A wire stretching and welding apparatus and a metal mask posture adjustment method

Abstract

The application discloses a tensioning and welding device and a metal mask posture adjusting method. The tensioning and welding device comprises a tensioning device and a mask posture adjusting device. The tensioning device stretches a metal mask to a set position and places the metal mask on a metal frame. The mask posture adjusting device is used for adjusting the position deviation and posture deviation of the metal mask during the stretching and tensioning process. The mask posture adjusting device comprises a Y-direction moving mechanism, a Z-direction moving mechanism, an Rz adjusting mechanism and an RxRy adjusting mechanism. The RxRy adjusting mechanism is used for adjusting the Rx-direction deviation. The Z-direction adjusting mechanism and the RxRy adjusting mechanism are used for adjusting the Ry-direction deviation. The Rz adjusting mechanism is used for adjusting the Rz-direction deviation. The tensioning device and the Rz adjusting mechanism are used for adjusting the phi z posture deviation. The Rz adjusting mechanism and the Y-direction adjusting mechanism are used for adjusting the Sx posture deviation. The Rz adjusting mechanism is used for adjusting the Sz posture deviation. The technical scheme provided by the application can accurately adjust the posture of the metal mask and improve the evaporation precision of the display panel.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of display, in particular to a tensioning and welding device and a metal mask posture adjusting method. BACKGROUND

[0002] OLED (Organic Light-Emitting Diode) display is mainly produced by evaporation method, in which organic light-emitting material is evaporated on a display backplane according to a predetermined program, and generally, patterns on a mask are used to make various colors of materials evaporated on corresponding positions. The tensioning and welding device is a device for welding a metal mask plate on a metal frame after stretching the metal mask plate.

[0003] The tensioning and welding device is specifically used for stretching a metal mask plate and welding the metal mask plate on a metal frame in a mask manufacturing process, so as to be used for evaporation.

[0004] Deformation error generated in the process of fixing the mask plate by its carrier directly affects the quality of the flat panel display device. For the mask plate applied to the field of flat panel display device manufacturing and having high precision requirement, the more accurate the position of the pixel hole on the metal mask is, the closer to the theoretical design position, and the higher the quality of the mask frame is, and finally the better the quality of the display panel is.

[0005] The known tensioning and welding device only has the function of clamping and stretching the metal mask and welding the metal mask on the metal frame, and can only roughly adjust the position and posture of the metal mask by adjusting the tensioning force, and lacks means for accurate adjustment. SUMMARY

[0006] The embodiments of the present application provide a tensioning and welding device and a metal mask posture adjusting method, so as to accurately adjust the posture of the metal mask and improve the evaporation precision of the display panel.

[0007] In a first aspect, the embodiments of the present application provide a tensioning and welding device, which comprises a tensioning device and a mask posture adjusting device.

[0008] The tensioning device stretches a metal mask plate to a set position and places the metal mask plate on a metal frame; the mask posture adjusting device is used for adjusting position deviation and posture deviation of the metal mask plate in the process of stretching and tensioning; the mask posture adjusting device comprises a Y-direction motion mechanism, a Z-direction motion mechanism, an Rz adjusting mechanism and an RxRy adjusting mechanism.

[0009] The spacing of the clamping device of the tensioning device is used to adjust the φx attitude deviation of the metal mask; the RxRy adjusting mechanism is used to adjust the Rx attitude deviation of the metal mask; the Z-direction movement mechanism and the RxRy adjusting mechanism are used to adjust the Ry attitude deviation; the Rz adjusting mechanism is used to adjust the Rz attitude deviation of the metal mask; the tensioning device and the Rz adjusting mechanism are used to adjust the φz attitude deviation of the metal mask; the tensioning device is used to adjust the φy attitude deviation of the metal mask; the Rz adjusting mechanism and the Y-direction movement mechanism are used to adjust the Sx attitude deviation of the metal mask; and the Rz adjusting mechanism is used to adjust the Sz attitude deviation of the metal mask.

[0010] In a second aspect, the embodiments of the present application further provide a metal mask attitude adjusting method, which is suitable for the tensioning and welding device provided by any of the embodiments of the present application, and the metal mask attitude adjusting method comprises the following steps.

[0011] Step 101: performing preliminary position adjustment on the X direction, the Y direction and the Z direction of the metal mask, and performing preliminary attitude adjustment on the Rx direction movement, the Ry direction movement and / or the Rz direction movement of the metal mask.

[0012] Step 102: performing accurate measurement on the metal mask.

[0013] Step 103: when the metal mask has the φx attitude deviation, the φy attitude deviation and / or the φz attitude deviation, adjusting the φx attitude deviation by the spacing of the clamping device of the tensioning device, adjusting the φy attitude deviation by the tension of the tensioning device, and adjusting the φz attitude deviation by the tension of the tensioning device and the Rz adjusting mechanism.

[0014] Step 104: when the metal mask has the Sx attitude deviation and / or the Sz attitude deviation, adjusting the Sx attitude deviation by the Rz adjusting mechanism and the Y-direction movement mechanism, and adjusting the Sz attitude deviation by the Rz adjusting mechanism; and then returning to perform Step 102 until the metal mask has no attitude deviation.

[0015] In the present application, by setting the screen stretching device and the mask posture adjusting device in the screen stretching welding device, the screen stretching device includes the clamping device, the mask posture adjusting device includes the Y direction movement mechanism, the Z direction movement mechanism, the Rz adjusting mechanism and the RxRy adjusting mechanism, the adjustment can be carried out in each position and posture of X direction, Y direction, Z direction, Rx, Ry and Rz, the position deviation and the posture deviation of the metal mask plate in the stretching and tensioning process are effectively avoided, in addition, the parameter adjustment is carried out through the combination of each adjusting structure. For example, the Sx posture deviation is adjusted through the Rz adjusting mechanism and the Y direction movement mechanism. The embodiment provides a more fine deviation measurement and correction method, the metal mask posture is accurately adjusted, the accuracy of the screen stretching is improved, the mask opening position deviation on the metal mask plate is avoided, the evaporation accuracy of the display panel is improved, and the production yield of the display panel is improved. BRIEF DESCRIPTION OF DRAWINGS

[0016] Figure 1 is a manufacturing process schematic diagram of a metal mask plate provided by the embodiment of the present application;

