Substrate transfer robot for transferring substrates in a vacuum chamber

Abstract

The present invention relates to a substrate transfer robot for transferring a substrate in a vacuum chamber, comprising: a transfer arm platform formed with a first coupling hole, a second coupling hole, and a third coupling hole, to which a link connecting member including a first vane and a second vane for link coupling is fixedly coupled in a front region, and a support shaft of the bottom support body introduced into the first lower space is fixedly coupled to the first stopper; a first transfer arm portion including a first_1 transfer link arm, a first_2 transfer link arm, a first common link arm, a first_1 auxiliary link arm, a first_2 auxiliary link arm, a first_3 auxiliary link arm, and a first end effector; and a second transfer arm portion including a second_1 transfer link arm, a second_2 transfer link arm, a second common link arm, a second_1 auxiliary link arm, a second_2 auxiliary link arm, a second_3 auxiliary link arm, and a second end effector.

Description

Technical Field

[0001] The present invention relates to a substrate transfer robot, and more particularly, to a substrate transfer robot for transferring a substrate in a vacuum chamber of a substrate processing apparatus. Background Art

[0002] Generally, substrates such as wafers for semiconductor elements, glass substrates for display devices, or glass substrates for thin film solar cells are manufactured by performing various processes on the substrates. At this time, the substrate is loaded into a substrate processing apparatus that provides the optimal conditions required for each process and then processed.

[0003] Currently, in order to improve productivity, cluster-type substrate processing apparatuses capable of batch-processing substrates have been developed and used.

[0004] The cluster-type substrate processing apparatus includes a load lock chamber for storing substrates, a transfer chamber for transferring substrates, and a plurality of process chambers for performing each process.

[0005] In addition, a substrate transfer robot for transferring substrates is provided in the transfer chamber in a vacuum state, so that the substrate can be transferred from the load lock chamber to the transfer chamber, transferred from the transfer chamber to the load lock chamber, transferred between transfer chambers, or transferred to introduce and remove the substrate from the process chamber.

[0006] In recent years, in order to cope with the large size of substrates, improve the substrate processing capacity, and cope with high-weight substrates, research has been conducted on high-rigidity substrate transfer robots.

[0007] In addition, in order to improve the efficiency with respect to the installation area of the manufacturing apparatus, a smaller substrate transfer robot is required while maintaining a high vacuum state.

[0008] In order to meet this demand, a substrate transfer robot has been proposed, which forms the arm itself into a link structure, seals the inside of the arm constituting each link, and disposes a drive motor and a speed reducer inside each arm.

[0009] However, the existing substrate transfer robot as described above forms an arm platform in which the link arms are combined in a sealed structure and a drive motor is disposed inside, and a speed reducer for rotating each link arm is disposed inside each link arm.

[0010] Therefore, the existing substrate transfer robot has a problem in that the arm platform needs to be formed relatively large due to the disposition of the drive motor on the arm platform.

[0011] In addition, since the existing substrate transfer robot needs to dispose a drive motor on the arm platform and a speed reducer on each link arm, there are difficulties in installation and maintenance.

[0012] That is, when a problem occurs in the drive of the substrate transfer robot, for maintenance, it is necessary to disassemble the arm platform and each link arm to confirm whether the drive motor and the reduction gear have failed. Therefore, there is a problem that maintenance takes a long time.

[0013] Prior art documents

[0014] Patent documents

[0015] (Patent Document 1) KR10-2011-0052454A Summary of the invention

[0016] Technical problems to be solved

[0017] The present invention aims to solve all of the above problems.

[0018] Another object of the present invention is to provide a substrate transfer robot that can fundamentally prevent particles from occurring in the vacuum chamber.

[0019] Another object of the present invention is to provide a smaller substrate transfer robot to improve the efficiency with respect to the installation area of the manufacturing apparatus.

[0020] Another object of the present invention is to provide a substrate transfer robot that has a vacuum sealing structure in the vacuum chamber.

[0021] Technical solution

[0022] The features of the present invention are used to achieve the above objects of the present invention and the characteristic effects of the present invention described hereinafter, and its structure is as follows.

