Support structure and differential parallel micro-motion platform

Abstract

The application provides a support structure and a differential parallel micro-motion platform. The support structure comprises a first hooke joint, an actuator and a second hooke joint. One end of the actuator is connected with the first hooke joint. The second hooke joint is connected with the other end of the actuator. The second hooke joint adjusts the distance between the first hooke joint and the actuator. The differential parallel micro-motion platform comprises a moving platform, a plurality of support structure assemblies and a static platform. The support structure is connected between a first mounting surface and a second mounting surface. The first mounting surface and the second mounting surface connected by the same support structure are parallel. The actuator is used in cooperation with a plurality of hooke joints. The differential transmission scheme is used to replace the piezoelectric ceramic, so as to reduce the cost, form the support structure with the micro-motion function, and realize the use demand of the low-cost and high-precision micro-motion platform through the parallel micro-motion platform formed by the combination of the plurality of support structures, the moving platform and the static platform.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of precision positioning, in particular to a support structure and a differential parallel micro-motion platform. BACKGROUND

[0002] With the development of science and technology, high-precision positioning systems are increasingly needed in many fields, such as aerospace, aviation, manufacturing, computer-aided medical devices, micro-electro-mechanical systems, micro-surgery, optical fiber butt joint, micro-machining, etc. The objects to be operated by robots are also expanding from the macro field to the micro field of sub-micron and nanometer levels. Micro-operation robots, which are generated by the combination of micro-positioning technology and robot technology, are a new research direction in the field of robots and have broad application prospects. In recent years, micro-operation robot technology for bioengineering, medical engineering and micro-machining has received widespread attention at home and abroad, and has developed at an extremely fast speed. It has been applied to the fields of cell injection and segmentation, micro-electro-mechanical product processing and assembly, and micro-surgery, etc. Therefore, micro-operation robots are required to have small friction, no gap, fast response, compact structure, good rigidity and small error accumulation.

[0003] Therefore, how to effectively improve the precision of the micro-motion platform and reduce the cost of the micro-motion platform is a problem to be solved by those skilled in the art. SUMMARY

[0004] In view of the above problems, the present application provides a support structure and a differential parallel micro-motion platform, which can effectively improve the precision of the micro-motion platform and reduce the cost of the micro-motion platform.

[0005] To achieve the above-mentioned purpose, in a first aspect, the present application provides a support structure, which comprises a first hooke joint, an actuator and a second hooke joint; one end of the actuator is connected with the first hooke joint; the second hooke joint is connected with the other end of the actuator, and the second hooke joint adjusts the distance between the first hooke joint and the second hooke joint through the actuator.

[0006] In some embodiments, the actuator comprises a servo motor, a harmonic reducer, a driving piece, a ball transmission assembly and a threaded screw rod, the servo motor is arranged at one end close to the first hooke joint; the input end of the harmonic reducer is connected with the output end of the servo motor; the driving piece is in transmission connection with the output end of the harmonic reducer; the ball transmission assembly is connected with the other end of the driving piece; one end of the threaded screw rod is connected with the ball transmission assembly through a shaft coupling, and the other end of the threaded screw rod is in transmission connection with the second hooke joint.

[0007] In some embodiments, the threaded screw rod comprises a first screw rod segment, a second screw rod segment, a first screw rod nut, and a second screw rod nut, the first screw rod segment is arranged at one end close to the ball transmission assembly; the second screw rod segment is arranged at one end away from the ball transmission assembly, the second screw rod segment has a different screw pitch from the first screw rod segment; the first screw rod nut is arranged on the first screw rod segment; the second screw rod nut is arranged on the second screw rod segment, and the second screw rod nut can rotate up and down relative to the second screw rod segment to drive the second hook joint to move in a direction close to or away from the first hook joint.

[0008] In some embodiments, the actuator further comprises a flexspline flange, and the driving member is in driving connection with the harmonic reducer through the flexspline flange.