[0017] Figure 2 is a horizontal ideal posture schematic diagram of a metal mask provided by the embodiment of the present application;

[0018] Figure 3 is a Rz posture deviation schematic diagram of a metal mask provided by the embodiment of the present application;

[0019] Figure 4 is a S z posture deviation schematic diagram of a metal mask provided by the embodiment of the present application;

[0020] Figure 5 is a φz posture deviation schematic diagram of a metal mask provided by the embodiment of the present application;

[0021] Figure 6 is a vertical ideal posture schematic diagram of a metal mask provided by the embodiment of the present application;

[0022] Figure 7 is a Rx posture deviation schematic diagram of a metal mask provided by the embodiment of the present application;

[0023] Figure 8 is a Sx posture deviation schematic diagram of a metal mask provided by the embodiment of the present application;

[0024] Figure 9 is a φx posture deviation schematic diagram of a metal mask provided by the embodiment of the present application;

[0025] Figure 10 is a Ry posture deviation schematic diagram of a metal mask provided by the embodiment of the present application;

[0026] Figure 11is a metal mask posture deviation schematic diagram provided by an embodiment of the present application;

[0027] Figure 12 is a structure schematic diagram of a net stretching and welding device provided by an embodiment of the present application;

[0028] Figure 13 is a structure schematic diagram of a posture adjusting device provided by an embodiment of the present application;

[0029] Figure 14 is a structure schematic diagram of a net stretching device provided by an embodiment of the present application;

[0030] Figure 15 is a structure schematic diagram of another posture adjusting device provided by an embodiment of the present application;

[0031] Figure 16 is a structure schematic diagram of an RxRy adjusting mechanism provided by an embodiment of the present application;

[0032] Figure 17 is a structure schematic diagram of an Rz adjusting mechanism provided by an embodiment of the present application;

[0033] Figure 18 is a structure schematic diagram of a Z-direction motion mechanism provided by an embodiment of the present application;

[0034] Figure 19 is a structure schematic diagram of a Y-direction motion mechanism provided by an embodiment of the present application;

[0035] Figure 20 is a structure schematic diagram of another posture adjusting device provided by an embodiment of the present application;

[0036] Figure 21 is a structure schematic diagram of another RxRy adjusting mechanism provided by an embodiment of the present application;

[0037] Figure 22 is a structure schematic diagram of another Rz adjusting mechanism provided by an embodiment of the present application;

[0038] Figure 23 is a structure schematic diagram of another Z-direction motion mechanism provided by an embodiment of the present application;

[0039] Figure 24 is a structure schematic diagram of another Y-direction motion mechanism provided by an embodiment of the present application;

[0040] Figure 25 is a flow schematic diagram of a metal mask posture adjusting method provided by an embodiment of the present application;

[0041] Figure 26 is a flow schematic diagram of another metal mask posture adjusting method provided by an embodiment of the present application. DETAILED DESCRIPTION

[0042] The application will be described in further detail below with reference to the drawings and embodiments. It is to be understood that the specific embodiments described herein are merely illustrative of the application and are not intended to limit the scope of the application. In addition, it is to be understood that, for ease of description, only the parts related to the application are shown in the drawings rather than all the structures.

[0043] As Figure 1 shown, Figure 1 is a schematic diagram of a manufacturing process of a metal mask provided by an embodiment of the application. In the manufacturing process of the mask, a pulling force is applied to both ends of the metal mask 601 to stretch the mask and then the mask is welded on the metal frame 600 so as to be used for evaporation. Figure 2 is a schematic diagram of a horizontal ideal posture of a metal mask provided by an embodiment of the application, Figure 3 is a schematic diagram of an Rz posture deviation of a metal mask provided by an embodiment of the application, Figure 4 is a schematic diagram of an S z posture deviation of a metal mask provided by an embodiment of the application, Figure 5 is a schematic diagram of a φz posture deviation of a metal mask provided by an embodiment of the application, Figure 6 is a schematic diagram of a vertical ideal posture of a metal mask provided by an embodiment of the application, Figure 7 is a schematic diagram of an Rx posture deviation of a metal mask provided by an embodiment of the application, Figure 8 is a schematic diagram of an Sx posture deviation of a metal mask provided by an embodiment of the application, Figure 9 is a schematic diagram of a φx posture deviation of a metal mask provided by an embodiment of the application, Figure 10 is a schematic diagram of an Ry posture deviation of a metal mask provided by an embodiment of the application, Figure 11 is a schematic diagram of a φy posture deviation of a metal mask provided by an embodiment of the application, as Figure 2 and Figure 6 shown, in the ideal state after the metal mask is stretched, the position and posture of the mask opening are linear ideal states. In the clamping and stretching process of the existing mask stretching device, the uneven contact of the clamping surface, the torque generated by the backward movement of each clamping unit due to gravity and other factors, the inconsistent displacement or vertical displacement and other factors cause the shape of the mask to change, showing a variety of postures, which indirectly affects the stretching precision of the mask. As Figure 3 , Figure 4 , Figure 5 , Figure 7 , Figure 8 , Figure 9 , Figure 10 , Figure 11 shown, due to the influence of the mask stretching device, the pixel vacancy of the metal mask shows eight different postures, which reduces the final mask precision, is difficult to repair, and even causes the mask to be scrapped in extreme cases.