[0023] According to an embodiment of the present invention, there is provided a substrate transfer robot for transferring a substrate in a vacuum chamber, characterized by comprising: a transfer arm platform formed with a first coupling hole in a first central region, a second coupling hole in a first front end region, and a third coupling hole in a first other front end region, wherein the first coupling hole is divided by a first stopper into a first upper space and a first lower space, the first upper space is sealed by a first lid, the first stopper is formed with a first through hole, and the first through hole corresponds to the hollow of a support shaft formed at a transfer robot coupling portion of a bottom support body; the second coupling hole is divided by a second stopper into a second upper space and a second lower space, the second lower space is sealed by a second lid, and the second stopper is formed with a second through hole; the third coupling hole is divided by a third stopper into a third upper space and a third lower space, the third lower space is sealed by a third lid, the third stopper is formed with a third through hole, and a link connecting member including a first vane and a second vane for link coupling is fixedly coupled in a front region, where the front is the direction in which the process chamber is located when the substrate transfer robot is configured to transfer the substrate to the process chamber coupled to the vacuum chamber, and the support shaft of the bottom support body introduced into the first lower space is fixedly coupled to the first stopper; a first transfer arm unit including a first_1 transfer link arm, a first_2 transfer link arm, a first common link arm, a first_1 auxiliary link arm, a first_2 auxiliary link arm, a first_3 auxiliary link arm, and a first end effector, wherein a first transfer drive motor and a first speed reducer are provided in a sealed inner space of the first_1 transfer link arm, the first speed reducer is linked with the first transfer drive motor to reduce the rotational speed to 1 / 2, a first_1 drive shaft and a first_1 output shaft linked with the first_1 drive shaft are hermetically provided in a first_1 front end region, the first_1 drive shaft is linked with the first speed reducer and is formed with a hollow, a first_2 drive shaft and a first_2 output shaft linked with the first_2 drive shaft are hermetically provided in a first_1 other front end region, the first_2 drive shaft is linked with the first transfer drive motor and is formed with a hollow, the first_1 output shaft is introduced into the second upper space of the transfer arm platform and is fixedly coupled to a first connecting member fixedly coupled to the second stopper; a first_2 front end region of the first_2 transfer link arm is fixedly coupled to the first_2 output shaft of the first_1 transfer link arm through a first fixed coupling shaft; a second central region of the first common link arm is rotatably coupled to the first fixed coupling shaft; the first_1 auxiliary link arm is parallel to the first_1 transfer link arm, a first_4 front end region is rotatably coupled to the first vane of the link connecting member of the transfer arm platform, and a first_4 other front end region is rotatably coupled to a first_3 front end region of the first common link arm;The 1_2nd auxiliary link arm is parallel to the 1_2nd transfer link arm, and a 1_5th front-end region is rotatably coupled to a 1_3rd other front-end region of the 1st common link arm; the 1_3rd auxiliary link arm is parallel to the 1st common link arm, a 1_6th front-end region is rotatably coupled to a 1_5th other front-end region of the 1_2nd auxiliary link arm, and a 1_6th other front-end region is rotatably coupled to a 1_2nd other front-end region of the 1_2nd transfer link arm; the 1st end effector is fixed to the 1_6th other front-end region of the 1_3rd auxiliary link arm to support the substrate; and a 2nd transfer arm part, which includes a 2_1st transfer link arm, a 2_2nd transfer link arm, a 2nd common link arm, a 2_1st auxiliary link arm, a 2_2nd auxiliary link arm, a 2_3rd auxiliary link arm, and a 2nd end effector. A 2nd transfer drive motor and a 2nd reduction gear are provided in a sealed inner space of the 2_1st transfer link arm. The 2nd reduction gear is linked with the 2nd transfer drive motor to reduce the rotational speed to 1 / 2. A 2_1st drive shaft and a 2_1st output shaft linked with the 2_1st drive shaft are hermetically provided at a 2_1st front-end region of the 2_1st transfer link arm. The 2_1st drive shaft is linked with the 2nd reduction gear and is formed with a hollow. A 2_2nd drive shaft and a 2_2nd output shaft linked with the 2_2nd drive shaft are hermetically provided at a 2_1st other front-end region. The 2_2nd drive shaft is linked with the 2nd transfer drive motor and is formed with a hollow. The 2_1st output shaft is introduced into the 3rd upper space of the transfer arm platform and is fixedly coupled to a 2nd connecting member fixedly coupled to the 3rd locking member; a 2_2nd front-end region of the 2_2nd transfer link arm is fixedly coupled to the 2_2nd output shaft of the 2_1st transfer link arm through a 2nd fixed coupling shaft; a 3rd central region of the 2nd common link arm is rotatably coupled to the 2nd fixed coupling shaft; the 2_1st auxiliary link arm is parallel to the 2_1st transfer link arm, a 2_4th front-end region is rotatably coupled to a 2nd blade of the link connecting member of the transfer arm platform, and a 2_4th other front-end region is rotatably coupled to a 2_3rd front-end region of the 2nd common link arm; the 2_2nd auxiliary link arm is parallel to the 2_2nd transfer link arm, a 2_5th front-end region is rotatably coupled to a 2_3rd other front-end region of the 2nd common link arm; the 2_3rd auxiliary link arm is parallel to the 2nd common link arm, a 2_6th front-end region is rotatably coupled to a 2_5th other front-end region of the 2_2nd auxiliary link arm, and a 2_6th other front-end region is rotatably coupled to a 2_2nd other front-end region of the 2_2nd transfer link arm; the 2nd end effector is fixed to the 2_6th other front-end region of the 2_3rd auxiliary link arm to support the substrate.;

[0024] The other front end area of the first 1-1 transfer link arm of the first transfer arm part may be located in the front area of the transfer arm platform, and the other front end area of the second 2-1 transfer link arm of the second transfer arm part may be located in the rear area of the transfer arm platform.

[0025] By making the height of the second fixed coupling shaft higher than the height of the first fixed coupling shaft, the first end effector and the second end effector are located at different heights on the same path.

[0026] The second common link arm may include a hollow tube corresponding to the height of the second fixed coupling shaft and formed with a hollow for introducing the second fixed coupling shaft. The third blade including the first front end area of the second 2-3 is fixedly coupled to the lower area of the hollow tube, and the fourth blade including the other front end area of the second 2-3 is fixedly coupled to the upper area of the hollow tube. The first front end area of the second 2-3 and the other front end area of the second 2-3 may be symmetric to each other with respect to the central axis of the hollow tube.

