Single-ended central excitation cubic electromagnetic drive device with combined guidance and driving

Abstract

The present invention relates to the field of vibration measurement technology, and in particular to a single-end central excitation cubic electromagnetic drive device with combined guidance and driving, comprising an electromagnetic drive component and a moving component; the electromagnetic drive component comprises a lower magnetic yoke in a square barrel shape, an upper magnetic yoke in a U-shaped shape arranged on the upper side of the lower magnetic yoke, a cubic permanent magnet arranged on the upper side of the lower magnetic yoke, and a cubic central magnetic yoke arranged on the upper side of the permanent magnet; the inner sides of the lower magnetic yoke and the upper magnetic yoke are surrounded by the permanent magnet and the central magnetic yoke to form a moving cavity; an air gap is arranged between the upper magnetic yoke and the central magnetic yoke; the moving component comprises a work surface located on the upper side of the central magnetic yoke, a coil frame is arranged on one side of the work surface close to the central magnetic yoke, and the coil frame is slidably sleeved on the outer side of the central magnetic yoke; the outer wall of the coil frame is wound with a DC coil and an excitation coil. The above scheme reduces the difficulty of assembling the moving component, reduces the dead weight of the moving component, and effectively improves the assembly accuracy and driving ability of the electromagnetic drive device.

Description

Technical Field

[0001] The invention belongs to the technical field of vibration measurement, and mainly relates to a single-end central excitation cubic electromagnetic driving device with combined guidance and driving. Background Art

[0002] The electromagnetic drive device is the core component of the electromagnetic vibration table, voice coil motor and other equipment. Traditionally, the electromagnetic drive device with separate drive and guide mechanisms has large assembly errors, which will increase the distortion of the electromagnetic drive waveform and the lateral vibration ratio. The separated drive and guide mechanisms enlarge the size of the moving parts, increase their mass, weaken the electromagnetic drive capability, and are not conducive to the miniaturization of the equipment. Therefore, the high assembly accuracy of the electromagnetic drive device and the light mass of the moving parts are the main methods to improve its performance.

[0003] Patent No. CN201510235646.2 discloses a rectangular open magnetic field low-frequency vibration calibration table with symmetrical excitation at both ends of a double magnetic circuit. A rectangular open magnetic field magnetic circuit structure is proposed, in which two permanent magnets are symmetrically installed at both ends of a central magnetic yoke with their magnetic poles arranged opposite to each other, and two symmetrical closed magnetic circuits are formed through the magnetic yoke to generate a highly uniform strong magnetic field distribution in the air gap. After the working coil is energized, it is acted upon by the Lorentz force in the magnetic field to generate a precisely controllable electromagnetic driving force. The surface of the magnetic yoke adjacent to the air gap is provided with an array microstructure in the form of deep grooves to effectively suppress eddy current losses, and static pressure air floating guide technology is used to ensure motion guide accuracy.

[0004] Patent No. CN201811332560.1 discloses a vibration table. It generates a magnetic field through a magnetic circuit device, and fixes an air bearing on the periphery of the dynamic coil frame to reduce lateral disturbances. The DC coil and the excitation coil are radially wound around the outer peripheral wall of the dynamic coil frame. The DC coil is located in the linear magnetic field area. The DC excitation is used to position the dynamic coil at a position where the DC Ampere force is equal to its gravity to offset the gravity and determine the zero position. The excitation coil is located in the uniform magnetic field area and is excited by AC to generate standard vibration.

[0005] The salient features of the above technical solution are: the separated guide device and drive structure require that the axial direction of the electromagnetic drive structure and the guide device be parallel during the assembly process, which makes assembly difficult; the guide device and the drive structure are respectively located at different positions of the electromagnetic drive device, which increases the size and mass of the moving parts and seriously restricts its electromagnetic drive capability; and patent CN201811332560.1 places the DC coil in an approximately linear magnetic field region, and its nonlinearity will reduce the accuracy of the vibration waveform.

