A liquid source supply and bubbling device

Abstract

The present invention relates to a liquid source supply and bubbling device, which comprises a raw material tank, a bubbler, a first waste liquid collector and a pipeline; the air inlet end of the raw material tank is connected with a second valve and a fourth valve in sequence, one end of the fourth valve is connected to an inert gas supply source through a sixth valve, the discharge end of the raw material tank is connected with a third valve and a fifth valve in sequence, one end of the fifth valve is connected to the feed end of the bubbler through an eighth valve and a tenth valve in sequence, the material end of the bubbler can input bubbling gas through a twelfth valve, and the material end of the bubbler can transport liquid raw materials to a process production line through a fourteenth valve, and the end of the fifth valve away from the third valve is connected to the first waste liquid collector through a ninth valve; wherein a seventh valve is connected between one end of the fourth valve and one end of the fifth valve, and a first valve is connected between the other end of the fourth valve and the other end of the fifth valve, and the device can realize safe and reliable liquid source supply and bubbling.

Description

Technical Field

[0001] The invention relates to the technical field of chemical manufacturing, and in particular to a liquid source supply and bubbling device. Background Art

[0002] Liquid source bubbling is a common method of delivering high vapor pressure liquid into process pipelines by carrier gas bubbling. As the liquid level in the bubbler decreases, it is necessary to replenish the bubbler with liquid through a liquid source supply device. For example, silicon tetrachloride, germanium tetrachloride, phosphorus oxychloride are required in the manufacturing process of optical fiber preforms, and tetraethyl orthosilicate is required in the semiconductor manufacturing process, all of which require liquid source supply and bubbling devices.

[0003] Since commonly used liquid sources are often hazardous liquids, once leakage occurs or air enters the pipeline, it often causes serious consequences, causing equipment pollution and even threatening the lives of workers. Therefore, safe and reliable liquid source supply and bubbling process is a prerequisite for determining the excellent performance of the product.

[0004] As disclosed in patent CN106545749A, a liquid source supply device is currently common in the market. Before the liquid source in the raw material tank is used up, the gas phase valve in the raw material tank is in a high-pressure state for a long time. Once the liquid phase valve becomes loose, the liquid raw material will be continuously pressed out into the environment by high pressure, and the entire conveying pipeline also retains liquid. Once a valve in the middle becomes loose, it is easy to cause the liquid in the pipeline to leak into the environment. Secondly, when changing the bottle, the liquid in the pipeline needs to be pressed back into the raw material tank, otherwise it will cause a waste of liquid raw materials.

[0005] CN102230571B discloses a common liquid source vaporization device. When liquid is supplied to a bubbler through the device, it is easy to cause the gas pressure in the bubbler to increase and affect the feeding speed. At the same time, when the bubbler is supplying process gas, once the rear end pipeline is blocked, it is easy to cause the pressure in the bubbler to increase sharply, and there is a risk of high pressure.

[0006] Therefore, currently published papers and patents have not provided a solution for achieving safe and reliable liquid source supply and bubbling device. Summary of the invention

[0007] Based on the above description, the present invention provides a liquid source supply and bubbling device to solve the technical problem of the liquid source supply in the prior art that has great potential safety hazards due to unreasonable configuration of pipelines and valves.

[0008] The technical solution of the present invention to solve the above technical problems is as follows:

[0009] A liquid source supply and bubbling device, comprising a raw material tank, a bubbler, a first waste liquid collector and a pipeline;

[0010] The air inlet end of the raw material tank is connected with the second valve and the fourth valve in sequence, the end of the fourth valve away from the second valve is connected to the inert gas supply source through the sixth valve, the discharge end of the raw material tank is connected with the third valve and the fifth valve in sequence, the end of the fifth valve away from the third valve is connected to the feed end of the bubbler through the eighth valve and the tenth valve in sequence, the material end of the bubbler can input bubbling gas through the twelfth valve, and the material end of the bubbler can transport the liquid raw material to the process production line through the fourteenth valve, and the end of the fifth valve away from the third valve is connected to the first waste liquid collector through the ninth valve;

[0011] Among them, a seventh valve is connected between an end of the fourth valve away from the second valve and an end of the fifth valve away from the third valve, a first valve is connected between an end of the fourth valve close to the second valve and an end of the fifth valve close to the third valve, and the valves connected to each other are connected by pipelines.

[0012] Compared with the prior art, the technical solution of this application has the following beneficial technical effects:

[0013] The liquid source supply and bubbling device provided in the present application can control the flow direction of gas and liquid in the pipeline according to the opening and closing combination of each valve, thereby realizing at least multiple working modes including liquid source supply, bubbling feeding, pressure balance, and raw material tank bottle replacement, effectively solving the safety risks brought by the high pressure at the gas phase end of the raw material tank.