[0027] The transfer arm platform may further include a first wiring hole and a second wiring hole. The first wiring hole connects the first upper space and the second lower space, and the second wiring hole connects the first upper space and the third lower space.

[0028] The transfer arm platform may further include a first 1-1 wiring hole, a first 1-2 wiring hole, a second 2-1 wiring hole, a second 2-2 wiring hole, a first sealing cover, and a second sealing cover. The first 1-1 wiring hole and the first 1-2 wiring hole are respectively connected to the first upper space on one side of the transfer arm platform body; the second 2-1 wiring hole is connected to the second lower space on one side of the transfer arm platform body; the second 2-2 wiring hole is connected to the third lower space on one side of the transfer arm platform body; the first sealing cover seals the first 1-1 wiring hole and the second 2-1 wiring hole on one side of the transfer arm platform body, and the second sealing cover seals the first 1-2 wiring hole and the second 2-2 wiring hole on one side of the transfer arm platform body.

[0029] The substrate transfer robot may further include a first wiring and a second wiring. The first wiring is for the operation of the first transfer driving motor, and the second wiring is for the operation of the second transfer driving motor. The first wiring may be introduced into the first transfer driving motor through the hollows of the support shaft and the first_1 driving shaft respectively to maintain sealing with respect to the internal space of the vacuum chamber. The second wiring may be introduced into the second transfer driving motor through the hollows of the support shaft and the second_1 driving shaft respectively to maintain sealing with respect to the internal space of the vacuum chamber.

[0030] Advantageous effects

[0031] By integrating the driving system for transferring the substrate within one link arm, the present invention can provide a miniaturized substrate transfer robot.

[0032] In addition, the present invention can maintain the driving system in one link arm provided with the driving system, so the maintenance time can be shortened.

[0033] In addition, the present invention has a structure that is completely sealed with the vacuum chamber, so the generation of particles can be fundamentally prevented. Description of the drawings

[0034] The following drawings for describing the embodiments of the present invention are only a part of the embodiments of the present invention, and those of ordinary skill in the art to which the present invention pertains (hereinafter referred to as "ordinary technicians") can obtain other drawings based on these drawings without any creative work.

[0035] Figure 1 and Figure 2 is a schematic diagram of a substrate transfer robot according to an embodiment of the present invention.

[0036] Figures 3a to 3c is a schematic diagram of a transfer arm platform of a substrate transfer robot according to an embodiment of the present invention.

[0037] Figure 4 is a schematic diagram of a first_1 transfer link arm of a substrate transfer robot according to an embodiment of the present invention.

[0038] Figure 5 is a schematic diagram of a connection part between a first_1 transfer link arm and a first_2 transfer link arm of a substrate transfer robot according to an embodiment of the present invention.

[0039] Description of reference numerals

[0040] 1000: Substrate transfer robot

[0041] 100: Bottom support

[0042] 200: Transfer arm platform

[0043] 300: First transfer arm part

[0044] 400: Second transfer arm part

[0045] 500: First end effector

[0046] 600: Second end effector Detailed implementation manners

[0047] The following detailed description of the present invention refers to the accompanying drawings, which schematically show specific embodiments in which the present invention can be implemented, so as to clarify the purpose, technical solutions and advantages of the present invention. These embodiments are described in sufficient detail to enable those of ordinary skill in the art to implement the present invention.

[0048] The following detailed description of the present invention is specific embodiments capable of implementing the present invention, which refer to the accompanying drawings. These embodiments are described in sufficient detail to enable those skilled in the art to implement the present invention. It should be understood that the various embodiments of the present invention are different but do not need to be mutually exclusive. For example, without departing from the technical concept and scope of the present invention, the specific shapes, structures and characteristics described in this specification can be realized by other embodiments. In addition, it should be understood that without departing from the technical concept and scope of the present invention, the positions or configurations of the respective components in each disclosed embodiment can be changed. Therefore, the following detailed description does not have a limiting meaning, and as long as an appropriate description can be made, the scope of the present invention is only defined by all scopes equivalent to those described in its claims and the appended claims. Similar reference numerals in the drawings refer to the same or similar functions in many aspects.

[0049] In order to enable those skilled in the art to easily implement the present invention, the preferred embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

[0050] Figure 1 and Figure 2 is a schematic diagram of a substrate transfer robot for transferring a substrate in a vacuum chamber according to an embodiment of the present invention.

[0051] Refer to Figure 1 and Figure 2 , the substrate transfer robot 1000 may include a transfer arm platform 200, a first transfer arm part 300 and a second transfer arm part 400. The transfer arm platform 200 is coupled to a support shaft 101 formed at the transfer robot coupling part. The first transfer arm part 300 and the second transfer arm part 400 are coupled to the transfer arm platform 200. A first end effector 500 and a second end effector 600 for supporting the substrate are respectively coupled to the first transfer arm part 300 and the second transfer arm part 400.

