Low temperature mirror surface control device, synchrotron radiation device and free electron laser device

Abstract

The present invention provides a low-temperature reflector surface shape control device, a synchrotron radiation device and a free electron laser device, and relates to the fields of synchrotron radiation and free electron laser technology. The low-temperature reflector surface shape control device can respectively set a heating control module and a cooling control module on both sides of the reflector, and a cooling pipe is set in the cooling control module. A cooling medium passes through the cooling pipe and is used to cool the reflector body; the heating control module is used to compensate for the surface shape of the reflector surface. The low-temperature reflector surface shape control device can process high heat loads while realizing compensation for the reflector surface shape, thereby solving the shortcomings of the current water cooling solution.

Description

Technical Field

[0001] The present invention relates to the field of synchrotron radiation and free electron laser technology, and in particular to a low-temperature reflection mirror surface shape control device, a synchrotron radiation device and a free electron laser device. Background Art

[0002] For the current mainstream synchrotron radiation sources and high repetition rate free electron laser devices, due to the need for wavefront coherent transmission, the surface shape requirements of the reflector are very high, generally requiring the height error RMS to be several nm and the slope error RMS value to be less than 100 nrad. When the reflector absorbs X-rays from upstream, it will cause thermal deformation of the mirror surface, which will eventually have an adverse effect on the transmission efficiency and quality of the X-rays.

[0003] There are many cooling schemes for the reflectors in synchrotron radiation sources, such as the side slot design, which can minimize the surface thermal deformation under a specific heat load by optimizing the slot position, depth, and width. In some side local cooling schemes, while keeping the appearance of the reflector intact, the length and width of the contact area between the cooling copper block and the side of the reflector are optimized to obtain a very small surface error for a certain load. In addition, there is also a solution for direct cooling of short-sized optical components using internal channels.

[0004] The active surface control solutions in the prior art mainly use water cooling and multi-channel piezoelectric ceramic surface control solutions, as well as cooling solutions using electric heaters for temperature compensation. These cooling devices usually use water cooling. In order to reduce the vibration of the reflector caused by the contact cooling solution, the solution currently used is to make grooves on the reflector and inject indium gallium solution, and then put the copper plate of the cooling pipe into the indium gallium solution tank. However, these solutions are not applicable when low-temperature cooling is used for reflectors that absorb high heat loads. Summary of the invention

[0005] In view of this, the purpose of the present invention is to provide a low-temperature reflector surface shape control device, a synchrotron radiation device and a free electron laser device, wherein a heating control module and a cooling control module can be respectively arranged on both sides of the reflector, and a cooling pipe is arranged in the cooling control module, and a cooling medium passes through the cooling pipe for cooling the reflector body; the heating control module is used to compensate for the surface shape of the reflector surface. The low-temperature reflector surface shape control device can handle high heat loads while achieving compensation for the reflector surface shape, thereby solving the shortcomings of the current water cooling solution.

[0006] In a first aspect, an embodiment of the present invention provides a low-temperature reflector surface shape control device, which is used to control the reflector surface shape of a synchrotron radiation and free electron laser device, including: a reflector body, a first heating control module and a first cooling control module;

[0007] The reflector body, the first heating control module and the first cooling control module are all rectangular parallelepiped structures; the upper surface of the reflector body is a reflecting surface; the first side surface of the reflector body is an adjacent surface of the upper surface of the reflector body, and the first side surface of the reflector body is in contact with the first contact surface of the first heating control module;

[0008] The second contact surface of the first heating control module is an opposite surface of the first contact surface of the first heating control module, and the second contact surface of the first heating control module is in contact with the contact surface of the first cooling control module; the first cooling control module is provided with a first cooling pipeline, and a cooling medium flows through the first cooling pipeline;

[0009] The first heating control module is used to heat the reflector body through the built-in first heating unit to compensate for the surface shape of the reflector; the first cooling control module is used to cool the entire system through a cooling medium to control the surface shape of the reflector.

[0010] In some embodiments, the low temperature reflector surface shape control device further includes: a second heating control module and a second cooling control module;

[0011] The second heating control module and the second cooling control module are both rectangular parallelepiped structures; the second side surface of the reflector body is the opposite side of the first side surface of the reflector body; the second side surface of the reflector body is in contact with the first contact surface of the second heating control module;

[0012] The second contact surface of the second heating control module is the opposite surface of the first contact surface of the second heating control module, and the second contact surface of the second heating control module is in contact with the contact surface of the second cooling control module; the second cooling control module is provided with a second cooling pipeline, and a cooling medium flows through the second cooling pipeline;

[0013] Among them, the second heating control module is used to heat the reflector body through the built-in second heating unit to compensate for the surface shape of the reflector; the second cooling control module is used to cool the entire system through the cooling medium to control the surface shape of the reflector.