[0009] In some embodiments, the actuator further comprises a motor sleeve, a motor flange, a reducer flange, a bearing sleeve, a first sleeve, a nut flange, a bellows, and a second sleeve, one end of the motor sleeve is connected with the first hook joint, and the other end is arranged away from the first hook joint; the motor flange is connected with the one end of the motor sleeve away from the first hook joint, and the servo motor is arranged on the motor flange; the reducer flange is sleeved outside the motor flange and is fixedly connected with the motor flange; the bearing sleeve is arranged on the reducer flange, and the bearing sleeve is movably connected with the driving member through the double-row angular contact ball bearing; one end of the first sleeve is connected with the other end of the bearing sleeve; the nut flange is connected with the other end of the first sleeve, and the other end of the nut flange is fixedly connected with the first screw rod nut; the bellows is arranged on the nut flange, and the bellows covers the threaded screw rod; one end of the second sleeve is fixedly connected with the second screw rod nut, and the other end of the second sleeve is fixedly connected with the second hook joint, and the second sleeve cooperates with the second screw rod nut to drive the second hook joint to move axially relative to the first hook joint.

[0010] In a second aspect, the inventor also provides a differential parallel micro-motion platform, comprising a moving platform, a plurality of support structure assemblies, and a static platform; the moving platform comprises a moving platform body, a plurality of second mounting surface groups are arranged circumferentially along the center of the moving platform body, each second mounting surface group is arranged at a first included angle with the plane of the moving platform body, and one or more second mounting surfaces are arranged in each second mounting surface group; each support structure assembly comprises one or more support structures, and the number of support structure assemblies is the same as the number of second mounting surface groups; the static platform comprises a static platform body, a plurality of first mounting surface groups are arranged circumferentially along the center of the static platform body, the number of first mounting surface groups is the same as the number of second mounting surface groups, each first mounting surface group is arranged at a second included angle with the plane of the static platform body, one or more first mounting surfaces are arranged in each first mounting surface group, and the number of first mounting surfaces is the same as the number of second mounting surfaces; the support structures are connected between the first mounting surfaces and the second mounting surfaces, and the first mounting surfaces and the second mounting surfaces connected by the same support structure are parallel.

[0011] In some embodiments, the first mounting surface group comprises two or more first mounting surfaces, two adjacent first mounting surfaces in the same first mounting surface group are arranged at a third included angle; the second mounting surface group comprises two or more second mounting surfaces, two adjacent second mounting surfaces in the same second mounting surface group are arranged at a fourth included angle; each support structure assembly comprises two or more support structures, including a first support structure and a second support structure, the first support structure is arranged between one first mounting surface in one first mounting surface group and one second mounting surface in one second mounting surface group, and the second support structure is arranged between another first mounting surface in the same first mounting surface group and one second mounting surface in another second mounting surface group.

[0012] In some embodiments, the first support structure and the second support structure in the same support structure assembly are arranged at a fifth included angle.

[0013] In some embodiments, the number of the first mounting surface group, the second mounting surface group and the support structure assembly is three.

[0014] In some embodiments, a plurality of first mounting surface groups are arranged circumferentially on a first reference circle; a plurality of second mounting surface groups are arranged circumferentially on a second reference circle; the diameter of the second reference circle is smaller than the diameter of the first reference circle.

[0015] Different from the prior art, the above technical solution uses the actuator in cooperation with a plurality of hook hinges, uses the hook hinge to replace the piezoelectric ceramic commonly used in the micro-motion platform, reduces the cost, forms a support structure with micro-motion function, and then forms a parallel micro-motion platform by combining a plurality of support structures with a moving platform and a static platform, so that the use demand of low cost and high precision of the micro-motion platform is realized.

[0016] The above invention content is only a summary of the technical solution of the present application. In order to enable those skilled in the art to more clearly understand the technical solution of the present application, and then can be implemented according to the content recorded in the specification and drawings, and in order to make the above purpose and other purposes, characteristics and advantages of the present application more easily understood, the following is described in combination with the specific embodiments of the present application and the drawings. BRIEF DESCRIPTION OF DRAWINGS

[0017] The drawings are only used to show the principles, implementation modes, applications, characteristics and effects of the specific embodiments and other related contents of the present application, and cannot be considered as a limitation of the present application.

[0018] In the drawings of the specification:

[0019] Figure 1 The support structure cross-sectional view described in the specific embodiments;

[0020] Figure 2Support structure front view according to the detailed description

[0021] Figure 3 First hooke joint schematic diagram according to the detailed description

[0022] Figure 4 Second hooke joint schematic diagram according to the detailed description

[0023] Figure 5 Differential parallel micro-motion platform schematic diagram according to the detailed description

[0024] Figure 6 Moving platform schematic diagram according to the detailed description

[0025] Figure 7 Static platform schematic diagram according to the detailed description