[0044] The embodiment can define eight error parameters by the position or attitude error shown in the figure, such as Figures 3 to 11 Figure 3 As shown in the figure, Figure 3 The figure shows the metal mask Rz attitude deviation, the Rz attitude deviation refers to the rotation of the metal mask plate with the Z axis as the rotation axis; as Figure 4 Figure 4 The figure shows the metal mask S z attitude deviation, the S z attitude deviation refers to the S-shaped bending of the metal mask plate in the plane of the X-Y axis, the S-shaped bending is caused by the uneven tension of the diagonal of the metal mask plate, for example, the size of the tension F1 and F4 is greater than that of F2 and F3; as Figure 5 Figure 5 The figure shows the metal mask φz attitude deviation, the φz attitude deviation refers to the C-shaped bending of the metal mask plate in the plane of the X-Y axis, the C-shaped bending is caused by the uneven tension of the opposite sides of the metal mask plate, for example, the C-shaped bending is the size of the tension F2 and F4, which is greater than that of F1 and F3; as Figure 7 Figure 7 The figure shows the metal mask Rx attitude deviation, the Rx attitude deviation refers to the rotation of the metal mask plate with the X axis as the rotation axis; as Figure 8 Figure 8 The figure shows the metal mask Sx attitude deviation, the Sx attitude deviation refers to the S-shaped bending of the metal mask plate in the plane of the Z-Y axis; as Figure 9 Figure 9 The figure shows the metal mask φx attitude deviation, the φx attitude deviation refers to the C-shaped bending of the metal mask plate in the plane of the Z-Y axis; as Figure 10 Figure 10 The figure shows the metal mask Ry attitude deviation, the Ry attitude deviation refers to the rotation of the metal mask plate with the Y axis as the rotation axis; similarly, the Sy attitude deviation refers to the S-shaped bending of the metal mask plate in the plane of the X-Z axis; as Figure 11 Figure 11 The figure shows the metal mask φy attitude deviation, the φy attitude deviation refers to the C-shaped bending of the metal mask plate in the plane of the X-Z axis.

[0045] The present application relates to a kind of metal mask net welding equipment, particularly related to mask attitude adjusting device and attitude adjusting method for manufacturing AMOLED mask frame assembly.By controlling mask attitude adjusting device, the accurate adjustment of mask attitude is realized, so that metal mask is accurately welded on mask frame.

[0046] The embodiment of the present application provides a net welding equipment, comprising: a net device and a mask attitude adjusting device; ​​​​​​​​

[0047] The net stretching device stretches the metal mask to a set position and places the metal mask on the metal frame; the mask posture adjusting device is used for adjusting the position deviation and posture deviation of the metal mask in the stretching and tensioning process; the mask posture adjusting device comprises a Y-direction moving mechanism, a Z-direction moving mechanism, an Rz adjusting mechanism and an RxRy adjusting mechanism;

[0048] The spacing of the clamping device of the net stretching device is used for adjusting the φx posture deviation of the metal mask; the RxRy adjusting mechanism is used for adjusting the Rx posture deviation of the metal mask; the Z-direction moving mechanism and the RxRy adjusting mechanism are used for adjusting the Ry posture deviation; the Rz adjusting mechanism is used for adjusting the Rz posture deviation of the metal mask; the net stretching device and the Rz adjusting mechanism are used for adjusting the φz posture deviation of the metal mask; the net stretching device is used for adjusting the φy posture deviation of the metal mask; the Rz adjusting mechanism and the Y-direction moving mechanism are used for adjusting the Sx posture deviation of the metal mask; and the Rz adjusting mechanism is used for adjusting the Sz posture deviation of the metal mask.

[0049] In the embodiment of the present application, the net stretching device and the mask posture adjusting device are arranged in the net stretching and welding equipment, the net stretching device comprises a clamping device, the mask posture adjusting device comprises a Y-direction moving mechanism, a Z-direction moving mechanism, an Rz adjusting mechanism and an RxRy adjusting mechanism, and the adjustment can be simultaneously performed on each position and posture such as X-direction, Y-direction, Z-direction, Rx, Ry and Rz, so that the position deviation and posture deviation of the metal mask in the stretching and tensioning process are effectively avoided, and the parameter adjustment is further performed through the combination of each adjusting structure. For example, the Sx posture deviation is adjusted through the Rz adjusting mechanism and the Y-direction moving mechanism. The embodiment provides a more fine deviation measurement and correction method, realizes the accurate adjustment of the metal mask posture, improves the accuracy of the net stretching, avoids the position deviation of the mask opening on the metal mask, improves the evaporation precision of the display panel and improves the manufacturing yield of the display panel.

[0050] The above is the core idea of the present application, and the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the protection scope of the present application.

[0051] Figure 12 Fig. 1 is a structural schematic diagram of a net stretching and welding equipment provided by an embodiment of the present application, and a net stretching device 700 stretches and tensions the metal mask 601 to an accurate position and places the metal mask 601 on the metal frame 600. A mask posture adjusting device 800 is used for adjusting various postures and various mixed postures of the metal mask 601 in the stretching and tensioning process.

[0052] Optionally, the tensioning and welding device can further comprise a base, a workpiece table, a measurement and welding integrated system, a motion system and a mask pre-alignment device; the base is used to support the metal frame; the workpiece table is used to place the metal frame; the measurement and welding system is used to measure the position and attitude of the metal mask plate and weld the mask plate on the metal frame; the motion system is used to install and move the measurement and welding system; the mask pre-alignment device is used to compensate the offset of the mask plate in the Rz direction before the mask plate enters the tensioning process.

[0053] With reference to the drawings Figure 12 , the device is composed of a base 100, a workpiece table 200, a measurement and welding integrated system 300 (which can use a measurement head to check immediately after the welding head completes welding), a motion system 400, a mask pre-alignment device 500, a tensioning device 700, a mask attitude adjustment device 800, a mask handling robot 900 and a plate library unit 910. Figure 12 The metal mask plate 601 is placed on the metal frame 600. The base 100 can be a metal frame or a non-metal such as marble. The workpiece table 200 is used to place the metal frame 600. The measurement and welding integrated system 300 is used to measure the position and attitude of the metal mask plate 601 and weld the metal mask plate 601 on the metal frame. The motion system 400 is used to install and move the measurement and welding integrated system 300. The mask pre-alignment device 500 is used to compensate the offset of the mask plate in the Rz direction before the mask plate enters the tensioning process. The tensioning device 700 stretches and tensions the metal mask plate 601 to the precise position and places the metal mask plate 601 on the metal frame 600. The mask attitude adjustment device 800 is used to adjust various attitudes and various mixed attitudes of the metal mask plate 601 during the stretching and tensioning process.

