A gas supply system for an inductively coupled plasma source with early warning function

Abstract

The present invention discloses a gas supply system for an inductively coupled plasma source with an early warning function, comprising: a first gas cylinder, a first pressure-stabilizing valve, a first mass flow controller, a second mass flow controller, a third mass flow controller, a first digital pressure gauge, a second digital pressure gauge, a controller, and an atomizer, wherein: the first gas cylinder stores high-pressure and high-purity argon gas; the first pressure-stabilizing valve is connected to the gas outlet of the first gas cylinder; the first pressure-stabilizing valve reduces and stabilizes the high-pressure and high-purity argon gas output from the first gas cylinder; the output end of the first pressure-stabilizing valve is connected to the first mass flow controller, the second mass flow controller, the third mass flow controller, and the first digital pressure gauge; and the controller is connected to the first mass flow controller, the second mass flow controller, the third mass flow controller, the first digital pressure gauge, and the second digital pressure gauge.

Description

Technical Field

[0001] The present invention relates to a gas supply system, in particular to a gas supply system capable of providing an early warning function and supplying gas to an inductively coupled plasma source. Background Art

[0002] An inductively coupled plasma (ICP) source can be used as both a light source and a spectrometer in an inductively coupled plasma atomic emission spectrometer (ICP-OES), or as an ion source and a mass spectrometer in an inductively coupled plasma mass spectrometer (ICP-MS). The ICP source offers high temperatures, strong excitation capabilities, and minimal matrix effects, making it a preferred source for both light and ion sources and a key component of these instruments.

[0003] An ICP source requires three working gases for operation: plasma gas, auxiliary gas, and carrier gas, all typically argon. In the past, ICP sources typically used glass float flowmeters and needle valves to manually adjust the working gas flow rates. Gas pressure and environmental conditions significantly affected the gas flow rates, resulting in poor stability. With advances in sensor and electronics technology, most ICP sources now use mass flow controllers (MFCs) instead of glass float flowmeters and needle valves to control the working gas flow rates. This allows for automatic control and gas flow readback, resulting in improved system stability (Reference Patent: CN101718699A).

[0004] The ICP source requires a continuous supply of three gases for normal operation. If the gas supply gradually depletes and the required gas flow rate is insufficient, the plasma will extinguish, interrupting the test. This situation wastes considerable time and requires retesting, which is unacceptable to instrument users. Furthermore, insufficient gas supply can lead to insufficient cooling of the system, causing the torque tube to burn out and hardware damage.

[0005] Currently, a common method for warning of insufficient gas supply is a pressure switch. The pressure switch is connected to the gas supply pipeline. When the gas supply pressure is lower than a certain value, the pressure switch will be triggered to generate an electrical signal, thereby transmitting the signal of insufficient gas supply (reference patents: CN215811396U; CN204007995U; CN203797350U).

[0006] However, the disadvantage of this method is that when the pressure switch is triggered, the gas supply is already at the limit of insufficient pressure. At this time, the system can only perform a protective shutdown operation, which makes it difficult to give the user sufficient time to refill the gas.

[0007] Furthermore, the carrier gas from the ICP source drives the nebulizer, atomizing the liquid sample. This inevitably introduces tiny impurities into the liquid, potentially causing nebulizer blockage and affecting the stability and accuracy of instrument data. If the system doesn't alert users to nebulizer blockage, the user often only discovers the anomaly during data analysis, forcing the test to be restarted, wasting significant time. Summary of the Invention

[0008] The present invention provides a gas supply system for an inductively coupled plasma source with an early warning function, which is used for early warning of insufficient gas supply and atomizer blockage.

[0009] To achieve the above-mentioned object, the present invention provides a gas supply system for an inductively coupled plasma source with an early warning function, comprising: a first gas cylinder, a first pressure-stabilizing valve, a first mass flow controller, a second mass flow controller, a third mass flow controller, a first digital pressure gauge, a second digital pressure gauge, a controller, and an atomizer, wherein:

[0010] The first gas cylinder contains high-pressure and high-purity argon gas.