[0006] In summary, through the structural and principle innovation of the electromagnetic vibration calibration platform, a single-ended centrally excited cubic electromagnetic driving device with combined guidance and driving is provided. Summary of the invention

[0007] 1. Technical issues to be resolved

[0008] In view of the shortcomings of the prior art, the present invention provides a single-ended centrally excited cubic electromagnetic drive device with combined guidance and drive, which effectively reduces the assembly difficulty and deadweight of moving parts and improves the assembly accuracy and driving capability of such devices.

[0009] (II) Technical solution

[0010] To achieve the above-mentioned purpose, the embodiment of the present application provides a single-ended central excitation cubic electromagnetic drive device with combined guidance and driving, including an electromagnetic drive component and a moving component; the electromagnetic drive component includes a lower magnetic yoke in a square barrel shape, an upper magnetic yoke in a U-shaped shape arranged on the upper side of the lower magnetic yoke, a cubic permanent magnet arranged on the upper side of the lower magnetic yoke, and a cubic center magnetic yoke arranged on the upper side of the permanent magnet; the inner sides of the lower magnetic yoke and the upper magnetic yoke are surrounded by the permanent magnet and the center magnetic yoke to form a moving cavity; the upper magnetic yoke and the An air gap is arranged between the central magnetic yokes; the moving part comprises a working table located on the upper side of the central magnetic yoke, a coil frame is arranged on a side of the working table close to the central magnetic yoke, the coil frame is in a U-shape, and is slidably sleeved on the outer side of the central magnetic yoke; a DC coil and an excitation coil are wound around the outer wall of the coil frame, a fixed DC current is passed through the DC coil to generate an Ampere force opposite to the gravity direction of the moving part; a controllable driving current is passed through the excitation coil to generate an electromagnetic driving force.

[0011] Preferably, a static pressure air floating structure is provided on the coil frame, and the static pressure air floating structure controls the formation of a static pressure air film between the coil frame and the central magnetic yoke.

[0012] Preferably, the static pressure air flotation structure includes an air path opened in the coil frame, and the air path includes four vertical air paths opened at the junctions of the coil frame walls and transverse air paths opened along the four coil frame walls, which are connected to each other; the air outlet is connected to the air path, and the air outlet is evenly distributed on the inner surface of the coil frame; an air inlet is opened on the outer surface of the coil frame away from the center magnetic yoke, and the air inlet is connected to the air path, and the air inlet is connected to an air supply source.

[0013] Preferably, the central axes of the lower magnetic yoke, the upper magnetic yoke, the permanent magnet and the center magnetic yoke are in a straight line; and the permanent magnet is located at the center of the lower magnetic yoke.

[0014] Preferably, a yoke fixing hole is provided on the upper yoke; the lower side surface of the upper yoke is detachably connected to the lower yoke; a mounting bracket for fixing the permanent magnet and the center yoke is provided in the motion cavity; the mounting bracket is in the shape of a Chinese umbilical cord, and a mounting platform in the shape of a Chinese umbilical cord and a first mounting hole are provided on the mounting bracket, and a second mounting hole is provided on the mounting bracket and on the side surface of the mounting bracket; the lower end of the inner side wall of the mounting bracket abuts against the permanent magnet, and the upper end of the inner side wall of the mounting bracket abuts against the center yoke, the lower side surface of the mounting bracket is detachably connected to the lower yoke, and the upper end of the inner side surface of the mounting bracket is detachably connected to the center yoke; the mounting bracket covers the permanent magnet.

[0015] Preferably, a sliding guide rail or a rolling guide rail is provided between the coil frame and the central magnetic yoke.

[0016] Preferably, the permanent magnet includes one permanent magnet or a plurality of permanent magnets bonded to each other.

[0017] Preferably, the DC coil and the excitation coil are located in the air gap and in a region where the magnetic field is uniformly distributed; the DC coil and the excitation coil can be connected to each other.

