The gas hood gas distribution plate system of a high-temperature purification device

Abstract

The present invention relates to the technical field of purification equipment, in particular to an air hood gas distribution plate system for high-temperature purification equipment. In view of the existing technical problems, the following solutions are proposed. It includes a base and a gas distribution plate mechanism and a loading mechanism arranged inside the base. The loading mechanism is located above the gas distribution plate mechanism, and both the loading mechanism and the gas distribution plate mechanism are horizontally arranged. An injection flange is provided at the bottom end of the gas distribution plate mechanism, and an air duct is arranged inside the gas distribution plate mechanism. The air duct has a snowflake-like structure. For this air hood gas distribution plate system of high-temperature purification equipment, with a unique air duct structure, it can effectively reduce the air duct resistance, which is beneficial to the diffusion of purified gas inside the air hood, and can make the gas blow vertically onto the loading tray more evenly and comprehensively. The loading tray is dynamically adjustable and can rotate dynamically around a fixed plumb line to drive the loading tray to always maintain a dynamic horizontal state, which can improve the purification effect of the purified gas passing through the material.

Description

Technical Field

[0001] The present invention belongs to the technical field of purification equipment, and particularly relates to an air hood gas distribution plate system for a high-temperature purification equipment. Background Art

[0002] The high-temperature purification equipment belongs to vacuum thermal equipment. It adopts advanced high-temperature purification technology. Through ultra-high temperature (≥2200°C) vacuum atmosphere and freon gas, impurity elements in materials such as graphite, hard carbon felt, and graphite powder are evaporated or low-melting-point chlorides are generated and excluded from the product itself to achieve the purpose of purification. These purified materials are the basic materials for producing third-generation semiconductor materials.

[0003] For the high-temperature purification equipment, the design of the air hood gas distribution plate system for the purification gas has a great influence on the purification effect. A good design of the air hood gas distribution plate system can improve the purification effect of the materials. Summary of the Invention

[0004] The purpose of the present invention is to provide an air hood gas distribution plate system for a high-temperature purification equipment with a simple structure and reasonable design in order to solve the above problems.

[0005] The present invention realizes the above purpose through the following technical solutions:

[0006] An air hood gas distribution plate system for a high-temperature purification equipment, including a base and a gas distribution plate mechanism and a loading mechanism arranged in the base. The loading mechanism is located above the gas distribution plate mechanism, and both the loading mechanism and the gas distribution plate mechanism are horizontally arranged;

[0007] The bottom end of the gas distribution plate mechanism is provided with an injection flange, and an air duct is arranged inside the gas distribution plate mechanism. The air duct has a snowflake-like structure, and air holes are arranged on the upper surface of the air duct structure of the gas distribution plate;

[0008] The middle part of the loading mechanism is provided with a breathable membrane, and the purification materials required by the high-temperature purification equipment are spread on the upper surface of the breathable membrane. The gas distribution plate mechanism injects purification gas through the injection flange, and the gas exits through the air duct and the air holes to perform purification operations on the purification materials spread on the breathable membrane.

[0009] As a further optimized scheme of the present invention, the gas distribution plate mechanism includes a plate body. The vertical cross-section of the plate body is in an "I" - shaped structure, and a sealing ring is clamped on the outer wall of the plate body, and the sealing ring abuts against the inner wall of the base.

[0010] As a further optimized scheme of the present invention, a number of support units are distributed on the inner edge of the bottom end of the base, and the loading mechanism is installed inside the number of support units.

[0011] As a further optimized solution of the present invention, the support unit includes a through rod, a lower support piece, an upper support piece and a support spring. The support spring, the lower support piece and the upper support piece are all sleeved on the outer wall of the through rod, and the support spring is located between the end faces of the lower support piece and the upper support piece. The lower support piece and the upper support piece are in an L-shaped structure, and the lower ends of the lower support piece and the upper support piece face the inside of the base.

[0012] As a further optimized solution of the present invention, the loading mechanism includes a loading tray and a balancing unit. The balancing unit is arranged on the upper surface of the loading tray and is concentrically and horizontally arranged with the loading tray.

[0013] As a further optimized solution of the present invention, the balancing unit includes a balancing slideway and a magnetic rolling ball. The magnetic rolling ball is connected to the inner wall of the balancing slideway in a rolling manner.

[0014] As a further optimized solution of the present invention, a support ring is provided on the outer edge of the loading tray, and fixing grooves are equidistantly distributed on the outer wall of the support ring. The groove shape of the fixing groove is adapted to the outer diameter of the through rod.