[0054] As shown in Figure 13 , the base 100 is used to support the metal frame 600. The workpiece table 200 is used to place the metal frame 600. The measurement and welding integrated system 300 is used to measure the position and attitude of the metal mask plate 601 and weld the metal mask plate 601 on the metal frame 600. The motion system 400 is used to install and move the measurement and welding integrated system 300. The mask pre-alignment device 500 is used to compensate the offset of the mask plate in the Rz direction before the mask plate enters the tensioning process. The tensioning device 700 stretches and tensions the metal mask plate 601 to the precise position and places the metal mask plate 601 on the metal frame 600. The mask attitude adjustment device 800 is used to adjust various attitudes and various mixed attitudes of the metal mask plate 601 during the stretching and tensioning process. Figure 13is a structural schematic view of a posture adjusting device provided by an embodiment of the present application. The metal mask 601 reaches a target position by movement of the screen stretching device 700. The measurement and welding integrated system 300 measures and calculates the position and posture deviation of the mask pixel hole. The mask posture adjusting device 800 is installed at the bottom of the screen stretching device 700 and is used to carry the mask and adjust the position and posture of the mask. When the metal mask 601 has a position deviation in the Y / Z direction, the mask posture adjusting device 800 adjusts the position of the mask by adjusting the Y direction movement mechanism and the Z direction movement mechanism. When the metal mask has a position deviation in the X direction, the position deviation is compensated by adjusting the clamping device of the screen stretching device 700. When the metal mask has a posture deviation in the φx direction, the deviation is compensated by adjusting the distance of the clamping device of the screen stretching device 700. When the metal mask has a posture deviation in the Rx direction, the deviation is compensated by adjusting the RxRy adjusting mechanism of the mask posture adjusting device 800. When the metal mask has a posture deviation in the Ry direction, the deviation is compensated by adjusting the Z direction movement mechanism and the RxRy adjusting mechanism of the mask posture adjusting device 800. When the metal mask has a posture deviation in the Rz direction, the deviation is compensated by adjusting the Rz adjusting mechanism of the mask posture adjusting device 800. When the metal mask has a posture deviation in the φz direction, the deviation is compensated by adjusting the tension of the screen stretching device 700 and the Rz adjusting mechanism of the mask posture adjusting device 800. When the metal mask has a posture deviation in the φy direction, the deviation is compensated by adjusting the tension of the screen stretching device 700. When the metal mask has a posture deviation in the Sx direction, the deviation is compensated by adjusting the Rz adjusting mechanism and the Y direction movement mechanism of the mask posture adjusting device 800. When the metal mask has a posture deviation in the Sz direction, the deviation is compensated by the Rz adjusting mechanism of the mask posture adjusting device 800.

[0055] Optionally, the screen stretching and welding device further comprises a mask carrying manipulator 900 and a mask library unit 910. The mask carrying manipulator 900 is used to carry the metal mask after the screen stretching process from the workpiece table into the mask library unit 910.

[0056] Optionally, the screen stretching device can comprise a bottom plate, a guide rail pair, a motor, a screw rod pair, a connecting plate and a mask clamping and stretching device. The guide rail of the guide rail pair is installed on the bottom plate. The sliding block is connected with the connecting plate. The motor is installed on the bottom plate and is connected with the screw rod of the screw rod pair through a shaft coupling. The nut of the screw rod pair is installed on the connecting plate. The motor drives the movement of the connecting plate. The mask clamping and stretching device is installed on the bottom plate and is driven by the motor to move horizontally in the Y direction. The function of the mask clamping and stretching device is to clamp and stretch the mask. The motor drives the movement of the mask clamping and stretching device.

[0057] As shown in Figure 14 , the mask posture adjusting device 800 comprises a mask clamping and stretching device 801, a Y direction movement mechanism 802, a Z direction movement mechanism 803, a RxRy adjusting mechanism 804, a Rz adjusting mechanism 805 and a mask clamping and stretching device driving mechanism 806. The mask clamping and stretching device 801 is installed on the Y direction movement mechanism 802. The Y direction movement mechanism 802 is installed on the Z direction movement mechanism 803. The Z direction movement mechanism 803 is installed on the RxRy adjusting mechanism 804. The RxRy adjusting mechanism 804 is installed on the Rz adjusting mechanism 805. The Rz adjusting mechanism 805 is installed on the mask clamping and stretching device driving mechanism 806. The mask clamping and stretching device driving mechanism 806 is installed on the bottom plate of the screen stretching device 700. Figure 14This is a schematic diagram of a wire mesh tensioning device provided in an embodiment of the present invention. The tensioning device consists of a base plate 701, a guide rail pair 702, a motor 703, a lead screw pair 704, a connecting plate 705, and a mask clamping and stretching device 710. The guide rail of the guide rail pair 702 is mounted on the base plate, and the slider on the guide rail pair 702 is connected to the connecting plate 705. The motor 703 is mounted on the base plate and connected to the lead screw of the lead screw pair 704 via a coupling. The nut of the lead screw pair 704 is mounted on the connecting plate 705. Rotation of the motor 703 drives the connecting plate to move. The mask clamping and stretching device 710 is mounted on the base plate and is driven by the motor 703 to perform a horizontal Y-motion. The function of the mask clamping and stretching device 710 is to clamp and stretch the mask plate; the motor 703 drives the mask clamping and stretching device 710 to move.

[0058] It should be noted that the Y-axis motion mechanism is located at the bottom layer; the Z-axis motion mechanism and the Rz adjustment mechanism are located above the Y-axis motion mechanism; and the RxRy adjustment mechanism is located above the Z-axis motion mechanism and the Rz adjustment mechanism. Figure 15 This is a schematic diagram of another attitude adjustment device provided in an embodiment of the present invention, as shown below. Figure 15 As shown, the mask attitude adjustment device 800 consists of a Y-axis motion mechanism 810, a Z-axis motion mechanism 820, an Rz adjustment mechanism 830, and an RxRy adjustment mechanism 840. The spatial layout of the structure in the mask attitude adjustment device 800 must follow the principle that the Rx and Ry adjustment mechanisms are on the top layer, the Z and Rz mechanisms are in the middle, and the Y-axis motion mechanism is at the bottom, which facilitates the adjustment of various parameters.

[0059] Optionally, the RxRy adjustment mechanism may include: a top plate, a bottom plate, a steel ball, a linear motor, and a spring; the bottom plate is equipped with multiple linear motors and at least one steel ball, and the top plate has multiple ball-and-socket structures that respectively contact the tops of the multiple linear motors and the steel ball; the linear motors are used to perform vertical movement to drive the top plate to rotate around the steel ball, thereby realizing Rx-direction movement and Ry-direction movement; one end of the spring is fixed to the top plate, and the other end of the spring is fixed to the bottom plate to eliminate the gap between the ball-and-socket and the steel ball.