[0014] Based on the above technical solution, the present invention can also be improved as follows.

[0015] Furthermore, the liquid source supply and bubbling device also includes a second waste liquid collector, and the eighth valve and the tenth valve are connected to the second waste liquid collector via an eleventh valve.

[0016] Furthermore, in the liquid source supply and bubbling device, the pipeline where the twelfth valve is located is connected to the fourteenth valve through the thirteenth valve.

[0017] Furthermore, the thirteenth valve and the fourteenth valve are connected to the second waste liquid collector via a fifteenth valve.

[0018] Furthermore, a pressure relief protection valve is connected between the second waste liquid collector and the input end of the fourteenth valve.

[0019] Furthermore, the inert gas is one of nitrogen or helium.

[0020] Furthermore, the interior of the first waste liquid collector is connected to a waste liquid treatment system via a negative pressure pumping mechanism.

[0021] Furthermore, the interior of the second waste liquid collector is connected to the waste liquid treatment system via a negative pressure extraction mechanism. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 A schematic diagram of the structure of a liquid source supply and bubbling device provided in an embodiment of the present invention; DETAILED DESCRIPTION

[0023] In order to facilitate understanding of the present application, the present application will be described more fully below with reference to the relevant drawings. Embodiments of the present application are provided in the drawings. However, the present application can be implemented in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to make the disclosure of the present application more thorough and comprehensive.

[0024] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art to which this application belongs. The terms used herein in the specification of this application are only for the purpose of describing specific embodiments and are not intended to limit this application.

[0025] It will be appreciated that spatial relationship terms such as "under", "beneath", "below", "under", "above", "above", etc., may be used herein to describe the relationship of an element or feature shown in the figures to other elements or features. It will be appreciated that, in addition to the orientations shown in the figures, spatial relationship terms also include different orientations of the device in use and operation. For example, if the device in the accompanying drawings is flipped, an element or feature described as "under other elements" or "under it" or "under it" will be oriented as "on" the other elements or features. Thus, the exemplary terms "under" and "under" may include both upper and lower orientations. In addition, the device may also include additional orientations (e.g., rotated 90° or other orientations), and the spatial descriptors used herein are interpreted accordingly.

[0026] It should be noted that when an element is considered to be "connected" to another element, it can be directly connected to the other element, or connected to the other element through an intermediate element. The "connection" in the following embodiments should be understood as "electrical connection", "communication connection", etc. if the connected circuits, modules, units, etc. have electrical signals or data transmission between each other.

[0027] When used herein, the singular forms "a", "an", and "said / the" may also include plural forms, unless the context clearly indicates otherwise. It should also be understood that the terms "include / comprise" or "have" etc. specify the presence of stated features, wholes, steps, operations, components, parts or combinations thereof, but do not exclude the possibility of the presence or addition of one or more other features, wholes, steps, operations, components, parts or combinations thereof.

[0028] like Figure 1 As shown, the present application provides a liquid source supply and bubbling device, which includes a raw material tank 18, a bubbler 19, a first waste liquid collector 16, a second waste liquid collector 17 and a pipeline (each straight line segment and arrow in the figure represents a pipeline).

[0029] Among them, the air inlet end of the raw material tank 18 is connected to the second valve 2 and the fourth valve 4 in sequence, the end of the fourth valve 4 away from the second valve 2 is connected to the inert gas supply source through the sixth valve 6, and the discharge end of the raw material tank 18 is connected to the third valve 3 and the fifth valve 5 in sequence. For the convenience of description, according to the direction of the pipeline in the figure, it can be seen that the end of the fifth valve 5 away from the third valve 3 is the upper end of the fifth valve 5, and the end of the fourth valve 4 away from the second valve 2 is the upper end of the fourth valve.

[0030] Among them, the upper end of the fifth valve 5 is connected to the feed end of the bubbler 19 through the eighth valve 8 and the tenth valve 10 in sequence, the material end of the bubbler 19 can input bubbling gas through the twelfth valve 12, and the material end of the bubbler 19 can transport the liquid source to the process production line through the fourteenth valve 14, and the end of the fifth valve 5 away from the third valve 3 is connected to the first waste liquid collector 16 through the ninth valve 9.

[0031] A seventh valve 7 is connected between the upper end of the fourth valve 4 and the upper end of the fifth valve 5, and a first valve 1 is connected between the lower end of the fourth valve 4 and the lower end of the fifth valve 5. The arrangement of the seventh valve 7 between the upper end of the fourth valve 4 and the upper end of the fifth valve 5 effectively solves the safety risk caused by the high pressure at the gas phase end of the raw material tank. The sequential connection of the sixth valve 6, the seventh valve 7, the eighth valve 8 and the tenth valve 10 can ensure that the residual liquid of the liquid source in the pipeline is transported to the bubbler 19 to prevent the waste of the liquid source.