[0026] The figure reference includes: moving platform 1, second mounting surface group 11, support structure 2, second hooke joint 21, second upper rotating shaft 21a, second lower rotating shaft 21b, actuator 22, servo motor 22a, motor sleeve 22b, motor flange 22c, reducer flange 22d, harmonic reducer 22e, flexible gear flange 22f, double-row angular contact ball bearing 22g, driving part 22h, bearing sleeve 22i, first sleeve 22j, ball spline female 22k, ball spline shaft 22l, coupling 22m, threaded lead screw 22n, first lead screw nut 22o, nut flange 22p, bellows 22q, second lead screw nut 22r, second sleeve 22s, first hooke joint 23, first upper rotating shaft 23a, first lower rotating shaft 23b, static platform 3, first mounting surface group 31. DETAILED DESCRIPTION

[0027] Hereinafter, embodiments of the present application will be described with reference to the accompanying drawings. In the following description, the same modules are denoted by the same reference numerals. In the case of the same reference numerals, their names and functions are also the same. Therefore, detailed descriptions thereof will not be repeated.

[0028] In order to make the objects, technical solutions, and advantages of the present application clearer, further detailed descriptions will be given to the present application in combination with the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application, and do not constitute a limitation on the present application.

[0029] Please refer to Figures 1 to 4 The embodiment provides a support structure 2, which comprises a first hooke joint 23, an actuator 22, and a second hooke joint 21; one end of the actuator 22 is connected with the first hooke joint 23; the second hooke joint 21 is connected with the other end of the actuator 22, and the second hooke joint 21 adjusts the distance between the first hooke joint 23 and the second hooke joint 21 through the actuator 22.

[0030] Referring to Figure 3 and Figure 4 The hooke joint used in the embodiment is a flexible joint. The flexible joint is a special kinematic pair which is processed by advanced cutting method to form obvious weak parts on a component material, and uses the characteristics of easy deformation of the weak parts and the reversible elastic deformation of the material itself to produce movement to achieve the same function as the ordinary kinematic pair. Compared with the conventional kinematic pair, the flexible joint has the advantages of simple structure, no movement gap and friction, and can overcome the vibration caused by inertia. The flexible joint is used for limited angular displacement of complex movement around the shaft, and has the characteristics of no mechanical friction, no gap and high movement sensitivity. In the embodiment, the flexible joint includes a first hooke joint 23 and a second hooke joint 21. The first hooke joint 23 includes a first upper rotating shaft 23a and a first lower rotating shaft 23b, and a mounting hole is formed on the first hooke joint 23 to facilitate the fixation of the first hooke joint 23 on the actuator 22. The second hooke joint 21 includes a second upper rotating shaft 21a and a second lower rotating shaft 21b, and a mounting hole is formed on the second hooke joint 21 to facilitate the fixation of the second hooke joint 21 on the other end of the actuator 22.

[0031] In short, the first hooke joint 23 or the second hooke joint 21 has two rotating degrees of freedom respectively. The first upper rotating shaft 23a or the second upper rotating shaft 21a is used to provide the rotating degree of freedom in one direction, and the first lower rotating shaft 23b or the second lower rotating shaft 21b is used to provide the degree of freedom in the other direction.

[0032] The actuator 22 is a device for driving the movement of the second hooke joint 21 relative to the first hooke joint 23. The actuator 22 is provided with a driving unit and a transmission unit. The second hooke joint 21 is connected with the transmission unit. The driving unit drives the second hooke joint 21 to move close to or away from the first hooke joint 23 through the transmission unit.

[0033] By using the actuator 22 in cooperation with the plurality of hooke joints, the piezoelectric ceramic commonly used in the micro-motion platform 1 is replaced by the hooke joint to reduce the cost and form the support structure 2 with the micro-motion function.

[0034] Referring to Figure 1 In some embodiments, the actuator 22 includes a servo motor 22a, a harmonic reducer 22e, a driving piece 22h, a ball transmission assembly and a threaded lead screw. The servo motor 22a is arranged at one end close to the first hooke joint 23. The input end of the harmonic reducer 22e is connected with the output end of the servo motor 22a. The driving piece 22h is in transmission connection with the output end of the harmonic reducer 22e. The ball transmission assembly is connected with the other end of the driving piece 22h. One end of the threaded lead screw is connected with the ball transmission assembly through a shaft coupling 22m, and the other end of the threaded lead screw is in transmission connection with the second hooke joint 21.