[0052] Accordingly, when the substrate transfer robot 1000 is located at a set position within the vacuum chamber, and the first end effector 500 or the second end effector 600 is located at the loading or unloading position of the substrate due to the vertical movement of the bottom support 100, the first end effector 500 or the second end effector 600 can load or unload the substrate by the operation of the first transfer arm portion 300 or the second transfer arm portion 400.

[0053] At this time, the bottom support 100 may include a lifting portion that moves the substrate transfer robot 1000 vertically and rotationally. The vertical position of the substrate transfer robot 1000 can be adjusted by the operation of the lifting portion, whereby the substrate transfer robot 1000 can be located at an appropriate height for loading or unloading the substrate in a process chamber or the like.

[0054] In addition, the bottom support 100 may further include a walking robot that is coupled above the lifting portion and can move the substrate transfer robot 1000 supported above it in a set direction. At this time, the walking robot can perform sealing inside the hollow formed in the lifting drive shaft, and can connect the internal wire in the hollow of the lifting drive shaft to the support shaft that supports the substrate transfer robot 100.

[0055] First, the transfer arm platform 200 can be coupled to the bottom support 100.

[0056] At this time, referring to Figure 3a and Figure 3b , the transfer arm platform 200 may include a first coupling hole 210, a second coupling hole 220, and a third coupling hole 230. The first coupling hole 210 is formed in the first central region, the second coupling hole 220 is formed in the first front end region, and the third coupling hole 230 is formed in the first other front end region.

[0057] The first coupling hole 210 is divided into a first upper space 210_1 and a first lower space 210_2 by a first stopper. The first upper space 210_1 can be sealed by a first lid 240. A first through hole is formed in the first central region of the first stopper, and the first through hole corresponds to the hollow of the support shaft 101 of the bottom support 100.

[0058] In addition, the second coupling hole 220 is divided into a second upper space 211_1 and a second lower space 211_2 by a second stopper. The second lower space 211_2 can be sealed by a second lid 250. A second through hole is formed in the first front end region of the second stopper.

[0059] In addition, the third coupling hole 230 is divided into a third upper space 212_1 and a third lower space 212_2 by a third stopper. The third lower space 212_2 can be sealed by a third lid 260. A third through hole is formed in the first other front end region of the third stopper.

[0060] In addition, the transfer arm platform 200 can be fixedly coupled to the link connection member 290 in the front area. The link connection member 290 includes a first blade 291 and a second blade 292 for link connection. At this time, the front can be the direction in which the process chamber is located when the substrate transfer robot 1000 is positioned to transfer the substrate to the process chamber coupled to the vacuum chamber.

[0061] In addition, the transfer arm platform 200 can be coupled to the bottom support 100. Specifically, by introducing the support shaft 101 of the bottom support 100 into the first lower space 210_2 of the first coupling hole 210, the support shaft 101 can be fixedly coupled to the first stopper. At this time, when the support shaft 101 is fixedly coupled to the first stopper, the sealing performance of the fixed coupling area can be improved by adding seals such as O-rings and washers. The configuration of adding seals such as O-rings and washers can also be applied to other coupling parts described later, so it will not be described in detail later.

[0062] Thus, the external environment caused by the support shaft 101 can be sealed from the vacuum environment inside the vacuum chamber in the first coupling hole 210.

[0063] On the other hand, wiring holes can be formed in the transfer arm platform 200 for introducing the wiring introduced through the hollow support shaft 101 of the bottom support 100 to the first transfer arm part 300 and the second transfer arm part 400.

[0064] That is, a first_1 wiring hole h11 and a first_2 wiring hole h12 can be formed, which are respectively connected to the first upper space 210_1 on one side of the main body of the transfer arm platform 200; a second_1 wiring hole h21 and a second_2 wiring hole h22 can be formed. The second_1 wiring hole h21 is connected to the second lower space 211_2 on one side of the main body of the transfer arm platform 200, and the second_2 wiring hole h22 is connected to the third lower space 212_2 on one side of the main body of the transfer arm platform 200.

[0065] In addition, in order to seal the wiring holes, a first sealing lid 270 and a second sealing lid 280 can be provided. The first sealing lid 270 seals the first_1 wiring hole h11 and the second_1 wiring hole h21 on one side of the main body of the transfer arm platform 200, and the second sealing lid 280 seals the first_2 wiring hole h12 and the second_2 wiring hole h22 on one side of the main body of the transfer arm platform 200.

[0066] In addition, referring to Figure 3c , wiring holes can also be formed inside the transfer arm platform 200 for introducing the wiring introduced through the hollow support shaft 101 of the bottom support 100 to the first transfer arm part 300 and the second transfer arm part 400.

[0067] That is, by forming a first wiring hole h30 and a second wiring hole h40 inside the transfer arm platform 200, the transfer arm platform 200 can be sealed inside without additional seals. The first wiring hole h30 connects the first upper space 210_1 and the second lower space 211_2, and the second wiring hole h40 connects the first upper space 210_1 and the third lower space 212_2.

[0068] Next, the first _1 transfer link arm 310 of the first transfer arm part 300 can be coupled to the second coupling hole 220 of the transfer arm platform 200, and the second _1 transfer link arm 410 of the second transfer arm part 400 can be coupled to the third coupling hole 230 of the transfer arm platform 200.