[0032] The eighth valve 8 and the tenth valve 10 are connected to the second waste liquid collector via the eleventh valve 11 .

[0033] The pipeline where the twelfth valve 12 is located is connected to the fourteenth valve 14 through the thirteenth valve 13 .

[0034] The thirteenth valve 13 and the fourteenth valve 14 are connected to the second waste liquid collector 17 via a fifteenth valve 15 .

[0035] A pressure relief protection valve 20 is connected between the second waste liquid collector 17 and the input end of the fourteenth valve 14 .

[0036] The first waste liquid collector 16 is internally connected to the waste liquid treatment system via a negative pressure pumping mechanism.

[0037] The liquid inside the second waste liquid collector 17 is connected to the waste liquid treatment system through a negative pressure pumping mechanism.

[0038] The front end of the process pipeline is connected to the second waste liquid collector 17 through a pressure relief protection valve 20. Once the pipeline is blocked, the pressure relief protection valve 20 will automatically open, and the dangerous gas will be discharged into the exhaust gas treatment system. In addition, one end of the bubbler 19 is connected to the negative pressure system to avoid the problem of slowing down the feeding speed due to excessive pressure in the bubbler caused by the addition of liquid source.

[0039] The inert gas in the present application can be selected as nitrogen or helium, preferably nitrogen.

[0040] After adopting the above connection structure and pipeline arrangement, the liquid source supply and bubbling device can realize the following working modes:

[0041] 1. Safety mode, all valves are closed; the device is in silent state.

[0042] 2. In the residual gas purge mode of the liquid source supply pipeline, the sixth valve 6, the seventh valve 7, the eighth valve 8 and the eleventh valve 11 are opened, and the other valves are closed; at this time, nitrogen passes through the sixth valve 6, the seventh valve 7, the eighth valve 8 and the eleventh valve 11 in sequence, and purges the residual gas in the corresponding pipeline into the second waste liquid collector 17.

[0043] 3. Residual liquid purge mode of the pipeline of liquid source supply: the sixth valve 6, the seventh valve 7, the eighth valve 8, the tenth valve 10 and the fifteenth valve 15 are opened, and the other valves are closed; at this time, nitrogen gas passes through the sixth valve 6, the seventh valve 7, the eighth valve 8, and the tenth valve 10 to blow the residual liquid in the pipeline corresponding to the sixth valve 6, the seventh valve 7, the eighth valve 8, and the tenth valve 10 into the bubbler 19, wherein the fifteenth valve 15 is opened to ensure the stability of the air pressure of the bubbler 19, and at the same time, the negative pressure of the second waste liquid collector 17 ensures that the air will not diffuse back into the bubbler 19 to pollute the raw materials;

[0044] 4. Pressure balance mode of liquid source supply: the second valve 2, the third valve 3, the fourth valve 4, the fifth valve 5, the seventh valve 7 and the ninth valve 9 are opened, and the remaining valves are closed; at this time, since the seventh valve 7 is connected to the air inlet and the discharge end of the raw material tank, and all are connected to the first waste liquid collector 16, the pressure balance between the gas phase end and the liquid phase end of the raw material tank is ensured to prevent the safety risks caused by the high pressure at the gas phase end.

[0045] 5. Raw material supply mode of liquid source supply: the second valve 2, the third valve 3, the fourth valve 4, the fifth valve 5, the sixth valve 6, the eighth valve 8, the tenth valve 10 and the fifteenth valve 15 are opened, and the remaining valves are closed; at this time, nitrogen passes through the sixth valve 6, the fourth valve 4 and the second valve 2 in sequence to enter the raw material tank 18, and the liquid source raw material is pressed out from the discharge end of the raw material tank 18. The raw material passes through the third valve 3, the fifth valve 5, the eighth valve 8 and the tenth valve 10 in sequence to enter the bubbler 19, and the gas in the bubbler 19 is squeezed into the second waste liquid collector 17, thereby realizing the supply of raw materials to the bubbler 19.

[0046] 6. The first type of bottle exchange and purge mode for liquid source supply: the second valve 2, the third valve 3, the fourth valve 4, the fifth valve 5, the sixth valve 6, the eighth valve 8 and the eleventh valve 11 are opened, and the remaining valves are closed. For the raw material tank 18 before bottle exchange, nitrogen enters the raw material tank 18 from the sixth valve 6, the fourth valve 4 and the second valve 2 in sequence, and the residual raw material in the raw material tank 18 is discharged into the second waste liquid collector 17 through the eighth valve 8 and the eleventh valve 11 in sequence to prevent the residual raw material in the raw material tank 18 from leaking.