[0035] The output shaft of the servo motor 22a is connected with a wave generator in the harmonic reducer 22e, the harmonic reducer 22e is connected with the driving member 22h, because the rotation speed of the servo motor 22a is too high, the rotation speed is reduced through the harmonic reducer 22e, so that the movement speed of the whole support structure 2 is rationalized, when the distance between the first hooke joint 23 and the second hooke joint 21 is adjusted, the distance that the screw rod advances in unit time is reduced, so that the fine adjustment effect is realized. The driving member 22h is used for connecting the harmonic reducer 22e and the ball transmission assembly, which can be a circular tubular metal structure or a columnar body, and the specific shape can be designed according to the actual scene, for example, in the embodiment, the driving member 22h is a circular tubular part with a certain thickness. The ball transmission assembly includes a ball spline female 22k and a ball spline shaft 22l, the driving member 22h and the ball spline female 22k are fixedly connected by screws, the ball spline female 22k and the ball spline shaft 22l are matched with each other, the driving member 22h drives the ball spline female 22k to rotate, and drives the ball spline shaft 22l to rotate relative to the ball spline female 22k, so that the rotation of the servo motor 22a is transmitted to the ball spline shaft 22l.

[0036] In the embodiment, the ball spline female 22k can move along the axial direction of the ball spline shaft 22l relative to the ball spline shaft 22l. In the process of differential transmission, an axial displacement is generated on the screw rod, and the axial displacement can be compensated by arranging the ball spline female 22k.

[0037] The ball transmission assembly and the screw rod 22n are connected through the shaft coupling 22m, the other end of the screw rod is connected with the second hooke joint 21, the screw rod includes a nut and a screw rod, the screw rod rotates to drive the nut to move up and down, so as to realize the axial movement of the second hooke joint 21 along the screw rod. Alternatively, different precision displacements of the second hooke joint 21 relative to the first hooke joint 23 can be realized by reasonably arranging the pitch of the screw rod.

[0038] When the servo motor 22a rotates a certain amount of rotation in unit time, the rotation amount of the servo motor 22a is reduced to a smaller range through the harmonic reducer 22e, the ball spline shaft 22l is driven to rotate through the driving member 22h, and the rotation amount is transmitted to the screw rod through the shaft coupling 22m, the screw rod drives the second hooke joint 21 to move, in the movement process of the second hooke joint 21, the first hooke joint 23 is in a static state, so that the second hooke joint 21 can move relative to the first hooke joint 23 in the axial direction of the support structure 2.

[0039] The second hooke joint 21 is connected with the first hooke joint 23 through the threaded rod, the coupling 22m, the driving part 22h and the harmonic reducer 22e, and the small movement function of the second hooke joint 21 relative to the first hooke joint 23 is realized, and compared with the transmission mechanism of the planetary screw rod in the prior art, the manufacturing cost is reduced while the movement precision of the second hooke joint 21 relative to the first hooke joint 23 is ensured.

[0040] Please refer to Figure 1 In some embodiments, the threaded rod comprises a first screw rod segment, a second screw rod segment, a first screw nut 22o and a second screw nut 22r, the first screw rod segment is arranged at one end close to the ball transmission assembly, the second screw rod segment is arranged at one end away from the ball transmission assembly, the second screw rod segment has a different pitch from the first screw rod segment, the first screw rod segment and the second screw rod segment form a screw rod shaft of the threaded rod, the first screw nut 22o is arranged on the first screw rod segment, and the second screw nut 22r is arranged on the second screw rod segment and can rotate up and down relative to the second screw rod segment to drive the second hooke joint 21 to move towards or away from the first hooke joint 23.

[0041] The first screw rod segment is arranged at one end close to the ball transmission assembly, the second screw rod segment is arranged at one end away from the ball transmission assembly, the second screw rod segment has a different pitch from the first screw rod segment, and the first screw rod segment and the second screw rod segment do not overlap. The second screw nut 22r is sleeved on the second screw rod segment, the second screw rod segment is fixedly connected with the second hooke joint 21, and drives the second hooke joint 21 to move up and down. The first screw nut 22o is sleeved on the first screw rod segment, and in some preferred embodiments, a partition plate is further arranged between the first screw rod segment and the second screw rod segment to avoid interference between the second screw nut 22r and the first screw nut 22o during movement and damage to the ball transmission assembly. Specifically, in this embodiment, the driving part 22h drives the ball spline female 22k to rotate, the ball spline female 22k drives the ball spline shaft 22l to rotate, and the ball spline shaft 22l drives the screw rod shaft to rotate. In this process, the ball spline female 22k, the ball spline shaft 22l and the screw rod shaft rotate synchronously.