[0069] At this time, referring to Figure 4 , the first _1 transfer link arm 310 of the first transfer arm part 300 has a sealed internal space, and the first transfer drive motor 311 and the first speed reducer 312 can be arranged in the sealed internal space. The first speed reducer 312 is linked with the first transfer drive motor 311 to reduce the rotational speed to 1 / 2.

[0070] In addition, a first _1 drive shaft 313 and a first _1 output shaft 314 linked therewith are hermetically arranged in a first _1 front end area of the first _1 transfer link arm 310. The first _1 drive shaft 313 is linked with the first speed reducer 312 and is hollow; a first _2 drive shaft 316 and a first _2 output shaft 317 linked therewith are hermetically arranged in a first _1 other front end area of the first _1 transfer link arm 310. The first _2 drive shaft 316 is linked with the first transfer drive motor 311 and is hollow. At this time, the linkage between the first transfer drive motor 311 and the first speed reducer 312, the linkage between the first speed reducer 312 and the first _1 drive shaft 313, and the linkage between the first transfer drive motor 311 and the first _2 drive shaft 316 can be respectively carried out in a pulley manner, but the present invention is not limited thereto, and various ways for transmitting rotational force such as a gear manner can also be used. In addition, the first _1 drive shaft 313 and the first _1 output shaft 314, and the first _2 drive shaft 316 and the first _2 output shaft 317 can also be respectively formed as speed reducers having the same reduction ratio. In addition, the rotational directions of the first _1 output shaft 314 and the first _2 output shaft 317 can be opposite to each other.

[0071] In addition, the first _1 output shaft 314 can be introduced into the second upper space 211_1 of the second coupling hole 220 of the transfer arm platform 200, so as to be fixedly coupled to the second locking member. The first _1 output shaft 314 is arranged in a first _1 front end area of the first _1 transfer link arm 310 of the first transfer arm part 300.

[0072] At this time, the first connecting member 315 can be used for the combination of the first output shaft 314 and the second locking member. The first connecting member 315 is a tubular shaft and has a length extending from the joint of the transfer arm platform 200 and the first transfer link arm 310 to a distance equal to the distance between the first output shaft 314 and the second locking member. The two ends of the first connecting member 315 can be fixedly connected to the first output shaft 314 and the second locking member respectively.

[0073] In addition, the first front-end area of the first transfer link arm 320 can be fixedly connected to the second output shaft 317 of the first transfer link arm 310 of the first transfer arm portion 300.

[0074] At this time, referring to Figure 5 , the first fixed connecting shaft 318 can be used for the combination of the second output shaft 317 and the first front-end area. The first fixed connecting shaft 318 is a tubular shaft and has a length extending from the joint of the first transfer link arm 310 and the first transfer link arm 320 to a distance equal to the distance between the combination areas of the second output shaft 317 and the first front-end area. The two ends of the first fixed connecting shaft 318 can be fixedly connected to the combination areas of the second output shaft 317 and the first front-end area respectively.

[0075] In addition, the first common link arm 330 can be arranged in the combination area of the second output shaft 317 and the first front-end area.

[0076] That is, the second central area of the first common link arm 330 can be rotatably connected to the first fixed connecting shaft 318, and the first fixed connecting shaft 318 connects the second output shaft 317 and the first front-end area.

[0077] In addition, the first transfer arm portion 300 can include a first auxiliary link arm 340. The first auxiliary link arm 340 is parallel to the first transfer link arm 310. The first front-end area can be rotatably connected to the first blade 291 of the link connecting member 290 of the transfer arm platform 200, and the other first front-end area can be rotatably connected to the first front-end area of the first common link arm 330.

[0078] In addition, the first transfer arm portion 300 can include a second auxiliary link arm 350. The second auxiliary link arm 350 is parallel to the second transfer link arm 320. The first front-end area can be rotatably connected to the other first front-end area of the first common link arm 330.

[0079] In addition, the first transfer arm part 300 may include a first_3 auxiliary link arm 360. The first_3 auxiliary link arm 360 is parallel to the first common link arm 330. A first_6 front end area can be rotatably coupled to a first_5 other front end area of the first_2 auxiliary link arm 350, and a first_6 other front end area can be rotatably coupled to a first_2 other front end area of the first_2 transfer link arm 320.

[0080] In addition, the first transfer arm part 300 may include a first end effector 500. The first end effector 500 may be fixed to a first_6 other front end area of the first_3 auxiliary link arm 360 to support the substrate.

[0081] The first transfer arm part 300 configured as described above can, according to the operation of the first transfer drive motor 311, enable the first end effector 500 to move linearly back and forth by means of each transfer arm and auxiliary arm, and further, the substrate can be loaded or unloaded at a set position by the first end effector 500.

[0082] On the other hand, the second transfer arm part 400 can be configured similarly to the first transfer arm part 300 and can be symmetrically disposed on the transfer arm platform 200 around the central area of the transfer arm platform 200.

[0083] That is, the second_1 transfer link arm 410 of the second transfer arm part 400 has a sealed internal space. The second transfer drive motor and the second speed reducer can be disposed in the sealed internal space. The second speed reducer is linked with the second transfer drive motor to reduce the rotational speed to 1 / 2.

