Measuring device calibration method and measuring device calibration apparatus

Abstract

The present application provides a method for calibrating a measuring device and a device for calibrating a measuring device; the method for calibrating the measuring device obtains initial data corresponding to the measuring device, determines actual image information corresponding to the measuring device according to the initial data, and then determines initial boundary information according to the actual image information and the image size corresponding to the measuring device. Then, the boundary of the measuring device during measurement can be determined through the initial data, and the initial boundary information and the theoretical boundary information are compared. When the initial boundary information is different from the theoretical boundary information, the initial boundary information is adjusted to obtain calibrated boundary information, and the measuring device is calibrated using the calibrated boundary information. Since this process is achieved through data comparison, image comparison, and data calibration, there is no need to operate on the measuring device, so there is no need to stop the measuring device, which improves the measurement efficiency and does not require personnel operation, thus improving the accuracy of mismeasurement calibration.

Description

Technical Field

[0001] The present application relates to the field of display technologies, and in particular, to a method for calibrating a measuring device and a device for calibrating a measuring device. Background Art

[0002] In the process of manufacturing a liquid crystal display panel, in order to improve the theory of the liquid crystal display panel, a CDTP (critical dimension measurement total pitch measurement) measuring machine is used to measure the critical dimensions and the accuracy of the exposure position of the pattern after exposure. However, during the measurement process of the CDTP measuring machine, mismeasurements often occur. It is necessary to move the measured substrate into the CDTP measuring machine and stop the CDTP measuring machine for correction. This results in a long measurement time. Moreover, when there is no substrate of the corresponding model, data setting or correction of mismeasurements cannot be performed in a timely manner, resulting in inaccurate measurement data or no measurement data, affecting the yield of the liquid crystal display panel.

[0003] Therefore, the existing CDTP measuring machine has the technical problem of low measurement efficiency caused by the need to stop the device for correcting mismeasurements. Summary of the Invention

[0004] Embodiments of the present application provide a method for calibrating a measuring device and a device for calibrating a measuring device, so as to alleviate the technical problem of low measurement efficiency caused by the need to stop the device for correcting mismeasurements in the existing CDTP measuring machine.

[0005] Embodiments of the present application provide a method for calibrating a measuring device, and the method for calibrating a measuring device includes:

[0006] Obtaining initial data corresponding to the measuring device;

[0007] Determining actual measurement data corresponding to the measuring device according to the initial data, and determining actual image information according to the actual measurement data;

[0008] Determining initial boundary information corresponding to the measuring device according to the actual image information and the image size corresponding to the measuring device;

[0009] Comparing the initial boundary information with the theoretical boundary information of the substrate to be measured, and when the initial boundary information is different from the theoretical boundary information, adjusting the initial boundary information to obtain calibrated boundary information;

[0010] Calibrating the measuring device according to the calibrated boundary information.

[0011] In some embodiments, the step of obtaining initial data corresponding to the measuring device includes:

[0012] Obtain the data loading method corresponding to the measuring device;

[0013] Determine the loading file corresponding to the measuring device according to the data loading method;

[0014] Analyze the loading file to determine the initial data corresponding to the measuring device.

[0015] In some embodiments, the step of analyzing the loading file to determine the initial data corresponding to the measuring device includes:

[0016] Analyze the loading file to determine each measured parameter of each item to be measured in the measuring device;

[0017] Output each measured parameter to a table according to the name of each item to be measured to obtain the initial data corresponding to the measuring device.

[0018] In some embodiments, the initial data includes the coordinates of the first point, the coordinates of the second point, and the angle of the measurement box. The step of determining the actual measurement data corresponding to the measuring device according to the initial data and determining the actual image information according to the actual measurement data includes:

[0019] Determine the coordinates of the third point and the coordinates of the fourth point of the measurement box according to the coordinates of the first point and the coordinates of the second point of the measurement box;

[0020] Determine the actual measurement data corresponding to the measuring device according to the coordinates of the first point, the coordinates of the second point, the coordinates of the third point, the coordinates of the fourth point, and the angle of the measurement box;

[0021] Determine the actual image information according to the actual measurement data.

[0022] In some embodiments, the step of determining the initial boundary information corresponding to the measuring device according to the actual image information and the image size corresponding to the measuring device includes:

[0023] Annotate the actual image information according to the image size corresponding to the measuring device;

[0024] Determine the initial boundary information corresponding to the measuring device according to the annotation information of the actual image information.