[0042] For example, the outer surface of the first screw rod segment is provided with external threads with a pitch of 1.2 mm, the outer surface of the second screw rod segment is provided with external threads with a pitch of 1.0 mm, the inner surface of the first screw nut 22o is provided with internal threads with a pitch of 1.2 mm, and the inner surface of the second screw nut 22r is provided with internal threads with a pitch of 1.0 mm, so that one rotation of the threaded rod can realize a linear motion of 0.2 mm, greatly improving the adjustment precision.

[0043] The embodiment adopts a double-helix auxiliary differential transmission scheme, utilizes the different thread pitches of the threads at the two ends of the screw rod to form a differential during movement, and effectively improves the precision of the support structure 2; utilizes a threaded screw rod to replace a planetary ball screw, so that the cost of a single support structure 2 is lower.

[0044] In some embodiments, the actuator 22 further comprises a flexspline flange 22f, and the driving member 22h and the harmonic reducer 22e are drivingly connected through the flexspline flange 22f. The flexspline flange 22f refers to a flexible gear flange, and specifically refers to a flexible gear with a flange structure. The flexible gear has various forms such as a thin-walled cup shape, a thin-walled cylindrical shape, or a flat-embedded type. The thin-walled cylindrical flexspline has a gear ring on the outside of the open end, which deforms with the rotation of the wave generator, and the bottom part is coupled with the output shaft. Generally, gear transmission adopts rigid mechanisms, and rotating parts are also rigid. However, harmonic gear transmission is a new type of transmission that uses the elastic deformation movement of flexible working components to achieve transmission. The flexible gear cooperates with the harmonic reducer 22e, has the characteristics of simple structure, few parts, small size, and light weight; the transmission ratio of the flexible gear is large, the transmission precision is high, and the number of meshing teeth is large, so the carrying capacity is large; it can realize non-backlash meshing movement and can transmit movement to a sealed space.

[0045] By arranging the flexspline flange 22f between the harmonic reducer 22e and the driving member 22h, the transmission fluency and transmission precision between the driving member 22h and the harmonic reducer 22e can be further improved, and the transmission efficiency can be improved.

[0046] Please refer to Figure 2In some embodiments, the actuator 22 further comprises a motor sleeve 22b, a motor flange 22c, a reducer flange 22d, a bearing sleeve 22i, a first sleeve 22j, a nut flange 22p, a bellows 22q, and a second sleeve 22s. One end of the motor sleeve 22b is connected with the first hooke joint 23, and the other end is arranged away from the first hooke joint 23. The motor flange 22c is connected with one end of the motor sleeve 22b away from the first hooke joint 23, and the servo motor 22a is arranged on the motor flange 22c. The reducer flange 22d is sleeved outside the motor flange 22c and fixedly connected with the motor flange 22c. The bearing sleeve 22i is arranged on the reducer flange 22d, and the bearing sleeve 22i is movably connected with the driving part 22h through the double-row angular contact ball bearing 22g. One end of the first sleeve 22j is connected with the other end of the bearing sleeve 22i. The nut flange 22p is connected with the other end of the first sleeve 22j, and the other end of the nut flange 22p is fixedly connected with the first screw nut 22o. The bellows 22q is arranged on the nut flange 22p, and the bellows 22q covers the threaded screw rod. One end of the second sleeve 22s is fixedly connected with the second screw nut 22r, and the other end of the second sleeve 22s is fixedly connected with the second hooke joint 21. The second sleeve 22s cooperates with the second screw nut 22r to drive the second hooke joint 21 to move axially relative to the first hooke joint 23.

[0047] By arranging the motor sleeve 22b, the motor flange 22c, the reducer flange 22d, the bearing sleeve 22i, the first sleeve 22j, the nut flange 22p, the bellows 22q, and the second sleeve 22s, the transmission components inside the actuator 22 can be placed in a closed environment, avoiding the influence of external dust on the transmission precision inside the actuator 22. One end of the bellows 22q is fixedly connected with the nut flange 22p, and the other end of the bellows 22q is fixedly connected with the second sleeve 22s, which can realize real-time sealing function when the second screw nut 22r moves, and better dustproof effect is achieved.