[0060] Figure 16 This is a schematic diagram of an RxRy adjustment mechanism provided in an embodiment of the present invention. The RxRy adjustment mechanism 840 consists of a top plate 8401, a bottom plate 8402, a steel ball 8403, a linear motor 8404, and a spring 8405. The bottom plate 8402 is equipped with three linear motors 8404 and one steel ball 8403. The top plate 8401 has four ball-and-socket structures, which respectively contact the tops of the three linear motors and the steel ball. The linear motors can move vertically, driving the top plate 8401 to rotate around the steel ball 8403, thus realizing the movement of Rx and Ry. One end of the spring 8405 is fixed to the top plate 8401, and the other end is fixed to the bottom plate 8402, used to eliminate the gap between the ball-and-socket structures and the steel ball.

[0061] Optionally, the Rz adjustment mechanism may include: a base, a rotary motor, and a top plate; the rotary motor is mounted on the base and is used to drive the top plate to move by rotation, thereby realizing the Rz-direction movement of the metal mask.

[0062] Figure 17 This is a schematic diagram of an Rz adjustment mechanism provided in an embodiment of the present invention. The Rz adjustment mechanism 830 consists of a base 8301, a rotary motor 8302, and a top plate 8303. The rotary motor 8302 is mounted on the base 8301 and rotates to drive the top plate 8303 to move, thereby adjusting the mask posture Rz.

[0063] Optionally, the Z-axis motion mechanism includes: a base, a rotary motor, a lead screw, a mounting plate, a vertical guide rail, an inclined guide rail, an inclined block, and a horizontal guide rail; the rotary motor is mounted on the base and drives the lead screw to rotate; the nut of the lead screw is mounted on the inclined block; the horizontal guide rail is mounted on the base; the slider of the horizontal guide rail is mounted on the bottom of the inclined block; the upper surface of the inclined block is an inclined plane, on which the inclined guide rail is mounted; the slider of the inclined guide rail is mounted on the mounting plate; the vertical guide rail is mounted on the base; the slider of the vertical guide rail is mounted on the mounting plate; the inclined plane converts the rotational motion of the rotary motor into the Z-axis motion of the mounting plate.

[0064] Figure 18 This is a schematic diagram of a Z-axis motion mechanism provided in an embodiment of the present invention. The Z-axis motion mechanism consists of a base 8201, a rotary motor 8202, a lead screw 8203, a mounting plate 8204, a vertical guide rail 8205, an inclined guide rail 8206, an inclined block 8207, and a horizontal guide rail 8208. The rotary motor 8202 is mounted on the base 8201 and drives the lead screw 8203 to rotate. The nut of the lead screw 8203 is mounted on the inclined block 8207. The horizontal guide rail 8208 is mounted on the base, and its slider is mounted on the bottom of the inclined block 8207. The upper surface of the inclined block 8207 is inclined, and the inclined guide rail 8206 is mounted thereon. The slider of the inclined guide rail 8206 is mounted on the mounting plate 8204. The vertical guide rail 8205 is mounted on the base, and its slider is mounted on the mounting plate 8204. The inclined surface converts the rotational motion of the motor into the vertical motion of the mounting plate, realizing the Z-axis lifting function of the device.

[0065] Optionally, the Y-axis motion mechanism includes: a mounting plate, a motor mover, a guide rail, a linear motor stator, and a slider; the guide rail and the linear motor stator are mounted on the base; the slider and the motor mover are mounted on the mounting plate; the mounting plate achieves Y-axis motion via a linear motor.

[0066] like Figure 19 As shown, Figure 19is a structural schematic view of a Y-direction motion mechanism provided by an embodiment of the present application. The Y-direction motion mechanism 810 is composed of a mounting plate 8101, a motor rotor 8102, a guide rail 8103, a linear motor stator 8104, and a slider 8105. The guide rail 8103 and the linear motor stator are mounted on the base 100, the slider 8105 and the motor rotor 8102 are mounted on the mounting plate 8101, and the mounting plate is pushed by the linear motor to realize linear motion in the Y direction.

[0067] The mask posture adjustment device can change the scheme of the Y-direction motion mechanism, the scheme of the RxRy motion mechanism, or the scheme of the Z-direction motion mechanism on the basis of the foregoing embodiments. New extended technical solutions are formed, and the changed Y-direction motion mechanism, the RxRy motion mechanism, and the Z-direction motion mechanism can be changed individually or in pairs. The present embodiment does not limit this, and the following is briefly described by taking several specific examples.

[0068] As shown in Figure 20 , Figure 20 is a structural schematic view of another posture adjustment device provided by an embodiment of the present application. The mask posture adjustment device 800 is composed of a Y-direction motion mechanism 850, a Z-direction motion mechanism 860, a rotating table 870, and an RxRy adjustment mechanism 880. The Y-direction motion mechanism 850 is mounted on the base 100, the Z-direction motion mechanism 860 is mounted on the rotor of the Y-direction motion mechanism 850, the rotating table 870 is mounted on the mounting plate of the Z-direction motion mechanism 860, and the RxRy adjustment mechanism 880 is mounted on the rotor of the rotating table 870. Through the motion of each part, adjustment of the mask posture is realized.

[0069] As shown in Figure 21 , Figure 21 is a structural schematic view of another RxRy adjustment mechanism provided by an embodiment of the present application. The RxRy adjustment mechanism 880 is composed of an Rx adjustment mechanism and an Ry adjustment mechanism. The Rx adjustment mechanism is composed of a top plate 8801, a motor 8802, and a bottom plate 8803. The motor 8802 is mounted on the bottom plate 8803, the motor rotating shaft is connected with the top plate 8801, and the motor rotating shaft is rotated to drive the top plate to rotate. The structure of the Ry adjustment mechanism is the same as that of the Rx adjustment mechanism, and includes a top plate 8804, a motor 8805, and a bottom plate 8806. Due to space limitation, the motor 8805 is placed inside the mechanism, the rotating shaft drives the top plate 8804 to rotate, thereby realizing Y-direction rotation.