[0011] The first pressure-stabilizing valve is connected to the gas outlet of the first gas cylinder, and the first pressure-stabilizing valve reduces and stabilizes the pressure of the high-pressure and high-purity argon gas output from the first gas cylinder;

[0012] The output end of the first pressure stabilizing valve is connected to the first mass flow controller, the second mass flow controller, the third mass flow controller and the first digital pressure gauge;

[0013] The controller is connected to the first mass flow controller, the second mass flow controller, the third mass flow controller, the first digital pressure gauge and the second digital pressure gauge,

[0014] The first digital pressure gauge converts the argon pressure output by the first pressure regulating valve into an electrical signal and sends the electrical signal to the controller;

[0015] The controller controls the flow rate of argon gas output by the first mass flow controller to be within a first range so as to be used as plasma gas for the ICP source system.

[0016] The controller controls the flow rate of argon gas output by the second mass flow controller to be within a second range so as to be used as an auxiliary gas for the ICP source system.

[0017] The controller controls the argon flow rate output by the third mass flow controller to be within a third range so as to be used as a carrier gas for the ICP source system, and the carrier gas output end is connected to the atomizer and the second digital pressure gauge.

[0018] The second digital pressure gauge converts the pressure of the carrier gas into an electrical signal and sends the electrical signal to the controller.

[0019] In a preferred embodiment of the present invention, the gas supply system of the inductively coupled plasma source with an early warning function further includes a plurality of second gas cylinders and a plurality of second pressure-stabilizing valves, wherein the plurality of second pressure-stabilizing valves are respectively connected to the gas outlets of the plurality of second gas cylinders, the output ends of the plurality of second pressure-stabilizing valves are connected to the output end of the first pressure-stabilizing valve, and the plurality of second pressure-stabilizing valves respectively reduce and stabilize the pressure of the high-pressure, high-purity argon gas output from the plurality of second gas cylinders.

[0020] In a preferred embodiment of the present invention, the gas supply system of the inductively coupled plasma source with an early warning function further includes a fourth mass flow controller, which is connected to the output end of the first pressure regulating valve and the controller. The controller controls the argon flow rate output by the fourth mass flow controller to be within a fourth range to serve as a backup gas for the ICP source system.

[0021] In a preferred embodiment of the present invention, the first range is 0 to 20 L / min, the second range is 0 to 2 L / min, the third range is 0 to 2 L / min, and the fourth range is 0 to 2 L / min.

[0022] In a preferred embodiment of the present invention, the argon pressure output by the first pressure-stabilizing valve and the second pressure-stabilizing valve are both stabilized at 6-7 bar.

[0023] In a preferred embodiment of the present invention, the controller is provided with a first gas supply warning pressure threshold value P_Hi and a second gas supply warning pressure threshold value P_Lo, and the first pressure regulating valve is adjusted so that the argon pressure initially output by the first pressure regulating valve is greater than the first gas supply warning pressure threshold value P_Hi. The controller monitors the argon pressure value P1 output by the first pressure regulating valve detected by the first digital pressure gauge in real time.

[0024] When P1 is between P_Lo and P_Hi, the controller outputs an air supply shortage warning message.

[0025] When P1 is less than P_Lo, the controller outputs an air supply shortage alarm message and an emergency shutdown command.

[0026] When the rate of decrease of P1 is greater than k×V0 / ((L1+L2+L3+L4) / 60), the controller outputs a gas supply shortage alarm message, where V0 is the total volume of the gas supply system, L1, L2, L3, and L4 are the current argon flow rates output by the first mass flow controller, the second mass flow controller, the third mass flow controller, and the fourth mass flow controller, respectively, and k is the adjustment coefficient, with 0<k<1. In a preferred embodiment of the present invention, the argon pressure initially output by the first pressure-stabilizing valve is 0.05 to 0.5 bar higher than the first gas supply warning pressure threshold.