[0015] As a further optimized solution of the present invention, sensing electromagnetic components are annularly distributed on the outer wall of the bottom end of the loading tray, and the sensing electromagnetic components are arranged directly below the balancing channel.

[0016] As a further optimized solution of the present invention, the sensing electromagnetic component includes an inclination sensor and an electromagnet, and the inclination sensor and the electromagnet are electrically connected.

[0017] As a further optimized solution of the present invention, a top air shield is detachably connected to the top of the base, and an air vent gap is provided at the connection between the top air shield and the base.

[0018] The beneficial effects of the present invention are as follows: The unique airway structure in the air shield air distribution plate system of the present invention effectively reduces the airway resistance, which is beneficial to the diffusion of the purified gas inside the air shield, and can make the gas blow vertically to the loading tray more evenly and comprehensively. At the same time, the structure of the loading tray is dynamically adjusted to form a dynamic rotation adjustment around the plumb line, which can drive the loading tray to be in a dynamic horizontal state. The purified gas can improve the purification effect of the material. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 is an assembly structure schematic diagram of an air shield air distribution plate system of a high-temperature purification device proposed by the present invention;

[0020] Figure 2 is Figure 1 the structural schematic diagram of the air distribution plate mechanism;

[0021] Figure 3 is Figure 2 the bottom side structural schematic diagram;

[0022] Figure 4 is Figure 2 a top-down perspective structural schematic diagram;

[0023] Figure 5 is a structural schematic diagram of a load-carrying mechanism of an air hood air distribution plate system of a high-temperature purification device proposed by the present invention;

[0024] Figure 6 is Figure 5 a bottom-side structural schematic diagram;

[0025] Figure 7 is a structural schematic diagram of a support unit of an air hood air distribution plate system of a high-temperature purification device proposed by the present invention;

[0026] Figure 8 is a structural schematic diagram of a load-carrying tray of an air hood air distribution plate system of a high-temperature purification device proposed by the present invention;

[0027] Figure 9 is a schematic diagram of dynamic adjustment of gas input of an air hood air distribution plate system of a high-temperature purification device proposed by the present invention.

[0028] In the figure: 100, base; 200, air distribution plate mechanism; 210, plate body; 220, air holes; 230, sealing ring; 240, gas injection flange; 250, air duct; 300, load-carrying mechanism; 310, load-carrying tray; 311, support ring; 312, fixing groove; 320, support unit; 321, through rod; 322, lower support piece; 323, upper support piece; 324, support spring; 330, balance unit; 331, balance slideway; 332, magnetic rolling ball; 340, sensing electromagnetic part; 400, top air baffle; 500, breathable film. Specific embodiments

[0029] The following further describes the present application in detail with reference to the drawings. It is necessary to point out here that the following specific embodiments are only used to further illustrate the present application and cannot be understood as limiting the protection scope of the present application. Those skilled in the art can make some non-essential improvements and adjustments to the present application according to the above application content. Embodiment 1

[0030] Referring to Figures 1-9 as shown, in this embodiment, an air hood air distribution plate system of a high-temperature purification device is proposed, including a base 100, an air distribution plate mechanism 200 disposed in the base 100, and a load-carrying mechanism 300. The load-carrying mechanism 300 is located above the air distribution plate mechanism 200, and both the load-carrying mechanism 300 and the air distribution plate mechanism 200 are horizontally arranged;

[0031] The bottom end of the gas distribution plate mechanism 200 is provided with an injection flange 240, and an air passage 250 is arranged inside the gas distribution plate mechanism 200. The air passage 250 has a snowflake-like structure, and air holes 220 are arranged on the upper surface of the gas distribution plate structure located in the air passage 250;

[0032] A breathable membrane 500 is arranged in the middle of the loading mechanism 300, and the purification material required by the high-temperature purification equipment is spread on the upper surface of the breathable membrane 500. The gas distribution plate mechanism 200 injects purified gas through the injection flange 240, and discharges gas through the air passage 250 and the air holes 220 to purify the purification material spread on the breathable membrane 500.

[0033] The gas distribution plate mechanism 200 includes a disk body 210. The vertical cross-section of the disk body 210 has an "I"-shaped structure. A sealing ring 230 is clamped on the outer wall of the disk body 210, and the sealing ring 230 abuts against the inner wall of the base 100.

[0034] A number of support units 320 are distributed on the inner edge of the bottom end of the base 100, and the loading mechanism 300 is installed inside the number of support units 320.