[0014] In some embodiments, the low-temperature reflector surface shape control device further includes: a heating controller; the heating controller is connected to the first heating unit;

[0015] The heating controller is used to determine a first heating control instruction of the first heating unit according to the surface shape of the reflecting mirror.

[0016] In some embodiments, the first heating unit includes: a plurality of electric heating plates connected to a heating controller;

[0017] Among them, the electric heating plate is arranged on the upper surface of the first heating control module; the upper surface of the first heating control module is an adjacent surface of the first contact surface of the first heating control module, and the upper surface of the first heating control module and the reflecting surface of the reflector body are located in the same plane.

[0018] In some embodiments, the heating controller is further connected to the second heating unit;

[0019] The heating controller is also used to determine a second heating control instruction of a second heating unit of the second heating control module according to the beam surface shape of the reflector.

[0020] In some embodiments, the second heating unit includes: a plurality of electric heating plates connected to a heating controller;

[0021] Among them, the electric heating plate is arranged on the upper surface of the second heating control module; the upper surface of the second heating control module is an adjacent surface to the first contact surface of the second heating control module, and the upper surface of the second heating control module and the reflecting surface of the reflector body are located in the same plane.

[0022] In some embodiments, an indium sheet is used to fill the space between the first side surface of the reflector body and the first contact surface of the first heating control module;

[0023] An indium sheet is used to fill the space between the second contact surface of the first heating control module and the contact surface of the first cooling control module;

[0024] An indium sheet is used to fill the space between the second side surface of the reflector body and the first contact surface of the second heating control module;

[0025] An indium sheet is used to fill the space between the second contact surface of the second heating control module and the contact surface of the second cooling control module.

[0026] In some embodiments, a copper block of a cooling pipe is provided in both the first cooling control module and the second cooling control module; and the cooling pipe is filled with 80K liquid nitrogen.

[0027] In a second aspect, an embodiment of the present invention provides a synchrotron radiation device, including a light source system and a low-temperature reflector surface shape control device as mentioned in the first aspect, wherein the low-temperature reflector surface shape control device is used to control the surface shape of the reflector illuminated by the light source system.

[0028] In a third aspect, an embodiment of the present invention provides a free electron laser device, including a light source system and a low-temperature reflector surface shape control device as mentioned in the first aspect, wherein the low-temperature reflector surface shape control device is used to control the surface shape of the reflector illuminated by the light source system.

[0029] The embodiments of the present invention bring the following beneficial effects:

[0030] The present invention provides a low-temperature reflector surface shape control device, a synchrotron radiation device and a free electron laser device, wherein the device is used for controlling the reflector surface shape of the synchrotron radiation and free electron laser devices, and comprises: a reflector body, a first heating control module and a first cooling control module; the reflector body, the first heating control module and the first cooling control module are all rectangular parallelepiped structures; the upper surface of the reflector body is a reflecting surface; the first side surface of the reflector body is an adjacent surface of the upper surface of the reflector body, and the first side surface of the reflector body is in contact with a first contact surface of the first heating control module; the second contact surface of the first heating control module is an opposite surface of the first contact surface of the first heating control module, and the second contact surface of the first heating control module is in contact with a contact surface of the first cooling control module; a first cooling pipeline is arranged in the first cooling control module, and a cooling medium flows through the first cooling pipeline; wherein the first heating control module is used for heating the reflector body through a built-in first heating unit to compensate for the surface shape of the reflector; the first cooling control module is used for cooling the entire system through a cooling medium to control the surface shape of the reflector. The low-temperature reflector surface shape control device can respectively set a heating control module and a cooling control module on both sides of the reflector. The cooling control module is provided with a cooling pipe, and a cooling medium flows through the cooling pipe for cooling the reflector body; the heating control module is used to compensate for the surface shape of the reflector surface. The low-temperature reflector surface shape control device can handle high heat loads while compensating for the reflector surface shape, which solves the shortcomings of the current water cooling solution.

[0031] Other features and advantages of the present invention will be set forth in the following description, or some features and advantages may be inferred or unambiguously determined from the description, or may be learned by implementing the above-mentioned technology of the present invention.