[0070] As shown in Figure 22 , Figure 22Figure 7 is a structural schematic diagram of another Rz adjustment mechanism provided by an embodiment of the present application. The Rz adjustment mechanism 870 is a rotary table motor, which is connected with the lifting table 860 through a base mounting hole 8702, and is connected with the RxRy adjustment mechanism 880 through a rotary interface 8701, so as to drive the RxRy adjustment mechanism 880 to rotate.

[0071] As shown in Figure 23 , Figure 23 Figure 6 is a structural schematic diagram of another Z-direction motion mechanism provided by an embodiment of the present application. The Z-direction motion mechanism 860 is composed of a lifting table 8601, a rotary motor 8602, a lead screw 8603, a lead screw nut 8604, a guide sleeve 8605, a guide shaft 8606, a nut seat 8607, and a base 8608. The rotary motor 8602 is installed on the lifting table 8601, and drives the lead screw 8603 to rotate. The lead screw nut 8604 is installed on the nut seat 8607, and the nut seat 8607 is fixed on the base 8608. The rotary motion of the motor is converted to drive the lifting table 8601 to move vertically, so as to realize the Z-direction adjustment function of the mask posture adjustment device.

[0072] As shown in Figure 24 , Figure 24 Figure 5 is a structural schematic diagram of another Y-direction motion mechanism provided by an embodiment of the present application. The Y-direction motion mechanism 850 is composed of a motor 8501, a motor seat 8502, a guide rail 8503, a sliding block 8504, a lead screw 8505, a nut 8506, and a carrier 8507. The motor 8501 is installed on the base 100 through the motor seat 8502, and the motor shaft is connected with the lead screw 8505. The guide rail 8503 is installed on the base 100, and the sliding block 8504 of the guide rail 8503 is installed on the carrier 8507. The rotary motion of the motor 8501 drives the lead screw 8505 to rotate, and drives the nut 8506 to move linearly. The nut 8506 is installed on the carrier 8507, and drives the carrier 8507 to move linearly, so as to realize the linear motion in the Y direction.

[0073] Based on the same concept, the present application also provides a metal mask posture adjustment method, which is suitable for the screen welding device provided by any embodiment of the present application. Figure 25 Figure 8 is a flow schematic diagram of a metal mask posture adjustment method provided by an embodiment of the present application. As shown in Figure 25 , the method of the present embodiment comprises the following steps:

[0074] Step 101: preliminarily adjusting the X direction, Y direction, and Z direction on the metal mask, and preliminarily adjusting the Rx direction motion, Ry direction motion, and / or Rz direction motion on the metal mask.

[0075] Step 102: accurately measuring the metal mask.

[0076] Step 103: when the metal mask appears φx attitude deviation, φy attitude deviation and / or φz attitude deviation, the φx attitude deviation is adjusted by the clamping device spacing of the tensioning device; the φy attitude deviation is adjusted by the tension of the tensioning device; and the φz attitude deviation is adjusted by the tension of the tensioning device and the Rz adjustment mechanism;

[0077] Step 104: when the metal mask appears Sx attitude deviation and / or Sz attitude deviation, the Sx attitude deviation is adjusted by the Rz adjustment mechanism and the Y direction movement mechanism; the Sz attitude deviation is adjusted by the Rz adjustment mechanism; and then the step 102 is returned to be executed until the metal mask has no attitude deviation.

[0078] The embodiment completes the preliminary adjustment of the metal mask when the X direction, the Y direction and the Z direction on the metal mask are preliminarily adjusted, and the Rx direction movement, the Ry direction movement and / or the Rz direction movement on the metal mask are preliminarily adjusted. Thereafter, whether the φx attitude deviation, the φy attitude deviation and / or the φz attitude deviation exists is detected on the basis, and after the φx attitude deviation, the φy attitude deviation and / or the φz attitude deviation are adjusted, whether the Sx attitude deviation and / or the Sz attitude deviation exists is detected again, and the Sx attitude deviation and / or the Sz attitude deviation is adjusted. Because the φx attitude deviation, the φy attitude deviation and / or the φz attitude deviation are affected again when the Sx attitude deviation and / or the Sz attitude deviation is adjusted, the step 102 is returned again, so that the step 103 is executed again until the φx attitude deviation, the φy attitude deviation, the φz attitude deviation, the Sx attitude deviation and the Sz attitude deviation are satisfied at the same time. The above-mentioned process of fine adjustment of the metal mask attitude greatly improves the tensioning accuracy and avoids the shift of the mask opening.

[0079] In the embodiment, the tensioning device and the mask attitude adjustment device are arranged in the tensioning and welding equipment, the tensioning device includes the clamping device, the mask attitude adjustment device includes the Y direction movement mechanism, the Z direction movement mechanism, the Rz adjustment mechanism and the RxRy adjustment mechanism, and the adjustment can be simultaneously performed on each position and attitude of the X direction, the Y direction, the Z direction, Rx, Ry and Rz, so that the position deviation and the attitude deviation of the metal mask during the tensioning process are effectively avoided, and the parameter adjustment is further performed through the combination of each adjustment structure. For example, the Sx attitude deviation is adjusted by the Rz adjustment mechanism and the Y direction movement mechanism. The embodiment provides a more fine deviation measurement and correction method, realizes the accurate adjustment of the metal mask attitude, improves the tensioning accuracy, avoids the shift of the mask opening on the metal mask, improves the evaporation precision of the display panel and improves the production yield of the display panel.

[0080] On the basis of the above-mentioned embodiments, after adjusting the Sx attitude deviation and / or the Sz attitude deviation, further comprising:

[0081] Step 105: when the metal mask appears Rx attitude deviation, Ry attitude deviation and / or Rz attitude deviation, adjusting the Rx attitude deviation through the RxRy adjusting mechanism; adjusting the Ry attitude deviation through the RxRy adjusting mechanism and the Z-direction motion mechanism; adjusting the Rz attitude deviation through the Z-direction motion mechanism; and then returning to execute step 102 until the metal mask has no attitude deviation.

[0082] Step 106: when the metal mask appears X-direction, Y-direction and / or Z-direction position deviation, adjusting the X-direction position deviation through the tensioning device, adjusting the Y-direction position deviation through the Y-direction motion mechanism, and adjusting the Z-direction position deviation through the Z-direction motion mechanism; and then returning to execute step 102 until the metal mask has no attitude deviation and position deviation.