[0035] The support unit 320 includes a through rod 321, a lower support piece 322, an upper support piece 323 and a support spring 324. The support spring 324, the lower support piece 322 and the upper support piece 323 are all sleeved on the outer wall of the through rod 321, and the support spring 324 is located between the end faces of the lower support piece 322 and the upper support piece 323. The lower support piece 322 and the upper support piece 323 have an L-shaped structure, and the lower ends of the lower support piece 322 and the upper support piece 323 face the inside of the base 100.

[0036] The loading mechanism 300 includes a loading tray 310 and a balancing unit 330. The balancing unit 330 is arranged on the upper surface of the loading tray 310, and the balancing unit 330 is concentrically and horizontally arranged with the loading tray 310.

[0037] The balancing unit 330 includes a balancing slideway 331 and a magnetic rolling ball 332. The magnetic rolling ball 332 is connected to the inner wall of the balancing slideway 331 in a rolling manner.

[0038] A support ring 311 is arranged on the outer edge of the loading tray 310, and fixing grooves 312 are equidistantly distributed on the outer wall of the support ring 311. The groove shape of the fixing grooves 312 is adapted to the outer diameter of the through rod 321.

[0039] Sensing electromagnetic components 340 are annularly distributed on the outer wall of the bottom end of the loading tray 310, and the sensing electromagnetic components 340 are arranged directly below the balancing channel.

[0040] The sensing electromagnetic component 340 includes an inclination sensor and an electromagnet, and the inclination sensor and the electromagnet are electrically connected.

[0041] The top of the base 100 is detachably connected with a top air baffle 400. An air vent gap is provided at the connection between the top air baffle 400 and the base 100. The base 100 and the top air baffle 400 form a closed purification chamber;

[0042] It should be noted that for the air baffle air distribution plate system of this high-temperature purification equipment, during use, by installing the breathable membrane 500 on the loading tray 310, the installation of the loading tray 310 and the breathable membrane 500 is a detachable installation. The breathable membrane 500 can allow the purified gas to pass through, but the materials to be purified cannot pass through. A plurality of loading mechanisms 300 are installed on the through rod 321. As shown in the appendix Figure 1 For example, taking two loading mechanisms 300 as an example, they are arranged in parallel by the upper and lower support pieces 322. The plumb distance between the two loading mechanisms 300 is not less than 15 mm. After filling the materials into the breathable membrane 500, the top of the base 100 is covered by the top air baffle 400, and then the purification operation is carried out. The specific usage process of the air baffle air distribution plate system is as follows:

[0043] One end of the injection flange 240 is connected to the gas source of the purified gas, and the gas source is introduced into the air duct 250. The air duct 250 is composed of the leaf-shaped air duct 250 passages of the branches, and there are air holes 220 with uneven and different sizes in the air duct 250 passages. The inner diameter of the air holes 220 near the middle is smaller and the number is less;

[0044] The size of the air holes 220 is designed such that the size of the air holes 220 in the central area < the size of the air holes 220 in the middle area < the size of the air holes 220 in the edge area; the number of air holes 220 per unit area of the air holes 220 at the air baffle air distribution plate base is designed as: central area < middle area < edge area, which can ensure that the amount of purified gas received at any position in the purification chamber is basically the same, ensuring the purification effect of all purified materials in the purification area;

[0045] The leaf-shaped air duct 250 structure of each branch of the air duct 250 can effectively reduce the resistance of the air duct 250, which is beneficial to the diffusion of the purified gas inside the air baffle. The ventilation path of the air baffle air distribution plate base is designed to be the same from the center to the edge;

[0046] The purified gas vented from the air holes 220 passes through the breathable membrane 500, and the impurities in the material to be purified thereon are carried away. If the purified gas passing through the air holes 220 is uneven, it will drive the disk body 210 to tilt, that is, the gas output of one side of the air holes 220 is greater than that of the other side. At this time, the disk body 210 will tilt to the side with less gas output. The inclination sensor in the sensing electromagnetic part 340 detects this tilting state, and the electromagnet operates. The electromagnet operates in a clockwise or counterclockwise manner, driving the magnetic ball 332 inside to the higher end of the disk body 210 in the tilted state. At this time, it will drive the disk body 210 to return to the balanced state, so that the gas vented from the gas distribution disk still passes horizontally through the breathable membrane 500, avoiding the accumulation of materials on the breathable membrane 500 and reducing the exchange surface area between the materials and the gas during the purification process;

[0047] When the gas output of the disk body 210 is uneven, under the combined adjustment of the inclination sensor and the electromagnet in the sensing electromagnetic part 340, it will drive the magnetic ball 332 to roll in the balance slideway 331, adjusting the inclination angle of the disk body 210, that is, the plumb line of the disk body 210 remains unchanged, and the disk body 210 rotates around the edge of its disk body 210 until it tends to the horizontal state. During this process, the support unit 320 dynamically adjusts to cooperate with the rotation action of the magnetic ball 332 in the balance slide;