[0048] Please refer to Figure 5The embodiment provides a differential parallel micro-motion platform 1, which comprises a moving platform 1, a plurality of support structure assemblies and a static platform 3; the moving platform 1 comprises a moving platform 1 body, a plurality of second mounting surface groups 11 are arranged in the circumferential direction of the center of the moving platform 1 body, the second mounting surface groups 11 are arranged at a first included angle with the plane where the moving platform 1 body is located, and one or more second mounting surfaces are arranged in each second mounting surface group 11; the support structure assembly comprises one or more support structures 2, the support structure 2 is the support structure 2 described above, and the number of support structure assemblies is the same as the number of second mounting surface groups 11; the static platform 3 comprises a static platform 3 body, a plurality of first mounting surface groups 31 are arranged in the circumferential direction of the center of the static platform 3 body, the number of first mounting surface groups 31 is the same as the number of second mounting surface groups 11, the first mounting surface groups 31 are arranged at a second included angle with the plane where the static platform 3 body is located, one or more first mounting surfaces are arranged in each first mounting surface group 31, and the number of first mounting surfaces is the same as the number of second mounting surfaces; the support structure 2 is connected between the first mounting surface and the second mounting surface, and the first mounting surface and the second mounting surface connected by the same support structure 2 are parallel.

[0049] The moving platform 1 body represents a bearing platform with a moving function, and the moving platform 1 body can be used for placing equipment and devices requiring high displacement accuracy, such as astronomical instruments or optical instruments and the like. In the embodiment, the moving platform 1 body is preferably triangular, and the specific shape can be the shape shown in the figure. Figure 6 One or more second mounting surface groups 11 are arranged at the lower part of the moving platform 1 body, one or more second mounting surfaces are arranged in the second mounting surface group 11, and the second mounting surface is fixedly connected with the other end of the second hook hinge 21.

[0050] The static platform 3 body represents a support platform without a moving function, and the static platform 3 body is mainly used for supporting the moving platform 1 body and other instruments or devices placed on the moving platform 1 body, and the static platform 3 body is connected with the moving platform 1 body through a support structure group. In the embodiment, the static platform 3 body is preferably triangular, and the specific shape can be the shape shown in the figure. Figure 7 One or more first mounting surface groups 31 are arranged at the upper part of the static platform 3 body, one or more first mounting surfaces are arranged in the first mounting surface group 31, and the first mounting surface is fixedly connected with the other end of the first hook hinge 23.

[0051] The support structure group has a plurality of support structures 2, the support structure 2 is any one of the support structures 2 described above, and the number of support structures 2 corresponds to the number of first mounting surfaces and the number of second mounting surfaces one by one.

[0052] Please refer to Figures 5 to 6The second mounting surface group 11 is equidistantly distributed on the circumference of the moving platform 1 body, and the included angle between the second mounting surface group 11 and the moving platform 1 body is a first included angle. The first mounting surface group 31 is equidistantly distributed on the circumference of the static platform 3 body, and the included angle between the first mounting surface group 31 and the static platform 3 body is a second included angle. In some embodiments, the cross-sectional area of the moving platform 1 body is smaller than that of the static platform 3 body, so as to form a tapered structure with the top small and the bottom large, which can improve the bearing capacity of the moving platform 1 body and make the bearing of the moving platform 1 body more stable and uniform. The support structure 2 is only a rod-shaped structure with two degrees of freedom, and if it is vertically arranged between the static platform 3 body and the moving platform 1 body, it cannot achieve effective support with the top small and the bottom large. Therefore, the second mounting surface group 11 is arranged at a first included angle with the moving platform 1 body, and the first mounting surface group 31 is arranged at a second included angle with the static platform 3 body. The first included angle and the second included angle are set according to the actual size of the moving platform 1 body and the static platform 3 body, which can achieve the optimal support effect of the support structure assembly and improve the stability and adjustment accuracy of the moving platform 1 body.

[0053] Please refer to 5 to Figure 7 In some embodiments, the first mounting surface group 31 includes two or more first mounting surfaces, and adjacent first mounting surfaces in the same first mounting surface group 31 are arranged at a third included angle. The second mounting surface group 11 includes two or more second mounting surfaces, and adjacent second mounting surfaces in the same second mounting surface group 11 are arranged at a fourth included angle. Each support structure assembly includes two or more support structures 2, including a first support structure 2 and a second support structure 2. The first support structure 2 is arranged between one first mounting surface in a first mounting surface group 31 and one second mounting surface in a second mounting surface group 11. The second support structure 2 is arranged between another first mounting surface in the same first mounting surface group 31 and one second mounting surface in another second mounting surface group 11.