[0018] Preferably, the fixed-size direct current is calculated by the following formula: DC =mg / (BL); in the formula, I DC is the magnitude of the DC current passed through the DC coil, m is the total mass of the moving parts and related components fixed on the work surface, g is the acceleration of gravity, B is the average magnetic induction intensity distributed in the air gap, and L is the length of the DC coil.

[0019] (III) Beneficial effects

[0020] The present invention provides a single-ended centrally excited cubic electromagnetic drive device with combined guidance and driving. By arranging a lower yoke, an upper yoke, a permanent magnet, a central yoke and a mounting frame, the lower yoke, the upper yoke, the permanent magnet and the central yoke can be quickly installed on a coaxial line. At the same time, the integrated design of the static pressure air floating structure and the central yoke reduces the difficulty of assembling moving parts to the greatest extent, reduces the dead weight of the moving parts, and can effectively improve the assembly accuracy and driving ability of the electromagnetic drive device. In addition, the DC coil is located in an area with uniform magnetic field distribution, thereby avoiding the introduction of interference.

[0021] The specific beneficial effects are as follows:

[0022] (1) The magnetic circuit structure of the permanent magnet single-end center excitation adopted by the present invention can produce a more uniformly distributed magnetic induction intensity in the air gap, and the air gap edge effect has little influence, which is suitable for occasions with high requirements for motion accuracy. Since the permanent magnet is inside the magnetic circuit structure, the leakage flux generated on the work surface is small, and the impact on the sensor installed on the table is small. The use of axially magnetized cubic permanent magnets is easy to manufacture and has low production costs. The cubic yoke is easy to manufacture, which is conducive to improving processing accuracy and reducing production costs.

[0023] (2) The coil frame proposed in the present invention is in the shape of a U-shaped letter "U", and the central magnetic yoke constituting the guide shaft is in the shape of a cube. After ventilation, a static pressure air film will be generated between the four inner surfaces of the coil frame and the corresponding side surfaces of the central magnetic yoke, that is, it has a restraining force in four directions, which can greatly reduce lateral vibration.

[0024] (3) The channel-type air path opened in the coil frame of the present invention is easier to process than the cavity-type air chamber. Usually, the wall thickness of the coil frame is small, and it is easier to open the channel-type air path by punching.

[0025] (4) The present invention realizes a high assembly precision design of integrated guidance and drive by processing the central magnetic yoke into a guide shaft and manufacturing the coil frame into a sliding mechanism, thereby improving the motion precision of the electromagnetic drive device. The moving part is mounted on the central magnetic yoke as a sliding mechanism, and the guidance and drive are integrated through a static pressure air floating structure, a sliding guide rail structure or a rolling guide rail structure, ensuring that the axial direction of the moving part and the electromagnetic drive structure are completely parallel, achieving high assembly precision, and effectively reducing the lateral vibration ratio and waveform distortion of the electromagnetic drive device.

[0026] (5) The present invention realizes the light weight of the moving parts of the electromagnetic drive device, which can enhance its load capacity. The electromagnetic drive device with integrated guidance and drive has a more compact structure and a smaller device, which is conducive to the installation and transportation of the equipment. The small size of the moving parts can achieve the light weight of the moving parts in the structure, effectively improving the load capacity of the electromagnetic drive device.