[0027] In a preferred embodiment of the present invention, the controller is provided with a carrier gas pressure blockage threshold, and the controller monitors the carrier gas pressure value P2 detected by the second digital pressure gauge in real time. When P2 is greater than the carrier gas pressure blockage threshold, the controller outputs a blockage alarm for the atomizer.

[0028] In a preferred embodiment of the present invention, the carrier gas pressure blockage threshold is between 1 and 5 bar, the first gas supply warning pressure threshold is between 5.5 and 7.5 bar, and the second gas supply warning pressure threshold is between 3 and 5 bar.

[0029] In a preferred embodiment of the present invention, L1 is between 10 and 16 L / min, L2 is between 0.5 and 1.5 L / min, L3 is between 0.5 and 1.5 L / min, and L4 is between 0 and 1.5 L / min.

[0030] The gas supply system for an inductively coupled plasma source with an early warning function provided by the present invention fully utilizes the configuration of a conventional ICP source gas supply system while simplifying some unnecessary valves. The system has a simpler structure, better reliability, and lower cost. The early warning function provided is more user-friendly. Overall, the system has the following beneficial technical effects:

[0031] (1) Use a digital pressure gauge to replace the traditional pressure switch to monitor the gas supply pressure in real time. When the gas supply pressure is lower than the first gas supply warning pressure threshold, it can warn of insufficient gas supply in advance and prompt the user to change the gas source. When the gas supply pressure is lower than the second gas supply warning pressure threshold, it can prompt the system to shut down for protection.

[0032] (2) By combining the capacity configuration of the gas supply system and the real-time gas flow rate of the ICP source, when the gas supply is insufficient, the gas pressure drop can be monitored. When the gas pressure drops significantly, an early warning can be given to the greatest extent possible, giving the instrument user as much time as possible to replace the gas source. The early warning method of gas pressure drop is not limited by the system working pressure, making it easier to use and more universal.

[0033] (3) A digital pressure gauge is added to the front end of the nebulizer to monitor the nebulizer back pressure. When the nebulizer is clogged, it can alert the user that the nebulizer is clogged abnormally. The user can deal with the abnormal state in time without having to wait until later to analyze and find the problem. In addition, the real-time uploaded nebulizer back pressure value can be added to the real-time conditions of the analysis sample, which can effectively detect data anomalies caused by nebulizer clogs. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0035] Figure 1 Schematic diagram of a gas supply system of an inductively coupled plasma source with an early warning function according to a first embodiment of the present invention;

[0036] Figure 2 FIG. 1 is a schematic diagram of a gas supply system of an inductively coupled plasma source with an early warning function according to a second embodiment of the present invention.

[0037] Explanation of the accompanying drawings: 1-first gas cylinder; 2-first pressure-stabilizing valve; 3-first mass flow controller; 4-second mass flow controller; 5-third mass flow controller; 6-first digital pressure gauge; 7-second digital pressure gauge; 8-controller; 9-atomizer; 10-second gas cylinder; 11-second pressure-stabilizing valve; 12-fourth mass flow controller. DETAILED DESCRIPTION

[0038] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. All other embodiments obtained by ordinary technicians in this field based on the embodiments of the present invention without creative work are within the scope of protection of the present invention.

[0039] Figure 1 FIG1 is a schematic diagram of a gas supply system of an inductively coupled plasma source with an early warning function according to a first embodiment of the present invention. Figure 2 FIG2 is a schematic diagram of a gas supply system of an inductively coupled plasma source with an early warning function according to a second embodiment of the present invention. Figure 1 、 Figure 2 Most of the components and their functions are the same, and the differences are described in detail below.