[0025] In some embodiments, the step of comparing the initial boundary information with the theoretical boundary information of the substrate to be measured and adjusting the initial boundary information to obtain the corrected boundary information when the initial boundary information is different from the theoretical boundary information includes:

[0026] Display the image corresponding to the initial boundary information and the image of the theoretical boundary information of the substrate to be measured in a visualization chart, and check whether the image corresponding to the initial boundary information is the same as the image of the theoretical boundary information of the substrate to be measured;

[0027] When the image corresponding to the initial boundary information is different from the image of the theoretical boundary information of the substrate to be measured, adjust the initial boundary information to obtain corrected boundary information.

[0028] In some embodiments, the step of adjusting the initial boundary information to obtain corrected boundary information when the image corresponding to the initial boundary information is different from the image of the theoretical boundary information of the substrate to be measured includes:

[0029] When the image corresponding to the initial boundary information is different from the image of the theoretical boundary information of the substrate to be measured, determine the annotation information of the image corresponding to the theoretical boundary information of the substrate to be measured;

[0030] Adjust the initial boundary information to obtain corrected boundary information according to the annotation information of the image corresponding to the theoretical boundary information of the substrate to be measured.

[0031] In some embodiments, the step of comparing the initial boundary information with the theoretical boundary information of the substrate to be measured and adjusting the initial boundary information to obtain corrected boundary information when the initial boundary information is different from the theoretical boundary information further includes:

[0032] Obtain the new boundary information of the new item;

[0033] Compare the new boundary information of the new item with the theoretical boundary information of the substrate to be measured, and adjust the new boundary information to obtain corrected boundary information when the new boundary information is different from the theoretical boundary information.

[0034] In some embodiments, the step of correcting the measuring device according to the corrected boundary information includes:

[0035] Obtain the conventional parameter information;

[0036] Correct the measuring device according to the corrected boundary information and the conventional parameter information.

[0037] Meanwhile, an embodiment of the present application provides a measuring device calibration device, and the measuring device calibration device includes:

[0038] An acquisition module, configured to acquire initial data corresponding to the measuring device;

[0039] A first determination module, which determines the actual measurement data corresponding to the measuring device according to the initial data, and determines the actual image information according to the actual measurement data;

[0040] A second determination module, configured to determine initial boundary information corresponding to the measuring device according to the actual image information and the image size corresponding to the measuring device;

[0041] An adjustment module, configured to compare the initial boundary information with the theoretical boundary information of the substrate to be measured, and when the initial boundary information is different from the theoretical boundary information, adjust the initial boundary information to obtain corrected boundary information;

[0042] A correction module, configured to correct the measuring device according to the corrected boundary information.

[0043] Beneficial effects: The present application provides a method for calibrating a measuring device and a device for calibrating a measuring device; the method for calibrating a measuring device obtains initial data corresponding to the measuring device, then determines actual measurement data corresponding to the measuring device according to the initial data, determines actual image information according to the actual measurement data, determines initial boundary information corresponding to the measuring device according to the actual image information and the image size corresponding to the measuring device, then compares the initial boundary information with the theoretical boundary information of the substrate to be measured, and when the initial boundary information is different from the theoretical boundary information, adjusts the initial boundary information to obtain corrected boundary information, and corrects the measuring device according to the corrected boundary information. The present application obtains initial data corresponding to the measuring device, determines actual image information corresponding to the measuring device according to the initial data, and then determines initial boundary information according to the actual image information and the image size corresponding to the measuring device, so that the boundary of the measuring device during measurement can be determined through the initial data, then the initial boundary information and the theoretical boundary information are compared, and when the initial boundary information is different from the theoretical boundary information, the initial boundary information is adjusted to obtain corrected boundary information, and the measuring device is calibrated using the corrected boundary information. Since this process is achieved through data comparison, image comparison, and data correction, there is no need to operate on the measuring device, so there is no need to stop the measuring device, improving the measurement efficiency, and there is no need for personnel operation, improving the accuracy of mismeasurement correction. Description of the Drawings

[0044] The following will make the technical solutions and other beneficial effects of the present application obvious by describing the specific embodiments of the present application in detail in conjunction with the drawings.

[0045] Figure 1 It is a flowchart of the method for calibrating a measuring device provided by an embodiment of the present application.

[0046] Figure 2 It is the first interface diagram corresponding to the method for calibrating a measuring device provided by an embodiment of the present application.

[0047] Figure 3 It is a schematic diagram of actual measurement data corresponding to the method for calibrating a measuring device provided by an embodiment of the present application.