[0027] (6) The present invention can avoid the problem that the DC coil is subjected to nonlinear electromagnetic force in the approximate linear region of the air gap, thereby increasing the problem of vibration harmonic distortion. The DC coil is placed in the uniform distribution area of ​​the air gap magnetic field, and a fixed amount of DC current is passed through the DC coil so that the DC coil is subjected to an Ampere force equal to the gravity of the moving part, thereby avoiding the DC coil from causing harmonic interference to the vibration due to the nonlinear electromagnetic force. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 A schematic diagram of the structure of a single-ended centrally excited cubic electromagnetic drive device that combines guidance and driving;

[0029] Figure 2A cross-sectional view of a single-ended centrally excited cubic electromagnetic drive device that is a combination of guidance and driving;

[0030] Figure 3 A cross-sectional view of a protruding mounting frame in a single-ended centrally excited cubic electromagnetic drive device that is a combination of guiding and driving;

[0031] Figure 4 A schematic diagram of a protruding mounting frame in a single-ended centrally excited cubic electromagnetic drive device that is a combination of guiding and driving;

[0032] Figure 5 A schematic diagram of the magnetic pole distribution and magnetic circuit in a single-ended centrally excited cubic electromagnetic drive device that combines guidance and driving;

[0033] Figure 6 A cross-sectional view of a protruding moving part in a single-ended centrally excited cubic electromagnetic drive device that is a combination of guiding and driving;

[0034] Figure 7 A schematic diagram of a protruding static pressure air-floating structure in a single-end centrally excited cubic electromagnetic drive device that is a combination of guidance and driving;

[0035] Figure 8 Schematic diagram of the position of the protruding air inlet hole in a single-ended centrally excited cubic electromagnetic drive device that combines guidance and driving.

[0036] Markings in the accompanying drawings:

[0037] 100, electromagnetic drive component; 110, lower magnetic yoke; 120, permanent magnet; 130, upper magnetic yoke; 130a, magnetic yoke fixing hole; 140, motion cavity; 150, center magnetic yoke; 160, air gap; 170, mounting frame; 170a, mounting platform; 170b, first mounting hole; 170c, second mounting hole;

[0038] 200, moving parts; 210, work surface; 220, coil frame; 230, DC coil; 240, excitation coil; 250, static pressure air floating structure; 251, air path; 252, air outlet; 253, air inlet. DETAILED DESCRIPTION

[0039] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0040] Example

[0041] The present invention provides a single-ended central excitation cubic electromagnetic drive device with combined guidance and driving, see Figure 1-Figure 8 , including an electromagnetic driving component 100 and a moving component 200.

[0042] The electromagnetic drive component 100 includes a lower magnetic yoke 110 in a square barrel shape, an upper magnetic yoke 130 in a U-shaped shape disposed on the upper side of the lower magnetic yoke 110, a permanent magnet 120 in a cubic shape disposed on the upper side of the lower magnetic yoke 110, and a central magnetic yoke 150 in a cubic shape disposed on the upper side of the permanent magnet 120; the inner sides of the lower magnetic yoke 110 and the upper magnetic yoke 130 are surrounded by the permanent magnet 120 and the central magnetic yoke 150 to form a motion cavity 140; an air gap 160 is disposed between the upper magnetic yoke 130 and the central magnetic yoke 150. In this embodiment, the width of the air gap 160 is 10 mm, and a highly uniform magnetic induction intensity distribution is formed therein.

[0043] Furthermore, the lower yoke 110 , the upper yoke 130 , the permanent magnet 120 and the central yoke 150 are coaxially arranged. The lower yoke 110 , the upper yoke 130 , the permanent magnet 120 and the central yoke 150 are coaxially arranged, and the permanent magnet 120 is arranged at the center of the lower yoke 110 .

[0044] The upper yoke 130 is provided with a yoke fixing hole 130a; the lower side of the upper yoke 130 is detachably connected to the lower yoke 110; during installation, the upper yoke 130 can be connected and fixed to the lower yoke 110 by means of bolts passing through the yoke mounting hole 130a.