[0084] In addition, a second_1 drive shaft and a second_1 output shaft linked thereto are hermetically disposed at a second_1 front end area of the second_1 transfer link arm 410. The second_1 drive shaft is linked with the second speed reducer and is hollow. A second_2 drive shaft and a second_2 output shaft linked thereto are hermetically disposed at a second_1 other front end area of the second_1 transfer link arm 410. The second_2 drive shaft is linked with the second transfer drive motor and is hollow. At this time, the linkage between the second transfer drive motor and the second speed reducer, the linkage between the second speed reducer and the second_1 drive shaft, and the linkage between the second transfer drive motor and the second_2 drive shaft can be respectively performed in a pulley manner, but the present invention is not limited thereto, and various ways for transmitting rotational force such as a gear manner can also be used. In addition, the second_1 drive shaft and the second_1 output shaft, and the second_2 drive shaft and the second_2 output shaft can also be respectively formed as speed reducers having the same reduction ratio. In addition, the rotational directions of the second_1 output shaft and the second_2 output shaft can be opposite to each other.

[0085] In addition, the second output shaft 2_1 can be introduced into the upper space 212_1 of the third coupling hole 230 of the transfer arm platform 200, so as to be fixedly coupled to the third locking member. The second output shaft 2_1 is disposed in the front-end region of the second transfer link arm 410 of the second transfer arm portion 400.

[0086] At this time, the second connecting member can be used for the coupling of the second output shaft 2_1 and the third locking member. The second connecting member is a tubular shaft and has a length extending from the joint of the transfer arm platform 200 and the second transfer link arm 410 to a distance equal to the distance between the second output shaft 2_1 and the third locking member. The two ends of the second connecting member can be fixedly coupled to the second output shaft 2_1 and the third locking member respectively.

[0087] In addition, the front-end region of the second transfer link arm 420 can be fixedly coupled to the second output shaft of the second transfer link arm 410 of the second transfer arm portion 400.

[0088] At this time, the second fixed coupling shaft can be used for the coupling of the second output shaft and the front-end region. The second fixed coupling shaft is a tubular shaft and has a length extending from the joint of the second transfer link arm 410 and the second transfer link arm 420 to a distance equal to the distance between the coupling regions of the second output shaft and the front-end region. The two ends of the second fixed coupling shaft can be fixedly coupled to the coupling regions of the second output shaft and the front-end region respectively.

[0089] In addition, the second common link arm 430 can be disposed in the coupling region of the second output shaft and the front-end region.

[0090] That is, the central region of the second common link arm 430 can be rotatably coupled to the second fixed coupling shaft, and the second fixed coupling shaft couples the second output shaft and the front-end region.

[0091] In addition, the second transfer arm portion 400 can include a second auxiliary link arm 440. The second auxiliary link arm 440 is parallel to the second transfer link arm 410. The front-end region of the second auxiliary link arm 440 can be rotatably coupled to the second blade 292 of the link connecting member 290 of the transfer arm platform 200, and the other front-end region of the second auxiliary link arm 440 can be rotatably coupled to the front-end region of the second common link arm 430.

[0092] In addition, the second transfer arm portion 400 can include a second auxiliary link arm 450. The second auxiliary link arm 450 is parallel to the second transfer link arm 420. The front-end region of the second auxiliary link arm 450 can be rotatably coupled to the other front-end region of the second common link arm 430.

[0093] In addition, the second transfer arm portion 400 may include a second_3 auxiliary link arm 460. The second_3 auxiliary link arm 460 is parallel to the second common link arm 430. A first front end region of the second_6 can be rotatably coupled to a second front end region of the second_2 auxiliary link arm 450, and another front end region of the second_6 can be rotatably coupled to another front end region of the fourth_2 of the second_2 transfer link arm 420.

[0094] In addition, the second transfer arm portion 400 may include a second end effector 600. The second end effector 600 can be fixed to another front end region of the second_6 of the second_3 auxiliary link arm 460 to support the substrate.

[0095] The second transfer arm portion 400 configured as described above can, according to the operation of the second transfer drive motor, enable the second end effector 600 to move linearly back and forth by means of each transfer arm and auxiliary arm, and further, the substrate can be loaded or unloaded at a set position by the second end effector 600.

[0096] At this time, the other front end region of the first_1 transfer link arm 310 of the first transfer arm portion 300 and the other front end region of the second_1 transfer link arm 410 of the second transfer arm portion 400 can be located in the front region or the rear region of the transfer arm platform 200 in the same manner.

[0097] Alternatively, differently, the other front end region of the first_1 transfer link arm 310 of the first transfer arm portion 300 can be located in the front region of the transfer arm platform 200, and the other front end region of the second_1 transfer link arm 410 of the second transfer arm portion 400 can be located in the rear region of the transfer arm platform 200.

[0098] In addition, by making the height of the second fixed coupling shaft higher than the height of the first fixed coupling shaft 318, the first end effector 500 of the first transfer arm portion 300 and the second end effector 600 of the second transfer arm portion 400 can be located at different heights on the same path. The second fixed coupling shaft connects the second_1 transfer link arm 410 and the second_2 transfer link arm 420 of the second transfer arm portion 400, and the first fixed coupling shaft 318 connects the first_1 transfer link arm 310 and the first_2 transfer link arm 320 of the first transfer arm portion 300.