[0048] Figure 4 This is the second interface diagram corresponding to the measurement device calibration method provided in the embodiments of the present application.

[0049] Figure 5 This is a schematic diagram of the measurement device calibration apparatus provided in the embodiments of the present application. Detailed implementation manners

[0050] Next, the technical solutions in the embodiments of the present application will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments of the present application, all other embodiments obtained by those skilled in the art without creative efforts shall fall within the protection scope of the present application.

[0051] In the description of the present application, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc. indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus cannot be understood as a limitation to the present application. In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include one or more of the described features. In the description of the present application, "a plurality" means two or more unless otherwise specifically defined.

[0052] In the description of the present application, it should be noted that unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or an integral connection; it may be a mechanical connection, an electrical connection, or a communication connection with each other; it may be directly connected, or indirectly connected through an intermediate medium, and it may be the internal communication of two elements or the interaction relationship between two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to specific situations.

[0053] In this application, unless otherwise clearly specified and defined, the first feature being "on" or "under" the second feature may include the direct contact between the first and second features, or may include the case where the first and second features are not in direct contact but in contact through additional features therebetween. Moreover, the first feature being "above", "over" and "on top of" the second feature includes that the first feature is directly above and obliquely above the second feature, or simply means that the horizontal height of the first feature is higher than that of the second feature. The first feature being "under", "below" and "beneath" the second feature includes that the first feature is directly below and obliquely below the second feature, or simply means that the horizontal height of the first feature is lower than that of the second feature.

[0054] The following disclosure provides many different embodiments or examples for implementing different structures of this application. To simplify the disclosure of this application, components and settings of specific examples are described below. Of course, they are only examples and are not intended to limit this application. In addition, this application may repeat reference numerals and / or reference letters in different examples. Such repetition is for the purpose of simplification and clarity, and in itself does not indicate the relationship between various embodiments and / or settings discussed. In addition, this application provides examples of various specific processes and materials, but those of ordinary skill in the art can be aware of the application of other processes and / or the use of other materials.

[0055] The embodiment of this application aims at the technical problem that the existing CDTP measuring machine has low measuring efficiency due to the need to stop the device to correct mismeasurements, and provides a measuring device calibration method and a measuring device calibration device to alleviate the above technical problems.

[0056] As Figure 1 shown, the embodiment of this application provides a measuring device calibration method, and the measuring device calibration method includes:

[0057] S1, obtaining initial data corresponding to the measuring device.

[0058] Specifically, the measuring device refers to a device for measuring parameters of a substrate to be measured, and the measuring device includes a CDTP measuring machine.

[0059] Specifically, the initial data refers to data for determining the sampling boundary and direction of the measuring device. When the measuring device measures the parameters of the substrate to be measured, the sampling boundary and direction will be determined through the initial data, so as to measure the parameters of the substrate to be measured.

[0060] In one embodiment, the step of obtaining the initial data corresponding to the measurement device includes: obtaining the data loading method corresponding to the measurement device; determining the loading file corresponding to the measurement device according to the data loading method; and parsing the loading file to determine the initial data corresponding to the measurement device. By obtaining the data loading method corresponding to the measurement device, the loading file can be determined according to the data loading method, and the initial data in the loading file can be parsed, so that the boundary and direction corresponding to the measurement device can be determined based on the initial data, and the substrate to be measured can be measured.

[0061] Specifically, when loading data into the measurement device, different data loading methods will be adopted according to different requirements. Therefore, the data loading method can be determined in advance, and the initial data can be determined according to the data loading method.

[0062] Specifically, for example, the data loading methods include T Mode and G Mode. Using T Mode for data loading can make the file relatively concise, which is convenient for viewing, searching, modifying, and correcting the file. Using G Mode for data loading can more accurately determine the parameters of the substrate to be measured.

[0063] Specifically, when the data loading method is T Mode, the loading file includes a Mac file and a Data file. Among them, the Mac file includes measurement brightness, alignment method, graphic call, and the link to the used Data file; the Data file includes measurement items, measurement coordinates, measurement parameters, and login mode, and then the loading file is parsed to obtain the initial data.

[0064] Specifically, when the data loading method is G Mode, the loading file includes an Mb file and a Gmac file. The Mb file includes measurement coordinates, head direction, and the link path of Gmac. The Gmac file includes measurement brightness, alignment method, login mode, measurement items, and parameters, and then the loading file is parsed to obtain the initial data.