[0048] One end of the support spring 324 located on the lower support piece 322 is stretched, and one end of the support spring 324 located on the upper support piece 323 is squeezed. Specifically, the tilting of the disk body 210 causes the support piece to move along the through rod 321, thereby pulling the support spring 324. After the magnetic ball 332 is adjusted, the support spring 324 will dynamically adjust when the support piece moves;

[0049] The unique air duct 250 structure in this air hood gas distribution disk system can make the gas blow vertically to the loading tray 310 more evenly and comprehensively. At the same time, the structure of the loading tray 310 is dynamically adjusted to form a dynamic rotation adjustment around the plumb line, which can drive the loading tray 310 to be in a dynamic horizontal state. The passing of the purified gas can improve the purification effect of the material.

[0050] The embodiments of this example have been described above in conjunction with the accompanying drawings. However, this example is not limited to the above specific implementation manners. The above specific implementation manners are merely illustrative and not restrictive. Under the inspiration of this example, those of ordinary skill in the art can also make many forms without departing from the purpose of this example and the scope protected by the claims, and all belong to the protection scope of this example.

Claims

1. An air hood air distribution disc system for a high-temperature purification device, comprising a base (100), an air distribution disc mechanism (200) and a load-carrying mechanism (300) arranged inside the base (100). Characterized in that: The load-carrying mechanism (300) is located above the air distribution disc mechanism (200), and both the load-carrying mechanism (300) and the air distribution disc mechanism (200) are horizontally arranged; A gas injection flange (240) is provided at the bottom end of the air distribution disc mechanism (200), and an air passage (250) is arranged inside the air distribution disc mechanism (200). The air passage (250) has a snowflake-like structure, and air holes (220) are provided on the upper surface of the air distribution disc structure located in the air passage (250); A breathable membrane (500) is arranged in the middle of the load-carrying mechanism (300), and the purification material required by the high-temperature purification device is spread on the upper surface of the breathable membrane (500). The air distribution disc mechanism (200) injects purified gas through the gas injection flange (240) and discharges gas through the air passage (250) and the air holes (220) to purify the purification material spread on the breathable membrane (500); A number of support units (320) are distributed on the inner edge of the bottom end of the base (100), and the load-carrying mechanism (300) is installed inside the number of support units (320); The support unit (320) includes a through rod (321), a lower support piece (322), an upper support piece (323) and a support spring (324). The support spring (324), the lower support piece (322) and the upper support piece (323) are all sleeved on the outer wall of the through rod (321), and the support spring (324) is located between the end faces of the lower support piece (322) and the upper support piece (323). The lower support piece (322) and the upper support piece (323) are in an L-shaped structure, and the lower ends of the lower support piece (322) and the upper support piece (323) face the inside of the base (100); The load-carrying mechanism (300) includes a load-carrying tray (310) and a balancing unit (330). The balancing unit (330) is arranged on the upper surface of the load-carrying tray (310), and the balancing unit (330) is concentrically and horizontally arranged with the load-carrying tray (310); The balancing unit (330) includes a balancing slideway (331) and magnetic balls (332), and the magnetic balls (332) are connected to the inner wall of the balancing slideway (331) in a rolling manner; Sensing electromagnetic parts (340) are annularly distributed on the outer wall of the bottom end of the load-carrying tray (310), and the sensing electromagnetic parts (340) are arranged directly below the balancing channel; The sensing electromagnetic part (340) includes an inclination sensor and an electromagnet, and the inclination sensor and the electromagnet are electrically connected.

2. An air hood air distribution disc system for a high-temperature purification device according to claim 1, Characterized in that: The air distribution disc mechanism (200) further includes a disc body (210). The vertical cross-section of the disc body (210) is in an "I" - shaped structure. A sealing ring (230) is clamped on the outer wall of the disc body (210), and the sealing ring (230) abuts against the inner wall of the base (100).

3. An air hood air distribution disc system for a high-temperature purification device according to claim 2, Characterized in that: A support ring (311) is provided on the outer edge of the load tray (310), and fixing grooves (312) are equidistantly distributed on the outer wall of the support ring (311). The groove type of the fixing groove (312) is adapted to the outer diameter of the through rod (321).

4. The air hood air distribution plate system of a high-temperature purification device according to claim 3, characterized in that: A top air baffle (400) is detachably connected to the top of the base (100), and an air vent gap is provided at the connection between the top air baffle (400) and the base (100).

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