[0040] like Figure 1The figure shows a gas supply system of an inductively coupled plasma source with an early warning function according to a first embodiment of the present invention, which includes: a first gas cylinder 1, a first pressure regulating valve 2, a first mass flow controller 3, a second mass flow controller 4, a third mass flow controller 5, a first digital pressure gauge 6, a second digital pressure gauge 7, a controller 8 and an atomizer 9, wherein:

[0041] The first gas cylinder 1 contains high-pressure and high-purity argon gas. The first gas cylinder 1 is the gas source container of the gas supply system, usually a steel cylinder or a combination of several steel cylinders. The steel cylinder can be a conventional 40L gas cylinder, a 175L Dewar flask or a gas cylinder of other specifications.

[0042] The first pressure stabilizing valve 2 is connected to the gas outlet of the first gas cylinder 1, and the first pressure stabilizing valve 2 reduces and stabilizes the pressure of the high-pressure and high-purity argon gas output from the first gas cylinder 1;

[0043] The output end of the first pressure stabilizing valve 2 is connected to the first mass flow controller 3, the second mass flow controller 4, the third mass flow controller 5 and the first digital pressure gauge 6;

[0044] The controller 8 is connected to the first mass flow controller 3, the second mass flow controller 4, the third mass flow controller 5, the first digital pressure gauge 6 and the second digital pressure gauge 7.

[0045] The first digital pressure gauge 6 converts the argon pressure output by the first pressure stabilizing valve 2 into an electrical signal and sends it to the controller 8;

[0046] The controller 8 controls the flow rate of the argon gas output by the first mass flow controller 3 to be within a first range so as to be used as the plasma gas of the ICP source system.

[0047] The controller 8 controls the flow rate of the argon gas output by the second mass flow controller 4 to be within a second range so as to be used as an auxiliary gas for the ICP source system.

[0048] The controller 8 controls the argon flow rate output by the third mass flow controller 5 to be within a third range so as to be used as the carrier gas of the ICP source system. The carrier gas output end is connected to the atomizer 9 and the second digital pressure gauge 7.

[0049] The second digital pressure gauge 7 converts the pressure of the carrier gas into an electrical signal and sends the electrical signal to the controller 8 .

[0050] like Figure 2 FIG2 shows a gas supply system of an inductively coupled plasma source with an early warning function according to a second embodiment of the present invention. Compared with the first embodiment, the gas supply system of an inductively coupled plasma source with an early warning function according to the second embodiment further includes a plurality of second gas cylinders 10 and a plurality of second pressure-stabilizing valves 11. Here, “plurality” means one or more. Figure 2A second gas cylinder 10 and a second pressure stabilizing valve 11 are shown in FIG. When the number of the second gas cylinder 10 and the second pressure stabilizing valve 11 continues to increase, they are respectively Figure 2 It can be connected to the system in the manner shown, wherein multiple second pressure-stabilizing valves 11 are respectively connected to the gas outlets of multiple second gas cylinders 10, and the output ends of the multiple second pressure-stabilizing valves 11 are connected to the output end of the first pressure-stabilizing valve 2. The multiple second pressure-stabilizing valves 11 respectively reduce and stabilize the pressure of the high-pressure and high-purity argon gas output by the multiple second gas cylinders 10.

[0051] In the second embodiment, the second gas cylinder 10 can be selected from the same gas cylinder as the first gas cylinder 1 in the first embodiment, and the second pressure stabilizing valve 11 can be selected from the same pressure stabilizing valve as the first pressure stabilizing valve 2 in the first embodiment.

[0052] like Figure 2 As shown, the gas supply system of the inductively coupled plasma source with early warning function according to the second embodiment of the present invention further includes a fourth mass flow controller 12, which is connected to the output end of the first pressure regulating valve 2 and the controller 8. The controller 8 controls the argon flow rate output by the fourth mass flow controller 12 to be within a fourth range to be used as a backup gas for the ICP source system.

[0053] In the first and second embodiments of the present invention, the first range is 0 to 20 L / min, the second range is 0 to 2 L / min, the third range is 0 to 2 L / min, and the fourth range is 0 to 2 L / min.

[0054] In the first and second embodiments of the present invention, the pressure of the argon gas output by the first pressure stabilizing valve 2 and the second pressure stabilizing valve 11 are both stabilized at 6 to 7 bar.