[0065] In one embodiment, the step of parsing the loading file to determine the initial data corresponding to the measurement device includes: parsing the loading file to determine the measured parameters of each item to be measured in the measurement device; and outputting the measured parameters to a table according to the names of the items to be measured, to obtain the initial data corresponding to the measurement device. By parsing the loading file, the measured parameters of each item to be measured can be obtained, so that the initial data can be obtained based on the names and data of the measured parameters, for calibrating the measurement process of the measurement device.

[0066] Specifically, from Figure 2As can be seen, in the image 26 of the substrate to be measured selected, the line width L1 and the line pitch L2 are measured respectively by the first measurement box 261 and the second measurement box 262. The initial coordinates are the coordinates and angles of two points of each measurement box, and the data of each measurement box can be recorded in a table.

[0067] Specifically, as Figure 2 shown, after determining the measuring device through the first button 28 on the interface 2 and determining to load a file through the second button 23, according to the parameters to be measured of each item to be measured in the loaded file, they can be input into the table according to the names of each item to be measured. As Figure 2 shown, label 211 indicates that this column is the item name, label 212 indicates that this column is the x coordinate, label 213 indicates that this column is the y coordinate, label 214 indicates that this column is the distance in the x direction between two points, label 215 indicates that this column is the distance in the y direction between two points, and label 216 indicates the angle; for each item to be measured, it includes two columns. The first column from left to right is respectively "the distance in the x direction between two points", "the distance in the y direction between two points", "the angle", and the second column is the specific value, so that the initial data can be obtained, and each measurement box can be represented by lines of different colors for easy viewing. Since this application is shown in black and white, the colors of different measurement boxes are not shown.

[0068] S2. According to the initial data, determine the actual measurement data corresponding to the measuring device, and determine the actual image information according to the actual measurement data.

[0069] Specifically, since the initial data only includes partial data, it is necessary to determine the actual measurement data and obtain the actual image information according to the actual measurement data, so that it can be checked whether the measurement is accurate and corrected when the measurement goes wrong.

[0070] In one embodiment, the initial data includes the coordinates of the first point, the coordinates of the second point and the angle of the measurement box. The step of determining the actual measurement data corresponding to the measuring device according to the initial data and determining the actual image information according to the actual measurement data includes: determining the coordinates of the third point and the fourth point of the measurement box according to the coordinates of the first point and the coordinates of the second point of the measurement box; determining the actual measurement data corresponding to the measuring device according to the coordinates of the first point, the coordinates of the second point, the coordinates of the third point, the coordinates of the fourth point and the angle of the measurement box; determining the actual image information according to the actual measurement data. By determining the coordinates of each point of the measurement box and determining the angle of the measurement box, the actual measurement data can be determined according to the coordinates and angle of each point, and the actual image information can be determined on the interface, so that it can be checked whether the measurement is accurate and corrected when the measurement goes wrong.

[0071] Specifically, as Figure 3 shown, taking the first measurement box 261 as an example, the initial data includes the coordinates of point A (x1, y1), the coordinates of point B (x3, y3), and the angle o of the first measurement box 261. Then, the coordinates of point C and point D can be determined based on the coordinates of point A, the coordinates of point B, and the angle o. Specifically, a = ((x3 - x1) - (y3 - y1) / tan(radians(o))) * sin(radians(o)) * sin(radians(o)), b = ((x3 - x1) - (y3 - y1) / tan(radians(o))) * sin(radians(o)) * cos(radians(o)), the abscissa x2 of point C = x1 - a, the ordinate y2 of point C = y1 + b, the abscissa x4 of point D = x3 + a, the ordinate y4 of point D = y3 - b; or the abscissa x2 of point C = x1 - a, the ordinate y2 of point C = y1 - b, the abscissa x4 of point D = x3 + a, the ordinate y4 of point D = y3 + b; thus, the actual measurement data is obtained, and then the actual image information is determined based on the actual measurement data.

[0072] Specifically, it can be seen that the first measurement box has two sets of different actual measurement data. Therefore, it is necessary to determine the correct boundary information through the actual image information, so as to correct the measurement device.

[0073] S3. Determine the initial boundary information corresponding to the measurement device according to the actual image information and the image size corresponding to the measurement device.

[0074] Specifically, the image size corresponding to each measurement device means that the measurement device can output images with different magnifications. Therefore, the images can be standardized according to the image sizes with different magnifications, so that the initial boundary information corresponding to the measurement device can be intuitively determined, and whether the initial boundary information is accurate can be judged for correction.