[0099] In addition, the second fixed coupling shaft connects the second_1 transfer link arm 410 and the second_2 transfer link arm 420 of the second transfer arm portion 400. The second common link arm 430 can be rotatably coupled to the second fixed coupling shaft and may include a hollow tube. The hollow tube corresponds to the height of the second fixed coupling shaft and forms a hollow for introducing the second fixed coupling shaft. A third blade including a first front end region of the second_3 can be fixedly coupled to the lower region of the hollow tube, a fourth blade including a second front end region of the second_3 can be fixedly coupled to the upper region of the hollow tube, and the first front end region and the second front end region of the second_3 can be formed to be symmetric with respect to the central axis of the hollow tube.

[0100] In addition, the first wiring and the second wiring are respectively disposed in a sealed space inside the substrate transfer robot 1000. The first wiring is for the operation of the first transfer drive motor 311, and the second wiring is for the operation of the second transfer drive motor.

[0101] At this time, the first wiring can be introduced into the first transfer drive motor 311 through the hollow portions of the support shaft 101 of the bottom support 100 and the first_1 drive shaft respectively to be sealed from the internal space of the vacuum chamber. The second wiring can be introduced into the second transfer drive motor through the hollow portions of the support shaft 101 of the bottom support 100 and the second_1 drive shaft respectively to be sealed from the internal space of the vacuum chamber. On the other hand, the first wiring and the second wiring can be branched from the support shaft 101 to the first transfer arm portion 300 and the second transfer arm portion 400 respectively through the wiring holes formed in the transfer arm platform 200.

[0102] The transfer of the substrate has been described above, but the transfer of the mask required for performing the process on the substrate can be similarly applied.

[0103] The present invention has been described above through specific elements such as specific matters, limited embodiments, and drawings, but this is only to help a comprehensive understanding of the present invention, and the present invention is not limited thereto. Those skilled in the art to which the present invention pertains can make various modifications and transformations based on the above description.

[0104] Therefore, the technical concept of the present invention should not be limited to the embodiments described above, and the claims and modifications equivalent or identical to the claims all fall within the scope of the technical concept of the present invention.

Claims

1. A substrate transfer robot for transferring substrates in a vacuum chamber, characterized in that Comprising: A transfer arm platform, which is formed with a first coupling hole located in the first central region, a second coupling hole located in the first front end region, and a third coupling hole located in the first other front end region. Among them, the first coupling hole is divided into a first upper space and a first lower space by a first stopper, the first upper space is sealed by a first lid, the first stopper is formed with a first through hole, and the first through hole corresponds to the hollow of the support shaft formed at the transfer robot coupling portion of the bottom support body; the second coupling hole is divided into a second upper space and a second lower space by a second stopper, the second lower space is sealed by a second lid, the second stopper is formed with a second through hole; the third coupling hole is divided into a third upper space and a third lower space by a third stopper, the third lower space is sealed by a third lid, the third stopper is formed with a third through hole, and a link connecting member including a first blade and a second blade for link coupling is fixedly coupled in the front region. The front is the direction in which the process chamber is located when the substrate transfer robot is configured to transfer the substrate to the process chamber coupled to the vacuum chamber. The support shaft of the bottom support body introduced into the first lower space is fixedly coupled to the first stopper; The first transfer arm portion includes a first_1 transfer link arm, a first_2 transfer link arm, a first common link arm, a first_1 auxiliary link arm, a first_2 auxiliary link arm, a first_3 auxiliary link arm, and a first end effector. A first transfer drive motor and a first speed reducer are provided in the sealed internal space of the first_1 transfer link arm. The first speed reducer is linked with the first transfer drive motor to reduce the rotational speed to 1 / 2. A first_1 drive shaft and a first_1 output shaft linked with the first_1 drive shaft are hermetically provided in a first_1 front end area of the first_1 transfer link arm. The first_1 drive shaft is linked with the first speed reducer and is hollow. A first_2 drive shaft and a first_2 output shaft linked with the first_2 drive shaft are hermetically provided in another first_1 front end area of the first_1 transfer link arm. The first_2 drive shaft is linked with the first transfer drive motor and is hollow. The first_1 output shaft is introduced into the second upper space of the transfer arm platform and is fixedly coupled to a first coupling fixedly coupled to the second locking member. The first_2 front end area of the first_2 transfer link arm is fixedly coupled to the first_2 output shaft of the first_1 transfer link arm through a first fixed coupling shaft. The second central area of the first common link arm is rotatably coupled to the first fixed coupling shaft. The first_1 auxiliary link arm is parallel to the first_1 transfer link arm. A first_4 front end area of the first_1 auxiliary link arm is rotatably coupled to the first blade of the link coupling of the transfer arm platform. Another first_4 front end area of the first_1 auxiliary link arm is rotatably coupled to a first_3 front end area of the first common link arm. The first_2 auxiliary link arm is parallel to the first_2 transfer link arm. A first_5 front end area of the first_2 auxiliary link arm is rotatably coupled to another first_3 front end area of the first common link arm. The first_3 auxiliary link arm is parallel to the first common link arm. A first_6 front end area of the first_3 auxiliary link arm is rotatably coupled to another first_5 front end area of the first_2 auxiliary link arm. Another first_6 front end area of the first_3 auxiliary link arm is rotatably coupled to another first_2 front end area of the first_2 transfer link arm. The first end effector is fixed to another first_6 front end area of the first_3 auxiliary link arm to support the substrate. And The second transfer arm part includes a second_1 transfer link arm, a second_2 transfer link arm, a second common link arm, a second_1 auxiliary link arm, a second_2 auxiliary link arm, a second_3 auxiliary link arm, and a second end effector. In the sealed internal space of the second_1 transfer link arm, there are provided a second transfer drive motor and a second speed reducer. The second speed reducer is linked with the second transfer drive motor to reduce the rotational speed to 1 / 2. In a first front end area of the second_1 transfer link arm, a second_1 drive shaft and a second_1 output shaft linked with the second_1 drive shaft are hermetically provided. The second_1 drive shaft is linked with the second speed reducer and is hollow. In a second front end area of the second_1 transfer link arm, a second_2 drive shaft and a second_2 output shaft linked with the second_2 drive shaft are hermetically provided. The second_2 drive shaft is linked with the second transfer drive motor and is hollow. The second_1 output shaft is introduced into the third upper space of the transfer arm platform and fixedly coupled to a second connector fixedly coupled to the third locking member; a first front end area of the second_2 transfer link arm is fixedly coupled to the second_2 output shaft of the second_1 transfer link arm through a second fixed coupling shaft; a third central area of the second common link arm is rotatably coupled to the second fixed coupling shaft; the second_1 auxiliary link arm is parallel to the second_1 transfer link arm. A first front end area of the second_1 auxiliary link arm is rotatably coupled to a second blade of the link connector of the transfer arm platform. A second front end area of the second_1 auxiliary link arm is rotatably coupled to a first front end area of the second_3 of the second common link arm; the second_2 auxiliary link arm is parallel to the second_2 transfer link arm. A first front end area of the second_2 auxiliary link arm is rotatably coupled to a second front end area of the second_3 of the second common link arm; the second_3 auxiliary link arm is parallel to the second common link arm. A first front end area of the second_3 auxiliary link arm is rotatably coupled to a second front end area of the second_5 of the second_2 auxiliary link arm. A second front end area of the second_3 auxiliary link arm is rotatably coupled to a second front end area of the second_2 of the second_2 transfer link arm; the second end effector is fixed to a second front end area of the second_6 of the second_3 auxiliary link arm to support the substrate.