[0054] For details, please refer to Figure 5For the structure shown to be understood, the first support assembly and the second support assembly are arranged on two first installation surfaces arranged adjacently in the same first installation surface group 31, but the other end of the first support assembly is connected with a second installation surface in one second installation surface group 11, and the other end of the second support assembly is connected with a second installation surface in another second installation surface group 11. The two first installation surfaces arranged adjacently must be arranged at a certain angle to meet the use requirements of the structure shown in the embodiment, and therefore, the third angle can be set according to the actual size of the moving platform 1 body and the static platform 3 body. Based on the same reason, the other end of the first support structure 2 and the second support structure 2 in the same second installation surface group 11 is connected with the first installation surface in different first installation surface groups 31, respectively, and the two second installation surfaces arranged adjacently must be arranged at a certain angle to meet the use requirements of the structure shown in the embodiment, and therefore, the fourth angle can be set according to the actual size of the moving platform 1 body and the static platform 3 body.

[0055] Through the connection mode between the support structure group shown in the embodiment and the moving platform 1 and the static platform 3, the connection stability between the moving platform 1 and the static platform 3 can be improved, and at the same time, the cooperation of the plurality of support structures 2 can effectively reduce the error interference caused by other objective reasons in the use scene, and realize the high-precision adjustment of the moving platform 1.

[0056] Please refer to Figure 5 In some embodiments, the first support structure 2 and the second support structure 2 in the same support structure group are arranged adjacently at a fifth angle. The size of the fifth angle is affected by the size of the fourth angle in the same second installation surface group 11 or the third angle in the same first installation surface group 31, and the specific value needs to be determined according to the shape of the moving platform 1 body and the static platform 3 body. The first support structure 2 and the second support structure 2 are arranged adjacently at the fifth angle, so that the first support structure 2 and the second support structure 2 in the same second installation surface group 11 can form a triangular structure with the static platform 3 body, thereby effectively improving the support stability of the moving platform 1 body on the second installation surface group 11.

[0057] Please refer to Figure 5 In some embodiments, the number of first installation surface groups 31, second installation surface groups 11 and support structure groups is three. By controlling the extension and contraction of the six support structures 2, the six degrees of freedom of the moving platform can be realized, so as to meet the connection stability between the moving platform 1 and the static platform 3, and at the same time, realize the high-precision adjustment of the moving platform 1 relative to the static platform 3, and reduce the production cost.

[0058] In some embodiments, the plurality of first mounting surface groups 31 are arranged circumferentially on a first reference circle; the plurality of second mounting surface groups 11 are arranged circumferentially on a second reference circle; the diameter of the second reference circle is smaller than the diameter of the first reference circle. The position adjustment of each support structure 2 can be more balanced, the supporting force of the static platform 3 can be expanded, and the stability between the moving platform 1 and the static platform 3 can be improved. The above-mentioned embodiments use the actuator 22 and the plurality of hook hinges, use the differential transmission scheme to replace the piezoelectric ceramic, reduce the cost, form the support structure 2 with the micro-motion function, and then combine the plurality of support structures 2, the moving platform 1 and the static platform 3 to form the parallel micro-motion platform 1, so as to realize the use demand of low cost and high precision of the micro-motion platform 1.

[0059] In the description of the present specification, the description of the terms "one embodiment", "some embodiments", "an example", "a specific example", or "some examples" and the like means that the specific features, structures, materials or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present application. In the present specification, the illustrative description of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any appropriate manner in any one or more embodiments or examples. In addition, different embodiments or examples described in the present specification and the features of different embodiments or examples can be combined and combined by those skilled in the art without contradiction.

[0060] Although the embodiments of the present application have been shown and described above, it should be understood that the above-mentioned embodiments are exemplary and should not be construed as limiting the present application, and those skilled in the art can make changes, modifications, replacements and variations to the above-mentioned embodiments within the scope of the present application.

[0061] The specific embodiments of the present application described above do not constitute a limitation on the scope of protection of the present application. Any various other corresponding changes and modifications made according to the technical concept of the present application should be included in the scope of protection of the claims of the present application.