[0075] In one embodiment, the step of determining the initial boundary information corresponding to the measurement device according to the actual image information and the image size corresponding to the measurement device includes: annotating the actual image information according to the image size corresponding to the measurement device; determining the initial boundary information corresponding to the measurement device according to the annotation information of the actual image information. By annotating the actual image information to determine the initial boundary information corresponding to the measurement device, it can be determined whether the measurement device has mismeasurement according to the initial boundary information, so that the measurement device can be corrected.

[0076] Specifically, as Figure 3 shown, the image 26 of the substrate to be measured can be magnified by clicking the third button 27, so as to facilitate the intuitive viewing of the measurement box.

[0077] Specifically, as Figure 4 shown, the image 26 of the substrate to be measured is magnified according to the magnification of the measuring device, and the maximum-sized image is marked with an x-y coordinate axis. The first measurement box 261 can be visually viewed, and the boundary information of the first measurement box 261 can be obtained, thereby obtaining the initial boundary information corresponding to the measuring device.

[0078] S4. Compare the initial boundary information with the theoretical boundary information of the substrate to be measured, and when the initial boundary information is different from the theoretical boundary information, adjust the initial boundary information to obtain corrected boundary information.

[0079] Specifically, the theoretical boundary information of the substrate to be measured refers to the boundary of the parameters to be measured of the substrate to be measured. For example, when measuring the line width of the substrate to be measured, as Figure 4 shown, the theoretical boundary information of the substrate to be measured is the boundary of the line width L1, rather than other boundaries outside the boundary of L1.

[0080] In one embodiment, the step of comparing the initial boundary information with the theoretical boundary information of the substrate to be measured and, when the initial boundary information is different from the theoretical boundary information, adjusting the initial boundary information to obtain corrected boundary information includes: displaying the image corresponding to the initial boundary information and the image of the theoretical boundary information of the substrate to be measured in a visualization chart, and checking whether the image corresponding to the initial boundary information is the same as the image corresponding to the theoretical boundary information of the substrate to be measured; when the image corresponding to the initial boundary information is different from the image corresponding to the theoretical boundary information of the substrate to be measured, adjusting the initial boundary information to obtain corrected boundary information. By displaying the image of the initial boundary information and the image of the theoretical boundary information of the substrate to be measured in a visualization chart, it is possible to visually determine whether the image corresponding to the initial boundary information is the same as the image corresponding to the theoretical boundary information of the substrate to be measured, and when the two are different, adjust the initial boundary information to obtain corrected boundary information to correct the measuring device.

[0081] Specifically, as Figure 4 shown, since the image is magnified and standardized according to the magnification corresponding to the measuring device, when the initial boundary information is the information of two boundaries outside the boundary of L1, the theoretical boundary information is the information of the boundary of L1. It can be visually seen that the initial boundary information is different from the theoretical boundary information, so it is possible to judge the initial boundary information and the theoretical boundary information, and adjust the initial boundary information to obtain corrected boundary information.

[0082] In one embodiment, when the image corresponding to the initial boundary information is different from the image corresponding to the theoretical boundary information of the substrate to be measured, the step of adjusting the initial boundary information to obtain the corrected boundary information includes: when the image corresponding to the initial boundary information is different from the image corresponding to the theoretical boundary information of the substrate to be measured, determining the annotation information of the image corresponding to the theoretical boundary information of the substrate to be measured; and adjusting the initial boundary information according to the annotation information of the image corresponding to the theoretical boundary information of the substrate to be measured to obtain the corrected boundary information. By magnifying and annotating the image, when the image corresponding to the initial boundary information is different from the image corresponding to the theoretical boundary information of the substrate to be measured, the theoretical boundary information can be annotated to obtain the corrected boundary information, and the measuring device can be calibrated.

[0083] Specifically, as Figure 4 shown, since the image is magnified by the magnification factor corresponding to the measuring device and is standardized, when the initial boundary information is the information of two boundaries outside the L1 boundary, the theoretical boundary information is the information of the L1 boundary, and the image is annotated by the x-y coordinate system, the specific data of the theoretical boundary information can be determined, and the initial boundary information can be corrected to obtain the corrected boundary information, so that the measuring device can be calibrated.

[0084] In one embodiment, the step of comparing the initial boundary information with the theoretical boundary information of the substrate to be measured and adjusting the initial boundary information to obtain the corrected boundary information when the initial boundary information is different from the theoretical boundary information further includes: obtaining the new boundary information of the new item; comparing the new boundary information of the new item with the theoretical boundary information of the substrate to be measured, and adjusting the new boundary information to obtain the corrected boundary information when the new boundary information is different from the theoretical boundary information. By obtaining the new boundary information, the new boundary information can be adjusted to obtain the corrected boundary information, which improves the measurement efficiency compared with the existing measuring device that can only be performed separately and requires shutdown for correction.