2. The substrate transfer robot according to claim 1, wherein: The second front end area of the first_1 transfer link arm of the first transfer arm part is located in the front area of the transfer arm platform, and the second front end area of the second_1 transfer link arm of the second transfer arm part is located in the rear area of the transfer arm platform.

3. The substrate transfer robot according to claim 1, wherein: By making the height of the second fixed coupling shaft higher than that of the first fixed coupling shaft, the first end effector and the second end effector are located at different heights on the same path.

4. The substrate transfer robot according to claim 1, wherein: The second common link arm includes a hollow tube, the hollow tube corresponds to the height of the second fixed coupling shaft and is formed with a hollow for introducing the second fixed coupling shaft. A third blade including the first front end region of the second _ 3 is fixedly coupled to a lower region of the hollow tube, and a fourth blade including the other front end region of the second _ 3 is fixedly coupled to an upper region of the hollow tube. When viewed from the direction of the central axis of the hollow tube, the first front end region of the second _ 3 and the other front end region of the second _ 3 are symmetric with respect to the central axis of the hollow tube on both sides of the central axis of the hollow tube.

5. The substrate transfer robot according to claim 1, wherein: The transfer arm platform further includes a first wiring hole and a second wiring hole. The first wiring hole connects the first upper space and the second lower space, and the second wiring hole connects the first upper space and the third lower space.

6. The substrate transfer robot according to claim 1, wherein: The transfer arm platform further includes a first _ 1 wiring hole, a first _ 2 wiring hole, a second _ 1 wiring hole, a second _ 2 wiring hole, a first sealing cover, and a second sealing cover. The first _ 1 wiring hole and the first _ 2 wiring hole are respectively connected to the first upper space on one side of the transfer arm platform body; the second _ 1 wiring hole is connected to the second lower space on one side of the transfer arm platform body; the second _ 2 wiring hole is connected to the third lower space on one side of the transfer arm platform body; the first sealing cover seals the first _ 1 wiring hole and the second _ 1 wiring hole on one side of the transfer arm platform body, and the second sealing cover seals the first _ 2 wiring hole and the second _ 2 wiring hole on one side of the transfer arm platform body.

7. The substrate transfer robot according to claim 1, wherein: It further includes a first wiring and a second wiring. The first wiring is for the operation of the first transfer drive motor, and the second wiring is for the operation of the second transfer drive motor. The first wiring is introduced into the first transfer drive motor through the hollows of the support shaft and the first _ 1 drive shaft respectively to maintain sealing with respect to the internal space of the vacuum chamber. The second wiring is introduced into the second transfer drive motor through the hollows of the support shaft and the second _ 1 drive shaft respectively to maintain sealing with respect to the internal space of the vacuum chamber.

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