[0032] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, preferred embodiments are specifically listed below and described in detail with reference to the attached drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] In order to more clearly illustrate the specific implementation methods of the present invention or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0034] Figure 1 A schematic structural diagram of a first cryogenic reflector surface shape control device provided by an embodiment of the present invention;

[0035] Figure 2A schematic structural diagram of a second low-temperature reflector surface shape control device provided by an embodiment of the present invention;

[0036] Figure 3 A schematic structural diagram of a third cryogenic reflector surface shape control device provided by an embodiment of the present invention;

[0037] Figure 4 A schematic diagram of a three-dimensional model of a cryogenic reflector surface shape control device provided by an embodiment of the present invention;

[0038] Figure 5 An error curve diagram of a surface shape control device without using a cryogenic reflector provided by an embodiment of the present invention;

[0039] Figure 6 An error curve diagram of a surface shape control device using a cryogenic reflector provided in an embodiment of the present invention.

[0040] icon:

[0041] 100 - reflector body; 210 - first heating control module; 210a - first heating unit; 310 - first cooling control module; 310a - first cooling pipeline; 220 - second heating control module; 320 - second cooling control module; 320a - second cooling pipeline; 400 - heating controller; 40 - light spot. DETAILED DESCRIPTION

[0042] In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the technical solution of the present invention will be clearly and completely described below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0043] For the current mainstream synchrotron radiation sources and high repetition rate free electron laser devices, due to the need for wavefront coherent transmission, the surface shape requirements of the reflector are very high, generally requiring the height error RMS to be several nm and the slope error RMS value to be less than 100 nrad. When the reflector absorbs X-rays from upstream, it will cause thermal deformation of the mirror surface, which will eventually have an adverse effect on the transmission efficiency and quality of the X-rays.

[0044] There are many cooling schemes for the reflectors in synchrotron radiation sources, such as the side slot design, which can minimize the surface thermal deformation under a specific heat load by optimizing the slot position, depth, and width. In some side local cooling schemes, while keeping the appearance of the reflector intact, the length and width of the contact area between the cooling copper block and the side of the reflector are optimized to obtain a very small surface error for a certain load. In addition, there is also a solution for direct cooling of short-sized optical components using internal channels.

[0045] The active surface control solutions in the prior art mainly use water cooling and multi-channel piezoelectric ceramic surface control solutions, as well as cooling solutions using electric heaters for temperature compensation. These cooling devices usually use water cooling. In order to reduce the vibration of the reflector caused by the contact cooling solution, the solution currently used is to make grooves on the reflector and inject indium gallium solution, and then put the copper plate of the cooling pipe into the indium gallium solution tank. However, these solutions are not applicable when low-temperature cooling is used for reflectors that absorb high heat loads.

[0046] In summary, the existing synchrotron radiation source and high repetition rate free electron laser device lack an effective temperature compensation scheme when performing active surface shape control. Based on the above problems, the embodiments of the present invention provide a low-temperature reflector surface shape control device, a synchrotron radiation device and a free electron laser device, which can respectively set a heating control module and a cooling control module on both sides of the reflector, and the cooling control module is provided with a cooling pipe, and a cooling medium passes through the cooling pipe to cool the reflector body; the heating control module is used to compensate for the surface shape of the reflector surface, and the low-temperature reflector surface shape control device can process high heat loads while realizing compensation for the reflector surface shape, solving the shortcomings of the current water cooling scheme.

[0047] To facilitate understanding of this embodiment, a low-temperature reflector surface shape control device disclosed in an embodiment of the present invention is first described in detail. The low-temperature reflector surface shape control device is used to control the reflector surface shape of a synchrotron radiation and free electron laser device, such as Figure 1As shown, it includes: a reflector body 100, a first heating control module 210 and a first cooling control module 310. The reflector body 100, the first heating control module 210 and the first cooling control module 310 are all rectangular parallelepiped structures; the upper surface of the reflector body 100 is a reflecting surface; the first side surface of the reflector body 100 is an adjacent surface of the upper surface of the reflector body 100, and the first side surface of the reflector body 100 is in contact with the first contact surface of the first heating control module 210; the second contact surface of the first heating control module 210 is an opposite surface to the first contact surface of the first heating control module 210, and the second contact surface of the first heating control module 210 is in contact with the contact surface of the first cooling control module 310; the first cooling control module 310 is provided with a first cooling pipe 310a, and a cooling medium passes through the first cooling pipe 310a.