[0047] 7. Liquid source supply, second type of bottle exchange and purge mode: the first valve 1, the fourth valve 4, the fifth valve 5, the sixth valve 6, the eighth valve 8 and the eleventh valve 11 are opened, and the remaining valves are closed; at this time, nitrogen gas sequentially purges the residual raw material vapor in the pipelines corresponding to the fifth valve 5, the sixth valve 6, the eighth valve 8 and the eleventh valve 11 from the sixth valve 6, the fourth valve 4, the second valve 2 into the second waste liquid collector 17. The second valve 2 and the third valve 3 are hand valves provided by the raw material tank. When replacing the raw material tank, the second valve 2 and the third valve 3 need to be closed and the upper nuts need to be loosened, and the raw material tank needs to be removed together. At this time, air will enter between the first valve 1 and the fourth valve 4 and between the first valve 1 and the fourth valve 4. After the second valve 2 and the third valve 3 of the new raw material tank are connected (the second valve 2 and the third valve 3 are closed at this time), the air in the pipeline needs to be removed before the second valve 2 and the third valve 3 can be opened, otherwise the raw material will react with the water vapor in the air to pollute the pipeline. This purge mode is to remove this part of the air.

[0048] 8. Bubble feeding mode: the twelfth valve 12 and the fourteenth valve 14 are opened, and the other valves are closed; at this time, the bubbling gas enters the bubbler 19 from the pipeline where the twelfth valve 12 is located, and the liquid source material in the bubbler 19 enters the process production line through the pipeline where the fourteenth valve 14 is located;

[0049] 9. Bubbling standby mode: the twelfth valve 12 and the fifteenth valve 15 are opened, and the other valves are closed; at this time, the bubbling gas enters the bubbler 19 from the pipeline where the twelfth valve 12 is located, and the gas in the bubbler 19 enters the second waste liquid collector 17 from the pipeline where the fifteenth valve 15 is located. This mode is prepared for the bubbling feeding mode. When switching to the bubbling feeding mode, the raw gas can enter the process pipeline more quickly and stably.

[0050] 10. Bubbling purge mode: the twelfth valve 12, the thirteenth valve 13 and the fifteenth valve 15 are opened, and the other valves are closed. The bubbling gas passes through the twelfth valve 12, the thirteenth valve 13 and the fifteenth valve 15 in sequence, and the bubbling gas is purged into the second waste liquid collector 17. This mode is to purge the raw material vapor in the process pipeline after the bubbling feeding is completed.

[0051] In summary, the liquid source supply and bubbling device provided in the embodiments of the present application has excellent safety performance and realizes safe and reliable liquid source supply and bubbling.

[0052] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A liquid source supply and bubbling device, characterized in that: It includes a raw material tank, a bubbler, a first waste liquid collector and a pipeline; The air inlet end of the raw material tank is connected with the second valve and the fourth valve in sequence, the end of the fourth valve away from the second valve is connected to the inert gas supply source through the sixth valve, the discharge end of the raw material tank is connected with the third valve and the fifth valve in sequence, the end of the fifth valve away from the third valve is connected to the feed end of the bubbler through the eighth valve and the tenth valve in sequence, the material end of the bubbler can input bubbling gas through the twelfth valve, and the material end of the bubbler can transport the liquid raw material to the process production line through the fourteenth valve, and the end of the fifth valve away from the third valve is connected to the first waste liquid collector through the ninth valve; Among them, a seventh valve is connected between an end of the fourth valve away from the second valve and an end of the fifth valve away from the third valve, a first valve is connected between an end of the fourth valve close to the second valve and an end of the fifth valve close to the third valve, and the valves connected to each other are connected by pipelines.

2. The liquid source supply and bubbling device according to claim 1, characterized in that: It also includes a second waste liquid collector, and the eighth valve and the tenth valve are connected to the second waste liquid collector via an eleventh valve.

3. The liquid source supply and bubbling device according to claim 2, characterized in that: The pipeline where the twelfth valve is located is connected to the fourteenth valve through the thirteenth valve.

4. The liquid source supply and bubbling device according to claim 3, characterized in that: The thirteenth valve and the fourteenth valve are connected to the second waste liquid collector via a fifteenth valve.

5. The liquid source supply and bubbling device according to claim 2, characterized in that: A pressure relief protection valve is connected between the second waste liquid collector and the input end of the fourteenth valve.

6. The liquid source supply and bubbling device according to claim 1, characterized in that: The inert gas is nitrogen or helium.

7. The liquid source supply and bubbling device according to claim 1, characterized in that: The interior of the first waste liquid collector is connected to the waste liquid treatment system via a negative pressure pumping mechanism.

8. The liquid source supply and bubbling device according to claim 2, characterized in that: The interior of the second waste liquid collector is connected to the waste liquid treatment system via a negative pressure pumping mechanism.

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