[0045] The moving cavity 140 is provided with a mounting frame 170 for fixing the permanent magnet 120 and the center magnetic yoke 150; the mounting frame 170 is in the shape of a Chinese character "Yu", and a mounting platform 170a and a first mounting hole 170b in the shape of a Chinese character "Yu" are provided on the mounting frame 170, and a second mounting hole 170c is provided on the mounting frame 170 and on the side of the mounting platform 170a; during installation, the mounting frame 170 can be connected and fixed to the lower magnetic yoke 110 by passing a bolt through the first mounting hole 170b, and can be connected and fixed to the center magnetic yoke 150 by passing a bolt through the second mounting hole 170c. The lower end of the inner side wall of the mounting platform 170a abuts against the permanent magnet 120, and the upper end of the inner side wall of the mounting platform 170a abuts against the center magnetic yoke 150, the lower side surface of the mounting frame 170 can be detachably connected to the lower magnetic yoke 110, and the upper end of the inner side surface of the mounting frame 170 can be detachably connected to the center magnetic yoke 150; the mounting frame 170 covers the permanent magnet 120. The positions of the permanent magnet 120 and the center yoke 150 can be fixed by the provided mounting bracket 170 .

[0046] It should be noted that, in this embodiment, the mounting frame 170 is made of non-magnetic conductive material, such as aluminum alloy.

[0047] The permanent magnet 120 includes one permanent magnet 120 or a plurality of permanent magnets 120 bonded to each other.

[0048] Specifically, the permanent magnet 120 can be made of a strong magnetic permanent magnet made of NdFeB, and the residual magnetic strength of the NdFeB material used is 1.17T, and the coercive force is 890kA / m. The lower yoke 110, the center yoke 150, and the upper yoke 130 are all made of high magnetic permeability electrical pure iron material DT4C, with a maximum relative magnetic permeability of 12000 and a saturation magnetic flux of 2.5T.

[0049] The path of the magnetic lines of force formed by the permanent magnet 120 excitation to form the main magnetic circuit is as follows: Figure 5 As shown, it starts from the N pole of the permanent magnet 120, passes through the lower yoke 110, the upper yoke 130, the air gap 160, the center yoke 150 in sequence, and then returns to the S pole of the permanent magnet 120 to form a closed magnetic circuit.

[0050] The material of the moving part 200 is ceramic, aluminum alloy or beryllium. The moving part 200 specifically includes a work surface 210 located on the upper side of the central magnetic yoke 150, and a coil frame 220 is arranged on a side of the work surface 210 close to the central magnetic yoke 150. The coil frame 220 is in a U-shape and is slidably sleeved on the outer side of the central magnetic yoke 150; a DC coil 230 and an excitation coil 240 are wound around the outer wall of the coil frame 220, and a fixed DC current is passed into the DC coil 230 to generate an Ampere force opposite to the gravity direction of the moving part 200; and a controllable driving current is passed into the excitation coil 240 to generate an electromagnetic driving force.

[0051] The moving component 200 is made of aluminum alloy and is in a square barrel shape as a whole.

[0052] The DC coil 230 and the excitation coil 240 are formed by winding the insulated copper enameled wire on the outer surface of the coil frame 220, with a cross section of a square shape and a thickness of 3mm. The maximum current density is 5A / mm 2 After the magnetic circuit structure of the electromagnetic vibration table is assembled, the DC coil 230 , the excitation coil 240 and the coil frame 220 are located in the air gap 160 .

[0053] The fixed DC current is calculated by the following formula: DC =mg / (BL). In the formula, I DC is the magnitude of the DC current passed through the DC coil 230, m is the total mass of the moving part 200 and related components fixed on the work surface 210, g is the gravitational acceleration, B is the average magnetic induction intensity distributed in the air gap 160, and L is the length of the DC coil 230.

[0054] The DC coil 230 and the excitation coil 240 are located in the air gap 160 and in the area where the magnetic field is uniformly distributed; when the DC coil 230 does not need to offset the gravity of the moving part 200, the DC coil 230 and the excitation coil 240 can be connected to each other and a driving current can be passed to achieve a large electromagnetic driving force.