[0055] In the first and second embodiments of the present invention, the controller 8 is provided with a first gas supply warning pressure threshold value P_Hi and a second gas supply warning pressure threshold value P_Lo, and the first pressure regulating valve is adjusted so that the argon pressure initially output by the first pressure regulating valve is greater than the first gas supply warning pressure threshold value P_Hi. The controller monitors the argon pressure value P1 output by the first pressure regulating valve detected by the first digital pressure gauge in real time.

[0056] When P1 is between P_Lo and P_Hi, the controller 8 outputs a warning message of insufficient gas supply, indicating that the gas source needs to be replaced in time.

[0057] When P1 is less than P_Lo, the controller 8 outputs an air supply shortage alarm message and an emergency shutdown command, instructing the external system to shut down in coordination.

[0058] When the rate of decrease of P1 exceeds k×V0 / ((L1+L2+L3+L4) / 60), the controller 8 outputs a gas supply shortage alarm, reminding the user of the insufficient gas supply and the need to replace the gas source promptly. V0 is the total volume of the gas supply system. In the first embodiment, V0 is the volume of the first gas cylinder. In the second embodiment, V0 is the sum of the volumes of the first gas cylinder 1 and the plurality of second gas cylinders 10. L1, L2, L3, and L4 are the current argon flow rates output by the first mass flow controller 3, the second mass flow controller 4, the third mass flow controller 5, and the fourth mass flow controller 12, respectively. k is the adjustment coefficient, and 0<k<1. In the present invention, the value of k is set by the user based on actual usage and is typically less than 1, preferably between 0.01 and 1. The value of k is highly correlated with the system's pipeline volume. If the system's pipeline volume is 0, the rate of decrease of P1 is theoretically equal to 1×V0 / ((L1+L2+L3+L4) / 60). When k is too large, the system pressure drop may not be detected. When k is too small, it is easy to cause frequent system false alarms. Therefore, the k value needs to be configured by the user according to actual usage.

[0059] When calculating the descent speed of P1, the time range T generally selected is 0.1 to 10 seconds, and the typical value of the time range is 1 second.

[0060] In the first and second embodiments of the present invention, the argon pressure initially output by the first pressure-stabilizing valve 2 is 0.05-0.5 bar higher than the first gas supply warning pressure threshold, with a typical value of 0.1 bar.

[0061] In the first and second embodiments of the present invention, the controller 8 is provided with a carrier gas pressure blockage threshold, and the controller 8 monitors the carrier gas pressure value P2 detected by the second digital pressure gauge 7 in real time. When P2 is greater than the carrier gas pressure blockage threshold, the controller 8 outputs a blockage alarm of the atomizer 9.

[0062] In the first and second embodiments of the present invention, the carrier gas pressure blockage threshold is between 1 and 5 bar, the first gas supply warning pressure threshold is between 5.5 and 7.5 bar, with a typical value of 6 bar, and the second gas supply warning pressure threshold is between 3 and 5 bar, with a typical value of 4 bar.

[0063] In the first and second embodiments of the present invention, L1 is between 10 and 16 L / min, with a typical value of 13 L / min, L2 is between 0.5 and 1.5 L / min, with a typical value of 1 L / min, L3 is between 0.5 and 1.5 L / min, with a typical value of 1 L / min, and L4 is between 0 and 1.5 L / min, with a typical value of 0.5 L / min.

[0064] The following specifically illustrates that the present invention can provide early warning of insufficient gas supply: In the first embodiment, typical values of the system are used for calculation. When V0=40L, P_Hi=6bar, P_Lo=4bar, L1=13L / min, L2=1L / min, and L3=1L / min, the gas supply system provided by the present invention can provide early warning of insufficient argon gas supply information at least 40×(6-4) / (13+1+1)=5min19s in advance. That is, since the present invention sets a first gas supply early warning pressure threshold P_Hi, compared to the case where only one triggering emergency shutdown early warning pressure threshold is set, the present invention can provide early warning of insufficient argon gas supply information at least 5min19s in advance.