[0085] Specifically, when a project for measuring a special position needs to be added, the new boundary information of the new item can be obtained. For example, when adding information to the table in Figure 2 and then comparing the new boundary information of the added item with the theoretical boundary information of the substrate to be measured, and adjusting the new boundary information to obtain the corrected boundary information when the new boundary information is different from the theoretical boundary information, so that a file for the project of measuring the special position can be generated to measure the special position.

[0086] S5. Calibrate the measuring device according to the corrected boundary information.

[0087] Specifically, after obtaining the calibration boundary information, it can be transmitted to the measuring device to enable the measuring device to make corrections.

[0088] In one embodiment, the step of calibrating the measuring device according to the calibration boundary information includes: obtaining conventional parameter information; and calibrating the measuring device according to the calibration boundary information and the conventional parameter information. After determining the calibration boundary information and obtaining the conventional parameter information, the measuring device can be calibrated using the calibration boundary information and the conventional parameter information.

[0089] Specifically, the conventional parameter information includes but is not limited to measuring brightness and alignment method.

[0090] Specifically, as Figure 2 shown, after determining the calibration boundary information, the calibration boundary information and the conventional parameter information are written into a new file by clicking the fourth button 24 to calibrate the measuring device. The coordinate parameters are eliminated by clicking the fifth button 25 to reset the program, facilitating the calibration of the measuring device that needs to be calibrated subsequently.

[0091] The embodiment of the present application provides a method for calibrating a measuring device. The method for calibrating a measuring device obtains the initial data corresponding to the measuring device, determines the actual image information corresponding to the measuring device according to the initial data, and then determines the initial boundary information according to the actual image information and the image size corresponding to the measuring device. Then, the boundary of the measuring device during measurement can be determined through the initial data. Next, the initial boundary information and the theoretical boundary information are compared. When the initial boundary information is different from the theoretical boundary information, the initial boundary information is adjusted to obtain the calibration boundary information, and the calibration boundary information is used to calibrate the measuring device. Since this process is achieved through data comparison, image comparison, and data calibration, there is no need to operate on the measuring device, so there is no need to stop the measuring device, which improves the measurement efficiency and does not require personnel operation, improving the accuracy of mismeasurement calibration.

[0092] Meanwhile, as Figure 5 shown, the embodiment of the present application provides a measuring device calibration device, which includes:

[0093] An acquisition module 301, configured to acquire initial data corresponding to the measuring device;

[0094] A first determination module 302, which determines the actual measurement data corresponding to the measuring device according to the initial data, and determines the actual image information according to the actual measurement data;

[0095] A second determination module 303, configured to determine the initial boundary information corresponding to the measuring device according to the actual image information and the image size corresponding to the measuring device;

[0096] An adjustment module 304 is configured to compare the initial boundary information with the theoretical boundary information of the substrate to be measured, and adjust the initial boundary information to obtain corrected boundary information when the initial boundary information is different from the theoretical boundary information.

[0097] A correction module 305 is configured to correct the measuring device according to the corrected boundary information.

[0098] The measuring device calibration device provided by the embodiment of the present application can determine the boundary of the measuring device during measurement through the initial data, then compare the initial boundary information with the theoretical boundary information, and when the initial boundary information is different from the theoretical boundary information, adjust the initial boundary information to obtain the corrected boundary information, and use the corrected boundary information to correct the measuring device. Since this process is achieved through data comparison, image comparison and data correction, there is no need to operate on the measuring device, so there is no need to stop the measuring device, which improves the measurement efficiency and does not require personnel operation, improving the accuracy of mismeasurement correction.

[0099] In one embodiment, the acquisition module is configured to acquire the data loading method corresponding to the measuring device; determine the loading file corresponding to the measuring device according to the data loading method; and parse the loading file to determine the initial data corresponding to the measuring device.

[0100] In one embodiment, the acquisition module is configured to parse the loading file to determine the measured parameters of each measured item in the measuring device; and output each measured parameter to a table according to the name of each measured item to obtain the initial data corresponding to the measuring device.

[0101] In one embodiment, the first determination module is configured to determine the coordinates of the third point and the fourth point of the measurement box according to the coordinates of the first point and the second point of the measurement box; determine the actual measurement data corresponding to the measuring device according to the coordinates of the first point, the second point, the third point, the fourth point and the angle of the measurement box; and determine the actual image information according to the actual measurement data.