Claims

1. A support structure, characterized by, The first hooke joint; The actuator is connected to the first hooke joint at one end; The actuator comprises: A servo motor is arranged at one end close to the first hooke joint; The input end of the harmonic reducer is connected to the output end of the servo motor; The drive member is in transmission connection with the output end of the harmonic reducer; The ball transmission assembly is connected to the other end of the drive member; The threaded screw rod is connected to the ball transmission assembly through a shaft coupling at one end, and is in transmission connection with the second hooke joint at the other end; The threaded screw rod comprises: The first screw rod segment is arranged at one end close to the ball transmission assembly; The second screw rod segment is arranged at one end away from the ball transmission assembly, and the pitch of the second screw rod segment is different from that of the first screw rod segment; The first screw rod nut is arranged on the first screw rod segment; The second screw rod nut is arranged on the second screw rod segment, and can rotate up and down relative to the second screw rod segment to drive the second hooke joint to move towards or away from the first hooke joint; The second hooke joint is connected to the other end of the actuator, and the distance between the second hooke joint and the first hooke joint is adjusted through the actuator. The actuator further comprises a flexible gear flange, and the drive member is in transmission connection with the harmonic reducer through the flexible gear flange.

2. The support structure of claim 1, wherein, The actuator further comprises:

3. The support structure of claim 2, wherein, The motor sleeve is connected to the first hooke joint at one end and is arranged away from the first hooke joint at the other end; The motor flange is connected to the end of the motor sleeve away from the first hooke joint, and the servo motor is arranged on the motor flange; The reducer flange is arranged outside the motor flange and is fixedly connected with the motor flange; The bearing sleeve is arranged on the reducer flange, and the bearing sleeve is movably connected with the drive member through double-row angular contact ball bearings; The first sleeve is connected to the other end of the bearing sleeve; The nut flange is connected to the other end of the first sleeve, and the other end of the nut flange is fixedly connected with the first screw rod nut; The bellows is arranged on the nut flange, and the bellows covers the threaded screw rod; The second sleeve is fixedly connected with the second screw rod nut at one end, and is fixedly connected with the second hooke joint at the other end, and the second sleeve cooperates with the second screw rod nut to drive the second hooke joint to move axially relative to the first hooke joint. The moving platform comprises a moving platform body, a plurality of second mounting surface groups are arranged circumferentially at the center of the moving platform body, the second mounting surface groups are arranged at a first included angle with the plane in which the moving platform body is located, and one or more second mounting surfaces are arranged in each second mounting surface group; 4. A differential parallel micro-motion platform, characterized in that, A plurality of support structure assemblies are provided, the support structure assemblies comprise one or more support structures, the support structures are the support structures according to any one of claims 1-3, and the number of the support structure assemblies is the same as the number of the second mounting surface groups. ​ ​ The static platform comprises a static platform body, a plurality of first mounting surface groups are arranged circumferentially along the center of the static platform body, the number of the first mounting surface groups is the same as the number of the second mounting surface groups, the first mounting surface groups are arranged at a second included angle with the plane in which the static platform body is located, one or more first mounting surfaces are arranged in each of the first mounting surface groups, and the number of the first mounting surfaces is the same as the number of the second mounting surfaces; The support structure is connected between the first mounting surface and the second mounting surface, and the first mounting surface and the second mounting surface connected by the same support structure are parallel.

5. The differential parallel micro-motion platform according to claim 4, wherein The first mounting surface group comprises two or more first mounting surfaces, and two adjacent first mounting surfaces in the same first mounting surface group are arranged at a third included angle; The second mounting surface group comprises two or more second mounting surfaces, and two adjacent second mounting surfaces in the same second mounting surface group are arranged at a fourth included angle; Each support structure group comprises two or more support structures, including a first support structure and a second support structure, the first support structure is arranged between one of the first mounting surfaces in one of the first mounting surface groups and one of the second mounting surfaces in one of the second mounting surface groups, and the second support structure is arranged between another one of the first mounting surfaces in the same first mounting surface group and one of the second mounting surfaces in another second mounting surface group.

6. The differential parallel micro-motion platform according to claim 5, wherein, The first support structure and the second support structure in the same support structure group are arranged at a fifth included angle.

7. The differential parallel micro-motion platform according to any one of claims 4 to 6, characterized in that, The number of the first mounting surface groups, the second mounting surface groups and the support structure groups is three.

8. The differential parallel micro-motion platform according to claim 4, wherein The plurality of first mounting surface groups are arranged circumferentially on a first reference circle; The plurality of second mounting surface groups are arranged circumferentially on a second reference circle; The diameter of the second reference circle is smaller than the diameter of the first reference circle.

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