[0065] In the second embodiment, typical values of the system are used for calculation. When V0=40L+40L, P_Hi=6bar, P_Lo=4bar, Ll=13L / min, L2=1L / min, L3=1L / min, and L4=0.5L / min, the gas supply system provided by the present invention can warn of insufficient argon gas supply information at least 80×(6-4) / (13+1+1+0.5)=10min19s in advance.

[0066] This shows that when using larger gas cylinders or more cylinders in parallel, the present invention can provide a warning even earlier, allowing the user ample time to replace the gas source, avoiding unexpected shutdowns caused by insufficient gas supply, and thus saving time and effort in redoing tests. Real-time monitoring of carrier gas back pressure and blockage warnings also provide users with a clear basis for judgment, avoiding the time-consuming task of searching for abnormal data caused by a nebulizer blockage.

[0067] The gas supply system for an inductively coupled plasma source with an early warning function provided by the present invention fully utilizes the configuration of a conventional ICP source gas supply system while simplifying some unnecessary valves. The system has a simpler structure, better reliability, and lower cost. The early warning function provided is more user-friendly. Overall, the system has the following beneficial technical effects:

[0068] (1) Use a digital pressure gauge to replace the traditional pressure switch to monitor the gas supply pressure in real time. When the gas supply pressure is lower than the first gas supply warning pressure threshold, it can warn of insufficient gas supply in advance and prompt the user to change the gas source. When the gas supply pressure is lower than the second gas supply warning pressure threshold, it can prompt the system to shut down for protection.

[0069] (2) By combining the capacity configuration of the gas supply system and the real-time gas flow rate of the ICP source, when the gas supply is insufficient, the gas pressure drop can be monitored. When the gas pressure drops significantly, an early warning can be given to the greatest extent possible, giving the instrument user as much time as possible to replace the gas source. The early warning method of gas pressure drop is not limited by the system working pressure, making it easier to use and more universal.

[0070] (3) A digital pressure gauge is added to the front end of the nebulizer to monitor the nebulizer back pressure. When the nebulizer is clogged, it can alert the user that the nebulizer is clogged abnormally. The user can deal with the abnormal state in time without having to wait until later to analyze and find the problem. In addition, the real-time uploaded nebulizer back pressure value can be added to the real-time conditions of the analysis sample, which can effectively detect data anomalies caused by nebulizer clogs.

[0071] Those skilled in the art will understand that the accompanying drawings are merely schematic diagrams of an embodiment, and the modules or processes in the accompanying drawings are not necessarily required to implement the present invention.

[0072] Those skilled in the art will appreciate that the modules in the apparatuses of the embodiments may be distributed in the apparatuses of the embodiments as described in the embodiments, or may be located in one or more apparatuses different from the embodiments with corresponding changes. The modules in the above embodiments may be combined into one module or further divided into multiple sub-modules.