[0048] The first heating control module 210 is used to heat the reflector body 100 through the built-in first heating unit 210a to compensate the surface shape of the reflector; the first cooling control module 310 is used to cool the entire system through a cooling medium to control the surface shape of the reflector.

[0049] Specifically, the first side surface of the reflector body 100 contacts the first contact surface of the first heating control module 210, and the second contact surface of the first heating control module 210 contacts the contact surface of the first cooling control module 310. The reflector body 100 is heated by the first heating unit 210a built in the first heating control module 210, so as to compensate the surface shape of the reflected light in the reflector body 100. The cooling medium of the first cooling pipe 310a in the first cooling control module 310 is used to take away the heat of the entire system, so as to further increase the heat dissipation effect, ensure the control effect of the reflector surface shape, and be able to handle the reflection process of a higher power light source.

[0050] like Figure 2As shown, in some embodiments, the reflector surface shape control device also includes: a second heating control module 220 and a second cooling control module 320; the second heating control module 220 and the second cooling control module 320 are both rectangular parallelepiped structures; the second side surface of the reflector body 100 is the opposite surface of the first side surface of the reflector body 100; the second side surface of the reflector body 100 is in contact with the first contact surface of the second heating control module 220; the second contact surface of the second heating control module 220 is the opposite surface of the first contact surface of the second heating control module 220, and the second contact surface of the second heating control module 220 is in contact with the contact surface of the second cooling control module 320; a second cooling pipe 320a is provided in the second cooling control module 320, and a cooling medium passes through the second cooling pipe 320a; wherein the second heating control module 220 is used to heat the reflector body 100 through the built-in second heating unit 220a to compensate for the surface shape of the reflector; the second cooling control module 320 is used to cool down the entire system through the cooling medium to control the surface shape of the reflector.

[0051] like Figure 3 As shown, in some embodiments, the low-temperature reflector surface shape control device also includes: a heating controller 400; the heating controller 400 is connected to the first heating unit 210a; the heating controller 400 is used to determine the first heating control instruction of the first heating unit 210a according to the surface shape of the reflector.

[0052] In some embodiments, the first heating unit 210a includes: a plurality of electric heating plates connected to a heating controller; wherein the electric heating plates are arranged on the upper surface of the first heating control module 210; the upper surface of the first heating control module 210 is an adjacent surface to the first contact surface of the first heating control module 210, and the upper surface of the first heating control module 210 is located in the same plane as the reflecting surface of the reflector body 100.

[0053] In some embodiments, the heating controller 400 is also connected to the second heating unit 220a; the heating controller 400 is also used to determine the second heating control instruction of the second heating unit 220a of the second heating control module 220 according to the beam surface shape of the reflector.

[0054] In some embodiments, the second heating unit 220a includes: a plurality of electric heating plates connected to the heating controller 400; wherein the electric heating plates are arranged on the upper surface of the second heating control module 220; the upper surface of the second heating control module 220 is an adjacent surface to the first contact surface of the second heating control module 220, and the upper surface of the second heating control module 220 is located in the same plane as the reflecting surface of the reflector body 100.

[0055] In some embodiments, an indium sheet is used to fill the space between the first side surface of the reflector body 100 and the first contact surface of the first heating control module 210; an indium sheet is used to fill the space between the second contact surface of the first heating control module 210 and the contact surface of the first cooling control module 310; an indium sheet is used to fill the space between the second side surface of the reflector body 100 and the first contact surface of the second heating control module 220; and an indium sheet is used to fill the space between the second contact surface of the second heating control module 220 and the contact surface of the second cooling control module 320. Filling with indium sheets can improve the thermal conductivity between the contact surfaces.

[0056] In some embodiments, a copper block of a cooling pipe is provided in both the first cooling control module 310 and the second cooling control module 320; the cooling pipe is filled with 80K liquid nitrogen. In the prior art, when water cooling is used, the material properties change less with temperature, while when low-temperature cooling such as a copper block is used, the material properties change more with temperature, which can better utilize the low-temperature properties of the material, which is beneficial for surface compensation.

[0057] Figure 4 It can be seen from the schematic diagram of the three-dimensional model of the low-temperature mirror surface shape control device shown that the length, width and height dimensions of the mirror body 100 are 700mm, 60mm, 60mm respectively; the two sides of the mirror body 100 are respectively the first heating control module 210 and the second heating control module 220, and the length, width and height dimensions of the first heating control module 210 and the second heating control module 220 are respectively 700mm, 20mm, 60mm.