[0083] Continuing to refer to Figure 25 When the metal mask 601 appears Y / Z-direction position deviation, the mask attitude adjusting device 800 adjusts the position of the mask through adjusting the Y-direction motion mechanism and the Z-direction motion mechanism. When the metal mask appears X-direction position deviation, the position deviation is compensated by adjusting the clamping device of the tensioning device 700. When the metal mask appears φx attitude deviation, the deviation is compensated by adjusting the distance of the clamping device of the tensioning device 700. When the metal mask appears Rx attitude deviation, the deviation is compensated by adjusting the RxRy adjusting mechanism of the mask attitude adjusting device 800. When the metal mask appears Ry attitude deviation, the deviation is compensated by adjusting the Z-direction motion mechanism and the RxRy adjusting mechanism of the mask attitude adjusting device 800. When the metal mask appears Rz attitude deviation, the deviation is compensated by adjusting the Rz adjusting mechanism of the mask attitude adjusting device 800. When the metal mask appears φz attitude deviation, the deviation is compensated by adjusting the tension of the tensioning device 700 and the Rz adjusting mechanism of the mask attitude adjusting device 800. When the metal mask appears φy attitude deviation, the deviation is compensated by adjusting the tension of the tensioning device 700. When the metal mask appears Sx attitude deviation, the deviation is compensated by adjusting the Rz adjusting mechanism and the Y-direction motion mechanism of the mask attitude adjusting device 800. When the metal mask appears Sz attitude deviation, the deviation is compensated by adjusting the Rz adjusting mechanism of the mask attitude adjusting device 800.

[0084] Similarly, after the adjustment of the above-mentioned φx attitude deviation, φy attitude deviation, φz attitude deviation, Sx attitude deviation and Sz attitude deviation, the Rx attitude deviation, Ry attitude deviation and / or Rz attitude deviation are again corrected to be not over-standard, and after the adjustment of the Rx attitude deviation, Ry attitude deviation and / or Rz attitude deviation, the step S102 is returned to, so that the steps 103 and 104 are executed again to further improve the precision of the metal mask.

[0085] Similarly, the above-mentioned steps also cause deviations in the positions of the X direction, Y direction and / or Z direction, so the position deviations of the X direction, Y direction and / or Z direction are also adjusted to avoid over-standard data, and after the adjustment of the position deviations of the X direction, Y direction and / or Z direction, the step S102 is returned to, so that the steps 103, 104 and 105 are executed again to further improve the precision of the metal mask and ensure that all the parameters measured in the embodiment are not over-standard, the position of the metal mask is accurate, the attitude is accurate, and the subsequent mask precision is improved.

[0086] As shown in Figure 26 , Figure 26 is a flowchart of another metal mask attitude adjustment method provided by the embodiment of the application, which more clearly presents the specific adjustment process, that is, first, it is detected whether the Φx / φy / φz data is over-standard, and if so, the Φx / φy / φz is adjusted, and then it is detected whether the Φx / φy / φz data is over-standard, until the Φx / φy / φz data is not over-standard; after the Φx / φy / φz data is not over-standard, it is detected whether the Sx / Sz data is over-standard, and if so, the Sx / Sz data is adjusted, and the Φx / φy / φz data and the Sx / Sz data are continuously detected, until the Sx / Sz data is not over-standard; similarly, after the Sx / Sz data is not over-standard, it is detected whether the Rx / Ry / Rz data is over-standard, and if so, the Φx / φy / φz data, Sx / Sz data and Rx / Ry / Rz data are continuously detected, until the Rx / Ry / Rz data is not over-standard; after the Rx / Ry / Rz data is not over-standard, it is detected whether the X / Y / Z data is over-standard, and if the X / Y / Z data is over-standard, the Φx / φy / φz data, Sx / Sz data, Rx / Ry / Rz data and X / Y / Z data are continuously detected, until the X / Y / Z data is not over-standard, and this iterative process avoids the influence of each data on other data in the adjustment process, and improves the precision of the mask attitude.

[0087] Note that the above merely describes preferred embodiments of the present application and the principles of the technology applied. Those skilled in the art will understand that the present application is not limited to the specific embodiments described herein, and that various obvious changes, modifications and substitutions can be made without departing from the scope of the present application. Therefore, although the present application has been described in detail through the above embodiments, the present application is not limited to the above embodiments, and can include more other equivalent embodiments without departing from the concept of the present application, and the scope of the present application is determined by the scope of the claims.

Claims

1. A wire mesh welding device, characterized in that, include: Netting device and mask attitude adjustment device; The tensioning device stretches the metal mask to a set position and places it on a metal frame. The mask posture adjustment device is used to adjust the positional and posture deviations of the metal mask during the tensioning process. The mask posture adjustment device includes a Y-axis motion mechanism, a Z-axis motion mechanism, an Rz adjustment mechanism, and an RxRy adjustment mechanism. The Y-axis motion mechanism is located at the bottom layer. The Z-axis motion mechanism and the Rz adjustment mechanism are located above the Y-axis motion mechanism. The RxRy adjustment mechanism is located above the Z-axis motion mechanism and the Rz adjustment mechanism. The spacing of the mask clamping and stretching devices of the mesh tensioning device is used to adjust the φx attitude deviation of the metal mask; the RxRy adjustment mechanism is used to adjust the Rx attitude deviation of the metal mask; the Z-axis motion mechanism and the RxRy adjustment mechanism are used to adjust the Ry attitude deviation; the Rz adjustment mechanism is used to adjust the Rz attitude deviation of the metal mask; the mesh tensioning device and the Rz adjustment mechanism are used to adjust the φz attitude deviation of the metal mask; the mesh tensioning device is used to adjust the φy attitude deviation of the metal mask; the Rz adjustment mechanism and the Y-axis motion mechanism are used to adjust the Sx attitude deviation of the metal mask; the Rz adjustment mechanism is used to adjust the Sz attitude deviation of the metal mask. The metal frame lies in a plane containing mutually perpendicular X and Y axes, with the Z axis perpendicular to the X and Y axes. The Rz attitude deviation is the rotation of the metal mask about the Z-axis. The Sz attitude deviation is the S-shaped bend of the metal mask in the X and Y plane. The φz attitude deviation is the C-shaped bend of the metal mask in the X and Y plane. The Rx attitude deviation is the rotation of the metal mask about the X-axis. The Sx attitude deviation is the rotation of the metal mask about the X-axis. The mask exhibits an S-shaped bend in the ZY-axis plane; the φx attitude deviation is a C-shaped bend in the ZY-axis plane; the Ry attitude deviation is the rotation of the metal mask about the Y-axis; the φy attitude deviation is a C-shaped bend in the XZ-axis plane; wherein, the S-shaped bend is caused by uneven tension on the diagonal sides of the metal mask; the C-shaped bend is caused by uneven tension on the opposite sides of the metal mask. The mask clamping and stretching device is used to clamp the metal mask plate, and at least two of the mask clamping and stretching devices move along the Y-axis to adjust the stretching of the metal mask plate in the Y direction.

