vacuum gauge with pre-tightening force, characterized by: The present invention relates to a fixing frame for supporting the clamp, wherein a coaxial left rotating shaft and a right rotating shaft are provided on the left and right sides of the fixing frame, and the left rotating shaft and the right rotating shaft are respectively driven to rotate by a stepping motor, and the left rotating shaft passes through the left end face of the fixing frame and is connected to the left chuck, and the left chuck is connected to the left claw for tensioning the diaphragm through the left claw groove; the right rotating shaft passes through the right end face of the fixing frame and is connected to the right chuck, and the right chuck is connected to the right claw for clamping the diaphragm welding shell through the right claw groove; the interiors of the left chuck and the right chuck are respectively provided with precision thread mechanisms for driving the left claw and the right claw to move, and the interior of the left rotating shaft is also provided with a diaphragm secondary tensioning and ejecting mechanism; The diaphragm secondary tensioning and ejecting mechanism includes an ejector pin sleeved inside the left rotating shaft, the head of the ejector pin is provided with a hollow ring adapted to the diaphragm welding housing and rotatable around the ejector pin, the tail of the ejector pin is connected to an electric push rod provided on the left side of the fixed frame, the electric push rod pushes the ejector pin by rotating the nut screw, the electric push rod is fixed to the fixed frame and is transmission-connected to the output shaft end of the stepping motor, a micro grating ruler is further provided along the propulsion direction of the electric push rod for precisely measuring the extension length of the electric push rod, and forming a closed-loop measurement circuit with the electric push rod; The precision thread mechanism includes a spiral cone plate, one side of which is provided with a plurality of concentric planar threads in the axial direction, and the other side of which is provided with conical teeth in the radial direction. Three open helical tooth positioning rings are engaged with the conical teeth, and the open helical tooth positioning rings are rotatably connected to the inside of the left chuck and the right chuck; The left claw grooves are provided with three and are evenly arranged on the surface of the left chuck, and the left claw is correspondingly arranged in the left claw groove, and the left claw includes a lower pressing piece and an upper pressing piece fixedly connected by bolts, one end of the lower pressing piece is rectangular, and the other end is in the shape of a large arc and contacts the surface of the diaphragm secondary tensioning and ejecting mechanism, one end of the upper pressing piece is rectangular, and the other end is in the shape of a small arc, and a diaphragm is clamped between the lower pressing piece and the upper pressing piece, and the outer edge of the diaphragm is clamped between the large arc and the small arc; the left side surface of the lower pressing piece is provided with a flat texture adapted to the flat thread, and when the spiral cone plate rotates, the three left claws can be driven to move inward or outward at the same time, thereby tensioning or relaxing the diaphragm; There are three right jaw grooves that are evenly arranged on the surface of the right chuck. The right jaw is correspondingly arranged in the right jaw groove. One end of the right jaw is rectangular and the other end is semi-cylindrical. The semi-cylindrical end faces of the three right jaws jointly clamp the diaphragm welding shell. The right side surface of the right jaw is provided with a flat texture that is adapted to the flat thread. When the spiral cone plate rotates, it can drive the three right jaws to clamp the welding shell and abut against the right end face of the diaphragm secondary tensioning and ejection mechanism.

2. The diaphragm tensioning and welding fixture with pre-tightening force for a thin film vacuum gauge according to claim 1, characterized in that: The fixing frame is in a U-shaped structure with front and rear openings upward, and the left chuck and the right chuck are arranged in the U-shaped cavity of the fixing frame.

3. The diaphragm tensioning and welding fixture with pre-tightening force for a thin film vacuum gauge according to claim 1, characterized in that: The interior of the diaphragm welding housing is a vacuum chamber.

Images