[0058] The first cooling control module 310 and the second cooling control module 320 are both provided with a copper block, and the length, width and height of the copper block are respectively 700 mm, 20 mm and 60 mm; the inner diameters of the first cooling pipe 310a and the second cooling pipe 320a in the copper block are both 8 mm. The materials of the reflector body 100, the first heating control module 210 and the second heating control module 220 are all single crystal silicon. Figure 4 The straight line area on the reflector body 100 is the light spot 40. The surface of the reflector body 100 absorbs 16.6W of power, and 80K liquid nitrogen is introduced into the copper block.

[0059] The surfaces of the first heating unit 210a and the second heating unit 220a are provided with electric heating sheets. In actual scenarios, multiple electric heating sheets may be provided. For example, the size of the electric heating sheets is 45mm×8mm, and the spacing between them is 3mm. It can be seen that Figure 4 The low-temperature reflector surface shape control device is a sandwich structure, which is convenient for engineering implementation.

[0060] It can be seen from the low-temperature reflector surface shape control device provided in the above embodiment that a heating control module and a cooling control module can be respectively arranged on both sides of the reflector, and a cooling pipe is arranged in the cooling control module. A cooling medium flows through the cooling pipe for cooling the reflector body; the heating control module is used to compensate for the surface shape of the reflector surface. The low-temperature reflector surface shape control device can handle high heat loads while compensating for the reflector surface shape, thereby solving the shortcomings of the current water cooling solution.

[0061] An embodiment of the present invention also provides a synchrotron radiation device, including a light source system and a cryogenic reflector surface shape control device as mentioned in the above embodiment, wherein the cryogenic reflector surface shape control device is used to control the surface shape of the reflector irradiated by the light source system.

[0062] An embodiment of the present invention provides a free electron laser device, including a light source system and a low-temperature reflector surface shape control device as mentioned in the above embodiment, wherein the low-temperature reflector surface shape control device is used to control the surface shape of the reflector irradiated by the light source system.

[0063] The cryogenic mirror surface shape control device provided in the embodiment of the present invention has the same technical features as the cryogenic mirror surface shape control device provided in the above embodiment, so it can also solve the same technical problems and achieve the same technical effects. For the sake of brief description, for matters not mentioned in the embodiment part, reference can be made to the corresponding contents in the above embodiment.

[0064] In the above synchrotron radiation device and free electron laser device, the error curve results when the cryogenic mirror surface control device is not used are as follows: Figure 5 As shown, the error curve results when using the low temperature reflector surface control device are as follows Figure 6 shown. Figure 5 and Figure 6 The error curves in are the height error curve and the slope error curve. Figure 5 From the error curve results, we can see that the RMS value of the height error is 1.8nm, and the RMS value of the slope error is 34.9nrad; Figure 6 From the error curve results, we can see that the RMS value of the height error is 0.67nm, and the RMS value of the slope error is 5.8nrad. Figure 5 and Figure 6 It can be seen from the comparison results that after using the cryogenic mirror surface control device, the height error and slope error of the mirror surface are reduced by an order of magnitude, achieving a height error RMS in the sub-nanometer order and a slope error RMS in the nrad order, which can meet the stringent requirements of synchrotron radiation light sources and high repetition rate free electron laser devices on surface shape.

[0065] In the several embodiments provided in the present application, it should be understood that the disclosed systems, devices and methods can be implemented in other ways. The device embodiments described above are merely schematic. For example, the division of the units is only a logical function division. There may be other division methods in actual implementation. For example, multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed. Another point is that the mutual coupling or direct coupling or communication connection shown or discussed can be through some communication interfaces, indirect coupling or communication connection of devices or units, which can be electrical, mechanical or other forms.

[0066] The units described as separate components may or may not be physically separated, and the components shown as units may or may not be physical units, that is, they may be located in one place or distributed on multiple network units. Some or all of the units may be selected according to actual needs to achieve the purpose of the solution of this embodiment.

[0067] In addition, each functional unit in each embodiment of the present invention may be integrated into one processing unit, or each unit may exist physically separately, or two or more units may be integrated into one unit.

[0068] Finally, it should be noted that the above-described embodiments are only specific implementations of the present invention, which are used to illustrate the technical solutions of the present invention, rather than to limit them. The protection scope of the present invention is not limited thereto. Although the present invention is described in detail with reference to the above-described embodiments, ordinary technicians in the field should understand that any technician familiar with the technical field can still modify the technical solutions recorded in the above-described embodiments within the technical scope disclosed by the present invention, or can easily think of changes, or make equivalent replacements for some of the technical features therein; and these modifications, changes or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present invention, and should be included in the protection scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.