[0055] After the control signal is passed into the excitation coil 240 and amplified by the power amplifier, the effective value of the power current is up to tens of amperes. According to the electromagnetic field theory, the excitation coil 240 energized in the magnetic field is subjected to the vertical Ampere force, thereby outputting a precisely controllable electromagnetic driving force. The magnitude and direction of the electromagnetic driving force can be precisely controlled by controlling the magnitude and direction of the current passed. If the control signal adopts a standard sinusoidal electrical signal, the moving part 200 will generate a standard sinusoidal vibration along the axial direction under the action of the electromagnetic driving force.

[0056] In one embodiment, a static pressure air floating structure 250 is provided on the coil frame 220, and the static pressure air floating structure 250 controls the formation of a static pressure air film between the coil frame 220 and the central magnetic yoke 150. The static pressure air floating structure 250 is used to generate vertical standard vibration, and in this embodiment, the maximum stroke is 10mm.

[0057] The static pressure air floating structure 250 includes an air path 251 opened in the coil frame 220, and the air path 251 includes four vertical air paths 251 opened at the intersection of the coil frame 220 walls and four transverse air paths 251 opened along the walls of the coil frame 220, which are connected to each other. An air outlet hole 252 is opened on the side of the coil frame 220 close to the center magnetic yoke 150, and the air outlet hole 252 is connected to the air path 251, and the air outlet hole 252 is evenly distributed on the inner surface of the coil frame 220. An air inlet hole 253 is opened on the outer surface of the coil frame 220 away from the center magnetic yoke 150, and the air inlet hole 253 is connected to the air path 251, and the air inlet hole 253 is connected to the air supply source. Specifically, the diameter of the air hole can be 2mm.

[0058] In this embodiment, the lower cross-section of the coil frame 220 is in the shape of a Chinese character "Yu", and the side length is 80 mm. The static pressure air floating structure 250 is mounted on the central magnetic yoke 150 through the coil frame 220, so that the static pressure air floating guide rail and the axial direction of the electromagnetic drive structure are completely parallel, ensuring the assembly accuracy; during the assembly process, the inner surface of the coil frame 220 and the size of the central magnetic yoke 150 are matched, so that the coil frame 220 and the central magnetic yoke 150 can be easily assembled, and the assembly has high reliability.

[0059] In another embodiment, a sliding guide rail or a rolling guide rail may be further provided between the coil frame 220 and the central magnetic yoke 150 .

[0060] The present invention provides a single-ended centrally excited cubic electromagnetic drive device with combined guidance and driving. By arranging a lower magnetic yoke 110, an upper magnetic yoke 130, a permanent magnet 120, a central magnetic yoke 150 and a mounting frame 170, the lower magnetic yoke 110, the upper magnetic yoke 130, the permanent magnet 120 and the central magnetic yoke 150 can be quickly and coaxially installed. At the same time, by arranging a static pressure air floating structure 250 and an integrated design of the central magnetic yoke 150, the difficulty of assembling a moving part 200 is reduced to the greatest extent, the dead weight of the moving part 200 is reduced, and the assembly accuracy and driving ability of the electromagnetic drive device can be effectively improved. In addition, the DC coil 230 is located in an area with uniform magnetic field distribution to avoid introducing interference.

[0061] The specific beneficial effects are as follows:

[0062] (1) The magnetic circuit structure of the permanent magnet single-end center excitation adopted by the present invention can generate a more uniformly distributed magnetic induction intensity in the air gap 160, and the edge effect of the air gap 160 is small, which is suitable for occasions with high requirements for motion accuracy. Since the permanent magnet 120 is inside the magnetic circuit structure, the leakage flux generated on the work table 210 is small, and the impact on the sensor installed on the table is small. The use of axially magnetized cubic permanent magnet 120 is easy to manufacture and has low production cost. The cubic yoke is easy to manufacture, which is conducive to improving processing accuracy and reducing production costs.