[0102] In one embodiment, the second determination module is configured to label the actual image information according to the image size corresponding to the measuring device; and determine the initial boundary information corresponding to the measuring device according to the labeling information of the actual image information.

[0103] In one embodiment, the adjustment module is configured to display, in a visualization chart, an image corresponding to the initial boundary information and an image of the theoretical boundary information of the substrate to be measured, and check whether the image corresponding to the initial boundary information is the same as the image of the theoretical boundary information of the substrate to be measured; when the image corresponding to the initial boundary information is different from the image of the theoretical boundary information of the substrate to be measured, adjust the initial boundary information to obtain calibrated boundary information.

[0104] In one embodiment, when the image corresponding to the initial boundary information is different from the image of the theoretical boundary information of the substrate to be measured, the adjustment module is configured to determine annotation information of the image corresponding to the theoretical boundary information of the substrate to be measured; and adjust the initial boundary information according to the annotation information of the image corresponding to the theoretical boundary information of the substrate to be measured to obtain calibrated boundary information.

[0105] In one embodiment, the adjustment module is configured to obtain additional boundary information of an additional item; compare the additional boundary information of the additional item with the theoretical boundary information of the substrate to be measured, and when the additional boundary information is different from the theoretical boundary information, adjust the additional boundary information to obtain calibrated boundary information.

[0106] In one embodiment, the calibration module is configured to obtain conventional parameter information; and calibrate the measuring device according to the calibrated boundary information and the conventional parameter information.

[0107] Meanwhile, an embodiment of the present application further provides an electronic device, which includes a memory, a processor, and a computer program stored on the memory and running on the processor. Wherein, when the processor executes the program, the steps in the above-mentioned measuring device calibration method are implemented.

[0108] Meanwhile, an embodiment of the present application further provides a computer-readable storage medium, in which multiple instructions are stored. The instructions are suitable for being loaded by a processor to execute the steps in the above-mentioned measuring device calibration method.

[0109] According to the above embodiments, it can be known that:

[0110] An embodiment of the present application provides a method for calibrating a measuring device and a device for calibrating a measuring device. The method for calibrating the measuring device obtains initial data corresponding to the measuring device, then determines actual measurement data corresponding to the measuring device according to the initial data, determines actual image information according to the actual measurement data, determines initial boundary information corresponding to the measuring device according to the actual image information and the image size corresponding to the measuring device, then compares the initial boundary information with the theoretical boundary information of the substrate to be measured, and when the initial boundary information is different from the theoretical boundary information, adjusts the initial boundary information to obtain calibrated boundary information, and calibrates the measuring device according to the calibrated boundary information. The present application obtains the initial data corresponding to the measuring device, determines the actual image information corresponding to the measuring device according to the initial data, and then determines the initial boundary information according to the actual image information and the image size corresponding to the measuring device, so that the boundary of the measuring device during measurement can be determined through the initial data, then the initial boundary information and the theoretical boundary information are compared, and when the initial boundary information is different from the theoretical boundary information, the initial boundary information is adjusted to obtain calibrated boundary information, and the measuring device is calibrated using the calibrated boundary information. Since this process is achieved through data comparison, image comparison, and data calibration, no operation needs to be performed on the measuring device, so there is no need to stop the measuring device, improving the measurement efficiency, and no human operation is required, improving the accuracy of mismeasurement calibration.

[0111] In the above embodiments, the descriptions of the respective embodiments have their own emphases. For parts not detailed in a certain embodiment, reference may be made to the relevant descriptions of other embodiments.

[0112] The above has introduced in detail a method for calibrating a measuring device and a device for calibrating a measuring device provided by the embodiments of the present application. Specific examples are used herein to elaborate on the principle and implementation manner of the present application. The description of the above embodiments is only used to help understand the technical solution and its core idea of the present application. Those of ordinary skill in the art should understand that they can still modify the technical solutions recorded in the foregoing embodiments, or perform equivalent replacements on some of the technical features. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A method for calibrating a measuring device, characterized in that, Including: Obtain the initial data corresponding to the measuring device; According to the initial data, determine the actual measurement data corresponding to the measuring device, and determine the actual image information according to the actual measurement data; According to the actual image information and the image size corresponding to the measuring device, determine the initial boundary information corresponding to the measuring device; Compare the initial boundary information with the theoretical boundary information of the substrate to be measured, and when the initial boundary information is different from the theoretical boundary information, adjust the initial boundary information to obtain the corrected boundary information; Correct the measuring device according to the corrected boundary information; Wherein, the initial data includes the coordinates of the first point, the coordinates of the second point and the angle of the measurement box. The step of determining the actual measurement data corresponding to the measuring device according to the initial data and determining the actual image information according to the actual measurement data includes: determining the coordinates of the third point and the fourth point of the measurement box according to the coordinates of the first point and the coordinates of the second point of the measurement box; determining the actual measurement data corresponding to the measuring device according to the coordinates of the first point, the coordinates of the second point, the coordinates of the third point, the coordinates of the fourth point and the angle of the measurement box; determining the actual image information according to the actual measurement data.