Claims

1. A low temperature reflector surface shape control device, characterized in that: The low-temperature reflector surface shape control device is used to control the reflector surface shape of a synchrotron radiation and free electron laser device, and comprises: a reflector body, a first heating control module and a first cooling control module; The reflector body, the first heating control module and the first cooling control module are all rectangular parallelepiped structures; the upper surface of the reflector body is a reflecting surface; the first side surface of the reflector body is an adjacent surface of the upper surface of the reflector body, and the first side surface of the reflector body is in contact with the first contact surface of the first heating control module; The second contact surface of the first heating control module is an opposite surface of the first contact surface of the first heating control module, and the second contact surface of the first heating control module is in contact with the contact surface of the first cooling control module; the first cooling control module is provided with a first cooling pipeline, and a cooling medium flows through the first cooling pipeline; Among them, the first heating control module is used to heat the reflector body through the built-in first heating unit to compensate for the surface shape of the reflector; the first cooling control module is used to cool the entire system through the cooling medium to control the surface shape of the reflector.

2. The cryogenic mirror surface shape control device according to claim 1, characterized in that: The low-temperature reflector surface shape control device further includes: a second heating control module and a second cooling control module; The second heating control module and the second cooling control module are both rectangular parallelepiped structures; the second side surface of the reflector body is an opposite side of the first side surface of the reflector body; the second side surface of the reflector body is in contact with the first contact surface of the second heating control module; The second contact surface of the second heating control module is the opposite surface of the first contact surface of the second heating control module, and the second contact surface of the second heating control module is in contact with the contact surface of the second cooling control module; the second cooling control module is provided with a second cooling pipeline, and a cooling medium flows through the second cooling pipeline; Among them, the second heating control module is used to heat the reflector body through the built-in second heating unit to compensate for the surface shape of the reflector; the second cooling control module is used to cool the entire system through the cooling medium to control the surface shape of the reflector.

3. The cryogenic mirror surface shape control device according to claim 2, characterized in that: The low-temperature reflector surface shape control device further includes: a heating controller; the heating controller is connected to the first heating unit; The heating controller is used to determine a first heating control instruction of the first heating unit according to the surface shape of the reflecting mirror.

4. The cryogenic mirror surface shape control device according to claim 3, characterized in that: The first heating unit comprises: a plurality of electric heating plates connected to a heating controller; Wherein, the electric heating plate is arranged on the upper surface of the first heating control module; the upper surface of the first heating control module is an adjacent surface to the first contact surface of the first heating control module, and the upper surface of the first heating control module and the reflecting surface of the reflector body are located in the same plane.

5. The cryogenic mirror surface shape control device according to claim 3, characterized in that: The heating controller is also connected to the second heating unit; The heating controller is further used to determine a second heating control instruction of the second heating unit of the second heating control module according to the surface shape of the reflecting mirror.

6. The cryogenic mirror surface shape control device according to claim 5, characterized in that: The second heating unit comprises: a plurality of electric heating plates connected to the heating controller; Wherein, the electric heating plate is arranged on the upper surface of the second heating control module; the upper surface of the second heating control module is an adjacent surface to the first contact surface of the second heating control module, and the upper surface of the second heating control module and the reflecting surface of the reflector body are located in the same plane.

7. The cryogenic mirror surface shape control device according to claim 2, characterized in that: An indium sheet is used to fill the space between the first side surface of the reflector body and the first contact surface of the first heating control module; The second contact surface of the first heating control module and the contact surface of the first cooling control module are filled with an indium sheet; An indium sheet is used to fill the space between the second side surface of the reflector body and the first contact surface of the second heating control module; An indium sheet is used to fill the space between the second contact surface of the second heating control module and the contact surface of the second cooling control module.

8. The cryogenic mirror surface shape control device according to claim 2, characterized in that: The first cooling control module and the second cooling control module are both provided with copper blocks of cooling pipes; the cooling pipes are filled with 80K liquid nitrogen.

9. A synchrotron radiation device, characterized in that: It comprises a light source system and a low-temperature reflector surface shape control device as described in any one of claims 1 to 8, wherein the low-temperature reflector surface shape control device is used to control the surface shape of the reflector illuminated by the light source system.

10. A free electron laser device, characterized in that: It comprises a light source system and a low-temperature reflector surface shape control device as described in any one of claims 1 to 8, wherein the low-temperature reflector surface shape control device is used to control the surface shape of the reflector illuminated by the light source system.

Images