[0063] (2) The coil frame 220 proposed in the present invention is in the shape of a U-shaped Chinese character, and the central magnetic yoke 150 constituting the guide shaft is in the shape of a cube. After ventilation, a static pressure air film will be generated between the four inner surfaces of the coil frame 220 and the corresponding side surfaces of the central magnetic yoke 150, that is, there is a restraining force in four directions, which can greatly reduce lateral vibration.

[0064] (3) The channel-type gas path 251 opened in the coil skeleton 220 of the present invention is easier to process than the cavity-type gas chamber. Usually, the wall thickness of the coil skeleton 220 is relatively small, and it is easier to open the channel-type gas path 251 by punching.

[0065] (4) The present invention realizes a high assembly precision design of integrated guidance and drive by processing the central magnetic yoke 150 into a guide shaft and manufacturing the coil frame 220 into a sliding mechanism, thereby improving the motion precision of the electromagnetic drive device. The moving component 200 is mounted on the central magnetic yoke 150 as a sliding mechanism, and the guidance and drive are integrated through a static pressure air floating structure, a sliding guide rail structure or a rolling guide rail structure, thereby ensuring that the axial direction of the moving component 200 is completely parallel to the electromagnetic drive structure, obtaining high assembly precision, and effectively reducing the lateral vibration ratio and waveform distortion of the electromagnetic drive device.

[0066] (5) The present invention realizes the light weight of the moving parts of the electromagnetic drive device, which can enhance its load capacity. The electromagnetic drive device with integrated guidance and drive has a more compact structure and a smaller device, which is conducive to the installation and transportation of the equipment. The small size of the moving part 200 can realize the light weight of the moving part 200 in structure, effectively improving the load capacity of the electromagnetic drive device.

[0067] (6) The present invention can avoid the problem that the DC coil 230 is subjected to nonlinear electromagnetic force in the approximately linear region of the air gap 160, thereby increasing the problem of vibration harmonic distortion. The DC coil 230 is placed in the uniform magnetic field distribution region of the air gap 160, and a fixed amount of DC current is passed through the DC coil 230 so that the DC coil 230 is subjected to an Ampere force equal to the gravity of the moving part 200, thereby avoiding harmonic interference caused by the nonlinear electromagnetic force of the DC coil 230 to the vibration.

[0068] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", "front", "back" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0069] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection, a mechanical connection, an electrical connection, a direct connection, or an indirect connection through an intermediate medium, or the internal connection of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances. In the absence of conflict, the embodiments of the present invention and the features in the embodiments can be combined with each other.

[0070] The above-mentioned embodiments only express the implementation methods of the present invention, and the description thereof is relatively specific and detailed, but it cannot be understood as limiting the scope of the patent of the present invention. It should be pointed out that for ordinary technicians in this field, several modifications and improvements can be made without departing from the concept of the present invention, which all belong to the protection scope of the present invention. Therefore, the protection scope of the patent of the present invention shall be based on the attached claims.