2. The calibration method of the measuring device according to claim 1, wherein The step of obtaining the initial data corresponding to the measuring device includes: Obtain the data loading method corresponding to the measuring device; According to the data loading method, determine the loading file corresponding to the measuring device; Analyze the loading file to determine the initial data corresponding to the measuring device.

3. The calibration method of the measuring device according to claim 2, wherein The step of analyzing the loading file to determine the initial data corresponding to the measuring device includes: Analyze the loading file to determine the measured parameters of each item to be measured in the measuring device; According to the names of the items to be measured, output the measured parameters into a table to obtain the initial data corresponding to the measuring device.

4. The calibration method of the measuring device according to claim 1, characterized in that, The step of determining the initial boundary information corresponding to the measuring device according to the actual image information and the image size corresponding to the measuring device includes: Label the actual image information according to the image size corresponding to the measuring device; Determine the initial boundary information corresponding to the measuring device according to the labeling information of the actual image information.

5. The calibration method of the measuring device according to claim 1, characterized in that, The step of comparing the initial boundary information with the theoretical boundary information of the substrate to be measured and adjusting the initial boundary information to obtain the corrected boundary information when the initial boundary information is different from the theoretical boundary information includes: Display the image corresponding to the initial boundary information and the image of the theoretical boundary information of the substrate to be measured in a visualization chart, and check whether the image corresponding to the initial boundary information is the same as the image corresponding to the theoretical boundary information of the substrate to be measured; When the image corresponding to the initial boundary information is different from the image corresponding to the theoretical boundary information of the substrate to be measured, adjust the initial boundary information to obtain the corrected boundary information.

6. The calibration method of the measuring device according to claim 5, characterized in that, The step of adjusting the initial boundary information to obtain the corrected boundary information when the image corresponding to the initial boundary information is different from the image corresponding to the theoretical boundary information of the substrate to be measured includes: When the image corresponding to the initial boundary information is different from the image corresponding to the theoretical boundary information of the substrate to be measured, determine the annotation information of the image corresponding to the theoretical boundary information of the substrate to be measured; Adjust the initial boundary information according to the annotation information of the image corresponding to the theoretical boundary information of the substrate to be measured to obtain corrected boundary information.

7. The calibration method of the measuring device according to claim 1, characterized in that, The step of comparing the initial boundary information with the theoretical boundary information of the substrate to be measured and adjusting the initial boundary information to obtain corrected boundary information when the initial boundary information is different from the theoretical boundary information further includes: Obtain the new boundary information of the new item; Compare the new boundary information of the new item with the theoretical boundary information of the substrate to be measured, and adjust the new boundary information to obtain corrected boundary information when the new boundary information is different from the theoretical boundary information.

8. The calibration method of the measuring device according to claim 1, characterized in that The step of correcting the measuring device according to the corrected boundary information includes: Obtain the conventional parameter information; Correct the measuring device according to the corrected boundary information and the conventional parameter information.

9. A calibration device for a measuring device, characterized in that It includes: An acquisition module for acquiring the initial data corresponding to the measuring device; The initial data includes the coordinates of the first point, the coordinates of the second point and the angle of the measuring box; A first determination module for determining the coordinates of the third point and the coordinates of the fourth point of the measuring box according to the coordinates of the first point and the coordinates of the second point of the measuring box; determining the actual measurement data corresponding to the measuring device according to the coordinates of the first point, the coordinates of the second point, the coordinates of the third point, the coordinates of the fourth point and the angle of the measuring box; Determine the actual image information according to the actual measurement data; A second determination module for determining the initial boundary information corresponding to the measuring device according to the actual image information and the image size corresponding to the measuring device; An adjustment module for comparing the initial boundary information with the theoretical boundary information of the substrate to be measured and adjusting the initial boundary information to obtain corrected boundary information when the initial boundary information is different from the theoretical boundary information; A correction module for correcting the measuring device according to the corrected boundary information.

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