2. The wire mesh welding equipment according to claim 1, characterized in that, Also includes: Base, workpiece stage, integrated measurement and welding system, motion system, and mask pre-alignment device; The base is used to support the metal frame; The workpiece stage is used to place the metal frame; the measurement and welding system is used to measure the position and orientation of the metal mask and weld the mask onto the metal frame; the motion system is used to install the measurement and welding system and drive the measurement and welding system to move; the mask pre-alignment device is used to compensate for the offset of the mask in the Rz direction before the metal mask enters the wire mesh stretching process.

3. The wire mesh welding equipment according to claim 1, characterized in that, Also includes: Mask handling robot and plate storage unit; The mask handling robot is used to transport the metal mask after the wire mesh stretching process from the workpiece table into the mask storage unit.

4. The wire mesh welding equipment according to claim 1, characterized in that, The tensioning device includes: a base plate, a guide rail pair, a motor, a lead screw pair, a connecting plate, and a mask clamping and stretching device; The guide rail of the guide rail pair is mounted on the base plate; the slider is connected to the connecting plate; the motor is mounted on the base plate and connected to the lead screw of the lead screw pair via a coupling; the nut of the lead screw pair is mounted on the connecting plate, and the motor drives the connecting plate to move; the mask clamping and stretching device is mounted on the base plate and is driven by the motor to perform horizontal Y-motion; the function of the mask clamping and stretching device is to clamp and stretch the mask plate, and the motor drives the mask clamping and stretching device to move.

5. The wire mesh welding equipment according to claim 1, characterized in that, The RxRy adjustment mechanism includes: a top plate, a bottom plate, a steel ball, a linear motor, and a spring; The base plate is equipped with multiple linear motors and at least one steel ball. The top plate has multiple ball-and-socket structures that respectively contact the tops of the multiple linear motors and the steel ball. The linear motors are used to perform vertical motion to drive the top plate to rotate around the steel ball, realizing Rx-axis motion and Ry-axis motion. One end of the spring is fixed to the top plate, and the other end of the spring is fixed to the base plate to eliminate the gap between the ball-and-socket and the steel ball.

6. The wire mesh welding equipment according to claim 1, characterized in that, The Rz adjustment mechanism includes: a base, a rotary motor, and a top plate; The rotary motor is mounted on the base and is used to drive the top plate to move by rotating, thereby realizing the Rz-direction movement of the metal mask.

7. The wire mesh welding equipment according to claim 1, characterized in that, The Z-axis motion mechanism includes: a base, a rotary motor, a lead screw, a mounting plate, a vertical guide rail, an inclined guide rail, an inclined block, and a horizontal guide rail; the rotary motor is mounted on the base and drives the lead screw to rotate; the nut of the lead screw is mounted on the inclined block; the horizontal guide rail is mounted on the base; the slider of the horizontal guide rail is mounted on the bottom of the inclined block; the upper surface of the inclined block is an inclined plane, on which the inclined guide rail is mounted; the slider of the inclined guide rail is mounted on the mounting plate; the vertical guide rail is mounted on the base; the slider of the vertical guide rail is mounted on the mounting plate; the inclined plane converts the rotational motion of the rotary motor into the Z-axis motion of the mounting plate.

8. The wire mesh welding equipment according to claim 1, characterized in that, The Y-axis motion mechanism includes: a mounting plate, a motor mover, a guide rail, a linear motor stator, and a slider; The guide rail and the linear motor stator are mounted on the base; the slider and the motor mover are mounted on the mounting plate; the mounting plate achieves Y-axis movement via the linear motor.

9. A method for adjusting the posture of a metal mask, characterized in that, The mesh welding equipment applicable to any one of claims 1-8 comprises: Step 101: Perform preliminary position adjustments on the metal mask in the X, Y, and Z directions; perform preliminary attitude adjustments on the Rx, Ry, and / or Rz directions of the metal mask. Step 102: Perform precise measurements on the metal mask; Step 103: When the metal mask exhibits φx attitude deviation, φy attitude deviation, and / or φz attitude deviation, the φx attitude deviation is adjusted by the spacing of the mask clamping and stretching devices of the mesh stretching device; the φy attitude deviation is adjusted by the tension of the mesh stretching device; and the φz attitude deviation is adjusted by the tension of the mesh stretching device and the Rz adjustment mechanism. Step 104: When the metal mask exhibits an Sx attitude deviation and / or an Sz attitude deviation, the Sx attitude deviation is adjusted using the Rz adjustment mechanism and the Y-axis motion mechanism; the Sz attitude deviation is adjusted using the Rz adjustment mechanism; then, return to step 102 until the metal mask has no attitude deviation.

10. The method for adjusting the posture of a metal mask according to claim 9, characterized in that, After adjusting for the Sx attitude deviation and / or Sz attitude deviation, the following is also included: Step 105: When the metal mask exhibits Rx attitude deviation, Ry attitude deviation, and / or Rz attitude deviation, the Rx attitude deviation is adjusted using the RxRy adjustment mechanism; the Ry attitude deviation is adjusted using the RxRy adjustment mechanism and the Z-axis motion mechanism; the Rz attitude deviation is adjusted using the Z-axis motion mechanism; then, return to step 102 until the metal mask has no attitude deviation. Step 106: When the metal mask exhibits positional deviations in the X, Y, and / or Z directions, the X-direction positional deviation is adjusted by the tensioning device, the Y-direction positional deviation is adjusted by the Y-direction motion mechanism, and the Z-direction positional deviation is adjusted by the Z-direction motion mechanism; then return to step 102 until the metal mask has no attitude or positional deviations.

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