Claims

1. A single-ended central excitation cubic electromagnetic drive device with combined guidance and driving, Features: It comprises an electromagnetic driving component (100) and a moving component (200); The electromagnetic drive component (100) comprises a lower magnetic yoke (110) in a square barrel shape, an upper magnetic yoke (130) in a U-shaped shape arranged on the upper side of the lower magnetic yoke (110), a permanent magnet (120) in a cubic shape arranged on the upper side of the lower magnetic yoke (110), and a central magnetic yoke (150) in a cubic shape arranged on the upper side of the permanent magnet (120); the inner sides of the lower magnetic yoke (110) and the upper magnetic yoke (130) are surrounded by the permanent magnet (120) and the central magnetic yoke (150) to form a motion cavity (140); an air gap (160) is arranged between the upper magnetic yoke (130) and the central magnetic yoke (150); The moving component (200) comprises a work surface (210) located on the upper side of the central magnetic yoke (150); a coil frame (220) is arranged on a side of the work surface (210) close to the central magnetic yoke (150); the coil frame (220) is in a U-shape and is slidably sleeved on the outer side of the central magnetic yoke (150); a DC coil (230) and an excitation coil (240) are wound around the outer wall of the coil frame (220); a fixed DC current is passed through the DC coil (230) to generate an Ampere force opposite to the gravity direction of the moving component (200); and a controllable driving current is passed through the excitation coil (240) to generate an electromagnetic driving force; A static pressure air floating structure (250) is provided on the coil frame (220), and the static pressure air floating structure (250) controls the formation of a static pressure air film between the coil frame (220) and the central magnetic yoke (150); The static pressure air floating structure (250) comprises an air path (251) opened in the coil frame (220), and the air path (251) comprises four vertical air paths (251) opened at the intersections of the coil frame (220) walls and four transverse air paths (251) opened along the four coil frame (220) walls, which are connected to each other; an air outlet hole (252) is opened on a side surface of the coil frame (220) close to the central magnetic yoke (150), and the air outlet hole (252) is connected to the air path (251), and the air outlet holes (252) are evenly distributed on the inner surface of the coil frame (220); An air inlet hole (253) is provided on the outer surface of the coil frame (220) away from the central magnetic yoke (150), and the air inlet hole (253) is connected to the air path (251), and the air inlet hole (253) is connected to an air supply source.

2. The single-ended centrally excited cubic electromagnetic driving device with combined guidance and driving according to claim 1, Features: The central axes of the lower magnetic yoke (110), the upper magnetic yoke (130), the permanent magnet (120) and the central magnetic yoke (150) are on a straight line; and the permanent magnet (120) is located at the center of the lower magnetic yoke (110).

3. The single-ended center-excited cubic electromagnetic driving device with combined guiding and driving according to claim 1, characterized in that: a yoke fixing hole (130a) is provided on the upper yoke (130); the lower side surface of the upper yoke (130) is detachably connected to the lower yoke (110); an installation frame (170) for fixing the permanent magnet (120) and the center yoke (150) is arranged in the movement cavity (140); the installation frame (170) is in a shape of a rectangle with a hole in the middle, and an installation table (170a) and a first installation hole (170b) in a shape of a rectangle with a hole in the middle are provided on the installation frame (170), and a second installation hole (170c) is provided on the side surface of the installation frame (170) and located on the side of the installation table (170a); the lower end of the inner side wall of the installation table (170a) abuts against the permanent magnet (120), the upper end of the inner side wall of the installation table (170a) abuts against the center yoke (150), the lower side surface of the installation frame (170) is detachably connected to the lower yoke (110), and the upper end of the inner side surface of the installation frame (170) is detachably connected to the center yoke (150); the installation frame (170) covers the permanent magnet (120).

4. The single-ended center-excited cubic electromagnetic driving device with combined guiding and driving according to claim 1, characterized in that: a sliding guide rail or a rolling guide rail is arranged between the coil bobbin (220) and the center yoke (150).

5. The single-ended center-excited cubic electromagnetic driving device with combined guiding and driving according to claim 1, characterized in that: the permanent magnet (120) includes one permanent magnet (120) or multiple permanent magnets (120) bonded to each other.

6. The single-ended center-excited cubic electromagnetic driving device with combined guiding and driving according to claim 1, characterized in that: the DC coil (230) and the excitation coil (240) are located in the air gap (160) and in a region with uniform magnetic field distribution; the DC coil (230) and the excitation coil (240) are connected to each other or not connected.

7. The single-ended center-excited cubic electromagnetic driving device with combined guiding and driving according to claim 1, characterized in that: The fixed DC current is calculated by the following formula: DC =mg / (BL); in the formula, I DC is the magnitude of the direct current passed through the DC coil (230), m is the total mass of the moving part (200) and related components fixed on the work surface (210), g is the acceleration of gravity, B is the average magnetic induction intensity distributed in the air gap (160), and L is the length of the DC coil (230).

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