[0073] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A gas supply system for an inductively coupled plasma source with an early warning function, characterized in that: include: A first gas cylinder, a first pressure-stabilizing valve, a first mass flow controller, a second mass flow controller, a third mass flow controller, a first digital pressure gauge, a second digital pressure gauge, a controller, a nebulizer, a plurality of second gas cylinders, a plurality of second pressure-stabilizing valves, and a fourth mass flow controller, wherein: The first gas cylinder contains high-pressure and high-purity argon gas. The first pressure-stabilizing valve is connected to the gas outlet of the first gas cylinder, and the first pressure-stabilizing valve reduces and stabilizes the pressure of the high-pressure and high-purity argon gas output from the first gas cylinder; The output end of the first pressure stabilizing valve is connected to the first mass flow controller, the second mass flow controller, the third mass flow controller and the first digital pressure gauge; The controller is connected to the first mass flow controller, the second mass flow controller, the third mass flow controller, the first digital pressure gauge and the second digital pressure gauge, The first digital pressure gauge converts the argon pressure output by the first pressure stabilizing valve into an electrical signal and sends the electrical signal to the controller; The controller controls the flow rate of argon gas output by the first mass flow controller to be within a first range so as to be used as plasma gas for the ICP source system. The controller controls the flow rate of argon gas output by the second mass flow controller to be within a second range so as to be used as an auxiliary gas for the ICP source system. The controller controls the argon flow rate output by the third mass flow controller to be within a third range so as to be used as a carrier gas for the ICP source system, and the carrier gas output end is connected to the atomizer and the second digital pressure gauge. The second digital pressure gauge converts the pressure of the carrier gas into an electrical signal and sends it to the controller. The plurality of second pressure-stabilizing valves are respectively connected to the gas outlets of the plurality of second gas cylinders, and the output ends of the plurality of second pressure-stabilizing valves are connected to the output end of the first pressure-stabilizing valve. The plurality of second pressure-stabilizing valves respectively reduce and stabilize the pressure of the high-pressure and high-purity argon gas outputted from the plurality of second gas cylinders. The fourth mass flow controller is connected to the output end of the first pressure regulating valve and the controller, and the controller controls the flow rate of the argon gas output by the fourth mass flow controller to be within a fourth range so as to be used as a backup gas for the ICP source system. The controller is provided with a first gas supply warning pressure threshold value P_Hi and a second gas supply warning pressure threshold value P_Lo, and adjusts the first pressure regulating valve so that the argon pressure initially output by the first pressure regulating valve is greater than the first gas supply warning pressure threshold value P_Hi. The controller monitors the argon pressure value P1 output by the first pressure regulating valve detected by the first digital pressure gauge in real time. When P1 is between P_Lo and P_Hi, the controller outputs an air supply shortage warning message. When P1 is less than P_Lo, the controller outputs an air supply shortage alarm message and an emergency shutdown command. When the falling speed of P1 is greater than k×V0 / ((L1+L2+L3+L4) / 60), the controller outputs a gas supply shortage alarm message, wherein V0 is the total volume of the gas supply system, L1, L2, L3, and L4 are the current output flow rates of the argon gas of the first mass flow controller, the second mass flow controller, the third mass flow controller, and the fourth mass flow controller, respectively, k is the adjustment coefficient, and 0 <k<1; The controller is provided with a carrier gas pressure blockage threshold, and the controller monitors the carrier gas pressure value P2 detected by the second digital pressure gauge in real time. When P2 is greater than the carrier gas pressure blockage threshold, the controller outputs a blockage alarm for the atomizer.

2. The gas supply system of the inductively coupled plasma source with early warning function according to claim 1, characterized in that: The first range is 0 to 20 L / min, the second range is 0 to 2 L / min, the third range is 0 to 2 L / min, and the fourth range is 0 to 2 L / min.

3. The gas supply system of the inductively coupled plasma source with early warning function according to claim 1, characterized in that: The argon pressure output by the first pressure stabilizing valve and the second pressure stabilizing valve are both stable at 6-7 bar.

4. The gas supply system for an inductively coupled plasma source with an early warning function according to any one of claim 1, wherein: The argon pressure initially output by the first pressure-stabilizing valve is 0.05 to 0.5 bar higher than the first gas supply warning pressure threshold.

5. The gas supply system of the inductively coupled plasma source with early warning function according to claim 1, characterized in that: The carrier gas pressure blockage threshold is between 1 and 5 bar, the first gas supply warning pressure threshold is between 5.5 and 7.5 bar, and the second gas supply warning pressure threshold is between 3 and 5 bar.

6. The gas supply system of the inductively coupled plasma source with early warning function according to claim 1, characterized in that: L1 is between 10 and 16 L / min, L2 is between 0.5 and 1.5 L / min, L3 is between 0.5 and 1.5 L / min, and L4 is between 0 and 1.5 L / min.

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